A layer-by-layer vacuum evaporation device for crystal tuning fork and its preparation process

Abstract

This application relates to a layer-by-layer vacuum evaporation device for a crystal tuning fork and its preparation process. The device comprises a frame and a vacuum evaporation chamber mounted on the frame. A evaporation turntable is rotatably mounted in the vacuum evaporation chamber. A plurality of evaporation mounting racks are equidistantly spaced along the circumference of the evaporation turntable. The evaporation mounting racks are rotatably mounted on the evaporation turntable. At least one mask plate is mounted on the evaporation mounting rack, and the mask plate is used to accommodate the tuning fork. The vacuum evaporation chamber has multiple molybdenum evaporation boats located at the center of the evaporation turntable. The molybdenum evaporation boats are used to place and evaporate metal evaporation materials. The vacuum evaporation chamber is provided with a flip assembly. When the evaporation mounting racks pass through the flip assembly, they rotate so that the mask plates pass obliquely over the molybdenum evaporation boats. This application improves production efficiency.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum evaporation, and in particular to a layer-by-layer vacuum evaporation device for crystal oscillator tuning fork sheets and a preparation process thereof. Background Art

[0002] Tuning forks have the advantages of small size, low cost, low power consumption, high reliability, strong overload resistance and mass production, making them suitable for military fields such as tactical weapon guidance, micro-satellite attitude control, micro-aircraft navigation, combat platform stability control and micro-robots. They can also be widely used in civilian fields such as automobile stability control systems, camera anti-shake systems, medical equipment, sports machinery and toys.

[0003] When producing tuning fork pieces, metal electrodes need to be coated on both sides of the piece through vacuum coating or vacuum sputtering. When vacuum coating is used to prepare a grooved quartz tuning fork resonator such as that described in Application No. 2023100073088, in addition to uniformly coating both sides of the tuning fork piece, electrodes also need to be formed on the surfaces of both side walls of the piece. Therefore, when using vacuum coating, it is necessary to adjust the angle between the tuning fork piece and the incident direction of the film material molecules so that continuous and uniform thin film electrodes are formed on both sides of the tuning fork piece.

[0004] However, with current vacuum evaporation equipment, after the tuning fork piece completes coating on one side wall, it is necessary to wait for the equipment to cool down before changing the angle of the tuning fork piece to coat the other side wall. This will result in low production efficiency, so there is room for improvement. Summary of the Invention

[0005] In order to improve production efficiency, the present application provides a layer-by-layer vacuum evaporation device for crystal tuning fork sheets and a preparation process thereof.

[0006] The present application provides a layer-by-layer vacuum evaporation device for crystal oscillator tuning fork sheets, which adopts the following technical solutions:

[0007] A layer-by-layer vacuum evaporation device for a crystal tuning fork comprises a frame and a vacuum evaporation chamber mounted on the frame. A evaporation turntable is rotatably mounted in the vacuum evaporation chamber. A plurality of evaporation mounting racks are equidistantly spaced along the circumference of the evaporation turntable. The evaporation mounting racks are rotatably mounted on the evaporation turntable. At least one mask plate is mounted in the evaporation mounting racks, and the mask plate is used to accommodate the tuning fork.

[0008] The vacuum evaporation chamber is provided with a plurality of evaporation molybdenum boats at the center of the evaporation turntable, and the evaporation molybdenum boats are used to place and evaporate metal evaporation materials;

[0009] A turning assembly is provided in the vacuum evaporation chamber, and the evaporation mounting frame rotates when passing through the turning assembly so that the mask plate passes over the evaporation molybdenum boat at an angle.

[0010] Optionally, the mask plate includes an upper mask sheet, an upper positioning sheet, a lower positioning sheet and a lower mask sheet stacked in sequence, and a plurality of positioning holes are provided around the upper mask sheet, the upper positioning sheet, the lower positioning sheet and the lower mask sheet; a plurality of positioning grooves are distributed in an array on the upper positioning sheet and the lower positioning sheet, and the positioning grooves are used to accommodate tuning fork sheets; a plurality of mask grooves are distributed in an array on the upper mask sheet and the lower mask sheet, and the positions of the mask grooves are opposite to the positions of the positioning grooves one by one.

[0011] Optionally, the positioning groove includes a main groove and auxiliary grooves respectively connected to both sides of the main groove, the main groove is used to accommodate the tuning fork piece, and the auxiliary grooves are connected to the side walls of the tuning fork piece;

[0012] The mask groove includes a front electrode groove and side electrode grooves respectively connected to both sides of the front electrode groove. The front electrode groove is opposite to the main groove, and the side electrode groove is opposite to the auxiliary groove.

[0013] Optionally, the evaporation mounting frame includes a main mounting frame and a connecting shaft arranged on the main mounting frame, the connecting shaft is rotatably mounted on the evaporation turntable, the main mounting frame is provided with a main mounting groove, a plurality of the mask plates are inserted into the main mounting groove, and the side walls between adjacent mask plates are abutted against each other, the connecting shaft cooperates with the flipping assembly to drive the main mounting frame to flip so that the two surfaces of the mask plate can be tilted toward the evaporation molybdenum boat respectively.

[0014] Optionally, the flip assembly includes a main flip gear and a main flip rack, the main flip gear is coaxially mounted on the connecting shaft, the main flip gear has a first number of main tooth portions, the main flip rack is arranged in the vacuum evaporation chamber and is located on one side of the evaporation turntable, at least two main flip teeth are arranged at intervals on the surface of the main flip rack facing the evaporation turntable, the main flip teeth are meshed with the main tooth portions, and when the evaporation turntable rotates to pass the evaporation mounting frame through the flip assembly, the main flip teeth are engaged with the main tooth portions to drive the connecting shaft to rotate a first angle.

[0015] Optionally, a secondary flip gear is coaxially mounted on the connecting shaft, the secondary flip gear is spaced apart from the main flip gear, and the secondary flip gear has a second number of secondary teeth. A sliding rack is slidingly arranged on one side of the evaporation turntable in the vacuum evaporation chamber, the main flip rack is arranged on the sliding rack, and a secondary flip rack is arranged on the sliding rack. The secondary flip rack is spaced apart from the main flip rack, and the secondary flip rack is meshed with the secondary teeth. A driving part connected to the sliding rack is provided on the vacuum evaporation chamber, and the driving part is used to drive the secondary flip rack to mesh with the secondary teeth, and the secondary flip tooth meshes with the secondary teeth to drive the connecting shaft to rotate a second angle.

[0016] Optionally, the driving part is a driving cylinder, the cylinder body of the driving cylinder is arranged on the outer wall of the vacuum evaporation chamber, and the output rod of the driving cylinder extends into the vacuum evaporation chamber to be connected to the sliding frame.

[0017] Optionally, a main connecting shaft is fixed on the main flip rack, and a secondary connecting shaft is fixed on the secondary flip rack, the main flip rack is slidably mounted on the sliding frame through the main connecting shaft, and the secondary flip rack is slidably mounted on the sliding frame through the secondary connecting shaft, a switching frame is arranged along the sliding direction of the sliding frame in the vacuum evaporation chamber, and a main switching block is provided on the switching frame, and a main lifting plane and a main disengagement inclined plane cooperating with the main connecting shaft and a secondary switching block are provided on the switching frame, and a secondary lifting plane and a secondary disengagement inclined plane cooperating with the secondary connecting shaft are provided on the secondary switching block, the main switching block and the secondary switching block are arranged at intervals, and a switching accommodating cavity is formed between the main switching block and the secondary switching block, a main reset spring is sleeved on the main connecting shaft, and a secondary reset spring is sleeved on the secondary connecting shaft.

[0018] Optionally, the end face of the main connecting shaft is provided with a main end conical surface that cooperates with the main disengagement inclined surface, and the end face of the secondary connecting shaft is provided with a secondary end conical surface that cooperates with the secondary disengagement inclined surface.

[0019] A preparation process provided in this application adopts the following technical solution:

[0020] A preparation process using the above-mentioned layer-by-layer vacuum evaporation device for a crystal oscillator tuning fork piece comprises the following steps:

[0021] The mask plate equipped with the tuning fork piece is mounted on the evaporation mounting frame, and the vacuum evaporation chamber is evacuated;

[0022] In a vacuum environment, the evaporation mounting frame is flipped by a flip assembly so that the mask plate is tilted and passes over the evaporation molybdenum boat;

[0023] A chromium layer is deposited on the surface and side of the tuning fork piece by heating a molybdenum evaporation boat to evaporate the metal evaporation material;

[0024] vapor-depositing a chromium-tin alloy layer on the chromium layer;

[0025] vapor-depositing a chromium-silver alloy layer on the chromium-tin alloy layer;

[0026] A silver layer is evaporated on the chromium-silver alloy layer to complete the coating on the surface and side of the tuning fork piece.

[0027] In summary, this application includes at least one of the following beneficial technical effects:

[0028] The present application uses vacuum evaporation equipment to install a mask plate equipped with a tuning fork piece on an evaporation mounting frame. In a vacuum environment, the evaporation turntable rotates, driving the evaporation mounting frame to pass through a flip assembly. The flip assembly will flip the evaporation mounting frame at a certain angle, so that the mask plate is tilted and passes over the top of the evaporation molybdenum boat. The metal evaporation material evaporated in the evaporation molybdenum boat will be evaporated on the surface and side of the tuning fork piece of the mask plate. Among them, each time the evaporation mounting frame passes through the flip assembly, the flip assembly will flip the evaporation mounting frame at a certain angle, so that the mask plate can complete the coating of the two surfaces and two sides of the tuning fork piece on the evaporation molybdenum boat at different tilt angles, thereby effectively improving the production efficiency of the tuning fork piece coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a structural diagram of vacuum evaporation equipment.

[0030] Figure 2 It is a schematic diagram of the evaporation state of the vacuum evaporation chamber.

[0031] Figure 3 It is a structural diagram of the mask plate.

[0032] Figure 4 This is a schematic diagram of the explosion of the mask plate.

[0033] Figure 5 It is a structural diagram of the positioning groove.

[0034] Figure 6 It is a structural diagram of the mask groove.

[0035] Figure 7 It is a structural diagram of the flip component.

[0036] Figure 8 It is a structural diagram of the drive unit.

[0037] Figure 9 It is a schematic diagram of the state in which the main flip gear and the main flip rack are engaged.

[0038] Figure 10It is a schematic diagram of the state in which the auxiliary flip gear and the auxiliary flip rack are engaged.

[0039] Figure 11 It is a flow chart of the preparation process.

[0040] Explanation of the reference numerals: 1. frame; 2. vacuum evaporation chamber; 3. chamber door; 4. evaporation turntable; 5. evaporation mounting frame; 51. main mounting frame; 52. connecting shaft; 6. mask plate; 61. upper mask sheet; 62. upper positioning sheet; 63. lower positioning sheet; 64. lower mask sheet; 65. positioning groove; 651. main groove; 652. auxiliary groove; 66. mask groove; 661. front electrode groove; 662. side electrode groove; 67. positioning hole; 7. evaporation molybdenum boat; 8. flip assembly; 81. main flip gear Wheel; 811, main tooth portion; 82, main flip rack; 821, main flip tooth; 83, auxiliary flip gear; 831, auxiliary tooth portion; 84, sliding frame; 85, auxiliary flip rack; 851, auxiliary flip tooth; 86, driving portion; 87, main connecting shaft; 88, auxiliary connecting shaft; 89, main return spring; 90, auxiliary return spring; 91, switching frame; 92, main switching block; 93, main lifting plane; 94, main disengagement inclined plane; 95, auxiliary switching block; 96, auxiliary lifting plane; 97, auxiliary disengagement inclined plane. DETAILED DESCRIPTION

[0041] The following is combined with Figure 1-11 This application is described in further detail.

[0042] Example 1

[0043] A layer-by-layer vacuum evaporation device for a crystal oscillator tuning fork piece forms metal film electrodes on the two surfaces and two side surfaces of the tuning fork piece by vacuum evaporation.

[0044] Reference Figure 1 and Figure 2 As shown, the layer-by-layer vacuum evaporation equipment for crystal tuning fork pieces includes a frame 1 and a vacuum evaporation chamber 2 arranged on the frame 1. The vacuum evaporation chamber 2 is cylindrical as a whole. The vacuum evaporation chamber 2 has an evaporation chamber inside. The vacuum evaporation chamber 2 has an opening. A chamber door 3 is hingedly installed on the opening of the vacuum evaporation chamber 2. The evaporation chamber can be sealed by the chamber door 3. The vacuum evaporation chamber 2 is connected to a vacuum tube. The evaporation chamber can be evacuated by the vacuum tube so that the interior of the evaporation chamber maintains a negative pressure vacuum state.

[0045] A rotatable evaporation turntable 4 is mounted in the vacuum deposition chamber 2. The central axis of the evaporation turntable 4 is located on the central axis of the vacuum deposition chamber 2. A rotating shaft is fixed to the center of the evaporation turntable 4. The rotating shaft extends through the vacuum deposition chamber 2 and into the frame 1. A drive motor connected to the rotating shaft is provided on the frame 1. The drive motor drives the evaporation turntable 4 to rotate within the vacuum deposition chamber 2. It is worth noting that a mechanical seal is provided at the location where the rotating shaft extends through the vacuum deposition chamber 2.

[0046] Several evaporation mounting racks 5 are evenly spaced along the circumference of the evaporation turntable 4. The number of evaporation mounting racks 5 can be adjusted based on actual conditions. In one embodiment, there are 18 evaporation mounting racks 5. The evaporation mounting racks 5 are rotatably mounted on the evaporation turntable 4. At least one mask plate 6 is mounted in the evaporation mounting rack 5 to accommodate a tuning fork.

[0047] The vacuum evaporation chamber 2 is provided with a plurality of evaporation molybdenum boats 7 at the center of the evaporation turntable 4. The evaporation molybdenum boats 7 are used to place and evaporate metal evaporation materials. A resistance evaporation source is provided on the chamber door 3 of the vacuum evaporation chamber 2, and the evaporation molybdenum boats 7 are arranged on the resistance evaporation source. By placing the metal evaporation material on the evaporation molybdenum boats 7 and heating the evaporation molybdenum boats 7 by the resistance evaporation source, the evaporation of the metal evaporation material is achieved. In this embodiment, there are three evaporation molybdenum boats 7, which are arranged side by side, and chromium, tin and silver are placed in each evaporation molybdenum boat 7 respectively. By controlling the heating of the three evaporation molybdenum boats 7, chromium, tin and silver can be evaporated separately, or they can be evaporated together to achieve a chromium, tin and / or silver alloy.

[0048] As the evaporation turntable 4 rotates continuously, the mask plate 6 in the evaporation mounting frame 5 can continuously circulate over the top of the evaporation molybdenum boat 7, so that the tuning fork piece on the mask plate 6 is coated. Among them, not only the front side of the tuning fork piece on the mask plate 6 needs to be coated with a film, but also the back side of the tuning fork piece and both side walls of the tuning fork piece need to be coated with thin film electrodes. Therefore, the evaporation mounting frame 5 needs to be flipped so that the mask plate 6 can enter the top of the evaporation molybdenum boat 7 at different inclinations and after flipping.

[0049] Therefore, a flip assembly 8 is provided in the vacuum evaporation chamber 2 , and the flip assembly 8 deviates from being directly above the evaporation molybdenum boat 7 . When the evaporation mounting frame 5 passes through the flip assembly 8 , it rotates so that the mask plate 6 passes over the evaporation molybdenum boat 7 at an angle.

[0050] The structures and working processes of the mask plate 6 , the evaporation mounting frame 5 and the flip assembly 8 are described in detail below.

[0051] Reference Figure 3 and Figure 4As shown, the mask plate 6 includes an upper mask piece 61, an upper positioning piece 62, a lower positioning piece 63 and a lower mask piece 64 stacked in sequence. A plurality of positioning grooves 65 are distributed in an array on the upper positioning piece 62 and the lower positioning piece 63. The positioning grooves 65 are used to accommodate the tuning fork piece. A plurality of mask grooves 66 are distributed in an array on the upper mask piece 61 and the lower mask piece 64. The positions of the mask grooves 66 are opposite to the positions of the positioning grooves 65 one by one. A plurality of positioning holes 67 are provided around the upper mask piece 61, the upper positioning piece 62, the lower positioning piece 63 and the lower mask piece 64. After the tuning fork piece is installed in the positioning groove 65, the mask plate 6 is fixed and installed by inserting screws and then nuts into the positioning holes 67.

[0052] Reference Figure 5 As shown, the positioning groove 65 includes a main groove 651 and auxiliary grooves 652 respectively connected to both sides of the main groove 651. The main groove 651 is used to accommodate the tuning fork piece, and the auxiliary groove 652 is connected to the side wall of the tuning fork piece. Figure 6 As shown, the mask groove 66 includes a front electrode groove 661 and side electrode grooves 662 respectively connected to both sides of the front electrode groove 661. The front electrode groove 661 is opposite to the main groove 651, and the side electrode groove 662 is opposite to the auxiliary groove 652. Therefore, when the metal vapor formed by the evaporation of the metal evaporation material is sputtered on the mask plate 6, the metal vapor can form thin film electrodes on both surfaces of the tuning fork piece through the front electrode groove 661 and form thin film electrodes on both side walls of the tuning fork piece through the side electrode groove 662.

[0053] Reference Figure 7 As shown, the evaporation mounting frame 5 includes a main mounting frame 51 and a connecting shaft 52 arranged on the main mounting frame 51. The main mounting frame 51 is arranged in a door shape as a whole, that is, one end of the main mounting frame 51 is open and the other end is closed. A main mounting groove is provided on the main mounting frame 51, and several mask plates 6 are inserted into the main mounting groove. The side walls between adjacent mask plates 6 are abutted against each other. When the mask plates 6 are in the main mounting frame 51, the two surfaces of all mask plates 6 are on the same plane.

[0054] The connecting shaft 52 is fixed to the closed end of the main mounting frame 51 and is rotatably mounted on the evaporation turntable 4. The connection between the connecting shaft 52 and the evaporation turntable 4 provides a certain degree of rotational resistance, so that the connecting shaft 52 will not rotate on the evaporation turntable 4 under normal conditions. The connecting shaft 52 cooperates with the turning assembly 8 to drive the main mounting frame 51 to turn so that the two surfaces of the mask plate 6 can be tilted toward the evaporation molybdenum boat 7.

[0055] Therefore, as the evaporation turntable 4 rotates in a circle, the evaporation mounting frame 5 will be flipped by a certain angle each time it passes through the flipping assembly 8, so that the mask plate 6 can pass over the evaporation molybdenum boat 7 at different inclination angles, and the metal vapor can be sputtered on the mask plate 6 at different incident angles until the mask plate 6 is flipped 360°, thereby achieving the coating of thin film electrodes on the two surfaces and two side walls of the tuning fork piece on the mask plate 6.

[0056] Reference Figure 7 As shown, the flip assembly 8 includes a main flip gear 81 and a main flip rack 82. The main flip gear 81 is coaxially fixedly mounted on the connecting shaft 52. The main flip gear 81 has a first number of main teeth 811. In one embodiment, the first number of main teeth 811 is 6, that is, the angle between each main tooth 811 is 60 degrees.

[0057] The main flip rack 82 is arranged in the vacuum evaporation chamber 2 and is located on one side of the evaporation turntable 4. At least two main flip teeth 821 are arranged at intervals on the surface of the main flip rack 82 facing the evaporation turntable 4. In this embodiment, there are two main flip teeth 821, and the two main flip teeth 821 are meshed with the main tooth portion 811. The main flip gear 81 will rotate under the action of the main flip teeth 821. When the evaporation turntable 4 rotates to pass the evaporation mounting bracket 5 through the flip assembly 8, the main flip teeth 821 mesh with the main tooth portion 811 to drive the connecting shaft 52 to rotate the first angle a. Figure 9 shown.

[0058] In this embodiment, the first angle a is 120°, that is, each time the evaporation mounting frame 5 passes through the flip assembly 8, the evaporation mounting frame 5 will rotate 120°, so that the mask plate 6 passes over the evaporation molybdenum boat 7 to complete the coating after each rotation of 120°.

[0059] Since the mask plate 6 needs to be coated on two surfaces, namely the two side walls, in order to achieve more tilt angles for the mask plate 6 to pass over the top of the molybdenum evaporation boat 7, the metal vapor can be sputtered on the mask plate 6 at different incident angles as much as possible, thereby ensuring that the thin film electrodes on the two surfaces and two side walls of the mask plate 6 are more uniform.

[0060] In the present application, a secondary flip gear 83 is coaxially mounted on the connecting shaft 52. The secondary flip gear 83 is spaced apart from the main flip gear 81, and the secondary flip gear 83 has a second number of secondary teeth 831. In one embodiment, the first number of secondary teeth 831 is 12, i.e., the angle between each secondary tooth 831 is 30°.

[0061] A sliding rack 84 is slidingly provided on one side of the evaporation turntable 4 in the vacuum evaporation chamber 2, and a main flip rack 82 is provided on the sliding rack 84, and a secondary flip rack 85 is provided on the sliding rack 84. The secondary flip rack 85 is spaced apart from the main flip rack 82, and at least two secondary flip teeth 851 are spaced apart on the surface of the secondary flip rack 85 facing the evaporation turntable 4. The secondary flip teeth 851 are meshed with the secondary tooth portion 831. A driving part 86 connected to the sliding rack 84 is provided on the vacuum evaporation chamber 2, and the driving part 86 is used to drive the secondary flip rack 85 to engage with the secondary tooth portion 831, and the secondary flip teeth 851 engage with the secondary tooth portion 831 to drive the connecting shaft 52 to rotate the second angle b, with reference to FIG. Figure 10 shown.

[0062] In this embodiment, two auxiliary flip teeth 851 are provided, and the second angle b is 60°, that is, each time the evaporation mounting frame 5 passes through the flip assembly 8, the evaporation mounting frame 5 will rotate 60°, so that the mask plate 6 will complete the coating after passing over the evaporation molybdenum boat 7 each time it rotates 60°.

[0063] It is worth noting that after the evaporation turntable 4 rotates a certain number of times, causing the evaporation mounting frame 5 to rotate a certain number of times at the first angle each time, the driving unit 86 can drive the sliding frame 84 to slide, so that the engagement between the main flip rack 82 and the main flip gear 81 on the sliding frame 84 is disengaged, and the secondary flip rack 85 and the secondary flip gear 83 on the sliding frame 84 are engaged. In this way, when the evaporation turntable 4 rotates subsequently, the evaporation mounting frame 5 will rotate at the second angle each time, changing the inclination angle of the mask plate 6 passing over the evaporation molybdenum boat, so that the metal vapor can be sputtered on the tuning fork piece of the mask plate 6 at more incident angles.

[0064] In one embodiment, the driving portion 86 is a driving cylinder, the cylinder body of which is disposed on the outer wall of the vacuum evaporation chamber 2 (the cylinder body of the driving cylinder may also be disposed on the frame 1), and the output rod of the driving cylinder extends into the vacuum evaporation chamber 2 to be connected to the sliding frame 84. A mechanical seal is provided at the connection between the output rod of the driving cylinder and the vacuum evaporation chamber 2.

[0065] In the present application, the driving part 86 drives the sliding frame 84 to slide, thereby realizing the switching of the meshing between the main flip gear 81 and the main flip rack 82, and the auxiliary flip gear 83 and the auxiliary flip rack 85. Since the sliding frame 84 slides in translation, the main flip rack 82 meshes with the main flip gear 81, or the auxiliary flip gear 83 meshes with the auxiliary flip rack 85, and the meshing is also carried out in translation. Since the vacuum evaporation chamber 2 will be filled with metal vapor during evaporation, the metal vapor will inevitably splash on the main flip gear 81, the main flip rack 82 and the auxiliary flip rack 85. The rotating rack 82, the auxiliary flip gear 83 and the auxiliary flip rack 85 will change the meshing position of the main flip gear 81 and the main flip rack 82, and the auxiliary flip gear 83 and the auxiliary flip rack 85 over a long period of time, making it easy for teeth to collide during the translational meshing process between the main flip rack 82 and the main flip gear 81, or between the auxiliary flip gear 83 and the auxiliary flip rack 85. Therefore, it is necessary to change the meshing mode of the main flip rack 82 and the main flip gear 81, and the auxiliary flip gear 83 and the auxiliary flip rack 85 to solve the above problem.

[0066] Reference Figure 7 and 8 As shown, a main connecting shaft 87 is fixed on the main flip rack 82, and a secondary connecting shaft 88 is fixed on the secondary flip rack 85. The main flip rack 82 is slidably installed on the sliding frame 84 through the main connecting shaft 87, and the secondary flip rack 85 is slidably installed on the sliding frame 84 through the secondary connecting shaft 88. A main reset spring 89 is sleeved on the main connecting shaft 87, and a secondary reset spring 90 is sleeved on the secondary connecting shaft 88. The main reset spring 89 is used to provide an elastic force for the main flip rack 82 to move away from the main flip gear 81, and the secondary reset spring 90 is used to provide an elastic force for the secondary flip rack 85 to move away from the secondary flip gear 83.

[0067] A switching frame 91 is arranged along the sliding direction of the sliding frame 84 in the vacuum evaporation chamber 2, and a main switching block 92 is arranged on the switching frame 91, and a main lifting plane 93 and a main disengagement inclined surface 94 cooperating with the main connecting shaft 87 are provided on the main switching block 92. A secondary switching block 95 is provided on the switching frame 91, and a secondary lifting plane 96 and a secondary disengagement inclined surface 97 cooperating with the secondary connecting shaft 88 are provided on the secondary switching block 95. The main switching block 92 and the secondary switching block 95 are arranged at intervals, and a switching accommodating cavity is formed between the main switching block 92 and the secondary switching block 95. The main disengagement inclined surface 94 on the main switching block 92 and the secondary disengagement inclined surface 97 on the secondary switching block 95 are arranged opposite to each other.

[0068] The end surface of the main connecting shaft 87 is provided with a main end tapered surface that cooperates with the main disengagement inclined surface 94, and the end surface of the auxiliary connecting shaft 88 is provided with a secondary end tapered surface that cooperates with the secondary disengagement inclined surface 97. The provision of the main end tapered surface can improve the sliding smoothness of the main connecting shaft 87 on the main switching block 92, and the provision of the secondary end tapered surface can improve the sliding smoothness of the secondary connecting shaft 88 on the secondary switching block 95.

[0069] In the initial state, the primary flip rack 82 is engaged with the primary flip gear 81. At this point, the end of the primary connecting shaft 87 is located on the primary lifting surface 93 of the primary switching block 92, and the primary return spring 89 is compressed. The secondary connecting shaft 88 is located in the switching accommodating cavity, and the secondary flip rack 85 is disengaged from the secondary flip gear 83.

[0070] When the driving unit 86 drives the sliding frame 84 to slide and switch, the end of the main connecting shaft 87 moves along the main lifting plane 93 and enters the main disengagement inclined plane 94. The main connecting shaft 87 follows the main disengagement inclined plane 94 and, under the action of the main return spring 89, gradually disengages the main flip rack 82 from the main flip gear 81. Meanwhile, the end of the secondary connecting shaft 88 slides along the secondary disengagement inclined plane 97. As the secondary connecting shaft 88 slides, the secondary flip rack 85 continues to move obliquely upward until the end of the secondary connecting shaft 88 slides onto the secondary lifting plane 96, and the secondary flip rack 85 engages with the secondary flip gear 83.

[0071] Therefore, by changing the engagement mode of the main flip gear 81 and the main flip rack 82, and the auxiliary flip gear 83 and the auxiliary flip rack 85, the occurrence of tooth collision can be effectively avoided, thereby achieving the purpose of protecting the flip assembly 8, and also achieving a more precise angle of flipping the mask plate 6 by the flip assembly 8, so that the mask plate 6 can pass over the vapor deposition molybdenum boat 7 at a stable tilt angle each time, thereby improving the continuity and uniformity of the thin film electrode on the tuning fork sheet.

[0072] Example 2

[0073] A preparation process using the above-mentioned crystal tuning fork piece layer by layer vacuum evaporation equipment, referring to Figure 11 As shown, the following steps are included:

[0074] In step S100 , the mask plate 6 equipped with the tuning fork piece is mounted on the evaporation mounting frame 5 , and the vacuum evaporation chamber 2 is evacuated.

[0075] According to the technical solution defined in step S100, three mask plates 6 are specifically installed on a deposition mounting frame 5. The mask plates 6 are slidably inserted into the deposition mounting frame 5, with the sides of adjacent mask plates 6 aligned. After the three mask plates 6 are installed, the surfaces of the three mask plates 6 are on the same plane. After the door 3 of the vacuum deposition chamber 2 is closed and sealed, the vacuum deposition chamber 2 is evacuated. In this embodiment, the vacuum level of the vacuum deposition chamber 2 is 3.5*10^(-3)Pa.

[0076] In step S200 , in a vacuum environment, the evaporation mounting frame 5 is turned over by the turning assembly 8 so that the mask plate 6 is tilted and passes over the evaporation molybdenum boat 7 .

[0077] Step S300 : heating the molybdenum evaporation boat 7 to evaporate the metal evaporation material to deposit a chromium layer on the surface and side surfaces of the tuning fork piece.

[0078] According to the technical solution defined in steps S200 to S300, specifically, the evaporation turntable 4 rotates circumferentially, the rotation speed of the evaporation turntable 4 is set to 1rpm, and the evaporation mounting frame 5 will rotate with the evaporation turntable 4. When the evaporation mounting frame 5 passes through the flipping component 8, the evaporation mounting frame 5 will rotate a certain angle under the flipping component 8, so that the mask plate 6 on the evaporation mounting frame 5 is tilted to pass through the evaporation molybdenum boat 7. Therefore, under the cyclic rotation of the evaporation turntable 4, the evaporation mounting frame 5 will be flipped a certain angle each time it passes through the flipping component 8, so that the mask plate 6 can pass over the evaporation molybdenum boat 7 at different inclination angles, and the metal vapor can be sputtered on the mask plate 6 at different incident angles until the mask plate 6 is flipped 360°, thereby realizing the coating of thin film electrodes on the two surfaces and two side walls of the tuning fork piece on the mask plate 6.

[0079] The molybdenum evaporation boat 7 is used to hold and evaporate the metal evaporation material. The boat is heated by a resistance evaporation source to achieve evaporation of the metal evaporation material. Three molybdenum evaporation boats 7 are provided, each containing chromium powder, silver wire, and tin ingot. The chromium powder weighs between 1.5g and 2g, the silver wire weighs 7.8g (308 gauge), the silver wire weighs 8.4g (206 gauge), and the tin ingot weighs 0.3g.

[0080] Step S400, evaporating a chromium-tin alloy layer on the chromium layer;

[0081] Step S500, evaporating a chromium-silver alloy layer on the chromium-tin alloy layer;

[0082] In step S600 , a silver layer is evaporated on the chromium-silver alloy layer to complete the coating on the surface and side surfaces of the tuning fork piece.

[0083] According to the technical solution defined in steps S400 to S600, specifically, the evaporation time of the above-mentioned chromium layer is 1 minute, the evaporation time of the chromium-tin alloy layer is 1 minute, and the evaporation time of the chromium-silver alloy layer is 1 minute, until the silver wire is evaporated.

[0084] The present application uses vacuum evaporation equipment to install a mask plate 6 equipped with a tuning fork piece on an evaporation mounting frame 5. In a vacuum environment, the evaporation turntable 4 rotates, driving the evaporation mounting frame 5 to pass through the flipping component 8. The flipping component 8 will flip the evaporation mounting frame 5 at a certain angle, so that the mask plate 6 is tilted and passes over the top of the evaporation molybdenum boat 7. The metal evaporation material evaporated in the evaporation molybdenum boat 7 will be evaporated on the surface and side of the tuning fork piece of the mask plate 6. Among them, each time the evaporation mounting frame 5 passes through the flipping component 8, the flipping component 8 will flip the evaporation mounting frame 5 at a certain angle, so that the mask plate 6 can complete the coating of the two surfaces and two sides of the tuning fork piece on the evaporation molybdenum boat 7 at different tilt angles, thereby effectively improving the production efficiency of the tuning fork piece coating.

[0085] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A layer-by-layer vacuum evaporation device for crystal tuning fork sheets, characterized in that: The invention comprises a frame (1) and a vacuum evaporation chamber (2) arranged on the frame (1); a evaporation turntable (4) is rotatably mounted in the vacuum evaporation chamber (2); a plurality of evaporation mounting frames (5) are distributed on the evaporation turntable (4) at equal intervals along its circumferential direction; the evaporation mounting frames (5) are rotatably mounted on the evaporation turntable (4); at least one mask plate (6) is mounted in the evaporation mounting frame (5); and the mask plate (6) is used to accommodate a tuning fork piece. The vacuum evaporation chamber (2) is provided with a plurality of evaporation molybdenum boats (7) at the center of the evaporation turntable (4), and the evaporation molybdenum boats (7) are used for placing and evaporating metal evaporation materials; A turning assembly (8) is provided in the vacuum evaporation chamber (2), and the evaporation mounting frame (5) rotates when passing through the turning assembly (8) so that the mask plate (6) passes obliquely above the evaporation molybdenum boat (7); The evaporation mounting frame (5) comprises a main mounting frame (51) and a connecting shaft (52) arranged on the main mounting frame (51), wherein the connecting shaft (52) is rotatably mounted on the evaporation turntable (4), and the main mounting frame (51) is provided with a main mounting slot, wherein a plurality of the mask plates (6) are inserted into the main mounting slot, and the side walls of adjacent mask plates (6) are abutted against each other, and the connecting shaft (52) cooperates with the flip assembly (8) to drive the main mounting frame (51) to flip so that the two surfaces of the mask plates (6) can be tilted toward the evaporation molybdenum boat (7) respectively; The flip assembly (8) includes a main flip gear (81) and a main flip rack (82), the main flip gear (81) is coaxially mounted on the connecting shaft (52), the main flip gear (81) has a first number of main tooth portions (811), the main flip rack (82) is arranged in the vacuum evaporation chamber (2) and is located on one side of the evaporation turntable (4), at least two main flip teeth (821) are arranged at intervals on the surface of the main flip rack (82) facing the evaporation turntable (4), the main flip teeth (821) are meshed with the main tooth portions (811), and when the evaporation turntable (4) rotates to pass the evaporation mounting frame (5) through the flip assembly (8), the main flip teeth (821) are meshed with the main tooth portions (811) to drive the connecting shaft (52) to rotate a first angle; A secondary flip gear (83) is coaxially mounted on the connecting shaft (52), the secondary flip gear (83) is spaced apart from the main flip gear (81), and the secondary flip gear (83) has a second number of secondary teeth (831). A sliding rack (84) is slidingly arranged on one side of the evaporation turntable (4) in the vacuum evaporation chamber (2), the main flip rack (82) is arranged on the sliding rack (84), and a secondary flip rack (85) is arranged on the sliding rack (84). The auxiliary flip rack (85) is spaced apart from the main flip rack (82), and the auxiliary flip rack (85) is meshed with the auxiliary tooth portion (831). The vacuum evaporation chamber (2) is provided with a driving portion (86) connected to the sliding frame (84), and the driving portion (86) is used to drive the auxiliary flip rack (85) to mesh with the auxiliary tooth portion (831), and the auxiliary flip tooth (851) is meshed with the auxiliary tooth portion (831) to drive the connecting shaft (52) to rotate a second angle. A main connecting shaft (87) is fixed on the main turning rack (82), a secondary connecting shaft (88) is fixed on the secondary turning rack (85), the main turning rack (82) is slidably mounted on the sliding rack (84) via the main connecting shaft (87), the secondary turning rack (85) is slidably mounted on the sliding rack (84) via the secondary connecting shaft (88), a switching rack (91) is arranged in the vacuum evaporation chamber (2) along the sliding direction of the sliding rack (84), the switching rack (91) is provided with a main switching block (92), and the main switching block (92) is provided with a main connecting shaft ( The switching frame (91) is provided with a main lifting plane (93) and a main disengagement inclined plane (94) that cooperate with the auxiliary connecting shaft (87), and the auxiliary switching block (95) is provided with an auxiliary lifting plane (96) and an auxiliary disengagement inclined plane (97) that cooperate with the auxiliary connecting shaft (88). The main switching block (92) and the auxiliary switching block (95) are arranged at intervals, and a switching accommodating cavity is formed between the main switching block (92) and the auxiliary switching block (95). A main reset spring (89) is sleeved and installed on the main connecting shaft (87), and a secondary reset spring (90) is sleeved and installed on the secondary connecting shaft (88).

2. The layer-by-layer vacuum evaporation device for crystal oscillator tuning fork according to claim 1, characterized in that: The mask plate (6) comprises an upper mask sheet (61), an upper positioning sheet (62), a lower positioning sheet (63) and a lower mask sheet (64) stacked in sequence, and a plurality of positioning holes (67) are provided around the upper mask sheet (61), the upper positioning sheet (62), the lower positioning sheet (63) and the lower mask sheet (64); A plurality of positioning grooves (65) are distributed in an array on the upper positioning piece (62) and the lower positioning piece (63), and the positioning grooves (65) are used to accommodate tuning fork pieces. A plurality of mask grooves (66) are distributed in an array on the upper mask piece (61) and the lower mask piece (64), and the positions of the mask grooves (66) are opposite to the positions of the positioning grooves (65) one by one.

3. The layer-by-layer vacuum evaporation device for crystal oscillator tuning fork according to claim 2, characterized in that: The positioning groove (65) includes a main groove (651) and auxiliary grooves (652) respectively connected to both sides of the main groove (651), the main groove (651) is used to accommodate the tuning fork piece, and the auxiliary grooves (652) are connected to the side walls of the tuning fork piece; The mask groove (66) includes a front electrode groove (661) and side electrode grooves (662) respectively connected to both sides of the front electrode groove (661), the front electrode groove (661) is opposite to the main groove (651), and the side electrode groove (662) is opposite to the auxiliary groove (652).

4. The layer-by-layer vacuum evaporation device for crystal oscillator tuning fork according to claim 1, characterized in that: The driving part (86) is a driving cylinder, the cylinder body of the driving cylinder is arranged on the outer wall of the vacuum evaporation chamber (2), and the output rod of the driving cylinder extends into the vacuum evaporation chamber (2) to be connected to the sliding frame (84).

5. The layer-by-layer vacuum evaporation device for crystal oscillator tuning fork according to claim 1, characterized in that: The end surface of the main connecting shaft (87) is provided with a main end conical surface that cooperates with the main disengagement inclined surface (94), and the end surface of the auxiliary connecting shaft (88) is provided with a secondary end conical surface that cooperates with the secondary disengagement inclined surface (97).

6. A preparation process using the layer-by-layer vacuum evaporation device for crystal oscillator tuning fork sheets according to any one of claims 1 to 5, characterized in that: The steps include: The mask plate (6) equipped with the tuning fork piece is mounted on the vapor deposition mounting frame (5), and the vacuum vapor deposition chamber (2) is evacuated; In a vacuum environment, the vapor deposition mounting frame (5) is flipped by a flip assembly (8) so that the mask plate (6) is tilted and passes over the vapor deposition molybdenum boat (7); A chromium layer is deposited on the surface and side of the tuning fork piece by heating a molybdenum evaporation boat (7) to evaporate a metal evaporation material; vapor-depositing a chromium-tin alloy layer on the chromium layer; vapor-depositing a chromium-silver alloy layer on the chromium-tin alloy layer; A silver layer is evaporated on the chromium-silver alloy layer to complete the coating on the surface and side of the tuning fork piece.

Images