A quasi-zero stiffness motion stage magnetic levitation vibration isolator and method

Abstract

This invention relates to a quasi-zero stiffness motion table magnetic levitation vibration isolator, belonging to the field of vibration isolation technology. It solves the problems of complex vibration isolation structures and high installation, use, and maintenance costs. It includes a stator component and a mover component. The stator component includes a positive stiffness stator permanent magnet, a negative stiffness stator permanent magnet, a coil, and a stator frame. The positive stiffness stator permanent magnet, negative stiffness stator permanent magnet, and coil are all connected to the stator frame. The mover component includes a positive stiffness mover permanent magnet, a negative stiffness mover permanent magnet, and a mover housing. The positive stiffness mover permanent magnet and negative stiffness mover permanent magnet are both connected to the mover housing. The positive stiffness stator permanent magnet, positive stiffness mover permanent magnet, negative stiffness stator permanent magnet, coil, and negative stiffness mover permanent magnet are arranged sequentially from the inside to the outside. This invention has a simple structure, small size, and is easy to disassemble, reducing design, installation, use, and maintenance costs.

Description

Technical Field

[0001] This invention relates to a magnetic levitation vibration isolator and method for a motion table, belonging to the field of vibration isolation technology. Background Technology

[0002] With the development of precision manufacturing technology, the environmental requirements for precision manufacturing instruments are becoming increasingly stringent. The relative displacement within the instrument caused by vibrations transmitted from the environment to the instrument's moving platform directly affects operations such as alignment during operation. Therefore, the ability to suppress vibration transmission from the environment reflects the manufacturing precision of the instrument. Passive vibration isolation is limited by its isolation principle. For low-frequency interference in the environment, the isolator must have a low natural frequency while being able to withstand high load forces. This requires the isolation device to have both high static stiffness and low dynamic stiffness. Therefore, quasi-zero stiffness system vibration isolation structures have certain application prospects. Air springs are commonly used as the main component in common vibration isolation systems. However, vibration isolation devices using air springs are not suitable for vacuum environments. Furthermore, when the load mass is large, the volume of the air spring will increase to achieve high load-bearing capacity and low stiffness, leading to installation and structural design problems and increasing design costs. Existing magnetic levitation vibration isolation structures are complex and rely on the active control of electric coils, consuming energy and increasing maintenance costs due to the long-term energization of the coils.

[0003] Therefore, there is an urgent need to propose a quasi-zero stiffness motion table magnetic levitation vibration isolator and method to solve the above-mentioned technical problems. Summary of the Invention

[0004] The purpose of this invention is to solve the problems of complex vibration isolation structures and high installation, use, and maintenance costs, and to provide a quasi-zero stiffness motion table magnetic levitation vibration isolator and method. A brief overview of the invention is provided below to offer a basic understanding of certain aspects of it. It should be understood that this overview is not an exhaustive summary of the invention. It is not intended to identify key or essential parts of the invention, nor is it intended to limit the scope of the invention.

[0005] The technical solution of the present invention:

[0006] A quasi-zero stiffness motion table magnetic levitation vibration isolator includes a stator component and a mover component. The stator component includes a positive stiffness stator permanent magnet, a negative stiffness stator permanent magnet, a coil, and a stator frame. The positive stiffness stator permanent magnet, the negative stiffness stator permanent magnet, and the coil are all connected to the stator frame. The mover component includes a positive stiffness mover permanent magnet, a negative stiffness mover permanent magnet, and a mover housing. The positive stiffness mover permanent magnet and the negative stiffness mover permanent magnet are all connected to the mover housing. The positive stiffness stator permanent magnet, the positive stiffness mover permanent magnet, the negative stiffness stator permanent magnet, the coil, and the negative stiffness mover permanent magnet are arranged sequentially from the inside to the outside.

[0007] Preferably, the stator frame includes a stator support, an adjusting stud, and an adjusting nut. The stator support has a stator support cavity. The lower part of the adjusting stud is threaded to the stator support. An adjusting nut is provided at the bottom end of the adjusting stud. The stator support and the adjusting nut have countersunk holes at corresponding positions. The adjusting stud is coaxially disposed in the stator support cavity. A positive stiffness stator permanent magnet is disposed on the adjusting stud. A negative stiffness stator permanent magnet and a coil are disposed on the outer wall of the stator support cavity of the stator support.

[0008] Preferably, the positive stiffness stator permanent magnet, the negative stiffness stator permanent magnet, and the coil are all ring-shaped. The positive stiffness stator permanent magnet, the negative stiffness stator permanent magnet, and the coil are all coaxially arranged with the adjusting stud. The positive stiffness stator permanent magnet is bonded to the adjusting stud, and the negative stiffness stator permanent magnet and the coil, arranged sequentially from top to bottom, are bonded to the stator support.

[0009] Preferably, the mover housing has an inner housing and an outer housing, the upper part of the inner housing and the outer housing are connected, the inner wall of the inner housing is provided with a positive stiffness mover permanent magnet, the inner wall of the outer housing is provided with a negative stiffness mover permanent magnet, the mover housing is coaxially arranged with the adjusting stator, the lower part of the inner housing is located inside the stator support cavity, and the outer housing is located outside the stator support cavity.

[0010] Preferably, both the positive stiffness mover permanent magnet and the negative stiffness mover permanent magnet are bonded to the mover shell.

[0011] Preferably, there are two positive stiffness stator permanent magnets and two positive stiffness mover permanent magnets. The two positive stiffness stator permanent magnets are arranged axially and do not contact each other. The positive stiffness mover permanent magnet is arranged correspondingly to the positive stiffness stator permanent magnet and does not contact the positive stiffness stator permanent magnet. The negative stiffness stator permanent magnet is arranged correspondingly to the upper positive stiffness mover permanent magnet.

[0012] Preferably, the positive stiffness stator permanent magnet and the negative stiffness stator permanent magnet are magnetized in the same direction, the positive stiffness mover permanent magnet and the negative stiffness mover permanent magnet are magnetized in the same direction, and the two magnetization directions are perpendicular.

[0013] Preferably, the axial distance between the positive stiffness stator permanent magnet and the positive stiffness mover permanent magnet is d1, and the axial distance between the negative stiffness stator permanent magnet and the negative stiffness mover permanent magnet is d2, where d1×d2<0.

[0014] A method for magnetic levitation vibration isolation of a quasi-zero stiffness motion table includes the following steps:

[0015] Step 1: Connect the stator support to the foundation; connect the mover housing to the lower surface of the motion table;

[0016] Step 2: Make the positive and negative stiffness of the vibration isolator equal, stabilize the size of the air gap between the permanent magnets, and make the moving part appear to be in a suspended state.

[0017] The present invention has the following beneficial effects:

[0018] 1. This invention has a simple structure, small size, and is easy to disassemble, thus reducing the costs of design, installation, manufacturing, use, and maintenance;

[0019] 2. This invention uses magnetic force for support, making it suitable for vacuum working environments and saving energy;

[0020] 3. The permanent magnets of this invention have adjustable positive and negative stiffness, making them suitable for different loads;

[0021] 4. This invention is purely passive, with no energized coils involved in power output. It utilizes the interaction force of permanent magnets, saving energy while reducing maintenance costs. Attached Figure Description

[0022] Figure 1 This is a cross-sectional view of a quasi-zero stiffness motion table magnetic levitation vibration isolator;

[0023] Figure 2 This is a partial cross-sectional schematic diagram of a quasi-zero stiffness motion table magnetic levitation vibration isolator;

[0024] Figure 3 This is a schematic diagram of the moving part's outer shell;

[0025] Figure 4 This is a partial schematic diagram of a quasi-zero stiffness motion table magnetic levitation vibration isolator;

[0026] Figure 5 It is the local first magnetization direction of a quasi-zero stiffness motion table magnetic levitation vibration isolator;

[0027] Figure 6 It is a local second magnetization direction of a quasi-zero stiffness motion table magnetic levitation vibration isolator;

[0028] Figure 7 It is the first magnetization direction of a quasi-zero stiffness motion table magnetic levitation vibration isolator;

[0029] Figure 8 It is the second magnetization direction of a quasi-zero stiffness motion table magnetic levitation vibration isolator;

[0030] Figure 9 This is a 3D diagram of a quasi-zero stiffness motion table magnetic levitation vibration isolator.

[0031] In the diagram, 1-stator component, 2-moving component, 1-1-positive stiffness stator permanent magnet, 1-2-negative stiffness stator permanent magnet, 1-3-coil, 1-4-adjusting nut, 1-5-stator bracket, 1-6-adjusting stud, 2-1-positive stiffness moving permanent magnet, 2-2-negative stiffness moving permanent magnet, 2-3-moving housing. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this invention clearer, the invention is described below with reference to specific embodiments shown in the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and not intended to limit the scope of the invention. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of the invention.

[0033] For ease of description, the words "up," "down," "left," and "right" appearing in this invention only indicate that they are consistent with the up, down, left, and right directions of the accompanying drawings themselves. They do not limit the structure and are merely for the purpose of facilitating the description of this invention and simplifying the description. They do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0034] Terminology Explanation: The terms "installation," "connection," "linking," and "fixing" in this invention should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction relationship between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0035] Specific implementation method one: Combining Figure 1-9This embodiment describes a quasi-zero stiffness motion table magnetic levitation vibration isolator, comprising a stator component 1 and a mover component 2, respectively fixed to a load and a foundation. The magnetic levitation structure eliminates mechanical contact between the vibration source and the load. The stator component 1 is disposed inside the mover component 2. The stator component 1 includes a positive stiffness stator permanent magnet 1-1, a negative stiffness stator permanent magnet 1-2, a coil 1-3, and a stator frame. The positive stiffness stator permanent magnet 1-1, the negative stiffness stator permanent magnet 1-2, and the coil 1-3 are all connected to the stator frame. The mover component 2 includes a positive stiffness mover permanent magnet 2-1, a negative stiffness mover permanent magnet 2-2, and a mover housing 2-3. The positive stiffness mover permanent magnet 2-1 and the negative stiffness mover permanent magnet 2-2 are both connected to the mover housing 2-3. The positive stiffness stator permanent magnet 1-1, the negative stiffness stator permanent magnet 1-2, the negative stiffness stator permanent magnet 1-2, the negative stiffness stator permanent magnet 1-2, the negative stiffness stator permanent magnet 1-2, the negative stiffness stator permanent magnet 1-2, the negative stiffness stator permanent magnet 1-2, the negative stiffness stator permanent magnet 1-2, the negative stiffness stator permanent magnet 1-2, the negative stiffness stator permanent magnet 1-2, and the negative stiffness stator permanent magnet 1-3 are all connected to the mover housing 2-3. The moving permanent magnet 2-1, the negative stiffness stator permanent magnet 1-2, the coil 1-3, and the negative stiffness moving permanent magnet 2-2 are arranged sequentially from the inside to the outside and do not contact each other. There is no mechanical connection between the moving part connected to the load and the stator connected to the foundation. There is an air gap between the stator permanent magnet and the moving permanent magnet. The levitation of the moving part is achieved solely by the interaction of the permanent magnets. There is no air levitation structure, which is suitable for vacuum working environments. It has a simple structure and small size. The load-bearing capacity can be increased by connecting permanent magnets in series. It is suitable for large loads. The support is achieved by magnetic force, which saves energy. The structure is simple. At a minimum, only two sets of positive and negative stiffness permanent magnets are needed to achieve system stability and load levitation. At the same time, it is easy to disassemble. The stiffness can be adjusted by changing parameters such as the thickness, length, and number of permanent magnets, thereby reducing the design cost.

[0036] Specific Implementation Method Two: Combining Figure 1-9 This embodiment describes a quasi-zero stiffness motion table magnetic levitation vibration isolator. The stator frame includes an adjusting nut 1-4, a stator support 1-5, and an adjusting stud 1-6. The stator support 1-5 has a stator support cavity. The lower part of the adjusting stud 1-6 is threadedly connected to the stator support 1-5. The bottom end of the adjusting stud 1-6 is provided with the adjusting nut 1-4. The stator support 1-5 and the adjusting nut 1-4 have corresponding countersunk holes. The adjusting nut 1-4 is placed in the countersunk hole. The adjusting stud 1-6 is coaxially arranged in the stator support cavity. A positive stiffness stator permanent magnet 1-1 is provided on the adjusting stud 1-6. A negative stiffness stator permanent magnet 1-2 and a coil 1-3 are provided on the outer wall of the stator support cavity of the stator support 1-5.

[0037] Specific implementation method three: Combining Figure 1-9This embodiment describes a quasi-zero stiffness motion table magnetic levitation vibration isolator. The positive stiffness stator permanent magnet 1-1, the negative stiffness stator permanent magnet 1-2, and the coil 1-3 are all annular. All three are coaxially arranged with the adjusting stud 1-6. The positive stiffness stator permanent magnet 1-1 is bonded to the adjusting stud 1-6, while the negative stiffness stator permanent magnet 1-2 and the coil 1-3, arranged sequentially from top to bottom, are bonded to the stator support 1-5.

[0038] Specific implementation method four: Combination Figure 1-9 This embodiment describes a quasi-zero stiffness motion table magnetic levitation vibration isolator. The mover housing 2-3 has an inner housing and an outer housing. The upper parts of the inner housing and the outer housing are connected. The inner wall of the inner housing is provided with a positive stiffness mover permanent magnet 2-1, and the inner wall of the outer housing is provided with a negative stiffness mover permanent magnet 2-2. The mover housing 2-3 is coaxially arranged with the adjusting stud 1-6. The lower part of the inner housing is located inside the stator support cavity, and the outer housing is located outside the stator support cavity. The dimensions of the mover housing 2-3 are designed to fit the mover permanent magnet, and it moves with the movement of the mover during operation.

[0039] Specific Implementation Method Five: Combining Figure 1-9 This embodiment describes a quasi-zero stiffness motion table magnetic levitation vibration isolator. Both the positive stiffness mover permanent magnet 2-1 and the negative stiffness mover permanent magnet 2-2 are annular, and both are bonded to the mover shell 2-3.

[0040] Specific Implementation Method Six: Combination Figure 1-9 This embodiment describes a quasi-zero stiffness motion table magnetic levitation vibration isolator. It comprises two positive stiffness stator permanent magnets 1-1 and two positive stiffness mover permanent magnets 2-1. The two positive stiffness stator permanent magnets 1-1 are arranged axially and do not contact each other. The positive stiffness mover permanent magnet 2-1 is arranged corresponding to the positive stiffness stator permanent magnets 1-1 and also does not contact them. The negative stiffness stator permanent magnet 1-2 is arranged corresponding to the upper positive stiffness mover permanent magnet 2-1. Figure 4 In the middle, a quasi-zero stiffness magnetic levitation structure combining positive and negative stiffness is formed by coaxially placed ring-shaped permanent magnets with different inner diameters; the inner and outer pairs of permanent magnet groups respectively represent providing positive stiffness and negative stiffness, and are equal in size.

[0041] Specific implementation method seven: Combining Figure 1-9This embodiment describes a quasi-zero stiffness magnetic levitation vibration isolator for a motion table. The positive stiffness stator permanent magnet 1-1 and the negative stiffness stator permanent magnet 1-2 are magnetized in the same direction, as are the positive stiffness mover permanent magnet 2-1 and the negative stiffness mover permanent magnet 2-2. The two magnetization directions are perpendicular. This design of the permanent magnet magnetization direction is used to achieve quasi-zero stiffness. Figure 5 In this configuration, the stator permanent magnet is magnetized axially, while the mover permanent magnet is magnetized radially. Figure 6 The stator permanent magnet is radially magnetized, while the mover permanent magnet is axially magnetized, thus achieving... Figure 7 , Figure 8 The invention employs two magnetization directions for permanent magnets. Positive and negative stiffness are achieved through a combination of ring-shaped coaxial permanent magnets, forming a parallel structure. The positive stiffness stator permanent magnets 1-1 and 1-2 of a quasi-zero stiffness motion stage magnetic levitation isolator are connected in parallel with the positive stiffness stator permanent magnets 1-1 and 1-2 of another quasi-zero stiffness motion stage magnetic levitation isolator. The positive / negative stiffness structure is achieved through the interaction between two permanent magnets with mutually perpendicular magnetization directions. Furthermore, the invention can improve the vibration isolation performance of the device by adding an active vibration isolation system. Under heavy load conditions, the positive stiffness stator permanent magnet 1-1 of one quasi-zero stiffness motion stage magnetic levitation isolator is connected in series with the negative stiffness stator permanent magnet 1-2 of another quasi-zero stiffness motion stage magnetic levitation isolator, thereby increasing the load-bearing capacity.

[0042] Specific implementation method eight: Combination Figure 1-9 This embodiment describes a quasi-zero stiffness motion table magnetic levitation vibration isolator. The axial distance between the positive stiffness stator permanent magnet 1-1 and the positive stiffness mover permanent magnet 2-1 is d1, and the axial distance between the negative stiffness stator permanent magnet 1-2 and the negative stiffness mover permanent magnet 2-2 is d2, where d1 × d2 < 0. The mover permanent magnet (positive stiffness mover permanent magnet 2-1) and the stator permanent magnet (positive stiffness stator permanent magnet 1-1) exist in pairs as coaxial annular permanent magnets, and an air gap exists between the stator permanent magnet and the mover permanent magnet. In the stiffness structure, the magnitude of positive stiffness is adjusted by controlling parameters such as the thickness, radius, and height difference between the positive stiffness stator permanent magnet and the positive stiffness mover permanent magnet. The negative stiffness structure is the same as above and is equal in magnitude to the positive stiffness. Except for the four permanent magnets (positive stiffness stator permanent magnet 1-1, positive stiffness mover permanent magnet 2-1, negative stiffness stator permanent magnet 1-2, and negative stiffness mover permanent magnet 2-2), all other components are made of non-ferromagnetic materials. The mover component and the stator component are two relatively independent components that interact only with magnetic force and have no mechanical contact.

[0043] Specific Implementation Method Nine: Combining Figure 1-9This embodiment describes a magnetic levitation vibration isolation method for a quasi-zero stiffness motion table, employing a magnetic levitation vibration isolator for the quasi-zero stiffness motion table (hereinafter referred to as the vibration isolator), and includes the following steps:

[0044] Step 1: Install four or more vibration isolators under the motion table. Connect the stator brackets 1-5 to the foundation and the stator permanent magnet to the stator brackets. Connect the mover housing 2-3 to the lower surface of the motion table and the mover permanent magnet to the mover housing.

[0045] Step 2: Calculate the stiffness of the series connection of positive and negative stiffness permanent magnet structures, adjust the size of the permanent magnets and the inter-group parameters to make the positive and negative stiffness of the vibration isolator equal, and stabilize the air gap size between the permanent magnets so that the moving parts exhibit a floating state; the positive and negative stiffness of the permanent magnets in this invention can be separated and adjusted, and are suitable for different loads. The constant output of the vibration isolation device can be changed through simulation and parameter redesign.

[0046] The moving parts are fixedly connected to each other and connected to the load through the moving part housing; the stator parts are fixedly connected to each other and connected to the foundation through the stator support; there is an air gap between the stator and the moving part and the levitation is achieved solely by magnetic force; when the stator vibrates due to the influence of the foundation, due to the quasi-zero stiffness of the vibration isolator, the stator and moving parts undergo relative displacement due to the vibration, and the moving part bearing the load is in a suspended state, thereby achieving passive suppression of vibration transmission.

[0047] It should be noted that in the above embodiments, as long as the technical solutions are not contradictory, they can be permuted and combined. Those skilled in the art can exhaust all possibilities based on the mathematical knowledge of permutation and combination. Therefore, the present invention will not describe the technical solutions after permutation and combination one by one, but it should be understood that the technical solutions after permutation and combination have been disclosed by the present invention.

[0048] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A quasi-zero stiffness motion table magnetic levitation vibration isolator, characterized in that: The device includes a stator component (1) and a mover component (2). The stator component (1) includes a positive stiffness stator permanent magnet (1-1), a negative stiffness stator permanent magnet (1-2), a coil (1-3), and a stator frame. The positive stiffness stator permanent magnet (1-1), the negative stiffness stator permanent magnet (1-2), and the coil (1-3) are all connected to the stator frame. The mover component (2) includes a positive stiffness mover permanent magnet (2-1), a negative stiffness mover permanent magnet (2-2), and a mover housing (2-3). The positive stiffness mover permanent magnet (2-1) and the negative stiffness mover permanent magnet (2-2) are all connected to the mover housing (2-3). The positive stiffness stator permanent magnet (1-1), the positive stiffness mover permanent magnet (2-1), the negative stiffness stator permanent magnet (1-2), the coil (1-3), and the negative stiffness mover permanent magnet (2-2) are arranged sequentially from the inside to the outside.

2. The quasi-zero stiffness motion table magnetic levitation vibration isolator according to claim 1, characterized in that: The stator frame includes an adjusting nut (1-4), a stator support (1-5), and an adjusting stud (1-6). The stator support (1-5) has a stator support cavity. The lower part of the adjusting stud (1-6) is connected to the stator support (1-5). The bottom end of the adjusting stud (1-6) is provided with an adjusting nut (1-4). The adjusting stud (1-6) is coaxially arranged in the stator support cavity. A positive stiffness stator permanent magnet (1-1) is provided on the adjusting stud (1-6). A negative stiffness stator permanent magnet (1-2) and a coil (1-3) are provided on the outer wall of the stator support cavity of the stator support (1-5).

3. The quasi-zero stiffness motion table magnetic levitation vibration isolator according to claim 2, characterized in that: The positive stiffness stator permanent magnet (1-1), the negative stiffness stator permanent magnet (1-2), and the coil (1-3) are all ring-shaped. The positive stiffness stator permanent magnet (1-1), the negative stiffness stator permanent magnet (1-2), and the coil (1-3) are all coaxially arranged with the adjusting stud (1-6). The positive stiffness stator permanent magnet (1-1) is bonded to the adjusting stud (1-6), and the negative stiffness stator permanent magnet (1-2) and the coil (1-3) arranged sequentially from top to bottom are bonded to the stator support (1-5).

4. A quasi-zero stiffness motion table magnetic levitation vibration isolator according to claim 2 or 3, characterized in that: The mover housing (2-3) has an inner housing and an outer housing. The upper part of the inner housing is connected to the upper part of the outer housing. The inner wall of the inner housing is provided with a positive stiffness mover permanent magnet (2-1), and the inner wall of the outer housing is provided with a negative stiffness mover permanent magnet (2-2). The mover housing (2-3) is coaxially arranged with the adjusting stud (1-6). The lower part of the inner housing is located inside the stator support cavity, and the outer housing is located outside the stator support cavity.

5. A quasi-zero stiffness motion table magnetic levitation vibration isolator according to claim 4, characterized in that: Both the positive stiffness mover permanent magnet (2-1) and the negative stiffness mover permanent magnet (2-2) are ring-shaped, and both the positive stiffness mover permanent magnet (2-1) and the negative stiffness mover permanent magnet (2-2) are bonded to the mover shell (2-3).

6. The quasi-zero stiffness motion table magnetic levitation vibration isolator according to claim 1, characterized in that: The number of positive stiffness stator permanent magnets (1-1) and positive stiffness mover permanent magnets (2-1) are both two. The two positive stiffness stator permanent magnets (1-1) are arranged along the axial direction and do not contact each other. The positive stiffness mover permanent magnets (2-1) are arranged corresponding to the positive stiffness stator permanent magnets (1-1) and do not contact each other. The negative stiffness stator permanent magnets (1-2) are arranged corresponding to the upper positive stiffness mover permanent magnets (2-1).

7. A quasi-zero stiffness motion table magnetic levitation vibration isolator according to claim 6, characterized in that: The positive stiffness stator permanent magnet (1-1) and the negative stiffness stator permanent magnet (1-2) are magnetized in the same direction, and the positive stiffness mover permanent magnet (2-1) and the negative stiffness mover permanent magnet (2-2) are magnetized in the same direction, with the two magnetization directions being perpendicular.

8. A quasi-zero stiffness motion table magnetic levitation vibration isolator according to claim 7, characterized in that: The axial distance between the positive stiffness stator permanent magnet (1-1) and the positive stiffness mover permanent magnet (2-1) is... The axial distance between the negative stiffness stator permanent magnet (1-2) and the negative stiffness mover permanent magnet (2-2) is , .

9. A method for magnetic levitation vibration isolation of a quasi-zero stiffness motion table, characterized in that: The quasi-zero stiffness motion table magnetic levitation vibration isolator according to any one of claims 1-8 includes the following steps: Step 1: Connect the stator frame to the foundation; connect the mover housing (2-3) to the lower surface of the motion table; Step 2: Make the positive and negative stiffness of the vibration isolator equal, stabilize the size of the air gap between the permanent magnets, and make the moving part appear to be in a suspended state.

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