Spring mechanism for self-locking and centering during loading

Abstract

An apparatus comprises: an upper member; a lower member disposed below the upper member; and a spring disposed between the upper member and the lower member. The upper member has a pin extending downwardly therefrom. The lower member has a seat configured to receive a free end of the pin. The spring surrounds the pin and has a free length that is less than the length of the pin. In an unloaded state, the free end of the pin contacts the seat and the spring applies a compressive force to prevent relative lateral movement between the upper member and the lower member. When the lower member carries a load in a loaded state, the load applies a tensile force to the spring that forms a gap between the free end of the pin and the seat, which allows relative lateral movement between the upper member and the lower member.

Description

[0001] CROSS REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to a provisional patent application filed on August 10, 2021 and assigned to U.S. Application No. 63 / 231,267, the disclosure of which is hereby incorporated by reference. Technical Field

[0003] The present disclosure relates to kinematic couplings, and more particularly, to a kinematic coupling having a flexible assembly. Background Art

[0004] The evolution of the semiconductor manufacturing industry places greater demands on yield management, and specifically, on metrology and inspection systems. Critical dimensions continue to shrink, but the industry needs to reduce the time it takes to achieve high-yield, high-value production. Minimizing the total time from detecting a yield problem to fixing the problem determines the return on investment for semiconductor manufacturers.

[0005] The manufacture of semiconductor devices, such as logic and memory devices, typically includes processing a semiconductor wafer using a number of manufacturing processes to form the various features and multiple levels of the semiconductor device. For example, photolithography is a semiconductor manufacturing process that involves transferring a pattern from a reticle to a photoresist arranged on a semiconductor wafer. Additional examples of semiconductor manufacturing processes include, but are not limited to, chemical mechanical polishing (CMP), etching, deposition, and ion implantation. Multiple semiconductor devices may be manufactured in an arrangement on a single semiconductor wafer and then separated into individual semiconductor devices.

[0006] Inspection processes are used at various steps in the semiconductor manufacturing process to detect defects on the wafer to promote higher yields in the manufacturing process, and therefore higher profits. Inspection has always been an important part of manufacturing semiconductor devices, such as integrated circuits (ICs). However, as the size of semiconductor devices decreases, inspection becomes more important to the successful manufacture of acceptable semiconductor devices because smaller defects can cause device failures. For example, as the size of semiconductor devices decreases, the detection of defects of reduced size becomes necessary because even relatively small defects can cause unwanted deviations in semiconductor devices.

[0007] Certain inspection processes are performed using an imaging mirror assembly (IMA) that is pointed at a target on a stage. Due to its high sensitivity to vibration, the IMA is mounted to a passive isolator assembly. Various applications may require mounting and dismounting the IMA from the isolator assembly, so this connection must be highly repeatable. Other applications in semiconductor equipment or other fields may require similar types of mounting assemblies.

[0008] In a conventional dynamic coupling, three balls of a first interface are placed in three chevrons of a second interface, and if both interfaces are rigid, placement is highly repeatable. However, an isolator assembly provides a flexible interface. Although the IMA can be fully seated with the isolator assembly, placement will not be repeatable, and the final placement will depend on the initial load setting of the interface. Previous methods used locking mechanisms to constrain lateral movement of the flexible interface during loading. However, such locking mechanisms require manual action by the operator to lock and unlock the mechanism. In addition, these locking actions can generate particles inside the vacuum chamber that is desired to be kept clean.

[0009] Therefore, there is a need for an improved kinematic coupling having a flexible assembly that remains rigid during loading. Summary of the invention

[0010] Embodiments of the present disclosure provide an apparatus comprising an upper member, a lower member, and a spring. The upper member may have a pin extending downwardly therefrom. The lower member may be disposed below the upper member and may have a seat configured to receive a free end of the pin. The lower member may be configured to carry a load in a loaded state and release the load in an unloaded state. The spring may be disposed between the upper member and the lower member and may have an upper end connected to the upper member and a lower end connected to the lower member. The spring may surround the pin, and the spring may have a free length that is less than the length of the pin. In the unloaded state, the free end of the pin may contact the seat and the spring may apply a compressive force to prevent relative lateral movement between the upper member and the lower member. In the loaded state, the load may apply a tensile force to the spring that may form a gap between the free end of the pin and the seat, which may allow relative lateral movement between the upper member and the lower member.

[0011] According to an embodiment of the present disclosure, the apparatus may further include a base member. The base member may be disposed below the lower member and may be configured to be coupled to the lower member. When the base member is coupled to the lower member, the base member may apply the load to the lower member and may cause the lower member to transition from the unloaded state to the loaded state. When the base member is disengaged from the lower member, the base member may release the load from the lower member and may cause the lower member to transition from the loaded state to the unloaded state.

[0012] According to an embodiment of the present disclosure, the base member may include a column extending upward therefrom. A free end of the column may have a spherical shape, and a diameter of the sphere is larger than a diameter of the column.

[0013] According to an embodiment of the present disclosure, the lower member may further include an opening. When the base member is coupled to the lower member, the free end of the column may be received in the opening.

[0014] According to an embodiment of the present disclosure, the opening may include a first portion and a second portion. The first portion may have a width greater than the diameter of the sphere, and the second portion may have a width greater than the diameter of the post and less than the diameter of the sphere. When the base member is coupled to the lower member, the free end of the post may be received in the first portion and the post may be at least partially received in the second portion.

[0015] According to an embodiment of the present disclosure, the lower member may further include a pair of internal abutment surfaces inside the opening. When the base member is coupled to the lower member, the spherical shape may contact the pair of internal abutment surfaces. The pair of internal abutment surfaces may be defined by a conical surface connecting the first portion of the opening to the second portion. The pair of internal abutment surfaces may be planar, so that the spherical shape may contact a point on each internal abutment surface.

[0016] According to an embodiment of the present disclosure, in the loaded state, the free end of the pin may be at least partially withdrawn from the seat.

[0017] According to an embodiment of the present disclosure, the free end of the pin may have an inclined edge and the seat may include a countersunk hole. In the unloaded state, the free end of the pin may be received in the seat with an annular contact surface between the inclined edge and the countersunk hole.

[0018] According to an embodiment of the present disclosure, the apparatus may further include a telescopic tube. The telescopic tube may be disposed between the upper member and the lower member and may have an upper end connected to the upper member and a lower end connected to the lower member. The telescopic tube may surround the spring. The telescopic tube may be configured to hermetically isolate the interior of the telescopic tube from the exterior of the telescopic tube. The telescopic tube may be elastically deformed to a length greater than or equal to the length of the gap.

[0019] According to an embodiment of the present disclosure, the upper component may include a fixed constraint.

[0020] According to an embodiment of the present disclosure, the upper member may have at least three pins extending downward therefrom. The at least three pins may be equally spaced. The lower member may include at least three lower members, and the seat of each lower member may be configured to receive the free end of one of the at least three pins. The spring may include at least three springs disposed between the upper member and each of the at least three lower members, and each spring may surround one of the at least three pins. The base member may be disposed below the lower member and may be configured to be coupled to each of the lower members. When the base member is coupled to each of the lower members, the base member may apply the load to each of the lower members, and may cause each of the lower members to transition from the unloaded state to the loaded state. When the base member is disengaged from each of the lower members, the base member may release the load from each of the lower members to cause each of the lower members to transition from the loaded state to the unloaded state.

[0021] According to an embodiment of the present disclosure, the base member may include at least three columns extending upward therefrom. The at least three columns may be equally spaced, and the free end of each column may have a spherical shape, the diameter of the sphere being greater than the diameter of the column.

[0022] According to an embodiment of the present disclosure, each of the lower members may include an opening. When the base member is coupled to each of the lower members, the free end of each of the posts may be received in the opening.

[0023] Another embodiment of the present disclosure provides an apparatus comprising an upper member, a lower member, and a spring. The upper member may have a pin extending downwardly therefrom. The upper member may be configured to carry a load in a loaded state and release the load in an unloaded state. The lower member may be disposed below the upper member and may have a seat configured to receive a free end of the pin. The spring may be disposed between the upper member and the lower member and may have an upper end connected to the upper member and a lower end connected to the lower member. The spring may surround the pin and the spring may have a free length greater than the length of the pin. In the unloaded state, the free end of the pin may contact the seat and the spring may apply a tension force to prevent relative lateral movement between the upper member and the lower member. In the loaded state, the load may apply a compressive force to the spring that may form a gap between the free end of the pin and the seat, which may allow relative lateral movement between the upper member and the lower member.

[0024] According to an embodiment of the present disclosure, the apparatus may further include a base member. The base member may be disposed on the upper member and may be configured to be coupled to the upper member. When the base member is coupled to the upper member, the base member may apply the load to the upper member and may cause the upper member to transition from the unloaded state to the loaded state. When the base member is disengaged from the upper member, the base member may release the load from the upper member and may cause the upper member to transition from the loaded state to the unloaded state.

[0025] According to an embodiment of the present disclosure, the base member may include a column extending downward therefrom. The free end of the column may have a spherical shape, and the diameter of the sphere is greater than the diameter of the column. The upper surface of the upper member may include a groove. When the base member is coupled to the upper member, the free end of the column may contact the groove of the upper member.

[0026] Another embodiment of the present disclosure provides a method. The method may include providing a suspension assembly. The suspension assembly may include an upper member, a lower member, and a spring. The upper member may have a pin extending downwardly therefrom. The lower member may be disposed below the upper member and may have a seat configured to receive a free end of the pin. The lower member may be configured to carry a load in a loaded state and release the load in an unloaded state. The spring may be disposed between the upper member and the lower member and may have an upper end connected to the upper member and a lower end connected to the lower member. The spring may surround the pin, and the spring may have a free length that is less than the length of the pin. In the unloaded state, the free end of the pin may contact the seat and the spring may apply a compressive force to prevent relative lateral movement between the upper member and the lower member. In the loaded state, the load may apply a tensile force to the spring that may form a gap between the free end of the pin and the seat, which may allow relative lateral movement between the upper member and the lower member.

[0027] According to an embodiment of the present disclosure, the method may further include coupling a base member to the lower member below the suspension assembly. The base member may apply the load to the lower member and may cause the lower member to transition from the unloaded state to the loaded state. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] For a more complete understanding of the nature and purpose of the present disclosure, reference should be made to the following detailed description taken in conjunction with the accompanying drawings, in which:

[0029] Figure 1A is a cross-sectional view of a device in an unloaded state according to an embodiment of the present disclosure;

[0030] Figure 1BIt is in a misaligned state Figure 1A A cross-sectional view of the device;

[0031] Figure 1C It is in the middle Figure 1A A cross-sectional view of the device;

[0032] Figure 2 is under load Figure 1A A cross-sectional view of the device;

[0033] Figure 3A is a front view of a device according to another embodiment of the present disclosure;

[0034] Figure 3B yes Figure 3A A rear view of the device;

[0035] Figure 4 yes Figure 3A A bottom view of an upper part of the device;

[0036] Figure 5A yes Figure 3A A top view of the three lower parts of the device;

[0037] Figure 5B yes Figure 3A A bottom view of the three lower parts of the device;

[0038] Figure 6 yes Figure 3A A side view of a spring of the device;

[0039] Figure 7 yes Figure 3A A perspective view of a telescopic tube of a device;

[0040] Figure 8 yes Figure 3A A top view of a base component of the device;

[0041] Fig. 9 is a flow chart of a method according to an embodiment of the present disclosure;

[0042] Fig. 10A is a cross-sectional view of a device in an unloaded state according to another embodiment of the present disclosure;

[0043] Fig. 10B It is in a misaligned state Fig. 10A A cross-sectional view of the device;

[0044] Fig. 10C It is in the middle Fig. 10A A cross-sectional view of the device;

[0045] Fig.11 is under load Fig. 10A A cross-sectional view of the device;

[0046] Fig. 12A is a front view of a device according to another embodiment of the present disclosure;

[0047] Fig. 12B yes Fig. 12A A rear view of the device;

[0048] Fig.13A yes Fig. 12A A top view of an upper part of the device;

[0049] Fig. 13B yes Fig. 12A A bottom view of an upper part of the device;

[0050] Fig.14A yes Fig. 12A A top view of a lower part of the device;

[0051] Fig. 14B yes Fig. 12A A bottom view of a lower part of the device;

[0052] Fig.15 yes Fig. 12A A side view of a spring of the device;

[0053] Fig.16 yes Fig. 12A A perspective view of a telescopic tube of a device;

[0054] Fig.17 yes Fig. 12A a bottom view of a base member of the device; and

[0055] Fig.18 is a flowchart of a method according to another embodiment of the present disclosure. DETAILED DESCRIPTION

[0056] Although the claimed objectives will be described in terms of certain embodiments, other embodiments (including embodiments that do not provide all of the advantages and features set forth herein) are also within the scope of the present disclosure. Various structural, logical, process, step, and electronic changes may be made without departing from the scope of the present disclosure. Therefore, the scope of the present disclosure is defined solely by reference to the appended claims.

[0057] 1 to 2, an embodiment of the present disclosure provides an apparatus 100. The apparatus 100 may include an upper member 110. The upper member 110 may have an upper side 111 and a lower side 112. The upper side 110 of the upper member 111 may be a fixed constraint. The lower side 112 of the upper member 110 may have a pin 113 extending downwardly therefrom. The pin 113 may have a cylindrical shape. The pin 113 may have a free end 114 away from the lower side 112 of the upper member 110. The upper member 110 may have a circular or polygonal shape.

[0058] The apparatus 100 may further include a lower member 120. The lower member 120 may be disposed below the upper member 110. For example, the lower member 120 may be spaced apart from the upper member 110 in a vertical direction. The lower member 120 and the upper member 110 may be coaxially aligned. The lower member 120 may have a circular or polygonal shape. The lower member 120 may have an upper side 121 and a lower side 122. The upper side 121 of the lower member 120 may have a seat 123 configured to receive the free end 114 of the pin 113. The lower member 120 may be configured to carry a load in a loaded state and release the load in an unloaded state.

[0059] The apparatus 100 may further include a spring 130. The spring 130 may be a coil spring. The spring 130 may be disposed between the upper member 110 and the lower member 120. The spring 130 may have an upper end 131 connected to the upper member 110 and a lower end 132 connected to the lower member 120. For example, the upper end 131 of the spring 130 may be connected to the lower side 112 of the upper member 110, and the lower end 132 of the spring 130 may be connected to the upper side 121 of the lower member 120. The spring 130 may be connected to the upper member 110 and the lower member 120 by a fastener or welding. Alternatively, the spring 130 may be integrally formed with the upper member 110 and the lower member 120. The spring 130 may surround the pin 113. For example, the spring 130 may have an inner diameter greater than the diameter of the pin 113. The spring 130 may have a free length (i.e., an unloaded length) less than the length of the pin 113. The free length of the spring 130 and the length of the pin 113 can be set according to the design. For example, the free length of the spring 130 and the length of the pin 113 can depend on the combination of other parameters of the spring 130 (such as the spring constant) and the pin 113 (such as the diameter) to prevent the pin 113 from breaking under the force of the spring 130 in the unloaded state.

[0060] exist Figure 1A, the free end 114 of the pin 113 contacts the seat 123, and the spring 130 applies a compressive force to prevent relative lateral movement between the upper member 110 and the lower member 120. Thus, the apparatus 100 can be rigid to facilitate loading. The free end 114 of the pin 113 can have an inclined edge 115 and the seat 123 can include a countersunk hole 125. In the unloaded state, the free end 114 of the pin 113 can be received in the seat 123, wherein the inclined edge 115 of the pin 113 and the countersunk hole 125 of the seat 123 have an annular contact surface between them.

[0061] exist Figure 2 , the load applies a tensile force to the spring 130 that forms a gap 124 between the free end 114 of the pin 113 and the seat 123, which allows relative lateral movement between the upper member 110 and the lower member 120. Thus, the device 100 can flexibly absorb vibrations when loaded. In the loaded state, the free end 114 of the pin 113 can be at least partially withdrawn from the seat 123. For example, in the loaded state, the free end 114 of the pin 113 can be completely withdrawn from the seat 123. It should be understood that the size of the gap 124 can depend on the geometry of the interface between the pin 113 and the seat 123 to be large enough to accommodate any relative movement between the upper member 110 and the lower member 120.

[0062] The apparatus 100 may further include a base member 140. The base member 140 may be configured to carry any sensitive assembly that can be suspended. For example, the base member 140 may be configured to carry an imaging mirror assembly (IMA), an illumination assembly, a laser, an interferometer, or other sensitive instruments or components. The base member 140 may be disposed below the lower member 120. The base member 140 may have a circular or polygonal shape. The base member 140 may have an upper side 141 and a lower side 142. The base member 140 may be configured to couple to the lower member 120. For example, the upper side 141 of the base member 140 may be configured to couple to the lower side 122 of the lower member 120.

[0063] When the base member 140 is coupled to the lower member 120 (eg Figure 2 ), the base member 140 may apply a load to the lower member 120 to cause the lower member 120 to transition from an unloaded state to a loaded state.

[0064] When the base member 140 is disengaged from the lower member 120 (eg Figure 1A ), the base member 140 may release the load from the lower member 120 to cause the lower member 120 to transition from a loaded state to an unloaded state.

[0065] The upper side 141 of the base member 140 may have a post 143 extending upward therefrom. The post 143 may have a cylindrical shape. The post 143 may have a free end 144 distal from the upper side 141 of the base member 140. The free end 144 may have a spherical shape 145. The spherical shape 145 may have a diameter greater than the diameter of the post 143. The free end 144 may be other shapes, such as a canoe sphere, a spherical cylinder, or other kinematic / semi-kinematic features.

[0066] The underside 122 of the lower member 120 can include an opening 126. When the base member 140 is coupled to the lower member 120, the free end 144 of the post 143 can be received in the opening 126.

[0067] The opening 126 may include a first portion 127 and a second portion 128. The first portion 127 may have a width greater than the diameter of the ball 145. The second portion 128 may have a width greater than the diameter of the post 143 and less than the diameter of the ball 145. When the base member 140 is coupled to the lower member 120, the free end 144 of the post 143 may be received in the first portion 127 and the post 143 may be at least partially received in the second portion 128.

[0068] The lower member 120 may further include a pair of inner abutment surfaces 129 inside the opening 126. The pair of inner abutment surfaces 129 may be defined by a tapered surface connecting the first portion 127 of the opening 126 to the second portion 128 of the opening 126. The pair of inner abutment surfaces 129 may be planar or curved. When the base member 140 is coupled to the lower member 120, the sphere 145 may contact the pair of inner abutment surfaces 129. For example, the sphere 145 may contact one point on each inner abutment surface 129. When the base member 140 is coupled to the lower member 120, the tapered profile of the pair of inner abutment surfaces 129 may cause self-centering. For example, if the coupling is first misaligned (i.e., the sphere 145 only contacts one of the pair of inner abutment surfaces 129, such as Figure 1B ), the tapered profile may allow the ball 145 to slide to a centered position (as shown in FIG. Figure 1C ), where there is contact with two internal abutment surfaces 129.

[0069] The apparatus 100 may further include a telescopic tube 150. The telescopic tube 150 may be disposed between the upper member 110 and the lower member 120. The telescopic tube 150 may have an upper end 151 connected to the upper member 110 and a lower end 152 connected to the lower member 120. For example, the upper end 151 of the telescopic tube 150 may be connected to the lower side 112 of the upper member 110, and the lower end 152 of the telescopic tube 150 may be connected to the upper side 121 of the lower member 120. The telescopic tube 150 may be connected to the upper member 110 and the lower member 120 by welding. The telescopic tube 150 may surround the spring 130. For example, the inner diameter of the telescopic tube 150 may be larger than the outer diameter of the spring 130. The telescopic tube 150 may be configured to hermetically isolate the interior of the telescopic tube 150 from the exterior of the telescopic tube 150. For example, particles generated by the movement of the spring 130 and the contact between the pin 113 and the seat 123 can be contained within the telescope 150 so as not to contaminate the clean air outside the telescope 150. The telescope 150 can be made of an elastic material. For example, the telescope 150 can be a flexible corrugated component. The telescope 150 can have a horizontal corrugation to allow axial deformation. The telescope 150 can be elastically deformed to a length greater than or equal to the length of the gap 124, and can have a sufficient fatigue life to repeatedly deform within this range. In this way, the telescope 150 can maintain an airtight isolation between the upper member 110 and the lower member 120 in both a loaded state and an unloaded state. The telescope 150 can also be strong enough to withstand the pressure difference between the outside of the telescope 150 and the inside of the telescope 150. It should be understood that the apparatus 100 can be placed in a vacuum chamber, and the telescope 150 can be capable of maintaining an airtight isolation between the upper member 110 and the lower member 120 during pressure fluctuations in the vacuum chamber.

[0070] According to an embodiment of the present disclosure, the device 100 may include a plurality of the above-mentioned components. For example, the device 100 may include three or more specific components, as further described below. Figure 3A and 3B The device 101 in Figures 4 to 8 individual components.

[0071] The underside 112 of the upper member 110 may have at least three pins 113 extending downwardly therefrom. Figure 4, the at least three pins 113 may include a first pin 113a, a second pin 113b, and a third pin 113c. The at least three pins 113 may be equally spaced on the lower side 112 of the upper member 110. For example, the first pin 113a, the second pin 113b, and the third pin 113c may be located at three co-circular points on the lower side 112 of the upper member 110. Each of the at least three pins 113 may have the same structure. The free end 114 of each of the at least three pins 113 may have an inclined edge 115. For example, the free end 114a of the first pin 113a may have a first inclined edge 115a, the free end 114b of the second pin 113b may have a second inclined edge 115b, and the free end 114c of the third pin 113c may have a third inclined edge 115c.

[0072] The lower member 120 may include at least three lower members. Figure 5A , the lower member 120 may include a first lower member 120a, a second lower member 120b, and a third lower member 120c having a first seat 123a, a second seat 123b, and a third seat 123c and upper sides 121a, 121b, and 121c, respectively. Each of the at least three lower members 120 may have the same structure. The seat 123 of each lower member 120 may be configured to receive the free end 114 of one of the at least three pins 113. For example, the first seat 123a may be configured to receive the free end 114a of the first pin 113a, the second seat 123b may be configured to receive the free end 114b of the second pin 113b, and the third seat 123c may be configured to receive the free end 114c of the third pin 113c. Each seat 123 of the at least three lower members 120 may include a countersunk hole 125. For example, the first seat 123a of the first lower member 120a may include a first countersunk hole 125a, the second seat 123b of the second lower member 120b may include a second countersunk hole 125b, and the third seat 123c of the third lower member 120c may include a third countersunk hole 125c. The at least three lower members 120 may be arranged radially symmetrically. For example, the first lower member 120a, the second lower member 120b, and the third lower member 120c may be arranged at 120 degrees relative to each other.

[0073] The spring 130 may include at least three springs. For example, the spring 130 may include a first spring 130a, a second spring 130b, and a third spring 130c. Figure 6, the first spring 130a, the second spring 130b, and the third spring 130c may be identical. Each of the at least three springs 130 may be disposed between the upper member 110 and the corresponding lower member of the at least three lower members 120. For example, the upper end 131a of the first spring 130a, the upper end 131b of the second spring 130b, and the upper end 131c of the third spring 130c may each be connected to the upper member 110. The lower end 132a of the first spring 130a, the lower end 132b of the second spring 130b, and the lower end 132c of the third spring 130c may be connected to the first lower member 120a, the second lower member 120b, and the third lower member 120c, respectively. Each of the at least three springs 130 may surround one of the at least three pins 113. For example, the first spring 130a may surround the first pin 113a, the second spring 130b may surround the second pin 113b, and the third spring 130c may surround the third pin 113c.

[0074] The telescopic tube 150 may include at least three telescopic tubes. For example, the telescopic tube 150 may include a first telescopic tube 150a, a second telescopic tube 150b, and a third telescopic tube 150c. Figure 7 , the first telescopic tube 150a, the second telescopic tube 150b, and the third telescopic tube 150c may be identical. Each of the at least three telescopic tubes 150 may be disposed between the upper member 110 and the corresponding lower member of the at least three lower members 120. For example, the upper end 151a of the first telescopic tube 150a, the upper end 151b of the second telescopic tube 150b, and the upper end 151c of the third telescopic tube 150c may each be connected to the upper member 110. The lower end 152a of the first telescopic tube 150a, the lower end 152b of the second telescopic tube 150b, and the lower end 152c of the third telescopic tube 150c may be connected to the first lower member 120a, the second lower member 120b, and the third lower member 120c, respectively. Each of the at least three telescopic tubes 350 may surround one of the at least three springs 130. For example, the first telescopic tube 150a may surround the first spring 130a, the second telescopic tube 150b may surround the second spring 130b, and the third telescopic tube 150c may surround the third telescopic tube 150c.

[0075] The upper side 141 of the base member 140 may have at least three posts 143 extending upwardly therefrom. Figure 3AAs shown in , the at least three columns 143 may include a first column 143a, a second column 143b, and a third column 143c. The at least three columns 143 may be equally spaced on the upper side 141 of the base member 140. For example, the first column 143a, the second column 143b, and the third column 143c may be located at three common points on the upper side 141 of the base member 140. Each of the at least three columns 143 may have the same structure. The free end 144 of each of the at least three columns 143 may have a spherical shape 145, the diameter of the spherical shape 145 being larger than the diameter of the column 143. For example, as Figure 8 As shown in FIG. 1 , the free end 144a of the first post 143a may have a first spherical shape 145a, the free end 144b of the second post 143b may have a second spherical shape 145b, and the free end 144c of the third post 143c may have a third spherical shape 145c.

[0076] The base member 140 may be configured to be coupled to each of the lower members 120. For example, Figure 3B , the first column 143a, the second column 143b, and the third column 143c may be configured to be coupled to the first lower member 120a, the second lower member 120b, and the third lower member 120c, respectively. When the base member 140 is coupled to each of the lower members 120, the base member 140 applies a load to each of the lower members 120 to cause each of the lower members 120 to transition from an unloaded state to a loaded state. When the base member 140 is detached from each of the lower members 120, the base member 140 releases the load from each of the lower members 120 to cause each of the lower members 120 to transition from a loaded state to an unloaded state.

[0077] The lower side 122 of each of the lower members 120 may include an opening 126. For example, Figure 5B , the lower side 122a of the first lower member 120a may include a first opening 126a, the lower side 122b of the second lower member 120b may include a second opening 126b, and the lower side 122c of the third lower member 120c may include a third opening 126c. When the base member 140 is coupled to each of the lower members 120, the free end 144 of each of the posts 143 is received in the opening 126. For example, the free end 144a of the first post 143a may be received in the first opening 126a, the free end 144b of the second post 143b may be received in the second opening 126b, and the free end 144c of the third post 143c may be received in the third opening 126c. The free end 144 of each of the posts 143 may be received in the opening 126 simultaneously or sequentially. The base member 140 may be rotated so that the free end 144 of each of the posts 143 is received in the corresponding opening 126.

[0078] The opening 126 of each of the lower members 120 may include a first portion 127 and a second portion 128. Figure 3B , the first opening 126a of the first lower member 120a can have a first portion 127a and a second portion 128a, the second opening 126b of the second lower member 120b can have a first portion 127b and a second portion 128b, and the third opening 126c of the third lower member 120c can have a first portion 127c and a second portion 128c. When the base member 140 is coupled to the lower member 120, the free end 144 of the post 143 can be received in the first portion 127 and the post 143 can be at least partially received in the second portion 128.

[0079] Each lower member 120 may further include a pair of inner abutment surfaces 129 within the opening 126. For example, Figure 3B , the first opening 126a of the first lower member 120a may have a first abutment surface 129a, the second opening 126b of the second lower member 120b may have a second abutment surface 129b, and the third opening 126c of the third lower member 120c may have a third abutment surface 129c. Each pair of inner abutment surfaces 129 may be defined by a tapered surface connecting the first portion 127 of the opening 126 to the second portion 128 of the opening 126. Each pair of inner abutment surfaces 129 may be flat or curved. When the base member 140 is coupled to the lower member 120, the sphere 145 may contact the pair of inner abutment surfaces 129. For example, the sphere 145 may contact one point on each inner abutment surface 129. The first sphere 145a may contact the first abutment surface 129a, the second sphere 145b may contact the second abutment surface 129b, and the third sphere 145c may contact the third abutment surface 129c.

[0080] In some embodiments, the shape of the free end 144 of each post 143 and the number of internal abutment surfaces 129 may be the same or may vary. For example, each opening 126 may have a pair of internal abutment surfaces 129 (e.g., V-shaped), each providing two contact points with the free end 144 of each post 143. Alternatively, the opening 126 may have a single internal abutment surface 129 (e.g., a flat shape) that provides one contact point with the free end 144 of the post 143, or the opening 126 may have three internal abutment surfaces 129 (e.g., a conical shape) that provide three contact points with the free end 144 of the post 143. The free end 144 of each post 143 may have a spherical, conical, or flat shape to contact the corresponding internal abutment surface 129. In embodiments, the device 100 may have a combination of the above shapes. For example, one opening 126 may have a V-shape, one opening 126 may have a flat shape, and one opening 126 may have a conical shape. In this arrangement, the openings 126 may be parallel such that the free end 144 of each post 143 may be received in each opening 126 simultaneously.

[0081] It should be understood that although the device 100 is described as having one or three of the various components, the number of these components may vary based on the specific application of the device 100, where self-centering of the assembly mounted on the flexible structure may be desired. To constrain all six degrees of freedom, six points of contact may be required between the base member 140 and the lower member 120. For example, six assemblies may be used where each assembly provides a single point of contact, or three assemblies may be used where each assembly provides two points of contact.

[0082] For the apparatus 100 of the present disclosure, no manual action may be required to transition from a rigid state to a flexible state, as the coupled load itself causes the transition to occur. This may allow for repeatable centered positioning of the assembly. Additionally, any particles generated from engagement / disengagement of the internal mechanisms or chemical contamination from any lubricant used may be trapped within the body of the apparatus 100 so as not to contaminate the clean external environment.

[0083] refer to Fig. 9 , an embodiment of the present disclosure provides a method 200. The method 200 may include the following steps.

[0084] At step 210, a suspension assembly is provided. The suspension assembly may include components of the apparatus 100 described above in conjunction with FIGS. 1 to 8 or other embodiments disclosed herein. The suspension assembly may include an upper member. The upper member may have an upper side and a lower side. The upper side of the upper member may be a fixed constraint. The lower side of the upper member may have a pin extending downwardly therefrom. The pin may have a cylindrical shape. The pin may have a free end away from the lower side of the upper member. The upper member may have a circular or polygonal shape.

[0085] The suspension assembly may further include a lower member. The lower member may be disposed below the upper member. For example, the lower member may be spaced apart from the upper member in a vertical direction. The lower member and the upper member may be coaxially aligned. The lower member may have a circular or polygonal shape. For example, the lower member and the upper member may have the same shape. The lower member may have an upper side and a lower side. The upper side of the lower member may have a seat configured to receive the free end of the pin. The lower member may be configured to carry a load in a loaded state and release the load in an unloaded state.

[0086] The suspension assembly may further include a spring. The spring may be disposed between the upper member and the lower member. The spring may have an upper end connected to the upper member and a lower end connected to the lower member. For example, the upper end of the spring may be connected to the lower side of the upper member, and the lower end of the spring may be connected to the upper side of the lower member. The spring may surround the pin. For example, the spring may have an inner diameter greater than the diameter of the pin. The spring may have a free length (i.e., an unloaded length) less than the length of the pin.

[0087] In the unloaded state, the free end of the pin contacts the seat and the spring applies a compressive force to prevent relative lateral movement between the upper and lower parts. In the loaded state, the load applies a tensile force to the spring that forms a gap between the free end of the pin and the seat, which allows relative lateral movement between the upper and lower parts.

[0088] At step 220, a base member is coupled to a lower member below the suspension assembly. The base member may have a circular shape. The base member may have an upper side and a lower side. The upper side of the base member may be configured to couple to the lower side of the lower member. The base member may apply a load to the lower member to cause the lower member to transition from an unloaded state to a loaded state.

[0089] According to an embodiment of the present disclosure, the method 200 may further include step 230. At step 230, the base component is disengaged from the lower component of the suspension assembly. The base component may release the load from the lower component to cause the lower component to transition from a loaded state to an unloaded state.

[0090] Using the method 200 of the present disclosure, no manual action may be required to transition from the rigid state to the flexible state because the load applied by coupling the base member to the lower member itself causes the transition to occur. Simply disengaging the base member from the lower member may cause the assembly to transition back to the rigid state. This may allow for repeatable centering of the assembly.

[0091] 10 to 11 , an embodiment of the present disclosure provides an apparatus 300. The apparatus 300 may be similar to the apparatus 100 described above, and may include components similar to the components of the apparatus 100 described above. The apparatus 300 differs from the apparatus 100 in that the apparatus 300 may provide a compression suspension, whereas the apparatus 100 may provide an extension suspension.

[0092] The apparatus 300 may include an upper member 310. The upper member 310 may have an upper side 311 and a lower side 312. The lower side 312 of the upper member 310 may have a pin 313 extending downwardly therefrom. The pin 313 may have a cylindrical shape. The pin 313 may have a free end 314 away from the lower side 312 of the upper member 310. The free end 314 of the pin 313 may have a collar 315. The collar 315 may have a spherical or cylindrical shape. The diameter of the collar 315 may be larger than the diameter of the pin 313. The upper member 310 may have a circular or polygonal shape. The upper member 310 may be configured to carry a load in a loaded state and release the load in an unloaded state.

[0093] The apparatus 300 may further include a lower member 320. The lower member 320 may be disposed below the upper member 310. For example, the lower member 320 may be spaced apart from the upper member 310 in a vertical direction. The lower member 320 and the upper member 310 may be coaxially aligned. The lower member 320 may have a circular or polygonal shape. The lower member 320 may be a fixed constraint. The lower member 320 may have an upper side 321 and a lower side 322. The upper side 321 of the lower member 320 may have a seat 323 configured to receive the free end 314 of the pin 313.

[0094] The apparatus 300 may further include a spring 330. The spring 330 may be a coil spring. The spring 330 may be disposed between the upper member 310 and the lower member 320. The spring 330 may have an upper end 331 connected to the upper member 310 and a lower end 332 connected to the lower member 320. For example, the upper end 331 of the spring 330 may be connected to the lower side 312 of the upper member 310, and the lower end 332 of the spring 330 may be connected to the upper side 321 of the lower member 320. The spring 330 may be connected to the upper member 310 and the lower member 320 by a fastener or welding. Alternatively, the spring 330 may be integrally formed with the upper member 310 and the lower member 320. The spring 330 may surround the pin 313. For example, the spring 330 may have an inner diameter greater than the diameter of the pin 313. The spring 330 may have a free length (e.g., an unloaded length) greater than the length of the pin 313. The free length of the spring 330 and the length of the pin 313 can be set according to the design. For example, the free length of the spring 330 and the length of the pin 313 can depend on the combination of other parameters of the spring 330 (such as the spring constant) and the pin 313 (such as the diameter) to prevent the pin 313 or the lower member 320 from breaking under the force of the spring 330 in the unloaded state.

[0095] exist Fig. 10A , the free end 314 of the pin 313 contacts the seat 323, and the spring 330 applies tension to prevent relative lateral movement between the upper member 310 and the lower member 320. Thus, the apparatus 300 can be rigid to facilitate loading. The seat 323 may include a countersunk hole 325. In the unloaded state, the free end 314 of the pin 313 can be received in the seat 323, wherein the collar 315 of the pin 313 and the countersunk hole 325 of the seat 323 have an annular contact surface between them.

[0096] exist Fig.11, the load applies a compressive force to the spring 330 that forms a gap 324 between the free end 314 of the pin 313 and the seat 323, which allows relative lateral movement between the upper member 310 and the lower member 320. Thus, the device 300 can flexibly absorb vibrations when loaded. It should be understood that the size of the gap 324 can depend on the geometry of the interface between the pin 313 and the seat 323 to be large enough to accommodate any relative movement between the upper member 310 and the lower member 320.

[0097] Under load, the free end 314 of the pin 313 can still be received in the seat 323. For example, the seat 323 may include a first portion 326 and a second portion 327. The first portion 326 may have a diameter that is larger than the diameter of the pin 313 and smaller than the diameter of the collar 315. The second portion 327 may have a diameter that may be larger than the diameter of the collar 315. Therefore, the pin 313 can be received in the first portion 326, and the free end 314 of the pin 313 can be received in the second portion 327. In this way, the free end 314 of the pin 313 can move downward in the second portion 327 of the seat 323 under load. The seat 323 may further include a plug 328 disposed in the second portion 327 of the seat 323. The plug 328 can hermetically isolate the interior of the seat 323 from the exterior of the lower member 320.

[0098] The apparatus 300 may further include a base member 340. The base member 340 may be configured to carry any sensitive assembly that can be suspended. For example, the base member 340 may be configured to carry an imaging mirror assembly (IMA), an illumination assembly, a laser, an interferometer, or other sensitive instruments or components. The base member 340 may be disposed on top of the upper member 310. The base member 340 may have a circular or polygonal shape. The base member 340 may have an upper side 341 and a lower side 342. The base member 340 may be configured to couple to the upper member 310. For example, the lower side 342 of the base member 340 may be configured to couple to the upper side 311 of the upper member 310.

[0099] When the base member 340 is coupled to the upper member 310 (eg Fig.11 ), the base member 340 may apply a load to the upper member 310 to cause the upper member 310 to transition from an unloaded state to a loaded state.

[0100] When the base member 340 is disengaged from the upper member 310 (eg Fig. 10A ), the base member 340 can release the load from the upper member 310 to cause the upper member 310 to transition from a loaded state to an unloaded state.

[0101] The underside 342 of the base member 340 may have a post 343 extending downwardly therefrom. The post 343 may have a cylindrical shape. The post 343 may have a free end 344 distal from the underside 342 of the base member 340. The free end 344 may have a spherical shape 345. The spherical shape 345 may have a diameter greater than the diameter of the post 343. The free end 344 may be other shapes, such as a canoe sphere, a spherical cylinder, or other kinematic / semi-kinematic features.

[0102] The upper side 311 of the upper member 310 may include a groove 316. When the base member 340 is coupled to the upper member 310, the free end 344 of the post 343 may contact the groove 316.

[0103] The groove 316 may have a V-shape and include a pair of abutment surfaces 317. The abutment surfaces 317 of the pair may be flat or curved. When the base member 340 is coupled to the upper member 310, the sphere 345 may contact the abutment surfaces 317. For example, the sphere 345 may contact one point on each abutment surface 317. The tapered profile of the abutment surfaces 317 may cause self-centering when the base member 340 is coupled to the upper member 310. For example, if the coupling is first misaligned (i.e., the sphere 345 contacts only one of the inner abutment surfaces 317, such as Fig. 10B ), the tapered profile may allow the ball 345 to slide to a centered position (as shown in FIG. Fig. 10C ), where there is contact with two adjacent faces 317.

[0104] The apparatus 300 may further include a telescopic tube 350. The telescopic tube 350 may be disposed between the upper member 310 and the lower member 320. The telescopic tube 350 may have an upper end 351 connected to the upper member 310 and a lower end 352 connected to the lower member 320. For example, the upper end 351 of the telescopic tube 350 may be connected to the lower side 312 of the upper member 310, and the lower end 352 of the telescopic tube 350 may be connected to the upper side 321 of the lower member 320. The telescopic tube 350 may be connected to the upper member 310 and the lower member 320 by welding. The telescopic tube 350 may surround the spring 330. For example, the inner diameter of the telescopic tube 350 may be larger than the outer diameter of the spring 330. The telescopic tube 350 may be configured to hermetically isolate the interior of the telescopic tube 350 from the exterior of the telescopic tube 350. For example, particles generated by the movement of the spring 330 and the contact between the pin 313 and the seat 323 can be contained within the telescoping tube 350 so as not to contaminate the clean air outside the telescoping tube 350. The telescoping tube 350 can be made of an elastic material. For example, the telescoping tube 350 can be a flexible corrugated component. The telescoping tube 350 can have a horizontal corrugation to allow for axial deformation. The telescoping tube 350 can be elastically deformed to a length greater than or equal to the length of the gap 324, and can have a sufficient fatigue life to repeatedly deform within this range. In this way, the telescoping tube 350 can maintain an airtight isolation between the upper member 310 and the lower member 320 in both a loaded state and an unloaded state. The telescoping tube 350 can also be strong enough to withstand a pressure difference between the outside of the telescoping tube 350 and the inside of the telescoping tube 350. It should be understood that the apparatus 300 can be disposed in a vacuum chamber, and the telescoping tube 350 can be capable of maintaining an airtight isolation between the upper member 310 and the lower member 320 during pressure fluctuations within the vacuum chamber.

[0105] According to an embodiment of the present disclosure, the device 300 may include a plurality of the above-mentioned components. For example, the device 300 may include three or more specific components, as further described below. Fig. 12A and 12B 13 to 17 .

[0106] The underside 312 of the upper member 310 may have at least three pins 313 extending downwardly therefrom. Fig. 13B, the at least three pins 313 may include a first pin 313a, a second pin 313b, and a third pin 313c. The at least three pins 313 may be equally spaced on the lower side 312 of the upper member 310. For example, the first pin 313a, the second pin 313b, and the third pin 313c may be located at three co-circular points on the lower side 312 of the upper member 310. Each of the at least three pins 313 may have the same structure. The free end 314 of each of the at least three pins 313 may have a collar 315. For example, the free end 314a of the first pin 313a may have a first collar 315a, the free end 314b of the second pin 313b may have a second collar 315b, and the free end 314c of the third pin 313c may have a third collar 315c. The diameter of the collar 315 of each of the at least three pins 313 may be greater than the diameter of each pin 313.

[0107] The lower member 320 may include at least three seats 323. For example, the lower member 320 may include a first seat 323a, a second seat 323b, and a third seat 323c that may form gaps 324a, 324b, and 324c, respectively. Each seat 323 may be configured to receive the free end 314 of one of the at least three pins 313. For example, the first seat 323a may be configured to receive the free end 314a of the first pin 313a, the second seat 323b may be configured to receive the free end 314b of the second pin 313b, and the third seat 323c may be configured to receive the free end 314c of the third pin 313c. Each of the at least three seats 323 may include a countersunk hole 325. For example, the first seat 323a may include a first countersunk hole 325a, the second seat 323b may include a second countersunk hole 325b, and the third seat 323c may include a third countersunk hole 325c. At least three seats 323 may be located at three co-circular points extending from the upper side 321 to the lower side 322 of the lower member 320. Fig.14A As shown in FIG. 3 , the first seat 323 a , the second seat 323 b , and the third seat 323 c may be arranged at 120 degrees relative to each other.

[0108] Each of the at least three seats 323 may include a first portion 326 and a second portion 327. Fig. 12A and 12B, the first seat 323a may have a first portion 326a and a second portion 327a, the second seat 323b may have a first portion 326b and a second portion 327b, and the third seat 323c may have a first portion 326c and a second portion 327c. The pin 313 of one of the at least three pins 313 may be received in the second portion 327, and the free end 314 of one of the at least three pins 313 may be received in the second portion 327. For example, the first pin 313a may be received in the first portion 326a of the first seat 323a, the second pin 313b may be received in the first portion 326b of the second seat 323b, and the third pin 313c may be received in the first portion 326c of the third seat 323c. The free end 314a of the first pin 313a can be received in the second portion 327a of the first seat 323a, the free end 314b of the second pin 313b can be received in the second portion 327b of the second seat 323b, and the free end 314c of the third pin 313c can be received in the second portion 327c of the third seat 323c.

[0109] The lower member 320 may further include at least three plugs 328. The at least three plugs may be disposed in corresponding seats of at least three seats 323 on the lower side 322 of the lower member 320. For example, Fig. 14B As shown in FIG. 1 , the first plug 328a, the second plug 328b, and the third plug 328c may be disposed in the first seat 323a, the second seat 323b, and the third seat 323c, respectively.

[0110] The spring 330 may include at least three springs. For example, the spring 330 may include a first spring 330a, a second spring 330b, and a third spring 330c. Fig.15 , the first spring 330a, the second spring 330b, and the third spring 330c may be identical. Each of the at least three springs 330 may be disposed between the upper member 310 and the lower member 320. For example, the upper end 331a of the first spring 330a, the upper end 331b of the second spring 330b, and the upper end 331c of the third spring 330c may each be connected to the upper member 310. The lower end 332a of the first spring 330a, the lower end 332b of the second spring 330b, and the lower end 332c of the third spring 330c may be connected to the lower member 320. Each of the at least three springs 330 may surround one of the at least three pins 313. For example, the first spring 330a may surround the first pin 313a, the second spring 330b may surround the second pin 313b, and the third spring 330c may surround the third pin 313c.

[0111] The telescopic tube 350 may include at least three telescopic tubes. For example, the telescopic tube 350 may include a first telescopic tube 350a, a second telescopic tube 350b, and a third telescopic tube 350c. Fig.16 , the first telescopic tube 350a, the second telescopic tube 350b, and the third telescopic tube 350c may be identical. Each of the at least three telescopic tubes 350 may be disposed between the upper member 310 and the lower member 320. For example, the upper end 351a of the first telescopic tube 350a, the upper end 351b of the second telescopic tube 350b, and the upper end 351c of the third telescopic tube 350c may each be connected to the upper member 310. The lower end 352a of the first telescopic tube 350a, the lower end 352b of the second telescopic tube 350b, and the lower end 352c of the third telescopic tube 350c may be connected to the lower member 320. Each of the at least three telescopic tubes 350 may surround one of the at least three springs 330. For example, the first telescopic tube 350a may surround the first spring 330a, the second telescopic tube 350b may surround the second spring 330b, and the third telescopic tube 350c may surround the third telescopic tube 350c.

[0112] The underside 342 of the base member 340 may have at least three posts 343 extending downwardly therefrom. Fig. 12A As shown in , the at least three columns 343 may include a first column 343a, a second column 343b, and a third column 343c. The at least three columns 343 may be equally spaced on the underside 342 of the base member 340. For example, the first column 343a, the second column 343b, and the third column 343c may be at three co-circular points on the underside 342 of the base member 340. Each of the at least three columns 343 may have the same structure. The free end 344 of each of the at least three columns 343 may have a spherical shape 345, the diameter of the spherical shape 345 being larger than the diameter of the column 343. For example, as Fig.17 As shown in FIG. 3 , the free end 344a of the first post 343a may have a first spherical shape 345a, the free end 344b of the second post 343b may have a second spherical shape 345b, and the free end 344c of the third post 343c may have a third spherical shape 345c.

[0113] The base member 340 can be configured to be coupled to the upper member 310. For example, Fig. 12B , the first column 343a, the second column 343b, and the third column 343c may be configured to be coupled to the upper member 310. When the base member 340 is coupled with the upper member 310, the base member 340 applies a load to the upper member 310 to cause the upper member 310 to transition from an unloaded state to a loaded state. When the base member 340 is decoupled from the upper member 310, the base member 340 releases the load from the upper member 310 to cause the upper member 310 to transition from a loaded state to an unloaded state.

[0114] The upper side 311 of the upper member 310 may include at least three grooves 316. For example, Fig.13A, the upper side 311 of the upper member 310 may include a first groove 316a, a second groove 316b, and a third groove 316c. The at least three grooves 316 may have a V-shape, and may each include a pair of abutment surfaces 317. For example, the first groove 316a, the second groove 316b, and the third groove 316c may include a first abutment surface 317a, a second abutment surface 317b, and a third abutment surface 317c, respectively. The pair of abutment surfaces 317 may be flat or curved. The at least three grooves 316 may be arranged at 120 degrees relative to each other. When the base member 340 is coupled to the upper member, the free end 344 of each of the at least three posts 343 may contact the pair of abutment surfaces 317 of one of the at least three grooves 316. For example, the free end 344a of the first column 343a may contact the first adjacent surface 317a of the first groove 316a, the free end 344b of the second column 343b may contact the second adjacent surface 317b of the second groove 316b, and the free end 344c of the third column 343c may contact the third adjacent surface 317c of the third groove 316c.

[0115] It should be appreciated that while the device 300 is described as having one or three of the various components, the number of these components may vary based on the specific application of the device 300, where self-centering of assemblies mounted on a flexible structure may be desired. To constrain all six degrees of freedom, six points of contact may be required between the base member 340 and the upper member 310. For example, six assemblies may be used where each assembly provides a single point of contact, or three assemblies may be used where each assembly provides two points of contact.

[0116] For the device 300 of the present disclosure, no manual action may be required to transition from the rigid state to the flexible state because the coupled load itself causes the transition to occur. This may allow for repeatable centered positioning of the assembly. Additionally, any particles generated from the engagement / disengagement of the internal mechanisms or chemical contamination from any lubricants used may be trapped within the body of the device 300 so as not to contaminate the clean external environment.

[0117] refer to Fig.18 , an embodiment of the present disclosure provides a method 400. The method 400 may include the following steps.

[0118] At step 410, a suspension assembly is provided. The suspension assembly may include components of the apparatus 300 described above in conjunction with Figures 10-11 or other embodiments disclosed herein. The suspension assembly may include an upper member. The upper member may have an upper side and a lower side. The lower side of the upper member may have a pin extending downwardly therefrom. The pin may have a cylindrical shape. The pin may have a free end away from the lower side of the upper member. The upper member may have a circular or polygonal shape. The upper member may be configured to carry a load in a loaded state and release the load in an unloaded state.

[0119] The suspension assembly may further include a lower member. The lower member may be disposed below the upper member. For example, the lower member may be spaced apart from the upper member in a vertical direction. The lower member and the upper member may be coaxially aligned. The lower member may have a circular or polygonal shape. For example, the lower member and the upper member may have the same shape. The lower member may be a fixed constraint. The lower member may have an upper side and a lower side. The upper side of the lower member may have a seat configured to receive the free end of the pin.

[0120] The suspension assembly may further include a spring. The spring may be disposed between the upper member and the lower member. The spring may have an upper end connected to the upper member and a lower end connected to the lower member. For example, the upper end of the spring may be connected to the lower side of the upper member, and the lower end of the spring may be connected to the upper side of the lower member. The spring may surround the pin. For example, the spring may have an inner diameter greater than the diameter of the pin. The spring may have a free length (i.e., an unloaded length) greater than the length of the pin.

[0121] In the unloaded state, the free end of the pin contacts the seat and the spring applies a tensile force to prevent relative lateral movement between the upper and lower parts. In the loaded state, the load applies a compressive force to the spring that forms a gap between the free end of the pin and the seat, which allows relative lateral movement between the upper and lower parts.

[0122] At step 420, a base member is coupled to an upper member above the suspension assembly. The base member may have a circular shape. The base member may have an upper side and a lower side. The lower side of the base member may be configured to couple to an upper side of the upper member. The base member may apply a load to the upper member to cause the upper member to transition from an unloaded state to a loaded state.

[0123] According to an embodiment of the present disclosure, method 400 may further include step 430. At step 430, the base component is disengaged from the upper component of the suspension assembly. The base component may release the load from the upper component to cause the upper component to transition from the loaded state to the unloaded state.

[0124] Using the method 400 of the present disclosure, no manual action may be required to transition from the rigid state to the flexible state because the load applied by coupling the base member to the upper member itself causes the transition to occur. Simply disengaging the base member from the upper member may cause the assembly to transition back to the rigid state. This may allow for repeatable centering of the assembly.

[0125] Although the present disclosure has been described with respect to one or more specific embodiments, it should be understood that other embodiments of the present disclosure may be made without departing from the scope of the present disclosure. Therefore, the present disclosure is deemed to be limited only by the appended claims and a reasonable interpretation thereof.

Claims

1. A coupling device, comprising: an upper member having a pin extending downwardly therefrom; a lower member disposed below the upper member and having a seat configured to receive the free end of the pin, the lower member being configured to carry a load in a loaded state and release the load in an unloaded state; and a spring disposed between the upper member and the lower member and having an upper end connected to the upper member and a lower end connected to the lower member such that the spring surrounds the pin, the spring having a free length that is less than the length of the pin; wherein in the unloaded state, the free end of the pin contacts the seat and the spring applies a compressive force to prevent relative lateral movement between the upper member and the lower member; Wherein in the loaded state, the load applies a tensile force to the spring that forms a gap between the free end of the pin and the seat, which allows relative lateral movement between the upper member and the lower member.

2. The coupling device according to claim 1, further comprising: a base member disposed below the lower member and configured to be coupled to the lower member; wherein when the base member is coupled to the lower member, the base member applies the load to the lower member to cause the lower member to transition from the unloaded state to the loaded state; and Wherein when the base component is disengaged from the lower component, the base component releases the load from the lower component to cause the lower component to transition from the loaded state to the unloaded state.

3. The coupling device of claim 2, wherein the base member includes a post extending upwardly therefrom, the free end of the post having a spherical shape, the diameter of the spherical shape being greater than the diameter of the post; wherein the lower member includes an opening; Wherein when the base member is coupled to the lower member, the free end of the post is received in the opening.

4. The coupling device of claim 3, wherein the opening comprises: a first portion having a width greater than said diameter of said spherical shape; and a second portion having a width greater than the diameter of the post and less than the diameter of the sphere; Wherein when the base member is coupled to the lower member, the free end of the post is received in the first portion and the post is at least partially received in the second portion.

5. The coupling device of claim 4, wherein the lower member further comprises a pair of inner abutment surfaces within the opening; and Wherein when the base member is coupled to the lower member, the spherical shape contacts the pair of inner abutment surfaces.

6. The coupling device of claim 5, wherein the pair of interior abutment surfaces are defined by tapered surfaces connecting the first portion to the second portion of the opening.

7. The coupling device of claim 5, wherein the pair of inner abutment surfaces are planar, such that the sphere contacts a point on each inner abutment surface.

8. The coupling device of claim 1, wherein in the loaded state, the free end of the pin is at least partially withdrawn from the seat.

9. A coupling device according to claim 1, wherein the free end of the pin has an inclined edge and the seat includes a countersunk hole, so that in the unloaded state, the free end of the pin is received in the seat and has an annular contact surface between the inclined edge and the countersunk hole.

10. The coupling device according to claim 1, further comprising: A telescopic tube is disposed between the upper member and the lower member and has an upper end connected to the upper member and a lower end connected to the lower member, wherein the telescopic tube surrounds the spring.

11. The coupling apparatus of claim 10, wherein the telescoping tube is configured to hermetically isolate an interior of the telescoping tube from an exterior of the telescoping tube.

12. The coupling device of claim 10, wherein the telescopic tube elastically deforms by a length greater than or equal to the length of the gap.

13. The coupling device of claim 1, wherein the upper member includes a fixed restraint.

14. The coupling device of claim 1, wherein the upper member has at least three pins extending downwardly therefrom, the at least three pins being equally spaced apart; wherein the lower member comprises at least three lower members, the seat of each lower member being configured to receive the free end of one of the at least three pins; and Wherein the spring comprises at least three springs disposed between the upper member and each of the at least three lower members and each spring surrounds one of the at least three pins.

15. The coupling device according to claim 14, further comprising: a base member disposed below the lower members and configured to couple to each of the lower members; wherein when the base member is coupled to each of the lower members, the base member applies the load to each of the lower members to cause each of the lower members to transition from the unloaded state to the loaded state; and Wherein when the base member is disengaged from each of the lower members, the base member releases the load from each of the lower members to cause each of the lower members to transition from the loaded state to the unloaded state.

16. The coupling device of claim 15, wherein the base member includes at least three posts extending upwardly therefrom, the at least three posts being equally spaced apart, the free end of each post having a spherical shape, the diameter of the spherical shape being greater than the diameter of the post; wherein each of the lower members includes an opening; Wherein when the base member is coupled to each of the lower members, the free end of each of the posts is received in the opening.

17. A coupling device comprising: an upper member having a pin extending downwardly therefrom, the upper member being configured to carry a load in a loaded state and to release the load in an unloaded state; a lower member disposed below the upper member and having a seat configured to receive a free end of the pin; and a spring disposed between the upper member and the lower member and having an upper end connected to the upper member and a lower end connected to the lower member such that the spring surrounds the pin, the spring having a free length greater than the length of the pin; wherein in the unloaded state, the free end of the pin contacts the seat and the spring applies a tension force to prevent relative lateral movement between the upper member and the lower member; Wherein in the loaded state, the load applies a compressive force to the spring that forms a gap between the free end of the pin and the seat, which allows relative lateral movement between the upper member and the lower member.

18. The coupling device according to claim 17, further comprising: a base member disposed on the upper member and configured to be coupled to the upper member; wherein when the base member is coupled to the upper member, the base member applies the load to the upper member to cause the upper member to transition from the unloaded state to the loaded state; and Wherein when the base component is disengaged from the upper component, the base component releases the load from the upper component to cause the upper component to transition from the loaded state to the unloaded state.

19. The coupling device of claim 18, wherein the base member includes a post extending downwardly therefrom, the free end of the post having a spherical shape, the spherical shape having a diameter greater than a diameter of the post; wherein the upper surface of the upper member includes a groove; Wherein when the base member is coupled to the upper member, the free end of the post contacts the groove of the upper member.

20. A combined method comprising: A suspension assembly is provided, the suspension assembly comprising: an upper member having a pin extending downwardly therefrom; a lower member disposed below the upper member and having a seat configured to receive the free end of the pin, the lower member being configured to carry a load in a loaded state and release the load in an unloaded state; and a spring disposed between the upper member and the lower member and having an upper end connected to the upper member and a lower end connected to the lower member such that the spring surrounds the pin, the spring having a free length that is less than the length of the pin; wherein in the unloaded state, the free end of the pin contacts the seat and the spring applies a compressive force to prevent relative lateral movement between the upper member and the lower member; wherein in the loaded state, the load applies a tensile force to the spring that forms a gap between the free end of the pin and the seat, which allows relative lateral movement between the upper member and the lower member; A base member is coupled to the lower member beneath the suspension assembly, wherein the base member applies the load to the lower member to cause the lower member to transition from the unloaded state to the loaded state.

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