Method for obtaining graphitized in-situ antenna by ablating diamond surface and application thereof

Abstract

The application discloses a method for obtaining a graphitized in-situ antenna by ablation of a diamond surface and application thereof, and aims at solving problems of a current microwave antenna, such as great interference from external factors and poor system integration. The method for obtaining the graphitized in-situ antenna comprises the following steps: firstly, cleaning a diamond substrate; secondly, spin-coating a photoresist on the surface of the cleaned diamond substrate, performing photoetching according to an antenna pattern, and then immersing the photoresist in a developing solution to form a mask; opening a radio frequency power supply to input energy of 50-100 W to ignite plasma, and then opening a baffle to deposit a transition metal film; and finally, placing the diamond substrate into a quartz glass tube to perform vacuum sealing, and performing high-temperature heating treatment. The application further relates to a method for obtaining a graphitized in-situ antenna by laser ablation. The application obtains a graphitized antenna pattern by using a transition metal high-temperature catalytic etching or laser ablation on the surface of the diamond, and the antenna can better reduce interference from external factors and improve integration.

Description

Technical Field

[0001] This invention belongs to the fields of semiconductor material processing and quantum technology, and particularly relates to the processing of micro / nano antennas on diamond surfaces and the control method of the ground state electron spin state of NV color centers. Background Technology

[0002] Diamond possesses excellent properties such as a high bandgap, high thermal conductivity, high carrier mobility, and low dielectric constant, making it a promising next-generation semiconductor material. When impurity atoms, such as nitrogen or silicon atoms, are incorporated into the diamond lattice, lattice defects or luminescent centers are formed. While these defects affect the perfect symmetry of the lattice, they possess characteristics of quantum light sources, showing broad development prospects in quantum fields such as quantum computing, quantum communication, and quantum detection. When the doped impurity atom is nitrogen, nitrogen-vacancy (NV) centers are formed inside the diamond. Based on the relationship between the energy level transitions of diamond NV centers and the external magnetic field, extremely weak magnetic field detection with high spatial resolution and high sensitivity can be achieved. Optical magnetic resonance (ODMR) using NV centers is a method for nanoscale magnetic field imaging. This method provides single-electron spin sensitivity and three-dimensional resolution better than 1 nm, and can be performed at room temperature. Utilizing this technology and the magnetic field sensitivity of NV centers, it can be used to fabricate quantum sensors for magnetic fields. NV center quantum sensors mainly consist of a light source, diamond, a microwave source, an antenna, and a photodetector. Theoretically, NV center quantum sensors have short start-up times and are easy to miniaturize and integrate, making them a major development direction for chip sensors. Moreover, compared to other atomic sensors, NV center quantum sensors have a significant advantage in limiting sensitivity, and initialization and electron spin readout are relatively easy to achieve, requiring only low-cost silicon photodetectors. However, NV center sensors present considerable complexity in engineering design; for example, antenna design is a crucial aspect. To manipulate the ground-state electron spin state of NV centers, microwaves are needed. Antennas are devices that radiate and receive microwaves, thus allowing for the manipulation of the NV center spin state. Based on the maturity of antenna theory and the need for NV center electron spin state manipulation, microstrip antennas, three-dimensional resonators, and micro / nano antennas have been widely used and developed in manipulation experiments. To achieve precise manipulation of diamond NV centers and system integration, miniaturization of antenna design is necessary, thus micro / nano antennas play a vital role. Micro / nano antennas refer to radiating antennas with different structures fabricated on diamond samples using micro / nano fabrication techniques. Summary of the Invention

[0003] The purpose of this invention is to solve the problems of existing microwave antennas being greatly affected by external factors and failing to improve system integration, as well as the low integration, complex process, and poor stability of radiating antennas fabricated on diamond samples using photolithography. The invention provides a method to generate graphitized in-situ antennas on the diamond surface by high-temperature catalytic etching of transition metals or laser etching, thereby reducing interference from external factors and improving system integration. This in-situ antenna is then used for photodetector magnetic resonance detection.

[0004] The method for obtaining graphitized in-situ antennas by high-temperature catalytic ablation of transition metals on diamond surfaces according to the present invention is implemented according to the following steps:

[0005] I. Cleaning:

[0006] A high-temperature, high-pressure diamond substrate with NV color centers is cleaned to obtain a cleaned diamond substrate.

[0007] II. Preparation of surface graphitized antenna patterns:

[0008] a. Spin-coat photoresist onto the cleaned diamond substrate surface, dry and heat to cure, then place it in a photolithography machine and perform photolithography according to the antenna pattern. After photolithography, immerse it in a developing solution to form a mask, thus obtaining a diamond substrate with a mask.

[0009] b. Place the diamond substrate with the mask into the magnetron sputtering device, evacuate and then introduce argon gas. Adjust the argon gas pressure to 2-5 Pa and then turn on the radio frequency power supply to input 50-100 W of energy for plasma ignition. After ignition, adjust the argon gas pressure to 0.5-1 Pa, open the baffle to deposit a transition metal film, and obtain a diamond substrate with a transition metal film.

[0010] c. Immerse the diamond substrate with the transition metal film in the adhesive remover solution, clean and dry it, then place it in a quartz glass tube for vacuum sealing, and then place it in a tube furnace for heating treatment at 800-1000℃. After natural cooling, you will get a diamond with a graphitized antenna.

[0011] The method for obtaining a graphitized in-situ antenna by laser ablation of a diamond surface according to the present invention is implemented according to the following steps:

[0012] I. Cleaning:

[0013] A high-temperature, high-pressure diamond substrate with NV color centers is cleaned to obtain a cleaned diamond substrate.

[0014] II. Preparation of surface graphitized antenna patterns:

[0015] a. Start the water cooling unit, work platform and air pump of the laser diamond cutting machine in sequence;

[0016] b. Preheat the laser excitation source, and turn on the pump source after preheating is complete;

[0017] c. Apply adhesive to the sample placement platform, place the cleaned diamond substrate on the sample placement platform and bond it to obtain a sample placement platform with the diamond substrate bonded on it.

[0018] d. Install the sample placement platform with the diamond substrate bonded to it onto the working platform of the laser diamond cutting machine;

[0019] e. Set the antenna pattern and move the worktable so that the laser head is aligned with the sample placement platform with the diamond substrate bonded on it.

[0020] f. In idle mode, observe that the laser ablation path is the same as the set antenna pattern;

[0021] g. The laser head emits a laser to ablate a graphitized (microwave) antenna on the surface of a diamond substrate;

[0022] h. Remove the sample placement platform with the diamond substrate bonded to it, immerse it in the adhesive removal solution to separate the diamond substrate and the sample placement platform.

[0023] i. Immerse the separated diamond substrate in a binder removal solution to obtain a diamond substrate with a graphitized antenna.

[0024] j. Then, the diamond substrate with graphitized antenna is impacted with deionized water to remove the diamond waste generated during the laser ablation process. After drying, a diamond with graphitized in-situ antenna is obtained.

[0025] The present invention relates to the application of diamond with graphitized antenna as a quantum sensor for micro-magnetic fields.

[0026] The method for obtaining graphitized in-situ antennas by diamond surface ablation of the present invention and its application have the following beneficial effects:

[0027] 1. This invention obtains graphitized antenna patterns on the surface of diamond by high-temperature catalytic etching or laser ablation with transition metals. Compared with microwave antennas for controlling NV color centers, this antenna can better reduce interference from external factors and effectively promote the research of diamond NV color centers.

[0028] 2. This invention utilizes the conductive properties of graphite to directly apply graphitized patterns on the surface of diamond to function as an antenna, reducing the number of components used and greatly improving the system integration.

[0029] 3. This invention designs graphitized patterns on the surface of diamond by drawing antenna patterns. Therefore, by drawing different antenna shapes, antennas with different control effects can be designed and applied to various quantum measurement and sensing applications.

[0030] This invention provides an innovative and optimized fabrication method for micro- and nano-antennas in fields such as fundamental physics research and materials science, and can be extended to other technologies requiring microwave manipulation of diamond. It also provides technical support for key engineering fields such as quantum sensors based on diamond color centers and micromagnetic detection, and has significant demonstrative and guiding effects. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of the in-situ graphitized diamond antenna in Example 1;

[0032] Figure 2 The image shows a graphitized in-situ antenna pattern on a diamond substrate obtained in Example 1, where the black portion represents the graphitized antenna, and the lower left and lower right corners represent silver paste for wiring.

[0033] Figure 3 The image shows the Raman spectrum of the graphitized antenna obtained by high-temperature catalytic etching of transition metals in Example 1.

[0034] Figure 4 The ODMR waveform obtained in Example 1;

[0035] Figure 5 The image shows the Raman spectrum of the graphitized antenna obtained by laser ablation in Example 2.

[0036] Figure 6 The image shows the ODMR waveform obtained under a small magnetic field in Example 2. Detailed Implementation

[0037] Specific Implementation Method 1: This implementation method for obtaining graphitized in-situ antennas by high-temperature catalytic ablation of transition metals on diamond surfaces is carried out according to the following steps:

[0038] I. Cleaning:

[0039] A high-temperature, high-pressure diamond substrate with NV color centers is cleaned to obtain a cleaned diamond substrate.

[0040] II. Preparation of surface graphitized antenna patterns:

[0041] a. Spin-coat a layer of photoresist onto the cleaned diamond substrate surface, dry and heat to cure, then place it in a photolithography machine and perform photolithography according to the antenna pattern. After photolithography, immerse it in a developing solution to form a mask, thus obtaining a diamond substrate with a mask.

[0042] b. Place the diamond substrate with the mask into the magnetron sputtering device, evacuate and then introduce argon gas. Adjust the argon gas pressure to 2-5 Pa and then turn on the radio frequency power supply to input 50-100 W of energy for plasma ignition. After ignition, adjust the argon gas pressure to 0.5-1 Pa, open the baffle to deposit a transition metal thin film, and obtain a diamond substrate with a transition metal thin film.

[0043] c. Immerse the diamond substrate with the transition metal film in a desmearing solution, clean and dry it, then place it in a quartz glass tube for vacuum sealing, and then place it in a tube furnace for heating treatment at 800-1000℃. After natural cooling, you will get a diamond with a graphitized antenna.

[0044] This embodiment innovatively utilizes high-temperature catalytic etching or laser ablation of transition metals on the diamond surface. Under a pre-designed antenna pattern, the diamond surface is etched, and an in-situ antenna is fabricated on the diamond surface using graphitization. Leveraging the conductive properties of graphite, microwaves can be generated on the diamond surface, thereby reducing interference from external factors and significantly improving system integration. In summary, this invention uses diamond surface graphitization technology to fabricate micro / nano antennas, obtaining in-situ antennas on the diamond surface, thus improving system integration. Laser ablation is used to obtain graphitized in-situ antennas to reduce interference from external factors.

[0045] Specific Implementation Method Two: This implementation method differs from Specific Implementation Method One in that in step one, deionized water, acetone, and isopropanol solutions are used sequentially to perform ultrasonic cleaning on the high-temperature and high-pressure diamond substrate.

[0046] Specific Implementation Method 3: This implementation method differs from Specific Implementation Method 2 in that the power of each ultrasonic cleaning is 100W and the cleaning time is 30min.

[0047] Specific Implementation Method Four: This implementation method differs from Specific Implementation Methods One to Three in that, in step b, after adjusting the argon gas pressure to 3 Pa, the radio frequency power supply is turned on to input 60 W of energy for plasma ignition. After ignition, the argon gas pressure is adjusted to 0.5 Pa, and the baffle is opened to deposit a transition metal thin film.

[0048] Specific Implementation Method 5: This implementation method differs from Specific Implementation Methods 1 to 4 in that the thickness of the transition metal thin film deposited in step b is 300-500 nm.

[0049] Specific Implementation Method Six: This implementation method differs from Specific Implementation Methods One to Five in that step c involves heating at 800–1000°C for 2–3 hours.

[0050] Specific Implementation Method Seven: The method for obtaining a graphitized in-situ antenna by laser ablation of a diamond surface in this implementation method is carried out according to the following steps:

[0051] I. Cleaning:

[0052] A high-temperature, high-pressure diamond substrate with NV color centers is cleaned to obtain a cleaned diamond substrate.

[0053] II. Preparation of surface graphitized antenna patterns:

[0054] a. Start the water cooling unit, work platform and air pump of the laser diamond cutting machine in sequence;

[0055] b. Preheat the laser excitation source, and turn on the pump source after preheating is complete;

[0056] c. Apply adhesive to the sample placement platform, place the cleaned diamond substrate on the sample placement platform and bond it to obtain a sample placement platform with the diamond substrate bonded on it.

[0057] d. Install the sample placement platform with the diamond substrate bonded to it onto the working platform of the laser diamond cutting machine;

[0058] e. Set the antenna pattern and move the worktable so that the laser head is aligned with the sample placement platform with the diamond substrate bonded on it.

[0059] f. In idle mode, observe that the laser ablation path is the same as the set antenna pattern;

[0060] g. The laser head emits a laser to ablate a graphitized (microwave) antenna on the surface of a diamond substrate;

[0061] h. Remove the sample placement platform with the diamond substrate bonded to it, immerse it in the adhesive removal solution to separate the diamond substrate and the sample placement platform.

[0062] i. Immerse the separated diamond substrate in a binder removal solution to obtain a diamond substrate with a graphitized antenna.

[0063] j. Then, the diamond substrate with graphitized antenna is impacted with deionized water to remove the diamond waste generated during the laser ablation process. After drying, a diamond with graphitized in-situ antenna is obtained.

[0064] Specific Implementation Method Eight: This implementation method differs from Specific Implementation Method Seven in that step g uses a green laser, with the laser power controlled at 1W, the frequency at 8KHz, and the operating current at 21A.

[0065] Specific Implementation Method Nine: This implementation method differs from Specific Implementation Method Seven or Eight in that the width of the graphitized antenna (microstrip line) ablated in step g is 150-350 μm, and the ablation thickness is 10-20 μm.

[0066] Specific Implementation Method 10: This implementation method differs from Specific Implementation Method 1 or 7 in that the structure of the graphitized antenna is "Ω" shaped.

[0067] Example 1: The method for obtaining a graphitized in-situ antenna by transition metal catalytic etching on a diamond surface in this example is implemented according to the following steps:

[0068] I. Cleaning:

[0069] The high-temperature and high-pressure diamond substrate with NV color center was sequentially placed in acetone, deionized water and anhydrous ethanol, and cleaned for 30 minutes under ultrasonic power of 100W to obtain the cleaned diamond substrate.

[0070] II. Preparation of surface graphitized antenna patterns:

[0071] a. Spin-coat the cleaned diamond substrate surface at a low speed of 2000 rpm for 30 seconds, then spin-coat at a high speed of 8000 rpm for 60 seconds. Bake at 95°C for 90 seconds to solidify, then place in a photolithography machine and apply according to the antenna pattern (e.g., ...). Figure 1 Photolithography was performed on the antenna (as shown), which is shaped like an "Ω". After photolithography, the substrate was immersed in the developing solution for 60 seconds to form a mask, thus obtaining a diamond substrate with a mask.

[0072] b. Place the masked diamond substrate into the magnetron sputtering apparatus, using iron as the target material, and evacuate to a vacuum of 3×10⁻⁶. - 3 After Pa, argon gas was introduced, and the argon gas pressure was adjusted to 3 Pa. Then, the radio frequency power supply was turned on and 60 W of energy was input to initiate plasma ignition. After ignition, the argon gas pressure was adjusted to 0.5 Pa, and the baffle was turned on to deposit a thin film for 42 min, resulting in a diamond substrate with a transition metal film with a thickness of 300 nm.

[0073] c. Immerse the diamond substrate with the transition metal film in the adhesive solution for 2 hours, use a wash bottle pump to deionize the water to impact the sample surface, blow dry, put it into a quartz glass tube, introduce argon gas, vacuum seal the tube, and then put it into a tube furnace and heat it at 950℃ for 2 hours. After natural cooling, the diamond with graphitized antenna is obtained.

[0074] III. Raman spectroscopy characterization:

[0075] Use a 10x microscope to focus on the upper surface of the diamond with graphitized antennas to determine the characterization area, then switch to a 50x microscope for observation, select test points in the diamond graphitized antenna pattern area, and refocus.

[0076] The excitation source used was 532nm excitation light with an energy of 3mW, the scan time was 1s, and the test spectrum range was adjusted to 550–3000cm⁻¹. -1The Raman spectrum at the in-situ antenna region on the diamond surface was measured, such as... Figure 3 As shown, this confirms the formation of graphite;

[0077] IV. Optical Probe Magnetic Resonance Detection:

[0078] A diamond sample with a graphitized antenna was placed on a PCB antenna board, and the electrodes and the graphitized in-situ antenna were connected with gold wire and silver paste.

[0079] Use a 10x microscope to focus on the surface of the diamond to determine the testing area. Then switch to a 50x microscope for observation, select test points on the normal surface area of ​​the diamond, and refocus.

[0080] The excitation source used was 532nm excitation light with an energy of 3mW. The microwave frequency was set to a starting value of 2.82GHz, an ending value of 2.92GHz, a frequency increment of 0.001GHz, a detection duration of 200ms, a microwave intensity of 1dBm, and two tests were performed. The ODMR waveform was obtained as follows. Figure 4 As shown.

[0081] from Figure 4 The data shows a clear signal at 2.87 GHz, indicating that the graphitized in-situ antenna generated by high-temperature catalytic etching of iron can transmit microwaves and successfully perform ODMR detection.

[0082] In this embodiment, the microwave antenna pattern is Ω-shaped, such as... Figure 1 As shown, the two ends of the circular open loop extend vertically to form two feed lines.

[0083] In this embodiment, the diamond with a graphitized antenna is used to detect magnetic resonance signals using optically detected magnetic resonance (ODMR).

[0084] Example 2: The method for obtaining a graphitized in-situ antenna by diamond surface ablation in this example is implemented according to the following steps:

[0085] I. Cleaning:

[0086] The high-temperature and high-pressure diamond substrate with NV color center was sequentially placed in acetone, deionized water and anhydrous ethanol, and cleaned for 30 minutes under ultrasonic power of 100W to obtain the cleaned diamond substrate.

[0087] II. Preparation of surface graphitized antenna patterns:

[0088] a. Start the water cooling unit, work platform and air pump of the laser diamond cutting machine in sequence;

[0089] b. Preheat the laser excitation source. After preheating, turn on the laser pump source. The excitation source is used to generate the excitation of the laser, and the pump source is used to control the laser generation.

[0090] c. Apply adhesive to the sample placement platform, place the cleaned diamond substrate on the sample placement platform and bond it, thus obtaining a sample placement platform with the diamond substrate bonded on it.

[0091] d. Install the sample placement platform with the diamond substrate bonded to it onto the working platform of the laser diamond cutting machine;

[0092] e. Set the antenna pattern and move the worktable so that the laser head is aligned with the sample placement platform with the diamond substrate bonded on it.

[0093] f. In idle mode, observe that the laser ablation path is the same as the set antenna pattern;

[0094] g. Using a green laser, the laser power is controlled at 1W, the frequency at 8KHz, and the working current at 21A. The laser head is started to emit laser light, and a graphitized in-situ antenna is ablated on the surface of the diamond substrate with an ablation thickness of 10μm. A graphitized (microwave) antenna is ablated on the surface of the diamond substrate.

[0095] h. Remove the sample placement platform with the diamond substrate bonded to it, immerse it in the adhesive removal solution to separate the diamond substrate and the sample placement platform.

[0096] i. The separated diamond substrate is then immersed in a binder removal solution to obtain a diamond substrate with a graphitized antenna.

[0097] j. Then, use deionized water to impact the diamond substrate with graphitized antenna, peel off the diamond waste generated during the laser ablation process, and blow dry to obtain a diamond with graphitized in-situ antenna.

[0098] III. Raman spectroscopy characterization:

[0099] Use a 10x microscope to focus on the surface of the diamond to determine the characterization area, then switch to a 50x microscope for observation, select test points in the diamond graphitized antenna pattern area, and refocus.

[0100] The excitation source used was 532nm excitation light with an energy of 3mW, the scan time was 1s, and the test spectrum range was adjusted to 550–3000cm⁻¹. -1 The Raman spectrum at the in-situ antenna region on the diamond surface was measured, such as... Figure 5 As shown, this demonstrates the formation of graphite;

[0101] IV. Optical Probe Magnetic Resonance Detection:

[0102] A diamond substrate sample with a graphitized in-situ antenna was placed on a PCB antenna board, and the electrodes and the graphitized in-situ antenna were connected with gold wire and silver paste.

[0103] Use a 10x microscope to focus on the surface of the diamond to determine the test area; then switch to a 50x microscope for observation, select the test point in the normal surface area of ​​the diamond, and focus again.

[0104] The excitation source was 532nm excitation light with an energy of 3mW. The microwave frequency was set to a starting value of 2.82GHz, an ending value of 2.92GHz, a frequency increment of 0.001GHz, a detection duration of 200ms, a microwave intensity of 0dBm, and one test run. The ODMR waveform under a small magnetic field was obtained, as shown below. Figure 6 As shown. From Figure 6 The fitted data shows that the frequencies of the two peaks are f1 = 2.858 GHz and f2 = 2.885 GHz, indicating that the graphitized in-situ antenna obtained by laser ablation can transmit microwaves and generate signals, and can successfully perform ODMR detection under magnetic field conditions.

Claims

1. A method for obtaining graphitized in-situ antennas by high-temperature catalytic ablation of transition metals on diamond surfaces, characterized in that... This method is implemented according to the following steps: I. Cleaning: A high-temperature, high-pressure diamond substrate with NV color centers is cleaned to obtain a cleaned diamond substrate. II. Preparation of surface graphitized antenna patterns: a. Spin-coat photoresist onto the cleaned diamond substrate surface, dry and heat to cure, then place it in a photolithography machine and perform photolithography according to the antenna pattern. After photolithography, immerse it in a developing solution to form a mask, thus obtaining a diamond substrate with a mask. b. Place the diamond substrate with the mask into the magnetron sputtering device, evacuate and then introduce argon gas. Adjust the argon gas pressure to 2-5 Pa and then turn on the radio frequency power supply to input 50-100 W of energy for plasma ignition. After ignition, adjust the argon gas pressure to 0.5-1 Pa, open the baffle to deposit a transition metal film, and obtain a diamond substrate with a transition metal film. c. Immerse the diamond substrate with the transition metal film in the adhesive remover solution, clean and dry it, then place it in a quartz glass tube for vacuum sealing, and then place it in a tube furnace for heating treatment at 800-1000℃. After natural cooling, you will get a diamond with a graphitized antenna.

2. The method for obtaining a graphitized in-situ antenna by high-temperature catalytic ablation of a transition metal on a diamond surface according to claim 1, characterized in that... In step one, the high-temperature and high-pressure diamond substrate is ultrasonically cleaned sequentially using deionized water, acetone, and isopropanol solutions.

3. The method for obtaining a graphitized in-situ antenna by high-temperature catalytic ablation of a transition metal on a diamond surface according to claim 1, characterized in that... In step b, after adjusting the argon gas pressure to 3 Pa, turn on the radio frequency power supply and input 60 W of energy to initiate plasma ignition. After ignition, adjust the argon gas pressure to 0.5 Pa and open the baffle to deposit a transition metal thin film.

4. The method for obtaining a graphitized in-situ antenna by high-temperature catalytic ablation of a transition metal on a diamond surface according to claim 1, characterized in that... In step b, the thickness of the transition metal film is 300–500 nm.

5. The method for obtaining a graphitized in-situ antenna by high-temperature catalytic ablation of a transition metal on a diamond surface according to claim 1, characterized in that... In step c, heat treatment is carried out at 800-1000℃ for 2-3 hours.

6. A method for obtaining a graphitized in-situ antenna by laser ablation of a diamond surface, characterized in that... This method is implemented according to the following steps: I. Cleaning: A high-temperature, high-pressure diamond substrate with NV color centers is cleaned to obtain a cleaned diamond substrate. II. Preparation of surface graphitized antenna patterns: a. Start the water cooling unit, work platform and air pump of the laser diamond cutting machine in sequence; b. Preheat the laser excitation source, and turn on the pump source after preheating is complete; c. Apply adhesive to the sample placement platform, place the cleaned diamond substrate on the sample placement platform and bond it to obtain a sample placement platform with the diamond substrate bonded on it. d. Install the sample placement platform with the diamond substrate bonded to it onto the working platform of the laser diamond cutting machine; e. Set the antenna pattern and move the worktable so that the laser head is aligned with the sample placement platform with the diamond substrate bonded on it. f. In idle mode, observe that the laser ablation path is the same as the set antenna pattern; g. The laser head emits a laser to ablate a graphitized antenna on the surface of a diamond substrate; h. Remove the sample placement platform with the diamond substrate bonded to it, immerse it in the adhesive removal solution to separate the diamond substrate and the sample placement platform. i. Immerse the separated diamond substrate in a binder removal solution to obtain a diamond substrate with a graphitized antenna. j. Then, the diamond substrate with graphitized antenna is impacted with deionized water to remove the diamond waste generated during the laser ablation process. After drying, a diamond with graphitized in-situ antenna is obtained.

7. The method for obtaining a graphitized in-situ antenna by laser ablation of a diamond surface according to claim 6, characterized in that... Step g uses a green laser, with the laser power controlled at 1W, the frequency at 8KHz, and the operating current at 21A.

8. The method for obtaining a graphitized in-situ antenna by laser ablation of a diamond surface according to claim 6, characterized in that... The graphitized antenna ablated in step g has a width of 150–350 μm and an ablation thickness of 10–20 μm.

9. The method for obtaining a graphitized in-situ antenna according to claim 1 or 6, characterized in that... The structure of the graphitized antenna is Ω-shaped.

10. The application of a diamond with a graphitized antenna obtained by the method for obtaining a graphitized in-situ antenna by diamond surface ablation according to claim 1 or 6, characterized in that... The diamond with graphitized antenna is used as a quantum sensor with a micro-magnetic field.

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