Ultrasonic radiation unit

Abstract

The present invention provides an ultrasonic radiating unit 21 comprising a vibrating plate 12, ultrasonic transducers 31, a front resonant component 52, and a rear resonant component 53. A stud 15 protrudes from the non-radiating surface 14 of the vibrating plate 12. The transducer front plate 32 of the ultrasonic transducer 31 is bonded to the non-radiating surface 14, and the front resonant component 52 is bonded to the non-radiating surface 14, with the stud 15 inserted. The rear resonant component 53 is positioned at the front end of the stud 15 to secure the front resonant component 52. The ultrasonic transducers 31 are arranged in a row, with resonators 51a positioned at the ends of the row and resonators 51b positioned in the middle of the row. The rear resonant component 53, where the resonators 51a are positioned at the ends, is formed of a metal material having greater flexural rigidity than the front resonant component 52. The ultrasonic radiating unit of the present invention can reduce erosion and uneven cleaning of the vibrating plate and improve the bonding strength of the ultrasonic transducers to the vibrating plate.

Description

Technical Field

[0001] The present invention relates to an ultrasonic radiating unit that radiates ultrasonic waves from an ultrasonic vibrator. Background Art

[0002] Ultrasonic cleaning devices that clean objects by irradiating a cleaning solution with ultrasonic waves (ultrasonic cleaning) have been put to practical use (see, for example, Patent Document 1). Ultrasonic cleaning, which efficiently cleans even the finest details of complexly shaped objects through the combination of the physical effects of ultrasound and the chemical effects of the cleaning solution, is indispensable in the manufacture of precision machinery parts, optical components, liquid crystal displays, semiconductors, and the like.

[0003] In addition, if Figure 16 As shown, the ultrasonic cleaning device 200 has a vibrating plate 201, also known as a radiation plate. The vibrating plate 201 generally serves as the bottom of the cleaning tank 202 and is formed of a stainless steel plate several millimeters thick. Furthermore, ultrasonic vibrators 204, which are convex shapes and are fastened by multiple bolts, are joined to the non-radiating surface 203 of the vibrating plate 201. Furthermore, the surface of the vibrating plate 201 opposite the non-radiating surface 203 serves as an ultrasonic radiation surface 205. Furthermore, in the ultrasonic cleaning device 200 emitting ultrasonic waves of, for example, several 10 kHz, the object to be cleaned 207 is cleaned by utilizing the strong shock waves of cavitation caused by the ultrasonic waves in the cleaning liquid 206.

[0004]

Prior art literature

[0005] [Patent Literature]

[0006] Patent Document 1: Japanese Patent Application Publication No. 2019-058883 ( Figure 1 wait)

[0007] However, a circular vibrator with a circular front panel, viewed from above, is generally used as the ultrasonic vibrator 204. The circular vibrator is screwed onto a stud welded to the vibration plate 201 and then screwed with an adhesive, allowing it to be firmly bonded to the non-radiating surface 203 of the vibration plate 201. However, when multiple circular vibrators are bonded to the vibration plate 201, gaps form between adjacent circular vibrators. This results in damage (erosion 208) to the vibration plate 201 caused by cavitation in these gaps, and uneven cleaning due to variations in sound pressure.

[0008] Therefore, it is also possible to use a square-shaped transducer with a rectangular front panel as the ultrasonic transducer 204. This allows the square-shaped transducer to be closely positioned on the vibration plate 201, thereby preventing erosion 208 on the vibration plate 201. Furthermore, the close positioning of the square-shaped transducers achieves uniform vibration distribution on the vibration plate 201, thereby achieving uniform sound pressure distribution and reducing uneven cleaning.

[0009] However, conventional square vibrators cannot use threaded connections using stud bolts, requiring only adhesive bonding, resulting in weak joint strength. In particular, when pressure is applied to the vibration plate 201 (either in a decompressed or pressurized state), stress concentrates on the adhesive layer (adhesive), potentially causing delamination in the adhesive layer.

[0010] Therefore, the inventors of the present application are researching an ultrasonic vibration unit having the following structure. This unit uses a component formed by fastening the vibrator front plate of a convex ultrasonic vibrator with bolts and connecting the front side resonance component constituting the resonator with a coupling. The vibrating plate is fixed with bolts through the rear side resonance component constituting the resonator, while the column bolts of the vibrating plate are inserted into the front side resonance component. However, in the case of this unit, since the rear side resonance component is easily excited to generate bending vibration, there is a concern about heat generation or stress damage depending on the vibration level. Therefore, it is necessary to consider suppressing bending vibration in practical application. Summary of the Invention

[0011] The present invention was developed in response to the aforementioned challenges. Its purpose is to provide an ultrasonic radiating unit that can reduce erosion and uneven cleaning of a vibration plate and improve the bonding strength of the ultrasonic transducer to the vibration plate. Another object of the present invention is to provide an ultrasonic radiating unit that can suppress bending vibrations generated during vibration.

[0012] The ultrasonic radiating unit of technical solution 1 of the present invention includes: a vibration plate, which has an ultrasonic radiating surface and a non-radiating surface located on the opposite side of the radiating surface, and a bolt is protruding from the non-radiating surface; an ultrasonic vibrator of a bolt-tightening convex model, which is combined with a vibrator front plate on the non-radiating surface; a front side resonance component, which is engaged with the non-radiating surface and is provided with a bolt insertion hole for inserting the bolt; a rear side resonance component, which is separately provided at the front end portion of the bolt and the front side resonance component, and is fastened to the bolt when the front side resonance component is clamped between the vibration plate, and the front side resonance component and the rear side resonance component are fastened to the bolt. A component constitutes a plurality of resonators that can vibrate as a whole, the side surface of the vibrator front panel and the side surface of the front side resonant component are connected by a coupling that transmits the vibration of the ultrasonic vibrator to the resonator, the plurality of resonators are composed of end-arranged resonators that are arranged in a column together with the plurality of ultrasonic vibrators and are located at the end of the column, and a middle-arranged resonator that is located in the middle of the column, and at least the rear side resonant component that constitutes the end-arranged resonators among the rear side resonant components that constitute the end-arranged resonators and the rear side resonant components that constitute the middle-arranged resonators is formed of a metal material with a greater bending rigidity than that of the front side resonant component.

[0013] Therefore, according to the invention described in claim 1, by arranging the multiple ultrasonic vibrators so that they form a vibrator array, the ultrasonic vibrators are positioned close to each other. This facilitates uniform vibration distribution within the vibrating plate, achieving uniform sound pressure distribution and reducing uneven cleaning. Furthermore, erosion of the vibrating plate can be reduced.

[0014] Furthermore, the vibrator front panel and the front-side resonant component are connected via a coupling. The front-side resonant component has a bolt insertion hole, into which a bolt protruding from the non-radiating surface of the vibration plate is inserted. Therefore, when the rear-side resonant component is screwed onto the front end of the bolt inserted into the bolt insertion hole, not only is the front-side resonant component securely fixed to the vibration plate, but the vibrator front panel (and the ultrasonic vibrator), which is connected to the front-side resonant component via the coupling, is also securely fixed to the vibration plate. As a result, the bonding strength of the ultrasonic vibrator to the vibration plate is enhanced.

[0015] Furthermore, the resonator vibrates due to resonance as the ultrasonic vibrator vibrates. Furthermore, because the resonator's structure is simpler than that of an ultrasonic vibrator, which is composed of multiple components, its manufacturing cost is generally lower. Therefore, instead of simply placing multiple ultrasonic vibrators on the vibration plate, a low-cost vibrator unit can be realized by placing the resonator separately from the ultrasonic vibrator.

[0016] Furthermore, of the rear resonant components constituting the end-mounted resonators and the rear resonant components constituting the middle-mounted resonators, at least the rear resonant components constituting the end-mounted resonators are formed of a metal material having a greater bending rigidity than the front resonant components. This improves the bending strength of the portion susceptible to high bending stress during vibration, effectively suppressing bending vibration. This prevents heat generation and stress damage in these portions, while maintaining the resonant performance required of the resonators.

[0017] According to a second aspect of the present invention, in addition to the first aspect, the rear side resonance member constituting the end-arranged resonator is formed of a metal material having a Young's modulus of 100 GPa or more.

[0018] Technical Solution 3 of the present invention is based on Technical Solution 1, wherein the rear side resonance component constituting the end-arranged resonator is formed using a metal material with a Young's modulus of 100 GPa or more, and the front side resonance component, the vibrator front panel and the coupling have a lower density than the rear side resonance component constituting the end-arranged resonator and are formed using a metal material with high thermal conductivity.

[0019] Technical solution 4 of the present invention is based on any one of technical solutions 1 to 3, wherein the length of the rear side resonance component in the height direction is more than 1 / 4 of the length of the resonator in the height direction, and the front surface of the rear side resonance component is in surface contact with the rear surface of the front side resonance component.

[0020] As described above, according to the inventions described in claims 1 to 4, erosion and uneven cleaning on the vibration plate can be reduced, the bonding strength of the ultrasonic vibrator to the vibration plate can be improved, and bending vibrations generated during vibration can be suppressed. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic configuration diagram showing an ultrasonic cleaning device according to a first embodiment.

[0022] Figure 2 It is a perspective view showing the vibration plate type ultrasonic radiating unit in the first embodiment.

[0023] Figure 3 yes Figure 2 AA line cross-section diagram.

[0024] Figure 4 It is a plan view showing a transducer unit constituting the ultrasonic radiating unit.

[0025] Figure 5 This is an exploded cross-sectional view of the ultrasonic radiating unit, used to illustrate the assembly procedure.

[0026] Figure 6 This is a perspective view showing a vibration plate type ultrasonic radiating unit of Comparative Example 1.

[0027] Figure 7 This is a schematic perspective view showing an ultrasonic cleaning device used for analyzing sound pressure distribution.

[0028] Figure 8 This is a table comparing the properties of various metal materials used in components constituting the ultrasonic radiating unit.

[0029] Figure 9A : is a graph showing the vibration displacement analysis results of the embodiment, Figure 9B It is a graph showing the vibration displacement analysis results of Comparative Example 2.

[0030] Figure 10 It is a perspective view showing a vibration plate type ultrasonic radiating unit according to a second embodiment.

[0031] Figure 11 yes Figure 10 BB line cross-section diagram.

[0032] Figure 12 It is a plan view showing a transducer unit constituting the ultrasonic radiating unit.

[0033] Figure 13 This is an exploded cross-sectional view of the ultrasonic radiating unit, used to illustrate the assembly procedure.

[0034] 14A to 14C This is a schematic front view showing a transducer unit according to another embodiment.

[0035] FIG. 15A to FIG. 15B This is a schematic front view showing a transducer unit according to another embodiment.

[0036] Figure 16 This is a schematic diagram showing the structure of a conventional ultrasonic cleaning device. DETAILED DESCRIPTION

[0037] (First embodiment)

[0038] Below, refer to Figure 1 9 , a first embodiment of the present invention as an ultrasonic cleaning device will be described in detail.

[0039] like Figures 1 to 3As shown, the ultrasonic cleaning device 10 includes a metal cleaning tank 11 for storing a cleaning liquid W1 and an ultrasonic radiating unit 21. A plurality of bolt holes 11a are provided at the lower end of the cleaning tank 11. In addition, the ultrasonic radiating unit 21 includes a vibration plate 12 and three vibrator units 22. The vibration plate 12 constitutes the bottom of the cleaning tank 11, and is a metal plate (a stainless steel plate in this embodiment) in the shape of a roughly rectangular plate with a length of 220 mm, a width of 220 mm, and a thickness of 2.5 mm. That is, the ultrasonic radiating unit 21 of this embodiment is a vibration plate type ultrasonic radiating unit in which the vibration plate 12 is arranged at the lower end of the cleaning tank 11 through a seal 1, and the vibration plate 12 is threadedly fixed with bolts 2 and nuts 3. The vibration plate 12 has a radiation surface 13 for radiating ultrasonic waves and a non-radiating surface 14 located on the opposite side of the radiation surface 13. On the non-radiating surface 14 of the vibration plate 12, a plurality of column bolts 15 (see Figure 3 A plurality of fixing holes 16 are provided on the outer periphery of the vibration plate 12 over the entire periphery.

[0040] like Figure 3 、 Figure 4 As shown, each vibrator unit 22 includes a plurality of (two in this embodiment) ultrasonic vibrators 31 joined to the vibration plate 12 and a plurality of (three in this embodiment) resonators 51 also joined to the vibration plate 12. The ultrasonic vibrators 31 and the resonators 51 are arranged every other one. The three resonators 51 are arranged in a row together with the two ultrasonic vibrators 31. In addition, in this embodiment, the resonators 51 located at the ends of the row are sometimes referred to as "end-arranged resonators 51a", and the resonators 51 located in the middle of the row are sometimes referred to as "middle-arranged resonators 51b". In addition, the ultrasonic cleaning device 10 of this embodiment cleans the object to be cleaned 17 contained in the cleaning tank 11 by irradiating ultrasonic waves from each ultrasonic vibrator 31 to the cleaning liquid W1 in the cleaning tank 11 (see Figure 1 ) surface device.

[0041] like Figures 1 to 5 As shown, each ultrasonic vibrator 31 is a device for irradiating ultrasonic waves. Each ultrasonic vibrator 31 is composed of a vibrator front panel 32, a vibrator backing plate 33, a driving unit 41 and a vibrator assembly bolt 34. The vibrator front panel 32 is arranged on the front end side of the ultrasonic vibrator 31. The vibrator front panel 32 is square when viewed from above. In this embodiment, the length of one side is set to 45 mm. In addition, the radiating surface of the vibrator front panel 32 is bonded to the bolt non-protruding setting area R2 of the non-radiating surface 14 of the vibration plate 12 by an adhesive 18 such as an epoxy resin (see FIG. 1 ). Figure 5 ).

[0042] The transducer backing plate 33 is positioned on the rear end of the ultrasonic transducer 31. The driver 41 is composed of two piezoelectric elements 42 and two electrode plates 43 alternately stacked and sandwiched between the transducer front plate 32 and the transducer backing plate 33. The piezoelectric elements 42 are annular, and the electrode plates 43 are generally annular with a protruding portion. Therefore, the driver 41 has a bolt insertion hole 44 extending through its center. Each piezoelectric element 42 is polarized in the thickness direction.

[0043] The piezoelectric element 42 of this embodiment is not particularly limited and may be formed using a Pb (lead)-containing ceramic piezoelectric material such as lead zirconate titanate (PZT). Alternatively, the piezoelectric element 42 may be formed using a lead-free ceramic piezoelectric material, specifically, an alkali niobate-based ceramic piezoelectric material.

[0044] like Figure 3 As shown, in the center of the vibrator front panel 32, there is formed a Figure 3 The internal threaded hole 35 extends in the vertical direction (in the vertical direction). The internal threaded hole 35 does not penetrate the vibrator front panel 32. That is, the internal threaded hole 35 is opened only at the back of the vibrator front panel 32. On the other hand, the front surface of the vibrator front panel 32 is flat without a hole and is in surface contact with the non-radiating surface 14 of the vibration plate 12. The internal threaded hole 35 is connected to the bolt insertion hole 44 of the driving part 41. On the other hand, a hole is formed in the center of the vibrator backing plate 33 along the height direction ( Figure 3 The through hole 36 extends in the vertical direction. The through hole 36 is open at the front and connected to the bolt insertion hole 44, and is open at the back 37. In addition, the vibrator assembly bolt 34 having an external thread formed on the outer peripheral surface is inserted from the vibrator backing plate 33 side, and its front end reaches the internal threaded hole 35 on the vibrator front panel 32 side through the through hole 36 and the bolt insertion hole 44. That is, the front end of the vibrator assembly bolt 34 stops halfway in the vibrator front panel 32 and does not reach the vibration plate 12. The vibrator assembly bolt 34 is screwed into the internal threaded hole 35. Moreover, by screwing the nut 38 into the protruding part of the vibrator assembly bolt 34 inserted into the vibrator backing plate 33, the vibrator front panel 32, the driving part 41 and the vibrator backing plate 33 are fastened to each other and fixed as a whole. In addition, the metal material forming the vibrator assembly bolt 34 and the nut 38 is arbitrary, but stainless steel is used here.

[0045] like Figures 1 to 5 As shown, each ultrasonic vibrator 31 in this embodiment is a bolt-tightening convex vibrator having a longitudinal vibration type, which resonates in a longitudinal primary vibration mode (a single-unit resonant frequency of 28 kHz) with an axial longitudinal vibration component of λ / 2 (λ: longitudinal vibration wavelength). Each ultrasonic vibrator 31 vibrates at the same frequency.

[0046] In addition, if Figure 1 As shown, each ultrasonic vibrator 31 is connected to an ultrasonic oscillator 19. The ultrasonic oscillator 19 supplies high-frequency power to continuously vibrate each ultrasonic vibrator 31. This high-frequency power drives each ultrasonic vibrator 31, which irradiates the cleaning liquid W1 in the cleaning tank 11 with ultrasonic waves at 25 kHz (the resonant frequency when the ultrasonic vibrator 31 is attached to the vibrating plate 12). While the ultrasonic output is 250 W in this embodiment, this is not particularly limited to this and can be set arbitrarily.

[0047] like Figures 1 to 5 As shown, each resonator 51 of this embodiment resonates at the same frequency as the ultrasonic vibrator 31 (the resonant frequency of a single unit is 28 kHz) and in a longitudinal vibration mode. Each resonator 51 is composed of a front-side resonant component 52 and rear-side resonant components 53 and 54 that are provided separately from the front-side resonant component 52. In addition, in this embodiment, to distinguish between the two, the rear-side resonant component constituting the end-configured resonator 51a is marked with the reference numeral "53", and the rear-side resonant component constituting the middle-configured resonator 51b is marked with the reference numeral "54". Moreover, the front-side resonant component 52 and the rear-side resonant components 53 and 54 constitute a resonator 51 that can vibrate as a whole. In other words, the resonator 51 of this embodiment is not composed of a single component, but is composed of two components divided in the front-to-back direction as described above.

[0048] Furthermore, the rear surface of the front-side resonance member 52 and the front surfaces of the rear-side resonance members 53 and 54 are flat surfaces and are in surface contact with each other.

[0049] The front side resonance component 52 has the function of being a radiator that radiates ultrasonic waves. The front side resonance component 52 is arranged on the front end side of the resonator 51. The front side resonance component 52 is rectangular when viewed from above, and in this embodiment, is a rectangular shape of 45mm×25mm. Therefore, the maximum length of one side of the front side resonance component 52 is equal to the length of one side of the vibrator front panel 32 of the ultrasonic vibrator 31 (45mm). In addition, in the center portion of the front side resonance component 52, a bolt insertion hole 55 for inserting the column bolt 15 is provided in a manner extending along the height direction of the front side resonance component 52. Moreover, the front side of the front side resonance component 52 is joined to the bolt protrusion setting area R1 on the non-radiating surface 14 of the vibration plate 12 by the adhesive 18 (refer to Figure 5 ).

[0050] like Figures 1 to 5As shown, the rear-side resonant components 53 and 54 are arranged on the rear end side of the resonator 51. Furthermore, the rear-side resonant component 53 is circular in shape when viewed from above, and in this embodiment, has an outer diameter of 25 mm. The rear-side resonant component 53 is provided at the front end of the column bolt 15 inserted into the bolt insertion hole 55. A non-through internally threaded hole 56 for threading the column bolt 15 is provided in the center of the rear-side resonant component 53, extending in the height direction of the rear-side resonant components 53 and 54. Therefore, by threading the internally threaded hole 56 of the rear-side resonant component 53 into the front end of the column bolt 15, the front-side resonant component 52 is clamped and fixed to the vibration plate 12. That is, the rear-side resonant component 53 of this embodiment not only functions as a component of the resonator 51, but also functions as a nut. Furthermore, in this embodiment, the front resonant component 52 and the rear resonant components 53, 54 are in surface contact with each other at the joint surface, and in this state, the two resonant components 52, 53, 54 are fastened and fixed. When the bolts of the front resonant component 52 and the rear resonant components 53, 54 are tightened, a uniform distribution of contact stress on the joint surface is desirable, and for this reason, surface contact as described above is preferred. However, if the joint surface contact state is poor, heat generated in the joint surface may reduce the mechanical Q, potentially preventing the resonator 51 from functioning properly.

[0051] Here, the height length D2 of the front-side resonant member 52 and the height length D3 of the rear-side resonant members 53 and 54 are not particularly limited and can be set arbitrarily. However, the length D3 of the rear-side resonant members 53 and 54 is set, for example, to be at least one-quarter of the height length D1 of the resonator 51. This is because within this range, sufficient tightening force is easily achieved during bolt tightening. Alternatively, the length D3 can be at least one-third or even half of the length D1. Furthermore, the height length D1 of the resonator 51 is also not particularly limited and can be set arbitrarily. However, in this embodiment, it is slightly longer than the height length of the ultrasonic vibrator 31. Therefore, the upper end of the rear-side resonant member 53 is positioned higher than the upper end of the ultrasonic vibrator 31, and tool-locking portions with flat, non-circular cross-sections are formed at two opposing locations on its circumference. In other words, the upper end of the rear-side resonant member 53 has a cross-sectional shape that easily locks the tip of a tool when it is rotated and screwed together.

[0052] like Figure 3 、 Figure 4As shown, a part of the side surface of the vibrator front panel 32 and a part of the side surface of the front side resonance component 52 are connected by a coupling 61. The coupling 61 exists in the portion corresponding to the notch M1. The coupling 61 refers to a connecting portion that is thinner and has a strip shape than the adjacent surrounding components (vibrator front panel 32 or front side resonance component 52). The coupling 61 not only plays the role of connecting the components to each other, but also plays the role of transmitting the vibration of the ultrasonic vibrator 31 to the resonator 51. The coupling 61 of this embodiment connects the front end portion of the side surface of the vibrator front panel 32 ( Figure 3 The lower end portion in the middle) and the front end portion of the side surface of the front side resonance component 52 ( Figure 3 The front side of the connector 61 is also bonded to the non-radiating surface 14 of the vibration plate 12 via the adhesive 18. Furthermore, in the vibrator unit 22 of this embodiment, the two vibrator front panels 32, the three front-side resonance components 52, and the four connectors 61 are integrally formed.

[0053] The front-side resonant component 52, which is rectangular in shape when viewed from above, has a long side arranged parallel to the thin strip-shaped coupling member 61 and a short side arranged orthogonally to the coupling member 61. The length of the long side of the front-side resonant component 52 is not particularly limited, but in this embodiment, it is equal to the length of one side of the transducer front panel 32. Furthermore, the sum of the length of the short side of the front-side resonant component 52 and the width of the coupling member 61 is also not particularly limited, but is preferably less than 1 / 4 of the longitudinal vibration wavelength of the ultrasonic transducer 31. This is because if this sum is within this length range, it is easier for the resonator 51 to function as a resonator that performs uniform longitudinal vibrations.

[0054] Next, refer to Figure 8 The metal materials used in the components constituting the ultrasonic radiating unit 21 will be described. Figure 8 The table compares the properties of various metal materials.

[0055] In this embodiment, since each front side resonance component 52, each vibrator front panel 32 and each coupling member 61 are formed by a metal block, they are made of the same metal material. Here, as the metal material forming the front side resonance component 52, the vibrator front panel 32 and the coupling member 61, it is preferred that the material has a large mechanical Q (i.e., small mechanical vibration loss), a small density (i.e., light weight), and a large thermal conductivity (i.e., excellent heat dissipation performance). Specifically, aluminum alloy (superduralumin A7075-T6) is selected. In addition, alloys other than superduralumin A7075-T6 (e.g., A6063, etc.) can also be selected as the aluminum alloy. In fact, selecting a material with a large mechanical Q (i.e., small mechanical vibration loss) and a small density (i.e., light weight) can bring about an improvement in the vibration performance of the ultrasonic vibrator 31 and the resonator 51. In addition, selecting a material with a large thermal conductivity (i.e., excellent heat dissipation performance) can also reduce the loss of electric energy supplied to the ultrasonic vibrator 31, which also contributes to an improvement in cleaning efficiency. In addition, in this embodiment, aluminum alloy is also used for the rear side resonance member 54 constituting the intermediate arrangement resonator 51 b.

[0056] According to Table 8, the Young's modulus, which is related to the bending rigidity of the aluminum alloy (superduralumin A7075-T6), is 72 GPa. Furthermore, of the rear-side resonant component 53 constituting the end-mounted resonator 51a and the rear-side resonant component 54 constituting the middle-mounted resonator 51b, the rear-side resonant component 53 constituting the end-mounted resonator 51a is formed of a metal material having a greater bending rigidity than the front-side resonant component 52. Specifically, stainless steel (Young's modulus: 200 GPa) is selected as the metal material for the rear-side resonant component 53 constituting the end-mounted resonator 51a. The rear-side resonant component 53 constituting the end-mounted resonator 51a is preferably formed of a metal material with a Young's modulus of 100 GPa or higher, and stainless steel meets this requirement. Alternatively, iron-based metals such as carbon steel S45C for mechanical structures (Young's modulus: 206 GPa) or titanium alloys such as Ti-6Al-4V (Young's modulus: 111 GPa) can also be selected. In addition, bending rigidity is represented by the product E·I of the material's Young's modulus E and the secondary moment of area I. Therefore, a material with a larger Young's modulus is more capable of suppressing bending vibrations.

[0057] The front side resonance member 52, the vibrator front plate 32 and the coupling member 61 are preferably formed of a metal material having a lower density than the rear side resonance member 53 constituting the end-arranged resonator 51a. For example, the metal material forming the rear side resonance member 53 is stainless steel (density: 7.9×10 3 [kg / m 3 ]), the density is 2.8×10 3 [kg / m 3] aluminum alloy meets the preferred conditions and can therefore also be used as the material for forming the above-mentioned components. 3 [kg / m 3 ] also satisfies the preferred conditions and can therefore be used as the material for forming the above-mentioned components. Furthermore, the front-side resonant component 52, the vibrator front panel 32, and the coupling 61 are preferably formed of a metal material having a higher thermal conductivity than the rear-side resonant component 53 constituting the end-arranged resonator 51a. For example, if the metal material forming the rear-side resonant component 53 is stainless steel (thermal conductivity: 16.3 [W / m / °C]), an aluminum alloy with a thermal conductivity of 121 [W / m / °C] satisfies the preferred conditions and can therefore be used as the material for forming the above-mentioned components.

[0058] Furthermore, the vibrator assembly bolts 34 and studs 15 are also formed of a metal material with high bending rigidity. In this embodiment, stainless steel with a Young's modulus of 100 GPa or greater is selected as the metal material. The length and diameter of the studs 15 are not particularly limited and can be set arbitrarily. For example, the diameter of the studs 15 is preferably at least 20% of the outer diameter of the rear-side resonant components 53 and 54, and more preferably at least 30%. In other words, if the studs 15 are too thin, the contact stress distribution on the joint surfaces of the front-side resonant component 52 and the rear-side resonant components 53 and 54 becomes uneven, which can easily cause heat generation, which can reduce the mechanical Q.

[0059] The diameter of the stud 15 is preferably 80% or less, and more preferably 70% or less, of the shorter dimension of the short side of the front resonance member 52 or the outer diameter of the rear resonance members 53 and 54. In other words, if the stud 15 is too thick, the wall thickness of the resonance members 52, 53, and 54 becomes thinner, potentially causing stress fracture of the resonance members 52, 53, and 54.

[0060] The screwing length of the stud bolt 15 into the internally threaded hole 56 of the rear-side resonance member 53, 54 may be at least greater than the diameter of the stud bolt 15, and in particular, may be greater than 1.2 times the diameter of the stud bolt 15. Within this dimension range, sufficient tightening force can be easily obtained when the bolt is tightened.

[0061] Next, the operation of ultrasonic cleaning device 10 according to this embodiment will be described.

[0062] First, the ultrasonic cleaning device 10 is activated, and high-frequency power is supplied from the ultrasonic oscillator 19 to the plurality of ultrasonic vibrators 31, causing each ultrasonic vibrator 31 to vibrate continuously. As a result, ultrasonic waves are irradiated from the ultrasonic vibrators 31 into the cleaning liquid W1. At this time, cavitation bubbles are generated in the cleaning liquid W1 along with the irradiation of ultrasonic waves, and the impact of the cavitation bubbles' collapse cleans the object 17 to be cleaned.

[0063] Below, based on Figure 5 The method of assembling the ultrasonic radiating unit 21 will be described.

[0064] First, after processing an aluminum alloy block (grooving, end surface processing, threading, etc.), the end surface is polished to produce a front base 71 consisting of the vibrator front plate 32, the front-side resonance component 52, and the coupling 61. Next, the vibrator assembly bolts 34 are screwed into the internal threaded holes 35 provided in the vibrator front plate 32. Furthermore, after the two electrode plates 43 and the two piezoelectric elements 42 are alternately mounted on the vibrator assembly bolts 34, the vibrator backing plate 33 is mounted. Furthermore, by screwing the nuts 38 into the protruding portions of the bolts 34 inserted into the vibrator backing plate 33, the vibrator front plate 32, the electrode plates 43, the piezoelectric elements 42, and the vibrator backing plate 33 are fastened to each other, thereby forming the ultrasonic vibrator 31.

[0065] In addition, after welding a plurality of studs 15 to the non-radiating surface 14 of the vibration plate 12, an adhesive 18 is applied to the non-radiating surface 14. Furthermore, a plurality (three in this embodiment) of vibrator units 22 are inserted into the studs 15 of the vibration plate 12. Furthermore, the rear-side resonance component 53 is screwed into the protruding portion (front end portion) of the stud 15 inserted into the front-side resonance component 52. Thus, the ultrasonic radiating unit 21 is completed. At this time, the front base 71 is joined and fixed to the non-radiating surface 14 of the vibration plate 12 by the adhesive force of the adhesive 18 and the tightening and fixing force of the rear-side resonance components 53 and 54 to the stud 15.

[0066] Next, an evaluation test of the ultrasonic emitting unit 21 and its results will be described.

[0067] (First evaluation test)

[0068] In the first evaluation test, the measurement sample was prepared as follows. The ultrasonic radiating unit 21 (see Figure 2 ) and used as an example. In addition, an ultrasonic radiating unit 82 in which the resonator 51 is omitted from the ultrasonic radiating unit 21 of this embodiment is prepared and used as a comparative example 1 (refer to Figure 6) In Comparative Example 1, the ultrasonic vibrator 31 is changed to an ultrasonic vibrator 81 (circular vibrator) having a vibrator front plate having a circular shape in plan view.

[0069] Next, the vibration distribution under water load was analyzed in the vibration plate of the ultrasonic radiating unit of each measurement sample (Example and Comparative Example 1) by conventionally known finite element analysis.

[0070] As a result, in Comparative Example 1, non-uniform vibration distribution was observed in a specific region of the vibration plate (the back side of the ultrasonic vibrator 81). In contrast, in the example, non-uniform vibration distribution was observed in the specific region, that is, the vibration distribution was uniform.

[0071] Furthermore, an ultrasonic cleaning device 91 was prepared using the ultrasonic emitting unit of each measurement sample (Example, Comparative Example 1) (see Figure 7 ), an ultrasonic cleaning device 91 was used to clean an object 92. Specifically, a cleaning liquid 94 was first stored in a cleaning tank 93, and then the object 92 was placed in the cleaning tank 93. Here, a stainless steel plate was used as the object 92. Next, an ultrasonic oscillator 95 of an ultrasonic emitting unit irradiated the cleaning liquid 94 with ultrasonic waves having a frequency of 25 kHz and an output of 250 W, thereby cleaning the object 92 in the cleaning liquid 94. The acoustic pressure distribution on the surface of the object 92 was then analyzed for each measurement sample.

[0072] As a result, in Comparative Example 1, non-uniformity in the sound pressure distribution was observed on the surface of the object 92 to be cleaned. On the other hand, in the embodiment, non-uniformity in the sound pressure distribution was observed on the surface of the object 92 to be cleaned, that is, the sound pressure distribution was uniform.

[0073] Next, the pressure inside the cleaning tank 93 of the ultrasonic cleaning apparatus 91 was reduced to 100 kPa for each measurement sample (Example and Comparative Example 1). The deformation of the diaphragm of the ultrasonic radiating element was then analyzed using conventional finite element analysis. The stress applied to the adhesive bonding the ultrasonic oscillator or resonator to the diaphragm was also analyzed.

[0074] The results showed that in Comparative Example 1, when the pressure inside cleaning tank 93 was reduced, the maximum displacement (maximum deformation) of the vibrating plate was approximately 320 μm. On the other hand, in Example 1, even when the pressure inside cleaning tank 93 was reduced, the maximum displacement of the vibrating plate was only approximately 40 μm. In other words, the deformation in Example 1 was approximately one-eighth of that in Comparative Example 1.

[0075] Furthermore, in Comparative Example 1, it was confirmed that the maximum stress applied to the adhesive reached approximately 26 MPa when the pressure inside the cleaning tank 93 was reduced. In this case, since this exceeded the allowable stress of the adhesive (23 MPa), it was confirmed that the ultrasonic oscillator caused peeling of the adhesive. On the other hand, in the examples, it was confirmed that even when the pressure inside the cleaning tank 93 was reduced, the maximum stress applied to the adhesive was only approximately 11 MPa. In this case, since this was only approximately half the allowable stress of the adhesive, it was confirmed that peeling of the adhesive did not occur.

[0076] In summary, it has been demonstrated that when a vibrator unit comprising both an ultrasonic vibrator and a resonator is joined to a vibrating plate, the vibration distribution on the radiating surface of the vibrating plate is uniform, with no bending vibration components, making it less susceptible to erosion and extending the life of the vibrating plate. Furthermore, it has been demonstrated that since the sound pressure distribution on the surface of the object to be cleaned 92 becomes uniform, uniform cleaning is possible. Furthermore, it has been demonstrated that since the ultrasonic vibrator itself functions as a "resonant reinforcement plate," it is pressure-resistant to reduced pressure, making it the most suitable ultrasonic vibrator for reduced-pressure cleaning.

[0077] (Second evaluation test)

[0078] In the second evaluation test, the aforementioned embodiment and comparative example 2 were set up, and the vibration modes when the metal materials of the rear-side resonant components 53 and 54 were changed were analyzed and compared. Furthermore, in the embodiment, the rear-side resonant component 53 constituting the end-arrangement resonator 51a was made of stainless steel, and the rear-side resonant component 54 constituting the middle-arrangement resonator 51b was made of an aluminum alloy. Comparative example 2 had essentially the same structure as the embodiment, but all rear-side resonant components 53 and 54 were made of an aluminum alloy. Furthermore, the deformation of each unit component was analyzed using finite element analysis, with the radiating surface 13 side of the vibration plate 12 set to a water-loaded state and the drive conditions set to a drive frequency of 25.8 kHz and an output power of 250 W.

[0079] Figure 9B The analysis results for Comparative Example 2 are shown below. In Comparative Example 2, the vibration modes of the rear-side resonant component 54 constituting the middle-positioned resonator 51b and the rear-side resonant component 53 constituting the end-positioned resonator 51a differ. Specifically, in the rear-side resonant component 54 constituting the middle-positioned resonator 51b, large-amplitude bending vibrations are less frequent, and longitudinal vibrations are primarily excited. On the other hand, in the rear-side resonant component 53 constituting the end-positioned resonator 51a, large-amplitude bending vibrations are excited rather than longitudinal vibrations. Therefore, it can be seen that Comparative Example 2 is a structure that is prone to heat generation or stress damage in the end-positioned resonator 51a when the vibration level increases.

[0080] Figure 9AThe analysis results of the embodiment are shown. In the embodiment, it is found that both the rear-side resonant component 53 constituting the end-mounted resonator 51a and the rear-side resonant component 54 constituting the middle-mounted resonator 51b exhibit low amplitude bending vibrations, primarily exciting longitudinal vibrations. Therefore, it is found that the embodiment has a structure that is less susceptible to heat generation and stress damage in the end-mounted resonator 51a, regardless of the magnitude of the vibration level.

[0081] Therefore, according to this embodiment, the following effects can be obtained.

[0082] (1) In the ultrasonic radiating unit 21 of this embodiment, a plurality of vibrators 51 are arranged so as to sandwich a plurality of ultrasonic vibrators 31 constituting a vibrator array from both sides, and the vibrator front panel 32 and the front side resonant component 52 are both rectangular in plan view. Therefore, the ultrasonic vibrators 31 and the resonators 51 are closely arranged relative to each other. Therefore, a uniform vibration distribution is easily obtained in the vibration plate 12, a uniform sound pressure distribution can be achieved, and uneven cleaning can be reduced. Furthermore, since erosion on the vibration plate 12 is reduced, the vibration plate 12 is less susceptible to wear, and the life of the vibration plate 12 can be extended.

[0083] (2) In the ultrasonic radiating unit 21 of this embodiment, the transducer front panel 32 and the front-side resonant member 52 are connected by a coupling 61. The front-side resonant member 52 is provided with a bolt insertion hole 55, into which a stud 15 protruding from the non-radiating surface 14 of the diaphragm 12 is inserted. Therefore, when the rear-side resonant member 53 is screwed onto the stud 15 inserted into the bolt insertion hole 55, the front-side resonant member 52 is securely fixed to the diaphragm 12. Furthermore, the transducer front panel 32 (and the ultrasonic transducer 31) connected to the front-side resonant member 52 via the coupling 61 is also securely fixed to the diaphragm 12. Furthermore, the bonding strength generated by screwing the rear-side resonant member 53 onto the stud 15 is 469 MPa, approximately 20 times the bonding strength of the adhesive 18 (23 MPa). Consequently, the bonding strength of the ultrasonic transducer 31 to the diaphragm 12 is significantly improved.

[0084] (3) In the ultrasonic radiating unit 21 of this embodiment, the front-side resonant component 52 and the transducer front panel 32 are connected to each other by a coupling 61, thereby forming a front base 71. Furthermore, the front base 71 is bonded to the non-radiating surface 14 of the diaphragm 12 by the adhesive force of the adhesive 18 between the transducer front panel 32 and the front-side resonant component 52 and the non-radiating surface 14 of the diaphragm 12, and by the tightening force of the rear-side resonant components 53 and 54 against the studs 15. Specifically, while the transducer front panel 32 portion of the ultrasonic diaphragm 31 is bonded only by the adhesive force of the adhesive 18, the front-side resonant component 52 portion is also bonded to the diaphragm 12 by the adhesive force of the adhesive 18 and the even stronger tightening force of the rear-side resonant components 53 and 54 against the studs 15. Therefore, a structure is ensured that effectively transmits the ultrasonic vibrations of the ultrasonic diaphragm 31 to the diaphragm 12 in an ideal manner. Furthermore, the structure (front base 71 ) composed of the front-side resonance member 52 and the vibrator front plate 32 connected to each other by the coupling 61 can be easily and reliably joined and fixed to the diaphragm 12 .

[0085] (4) Since the resonator 51 of this embodiment resonates at the same frequency and longitudinal vibration mode as the ultrasonic vibrator 31, it vibrates due to the resonance phenomenon along with the vibration of the ultrasonic vibrator 31. Moreover, the resonator 51 is a metal processing component obtained by simply processing aluminum alloy or stainless steel. Therefore, compared with the ultrasonic vibrator 31 composed of multiple components including ceramic piezoelectric materials, the structure is simple and the manufacturing cost is low. Therefore, instead of only arranging a plurality of ultrasonic vibrators 31 on the vibration plate 12, by arranging the resonator 51 separately from the ultrasonic vibrator 31, the ultrasonic radiating unit 21 can be realized at a low cost.

[0086] (5) In the present embodiment, the front side resonance component 52 is arranged in contact with the bolt protruding setting area R1, and the vibrator front panel 32 of the ultrasonic vibrator 31 is arranged in contact with the bolt non-protruding setting area R2. As a result, the vibrator front panel 32 is arranged on a "flat surface without obstacles" in a surface-contact state on the non-radiating surface 14 of the vibration plate 12. Therefore, the ultrasonic vibration generated by the ultrasonic vibrator 31 itself can be efficiently transmitted to the vibration plate 12 in an ideal form. In addition, the front surfaces of the vibrator front panel 32, the front side resonance component 52 and the coupling 61 (i.e., the front surface of the front base 71) are in a state of being on the same plane and are bonded to the non-radiating surface 14. As a result, ultrasonic waves can be uniformly radiated from the front. Therefore, compared with the existing ultrasonic vibrator, the radiation area can be expanded.

[0087] (6) In this embodiment, the rear side resonance component 53 constituting the end configuration resonator 51a and the rear side resonance component 54 constituting the middle configuration resonator 51b are formed of a metal material having a greater bending rigidity than the front side resonance component 52. Therefore, the bending strength of the portion of the rear side resonance component 53 that is susceptible to large bending stress during vibration can be increased, and bending vibration can be effectively suppressed. Therefore, heat generation and stress damage of the rear side resonance component 53 can be prevented in advance, and the resonance performance required of the resonator 51 can be maintained. Therefore, according to this structure, a highly practical ultrasonic radiating unit 21 can be realized.

[0088] (Second embodiment)

[0089] Below, refer to Figures 10 to 13 The ultrasonic radiating unit 121 of the second embodiment embodying the present invention will be described in detail. Configurations different from the ultrasonic radiating unit 21 of the first embodiment will be described, and common configurations will be denoted by the same reference numerals and detailed descriptions will be omitted.

[0090] like Figures 10 to 13 As shown, the shape of this ultrasonic radiating unit 121 differs from the front-side resonant component 52 of the first embodiment. Specifically, in this embodiment, a wide rectangular plate-shaped portion (connecting portion) is formed as the front-side resonant component 61a, which also serves as a connector connecting the side surfaces of the transducer front panel 32. This front-side resonant component 61a is thinner than the front-side resonant component 52 of the first embodiment. Meanwhile, the rear-side resonant components 53 and 54 of this embodiment are longer than those of the first embodiment. The rear surface of the front-side resonant component 61a, which also serves as a connector, and the front surfaces of the rear-side resonant components 53 and 54 are arranged in surface contact with each other. Furthermore, the short side of the front-side resonant component 61a is formed to be approximately equal to the outer diameter of the rear-side resonant components 53 and 54. The front-side resonant component 61a and the rear-side resonant components 53 and 54 constitute the resonator 51, which can vibrate integrally.

[0091] When assembling the ultrasonic radiating unit 121, first, an aluminum alloy block is processed to produce a front base B1 consisting of a vibrator front panel 32 and a front side resonance component 61a serving as a coupling. In this case, there is no need to form a narrow notch M1 between the vibrator front panels 32. Next, after assembling the ultrasonic radiator 31 in the same manner as in the first embodiment, the vibration plate 12 to which the column bolts 15 are welded is prepared, and an adhesive 18 is applied to the non-radiating surface 14. Then, the vibrator unit 22A is externally inserted onto the column bolts 15 of the vibration plate 12. In this state, the rear side resonance components 53 and 54 are screwed into the front end portion of the column bolts 15 protruding from the front side resonance component 52 to complete the ultrasonic radiating unit 121.

[0092] Even with the ultrasonic radiating unit 121 having the above-described structure, as in the first embodiment, erosion and uneven cleaning of the vibration plate 12 can be reduced, and the bonding strength of the ultrasonic transducer 31 to the vibration plate 12 can be improved. Furthermore, flexural vibrations generated in the rear-side resonant components 53 and 54 during vibration can be suppressed. Furthermore, in this embodiment, the front base B1 can be manufactured without the need for narrow groove processing. This facilitates processing, further reducing processing costs, and ultimately, reducing the manufacturing cost of the ultrasonic radiating unit 121.

[0093] Furthermore, the above-described embodiment may be modified as follows.

[0094] In the transducer unit 22 of the above embodiment, three transducers 51 and two ultrasonic transducers 31 are arranged in a row at intervals, and the two rear side resonance members 53 constituting the end-arranged resonators 51a are made of stainless steel (see FIG. Figure 14A ), but is not limited thereto. For example, Figure 14B As in the oscillator unit 141 of another embodiment shown in FIG, not only the rear side resonance component 53 constituting the end configuration resonator 51a but also the rear side resonance component 54 constituting the middle configuration resonator 51b may be formed of stainless steel. Figure 14C As in the transducer unit 151 of another embodiment shown in FIG, four transducers 51 and three ultrasonic transducers 31 are arranged in a row at intervals, and two rear side resonance components 53 are formed of stainless steel, with the resonators 51a arranged at the ends. Figure 15A As in the vibrator unit 161 of another embodiment shown in FIG. 1 , four vibrators 51 and two ultrasonic vibrators 31 may be arranged in a row, and two rear side resonant components 53 may be formed of stainless steel, with the resonators 51a arranged at the ends. In other words, the resonators 51 and ultrasonic vibrators 31 may not be arranged every other, but may be arranged continuously. Alternatively, as in FIG. Figure 15BAs in the vibrator unit 171 of another embodiment shown in FIG. 1 , three vibrators 51 and four ultrasonic vibrators 31 are arranged in a row, and two rear side resonance components 53 are formed of stainless steel, with the resonators 51a arranged at the ends. In other words, the resonators 51 and ultrasonic vibrators 31 do not need to be arranged alternately, and the ultrasonic vibrators 31 may be arranged continuously. Figure 8 、 Figures 9A to 9B In the figures, for ease of explanation, parts made of stainless steel are indicated by hatching. In addition, of course, iron-based metals or titanium alloys, which are also metals with high bending rigidity (Young's modulus of 100 GPa or more), may be used instead of the stainless steel used in these other embodiments.

[0095] For example, the outer diameters of the rear side resonance members 53 and 54 constituting the resonator 51 may be formed larger than those in the first and second embodiments. In this manner, the bending vibration generated in the resonator 51 can be more reliably reduced.

[0096] In the above embodiment, stud bolts 15, which are bolts without heads, are used as bolts protruding from non-radiating surface 14 of diaphragm 12. However, bolts having heads such as hexagonal bolts, bolts with hexagonal holes, and butterfly bolts may also be used as bolts protruding from non-radiating surface 14.

[0097] The ultrasonic cleaning device 10 of the above-described embodiment is a type in which the ultrasonic radiating unit 21 is mounted on the bottom of the cleaning tank 11 via a seal 1 and secured with bolts 2 and nuts 3, but this is not limited to this configuration. For example, an ultrasonic cleaning device may be configured such that, after applying adhesive to the non-radiating surface of the cleaning tank bottom plate, the transducer unit 22 is inserted into a stud protruding from the non-radiating surface. The transducer unit 22 is then engaged by screwing the rear-side resonance component 53 onto the protruding portion of the stud inserted into the transducer unit 22. Alternatively, an ultrasonic cleaning device may be configured using a submersible ultrasonic radiating unit used in the cleaning fluid W1 introduced into the cleaning tank 11. In this case, the submersible ultrasonic radiating unit is coated with adhesive on the non-radiating surface of a watertight housing, with a protruding stud provided. After the transducer unit 22 is inserted into the stud, the rear-side resonance component 53 is screwed onto the stud to engage the transducer unit 22.

[0098] The ultrasonic radiating unit 21 of the above-described embodiment is suitable for use in an ultrasonic cleaning device 10 that utilizes ultrasonic waves for cleaning. However, in addition to cleaning, it can also be used in devices that perform processes such as extraction, emulsification, dispersion, mixing, stirring, crushing, and atomization. Specifically, for example, when the ultrasonic radiating unit is used in an ultrasonic emulsification device, the emulsion can be efficiently refined into nanoparticles, promising long-term stabilization and surfactant reduction. Furthermore, when the ultrasonic radiating unit is used in an ultrasonic dispersion device, nanoparticles (such as metal nanoparticles, carbon nanotubes, ceramic nanoparticles, and magnetic nanoparticles) can be efficiently dispersed. Furthermore, the ultrasonic radiating unit can also be implemented as an ultrasonic treatment device that utilizes chemical reactions. In this case, since cavitation can be generated uniformly and efficiently over a large area, the amount of free radicals, such as OH radicals, generated by the high-temperature, high-pressure field during bubble collapse can be increased. Consequently, the efficiency of chemical reactions initiated by these free radical species can be improved, enabling efficient decomposition and detoxification of harmful substances, sterilization, and polymerization of polymers.

[0099] Next, in addition to the technical ideas described in the Summary of the Invention, technical ideas grasped from the above-described embodiments are listed below.

[0100] (1) In the invention of claim 1, the rear side resonance member constituting the end-arranged resonator and the rear side resonance member constituting the middle-arranged resonator are both formed of a metal material having a greater bending rigidity than the front side resonance member.

[0101] (2) In the invention of claim 1 and the like, the vibrator front plate and the front side resonance member are bonded to the non-radiating surface of the diaphragm by an adhesive.

[0102] (3) Based on the technical solution 1, the front side resonance component is arranged in contact with the bolt protruding setting area on the non-radiating surface. On the other hand, the ultrasonic vibrator is arranged in contact with the bolt non-protruding setting area adjacent to the bolt protruding setting area on the non-radiating surface. The front side resonance component and the vibrator front panel connected to each other by a coupling are bonded and fixed to the non-radiating surface of the vibration plate by the adhesive force between the vibrator front panel and the front side resonance component and the non-radiating surface of the vibration plate, and the tightening and fixing force of the rear side resonance component relative to the bolt.

[0103] (4) In the technical solution 1 and the like, the vibrator front panel, the front side resonance member and the coupling member are formed integrally.

[0104] (5) In the technical solution 1 and the like, the ultrasonic vibrator is a longitudinal vibration type vibrator that vibrates in a longitudinal vibration mode, and the resonator resonates in the same frequency and longitudinal vibration mode as the ultrasonic vibrator.

[0105] (6) An ultrasonic radiating unit, comprising: a vibration plate having a radiation surface for radiating ultrasonic waves and a non-radiating surface located on the opposite side of the radiation surface; an ultrasonic vibrator of a convex shape fastened by a bolt, which is combined with a vibrator front panel on the non-radiating surface; a front side resonance component, which is a wide plate-shaped portion (connecting plate) that functions as a coupling member connecting the side surfaces of the vibrator front panels to each other, which is joined to the non-radiating surface and has a bolt insertion hole for inserting the bolt; a rear side resonance component, which is arranged at the front end portion of the bolt and fastens the front side resonance component in a state where it is clamped between the vibration plate, the front of the vibrator is rectangular when viewed from above, and the resonator is composed of the front side resonance component that also serves as the coupling member and the rear side resonance component.

[0106] Reference numerals

[0107] 12…Vibration plate

[0108] 13…radial surface

[0109] 14…non-radiative surface

[0110] 15…Stud bolt as bolt

[0111] 18…adhesive

[0112] 21, 121…Ultrasonic radiation unit

[0113] 22, 22A, 141, 151, 161...Oscillator unit

[0114] 31…Ultrasonic vibrator

[0115] 32…Vibrator front panel

[0116] 51…Resonator

[0117] 51a…As the end of the resonator, the resonator is configured

[0118] 51b ... as an intermediate configuration resonator

[0119] 52, 61a…front side resonance component

[0120] 53, 54…rear side resonance components

[0121] 54…Bolt insertion hole

[0122] 61…Joint

[0123] D1…the length of the resonator in the height direction

[0124] D3… Length of the rear side resonance member in the height direction

Claims

1. An ultrasonic radiating unit, comprising: a vibration plate having a radiation surface for radiating ultrasonic waves and a non-radiation surface opposite to the radiation surface, wherein a bolt is protruding from the non-radiation surface; An ultrasonic vibrator of a convex shape is fastened with bolts and is combined with a vibrator front panel on the non-radiating surface; a front-side resonance member, which is joined to the non-radiating surface and has a bolt insertion hole for inserting the bolt; The rear side resonance component is provided separately from the front side resonance component at the front end portion of the bolt, and is fastened to the bolt while the front side resonance component is clamped between the bolt and the vibration plate. The front side resonance component and the rear side resonance component constitute a plurality of resonators that can vibrate integrally. The side surface of the transducer front panel and the side surface of the front-side resonance member are connected via a coupling member that transmits the vibration of the ultrasonic transducer to the resonator. The plurality of resonators are arranged in a row together with the plurality of ultrasonic vibrators and are composed of end-arranged resonators located at the ends of the row and middle-arranged resonators located in the middle of the row. Of the rear side resonance members constituting the end-arranged resonators and the rear side resonance members constituting the middle-arranged resonators, at least the rear side resonance member constituting the end-arranged resonators is formed of a metal material having a greater bending rigidity than the front side resonance member.

2. The ultrasonic radiating unit according to claim 1, wherein: The rear side resonant member constituting the end-arranged resonator is formed using a metal material having a Young's modulus of 100 GPa or more.

3. The ultrasonic radiating unit according to claim 1, wherein: The rear side resonance component constituting the end-arranged resonator is formed of a metal material having a Young's modulus of 100 GPa or more. The front-side resonant member, the vibrator front plate, and the coupling member have a lower density than the rear-side resonant member constituting the end-arranged resonator and are formed of a metal material having high thermal conductivity.

4. The ultrasonic radiating unit according to any one of claims 1 to 3, wherein: The length of the rear side resonance component in the height direction is at least 1 / 4 of the length of the resonator in the height direction. The front surface of the rear side resonance component is in surface contact with the rear surface of the front side resonance component.

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