A waveguide combined mirror film coating tool

Abstract

The present application provides a waveguide combination mirror film coating tool, which belongs to the technical field of optical component thin films, and specifically includes a circular workpiece disk installed on a turntable and a circular shielding plate located below the circular workpiece disk. The circular workpiece disk revolves around the axis of the turntable and rotates around its own axis at the same time. As the circular workpiece disk revolves and rotates, part of the area on the waveguide combination mirror is intermittently shielded by the circular shielding plate. The coating spraying mechanism is located below the circular workpiece disk and the circular shielding plate, and continuously sprays the coating material upward, so that the coating on the waveguide combination mirror meets the gradient efficiency, improves the brightness display uniformity of the waveguide combination mirror, and broadens the scope of use of the waveguide combination mirror.

Description

Technical Field

[0001] The present application relates to the field of optical component thin film manufacturing, and in particular to a waveguide combination mirror film coating tool. Background Art

[0002] Waveguide HUDs are a new display technology characterized by miniaturization, lightweight design, and high performance, meeting the needs of future high-performance new targeting display systems. The technology in this application is key to developing waveguide HUDs. Breakthroughs in gradient beam splitter coating technology for waveguide HUDs can effectively improve character brightness and image uniformity, while reducing production costs. Waveguide HUDs represent a new generation of HUDs with broad application prospects and enormous potential economic benefits.

[0003] The prior art uses a correction uniformity baffle to correct the film thickness distribution on the umbrella frame. By correcting the uniform shape, the film thickness distribution at specific locations on the umbrella frame is altered to achieve the desired film thickness gradient of the linear filter spacer layer. This uniformity baffle correction method has numerous problems, including the following technical drawbacks: The same uniformity baffle can only achieve one thickness gradient; Secondly, the sample must be placed relative to the uniformity baffle, resulting in low umbrella frame utilization and limited to specific locations; Furthermore, the uniformity baffle correction generally results in discontinuous test points. Improper trimming of the uniformity baffle will affect the actual thickness distribution at these non-test points, creating blind spots and making the gradient film coating uncontrollable. Summary of the Invention

[0004] In view of this, the present application provides a waveguide combination mirror film coating tool, which solves the problems in the prior art, can achieve controllable gradual coating of the film layer, and improve the quality of the coating.

[0005] The present application provides a waveguide combination mirror film coating tooling that adopts the following technical solution:

[0006] A waveguide combination mirror film coating tool, comprising:

[0007] A turntable, configured to be connected to a driving device, wherein the driving device drives the turntable to rotate around its own axis;

[0008] A plurality of circular workpiece disks are rotatably mounted on the bottom surface of a turntable, wherein the axes of the circular workpiece disks are parallel to the axis of the turntable. The bottom surface of the circular workpiece disks is used to mount a waveguide combination mirror. The driving device drives the circular workpiece disks to rotate around their own axes. The rotation of the turntable drives the circular workpiece disks to revolve around the axis of the turntable while the circular workpiece disks rotate around their own axes.

[0009] A circular shielding plate is located below the circular workpiece disk, the radius of the circular shielding plate is smaller than the radius of the circular workpiece disk, the circular shielding plate is stationary relative to the housing of the driving device, the circular shielding plate includes a first portion and a second portion, the first portion is located within the annular region formed by the circular workpiece disk during its revolution, the second portion is located outside the annular region in which the circular workpiece disk rotates and revolves, and the second portion is located outside the outer ring of the annular region, and the waveguide combination mirror installed on the circular workpiece disk passes above the circular shielding plate;

[0010] In the projection on the horizontal plane, when the circular workpiece disk revolves to the point where the overlapping area with the circular baffle is the largest and the rotation of the circular workpiece disk drives the waveguide combination mirror to the position farthest from the axis of the turntable, the first part and part of the waveguide combination mirror overlap. Starting from the point where the circular workpiece disk revolves to the point where the overlapping area with the circular baffle is the largest and the rotation of the circular workpiece disk drives the waveguide combination mirror to the position farthest from the axis of the turntable, the circular workpiece disk continues to rotate so that the overlapping area between the waveguide combination mirror and the first part gradually decreases until it disappears.

[0011] Optionally, when the turntable is stationary and only the circular workpiece disk rotates, in the projection on the horizontal plane, the rotation of the circular workpiece disk drives the waveguide combination mirror to start overlapping with the first part and rotate until the waveguide combination mirror just does not overlap with the first part. During this process, the circular workpiece disk rotates 36°.

[0012] Optionally, the radius of the circular shielding piece is one tenth to one ninth of the radius of the circular workpiece disk.

[0013] Optionally, a clamping assembly for clamping the waveguide combination mirror is provided on the bottom surface of the circular workpiece disk, and the clamping assembly is used to make the bottom surface of the waveguide combination mirror parallel to the horizontal plane.

[0014] Optionally, the clamping assembly includes a groove arranged on the bottom surface of the circular workpiece disk and two opposite L-shaped hanging plates, the bottom of the groove is inclined relative to the bottom surface of the circular workpiece disk, when the top surface of the waveguide combination mirror is in contact with the bottom of the groove, the bottom surface of the waveguide combination mirror is parallel to the horizontal plane, the side surfaces of the L-shaped hanging plates are connected to the bottom of the groove, the waveguide combination mirror is located between the two L-shaped hanging plates, and the bottom of the L-shaped hanging plates abuts the bottom edge of the waveguide combination mirror.

[0015] Optionally, the L-shaped hanging plate is made of aluminum alloy.

[0016] In summary, this application has the following beneficial technical effects:

[0017] As the circular workpiece disk revolves and rotates, some areas on the waveguide combination mirror are intermittently blocked by the circular shielding sheet. The coating spraying mechanism is located below the circular workpiece disk and the circular shielding sheet, and continuously sprays the coating material upward, so that the coating on the waveguide combination mirror meets the gradient efficiency, improves the brightness display uniformity of the waveguide combination mirror, improves the quality of the coating, and broadens the scope of use of the waveguide combination mirror.

[0018] The design of the clamping assembly of the present application enables the special-shaped waveguide combination mirror to be stably positioned on the circular workpiece disk, while solving the problem of tangential uniformity of the coating layer of the planetary turntable, making the tangential uniformity greater than or equal to 95%. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0020] Figure 1 This is a front view of the tooling for coating the waveguide combination mirror film layer of the present application;

[0021] Figure 2 This is a bottom view of the tooling for coating the waveguide combination mirror film layer of this application.

[0022] Explanation of the accompanying reference numerals: 1. turntable; 2. circular workpiece disk; 21. annular area; 3. circular shielding plate; 4. waveguide combination mirror. DETAILED DESCRIPTION

[0023] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0024] The following describes the embodiments of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the features in the following embodiments and embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of this application.

[0025] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on this application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number of aspects described herein can be used to implement an apparatus and / or practice a method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this apparatus and / or practice this method.

[0026] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The illustrations only show components related to the present application and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0027] Additionally, in the following description, specific details are provided to provide a thorough understanding of the examples. However, one skilled in the art will appreciate that the aspects described can be practiced without these specific details.

[0028] An embodiment of the present application provides a waveguide combination mirror film coating tool.

[0029] like Figure 1 and Figure 2 As shown, a waveguide combination mirror film coating tool includes:

[0030] The turntable 1 is connected to a driving device, and the driving device drives the turntable 1 to rotate around its own axis;

[0031] A plurality of circular workpiece disks 2 are rotatably mounted on the bottom surface of the turntable 1. The axis of the circular workpiece disk 2 is parallel to the axis of the turntable 1. The bottom surface of the circular workpiece disk 2 is used to mount a waveguide combination mirror 4. The driving device drives the circular workpiece disk 2 to rotate around its own axis. The rotation of the turntable 1 drives the circular workpiece disk 2 to revolve around the axis of the turntable 1 while the circular workpiece disk 2 rotates around its own axis.

[0032] A circular shielding plate 3 is located below the circular workpiece disk 2. The radius of the circular shielding plate 3 is smaller than the radius of the circular workpiece disk 2. The circular shielding plate 3 is stationary relative to the housing of the driving device. The circular shielding plate 3 includes a first portion and a second portion. The first portion is located within an annular area 21 formed when the circular workpiece disk 2 revolves, and the second portion is located outside the annular area 21 in which the circular workpiece disk 2 rotates and revolves, and the second portion is located outside the outer ring of the annular area 21. The waveguide combination mirror 4 installed on the circular workpiece disk 2 passes above the circular shielding plate 3.

[0033] In the projection on the horizontal plane, when the circular workpiece disk 2 revolves to the point where the overlapping area with the circular baffle 3 is the largest and the rotation of the circular workpiece disk 2 drives the waveguide combination mirror 4 to the position farthest from the axis of the turntable 1, the first part and part of the waveguide combination mirror 4 overlap. Starting from the point where the circular workpiece disk 2 revolves to the point where the overlapping area with the circular baffle 3 is the largest and the rotation of the circular workpiece disk 2 drives the waveguide combination mirror 4 to the position farthest from the axis of the turntable 1, the circular workpiece disk 2 continues to rotate so that the overlapping area between the waveguide combination mirror 4 and the first part gradually decreases until it disappears.

[0034] As the circular workpiece disk 2 revolves and rotates, part of the area on the waveguide combination mirror 4 is intermittently blocked by the circular shielding piece 3. The coating spraying mechanism is located below the circular workpiece disk 2 and the circular shielding piece 3, and continuously sprays the coating material upward, so that the coating on the waveguide combination mirror 4 meets the gradient efficiency, improves the brightness display uniformity of the waveguide combination mirror 4, and broadens the scope of use of the waveguide combination mirror 4.

[0035] In one embodiment, a light-controlled rod is used to secure the shield. Considering the ease of installation and precise measurement of the shield, the preferred method is to use the light-controlled rod's position, combined with several simple matching fixtures, to secure the shield. Mastering this securing method can effectively improve processing efficiency, significantly reduce processing costs, and provide considerable economic benefits.

[0036] When the turntable 1 is stationary and only the circular workpiece disk 2 rotates, the rotation of the circular workpiece disk 2 causes the waveguide assembly mirror 4 to initially overlap with the first portion in horizontal projection, and then rotate until the waveguide assembly mirror 4 just stops overlapping with the first portion. The circular workpiece disk 2 rotates 36°, achieving a gradient efficiency of 10% for the coating on the waveguide assembly mirror 4.

[0037] The radius of the circular shielding piece 3 is one tenth to one ninth of the radius of the circular workpiece disk 2 .

[0038] A clamping assembly for clamping the waveguide combination mirror 4 is provided on the bottom surface of the circular workpiece disk 2, and the clamping assembly is used to make the bottom surface of the waveguide combination mirror 4 parallel to the horizontal plane. The clamping assembly includes a groove and two opposite L-shaped hanging plates arranged on the bottom surface of the circular workpiece disk 2. The bottom of the groove is inclined relative to the bottom surface of the circular workpiece disk 2. When the top surface of the waveguide combination mirror 4 is in contact with the bottom of the groove, the bottom surface of the waveguide combination mirror 4 is parallel to the horizontal plane. The side surfaces of the L-shaped hanging plates are connected to the bottom of the groove. The waveguide combination mirror 4 is located between the two L-shaped hanging plates, and the bottom of the L-shaped hanging plates abuts the bottom edge of the waveguide combination mirror 4.

[0039] The design of the clamping assembly of the present application allows the special-shaped waveguide combination mirror 4 to be stably positioned on the circular workpiece disk 2, while also solving the problem of tangential uniformity of the coating layer of the planetary turntable 1, achieving a tangential uniformity greater than or equal to 95%. The L-shaped hanging plate is made of 2mm thick aluminum alloy.

[0040] In one embodiment, the diameter of the circular workpiece disk 2 is 420mm-450mm, the length of the groove is 160mm, the width is 45mm, the maximum distance between the groove and the center of the circular workpiece disk 2 is 140mm-160mm, and the angle between the bottom of the groove and the horizontal plane is 24°.

[0041] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A waveguide combination mirror film coating tool, characterized in that: include: A turntable (1) is connected to a driving device, wherein the driving device drives the turntable (1) to rotate around its own axis; A plurality of circular workpiece disks (2) are rotatably mounted on the bottom surface of a turntable (1), the axes of the circular workpiece disks (2) are parallel to the axis of the turntable (1), the bottom surface of the circular workpiece disks (2) is used to mount a waveguide combination mirror (4), the driving device drives the circular workpiece disks (2) to rotate around their own axes, and the rotation of the turntable (1) drives the circular workpiece disks (2) to revolve around the axis of the turntable (1) while the circular workpiece disks (2) rotate around their own axes; A circular shielding plate (3) is located below the circular workpiece disk (2), the radius of the circular shielding plate (3) is smaller than the radius of the circular workpiece disk (2), the circular shielding plate (3) is stationary relative to the housing of the driving device, the circular shielding plate (3) comprises a first part and a second part, the first part is located within an annular area (21) formed when the circular workpiece disk (2) revolves, the second part is located outside the annular area (21) where the circular workpiece disk (2) rotates and revolves, and the second part is located outside the outer ring of the annular area (21), and the waveguide combination mirror (4) installed on the circular workpiece disk (2) passes above the circular shielding plate (3); On a horizontal plane projection, when the circular workpiece disk (2) revolves to a point where the overlapping area with the circular shielding piece (3) is the largest and the rotation of the circular workpiece disk (2) drives the waveguide combination mirror (4) to a position farthest from the axis of the turntable (1), the first part and part of the waveguide combination mirror (4) overlap. With the point where the circular workpiece disk (2) revolves to a point where the overlapping area with the circular shielding piece (3) is the largest and the rotation of the circular workpiece disk (2) drives the waveguide combination mirror (4) to a position farthest from the axis of the turntable (1) as a starting point, the circular workpiece disk (2) continues to rotate so that the overlapping area between the waveguide combination mirror (4) and the first part gradually decreases until it disappears.

2. The waveguide combination mirror film coating tool according to claim 1, characterized in that: When the turntable (1) is stationary and only the circular workpiece disk (2) rotates, in the projection on the horizontal plane, the rotation of the circular workpiece disk (2) drives the waveguide combination mirror (4) to start overlapping with the first part and rotate until the waveguide combination mirror (4) just does not overlap with the first part. During this process, the circular workpiece disk (2) rotates 36 degrees.

3. The waveguide combination mirror film coating tool according to claim 1, characterized in that: The radius of the circular shielding piece (3) is one tenth to one ninth of the radius of the circular workpiece disk (2).

4. The waveguide combination mirror film coating tool according to claim 1, characterized in that: A clamping assembly for clamping the waveguide combination mirror (4) is provided on the bottom surface of the circular workpiece disk (2), and the clamping assembly is used to make the bottom surface of the waveguide combination mirror (4) parallel to the horizontal plane.

5. The waveguide combination mirror film coating tool according to claim 4, characterized in that: The clamping assembly comprises a groove provided on the bottom surface of the circular workpiece disk (2) and two opposite L-shaped hanging plates, the bottom of the groove being inclined relative to the bottom surface of the circular workpiece disk (2), the bottom surface of the waveguide combination mirror (4) being parallel to a horizontal plane when the top surface of the waveguide combination mirror (4) is in contact with the bottom surface of the groove, the side surfaces of the L-shaped hanging plates are connected to the bottom surface of the groove, the waveguide combination mirror (4) is located between the two L-shaped hanging plates, and the bottom of the L-shaped hanging plates abuts against the bottom edge of the waveguide combination mirror (4).

6. The waveguide combination mirror film coating tool according to claim 5, characterized in that: The material of the L-shaped hanging plate is aluminum alloy.

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