A large-sized tubular target sheath and its uses

Abstract

The present invention provides a large-sized tubular target sheath and its use. The large-sized tubular target sheath includes a conical inner sheath tube, an anti-adhesion gasket, and an outer sheath tube arranged in sequence from inside to outside; the taper of the conical inner sheath tube is 1:20 to 1:25; the length of the large-sized tubular target sheath is 3 to 4 m. The inner sheath tube of the large-sized tubular target sheath of the present invention adopts a taper design, and a thin stainless steel sheet is covered on the surface of the conical inner sheath tube, which can prevent the tube blank material from adhering to the conical inner sheath tube, facilitating the separation of the conical inner sheath tube and the tube blank material; moreover, the conical inner sheath tube can be reused, reducing the processing cost of the tubular target.

Description

Technical Field

[0001] The present invention relates to the technical field of target processing, and particularly relates to a large-size tubular target sheath and its use. Background Art

[0002] At present, with the rapid development of industries such as semiconductor electronics, aerospace, and medical devices, the requirements for material purity, variety, and performance are also getting higher and higher. For example, in the case of semiconductor targets, with the technological progress of industries such as microelectronics, panel, and storage in thin-film products or components, the types and specifications of targets are also increasing. Since traditional planar targets do not move relative to the magnetic field in PVD equipment, their utilization rate is relatively low, only about 30%; while tubular targets move relative to the magnetic field during sputtering, and the entire surface of the tube target can be evenly sputtered, and the overall material utilization rate can reach more than 70%.

[0003] When producing ultra-long powder metallurgy tube targets, in order to ensure their density, hot isostatic pressing is used for sintering. However, since it is necessary to prevent obvious deformation of the product during sintering, the inner sheath of the general tube target is a relatively thick metal tube, which causes the target material and the inner sheath tube to stick together after hot isostatic pressing, and it takes a lot of time to remove the inner sheath tube, usually processed by a boring machine, which is time-consuming and laborious.

[0004] CN102806353A discloses a production method of a molybdenum alloy tube target, which forms a tube target by placing pre-alloyed powder in a special sheath and performing hot isostatic pressing under vacuum conditions. The special sheath includes a coaxial stainless steel inner tube and a low-carbon steel outer tube, and fixing seats for fixing both ends of the stainless steel inner tube and the low-carbon steel outer tube. The stainless steel inner tube is a non-magnetic or weakly magnetic stainless steel tube suitable as a liner for the molybdenum alloy tube target. The wall thickness of the low-carbon steel outer tube is less than that of the stainless steel inner tube, and the difference between the inner diameter of the low-carbon steel outer tube and the outer diameter of the stainless steel inner tube is 2.1 - 2.3 times the thickness of the target tube. A gas extraction tube is pre-welded on the low-carbon steel outer tube, and the temperature of hot isostatic pressing is 1000°C - 1200°C, and the pressure is greater than or equal to 100 MPa. The obtained molybdenum alloy tube target has uniform composition, no visible segregation, tight bonding between the palladium tube and the liner, fine grains, and high purity, and can meet the requirements of the liquid crystal display and touch screen industries.

[0005] CN116748518A discloses a tube target sheath, a method for manufacturing a tube target, and an application thereof. The tube target sheath includes an inner tube and an outer tube nested in sequence from the inside to the outside. An annular cavity is formed between the outer tube and the inner tube, and annular end caps are respectively arranged at the open ends of both ends of the annular cavity. Fixing rings are respectively arranged at both ends of the inner tube, and the outer peripheral surface of the fixing ring fits the inner wall of the inner tube. By respectively arranging fixing rings at both ends of the inner tube, the problem of deformation and shrinkage at both ends of the inner tube during the hot isostatic pressing process can be effectively solved, and the deformation at both ends of the inner tube can be reduced. At the same time, during the processing after hot isostatic pressing, the target tubes at both ends of the tube target can be completely removed to meet the appearance requirements.

[0006] CN106319457A discloses a method for manufacturing a tungsten-titanium tube target. The method includes: providing tungsten and titanium mixed powder and a stainless steel hollow tube; performing a cold isostatic pressing process on the tungsten and titanium mixed powder and the stainless steel hollow tube to form an initial blank of tungsten and titanium mixed powder and stainless steel; after loading the initial blank of tungsten and titanium mixed powder and stainless steel into a vacuum sheath and evacuating the vacuum sheath, performing a hot isostatic pressing process on the initial blank of tungsten and titanium mixed powder and stainless steel; removing the vacuum sheath to obtain a tungsten-titanium tube target. Through the cold isostatic pressing process, the tungsten and titanium mixed powder and the stainless steel hollow tube are preformed to form a semi-dense initial blank of tungsten and titanium mixed powder and stainless steel, and the subsequent hot isostatic pressing process can be better densified; then through the hot isostatic pressing process, an isotropic and omnidirectional gas pressure is applied to the vacuum sheath, and finally a tungsten-titanium tube target for semiconductors with high density and more uniform tissue structure is obtained.

[0007] However, the sheath of the above tube target is difficult to remove after hot isostatic pressing sintering, and machining treatment is required, which wastes materials and time and increases the production cost. Summary of the Invention

[0008] In view of the problems existing in the prior art, the present invention provides a large-size tubular target sheath and its use. By designing a certain taper for the inner sheath tube and adding a thin stainless steel sheet on the surface, the inner sheath tube can be directly drawn out after hot isostatic pressing sintering, realizing the separation of the tube blank and the sheath tube, saving processing time and reducing the processing cost of the tubular target.

[0009] To achieve this purpose, the present invention adopts the following technical solutions:

[0010] In the first aspect, the present invention provides a large-size tubular target sheath. The large-size tubular target sheath includes a tapered inner sheath tube, an anti-adhesion gasket, and an outer sheath tube arranged in sequence from the inside to the outside. The taper of the tapered inner sheath tube is 1:20 to 1:25. The length of the large-size tubular target sheath is 3 to 4 m.

[0011] The length of the large-sized tubular target sheath described in the present invention is 3 to 4 m, thus meeting the usage requirements of large-sized tubular targets; the taper of the inner sheath tube of the large-sized tubular target sheath is 1:20 to 1:25, and an anti-adhesion gasket is provided between the tapered inner sheath tube and the outer sheath tube, facilitating the separation of the tube blank and the sheath tube after hot isostatic pressing sintering, saving processing time and reducing the processing cost of the tube target. The tapered inner sheath tube of the large-sized tubular target sheath described in the present invention can be reused, which can greatly reduce the processing cost of the tubular target.

[0012] When the taper of the tapered inner sheath tube is small, there is still a problem that it is difficult to separate the tube blank and the sheath tube; when the taper of the tapered inner sheath tube is large, it will cause a large difference in the diameter of the processed tube blank, and the size of the tube target does not meet the standard.

[0013] The taper of the tapered inner sheath tube described in the present invention is 1:20 to 1:25, for example, it can be 1:20, 1:20.5, 1:21, 1:22, 1:23, 1:24 or 1:25, etc., but is not limited to the listed values, and other unlisted values within this value range are equally applicable.

[0014] The length of the large-sized tubular target sheath is 3 to 4 m, for example, it can be 3 m, 3.2 m, 3.4 m, 3.5 m, 3.6 m, 3.8 m or 4 m, etc., but is not limited to the listed values, and other unlisted values within this value range are equally applicable.

[0015] Preferably, the anti-adhesion gasket includes a stainless steel sheet.

[0016] The present invention preferably uses a stainless steel sheet for the anti-adhesion gasket, which is inexpensive and easily available, and does not affect the purity of the target material.

[0017] Preferably, the thickness of the stainless steel sheet is 0.1 to 0.2 mm, for example, it can be 0.1 mm, 0.11 mm, 0.12 mm, 0.15 mm, 0.17 mm, 0.18 mm or 0.2 mm, etc., but is not limited to the listed values, and other unlisted values within this value range are equally applicable.

[0018] The present invention preferably uses a stainless steel sheet with a thickness of 0.1 to 0.2 mm. When the thickness of the stainless steel sheet is relatively thin, it cannot play a good anti-adhesion role, and there is still a problem that it is difficult to separate the tube blank and the sheath tube after hot isostatic pressing sintering; when the thickness of the stainless steel sheet is relatively thick, it is not conducive to the processing of the tubular target.

[0019] Preferably, the tapered inner sheath tube and the anti-adhesion gasket are welded by argon arc welding.

[0020] The operating parameters for the TIG welding in the present invention include: straight polarity DC, welding current of 150 - 200 A, argon gas flow rate of 8 - 15 L / min, and welding speed of 6 - 10 cm / min.

[0021] Preferably, the large-sized tubular target sheath further includes an annular cover plate welded between the conical inner sheath and the outer sheath.

[0022] In a second aspect, the present invention also provides a use of the large-sized tubular target sheath as described in the first aspect in the preparation of a large-sized tubular target.

[0023] Preferably, the specific method includes the following steps:

[0024] (1) After loading the tube blank material into the large-sized tubular target sheath, weld the outer sheath, annular cover plate, conical inner sheath, and degassing tube to form a sealed sheath.

[0025] (2) Subject the sealed sheath to degassing by vacuum pumping and hot isostatic pressing sintering in sequence.

[0026] (3) Machine and remove the annular cover plates on both sides of the product after the hot isostatic pressing sintering, and separate the conical inner sheath and the tube blank material in the reverse direction along the taper direction of the conical inner sheath to obtain the large-sized tubular target.

[0027] Preferably, the temperature of the hot isostatic pressing sintering in step (2) is 1000 - 1200 °C, for example, it can be 1000 °C, 1030 °C, 1050 °C, 1100 °C, 1160 °C, 1180 °C, or 1200 °C, etc., but is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0028] Preferably, the pressure of the hot isostatic pressing sintering in step (2) is 120 - 140 MPa, for example, it can be 120 MPa, 121 MPa, 123 MPa, 125 MPa, 130 MPa, 135 MPa, or 140 MPa, etc., but is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0029] Preferably, the time of the hot isostatic pressing sintering in step (2) is 4 - 6 h, for example, it can be 4 h, 4.3 h, 4.5 h, 5 h, 5.5 h, 5.8 h, or 6 h, etc., but is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0030] As a preferred technical solution of the present invention, the method includes the following steps:

[0031] (1) After loading the tube blank material into the large-sized tubular target material sheath, weld the outer sheath tube, the annular cover plate, the conical inner sheath tube, and the degassing tube to form a sealed sheath.

[0032] (2) Subject the sealed sheath to degassing and vacuum pumping in sequence, and perform hot isostatic pressing sintering at a temperature of 1000 - 1200 °C and a pressure of 120 - 140 MPa for 4 - 6 h.

[0033] (3) Remove the annular cover plates on both sides of the product after the hot isostatic pressing sintering, and separate the conical inner sheath tube and the tube blank material in the reverse direction along the taper direction of the conical inner sheath tube to obtain a large-sized tubular target material.

[0034] Compared with the prior art, the present invention has at least the following beneficial effects:

[0035] The inner sheath tube of the large-sized tubular target material sheath provided by the present invention adopts a taper design, which facilitates the separation of the tube blank and the sheath tube; moreover, the thin stainless steel sheet covered on the surface of the conical inner sheath tube can prevent the adhesion between the tube blank material and the inner sheath tube; the structure of the large-sized tubular target material sheath is simple, which is convenient for separating the inner sheath tube and the tube blank material, saving processing time, and the inner sheath tube can be reused, reducing costs, and having a broad application prospect. Description of the Drawings

[0036] Figure 1 is a schematic structural diagram of a large-sized tubular target material sheath provided in Embodiment 1 of the present invention.

[0037] In the figure: 1 - outer sheath tube; 2 - annular cover plate; 3 - conical inner sheath tube; 4 - tube blank material; 5 - stainless steel sheet; 6 - degassing tube. Detailed Embodiments

[0038] The technical solution of the present invention will be further described below with reference to the drawings and through specific embodiments.

[0039] The present invention will be further described in detail below. However, the following examples are only simple examples of the present invention and do not represent or limit the scope of the patent protection of the present invention. The scope of protection of the present invention shall be subject to the claims.

[0040] Embodiment 1

[0041] This embodiment provides a large-sized tubular target material sheath, and its schematic structural diagram is as Figure 1 shown.

[0042] The large-sized tubular target material sheath includes a conical inner sheath tube 3, an anti-adhesion gasket, and an outer sheath tube 1 arranged in sequence from the inside to the outside; the taper of the conical inner sheath tube 3 is 1:22; the length of the large-sized tubular target material sheath is 3.4 m.

[0043] The anti-adhesion gasket is a stainless steel sheet 5. The thickness of the stainless steel sheet 5 is 0.13 mm.

[0044] The conical inner cladding tube 3 and the anti-adhesion gasket are welded by argon arc welding.

[0045] The large-sized tubular target cladding also includes an annular cover plate 2 welded between the conical inner cladding tube 3 and the outer cladding tube 1.

[0046] This embodiment also provides a use of the above large-sized tubular target cladding in preparing a large-sized tubular target. The specific method includes the following steps:

[0047] (1) After loading the tube blank material 4 into the large-sized tubular target cladding, the outer cladding tube 1, the annular cover plate 2, the conical inner cladding tube 3 and the degassing tube 6 are welded to form a sealed cladding.

[0048] (2) The sealed cladding is successively degassed and evacuated, and then subjected to hot isostatic pressing sintering at a temperature of 1080 °C and a pressure of 128 MPa for 4.6 h.

[0049] (3) The two-side annular cover plates 2 of the product after hot isostatic pressing sintering are machined and removed, and the conical inner cladding tube 3 and the tube blank material 4 are separated in the reverse direction along the taper direction of the conical inner cladding tube 3 to obtain a large-sized tubular target.

[0050] Example 2

[0051] This embodiment provides a large-sized tubular target cladding, which includes a conical inner cladding tube, an anti-adhesion gasket and an outer cladding tube arranged in sequence from the inside to the outside; the taper of the conical inner cladding tube is 1:20; the length of the large-sized tubular target cladding is 4 m.

[0052] The anti-adhesion gasket is a stainless steel sheet. The thickness of the stainless steel sheet is 0.1 mm.

[0053] The conical inner cladding tube and the anti-adhesion gasket are welded by argon arc welding.

[0054] The large-sized tubular target cladding also includes an annular cover plate welded between the conical inner cladding tube and the outer cladding tube.

[0055] This embodiment also provides a use of the above large-sized tubular target cladding in preparing a large-sized tubular target. The specific method includes the following steps:

[0056] (1) After loading the tube blank material into the large-sized tubular target cladding, the outer cladding tube, the annular cover plate, the conical inner cladding tube and the degassing tube are welded to form a sealed cladding.

[0057] (2) The sealed envelope is successively degassed and evacuated, and then subjected to hot isostatic pressing sintering at a temperature of 1000 °C and a pressure of 120 MPa for 6 h;

[0058] (3) The annular cover plates on both sides of the product after the hot isostatic pressing sintering are machined and removed, and the tapered inner casing and the tube blank material are separated in the reverse direction along the taper direction of the tapered inner casing to obtain a large-sized tubular target.

[0059] Example 3

[0060] This example provides a large-sized tubular target envelope, which includes a tapered inner casing, an anti-adhesion gasket, and an outer casing arranged in sequence from the inside to the outside; the taper of the tapered inner casing is 1:25; the length of the large-sized tubular target envelope is 3 m.

[0061] The anti-adhesion gasket is a stainless steel sheet. The thickness of the stainless steel sheet is 0.2 mm.

[0062] The tapered inner casing and the anti-adhesion gasket are welded by argon arc welding.

[0063] The large-sized tubular target envelope further includes an annular cover plate welded between the tapered inner casing and the outer casing.

[0064] This example also provides a use of the above large-sized tubular target envelope in the preparation of a large-sized tubular target. The specific method includes the following steps:

[0065] (1) After loading the tube blank material into the large-sized tubular target envelope, the outer casing, the annular cover plate, the tapered inner casing, and the degassing tube are welded to form a sealed envelope;

[0066] (2) The sealed envelope is successively degassed and evacuated, and then subjected to hot isostatic pressing sintering at a temperature of 1200 °C and a pressure of 140 MPa for 4 h;

[0067] (3) The annular cover plates on both sides of the product after the hot isostatic pressing sintering are machined and removed, and the tapered inner casing and the tube blank material are separated in the reverse direction along the taper direction of the tapered inner casing to obtain a large-sized tubular target.

[0068] It can be seen from Examples 1 to 3 that the inner casing of the large-sized tubular target envelope provided by the present invention adopts a taper design, which is convenient for separating the tube blank and the casing; moreover, the thin stainless steel sheet covered on the surface of the tapered inner casing can prevent the tube blank material from adhering to the inner casing.

[0069] Example 4

[0070] This example provides a large-sized tubular target envelope, which is the same as Example 1 except that the thickness of the stainless steel sheet is 0.05 mm.

[0071] This embodiment also provides a use of the above-mentioned large-sized tubular target sheath in preparing a large-sized tubular target, and the specific method is the same as that of Embodiment 1.

[0072] Embodiment 5

[0073] This embodiment provides a large-sized tubular target sheath. Except that the thickness of the stainless steel sheet is 0.3 mm, the rest are the same as those of Embodiment 1.

[0074] This embodiment also provides a use of the above-mentioned large-sized tubular target sheath in preparing a large-sized tubular target, and the specific method is the same as that of Embodiment 1.

[0075] From a comprehensive view of Embodiment 1 and Embodiments 4 to 5, it can be seen that in Embodiment 4, the thickness of the stainless steel sheet is relatively thin, and it cannot play a good role in preventing adhesion, and there is still a problem that it is difficult to separate the tube blank and the sheathing tube after hot isostatic pressing sintering; in Embodiment 5, the thickness of the stainless steel sheet is relatively thick, which is not conducive to the processing of the tubular target.

[0076] Comparative Example 1

[0077] This comparative example provides a large-sized tubular target sheath. Except that the taper of the conical inner sheathing tube is 1:15, the rest are the same as those of Embodiment 1.

[0078] This comparative example also provides a use of the above-mentioned large-sized tubular target sheath in preparing a large-sized tubular target, and the specific method is the same as that of Embodiment 1.

[0079] Comparative Example 2

[0080] This comparative example provides a large-sized tubular target sheath. Except that the taper of the conical inner sheathing tube is 1:30, the rest are the same as those of Embodiment 1.

[0081] This comparative example also provides a use of the above-mentioned large-sized tubular target sheath in preparing a large-sized tubular target, and the specific method is the same as that of Embodiment 1.

[0082] From a comprehensive view of Embodiment 1 and Comparative Examples 1 to 2, it can be seen that in Comparative Example 1, the taper of the conical inner sheathing tube is relatively small, and there is still a problem that it is difficult to separate the tube blank and the sheathing tube; in Comparative Example 2, the taper of the conical inner sheathing tube is relatively large, which will cause the tube blank obtained by processing to be affected by the conical inner sheathing tube, resulting in inconsistent diameters of the tube blanks, and further resulting in non-compliance of the tube target size.

[0083] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed by the present invention fall within the protection scope and the disclosure scope of the present invention.

Claims

1. A method for preparing a large-sized tubular target using a large-sized tubular target sheath, characterized in that, the large-sized tubular target sheath includes a conical inner sheath tube, an anti-adhesion gasket, and an outer sheath tube arranged in sequence from the inside to the outside; the taper of the conical inner sheath tube is 1:20 to 1:25; the length of the large-sized tubular target sheath is 3 to 4 m; the anti-adhesion gasket includes a stainless steel sheet; the thickness of the stainless steel sheet is 0.1 to 0.2 mm; the large-sized tubular target sheath further includes an annular cover plate welded between the conical inner sheath tube and the outer sheath tube; the method for preparing a large-sized tubular target using the large-sized tubular target sheath includes the following steps: (1) After loading the tube blank material into the large-sized tubular target sheath, weld the outer sheath tube, the annular cover plate, the conical inner sheath tube, and the degassing tube to form a sealed sheath; (2) Perform degassing and vacuum pumping and hot isostatic pressing sintering on the sealed sheath in sequence; the temperature of the hot isostatic pressing sintering is 1000 to 1200 °C, the pressure of the hot isostatic pressing sintering is 120 to 140 MPa, and the time of the hot isostatic pressing sintering is 4 to 6 h; (3) Remove the annular cover plates on both sides of the product after the hot isostatic pressing sintering, and separate the conical inner sheath tube and the tube blank material in the reverse direction along the taper direction of the conical inner sheath tube to obtain a large-sized tubular target.

2. The method according to claim 1, characterized in that, the conical inner sheath tube and the anti-adhesion gasket are welded by argon arc welding.

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