A microstructured gas sensor
By employing a four-cantilever structure and shielding surface design in the gas sensor, the problem of heat loss caused by thermal radiation and convection is solved, realizing a low-energy-consumption and high-sensitivity gas sensor, improving detection performance and material consistency.
CN117491438BActive Publication Date: 2026-06-30AI-SENSING TECH (GUANGDONG) CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- AI-SENSING TECH (GUANGDONG) CO LTD
- Filing Date
- 2023-11-16
- Publication Date
- 2026-06-30
AI Technical Summary
Technical Problem
Existing gas sensors suffer from heat loss issues in reducing power consumption, especially heat loss caused by thermal radiation and thermal convection. Furthermore, traditional methods struggle to achieve high sensitivity and material consistency in microstructures.
Method used
The microstructured gas sensor employs a four-beam structure, with the central area suspended in the bottom space of the substrate. Shielding surfaces are provided in the central area and above the beams to reduce thermal radiation and convection. The multi-layer structure design also reduces heat loss.
Benefits of technology
It effectively reduces heat loss, improves the energy efficiency ratio of the sensor, enhances detection stability and sensitivity, and simplifies the manufacturing process.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN117491438B_ABST
Abstract
A microstructured gas sensor is configured as a layered structure with multiple overlapping functional layers. At least a portion of the multilayered structure constitutes a central region for generating a gas reaction to perform detection, and at least four cantilever beams connect the central region to the surrounding remainder. The cantilever beams suspend the central region within a bottom space of a substrate, and a relatively suspended shielding surface is provided above the central region and / or the cantilever beams. The shielding surface is configured to reduce heat loss from the central region and / or the cantilever beams by at least reducing thermal convection generated by gas flow perpendicular to the central region and / or the cantilever beams and by feeding back thermal radiation emanating from the central region and / or the cantilever beams.
Need to check novelty before this filing date? Find Prior Art