Perpendicularity adjusting device and perpendicularity adjusting method

Abstract

The present application belongs to the technical field of semiconductor equipment, and discloses a perpendicularity adjusting device and a perpendicularity adjusting method. The perpendicularity adjusting device comprises a first adjusting ring and a second adjusting ring, the first adjusting ring and the second adjusting ring both have oppositely arranged first surfaces and second surfaces, the first surface is an inclined surface, the first surface of the first adjusting ring and the first surface of the second adjusting ring are mutually adhered, and the first adjusting ring and the second adjusting ring can relatively rotate, and the side surface of the first adjusting ring and the second adjusting ring is provided with a plurality of interval arranged metering parts. The perpendicularity adjusting method provided by the present application adopts the above perpendicularity adjusting device. The perpendicularity adjusting device provided by the present application rotates the first adjusting ring and the second adjusting ring, so that the second surface of the first adjusting ring and the second surface of the second adjusting ring after being adhered generate an inclination angle, i.e. a compensation angle, to compensate the perpendicularity deviation of the structure, and the operation is convenient and reliable.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a perpendicularity adjusting device and a perpendicularity adjusting method. BACKGROUND

[0002] With the rapid development of the semiconductor industry, the process is continuously shrinking, and the process equipment and detection equipment of the semiconductor continuously improve the demand for ultra-precision motion tables. For example, in the field of silicon wafer manufacturing and detection, it often involves silicon wafer rotation working conditions. The perpendicularity of the axis of the rotating shaft to the mounting reference surface is an important indicator of the rotation performance, which directly affects the shaft jump indicator on the one hand, and the change of the moment of inertia will affect the rotation performance of the rotating shaft on the other hand. For example, the perpendicularity of the rotating shaft relative to the X and Y direction motion shaft will directly affect the performance of the entire motion table. With the development of nanometer motion table, the demand for rotation shaft perpendicularity index is also increasing.

[0003] At present, the adjustment mode of commonly used top wire and bolt cooperation is used to adjust the perpendicularity, and the principle is to use a bolt to fix between the upper and lower plates, and after fixing, a level is used to measure the levelness of the upper surface. The high place is pulled tight by the bolt, and the low position is raised by the top wire. Through several iterations of adjustment, the levelness of the upper surface is up to standard. The adjustment accuracy of this method is low, and it is time-consuming and has no repeatability during adjustment. SUMMARY

[0004] The purpose of the present application is to provide a perpendicularity adjusting device and a perpendicularity adjusting method, which aims to simplify the structure and improve the operation convenience and adjustment reliability of the perpendicularity adjustment.

[0005] To achieve this purpose, the present application adopts the following technical solutions:

[0006] A perpendicularity adjusting device, comprising:

[0007] A first adjusting ring and a second adjusting ring, the first adjusting ring and the second adjusting ring both have oppositely arranged first surfaces and second surfaces, the first surfaces are inclined surfaces, the first surface of the first adjusting ring and the first surface of the second adjusting ring are mutually attached, and the first adjusting ring and the second adjusting ring can rotate relative to each other, and the side surfaces of the first adjusting ring and the second adjusting ring are both provided with a plurality of spaced apart measuring portions.

[0008] Optionally, the measuring portion is arranged as an arc-shaped groove.

[0009] Optionally, the side surfaces of the first adjusting ring and the second adjusting ring are both provided with 12 measuring portions, and the 12 measuring portions are uniformly distributed in the circumferential direction.

[0010] Optionally, the side surface of the first adjusting ring and the second adjusting ring is provided with a mark part.

[0011] Optionally, the mark part is provided as a notch structure.

[0012] Optionally, a plurality of first arc-shaped guide holes are arranged on the first adjusting ring, a plurality of second arc-shaped guide holes are arranged on the second adjusting ring, the plurality of first arc-shaped guide holes and the plurality of second arc-shaped guide holes are arranged one by one in correspondence, and a threaded part is sequentially screwed through the rotary shaft structure, the second arc-shaped guide hole, the first arc-shaped guide hole and the workbench.

[0013] Optionally, the first arc-shaped guide hole is provided with 8, and the 8 first arc-shaped guide holes are uniformly distributed along the circumference of the first adjusting ring.

[0014] The second arc-shaped guide hole is provided with 8, and the 8 second arc-shaped guide holes are uniformly distributed along the circumference of the second adjusting ring.

[0015] Optionally, the perpendicularity adjusting device further comprises a rotating handle, the rotating handle comprises an arc-shaped contact part, one end of the arc-shaped contact part is provided with a handle part, the other end of the arc-shaped contact part is provided with a hooking part, and the arc-shaped contact part matches the outer shape of the first adjusting ring and the second adjusting ring.

[0016] Optionally, the handle part is provided with a hanging hole away from one end of the arc-shaped contact part.

[0017] A perpendicularity adjusting method, using the perpendicularity adjusting device of any one of the above-mentioned schemes, the perpendicularity adjusting method comprising:

[0018] Pre-assembling the rotary shaft structure to the workbench;

[0019] Measuring the deflection value of the shaft core of the rotary shaft structure;

[0020] Calculating a compensation angle and adjusting the first adjusting ring and the second adjusting ring;

[0021] Installing the first adjusting ring and the second adjusting ring between the workbench and the rotary shaft structure;

[0022] Measuring the deflection value of the shaft core of the rotary shaft structure again.

[0023] The perpendicularity adjusting device provided by the application comprises a first adjusting ring and a second adjusting ring, the inclined surface of the first adjusting ring and the inclined surface of the second adjusting ring are mutually adhered, the second surface of the first adjusting ring and the second surface of the second adjusting ring after being adhered are rotated to generate an inclination angle, i.e. a compensation angle, so as to compensate the perpendicularity deviation of the structure, the operation is convenient and reliable, the first adjusting ring and the second adjusting ring can be repeatedly used, and the reproducibility is high; the adjusting efficiency can be improved by setting the metering part; the perpendicularity adjusting device has simple structure, small space occupation, and high integration.

[0024] The perpendicularity adjusting method provided by the application adopts the perpendicularity adjusting device, and the axial core deviation of the rotary shaft is compensated by using the perpendicularity adjusting device, so that the operation is simple and fast, and the adjusting efficiency is effectively improved. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a structure schematic view of the first adjusting ring and the second adjusting ring after being adhered provided by the embodiment of the application;

[0026] Figure 2 is a structure schematic view of the first adjusting ring provided by the embodiment of the application;

[0027] Figure 3 is a structure schematic view of the rotating handle provided by the embodiment of the application;

[0028] Figure 4 is a schematic view of two rotating handles respectively acting on the first adjusting ring and the second adjusting ring provided by the embodiment of the application;

[0029] Figure 5 is an initial inclination angle θ of the first surface provided by the embodiment of the application;

[0030] Figure 6 is the maximum inclination angle between the second surface of the first adjusting ring and the second surface of the second adjusting ring provided by the embodiment of the application;

[0031] Figure 7 is a relationship diagram of the staggered rotation angle between the first adjusting ring and the second adjusting ring and the included angle between the second surface of the first adjusting ring and the second surface of the second adjusting ring provided by the embodiment of the application;

[0032] Figure 8 is a flowchart of the perpendicularity adjusting method provided by the embodiment of the application.

[0033] In the drawings:

[0034] 100, first adjusting ring; 110, first surface; 120, second surface; 130, metering part; 140, marking part; 150, first arc-shaped guide hole;

[0035] 200, second adjusting ring;

[0036] 300, rotating handle; 310, arc-shaped contact part; 320, handle part; 321, hooking hole; 330, hooking part. DETAILED DESCRIPTION

[0037] The application will be further described below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are merely intended for the purpose of interpretation of the application and are not limiting to the application. In addition, it should be noted that only the parts related to the application are shown in the drawings for the purpose of description, rather than all the structures.

[0038] In the description of the application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0039] In the present application, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the "upper", "above" and "on" of the first feature to the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature to the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0040] In the description of the present embodiment, the terms "upper", "lower", "right", and other orientation or position relationships are based on the orientation or position relationship shown in the drawings, and are only for the purpose of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the application. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0041] The present embodiment provides a perpendicularity adjusting device, such as Figures 1-4As shown, the perpendicularity adjusting device comprises a first adjusting ring 100 and a second adjusting ring 200, the first adjusting ring 100 and the second adjusting ring 200 each have oppositely arranged first surfaces 110 and second surfaces 120, the first surfaces 110 are inclined surfaces, the first surface 110 of the first adjusting ring 100 and the first surface of the second adjusting ring 200 are in close contact with each other, and the first adjusting ring 100 and the second adjusting ring 200 can rotate relative to each other, and the side surfaces of the first adjusting ring 100 and the second adjusting ring 200 are each provided with a plurality of spaced apart measuring portions 130.

[0042] The perpendicularity adjusting device provided by the embodiment comprises a first adjusting ring 100 and a second adjusting ring 200, the inclined surface of the first adjusting ring 100 and the inclined surface of the second adjusting ring 200 are in close contact with each other, by rotating the first adjusting ring 100 and the second adjusting ring 200, an inclination angle, i.e. a compensation angle, is generated between the second surface 120 of the first adjusting ring 100 and the second surface of the second adjusting ring 200 after being in close contact, so as to compensate for the perpendicularity deviation of the structure, the operation is convenient and reliable, the first adjusting ring 100 and the second adjusting ring 200 can be repeatedly used, and have high reproducibility; by arranging the measuring portions 130, the adjusting efficiency can be assisted to be improved; the perpendicularity adjusting device has a simple structure, occupies a small space, and has high integration.

[0043] Optionally, the measuring portion 130 is arranged as an arc-shaped groove, the arc-shaped groove is convenient to process, and the manufacturing cost is reduced. In the embodiment, the side surfaces of the first adjusting ring 100 and the second adjusting ring 200 are each provided with 12 measuring portions 130, the 12 measuring portions 130 are uniformly distributed along the circumferential direction of the first adjusting ring 100 or the second adjusting ring 200, and when the first adjusting ring 100 and the second adjusting ring 200 are rotated, the adjusting range of the first adjusting ring 100 and the second adjusting ring 200 can be recorded by recording the positions of the measuring portions 130. In other embodiments, the specific number of the measuring portions 130 can also be set according to actual needs.

[0044] In actual processing, the thicknesses of the first adjusting ring 100 and the second adjusting ring 200 are very small, in order to quickly distinguish the first surface 110 and the second surface 120 of the first adjusting ring 100 or the second adjusting ring 200, the side surfaces of the first adjusting ring 100 and the second adjusting ring 200 are each provided with a marking portion 140. Optionally, the marking portion 140 is arranged as a notch structure, which is convenient to process. Alternatively, the marking portion 140 can also be arranged as an arrow structure, the arrow structure is directed from the second surface 120 to the first surface 110, and the first surface 110 and the second surface 120 can be quickly distinguished according to the direction of the arrow structure. When the marking portion 140 is arranged as a notch structure, the notch structure can be arranged at the edge of the first surface 110 (see Figure 2 ), and the first surface 110 and the second surface 120 can be quickly distinguished according to the position of the notch structure.

[0045] Optionally, the first adjusting ring 100 is provided with multiple first arc-shaped guide holes 150, and the second adjusting ring 200 is provided with multiple second arc-shaped guide holes. The multiple first arc-shaped guide holes 150 and multiple second arc-shaped guide holes are arranged one-to-one. A threaded component is sequentially screwed through the rotary shaft, the second arc-shaped guide hole, the first arc-shaped guide hole 150, and the worktable. In use, after adjusting the compensation angle of the first adjusting ring 100 and the second adjusting ring 200, the threaded component is sequentially screwed through the rotary shaft, the second arc-shaped guide hole, the first arc-shaped guide hole 150, and the worktable to fix the rotary shaft, the second adjusting ring 200, and the first adjusting ring 100 on the worktable. The compensation angle of the first adjusting ring 100 and the second adjusting ring 200 balances the deflection value of the rotary shaft, so that the perpendicularity of the rotary shaft reaches the standard value. For example, in this embodiment, there are 8 first arc-shaped guide holes 150, which are evenly distributed along the circumference of the first adjusting ring 100; there are 8 second arc-shaped guide holes, which are evenly distributed along the circumference of the second adjusting ring 200.

[0046] See Figure 3 and Figure 4 To improve the ease of operation of the first adjusting ring 100 and the second adjusting ring 200, the verticality adjustment device further includes a rotary handle 300. The rotary handle 300 includes an arc-shaped contact portion 310, one end of which is provided with a handle portion 320, and the other end of which is provided with a hook portion 330. The arc-shaped contact portion 310 matches the shape of both the first adjusting ring 100 and the second adjusting ring 200. Figure 4 As shown, two rotating handles 300 are used to operate on the first adjusting ring 100 and the second adjusting ring 200 respectively. The hook portion 330 of one rotating handle 300 hooks into one of the measuring portions 130 of the first adjusting ring 100, and the hook portion 330 of the other rotating handle 300 hooks into one of the measuring portions 130 of the second adjusting ring 200, causing the first adjusting ring 100 to rotate counterclockwise and the second adjusting ring 200 to rotate clockwise, until a suitable angle is formed between the second surface 120 of the first adjusting ring 100 and the second surface of the second adjusting ring 200. By setting up these rotating handles 300, the ease of operation is effectively improved.

[0047] Furthermore, a hanging hole 321 is provided at the end of the handle 320 away from the arc-shaped contact part 310. When the rotating handle 300 is not in use, it can be hung on the wall or stored through the hanging hole 321 to avoid loss.

[0048] See Figures 5-7 , Figure 5 It is the initial tilt angle θ of the first surface 110. Figure 6It is the maximum tilt angle between the second surface 120 of the first adjusting ring 100 and the second surface of the second adjusting ring 200. Figure 7 This is a diagram showing the relationship between the staggered rotation angle between the first adjusting ring 100 and the second adjusting ring 200 and the angle between the second surface 120 of the first adjusting ring 100 and the second surface of the second adjusting ring 200. Figure 5 and Figure 6 It can be seen that initially, when the first adjusting ring 100 and the second adjusting ring 200 are coaxially attached, the second surfaces 120 of the first adjusting ring 100 and 200 are parallel to each other, with an included angle of 0°. When the second adjusting ring 200 rotates 180° relative to itself, the included angle between the second surfaces 120 of the first adjusting ring 100 and 200 is 2θ. When adjusting the included angle between the second surfaces 120 of the first adjusting ring 100 and 200, one can refer to... Figure 7 The relationship between the changes in the rings is used to quickly determine the staggered rotation angle between the first adjustment ring 100 and the second adjustment ring 200.

[0049] This embodiment also provides a verticality adjustment method, which uses the aforementioned verticality adjustment device, such as... Figure 8 As shown, the verticality adjustment method includes:

[0050] S1. Pre-assemble the rotary shaft structure onto the worktable;

[0051] When installing the rotary shaft structure, the installation environment must be kept clean to avoid small particles affecting subsequent measurements.

[0052] S2. Measure the deflection value of the shaft core of the rotary shaft structure;

[0053] For example, the spindle offset value can be determined by measuring the height of the top surface of the rotary shaft structure.

[0054] S3. Calculate the compensation angle and adjust the first adjustment ring 100 and the second adjustment ring 200.

[0055] During calculation, the compensation angle can be obtained based on the relationship between the staggered rotation angle between the first adjustment ring 100 and the second adjustment ring 200 and the angle between the second surface 120 of the first adjustment ring 100 and the second surface of the second adjustment ring 200. The range of the compensation angle is -2θ to +2θ.

[0056] S4. Install the first adjusting ring 100 and the second adjusting ring 200 between the worktable and the rotary shaft structure;

[0057] When installing the first adjusting ring 100 and the second adjusting ring 200, first remove the rotary shaft structure from the worktable, and then install the first adjusting ring 100 and the second adjusting ring 200 between the worktable and the rotary shaft structure. Specifically, threaded parts can be used to sequentially screw through the rotary shaft, the second adjusting ring 200, the first adjusting ring 100, and the worktable.

[0058] S5. Measure the spindle misalignment of the rotary shaft structure again.

[0059] The verticality adjustment method provided in this embodiment uses the aforementioned verticality adjustment device to compensate for the shaft core deviation of the rotating shaft. The operation is simple and quick, effectively improving the adjustment efficiency.

[0060] Optionally, after measuring the spindle misalignment of the rotary shaft structure again, if the perpendicularity of the rotary shaft structure still does not meet the standard, the first adjusting ring 100 and the second adjusting ring 200 can be finely adjusted by using the rotating handle 300 to finally make the perpendicularity of the rotary shaft structure meet the standard.

[0061] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A perpendicularity adjustment device characterized by comprising: The perpendicularity adjusting device comprises: a first adjusting ring (100) and a second adjusting ring (200), the first adjusting ring (100) and the second adjusting ring (200) each have oppositely arranged first surfaces (110) and second surfaces (120), the first surfaces (110) are inclined surfaces, the first surfaces (110) of the first adjusting ring (100) and the first surfaces of the second adjusting ring (200) are matched with each other, and the first adjusting ring (100) and the second adjusting ring (200) can rotate relative to each other, and the side surfaces of the first adjusting ring (100) and the second adjusting ring (200) are each provided with a plurality of metering portions (130) arranged at intervals; the metering portions (130) are arranged as arc-shaped grooves; the side surfaces of the first adjusting ring (100) and the second adjusting ring (200) are each provided with 12 metering portions (130), and the 12 metering portions (130) are uniformly distributed in the circumferential direction; the perpendicularity adjusting device further comprises a rotating handle (300), the rotating handle (300) comprises an arc-shaped contact portion (310), one end of the arc-shaped contact portion (310) is provided with a handle portion (320), the other end of the arc-shaped contact portion (310) is provided with a hooking portion (330), and the arc-shaped contact portion (310) matches the shapes of the first adjusting ring (100) and the second adjusting ring (200).

2. The perpendicularity adjustment apparatus according to claim 1, characterized by the side surfaces of the first adjusting ring (100) and the second adjusting ring (200) are each provided with a marking portion (140).

3. The plumbness adjusting device according to claim 2, characterized in that the marking portion (140) is arranged as a notch structure.

4. The plumbness adjusting device according to claim 1, characterized by a plurality of first arc-shaped guide holes (150) are arranged on the first adjusting ring (100), a plurality of second arc-shaped guide holes are arranged on the second adjusting ring (200), the plurality of first arc-shaped guide holes (150) and the plurality of second arc-shaped guide holes are arranged one by one in a corresponding manner, and threaded members are sequentially screwed through the rotating shaft structure, the second arc-shaped guide holes, the first arc-shaped guide holes (150) and the workbench.

5. The plumbness adjusting device according to claim 4, characterized in that the first arc-shaped guide holes (150) are arranged in 8, and the 8 first arc-shaped guide holes (150) are uniformly distributed in the circumferential direction of the first adjusting ring (100); the second arc-shaped guide holes are arranged in 8, and the 8 second arc-shaped guide holes are uniformly distributed in the circumferential direction of the second adjusting ring (200).

6. The plumbness adjusting device according to claim 1, wherein the handle portion (320) is provided with a hanging hole (321) at the end away from the arc-shaped contact portion (310).

7. A method of adjusting perpendicularity, characterized by, The perpendicularity adjusting method comprises: pre-assembling the rotating shaft structure to the workbench; measuring the deflection value of the shaft core of the rotating shaft structure; calculating a compensation angle, adjusting the first adjusting ring (100) and the second adjusting ring (200); installing the first adjusting ring (100) and the second adjusting ring (200) between the workbench and the rotating shaft structure; measuring the deflection value of the shaft core of the rotating shaft structure again.

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