Conductive slip ring and semiconductor process equipment

Abstract

The application discloses a conductive slip ring and a semiconductor process equipment. The conductive slip ring is applied to a process chamber of the semiconductor process equipment. The conductive slip ring comprises a shell, a fixed electric connection part and a rotating electric connection part. The shell has a shell cavity and a first mounting hole in communication with the shell cavity. The shell is used for being sealingly connected with the process chamber, so that the shell cavity is sealingly communicated with a chamber space of the process chamber. The fixed electric connection part is sealingly matched with the first mounting hole. A first end of the fixed electric connection part extends into the shell cavity and is electrically connected with the rotating electric connection part. A second end of the fixed electric connection part is located outside the shell and is used for being electrically connected with a power supply. The rotating electric connection part is rotatably arranged in the shell and is used for being electrically connected with an electric device in the process chamber. The above scheme can solve the problem that the related art process chamber adopts a magnetic fluid structure to realize the sealing between a process space and an external environment of the process chamber, and the sealing effect is poor.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor process equipment, and particularly relates to a conductive slip ring and semiconductor process equipment. BACKGROUND

[0002] In a film forming process, a carrier seat carries a wafer and rotates with the wafer to obtain a thin film with relatively uniform thickness. In addition to the carrying function, the carrier seat also has other functions such as a heating function and a radio frequency function. In order to realize some of the functions, the carrier seat in rotation needs to be powered to enable the electrical devices in the carrier seat to work. Therefore, the rotating power supply technology is a core technology for realizing some functions of the carrier seat.

[0003] Since the carrier seat is arranged in a process space of a process chamber, the process space needs to maintain a vacuum environment during the process, and the power supply is arranged outside the process chamber. This structure needs the electrical devices to pass through the process chamber when electrically connected with the power supply. In order to not damage the vacuum environment of the process space, the related technology realizes the sealing isolation between the process space and the external environment of the process chamber through a magnetic fluid structure. However, the magnetic fluid structure used to realize the sealing isolation has the problem of poor sealing effect, which is more likely to cause the communication between the process space and the external environment of the process chamber and cause the process to fail.

[0004] Of course, when the electrical devices in the carrier seat adopt the rotating power supply technology, other structures in the process chamber that need to realize power supply through the rotating power supply technology will also encounter similar or the same technical problems. SUMMARY

[0005] The application discloses a conductive slip ring and semiconductor process equipment to solve the problem of poor sealing effect of the related technology that the process chamber uses a magnetic fluid structure to realize the sealing between the process space and the external environment of the process chamber.

[0006] In order to solve the above technical problems, the application provides the following technical solutions:

[0007] In a first aspect, the application discloses a conductive slip ring applied to a process chamber of a semiconductor process equipment, and the conductive slip ring comprises a shell, a fixed electrical connection part and a rotating electrical connection part, wherein:

[0008] The shell has a shell cavity and a first mounting hole in communication with the shell cavity, and the shell is used to be sealingly connected with the process chamber to enable the shell cavity to be sealingly communicated with a chamber space of the process chamber;

[0009] The fixed electric connection part is in sealing fit with the first mounting hole, and a first end of the fixed electric connection part extends into the shell cavity and is electrically connected with the rotating electric connection part, and a second end of the fixed electric connection part is located outside the shell and is used for electrically connecting with a power supply;

[0010] The rotating electric connection part is rotatably arranged in the shell and is used for electrically connecting with an electric device in the process chamber.

[0011] In a second aspect, the embodiments of the present application disclose a semiconductor process equipment, which comprises a process chamber, a bearing seat and the conductive slip ring described above, the bearing seat is rotatably arranged in the process chamber, the bearing seat is internally provided with an electric device, the shell is sealingly connected with the process chamber, and the shell cavity is in communication with a chamber space of the process chamber, the rotating electric connection part is connected with the bearing seat and is electrically connected with the electric device in the bearing seat.

[0012] The technical scheme adopted by the present application can achieve the following technical effects:

[0013] The conductive slip ring disclosed by the embodiments of the present application can realize the rotating power supply technology, and can also realize sealing fit between the fixed electric connection part and the first mounting hole, so that the overall space formed after the shell cavity is in communication with the chamber space is sealingly isolated from the external environment where the power supply is located, and the vacuum environment in the chamber space can be finally maintained. The sealing structure of the rotating power supply technology does not need to use a magnetic fluid structure for sealing, so that the influence of the external magnetic field on the sealing effect can be avoided, and the problem of poor sealing effect caused by the external magnetic field interference when the magnetic fluid structure is sealed can be overcome. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a sectional view of the semiconductor process equipment disclosed by the embodiments of the present application in one perspective view;

[0015] Figure 2 is a partial structure schematic view of Figure 1 ;

[0016] Figure 3 is a sectional view of the partial structure of the semiconductor process equipment disclosed by the embodiments of the present application in another perspective view;

[0017] Figure 4 is a sectional view of the conductive slip ring disclosed by the embodiments of the present application in one perspective view;

[0018] Figure 5 is a sectional view of the conductive slip ring disclosed by the embodiments of the present application in another perspective view;

[0019] Figure 6 and Figure 7are sectional views of partial structures of the conductive slip ring disclosed in the embodiments of the present application, respectively;

[0020] Figure 8 is a structural schematic view of a housing of the conductive slip ring disclosed in the embodiments of the present application;

[0021] Figure 9 is a structural schematic view of an insulating rotating shaft of the conductive slip ring disclosed in the embodiments of the present application;

[0022] Figure 10 is a structural schematic view of a conductive ring of the conductive slip ring disclosed in the embodiments of the present application;

[0023] Figure 11 is an assembly schematic view of a partial structure of the insulating rotating shaft, the conductive ring and the insulating isolation piece in the conductive slip ring disclosed in the embodiments of the present application;

[0024] Figure 12 is Figure 11 a schematic view in other perspective;

[0025] Figure 13 is a structural schematic view of a power supply connecting piece of the conductive slip ring disclosed in the embodiments of the present application;

[0026] Figure 14 is a structural schematic view of a fixed insulating sleeve disclosed in the embodiments of the present application;

[0027] Figure 15 is a structural schematic view of an assembly of the brush and the mounting frame in the conductive slip ring disclosed in the embodiments of the present application;

[0028] Figure 16 is a structural schematic view of an assembly of the brush, the mounting frame and the fixed insulating sleeve in the conductive slip ring disclosed in the embodiments of the present application.

[0029] Explanation of reference signs:

[0030] 10 - process chamber, 11 - chamber space,

[0031] 20 - bearing seat, 21 - electric device, 22 - support shaft,

[0032] 01 - conductive slip ring, 30 - housing, 31 - cavity, 32 - first mounting hole, 33 - first plane, 34 - second positioning groove, 35 - connecting flange, 36 - mounting groove, 37 - second threaded connecting piece, 38 - butt joint,

[0033] 40 - fixed electrical connection part, 41 - brush, 42 - power supply connector, 421 - battery cell, 422 - sealing part, 401 - insulation part, 402 - compression part, 412 - externally threaded connecting sleeve, 413 - compression body, 403 - first sealing ring, 43 - mounting bracket, 431 - slot-shaped body, 432 - connecting fin, 433 - electrical connection protrusion, 4331 - electrical connection hole,

[0034] 50 - rotating electrical connection part, 51 - insulating rotating shaft, 511 - electrical connection avoiding slot, 52 - conductive ring, 521 - ring-shaped body, 522 - electrical connection terminal, 53 - insulating isolation piece, 501 - first shaft section, 502 - second shaft section,

[0035] 60 - power supply,

[0036] 70 - fixed insulating sleeve, 71 - second mounting hole, 72 - ring-shaped isolation protrusion, 73 - second flat surface, 74 - first curved surface, 75 - insulating sealing filling part, 76 - first positioning slot, 77 - positioning piece, 78 - first threaded connecting piece,

[0037] 81 - driving motor, 82 - rotating shaft, 83 - driving wheel, 84 - conveyor belt, 85 - driven wheel, 86 - third bearing,

[0038] 91 - first bearing, 92 - second bearing. DETAILED DESCRIPTION

[0039] In order to make the objectives, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be described below in connection with specific embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort belong to the scope of protection of the present application.

[0040] In the related art, a process chamber of a semiconductor process equipment adopts a rotating power supply technology to realize electrical connection between electrical devices inside the process chamber and a power supply outside the process chamber. In order to ensure the vacuum environment inside the process chamber, the rotating power supply technology realizes sealing through a magnetic fluid structure to isolate the external environment outside the process chamber. The inventor of the present application found in the process of realizing the present application that the magnetic fluid structure is extremely susceptible to external magnetic field interference, and the process chamber is provided with structures that are prone to generate external magnetic fields, for example, the radio frequency coil configured by the process chamber will generate a magnetic field when working (this part of the magnetic field can be considered as an external magnetic field affecting the magnetic fluid structure). The interference of the external magnetic field will affect the magnetic fluid of the magnetic fluid structure and in turn affect the sealing effect, ultimately leading to the problem of poor sealing effect between the inside of the process chamber and the external environment outside the process chamber.

[0041] Based on this, the inventor of the present application improves the technical scheme in the case of finding this technical problem, so as to solve the problem of poor sealing effect. The technical scheme disclosed in each embodiment of the present application will be described in detail below with reference to the drawings.

[0042] Please refer to Figures 1 to 16 The disclosed conductive slip ring 01 is applied to a process chamber 10 of a semiconductor process equipment. The disclosed conductive slip ring 01 includes a shell 30, a fixed electrical connection part 40 and a rotating electrical connection part 50.

[0043] The shell 30 is the peripheral housing of the conductive slip ring 01, which can provide a mounting base for other components of the conductive slip ring 01. Of course, the shell 30 can also provide peripheral protection for some components of the conductive slip ring 01. In addition, the shell 30 can serve as a mounting component of the conductive slip ring 01, so as to realize the mounting of the conductive slip ring 01 on the process chamber 10.

[0044] As shown in Figure 8 The shell 30 has a shell cavity 31 and a first mounting hole 32, the first mounting hole 32 is in communication with the shell cavity 31, and the first mounting hole 32 is used to mount the fixed electrical connection part 40. In essence, the shell 30 also has a docking interface 38, which is in communication with the shell cavity 31. The shell 30 is used to be sealingly connected with the process chamber 10, so that the shell cavity 31 is sealingly communicated with the chamber space 11 of the process chamber 10. Specifically, the docking interface 38 of the shell 30 is sealingly docked with the docking interface of the process chamber 10, so that the shell cavity 31 is communicated with the chamber space 11 of the process chamber 10. It should be noted that the process chamber 10 has a process space, which can be part of the chamber space 11 or the whole chamber space 11, and the present application does not limit it.

[0045] The fixed electrical connection part 40 is a fixed electrical connection part in the conductive slip ring 01, which is fixed in the first mounting hole 32, so as to realize the fixed connection with the shell 30. The fixed electrical connection part 40 is sealingly fitted with the first mounting hole 32. The first end of the fixed electrical connection part 40 extends into the shell cavity 31 and is electrically connected with the rotating electrical connection part 50. The second end of the fixed electrical connection part 40 is located outside the shell 30. The second end of the fixed electrical connection part 40 is used to be electrically connected with the power supply 60. It should be noted that the power supply 60 is located outside the process chamber 10 and also outside the shell 30. The first end of the fixed electrical connection part 40 and the second end of the fixed electrical connection part 40 are respectively opposite ends of the fixed electrical connection part 40.

[0046] The rotating electrical connection portion 50 is movably arranged in the housing 30, and can rotate relative to the fixed electrical connection portion 40 and the housing 30. As described above, the first end of the fixed electrical connection portion 40 is electrically connected with the rotating electrical connection portion 50, but since the rotating electrical connection portion 50 can rotate relative to the fixed electrical connection portion 40, the electrical connection between the first end of the fixed electrical connection portion 40 and the rotating electrical connection portion 50 is achieved by contact and can slide relative to each other.

[0047] In the embodiment, the rotating electrical connection portion 50 is used to electrically connect with the electrical device 21 in the process chamber 10. The electrical device 21 is a device that needs to be rotated and needs to be powered in the process chamber 10. For example, the support seat 20 is rotatably arranged in the chamber space 11 of the process chamber 10, and the electrical device 21 is embedded in the support seat 20 and can rotate with the support seat 20. The electrical device 21 can be a heating coil, an electrostatic chucking coil, etc., and the embodiment does not limit the specific type and structure of the electrical device 21.

[0048] After the conductive slip ring 01 disclosed in the embodiment is installed in the process chamber 10, the shell cavity 31 can be in sealed communication with the chamber space 11 of the process chamber 10, as shown in Figure 1 and Figure 2 The fixed electrical connection portion 40 is installed in the first mounting hole 32 and is in sealed cooperation with the first mounting hole 32. In this case, the overall space formed after the shell cavity 31 is in communication with the chamber space 11 is sealed and isolated from the external environment (i.e., the environment outside the process chamber 10 and the housing 30) due to the sealed cooperation between the fixed electrical connection portion 40 and the first mounting hole 32. At the same time, the electrical energy provided by the power supply 60 is transmitted from the second end of the fixed electrical connection portion 40 to the first end of the fixed electrical connection portion 40, and then conducted from the first end of the fixed electrical connection portion 40 to the rotating electrical connection portion 50, and finally transmitted from the rotating electrical connection portion 50 to the electrical device 21 in the process chamber 10, thereby achieving rotary power supply.

[0049] As can be seen from the above power supply process, the conductive slip ring 01 disclosed in the embodiment can achieve rotary power supply technology, and at the same time, the sealed cooperation between the fixed electrical connection portion 40 and the first mounting hole 32 can enable the overall space formed after the shell cavity 31 is in communication with the chamber space 11 to be sealed and isolated from the external environment where the power supply 60 is located, and finally the vacuum environment in the chamber space 11 can be maintained. The sealing structure of the rotary power supply technology does not need to use a magnetic fluid structure for sealing, thereby avoiding the influence of the external magnetic field on the sealing effect, and overcoming the problem of poor sealing effect caused by the external magnetic field interference when the magnetic fluid structure is sealed.

[0050] In the embodiment of the present application, the fixed electrical connection portion 40 is sealingly fitted with the first mounting hole 32, so as to isolate the external environment. There are various ways to realize the sealing between the fixed electrical connection portion 40 and the first mounting hole 32, for example, the fixed electrical connection portion 40 is filled with sealant between the hole wall of the first mounting hole 32.

[0051] Of course, the fixed electrical connection portion 40 has various structures, and the fixed electrical connection portion 40 can include a conventional metal wire, which passes through the first mounting hole 32 and is filled with sealant between the hole wall of the first mounting hole 32. The embodiment of the present application does not limit the specific structure of the fixed electrical connection portion 40.

[0052] In an alternative, the fixed electrical connection portion 40 in the embodiment of the present application can include an electric brush 41, which can be slidingly fitted with the outer circumferential wall of the rotating electrical connection portion 50 in the rotating direction of the rotating electrical connection portion 50, so as to realize the contact electrical connection between the fixed electrical connection portion 40 and the rotating electrical connection portion 50. Of course, the sliding contact electrical connection structure between the fixed electrical connection portion 40 and the rotating electrical connection portion 50 can be brush-shaped or non-brush-shaped, and the embodiment of the present application does not limit this.

[0053] The fixed electrical connection portion 40 disclosed in the embodiment of the present application can include a power supply connecting piece 42, the first end of the power supply connecting piece 42 extends into the shell cavity 31, and is electrically connected with the electric brush 41 and realizes the sliding fitting with the rotating electrical connection portion 50 through the electric brush 41. Of course, after the first end of the power supply connecting piece 42 extends into the shell cavity 31, it can also directly slidingly fit with the rotating electrical connection portion 50 without passing through the electric brush 41, so as to realize the contact electrical connection. In this case, the fixed electrical connection portion 40 can not include the electric brush 41.

[0054] In the embodiment of the present application, the power supply connecting piece 42 can be the conventional metal wire as described above, or can be other structures. Please refer to Figure 13In an alternative, the power connecting piece 42 can include an electric core 421 and a sealing part 422. The electric core 421 passes through the first mounting hole 32, and the end of the electric core 421 inside the housing 30 is the first end of the power connecting piece 42, that is, the end of the electric core 421 inside the housing 30 can directly or indirectly realize the sliding electrical contact with the rotating electrical connecting part 50 through the brush 41. The end of the electric core 421 outside the housing 30 can be the second end of the power connecting piece 42, and the sealing part 422 wraps a part of the electric core 421 and is at least sealed between the hole wall of the first mounting hole 32 and the electric core 421. The sealing part 422 can be a sealing sleeve sleeved on the electric core 421, or a sealing glue applied on the electric core 421, and the specific structure of the sealing part 422 is not limited in the embodiment of the application. The sealing part 422 is in sealing cooperation with the surface of the electric core 421 and the first mounting hole 32 respectively, so as to realize the sealing cooperation between the power connecting piece 42 and the first mounting hole 32. In this case, the sealing part 422 not only can play the sealing function, but also can at least realize the function of filling between the electric core 421 and the hole wall of the first mounting hole 32, so as to realize the fixed connection between the power connecting piece 42 and the first mounting hole 32. At the same time, in this structure, the electric core 421 is specially used for transmitting electric energy, and the length of the electric core 421 can be flexibly adjusted to adaptively match the position of the rotating electrical connecting part 50.

[0055] As described above, the specific structure of the sealing part 422 is not limited in the embodiment of the application. Please continue to refer to Figure 13 The embodiment of the application discloses a specific structure of the sealing part 422. The disclosed sealing part 422 includes an insulating part 401, a pressing part 402 and a first sealing ring 403. The pressing part 402 includes an outer threaded connecting sleeve 412 and a pressing body 413 fixedly connected with each other. The insulating part 401 is sealingly sleeved on the electric core 421, so as to realize the sealing between the insulating part 401 and the electric core 421. The insulating part 401 can be insulating glue.

[0056] The pressing part 402 is sealingly sleeved on the insulating part 401, that is, the outer threaded connecting sleeve 412 and the pressing body 413 are sealingly sleeved on the insulating part 401, so as to realize the sealing between the pressing part 402 and the insulating part 401. The outer threaded connecting sleeve 412 is in threaded fixed connection with the first mounting hole 32, so as to realize the detachable connection. The pressing body 413 presses the first sealing ring 403 around the outer side port of the first mounting hole 32 on the outer wall surface of the housing 30. In this case, the first sealing ring 403 can realize the sealing between the pressing body 413 and the outer wall surface of the housing 30, so as to indirectly realize the sealing of the threaded gap between the outer threaded connecting sleeve 412 and the first mounting hole 32.

[0057] In the structure, the outer threaded connecting sleeve 412 is fixedly connected with the first mounting hole 32 through threads, so that the detachable connection between the power connecting member 42 and the first mounting hole 32 is facilitated, and the power connecting member 42 is conveniently and quickly disassembled and assembled. In the embodiment, the compression of the first sealing ring 403 by the compression body 413 can be derived from the threaded cooperation between the outer threaded connecting sleeve 412 and the first mounting hole 32. That is, after the outer threaded connecting sleeve 412 is threadedly connected with the first mounting hole 32, the outer threaded connecting sleeve 412 can pull the compression body 413 to have a tendency to compress the outer wall surface of the shell 30, and in this case, the compression body 413 can compress the first sealing ring 403 on the outer wall surface of the shell 30, so that the first sealing ring 403 is sealed between the compression body 413 and the outer wall surface of the shell 30.

[0058] In order to better compress the first sealing ring 403, the compression body 413 can have a sheet structure, so that the first sealing ring 403 is more easily and fully compressed.

[0059] In order to improve the stability of the connection, in a further technical solution, the compression body 413 can be detachably connected with the shell 30 through a threaded connecting member (such as a screw or a bolt), so that the problem of poor compression effect of the first sealing ring 403 due to loosening of the outer threaded connecting sleeve 412 is avoided.

[0060] In the embodiment, the outer wall surface of the shell 30 can have a first plane 33, and the first sealing ring 403 can be compressed between the first plane 33 and the compression body 413. In this case, the first plane 33 can provide a relatively flat compression surface, so that the various regions of the first sealing ring 403 can be more evenly compressed, and the sealing effect is ensured.

[0061] In other embodiments or further embodiments, at least one of the outer wall surface of the shell 30 and the surface of the compression body 413 facing the shell 30 can be provided with a mounting groove 36, and the first sealing ring 403 can be positioned and mounted in the mounting groove 36. In this case, the first sealing ring 403 is limited in position by the mounting groove 36, so that the installation stability of the first sealing ring 403 is improved. In addition, the cooperation of the first sealing ring 403 and the mounting groove 36 more easily forms a labyrinth seal structure, so that the sealing effect is further improved.

[0062] Please refer again to Figures 3 to 7In the embodiment, the conductive slip ring 01 can further include a fixed insulating sleeve 70, which is arranged in the shell 30 and sleeved on the rotating electrical connection part 50. At least part of the rotating electrical connection part 50 is rotatably arranged in the fixed insulating sleeve 70 and is insulated and separated from the shell 30 at least by the fixed insulating sleeve 70, so as to avoid the electrical contact between the rotating electrical connection part 50 and the shell 30. The fixed electrical connection part 40 passes through the fixed insulating sleeve 70 and is electrically connected with the rotating electrical connection part 50. Of course, in order to avoid static electricity on the shell 30, or the shell 30 is connected with the grounded peripheral component of the process chamber 10, the shell 30 is also grounded. In this case, the insulation separation function of the fixed insulating sleeve 70 can prevent the rotating electrical connection part 50 from being grounded.

[0063] As described above, the fixed electrical connection part 40 can include the power supply connecting piece 42, and the first end of the power supply connecting piece 42 can achieve the sliding electrical contact with the rotating electrical connection part 50 through the brush 41. The brush 41 can be electrically connected with the power supply 60 through the power supply connecting piece 42 which is sealingly matched with the first mounting hole 32. Of course, not limited to the electrical connection with the power supply 60 through the power supply connecting piece 42, the embodiment does not exclude the possibility that the brush 41 is directly electrically connected with the power supply 60 after being sealingly matched with the first mounting hole 32 and partially extending out of the shell 30.

[0064] In the case that the fixed electrical connection part 40 includes the brush 41, in a further technical solution, referring to Figure 14 The fixed insulating sleeve 70 can be provided with a second mounting hole 71, and the brush 41 is mounted in the second mounting hole 71 and at least partially located in the fixed insulating sleeve 70. In this case, the fixed insulating sleeve 70 can not only play the role of insulation separation, but also provide an insulating mounting basis for the brush 41, so as to realize the mounting of the brush 41 in the shell 30.

[0065] The brush 41 has good elasticity or flexibility, and the strength of the brush 41 is not high, so as to be beneficial to generate a certain elastic force with the rotating electrical connection part 50 and achieve the purpose of stable electrical contact. In order to facilitate the fixed mounting of the brush 41, the fixed electrical connection part 40 can further include a mounting bracket 43, which is mounted in the second mounting hole 71 and connected with the brush 41. The first end of the power supply connecting piece 42 located in the shell cavity 31 is electrically connected with the mounting bracket 43, and the mounting bracket 43 electrically connects the brush 41 with the power supply connecting piece 42. The power supply connecting piece 42 is sealingly matched with the first mounting hole 32, and the second end of the power supply connecting piece 42 located outside the shell 30 is used for electrical connection with the power supply 60. In this case, the mounting bracket 43 can realize the relatively stable mounting of the brush 41 on the fixed insulating sleeve 70.

[0066] In the embodiments of the present application, the structure of the mounting frame 43 can be various as long as the mounting of the brush 41 can be realized and the electrical connection between the brush 41 and the power connecting member 42 can be realized, and the specific structure of the mounting frame 43 is not limited in the embodiments of the present application. Please refer to Figure 15 and Figure 16 In an alternative, the mounting frame 43 can include a groove-shaped main body 431, two connecting fins 432 and an electrical connecting protrusion 433. The two connecting fins 432 are respectively connected to the top ends of the two side walls of the groove-shaped main body 431 and respectively extend from the groove of the groove-shaped main body 431 to the opposite sides. The electrical connecting protrusion 433 is at least partially located in the groove-shaped main body 431 and is electrically connected to the first end of the power connecting member 42. The two connecting fins 432 are both fixedly connected to the fixed insulating sleeve 70. Each mounting frame 43 can be connected to two brushes 41, one end of the two brushes 41 being fixed in the third mounting hole penetrating the bottom of the groove-shaped main body 431. The other end of the two brushes 41 extends away from the groove of the groove-shaped main body 431. Of course, each mounting frame 43 can also be connected to one brush 41, and the number of brushes 41 connected to each mounting frame 43 is not limited in the embodiments of the present application.

[0067] In this structure, the two connecting fins 432 can extend to the opposite sides of the groove of the groove-shaped main body 431 to realize a relatively stable connection with the fixed insulating sleeve 70. Moreover, the mounting frame 43 takes the groove-shaped main body 431 as the main structure, and the groove-shaped main body 431 and the two connecting fins 432 can form a structure similar to an arc shape, so that the mounting frame 43 has a good elastic function, which is conducive to the elastic contact between the brush 41 and the rotating electrical connecting part 50 and can better avoid rigid contact, thereby avoiding the adverse effects of the rotating electrical connecting part 50 on the brush 41 during rotation. At the same time, the electrical connecting protrusion 433 is a component located in the groove-shaped main body 431 and is specially used for connecting the power connecting member 42, which can facilitate the electrical connection between the power connecting member 42.

[0068] Please refer to Figure 15 In an alternative, the electrical connecting protrusion 433 can be provided with an electrical connecting hole 4331, and the end of the battery core 421 located in the shell 30 can be directly connected to the electrical connecting hole 4331. Specifically, the end of the battery core 421 located in the shell 30 can be a threaded end, and the electrical connecting hole 4331 can be a threaded hole, and the threaded end can be fixed and electrically connected by directly screwing into the threaded hole. Of course, the electrical connecting protrusion 433 and the end of the battery core 421 located in the shell 30 can also be electrically connected by welding, conductive glue bonding and the like, and the embodiments of the present application are not limited.

[0069] In the embodiment of the present application, the outer wall surface of the fixed insulation sleeve 70 can comprise a second plane 73, and the two connecting fins 432 are fixedly connected with the second plane 73. In this case, the two connecting fins 432 can be attached to the second plane 73, thereby facilitating the stability of the connection between the two connecting fins 432 and the fixed insulation sleeve 70. Alternatively, the connecting fins 432 and the second plane 73 can be fixedly connected through the first threaded connecting member 78.

[0070] The shape of the fixed insulation sleeve 70 can be various, for example, the fixed insulation sleeve 70 is a square sleeve, a circular sleeve, etc., which is not limited in the embodiment of the present application. Please refer again to Figure 16 In an alternative, the outer wall surface of the fixed insulation sleeve 70 can further comprise a first curved surface 74, each part of the first curved surface 74 is located in a first cylindrical surface, the first curved surface 74 is connected with the second plane 73 at the head and tail, the inner wall surface of the shell 30 is a second cylindrical surface concentrically distributed with the first cylindrical surface, and the gap between the second plane 73 and the second cylindrical surface can be provided with an insulation sealing filling part 75, as shown in Figure 5 In this case, the fixed insulation sleeve 70 can be as similar as possible to the shape of the shell 30, avoiding occupying too much space, and at the same time, it can also try to reduce the generation of larger gaps. At the same time, the design of the gap is conducive to accommodating part of the structure of the mounting frame 43, and at the same time, the insulation sealing filling part 75 can fill the larger gap between the second plane 73 and the second cylindrical surface, which is conducive to ensuring the stability of the components installed in the shell 30.

[0071] In the embodiment of the present application, the fixed insulation sleeve 70 is fixed in the shell 30. Specifically, there are various ways to achieve the fixation of the fixed insulation sleeve 70 in the shell 30, which is not limited in the embodiment of the present application. In an alternative, the end of the fixed insulation sleeve 70 adjacent to the process chamber 10 can be provided with a plurality of first positioning grooves 76, as shown in Figure 14 The grooves of the plurality of first positioning grooves 76 face the inner wall of the shell 30 and penetrate to the end face of the fixed insulation sleeve 70. The inner wall of the shell 30 can be provided with a plurality of second positioning grooves 34 (as shown in Figure 8 The grooves of the plurality of second positioning grooves 34 are in one-to-one correspondence with the grooves of the plurality of first positioning grooves 76 to form a positioning space. The fixed insulation sleeve 70 can be connected with the shell 30 through a positioning member 77 installed in the positioning space. Specifically, the positioning member 77 can be a connecting key. This connection method is simple in structure, and the disassembly and assembly of the fixed insulation sleeve 70 and the shell 30 can be realized by dismounting and mounting the positioning member 77, as shown in Figure 7

[0072] ​The structure of the rotating electrical connection part 50 can be various, and the embodiments of the present application are not limited, please refer to Figure 9 、 Figure 10 、 Figure 11 and Figure 12 In an alternative, the rotating electrical connection part 50 can include an insulating rotating shaft 51 and a conductive ring 52 sleeved on the insulating rotating shaft 51, the insulating rotating shaft 51 and the conductive ring 52 are both arranged in the fixed insulating sleeve 70, and the conductive ring 52 can rotate with the insulating rotating shaft 51. The conductive ring 52 is electrically connected with the first end portion of the fixed electrical connection part 40 located in the shell cavity 31. The insulating rotating shaft 51 is rotatably installed in the shell 30. The conductive ring 52 is used for electrical connection with the electrical device 21. In this structure, the conductive ring 52 is electrically connected with the fixed electrical connection part 40, thereby forming a corresponding electrical connection relationship, which is conducive to realizing a plurality of groups of corresponding electrical connection of the conductive ring 52 and the fixed electrical connection part 40, so that more electrical connection paths can be planned in a smaller space. In addition, the rotating electrical connection part 50 of this structure is rotatably installed based on the insulating rotating shaft 51, and the electrical connection is realized through the conductive ring 52 installed on the insulating rotating shaft 51, so that the insulating rotating shaft 51 can be isolated between the conductive ring 52 and other components that do not need to be electrically connected with the conductive ring 52, thereby avoiding short circuit.

[0073] Please refer to Figure 10 In a further technical solution, the conductive ring 52 can include a ring body 521 and an electrical connection terminal 522 arranged in the ring body 521, and the first end portion of the electrical connection terminal 522 is electrically connected with the inner ring surface of the ring body 521. Please refer to Figure 9 The insulating rotating shaft 51 is provided with an electrical connection avoiding groove 511 extending along the axial direction thereof, the second end portion of the electrical connection terminal 522 extends into the electrical connection avoiding groove 511 (as shown in Figure 12 ), and is used for electrical connection with the electrical device 21. The outer ring surface of the ring body 521 is in electrical contact with the fixed electrical connection part 40. In the process of rotation of the rotating electrical connection part 50, the outer ring surface of the ring body 521 is in sliding contact with the fixed electrical connection part 40, thereby realizing rotary power supply. This structure can make the electrical connection terminal 522 play the electrical connection function with the electrical device 21, while being arranged in the insulating rotating shaft 51. The insulating rotating shaft 51 sacrifices part of its structure to form the electrical connection avoiding groove 511, thereby accommodating the electrical connection terminal 522, thereby being conducive to the miniaturization design of the rotating electrical connection part 50.

[0074] Of course, the conductive ring 52 can also realize electrical connection with the electrical device 21 through a conductive layer (such as a conductive plating layer, a conductive coating layer, etc.) arranged on the outer wall of the insulating rotating shaft 51 and extending along the axial direction of the insulating rotating shaft 51.

[0075] As described above, the power connection terminal 522 extends into the power connection avoiding groove 511. Specifically, the power connection terminal 522 can extend into the power connection avoiding groove 511 without contacting or rigidly engaging the inner wall of the power connection avoiding groove 511, or the power connection terminal 522 can extend into the power connection avoiding groove 511 while contacting the inner wall of the power connection avoiding groove 511, thereby forming a more stable engagement. Based on this, in an alternative embodiment, the first end of the power connection terminal 522 is fixedly connected to the ring body 521. The ring body 521 is engaged with the power connection avoiding groove 511 via the second end of the power connection terminal 522, thereby being limited in the rotation direction of the insulating rotating shaft 51 at the rotating electrical connection portion 50. In this case, the power connection terminal 522 not only serves as an electrical connection, but also, via the engagement with the power connection avoiding groove 511, limits the ring body 521 in the rotation direction of the insulating rotating shaft 51 (i.e., the rotation direction of the rotating electrical connection portion 50) with the insulating rotating shaft 51, thereby preventing the ring body 521 from rotating relative to the insulating rotating shaft 51, which undoubtedly improves the stability of the connection between the ring body 521 and the insulating rotating shaft 51.

[0076] In general, the electrical device 21 in the process chamber 10 can be one or multiple (i.e., at least two). In the case of multiple electrical devices 21, the conductive ring 52 is multiple and is spaced along the axial direction of the insulating rotating shaft 51, the insulating rotating shaft 51 is provided with multiple power connection avoiding grooves 511 spaced along the axial direction, and the second end of the power connection terminal 522 of each conductive ring 52 extends into the corresponding power connection avoiding groove 511. In this case, each conductive ring 52 can supply power to a corresponding electrical device 21. Meanwhile, in this case, the fixed electrical connection portion 40 can also be multiple, and the multiple fixed electrical connection portions 40 are one-to-one electrically connected with the conductive rings 52, thereby achieving the purpose of corresponding power supply to the multiple electrical devices 21. This independent power supply mode is easier to adjust according to the power demand of the multiple electrical devices 21, thereby easily meeting the diversified power demand of the multiple electrical devices 21.

[0077] In a specific embodiment, the conductive ring 52 can be multiple and spaced along the axial direction of the insulating rotating shaft 51, and the fixed electrical connection portion 40 can also be multiple and spaced along the axial direction of the insulating rotating shaft 51, and each conductive ring 52 is electrically connected with a corresponding fixed electrical connection portion 40 and a corresponding electrical device 21.

[0078] In the case where the fixed electrical connection portion 40 includes the brush 41 and the power supply connecting member 42, the brush 41 can be multiple and spaced along the axial direction of the insulating rotating shaft 51, and the power supply connecting member 42 can also be multiple and spaced along the axial direction of the insulating rotating shaft 51, and each group of brushes 41 is electrically connected with a corresponding conductive ring 52 and a corresponding power supply connecting member 42.

[0079] Each fixed electrical connection part 40 can include a set of brushes 41. In the embodiments of the present application, the set of brushes 41 cooperating with each conducting ring 52 can be one brush 41 or a plurality of brushes 41. The embodiments of the present application do not limit the number of brushes 41 included in the set of brushes 41. In an alternative solution, each set of brushes 41 can include two brushes 41. The distance between the ends of the two brushes 41 in the same set, which are away from the conducting ring 52, is less than the distance between the other ends, which are close to the conducting ring 52. The two brushes 41 in the same set are tangent to and in contact with different parts of the conducting ring 52, respectively. In this case, each power supply connector 42 realizes the sliding electrical contact with the conducting ring 52 through the two brushes 41, which can improve the stability of the electrical contact.

[0080] In order to better match the positions of the plurality of conducting rings 52, the first ends of the plurality of electrical connection avoiding grooves 511 are located on the end face of the insulating rotating shaft 51 adjacent to the electrical device 21. The second ends of the plurality of electrical connection avoiding grooves 511 extend to the positions corresponding to the corresponding electrical terminals 522, that is, the second ends of the plurality of electrical connection avoiding grooves 511 extend to the positions of the corresponding conducting rings 52. The plurality of electrical connection avoiding grooves 511 are not all through grooves. In this case, the second ends of the plurality of electrical connection avoiding grooves 511 extend to the positions of the corresponding conducting rings 52, so that the corresponding electrical terminals 522 of the conducting rings 52 can extend into the positions to realize assembly. At the same time, the plurality of electrical connection avoiding grooves 511 do not need to all extend through to both ends of the insulating rotating shaft 51, so as not to greatly affect the strength of the insulating rotating shaft 51.

[0081] As described above, the electrical requirements of the plurality of electrical devices 21 are different, and thus the sizes of the conducting rings 52 are different. Based on this, in an alternative solution, the lengths of the annular bodies 521 of the plurality of conducting rings 52 in the axial direction of the insulating rotating shaft 51 are not all equal. For example, among the plurality of conducting rings 52, the conducting ring 52 with the largest length can be used to input radio frequency current, the conducting ring 52 with the second largest length can be used to input alternating current to supply the electrical device 21 as a heating device. The conducting ring 52 with the shortest length can be used to input direct current to supply a thermocouple or an electrostatic adsorption electrode.

[0082] When the number of the conductive rings 52 is plural, the plural conductive rings 52 can be arranged at intervals along the axial direction of the insulating rotating shaft 51. The conductive rings 52 can be fixed on the insulating rotating shaft 51 by the tight fit between the annular body 521 and the insulating rotating shaft 51. Of course, the conductive rings 52 can be fixedly connected with the insulating rotating shaft 51 by the fit between the electrically connecting terminals 522 and the electrically connecting avoiding grooves 511, in which case, the fit between the electrically connecting terminals 522 and the electrically connecting avoiding grooves 511 is tight. The plural conductive rings 52 are fixed on the insulating rotating shaft 51 and are arranged at intervals to avoid contacting each other, so as to avoid short circuit between the adjacent conductive rings 52.

[0083] Of course, in other embodiments, the rotating electric connecting part 50 can further comprise the insulating isolation pieces 53, and the insulating isolation pieces 53 are arranged between the adjacent two conductive rings 52. In this case, the isolation of the insulating isolation pieces 53 can avoid the movement and contact between the adjacent two conductive rings 52, and can better avoid the short circuit problem.

[0084] In the embodiments of the present application, the insulating rotating shaft 51 is rotatably arranged in the shell 30. The insulating rotating shaft 51 can be rotatably arranged by the simple shaft hole fit. Of course, in order to alleviate the abrasion and improve the stability of rotation, the insulating rotating shaft 51 can be rotatably arranged in the fixed insulating sleeve 70 through the first bearing 91, and the annular isolation protrusion 72 can be arranged in the fixed insulating sleeve 70, and the annular isolation protrusion 72 can be fixed relative to the fixed insulating sleeve 70. The first bearing 91 is located at the first side of the annular isolation protrusion 72. The conductive ring 52 can be located at the second side of the annular isolation protrusion 72, and the first side and the second side are opposite. In this case, the annular isolation protrusion 72 can isolate the first bearing 91 and the conductive ring 52, so as to alleviate the problem that the particles generated by the first bearing 91 after long-term work enter the space where the conductive ring 52 is located, thereby avoiding the adverse effect on the sliding electric contact of the conductive ring 52.

[0085] In an optional solution, the first end of the insulating rotating shaft 51 is rotatably arranged in the shell 30 through the first bearing 91, and the second end of the insulating rotating shaft 51 can be rotatably arranged in the shell 30 through the second bearing 92. Specifically, the annular isolation protrusion 72 can be arranged only between the first bearing 91 and the conductive ring 52, as shown in FIG. 6. Figure 7

[0086] In the embodiments of the present application, the insulating rotating shaft 51 can be a whole structure or a split structure. As shown in FIG. 7, the insulating rotating shaft 51 can be a whole structure. Figure 9 ​As shown, in an alternative solution, the insulating rotating shaft 51 is of a split structure, and the insulating rotating shaft 51 can include a first shaft segment 501 and a second shaft segment 502, which are detachably connected. The power connection avoiding groove 511 described above can be formed on the first shaft segment 501, and the second shaft segment 502 can be provided with an avoiding hole opposite to the corresponding power connection avoiding groove 511, so as not to affect the electrical connection between the electrical device 21 and the corresponding power connection terminal 522.

[0087] Based on the conductive slip ring 01 disclosed in the embodiments of the present application, the embodiments of the present application disclose a semiconductor process equipment. The disclosed semiconductor process equipment includes a process chamber 10, a carrier seat 20, and the conductive slip ring 01 described above.

[0088] The carrier seat 20 is used to carry a wafer and drive the wafer to rotate during a process to improve the uniformity of film formation on the wafer. The carrier seat 20 has an electrical device 21. The electrical device 21 can be an electrostatic chucking electrode, a heating coil, etc. built in the carrier seat 20.

[0089] The carrier seat 20 is arranged in the process chamber 10. The carrier seat 20 is rotatably arranged in the process chamber 10, and the carrier seat 20 is provided with the electrical device 21. The housing 30 is sealingly connected with the process chamber 10, the shell cavity 31 is in communication with the chamber space 11 of the process chamber 10, the rotating electrical connection part 50 is connected with the carrier seat 20 and electrically connected with the electrical device 21 in the carrier seat 20. The rotating electrical connection part 50 and the carrier seat 20 can synchronously rotate, thereby realizing rotary power supply.

[0090] In the embodiments of the present application, the housing 30 of the conductive slip ring 01 has a connecting flange 35, which is arranged around the butt joint 38 of the housing 30. The connecting flange 35 and the process chamber 10 can be detachably connected through the second threaded connecting part 37.

[0091] The semiconductor process equipment disclosed in the embodiments of the present application can further include a driving mechanism, which can include a driving motor 81, a rotating shaft 82, a driving wheel 83, a transmission belt 84, and a driven wheel 85. The driving motor 81 is fixed outside the process chamber 10. One end of the rotating shaft 82 is connected with the driving motor 81, and the other end of the rotating shaft 82 extends into the process chamber 10. The driving wheel 83 is fixed on the part of the rotating shaft 82 located in the process chamber 10. The transmission belt 84 connects the driving wheel 83 and the driven wheel 85. The driven wheel 85 is connected with the support shaft 22 supporting the carrier seat 20, so that the support shaft 22 can be driven to rotate in the process of rotating the driven wheel 85, and finally the entire carrier seat 20 is rotated. Of course, the electrical device 21 in the carrier seat 20 will also synchronously rotate. Specifically, the support shaft 22 can be rotatably mounted to the butt joint of the process chamber 10 through a third bearing 86.

[0092] It should be noted that the structure of the driving mechanism can be various, and is not limited to the structure described above, and the embodiments of the present application are not limited.

[0093] The focus of the above embodiments of the present application is the difference between each embodiment, and the different optimization features of each embodiment can be combined to form a better embodiment as long as they are not contradictory. In view of the brevity of the writing, it will not be repeated here.

[0094] The embodiments of the present application are described above in combination with the drawings, but the present application is not limited to the above specific embodiments, and the above specific embodiments are only illustrative and not restrictive. Those skilled in the art can make many forms under the inspiration of the present application without departing from the scope of the present application and the scope protected by the claims.

Claims

1. A conductive slip ring, characterized in that, The conductive slip ring (01) is used in the process chamber (10) of semiconductor process equipment and includes a housing (30), a fixed electrical connection (40) and a rotating electrical connection (50). The outer casing (30) has a cavity (31) and a first mounting hole (32) communicating with the cavity (31). The outer casing (30) is used to seal the connection with the process chamber (10) so that the cavity (31) is sealed and communicates with the chamber space (11) of the process chamber (10). The fixed electrical connection part (40) is sealed to the first mounting hole (32). The overall space formed by the shell cavity (31) and the chamber space (11) is sealed and isolated from the external environment. The first end of the fixed electrical connection part (40) extends into the shell cavity (31) and is electrically connected to the rotating electrical connection part (50). The second end of the fixed electrical connection part (40) is located outside the outer shell (30) and is used to be electrically connected to the power supply (60). The rotating electrical connection part (50) is rotatably disposed within the outer casing (30). The rotating electrical connection part (50) includes an insulating shaft (51) and a conductive ring (52) sleeved on the insulating shaft (51) and rotating with the insulating shaft (51). The conductive ring (52) includes an annular body (521) and an electrical terminal (522) disposed within the annular body (521). The first end of the electrical terminal (522) is electrically connected to the inner annular surface of the annular body (521). The conductive rings (52) are multiple and are spaced apart along the axial direction of the insulating shaft (51). The insulating shaft (51) has multiple spaced electrical clearance grooves (511) that extend along its axial direction. The outer ring surface of the ring body (521) is in electrical contact with the first end of the fixed electrical connection part (40). The second end of the electrical terminal (522) is inserted into the corresponding electrical clearance groove (511) and is used to electrically connect with the electrical device (21) inside the process chamber (10).

2. The conductive slip ring according to claim 1, characterized in that, The fixed electrical connection (40) includes a battery cell (421) and a sealing part (422). The battery cell (421) passes through a first mounting hole (32). The end of the battery cell (421) located inside the housing (30) makes slidable electrical contact with the rotating electrical connection (50). The end of the battery cell (421) located outside the housing (30) is used for electrical connection with the power source (60). The sealing part (422) wraps around a portion of the battery cell (421) and is at least sealed between the hole wall of the first mounting hole (32) and the battery cell (421).

3. The conductive slip ring according to claim 2, characterized in that, The sealing part (422) includes an insulating part (401), a pressing part (402) and a first sealing ring (403). The pressing part (402) includes an external threaded connecting sleeve (412) and a pressing body (413) that are fixedly connected to each other. The insulating part (401) is sealed on the battery cell (421). The external threaded connecting sleeve (412) and the pressing body (413) are both sealed on the insulating part (401). The external threaded connecting sleeve (412) is threadedly fixedly connected to the first mounting hole (32). The pressing body (413) presses the first sealing ring (403) surrounding the outer port of the first mounting hole (32) onto the outer wall surface of the outer shell (30).

4. The conductive slip ring according to claim 3, characterized in that, The outer wall surface of the housing (30) has a first plane (33), and the first sealing ring (403) is pressed between the first plane (33) and the pressing body (413); or, At least one of the outer wall surface of the housing (30) and the surface of the pressing body (413) facing the housing (30) is provided with a mounting groove (36), and the first sealing ring (403) is positioned and installed in the mounting groove (36).

5. The conductive slip ring according to claim 1, characterized in that, The conductive slip ring (01) further includes a fixed insulating sleeve (70), which is disposed inside the outer shell (30) and sleeved outside the rotating electrical connection part (50). The rotating electrical connection part (50) is at least partially rotatably disposed inside the fixed insulating sleeve (70) and is insulated from the outer shell (30) at least through the fixed insulating sleeve (70). The fixed electrical connection part (40) passes through the fixed insulating sleeve (70) and is electrically connected to the rotating electrical connection part (50).

6. The conductive slip ring according to claim 5, characterized in that, The fixed electrical connection part (40) includes a brush (41), the brush (41) and the outer peripheral wall of the rotating electrical connection part (50) slide in the rotation direction of the rotating electrical connection part (50), the fixed insulating sleeve (70) is provided with a second mounting hole (71), the brush (41) is mounted in the second mounting hole (71) and is at least partially located inside the fixed insulating sleeve (70).

7. The conductive slip ring according to claim 6, characterized in that, The fixed electrical connection part (40) further includes a mounting bracket (43) and a power connector (42). The mounting bracket (43) is installed in the second mounting hole (71). The brush (41) is connected to the mounting bracket (43). The first end of the power connector (42) located inside the cavity (31) is electrically connected to the mounting bracket (43). The mounting bracket (43) electrically connects the brush (41) and the power connector (42). The power connector (42) is sealed to the first mounting hole (32). The second end of the power connector (42) located outside the outer shell (30) is used to be electrically connected to the power source (60).

8. The conductive slip ring according to claim 7, characterized in that, The mounting bracket (43) includes a groove-shaped body (431), two connecting fins (432), and an electrical connection protrusion (433). The two connecting fins (432) are respectively connected to the top of the two side walls of the groove-shaped body (431) and extend from the groove opening of the groove-shaped body (431) to opposite sides. The electrical connection protrusion (433) is at least partially located inside the groove-shaped body (431) and is electrically connected to the first end of the power connector (42). Both connecting fins (432) are fixedly connected to the fixed insulating sleeve (70). Each mounting bracket (43) connects two brushes (41). One end of the two brushes (41) is fixed in a third mounting hole penetrating the bottom of the groove-shaped body (431), and the other end of the two brushes (41) extends in a direction away from the groove opening of the groove-shaped body (431).

9. The conductive slip ring according to claim 8, characterized in that, The outer wall surface of the fixed insulating sleeve (70) includes a second plane (73), and the two connecting fins (432) are fixedly connected to the second plane (73).

10. The conductive slip ring according to claim 5, characterized in that, The fixed insulating sleeve (70) is provided with a plurality of first positioning grooves (76) at the end adjacent to the process chamber (10). The openings of the plurality of first positioning grooves (76) face the inner wall of the outer shell (30) and extend to the end face of the fixed insulating sleeve (70). The inner wall of the outer shell (30) is provided with a plurality of second positioning grooves (34). The openings of the plurality of second positioning grooves (34) are connected one by one with the openings of the plurality of first positioning grooves (76) to form a positioning space. The fixed insulating sleeve (70) is connected to the outer shell (30) through a positioning member (77) installed in the positioning space.

11. The conductive slip ring according to claim 1, characterized in that, The first end of the power terminal (522) is fixedly connected to the annular body (521). The annular body (521) is engaged with the power-connecting clearance groove (511) through the second end of the power terminal (522), and is engaged with the insulating shaft (51) in the rotation direction of the rotating electrical connection part (50).

12. The conductive slip ring according to claim 1, characterized in that, The lengths of the annular bodies (521) of the plurality of conductive rings (52) in the axial direction of the insulating shaft (51) are not all equal.

13. The conductive slip ring according to claim 1, characterized in that, The second end of the electrical terminal (522) of each conductive ring (52) extends into the corresponding electrical clearance groove (511). There are multiple fixed electrical connection parts (40) and they are spaced apart along the axial direction. Each conductive ring (52) is electrically connected to the corresponding fixed electrical connection part (40) and the corresponding electrical device (21).

14. The conductive slip ring according to claim 10, characterized in that, The end of the insulating shaft (51) is rotatably disposed within the fixed insulating sleeve (70) via the first bearing (91). The fixed insulating sleeve (70) is provided with an annular isolation protrusion (72). The annular isolation protrusion (72) can be fixed relative to the fixed insulating sleeve (70). The first bearing (91) is located on the first side of the annular isolation protrusion (72), and the conductive ring (52) is located on the second side of the annular isolation protrusion (72). The first side and the second side are opposite to each other.

15. A semiconductor process apparatus, characterized in that, The device includes a process chamber (10), a support (20), and a conductive slip ring (01) according to any one of claims 1 to 14. The support (20) is rotatably disposed within the process chamber (10). An electrical component (21) is disposed within the support (20). The outer shell (30) is sealed to the process chamber (10), and the shell cavity (31) communicates with the chamber space (11) of the process chamber (10). The rotating electrical connection part (50) is connected to the support (20) and electrically connected to the electrical component (21) within the support (20).

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