Static performance test device and system for metal-based sensors

Abstract

The present invention relates to a static performance test device and system for metal-based sensors, comprising a first sleeve, a second sleeve, a pressure head and a first transmission medium; the first sleeve comprises a first end face, a receiving hole is arranged on the first end face, a first cylindrical hole penetrating the first sleeve is arranged at the bottom of the hole of the receiving hole; the second sleeve comprises a second end face, the second end face abuts against the first end face; a second cylindrical hole penetrating the second sleeve is arranged on the second end face, the second cylindrical hole is coaxially arranged with the first cylindrical hole; the pressure head is movably arranged in the second cylindrical hole; the first transmission medium is arranged in the second cylindrical hole. The static performance test device and system for metal-based sensors described in the present invention transmits the pressure of the pressure head through the first transmission medium and forms a seal, has low requirements for sealing, has higher safety, is simpler to operate, and has lower testing costs.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-electromechanical systems, and in particular to a metal-based sensor static performance test device and a metal-based sensor static performance test system. Background Art

[0002] As an ideal new clean energy source, the low-cost production, transportation and safe storage of hydrogen are the key topics of hydrogen energy application. Among them, the safe storage and transportation of hydrogen is one of the key difficulties in the application of hydrogen energy, and it is also the key to restricting its practical application and popularization. High-pressure gaseous hydrogen storage has the advantages of simple tank structure, low energy consumption, safety and stability, and is the main way of hydrogen energy storage and transportation at this stage. In order to increase the storage and transportation capacity of hydrogen, the maximum pressure of hydrogen storage tanks used or tried by research institutions has reached about 75MPa. Once a problem occurs at such a high pressure, the consequences are unimaginable. In addition, when hydrogen storage tanks are actually used, they are greatly affected by environmental factors such as high temperature weather, and are prone to high-risk problems such as excessive pressure. Therefore, real-time monitoring of the pressure of hydrogen storage tanks is urgent.

[0003] At present, the real-time monitoring of hydrogen storage tank pressure is mainly achieved through pressure sensors, and the common static performance test equipment of metal substrate film pressure sensors includes gas or liquid piston pressure gauges, deadweight piston pressure gauges, etc. Among them, the measurement range of gas or liquid pressure gauges is generally 0 to 10 5 Pa, commonly used for pressure measurement in micro-pressure and low-pressure areas; and both have high requirements for the sealing of the pressure sensor test package. As the measured pressure increases, the sealing requirements for the test device become higher. The hydrogen atom has the smallest atomic radius among the known elements in nature and is very prone to leakage. Therefore, fluid pressure testing devices based on the piston principle are no longer applicable. Sensors made of silicon-based materials are limited by the strength of the material, and the pressure chip itself is very fragile and cannot meet the requirements of large-scale fluid pressure measurement.

[0004] In contrast, metal-based sensors, namely metal-based MEMS (abbreviation of Micro-Electro-Mechanical System) thin film fluid resistive pressure sensors, have a relatively simple structure and high reliability, and are more suitable for large-load pressure measurement. At the same time, they are small in size and easy to arrange, and will not cause flow velocity or flow disturbances to the working environment of the device. They have good pressure fixed-point measurement accuracy and response speed, and have great development prospects.

[0005] However, due to the high pressure involved, if high-pressure liquid or gas is directly used in the static performance test of metal substrate MEMS thin film pressure sensors, there are great risks of rupture and fragmentation, and special explosion-proof devices are usually required, which significantly increases the cost of the experiment. Summary of the invention

[0006] To this end, the technical problem to be solved by the present invention is to overcome the safety and cost problems of the metal substrate MEMS thin film pressure sensor performance testing device, and to provide a metal-based sensor static performance testing device and system, which transmits the pressure of the pressure head through a first transmission medium and forms a seal, has low sealing requirements, has higher safety, is simpler to operate, and has lower testing costs.

[0007] The present invention provides a metal-based sensor static performance test device, which is used for static performance test of metal-based MEMS membrane fluid resistance pressure sensor. The metal-based sensor static performance test device comprises a first sleeve, the first sleeve comprises a first end face, a receiving hole is arranged on the first end face, the receiving hole is used to accommodate the metal-based MEMS membrane fluid resistance pressure sensor, the aperture of the receiving hole is consistent with the outer diameter of the contour of the metal-based MEMS membrane fluid resistance pressure sensor, a first barrel hole penetrating the first sleeve is arranged at the bottom of the hole of the receiving hole, the aperture of the first barrel hole is consistent with the outer diameter of the package of the metal-based MEMS membrane fluid resistance pressure sensor; a second sleeve, the second sleeve comprises a second end face, the second The end face abuts against the first end face to form a limit of the metal substrate MEMS membrane fluid resistance type pressure sensor; a second barrel hole penetrating the second sleeve is opened on the second end face, the aperture of the second barrel hole is consistent with the package outer diameter of the metal substrate MEMS membrane fluid resistance type pressure sensor, and the second barrel hole is coaxially arranged with the first barrel hole; a pressure head, the pressure head is movably arranged in the second barrel hole, and the pressure head is used to apply pressure to the metal substrate MEMS membrane fluid resistance type pressure sensor; a first transmission medium, the first transmission medium is arranged in the second barrel hole, and the first transmission medium is used to transmit the pressure of the pressure head to the metal substrate MEMS membrane fluid resistance type pressure sensor and form a seal for the second barrel hole.

[0008] In one embodiment of the present invention, the thickness of the first transmission medium is 2-100 mm.

[0009] In one embodiment of the present invention, a second transfer medium is further included. The second transfer medium is arranged between the first transfer medium and the pressure head. The second transfer medium is used to uniformly transfer the pressure of the pressure head to the first transfer medium and form a seal for the first transfer medium.

[0010] In one embodiment of the present invention, the thickness of the second transmission medium is 3-50 mm.

[0011] In one embodiment of the present invention, the second end surface is provided with a positive limiting tooth groove in the circumferential direction around the second cylindrical hole, and the accommodating hole is provided with a negative limiting tooth groove adapted to the positive limiting tooth groove in the circumferential direction around the first cylindrical hole.

[0012] In one embodiment of the present invention, both the first end face and the second end face are provided with pitted surfaces, and the pitted surfaces are formed by electric spark discharge machining.

[0013] In one embodiment of the present invention, it also includes a sleeve limiting assembly, which is used for limiting the first sleeve and the second sleeve; the sleeve limiting assembly includes a first limiting seat, a cover plate, a second limiting seat and a bottom plate; the first limiting seat is provided with a through countersunk hole, the second sleeve is arranged in the countersunk hole, and the end of the second sleeve away from the first end face is provided with a flange portion adapted to the countersunk hole, the cover plate is removably arranged on the first limiting seat, the cover plate is used for axially limiting the flange portion, and a stamping hole connected to the second barrel hole is provided on the cover plate; the second limiting seat is removably abutted with the first limiting seat, the second limiting seat is provided with a through mounting hole, and the first sleeve is arranged in the mounting hole; the bottom plate is removably arranged on the second limiting seat, the bottom plate is used for axially limiting the first sleeve, and a lead hole connected to the first barrel hole is provided on the bottom plate.

[0014] In one embodiment of the present invention, one end of the first sleeve close to the first end surface protrudes along its own axial direction to form a boss, and the boss at least partially extends into the countersunk hole.

[0015] In one embodiment of the present invention, one end of the first sleeve away from the first end surface protrudes in its own radial direction to form an anti-rotation block, and the mounting hole is provided with an anti-rotation groove adapted to the anti-rotation block.

[0016] The present invention also provides a metal-based sensor static performance testing system, comprising a universal testing machine, a signal processing component, a multimeter, a power supply component, and any one of the metal-based sensor static performance testing devices described above, wherein the second sleeve and the first sleeve are arranged on the stage of the universal testing machine, the pressure head is connected to the loading end of the universal testing machine, and the signal processing component is electrically connected to the multimeter, the power supply component and the metal substrate MEMS membrane fluid resistance pressure sensor respectively.

[0017] The above technical solution of the present invention has the following advantages compared with the prior art:

[0018] The metal-based sensor static performance test device and system described in the present invention uses the first transmission medium as the fluid medium for applying force to replace high-pressure liquid or gas, which has higher safety and fundamentally avoids the safety hazards caused by high-pressure liquid or gas. The need for professional explosion-proof equipment is eliminated, making the test operation simpler and the test cost lower. Under the force of the pressure head, the plasticine can transfer pressure to the metal-based MEMS membrane fluid resistance pressure sensor; at the same time, because the first transmission medium has certain flow characteristics, and its flow characteristics are relatively weak, it can deform itself under the force of the pressure head and form a high-pressure seal with the wall of the second barrel hole, thereby ensuring the accuracy of the entire test result. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to make the content of the present invention more clearly understood, the present invention is further described in detail below according to specific embodiments of the present invention in conjunction with the accompanying drawings, wherein

[0020] Figure 1 It is a schematic cross-sectional view of the explosion structure of the first metal-based sensor static performance testing device in the preferred embodiment of the present invention;

[0021] Figure 2 It is a schematic cross-sectional view of the first metal-based sensor static performance testing device in a preferred embodiment of the present invention;

[0022] Figure 3 It is a schematic cross-sectional view of the explosion structure of the second metal-based sensor static performance test device in the preferred embodiment of the present invention;

[0023] Figure 4 It is a partial enlarged schematic diagram of the limiting tooth socket in the preferred embodiment of the present invention;

[0024] Figure 5 It is a schematic cross-sectional view of the static performance testing device of a second metal-based sensor in a preferred embodiment of the present invention;

[0025] Figure 6 It is a schematic cross-sectional view of a third metal-based sensor static performance test device in a preferred embodiment of the present invention;

[0026] Figure 7 It is a schematic cross-sectional structural diagram of a fourth metal-based sensor static performance testing device in a preferred embodiment of the present invention;

[0027] Figure 8 It is a schematic diagram of the structure of the static performance testing system of the metal-based sensor in the preferred embodiment of the present invention.

[0028] Explanation of the reference numerals in the specification: 10. Metal substrate MEMS membrane fluid resistance pressure sensor; 11. Sensitive core; 20. First sleeve; 21. First end face; 22. Accommodating hole; 221. Female limit tooth groove; 23. First barrel hole; 24. Boss; 25. Anti-rotation block; 30. Second sleeve; 31. Second end face; 311. Male limit tooth groove; 32. Second barrel hole; 33. Flange; 40. Pressure head; 50. First transmission medium; 51. Second transmission medium; 60. Sleeve limit assembly; 61. First limit seat; 611. Countersunk hole; 62. Cover plate; 621. Stamping hole; 63. Second limit seat; 631. Mounting hole; 632. Anti-rotation groove; 64. Bottom plate; 641. Lead hole; 71. Universal testing machine; 72. Signal processing component; 73. Multimeter; 74. Power supply component. DETAILED DESCRIPTION

[0029] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0030] The present invention discloses a metal-based sensor static performance test device, which is used for static performance test of a metal-based MEMS film fluid resistance pressure sensor 10. The metal-based sensor static performance test device comprises: a first sleeve 20, wherein the first sleeve 20 comprises a first end face 21, and a receiving hole 22 is arranged on the first end face 21, wherein the receiving hole 22 is used to accommodate the metal-based MEMS film fluid resistance pressure sensor 10, and the aperture of the receiving hole 22 is consistent with the outer diameter of the contour of the metal-based MEMS film fluid resistance pressure sensor 10, and a first barrel hole 23 penetrating the first sleeve 20 is arranged at the bottom of the receiving hole 22, and the aperture of the first barrel hole 23 is consistent with the outer diameter of the package of the metal-based MEMS film fluid resistance pressure sensor 10; and a second sleeve 30, wherein the second sleeve 30 comprises a second end face 31, and the second end face 31 Abutting against the first end face 21, forming a limit of the metal substrate MEMS membrane fluid resistance type pressure sensor 10; a second barrel hole 32 penetrating the second sleeve 30 is opened on the second end face 31, the aperture of the second barrel hole 32 is consistent with the package outer diameter of the metal substrate MEMS membrane fluid resistance type pressure sensor 10, and the second barrel hole 32 is coaxially arranged with the first barrel hole 23; a pressure head 40, the pressure head 40 is movably arranged in the second barrel hole 32, and the pressure head 40 is used to apply pressure to the metal substrate MEMS membrane fluid resistance type pressure sensor 10; a first transmission medium 50, the first transmission medium 50 is arranged in the second barrel hole 32, the first transmission medium 50 is used to transmit the pressure of the pressure head 40 to the metal substrate MEMS membrane fluid resistance type pressure sensor 10, and form a seal for the second barrel hole 32.

[0031] Reference Figure 1 and Figure 2 As shown, the metal-based sensor static performance test device of the present invention is used for static performance test of metal substrate MEMS membrane fluid resistance pressure sensor 10. The definition of static performance test is common knowledge, such as sensitivity, linearity, hysteresis, repeatability, etc. The metal-based sensor static performance test device includes a first sleeve 20, a second sleeve 30, a pressure head 40 and a first transmission medium 50.

[0032] The first sleeve 20 includes a first end face 21, and a receiving hole 22 is provided on the first end face 21. The receiving hole 22 is used to accommodate the metal substrate MEMS membrane fluid resistance type pressure sensor 10. The aperture of the receiving hole 22 is consistent with the outer diameter of the metal substrate MEMS membrane fluid resistance type pressure sensor 10 to prevent it from being displaced in the receiving hole 22 and ensure the measurement accuracy. The definition of the outer diameter of the outline is common knowledge and will not be described in detail. The bottom of the receiving hole 22 is provided with a first barrel hole 23 that passes through the first sleeve 20. The first barrel hole 23 is used to place the sensitive core 11 of the metal substrate MEMS membrane fluid resistance type pressure sensor 10 on the one hand; on the other hand, it is used to connect the wires to its electrodes to be electrically connected to external signal processing instruments, etc., so as to test the static performance. The aperture of the first barrel hole 23 is consistent with the outer diameter of the package of the metal substrate MEMS membrane fluid resistance type pressure sensor 10 to form a limit for the sensitive core 11, prevent it from being displaced, and ensure the measurement accuracy. Specifically, the metal substrate MEMS membrane fluid resistance pressure sensor 10 is directly laid flat in the accommodating hole 22, and its sensitive core 11 is placed toward the first barrel hole 23 to form a limit and facilitate wiring and performance testing.

[0033] The second sleeve 30 includes a second end face 31. During the static performance test, the second end face 31 abuts against the first end face 21 to form a limit for the metal substrate MEMS membrane fluid resistance pressure sensor 10, preventing it from displacement and ensuring measurement accuracy. A second barrel hole 32 that passes through the second sleeve 30 is provided on the second end face 31. Through the second barrel hole 32, on the one hand, a force can be applied to the metal substrate MEMS membrane fluid resistance pressure sensor 10 through the hole to perform a static performance test; on the other hand, it can cooperate with other components to form a seal to ensure the sealing requirements. The aperture limit is the same as that of the first barrel hole 23, so no further description will be given. The second barrel hole 32 is coaxially arranged with the first barrel hole 23 to facilitate accurate testing.

[0034] The pressure head 40 is movably disposed in the second cylindrical hole 32. Preferably, the pressure head 40 is in clearance fit with the second cylindrical hole 32. The pressure head 40 is used to apply pressure to the metal substrate MEMS membrane fluid resistance pressure sensor 10. By setting different loading force values, different electrical signals can be obtained, thereby obtaining corresponding static performance index parameters. The power source for applying pressure of the pressure head 40 can be selected as required, such as a mechanical arm.

[0035] The first transmission medium 50 is arranged in the second barrel hole 32, and the first transmission medium 50 is used to transmit the pressure of the pressure head 40 to the metal substrate MEMS membrane fluid resistance pressure sensor 10, and form a seal of the second barrel hole 32. Preferably, the first transmission medium 50 is selected as plasticine. Using plasticine as the fluid medium for applying force, instead of high-pressure liquid or gas, has higher safety and fundamentally avoids the safety hazards caused by high-pressure liquid or gas. The need for professional explosion-proof devices is eliminated, making the test operation simpler and the test cost lower. Plasticine can transfer pressure to the metal substrate MEMS membrane fluid resistance pressure sensor 10 under the force of the pressure head 40; at the same time, because plasticine has certain flow characteristics, and its flow characteristics are relatively weak compared with the flow characteristics of high-pressure gas and liquid, it can deform itself under the force of the pressure head 40 and form a high-pressure seal with the barrel wall of the second barrel hole 32 to ensure the accuracy of the entire test result. According to different requirements, other soft media can also be used as the first transmission medium 50, such as medium with good fluidity such as mud, or organic substances with very low hardness, such as rubber with a hardness of less than 20.

[0036] The metal-based sensor static performance test device described in the present invention, when conducting a test, first, the metal substrate MEMS membrane fluid resistance pressure sensor 10 is placed in the accommodating hole 22, and its sensitive core 11 is placed toward the first barrel hole 23. Secondly, the second end face 31 of the second sleeve 30 is abutted against the first end face 21 to form a limit. Then, the first transmission medium 50 is placed in the second barrel hole 32; at the same time, the external signal processing instrument is electrically connected to the sensitive body. Finally, pressure is applied to the first transmission medium 50 through the pressure head 40, and the first transmission medium 50 deforms itself to form a seal while transmitting force. By applying different loading force values, different electrical signals of the metal substrate MEMS membrane fluid resistance pressure sensor 10 can be obtained, thereby obtaining the corresponding static performance index parameters.

[0037] The metal-based sensor static performance test device described in the present invention uses the first transmission medium 50 as the fluid medium for applying force to replace high-pressure liquid or gas, which has higher safety and fundamentally avoids the safety hazards caused by high-pressure liquid or gas. The need for professional explosion-proof devices is eliminated, making the test operation simpler and the test cost lower. Under the force of the pressure head 40, the plasticine can transfer the pressure to the metal-based MEMS membrane fluid resistance pressure sensor 10; at the same time, because the first transmission medium 50 has certain flow characteristics, and its flow characteristics are relatively weak, it can deform itself under the force of the pressure head 40 and form a high-pressure seal with the wall of the second barrel hole 32, thereby ensuring the accuracy of the entire test result.

[0038] In the static performance test device for metal-based sensors described in the present invention, in some embodiments, the thickness of the first transfer medium 50 is 2-100mm. Taking plasticine as the first transfer medium 50 as an example, the amount inserted cannot be too small. When the thickness is less than 2mm, its flow resistance will have an adverse effect on the test. At the same time, the amount inserted cannot be too much. When the thickness is greater than 100mm, due to the friction between the inner wall of the second barrel 32 and the first transfer medium 50, the flow behavior of the first transfer medium 50 will be delayed, resulting in the indenter 40 being unable to apply a force evenly, affecting the test results. Preferably, selecting an amount with a thickness of 10mm can ensure the most accurate test results.

[0039] Further, see Figure 3 and Figure 5 As shown, the static performance test device of the metal-based sensor of the present invention, in some embodiments, further includes a second transmission medium 51, which is arranged between the first transmission medium 50 and the pressure head 40, and the second transmission medium 51 is used to uniformly transmit the pressure of the pressure head 40 to the first transmission medium 50, and form a seal of the first transmission medium 50. In the actual test process, if only the first transmission medium 50 is placed, due to the gap between the pressure head 40 and the second barrel hole 32, the first transmission medium 50 located at the edge will be displaced along the axial direction of the barrel hole, resulting in a small amount of leakage. For this reason, the second transmission medium 51 is arranged between the pressure head 40 and the first transmission medium 50, and the hardness of the first transmission medium 50 is less than the hardness of the second transmission medium 51, taking into account the sealing of the first transmission medium 50 and the uniform transmission of the force. Preferably, the second transmission medium 51 is selected as a rubber soft film, which has a certain hardness and can be deformed. Therefore, when the high pressure of the pressure head 40 is transmitted, it can deform itself and closely fit the hole wall of the second barrel hole 32 to achieve reliable self-sealing performance. According to different requirements, other materials with a harderness greater than the first transmission medium 50 and capable of deformation may be used as the second transmission medium 51, such as a soft medium such as rubber with a hardness less than 20.

[0040] Furthermore, in some embodiments of the static performance test device for metal-based sensors described in the present invention, the thickness of the second transfer medium 51 is 3-50 mm. The amount of the second transfer medium 51 cannot be too small. When the thickness is less than 3 mm, the lateral strain generated by the second transfer medium 51 under pressure is too small, which reduces the contact force with the inner hole of the sleeve and cannot form an effective seal. At the same time, the amount of the second transfer medium 51 cannot be too much. When the thickness is greater than 50 mm, the contact friction between the second transfer medium 51 and the inner wall of the second barrel hole 32 is large, affecting the test accuracy. Preferably, the amount of the second transfer medium 51 with a thickness of 10 mm is selected to ensure the most accurate test results.

[0041] Reference Figure 3 and Figure 4 As shown, in some embodiments of the static performance test device for metal-based sensors of the present invention, the second end face 31 is provided with a positive limiting tooth groove 311 in the circumferential direction around the second cylindrical hole 32, and the accommodating hole 22 is provided with a negative limiting tooth groove 221 adapted to the positive limiting tooth groove 311 in the circumferential direction around the first cylindrical hole 23. The positive limiting tooth groove 311 refers to the tooth groove structure being retained, while the structures on the side of the tooth groove structure are removed, forming a structure similar to an "M" shape; the negative limiting tooth groove 221 refers to the tooth groove structure being removed, while the structures on both sides of the tooth groove are retained, forming a structure similar to a "V"-shaped groove. Preferably, the fixed positions of the two tooth grooves coincide with the designed fixed positions of the metal substrate MEMS membrane fluid resistive pressure sensor 10, so as to achieve precise limiting, improve measurement accuracy, and avoid the tooth grooves from damaging the sensor. The definition of its designed fixed position is common knowledge and will not be described in detail. Specifically, when the two end surfaces are in contact, the metal substrate MEMS membrane fluid resistance pressure sensor 10 is slightly deformed under the cooperation of the positive limiting tooth groove 311 and the negative limiting tooth groove 221, so that it is firmly and reliably fixed in the receiving hole 22. It can ensure that there will be no relative sliding between the sensor and the test device even when high pressure is applied.

[0042] In some embodiments of the metal-based sensor static performance test device of the present invention, both the first end face 21 and the second end face 31 are provided with a pitted surface, and the pitted surface is formed by electric spark discharge machining. The pitted surface is not shown in the drawings, and the friction is increased by providing the pitted surface to prevent the first sleeve 20 and the second sleeve 30 from rotating relative to each other during the test process, thereby ensuring the measurement accuracy.

[0043] Reference Figure 6As shown, the static performance test device of the metal-based sensor of the present invention, in some embodiments, further includes a sleeve limiting assembly 60, which is used to limit the first sleeve 20 and the second sleeve 30. It can be imagined that if only the first sleeve 20 and the second sleeve 30 are set for testing, the two are prone to relative displacement. Therefore, by setting the sleeve limiting assembly 60 to limit the two, the contact area with the outside world is increased, and the structural stability is increased. Of course, in some other embodiments, the sleeve can also be limited by setting a fixing ring. The sleeve limiting assembly 60 includes a first limiting seat 61, a cover plate 62, a second limiting seat 63 and a bottom plate 64; the first limiting seat 61 is provided with a through countersunk hole 611, the second sleeve 30 is arranged in the countersunk hole 611, and the second sleeve 30 is provided with a flange portion 33 adapted to the countersunk hole 611 at one end away from the first end face 21, so as to prevent the second sleeve 30 from moving along the axial direction of the countersunk hole 611 when it is set in the countersunk hole 611. The cover plate 62 is detachably arranged on the first limiting seat 61, and the cover plate 62 is used to axially limit the flange portion 33. This structure facilitates the replacement of different second sleeves 30; the cover plate 62 is provided with a punching hole 621 connected to the second barrel hole 32, for the pressure head 40 to pass through and test. The second limiting seat 63 is detachably abutted with the first limiting seat 61 to achieve the limiting of the two sleeves. Preferably, the second limiting seat 63, the first limiting seat 61 and the cover plate 62 are all provided with coaxial pin holes to facilitate positioning and avoid relative movement. The second limiting seat 63 is provided with a through mounting hole 631, and the first sleeve 20 is arranged in the mounting hole 631; the bottom plate 64 is detachably arranged on the second limiting seat 63, and the bottom plate 64 is used to axially limit the first sleeve 20, and the bottom plate 64 is provided with a lead hole 641 connected to the first barrel hole 23 for the arrangement of the wire. Therefore, the diameter of the lead hole 641 is smaller than the first sleeve 20 to prevent the first sleeve 20 from falling off. Preferably, the first limit seat 61 and the cover plate 62, the second limit seat 63 and the bottom plate 64 are tightened by bolts.

[0044] Further, see Figure 7 As shown, in the static performance test device of the metal-based sensor of the present invention, in some embodiments, one end of the first sleeve 20 close to the second end face 31 is convex along its own axial direction to form a boss 24, and the boss 24 at least partially extends into the countersunk hole 611. The arrangement of the boss 24 structure is convenient for positioning during abutment on the one hand, and is convenient for forming a limit on the other hand, further preventing relative movement and ensuring test accuracy.

[0045] Further, see Figure 7As shown, in the static performance test device for metal-based sensors of the present invention, in some embodiments, one end of the first sleeve 20 away from the first end face 21 protrudes radially to form an anti-rotation block 25, and the mounting hole 631 is provided with an anti-rotation groove 632 adapted to the anti-rotation block 25. By providing the anti-rotation block 25 and the anti-rotation groove 632, the first sleeve 20 is prevented from rotating in the second limit seat 63, thereby ensuring the progress of the test.

[0046] Reference Figure 8 As shown, the present invention discloses a metal-based sensor static performance test system, including a universal testing machine 71, a signal processing component 72, a multimeter 73, a power supply component 74, and the metal-based sensor static performance test device described in any one of the above embodiments; the second sleeve 30 and the first sleeve 20 are arranged on the stage of the universal testing machine 71, the pressure head 40 is connected to the loading end of the universal testing machine 71, and the signal processing component 72 is electrically connected to the multimeter 73, the power supply component 74 and the metal substrate MEMS film fluid resistance pressure sensor 10 respectively. Preferably, the electrical connection is achieved through a wire. The metal-based sensor static performance test system described in the present invention includes the metal-based sensor static performance test device described in the above embodiment, so the advantages it has are also possessed by the metal-based sensor static performance test system, which will not be repeated. The universal testing machine 71, the signal processing component 72, the multimeter 73, and the power supply component 74 are all prior art and will not be described in detail. Preferably, the PGA900 measurement circuit is selected as the signal processing component 72, and the DMD-022C voltage-stabilized frequency-modulated power supply is selected as the power supply component 74. Since the universal testing machine 71 is used as a high-pressure applying device, the magnitude of the applied force can be accurately controlled by a computer. Compared with applying high-pressure gas or liquid, it has greater advantages in terms of automation, pressure controllability, accuracy, repeatability, etc.; it can avoid unfavorable measurement factors such as high-pressure overshoot of liquid or gas; it avoids the special device of high-pressure gas source or hydraulic pump, which can significantly reduce the requirements of safety assessment and other aspects, and can solve the testing problem of high-pressure sensors in principle.

[0047] The working principle of the metal-based sensor static performance test system of the present invention is:

[0048] First, a metal substrate MEMS film fluid resistive pressure sensor 10 is obtained. For example, a stainless steel circular diaphragm with a thickness of 1 mm and a radius of 5 mm is polished to reduce the roughness, a Ti / Cr / Ni composite transition layer and a SiO2 / Si3N4 composite insulating layer are deposited in sequence, and a NiCr resistive strain grating is prepared by photolithography-etching patterning to prepare a sensitive core 11; finally, a sensor protection layer is prepared by chemical vapor deposition and other processes to obtain a metal substrate MEMS film fluid resistive pressure sensor 10.

[0049] Secondly, the metal substrate MEMS membrane fluid resistance pressure sensor 10 is wired. For example, the A component and the B component of the two-component conductive silver paste are accurately mixed in a ratio of 10:1 and stirred evenly, and then a wire is dipped in a proper amount of silver paste and placed vertically at the electrode of the sensor core and fixed, and finally placed in a vacuum drying oven at 80°C for 1 hour to complete the wiring.

[0050] Next, the metal substrate MEMS film fluid resistance type pressure sensor 10 with completed leads is set in the receiving hole, and its sensitive core 11 is placed toward one side of the first barrel hole 23, and the back side is placed toward the second barrel hole 32 to bear pressure. The second end face 31 of the second sleeve 30 is abutted against the first end face 21 to form a limit. The metal substrate MEMS film fluid resistance type pressure sensor 10 undergoes a slight deformation under the cooperation of the positive limit tooth groove 311 and the negative limit tooth groove 221, so that it is firmly and reliably fixed in the receiving hole 22. After a certain amount of plasticine and rubber soft film are successively placed in the second barrel hole 32, the entire device is set in the center of the stage of the universal testing machine 71. And the wire is connected to the external PGA900 measurement circuit. The DMD-022C voltage-stabilized frequency-modulated power supply is adjusted so that the input voltage is maintained at 5V to power the PGA900 measurement circuit, and the PGA900 measurement circuit further processes the voltage to power the sensitive body.

[0051] Finally, start the universal testing machine 71, set the loading load according to the measurement requirements, the loading speed is preferably set to 0.5mm / min, and the pressure holding time is preferably set to 30s. The pressure head 40 transmits the pressure to the rubber soft film and plasticine in turn, and finally evenly loads it on the back of the metal substrate MEMS film fluid resistance pressure sensor 10. After the pressure is loaded to the specified value and enters the pressure holding stage, observe and record the value of the high-precision digital multimeter 73 at this time. The average value of this value is the output signal size after amplification under this pressure. Within the range, select multiple test points for testing, and perform multiple rounds of forward and reverse strokes, preferably 5 rounds. After recording multiple data, static performance indicators such as sensitivity, linearity, hysteresis, and repeatability can be obtained by calculation.

[0052] Obviously, the above embodiments are merely examples for clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the protection scope of the invention.

Claims

1. A metal-based sensor static performance test device, used for static performance test of metal-based MEMS membrane fluid resistance pressure sensor, characterized in that: The metal-based sensor static performance test device includes: A first sleeve, wherein the first sleeve comprises a first end face, a receiving hole is arranged on the first end face, the receiving hole is used to receive the metal substrate MEMS membrane fluid resistance type pressure sensor, the aperture of the receiving hole is consistent with the outer diameter of the metal substrate MEMS membrane fluid resistance type pressure sensor, and a first barrel hole penetrating the first sleeve is arranged at the bottom of the receiving hole, the aperture of the first barrel hole is consistent with the outer diameter of the package of the metal substrate MEMS membrane fluid resistance type pressure sensor; A second sleeve, wherein the second sleeve comprises a second end face, the second end face abuts against the first end face to form a limit of the metal substrate MEMS membrane fluid resistance type pressure sensor; a second barrel hole penetrating the second sleeve is formed on the second end face, the aperture of the second barrel hole is consistent with the outer diameter of the package of the metal substrate MEMS membrane fluid resistance type pressure sensor, and the second barrel hole is coaxially arranged with the first barrel hole; A pressure head, which is movably disposed in the second cylindrical hole and is used to apply pressure to the metal substrate MEMS membrane fluid resistance pressure sensor; A first transmission medium, the first transmission medium is arranged in the second barrel hole, the first transmission medium is used to transmit the pressure of the pressure head to the metal substrate MEMS membrane fluid resistance pressure sensor, and form a seal of the second barrel hole; The second transfer medium is arranged between the first transfer medium and the pressure head, and the second transfer medium is used to uniformly transfer the pressure of the pressure head to the first transfer medium and form a seal for the first transfer medium; the hardness of the first transfer medium is less than the hardness of the second transfer medium.

2. The static performance testing device for metal-based sensors according to claim 1, characterized in that: The thickness of the first transfer medium is 2-100 mm.

3. The static performance testing device for metal-based sensors according to claim 1, characterized in that: The thickness of the second transfer medium is 3-50 mm.

4. The static performance testing device for metal-based sensors according to claim 1, characterized in that: The second end surface is provided with a positive limiting tooth groove in a circumferential direction around the second cylindrical hole, and the accommodating hole is provided with a negative limiting tooth groove adapted to the positive limiting tooth groove in a circumferential direction around the first cylindrical hole.

5. The static performance testing device for metal-based sensors according to claim 1, characterized in that: The first end surface and the second end surface are both provided with pitted surfaces, and the pitted surfaces are formed by electric spark discharge machining.

6. The static performance testing device for metal-based sensors according to claim 1, characterized in that: It also includes a sleeve limiting assembly, which is used to limit the first sleeve and the second sleeve; the sleeve limiting assembly includes a first limiting seat, a cover plate, a second limiting seat and a bottom plate; The first limiting seat is provided with a through countersunk hole, the second sleeve is arranged in the countersunk hole, and the end of the second sleeve away from the first end face is provided with a flange part adapted to the countersunk hole, the cover plate is detachably arranged on the first limiting seat, the cover plate is used to axially limit the flange part, and a stamping hole communicating with the second barrel hole is opened on the cover plate; The second limit seat can be removably connected to the first limit seat, and the second limit seat is provided with a through mounting hole, and the first sleeve is arranged in the mounting hole; the bottom plate can be removably arranged on the second limit seat, the bottom plate is used for axially limiting the first sleeve, and a lead hole connected to the first sleeve hole is opened on the bottom plate.

7. The static performance testing device for metal-based sensors according to claim 6, characterized in that: One end of the first sleeve close to the first end surface protrudes along its own axial direction to form a boss, and the boss at least partially extends into the countersunk hole.

8. The static performance testing device for metal-based sensors according to claim 6, characterized in that: One end of the first sleeve away from the first end surface protrudes in its own radial direction to form an anti-rotation block, and the mounting hole is provided with an anti-rotation groove adapted to the anti-rotation block.

9. A metal-based sensor static performance test system, characterized in that: It comprises a universal testing machine, a signal processing component, a multimeter, a power supply component, and a metal-based sensor static performance testing device as described in any one of claims 1 to 8, wherein the second sleeve and the first sleeve are arranged on the stage of the universal testing machine, the pressure head is connected to the loading end of the universal testing machine, and the signal processing component is electrically connected to the multimeter, the power supply component and the metal-based MEMS membrane fluid resistance pressure sensor respectively.

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