A symmetric split-bowtie waveguide gas concentration sensor for waste battery disassembly

Abstract

The application discloses a symmetrical split-bowl waveguide gas concentration sensor for waste battery disassembly, belongs to the technical field of optical sensing, and constructs a symmetrical split-bowl waveguide which is composed of two half-bowl resonant cavities. The symmetrical split-bowl waveguide can introduce multiple optical resonances, thereby forming multiple sharp Fano resonance peaks. When the resonant cavity is filled with a to-be-detected gas, the concentration of the to-be-detected gas can be obtained by measuring the moving amount of the Fano resonance peak. The application has small loss, high quality factor, small noise, high sensitivity and high integration degree, and can be applied to the fields of chemical detection and waste gas detection.

Description

Technical Field

[0001] This invention relates to the field of optical device technology, and is a symmetrical split-bowl-shaped waveguide gas concentration sensor for the dismantling of waste batteries. Background Technology

[0002] Because used power batteries still have some value, they are recycled to improve resource utilization. However, the recycling process generates large amounts of dust and toxic gases. Existing recycling equipment typically only filters the exhaust gases using screens or liquid sprays. This method cannot completely remove the dust and toxic gases, easily leading to their leakage and causing air pollution, which can harm human health.

[0003] Improper or untreated used power batteries can severely pollute the environment, endanger human health, and potentially pose safety hazards. Ternary lithium batteries and lithium iron phosphate cathode materials can pollute water and soil; graphite powder in the anode material, due to its small particle size, easily generates dust pollution; the organic solvents in the electrolyte are mostly alcohols, which are easily absorbed through the skin and inhaled, posing a health hazard; solutes in the electrolyte, such as lithium hexafluorophosphate, are highly corrosive and can produce toxic gases such as hydrogen fluoride (HF) upon contact with water or high temperatures, causing irritation to human tissues, mucous membranes, and the upper respiratory tract through skin and respiratory contact, and also having a severe corrosive effect on plants and animals. Therefore, the proper recycling and disposal of used power batteries has become an unavoidable practical issue accompanying the development of the new energy industry.

[0004] A gas pressure sensor is an instrument used to measure gas pressure. Gas pressure is essentially the result of collisions between gas atoms or molecules and the container walls, reflecting the rarefaction level of the gas. It has significant practical implications for people's lives and production activities. Currently, one widely used gas pressure sensor is the mercury gas pressure gauge, which measures pressure by utilizing the balance between the gravity of mercury and gas pressure. However, the accuracy of human eye readings is very limited and easily affected by other environmental factors. Another widely used gas pressure sensor is the electronic gas pressure gauge. Compared to the mercury gas pressure gauge, it has higher sensitivity and better stability, but its disadvantages are also significant. For example, it is susceptible to electromagnetic interference, has a complex manufacturing process, and is costly. Furthermore, its corrosion resistance is poor, limiting its use in biological and chemical fields to measuring gas pressure in dry, non-corrosive environments.

[0005] Gas concentration sensors are used to detect the content or concentration of gases, and can be used to detect gases inside vehicles or in exhaust emissions. Currently, commonly used gas concentration sensors include semiconductor gas sensors, which utilize the principle that the conductivity of certain metal oxide semiconductor materials changes with the composition or concentration of ambient gases at a certain temperature. These sensors are inexpensive and suitable for civilian gas detection needs, but they also have significant drawbacks, such as poor stability and significant susceptibility to environmental influences. In particular, the sensor's output parameters are not deterministic, making them unsuitable for applications requiring high measurement accuracy. Another type is the thermal conductivity gas sensor, which utilizes the specific thermal conductivity of the gas itself. This type of gas sensor has a narrower application range, more limiting factors, and can only measure a few types of gases. In summary, current gas concentration sensors suffer from problems such as complex structure, difficulty in manufacturing, low sensitivity, and slow response.

[0006] With the development of modern optoelectronics, optical devices are increasingly widely used in numerous fields. The traditional optical diffraction limit theoretically restricts the miniaturization and integration of optical devices. Therefore, researchers have proposed surface plasmon polariton (SPP) waveguide technology. This technology breaks the diffraction limit at the subwavelength scale, promoting the application and development of nanophotonics in the field of optical devices. Metal-dielectric-metal (MIM) waveguide structures can effectively excite SPPs and have advantages such as wide frequency range, low loss, and simple fabrication, showing broad development prospects in the field of nano-optical devices. Under different plasmon modes, SPPs will produce the Fano resonance effect. Fano resonance is a sharp, asymmetric, linear scattering resonance phenomenon that is highly sensitive to the structure itself and the external environment. Therefore, MIM waveguide structures based on Fano resonance can be used for the design and debugging of micro- and nano-optical sensors, possessing excellent characteristics such as simple structure, high sensitivity, and low propagation loss, and have important applications in biomedicine, chemical detection, and environmental monitoring. Summary of the Invention

[0007] In response to the above-mentioned defects or improvement needs of existing technologies, a symmetrical split-bowl-shaped waveguide gas concentration sensor based on waste battery dismantling is proposed, which overcomes the problems of high noise, slow response, low sensitivity and integration difficulties of current gas concentration sensors.

[0008] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0009] This invention provides a symmetrical split-bowl-shaped waveguide gas concentration sensor derived from the dismantling of waste batteries. The invention offers the following technical solution:

[0010] A symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling, the sensor comprising: a substrate layer, a metal layer, an air waveguide, a first metal baffle, a second metal baffle, a first half-bowl-shaped resonant cavity, and a second half-bowl-shaped resonant cavity;

[0011] Based on a rectangular coordinate system formed by the x-axis, y-axis, and z-axis, in the xy plane: the geometric center of the air waveguide is O1, and the height of the air waveguide along the y-axis is 45nm;

[0012] In the xy plane: dashed line a is a dashed line passing through O1 and perpendicular to the air waveguide, dashed line a is the axis of symmetry in the xy plane, and dashed line b is a dashed line passing through O1 and parallel to the air waveguide;

[0013] In the xy plane: the geometric center O2 of the first metal baffle and the geometric center O3 of the second metal baffle are located on the dashed line b and are symmetrical about the dashed line a. The distance between O2 and O1 along the x-axis is 25nm, the distance between O3 and O1 along the x-axis is 25nm, the length of the first metal baffle and the second metal baffle along the x-axis is 5nm, and the height of the first metal baffle and the second metal baffle along the y-axis is 45nm.

[0014] In the xy plane: the first semi-bowl-shaped resonant cavity 6 is composed of a quarter-sector ring, a rectangle, and a square. The center of the sector ring is O4, the distance between O4 and dashed line a is 10nm, and the distance between O4 and dashed line b is 317.5nm. The outer diameter of the sector ring is R1, and the inner diameter is R2. The range of the outer diameter R1 is 245nm to 265nm, the range of the inner diameter R2 is 200nm to 220nm, and the range of the ring width is 25nm to 65nm. The geometric center of the rectangle is O6, the distance between O6 and dashed line a is 130nm, and the distance between O6 and dashed line b is 295nm. The length of the rectangle along the x-axis is 210nm, and the height h of the rectangle along the y-axis ranges from 35nm to 75nm. The side length of the square is 45nm, and the geometric center of the square is O8, the distance between O8 and dashed line a is 32.5nm, and the distance between O8 and dashed line b is 55nm.

[0015] Preferably, in the xy plane: the second semi-bowl-shaped resonant cavity is composed of a quarter-sector ring, a rectangle, and a square. The center of the sector ring is O5, the distance between O5 and dashed line a is 10nm, and the distance between O5 and dashed line b is 317.5nm. The outer diameter of the sector ring is R1, and the inner diameter is R2. The outer diameter R1 of the sector ring ranges from 245nm to 265nm, the inner diameter R2 of the sector ring ranges from 200nm to 220nm, and the ring width of the sector ring ranges from 25nm to 65nm. The geometric center of the rectangle is O7, the distance between O7 and dashed line a is 130nm, and the distance between O7 and dashed line b is 295nm. The length of the rectangle along the x-axis is 210nm, and the height h of the rectangle along the y-axis ranges from 35nm to 75nm. The side length of the square is 45nm, the geometric center of the square is O9, the distance between O9 and dashed line a is 32.5nm, and the distance between O9 and dashed line b is 55nm.

[0016] Preferably, the first semi-bowl-shaped resonant cavity and the second semi-bowl-shaped resonant cavity are axially symmetrical about the dashed line a;

[0017] The air waveguide is air, and it is divided into three segments by a first metal baffle and a second metal baffle.

[0018] Preferably, the base layer is selenium dioxide;

[0019] The metal layer, the first metal baffle, and the second metal baffle are all made of gold.

[0020] A gas concentration detection device for waste battery dismantling, the detection device being based on a symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling.

[0021] A device for detecting the concentration of exhaust gas from the dismantling of waste batteries, wherein the exhaust gas pressure detection device is based on a symmetrical split-bowl-shaped waveguide gas concentration sensor from the dismantling of waste batteries.

[0022] A waste gas concentration detection device for use in a recycled organic resin composite profile manufacturing plant, the detection device being based on a symmetrical split-bowl-shaped waveguide gas concentration sensor derived from waste battery dismantling.

[0023] A method for detecting gas concentration during waste battery dismantling, the method being based on a symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling, characterized by comprising the following steps:

[0024] Both the first and second half-bowl resonant cavities are filled with the gas to be measured; four Fano resonances are generated in the wavelength range of 500nm to 2000nm, and the concentration of the gas to be measured can be obtained from the shift of any Fano resonance peak.

[0025] The structural parameters of the first and second half-bowl resonant cavities affect the wavelength of the Fano resonance.

[0026] When the outer diameter R1 of the fan ring of the first and second half-bowl resonant cavities increases, FR1, FR3, and FR4 undergo blue shift, with FR1 exhibiting the smallest blue shift amplitude and FR4 exhibiting the largest blue shift amplitude.

[0027] When the inner diameter R2 of the fan ring of the first and second half-bowl resonant cavities increases, all four Fano resonances undergo redshift, and the transmittance of the resonance peaks decreases. Among them, FR1 has the smallest redshift amplitude, and FR4 has the largest redshift amplitude.

[0028] When the rectangular height h of the first and second half-bowl resonators increases, all four Fano resonances undergo a blue shift, and the transmittance of the resonance peaks increases. Among them, FR1 has the smallest blue shift amplitude, and FR2 has the largest blue shift amplitude.

[0029] Both the first and second half-bowl resonant cavities are filled with the gas to be tested. When the refractive index n of the gas to be tested increases, all four Fano resonances undergo redshift, with FR1 exhibiting the smallest redshift amplitude and FR4 exhibiting the largest redshift amplitude.

[0030] A computer-readable storage medium having a computer program stored thereon, which is executed by a processor to implement a gas detection method for dismantling waste batteries.

[0031] A computer device includes a memory and a processor, the memory storing a computer program, and the processor executing the computer program to implement a gas detection method for dismantling waste batteries.

[0032] The present invention has the following beneficial effects:

[0033] This invention constructs a symmetrical split-bowl waveguide, which consists of two half-bowl resonant cavities. The symmetrical split-bowl waveguide can introduce multiple optical resonances, thereby forming multiple sharp Fano resonance peaks. When the resonant cavity is filled with the gas to be measured, the concentration of the gas to be measured can be obtained by measuring the shift of the Fano resonance peaks. Therefore, this invention has the advantages of low loss, high quality factor, low noise, high sensitivity, and high degree of integration. Attached Figure Description

[0034] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0035] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0036] Figure 2 This is a schematic diagram of the structure of the present invention in the xy plane. For ease of structural description, the internal boundaries of the rectangle and square in the first half-bowl resonant cavity 6 and the internal boundaries of the rectangle and square in the second half-bowl resonant cavity 7 are retained.

[0037] Figure 3 This invention provides the transmission spectrum in the wavelength range of 500nm to 2000nm. The transmission spectrum contains four Fano resonances, which are denoted as FR1, FR2, FR3, and FR4 from left to right.

[0038] Figure 4 The transmission spectrum of the present invention is obtained when the outer diameter R1 of the fan ring of the first half-bowl resonator 6 and the second half-bowl resonator 7 changes from 245nm to 265nm, and the length of each change of R1 is 5nm.

[0039] Figure 5 The transmission spectrum of the present invention is obtained when the inner diameter R2 of the fan ring of the first half-bowl resonator 6 and the second half-bowl resonator 7 changes from 200nm to 220nm, and the length of each change of R2 is 5nm.

[0040] Figure 6 The transmission spectrum of the present invention is obtained when the rectangular height h of the first half-bowl resonator 6 and the second half-bowl resonator 7 changes from 35nm to 75nm, with each change in h being 10nm.

[0041] Figure 7The transmission spectrum of this invention is obtained when the first half-bowl resonant cavity 6 and the second half-bowl resonant cavity 7 are both filled with the gas to be tested, and the refractive index n of the gas to be tested changes from 1.00 to 1.08, with each change in n being 0.02. Detailed Implementation

[0042] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0043] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0044] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0045] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0046] The present invention will be described in detail below with reference to specific embodiments. Specific Implementation Example 1:

[0048] according to Figures 1 to 7 As shown, the specific optimized technical solution adopted by the present invention to solve the above-mentioned technical problems is: The present invention relates to a symmetrical split bowl-shaped waveguide gas concentration sensor for waste battery dismantling.

[0049] The objective of this invention is achieved as follows: a symmetrical split-bowl-shaped waveguide gas concentration sensor for dismantling waste batteries, the symmetrical split-bowl-shaped waveguide gas concentration sensor is composed of a substrate layer 1, a metal layer 2, an air waveguide 3, a first metal baffle 4, a second metal baffle 5, a first half-bowl-shaped resonant cavity 6, and a second half-bowl-shaped resonant cavity 7.

[0050] The x-axis, y-axis, and z-axis form a rectangular coordinate system;

[0051] In the xy plane: the geometric center of air waveguide 3 is O1, and the height of air waveguide 3 along the y-axis is 45nm;

[0052] In the xy plane: dashed line a is a dashed line passing through O1 and perpendicular to the air waveguide 3. Dashed line a is the axis of symmetry of the present invention in the xy plane. Dashed line b is a dashed line passing through O1 and parallel to the air waveguide 3.

[0053] In the xy plane: the geometric center O2 of the first metal baffle 4 and the geometric center O3 of the second metal baffle 5 are located on the dashed line b and are symmetrical about the dashed line a. The distance between O2 and O1 along the x-axis is 25nm, the distance between O3 and O1 along the x-axis is 25nm, the length of the first metal baffle 4 and the second metal baffle 5 along the x-axis is 5nm, and the height of the first metal baffle 4 and the second metal baffle 5 along the y-axis is 45nm.

[0054] In the xy plane: the first half-bowl resonant cavity 6 is composed of a quarter-sector ring, a rectangle, and a square. The center of the sector ring is O4, the distance between O4 and dashed line a is 10nm, the distance between O4 and dashed line b is 317.5nm, the outer diameter of the sector ring is R1, and the inner diameter is R2. The range of the outer diameter R1 is 245nm to 265nm, the range of the inner diameter R2 is 200nm to 220nm, and the range of the ring width is 25nm to 65nm. The geometric center of the rectangle is O6, the distance between O6 and dashed line a is 130nm, the distance between O6 and dashed line b is 295nm, the length of the rectangle along the x-axis is 210nm, the height h of the rectangle along the y-axis ranges from 35nm to 75nm, the side length of the square is 45nm, the geometric center of the square is O8, the distance between O8 and dashed line a is 32.5nm, and the distance between O8 and dashed line b is 55nm.

[0055] In the xy plane: the second semi-bowl resonant cavity 7 is composed of a quarter-sector ring, a rectangle, and a square. The center of the sector ring is O5, the distance between O5 and dashed line a is 10nm, and the distance between O5 and dashed line b is 317.5nm. The outer diameter of the sector ring is R1, and the inner diameter is R2. The range of the outer diameter R1 is 245nm to 265nm, the range of the inner diameter R2 is 200nm to 220nm, and the range of the ring width is 25nm to 65nm. The geometric center of the rectangle is O7, the distance between O7 and dashed line a is 130nm, and the distance between O7 and dashed line b is 295nm. The length of the rectangle along the x-axis is 210nm, and the height h of the rectangle along the y-axis ranges from 35nm to 75nm. The side length of the square is 45nm, and the geometric center of the square is O9. The distance between O9 and dashed line a is 32.5nm, and the distance between O9 and dashed line b is 55nm.

[0056] The first semi-bowl-shaped resonant cavity 6 and the second semi-bowl-shaped resonant cavity 7 are axially symmetrical about the dashed line a;

[0057] The air waveguide 3 is air, and the air waveguide 3 is divided into three segments by the first metal baffle 4 and the second metal baffle 5;

[0058] The base layer 1 is selenium dioxide;

[0059] The metal layer 2, the first metal baffle 4, and the second metal baffle 5 are all made of gold;

[0060] Working principle: The materials and structural dimensions of this invention constitute a metal-dielectric-metal waveguide structure. Therefore, this invention can excite surface plasmons and enable surface plasmons to propagate within the invention.

[0061] An incident light wave enters the present invention from either end of the air waveguide 3 and excites a surface plasmon polariton. The surface plasmon polariton propagates along the x-axis within the air waveguide 3. When the surface plasmon polariton propagates to the first metal baffle 4 and the second metal baffle 5, it is coupled from the air waveguide 3 into the first semi-bowl resonant cavity 6 and the second semi-bowl resonant cavity 7. The surface plasmon polariton can couple with each other between the first semi-bowl resonant cavity 6 and the second semi-bowl resonant cavity 7. Then, the surface plasmon polariton is coupled back into the air waveguide 3 from the first semi-bowl resonant cavity 6 and the second semi-bowl resonant cavity 7 and output from the other end of the air waveguide 3.

[0062] This invention generates four Fano resonances in the wavelength range of 500nm to 2000nm, as shown in the attached figure. Figure 3 As shown, the four Fano resonances are denoted as FR1, FR2, FR3, and FR4 from left to right;

[0063] Since surface plasmon resonance occurs in the first half-bowl resonant cavity 6 and the second half-bowl resonant cavity 7, the structural parameters of the first half-bowl resonant cavity 6 and the second half-bowl resonant cavity 7 affect the wavelength of the Fano resonance.

[0064] When the outer diameter R1 of the fan ring of the first semi-bowl resonator 6 and the second semi-bowl resonator 7 increases, FR1, FR3, and FR4 undergo a blue shift, as shown in the attached diagram. Figure 4 As shown, when the inner diameter R2 of the fan ring of the first half-bowl resonator 6 and the second half-bowl resonator 7 is 200nm, the rectangular height h is 45nm, the outer diameter R1 of the fan ring changes from 245nm to 265nm, and the length of each change of R1 is 5nm, the wavelength of FR1 changes from 580nm to 545nm, the wavelength of FR3 changes from 1600nm to 1480nm, and the wavelength of FR4 changes from 1720nm to 1580nm. The blue shift amplitude of FR1 is the smallest, and the blue shift amplitude of FR4 is the largest.

[0065] When the inner diameter R2 of the fan ring of the first semi-bowl resonator 6 and the second semi-bowl resonator 7 increases, all four Fano resonances undergo a redshift, and the transmittance of the resonance peaks decreases, as shown in the attached diagram. Figure 5 As shown, when the inner diameter R1 of the fan ring of the first half-bowl resonator 6 and the second half-bowl resonator 7 is 245nm, the rectangular height h is 45nm, the inner diameter R2 of the fan ring changes from 200nm to 220nm, and the length of each change of R2 is 5nm, the wavelength of FR1 changes from 580nm to 610nm, the wavelength of FR2 changes from 820nm to 855nm, the wavelength of FR3 changes from 1600nm to 1755nm, and the wavelength of FR4 changes from 1720nm to 1885nm. The redshift amplitude of FR1 is the smallest, and the redshift amplitude of FR4 is the largest.

[0066] When the rectangular height h of the first semi-bowl resonator 6 and the second semi-bowl resonator 7 increases, all four Fano resonances undergo a blue shift, and the transmittance of the resonance peaks all increase, as shown in the attached figure. Figure 6 As shown, when the inner diameter of the fan ring of the first half-bowl resonator 6 and the second half-bowl resonator 7 is R1 = 245nm and R2 = 200nm, and the rectangular height h changes from 35nm to 75nm, with each change in h being 10nm, the wavelength of FR1 changes from 580nm to 560nm, the wavelength of FR2 changes from 820nm to 735nm, the wavelength of FR3 changes from 1600nm to 1535nm, and the wavelength of FR4 changes from 1720nm to 1670nm. FR1 has the smallest blue shift amplitude, and FR2 has the largest blue shift amplitude.

[0067] During the measurement in this invention, both the first semi-bowl-shaped resonant cavity 6 and the second semi-bowl-shaped resonant cavity 7 are filled with the gas to be measured;

[0068] The refractive index of the gas being tested is monotonically related to its concentration; the higher the concentration, the greater the refractive index. Changes in the concentration alter the refractive index, leading to a change in the Fano resonance wavelength, i.e., a shift in the Fano resonance peak, as shown in the attached figure. Figure 7 As shown, when the inner diameter of the fan ring of the first half-bowl resonator 6 and the second half-bowl resonator 7 is R1 = 245nm, the inner diameter of the fan ring is R2 = 200nm, the rectangular height is h = 45nm, and the refractive index n of the gas to be measured changes from 1.00 to 1.08, and the change in n is 0.02 each time, the wavelength of FR1 changes from 580nm to 620nm, the wavelength of FR2 changes from 820nm to 885nm, the wavelength of FR3 changes from 1600nm to 1725nm, and the wavelength of FR4 changes from 1720nm to 1860nm. That is to say, when the refractive index n of the gas to be measured increases, all four Fano resonances undergo redshift, with FR1 having the smallest redshift amplitude and FR4 having the largest redshift amplitude.

[0069] Therefore, by using an external spectrometer to collect the transmission spectrum of the present invention and measuring the shift of the Fano resonance peak in the transmission spectrum, the change in the refractive index of the gas to be tested can be obtained. Then, based on the relationship between the refractive index and concentration of the gas to be tested, the change in the concentration of the gas to be tested and the concentration of the gas to be tested can be obtained. Specific Implementation Example 2:

[0071] Based on the shortcomings of existing technologies, this invention provides a symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling, which overcomes the problems of high noise, slow response, low sensitivity and integration difficulties of current gas concentration sensors.

[0072] This invention constructs a symmetrical split-bowl waveguide, which consists of two half-bowl resonant cavities. The symmetrical split-bowl waveguide can introduce multiple optical resonances, thereby forming multiple sharp Fano resonance peaks. When the resonant cavity is filled with the gas to be measured, the concentration of the gas to be measured can be obtained by measuring the shift of the Fano resonance peaks. Therefore, this invention has the advantages of low loss, high quality factor, low noise, high sensitivity, and high degree of integration.

[0073] The objective of this invention is achieved as follows: a symmetrical split-bowl waveguide gas concentration sensor, which is composed of a substrate layer 1, a metal layer 2, an air waveguide 3, a first metal baffle 4, a second metal baffle 5, a first half-bowl resonant cavity 6, and a second half-bowl resonant cavity 7.

[0074] The x-axis, y-axis, and z-axis form a rectangular coordinate system;

[0075] In the xy plane: the geometric center of air waveguide 3 is O1, and the height of air waveguide 3 along the y-axis is 45nm;

[0076] In the xy plane: dashed line a is a dashed line passing through O1 and perpendicular to the air waveguide 3. Dashed line a is the axis of symmetry of the present invention in the xy plane. Dashed line b is a dashed line passing through O1 and parallel to the air waveguide 3.

[0077] In the xy plane: the geometric center O2 of the first metal baffle 4 and the geometric center O3 of the second metal baffle 5 are located on the dashed line b and are symmetrical about the dashed line a. The distance between O2 and O1 along the x-axis is 25nm, the distance between O3 and O1 along the x-axis is 25nm, the length of the first metal baffle 4 and the second metal baffle 5 along the x-axis is 5nm, and the height of the first metal baffle 4 and the second metal baffle 5 along the y-axis is 45nm.

[0078] In the xy plane: the first half-bowl resonant cavity 6 is composed of a quarter-sector ring, a rectangle, and a square. The center of the sector ring is O4, the distance between O4 and dashed line a is 10nm, the distance between O4 and dashed line b is 317.5nm, the outer diameter of the sector ring is R1, and the inner diameter is R2. The range of the outer diameter R1 is 245nm to 265nm, the range of the inner diameter R2 is 200nm to 220nm, and the range of the ring width is 25nm to 65nm. The geometric center of the rectangle is O6, the distance between O6 and dashed line a is 130nm, the distance between O6 and dashed line b is 295nm, the length of the rectangle along the x-axis is 210nm, the height h of the rectangle along the y-axis ranges from 35nm to 75nm, the side length of the square is 45nm, the geometric center of the square is O8, the distance between O8 and dashed line a is 32.5nm, and the distance between O8 and dashed line b is 55nm.

[0079] In the xy plane: the second semi-bowl resonant cavity 7 is composed of a quarter-sector ring, a rectangle, and a square. The center of the sector ring is O5, the distance between O5 and dashed line a is 10nm, and the distance between O5 and dashed line b is 317.5nm. The outer diameter of the sector ring is R1, and the inner diameter is R2. The range of the outer diameter R1 is 245nm to 265nm, the range of the inner diameter R2 is 200nm to 220nm, and the range of the ring width is 25nm to 65nm. The geometric center of the rectangle is O7, the distance between O7 and dashed line a is 130nm, and the distance between O7 and dashed line b is 295nm. The length of the rectangle along the x-axis is 210nm, and the height h of the rectangle along the y-axis ranges from 35nm to 75nm. The side length of the square is 45nm, and the geometric center of the square is O9. The distance between O9 and dashed line a is 32.5nm, and the distance between O9 and dashed line b is 55nm.

[0080] The first semi-bowl-shaped resonant cavity 6 and the second semi-bowl-shaped resonant cavity 7 are axially symmetrical about the dashed line a;

[0081] The air waveguide 3 is air, and the air waveguide 3 is divided into three segments by the first metal baffle 4 and the second metal baffle 5;

[0082] The base layer 1 is selenium dioxide;

[0083] The metal layer 2, the first metal baffle 4, and the second metal baffle 5 are all made of gold;

[0084] This invention constructs a symmetrical split-bowl waveguide, which consists of two semi-bowl-shaped resonant cavities. The symmetrical split-bowl waveguide can introduce multiple optical resonances, thus forming multiple Fano resonance peaks. When the resonant cavity is filled with the gas to be measured, the concentration of the gas can be obtained by measuring the shift of the Fano resonance peaks. Therefore, this invention has the advantages of low loss, high quality factor, low noise, high sensitivity, and high integration. The technical features of this invention are as follows:

[0085] (1) During the measurement in this invention, both the first half-bowl resonant cavity 6 and the second half-bowl resonant cavity 7 are filled with the gas to be measured;

[0086] (2) The present invention generates four Fano resonances in the wavelength range of 500nm to 2000nm. The concentration of the gas to be measured can be obtained from the shift of any Fano resonance peak.

[0087] (3) The structural parameters of the first half-bowl resonator 6 and the second half-bowl resonator 7 affect the wavelength of the Fano resonance;

[0088] (4) When the outer diameter R1 of the fan ring of the first half-bowl resonator 6 and the second half-bowl resonator 7 increases, FR1, FR3 and FR4 will undergo blue shift, among which FR1 has the smallest blue shift amplitude and FR4 has the largest blue shift amplitude.

[0089] (5) When the inner diameter R2 of the fan ring of the first half-bowl resonator 6 and the second half-bowl resonator 7 increases, all four Fano resonances redshift and the transmittance of the resonance peaks decreases. Among them, FR1 has the smallest redshift amplitude and FR4 has the largest redshift amplitude.

[0090] (6) When the rectangular height h of the first half-bowl resonator 6 and the second half-bowl resonator 7 increases, all four Fano resonances undergo a blue shift, and the transmittance of the resonance peaks increases. Among them, FR1 has the smallest blue shift amplitude, and FR2 has the largest blue shift amplitude.

[0091] (7) The first half-bowl resonant cavity 6 and the second half-bowl resonant cavity 7 are both filled with the gas to be tested. When the refractive index n of the gas to be tested increases, all four Fano resonances are redshifted, with FR1 having the smallest redshift amplitude and FR4 having the largest redshift amplitude. Specific Implementation Example 3:

[0093] This invention provides a gas concentration detection device for waste battery dismantling, wherein the detection device is a symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling. Specific Implementation Example 4:

[0095] This invention provides a waste gas concentration detection device for waste battery dismantling, wherein the waste gas pressure detection device is based on a symmetrical split bowl-shaped waveguide gas concentration sensor for waste battery dismantling. Specific Implementation Example 5:

[0097] This invention provides a waste gas concentration detection device for use in a recycled organic resin composite profile equipment, wherein the detection device is a symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling. Specific Implementation Example 5:

[0099] A method for detecting gas concentration during waste battery dismantling, the method being based on the gas detection device as described in claim 1, characterized by comprising the following steps:

[0100] Both the first and second half-bowl resonant cavities are filled with the gas to be measured; four Fano resonances are generated in the wavelength range of 500nm to 2000nm, and the concentration of the gas to be measured can be obtained from the shift of any Fano resonance peak.

[0101] The structural parameters of the first and second half-bowl resonant cavities affect the wavelength of the Fano resonance.

[0102] When the outer diameter R1 of the fan ring of the first and second half-bowl resonant cavities increases, FR1, FR3, and FR4 undergo blue shift, with FR1 exhibiting the smallest blue shift amplitude and FR4 exhibiting the largest blue shift amplitude.

[0103] When the inner diameter R2 of the fan ring of the first and second half-bowl resonant cavities increases, all four Fano resonances undergo redshift, and the transmittance of the resonance peaks decreases. Among them, FR1 has the smallest redshift amplitude, and FR4 has the largest redshift amplitude.

[0104] When the rectangular height h of the first and second half-bowl resonators increases, all four Fano resonances undergo a blue shift, and the transmittance of the resonance peaks increases. Among them, FR1 has the smallest blue shift amplitude, and FR2 has the largest blue shift amplitude.

[0105] Both the first and second half-bowl resonant cavities are filled with the gas to be tested. When the refractive index n of the gas to be tested increases, all four Fano resonances undergo redshift, with FR1 exhibiting the smallest redshift amplitude and FR4 exhibiting the largest redshift amplitude. Specific Implementation Example Six:

[0107] A computer-readable storage medium having a computer program stored thereon, which is executed by a processor to implement a gas detection method for dismantling waste batteries. Specific Implementation Example 7:

[0109] A computer device includes a memory and a processor, the memory storing a computer program, and the processor executing the computer program to implement a gas detection method for dismantling waste batteries.

[0110] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or N embodiments or examples. Furthermore, those skilled in the art can combine and integrate the different embodiments or examples described in this specification and the features of different embodiments or examples without contradiction. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of the present invention, "N" means at least two, such as two, three, etc., unless otherwise explicitly specified. Any process or method described in the flowcharts or otherwise herein can be understood as representing a module, segment, or portion of code comprising one or more N executable instructions for implementing custom logical functions or processes, and the scope of preferred embodiments of the invention includes additional implementations in which functions may be performed not in the order shown or discussed, including substantially simultaneously or in reverse order according to the functions involved, as will be understood by those skilled in the art to which embodiments of the invention pertain. The logic and / or steps represented in the flowcharts or otherwise described herein, for example, can be considered as a ordered list of executable instructions for implementing logical functions, and can be embodied in any computer-readable medium for use by, or in conjunction with, an instruction execution system, apparatus, or device (such as a computer-based system, a processor-included system, or other system that can fetch and execute instructions from, an instruction execution system, apparatus, or device). For the purposes of this specification, "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transmit programs for use by, or in conjunction with, an instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of computer-readable media include the following: an electrical connection having one or N wires (electronic device), a portable computer disk drive (magnetic device), random access memory (RAM), read-only memory (ROM), erasable and editable read-only memory (EPROM or flash memory), fiber optic device, and portable optical disc read-only memory (CDROM).Furthermore, the computer-readable medium can even be paper or other suitable media on which the program can be printed, since the program can be obtained electronically, for example, by optically scanning the paper or other medium, followed by editing, interpreting, or otherwise processing as necessary, and then stored in a computer memory. It should be understood that various parts of the invention can be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, the N steps or methods can be implemented in software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, it can be implemented using any one or a combination of the following techniques known in the art: discrete logic circuits having logic gates for implementing logical functions on data signals, application-specific integrated circuits (ASICs) having suitable combinational logic gates, programmable gate arrays (PGAs), field-programmable gate arrays (FPGAs), etc.

[0111] Those skilled in the art will understand that all or part of the steps of the methods in the above embodiments can be implemented by a program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, it includes one or a combination of the steps of the method embodiments. Furthermore, the functional units in the various embodiments of the present invention can be integrated into a processing module, or each unit can exist physically separately, or two or more units can be integrated into a module. The integrated module can be implemented in hardware or as a software functional module. If the integrated module is implemented as a software functional module and sold or used as an independent product, it can also be stored in a computer-readable storage medium.

[0112] The above description is merely a preferred embodiment of a symmetrically split bowl-shaped waveguide gas concentration sensor derived from dismantled waste batteries. The protection scope of this symmetrically split bowl-shaped waveguide gas concentration sensor is not limited to the above embodiments; all technical solutions falling within this conceptual framework are within the protection scope of this invention. It should be noted that for those skilled in the art, any improvements and variations made without departing from the principles of this invention should also be considered within the protection scope of this invention.

Claims

1. A symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling, characterized in that: The sensor includes: a substrate layer, a metal layer, an air waveguide, a first metal baffle, a second metal baffle, a first semi-bowl-shaped resonant cavity, and a second semi-bowl-shaped resonant cavity; Based on a rectangular coordinate system formed by the x-axis, y-axis, and z-axis, in the xy plane: the geometric center of the air waveguide is O1, and the height of the air waveguide along the y-axis is 45nm; In the xy plane: dashed line a is a dashed line passing through O1 and perpendicular to the air waveguide, dashed line a is the axis of symmetry in the xy plane, and dashed line b is a dashed line passing through O1 and parallel to the air waveguide; In the xy plane: the geometric center O2 of the first metal baffle and the geometric center O3 of the second metal baffle are located on the dashed line b and are symmetrical about the dashed line a. The distance between O2 and O1 along the x-axis is 25nm, the distance between O3 and O1 along the x-axis is 25nm, the length of the first metal baffle and the second metal baffle along the x-axis is 5nm, and the height of the first metal baffle and the second metal baffle along the y-axis is 45nm. In the xy plane: the first half-bowl resonant cavity (6) is composed of a quarter-fan ring, a rectangle and a square. The center of the fan ring is O4. The distance between O4 and the dashed line a is 10nm. The distance between O4 and the dashed line b is 317.5nm. The outer diameter of the fan ring is R1 and the inner diameter is R2. The range of the outer diameter R1 of the fan ring is 245nm to 265nm. The range of the inner diameter R2 of the fan ring is 200nm to 220nm. The range of the ring width of the fan ring is 25nm to 65nm. The geometric center of the rectangle is O6. The distance between O6 and the dashed line a is 130nm. The distance between O6 and the dashed line b is 295nm. The length of the rectangle along the x-axis is 210nm. The range of the height h of the rectangle along the y-axis is 35nm to 75nm. The side length of the square is 45nm. The geometric center of the square is O8. The distance between O8 and the dashed line a is 32.5nm. The distance between O8 and the dashed line b is 55nm.

2. The sensor according to claim 1, characterized in that: In the xy plane: the second semi-bowl-shaped resonant cavity is composed of a quarter-sector ring, a rectangle, and a square. The center of the sector ring is O5, the distance between O5 and dashed line a is 10nm, and the distance between O5 and dashed line b is 317.5nm. The outer diameter of the sector ring is R1, and the inner diameter is R2. The outer diameter R1 ranges from 245nm to 265nm, and the inner diameter R2 ranges from 200nm to 220nm. The width of the sector ring ranges from 25nm to 65nm. The geometric center of the rectangle is O7, the distance between O7 and dashed line a is 130nm, and the distance between O7 and dashed line b is 295nm. The length of the rectangle along the x-axis is 210nm, and the height h of the rectangle along the y-axis ranges from 35nm to 75nm. The side length of the square is 45nm, and the geometric center of the square is O9, the distance between O9 and dashed line a is 32.5nm, and the distance between O9 and dashed line b is 55nm.

3. The sensor according to claim 2, characterized in that: The first and second semi-bowl resonant cavities are axially symmetrical about the dashed line a. The air waveguide is air, and it is divided into three segments by a first metal baffle and a second metal baffle.

4. The sensor according to claim 3, characterized in that: The base layer is selenium dioxide; The metal layer, the first metal baffle, and the second metal baffle are all made of gold.

5. A gas concentration detection device for waste battery dismantling, characterized in that: The detection device is based on a symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling as described in any one of claims 1-4.

6. A device for detecting the concentration of exhaust gas from the dismantling of waste batteries, characterized in that: The exhaust gas pressure detection device is based on a symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling as described in any one of claims 1-4.

7. A waste gas concentration detection device applied to a recycled organic resin composite profile manufacturing plant, characterized in that: The detection device is based on a symmetrical split-bowl-shaped waveguide gas concentration sensor for waste battery dismantling as described in any one of claims 1-4.

8. A method for detecting gas concentration during waste battery dismantling, the method being based on the gas concentration sensor as described in claim 1, characterized in that: Includes the following steps: Both the first and second half-bowl resonant cavities are filled with the gas to be measured; four Fano resonances are generated in the wavelength range of 500nm to 2000nm, and the concentration of the gas to be measured can be obtained from the shift of any Fano resonance peak. The structural parameters of the first and second half-bowl resonant cavities affect the wavelength of the Fano resonance. When the outer diameter R1 of the fan ring of the first and second half-bowl resonant cavities increases, FR1, FR3, and FR4 undergo blue shift, with FR1 exhibiting the smallest blue shift amplitude and FR4 exhibiting the largest blue shift amplitude. When the inner diameter R2 of the fan ring of the first and second half-bowl resonant cavities increases, all four Fano resonances undergo redshift, and the transmittance of the resonance peaks decreases. Among them, FR1 has the smallest redshift amplitude, and FR4 has the largest redshift amplitude. When the rectangular height h of the first and second half-bowl resonators increases, all four Fano resonances undergo a blue shift, and the transmittance of the resonance peaks increases. Among them, FR1 has the smallest blue shift amplitude, and FR2 has the largest blue shift amplitude. Both the first and second half-bowl resonant cavities are filled with the gas to be tested. When the refractive index n of the gas to be tested increases, all four Fano resonances undergo redshift, with FR1 exhibiting the smallest redshift amplitude and FR4 exhibiting the largest redshift amplitude.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that, The program is executed by the processor to implement the method as claimed in claim 8.

10. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that: The processor implements the method of claim 8 when executing the computer program.

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