Test apparatus for dfn packaged devices

Abstract

The application discloses a testing device for DFN packaged devices, which is characterized by the following technical scheme: a first piston and a second piston are arranged on the testing device, and a gas cavity is formed between the first piston and the second piston; a second spring is arranged between the second piston and the inner wall of the bottom of the connecting shell; a top plate is arranged above the connecting shell; a second supporting rod installed at the bottom of the top plate is fixedly connected with the first piston through the top wall of the connecting shell; the upper end of the second supporting rod is connected with the second piston, and the lower end of the probe is arranged inside the testing shell; a through hole is formed in each end of the supporting plate; the top plate is provided with a first connecting rod embedded in the through hole; a motor is arranged on one side of the fixing plate on the lower surface of the supporting plate; a second connecting rod arranged directly below the first connecting rod is fixedly connected with the output shaft of the motor; and a third connecting rod is rotatably connected with the lower end of the first connecting rod and the upper end of the second connecting rod respectively. The application can realize soft contact between the probe and the device, and can also adjust the position of the probe, thereby improving the applicability of the device.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device processing technology, specifically to a testing device for DFN packaged devices. Background Technology

[0002] As electronic products move towards miniaturization, large-scale IC and VLSI (very large-scale IC) applications in consumer electronics such as laptops, CPU circuits, micro mobile communication circuits (mobile phones, etc.), digital audio and video circuits, communication equipment, and digital cameras require semiconductor chips to be made smaller and thinner.

[0003] Among these components, DFN micro-devices and other chips play a crucial role. DFN / QFN is a cutting-edge electronic packaging technology. The DFN / QFN platform is versatile, allowing one or more semiconductor devices to be connected within a lead-free package. After DFN packaging, it needs to be tested; however, existing testing equipment often results in probes damaging the devices, leading to wasted resources. Summary of the Invention

[0004] The purpose of this invention is to provide a testing device for DFN packaged devices. This testing device can achieve soft contact between the probe and the device, effectively reducing the possibility of the probe damaging the device. It can also adjust the position of the probe to test devices of different thicknesses, thereby improving the applicability of the device.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is: a testing device for DFN packaged devices, comprising: a base, a plurality of test housings mounted on the top of the base, a hydraulic rod mounted on both sides of the base, and a support plate located above the test housings mounted on the top of the two hydraulic rods; On the side of the support plate opposite to the detection housing, there are several connecting housings with a first piston and a second piston inside. The first piston and the second piston are distributed on the upper and lower sides and form an air chamber between them. A second spring is provided between the second piston and the inner wall of the bottom of the connecting housing. A top plate is set above the connecting housing. A first support rod installed at the bottom of the top plate can pass through the top wall of the connecting housing and be fixedly connected to the first piston. The upper end of a second support rod is connected to the second piston, and the lower end of the rod with the probe is located inside the detection housing. Each end of the support plate has a through hole. The top plate has a first connecting rod for embedding in the through hole. A fixing plate is provided on the lower surface of the support plate. A motor is installed on one side of the fixing plate. A second connecting rod located directly below the first connecting rod is fixedly connected to the output shaft of the motor. The third connecting rod is rotatably connected to the lower end of the first connecting rod and the upper end of the second connecting rod. When the motor rotates, the second connecting rod can drive the first connecting rod to move along the through hole.

[0006] The following are further improvements to the above technical solution: 1. In the above scheme, a limiting block with an elastic sheet mounted on the lower surface is provided on each of the two opposing inner walls of the detection housing. The limiting block and the bottom inner wall of the detection housing form a receiving cavity for sliding installation of the substrate. A fixing groove for placing the device under test is opened on the top of the substrate. A sliding groove for mounting a slider is opened on each of the inner walls on both sides of the fixing groove. A first spring is provided between the slider and the inner wall of the sliding groove. When the device under test is placed in the fixing groove, the first spring is in a compressed state. 2. In the above scheme, a first connecting post is provided on the side of the second connecting rod opposite to the fixed plate, a second connecting post is provided at the end of the first connecting rod located below the support plate, and the two ends of the third connecting rod are respectively fitted onto the first connecting post and the second connecting post.

[0007] 3. In the above scheme, a support base is provided at the bottom of the base and at the corner.

[0008] 4. In the above scheme, the top surface of the slider is an arc-shaped surface.

[0009] 5. In the above scheme, the width of the connecting shell is greater than the width of the support plate.

[0010] 6. In the above scheme, the detection housing is a square housing.

[0011] 7. In the above scheme, the detection housings are arranged at equal intervals.

[0012] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art: 1. This invention provides a testing device for DFN packaged devices. A first piston and a second piston are positioned above and below each other within a connecting housing, forming an air chamber between them. A second spring is installed between the second piston and the inner wall of the bottom of the connecting housing. A first support rod, mounted at the bottom of a top plate, passes through the top wall of the connecting housing and is fixedly connected to the first piston. The upper end of a second support rod is connected to the second piston, and the lower end of the second support rod, which has a probe, is located inside the testing housing. Through the cooperation of the first piston, the second piston, and the spring, soft contact between the probe and the device can be achieved, effectively reducing the possibility of the probe damaging the device and lowering the probability of the probe causing damage to the device. Furthermore, the air chamber and the spring maintain a stable connection between the probe and the device, improving the positional accuracy of the probe and reducing errors caused by the probe not making contact with the device. The system improves the reliability of the test by adjusting the parameters. Furthermore, each end of the support plate has a through hole, and the top plate has a first connecting rod for embedding in the through hole. A fixing plate is provided on the lower surface of the support plate, and a motor is installed on one side of this fixing plate. A second connecting rod located directly below the first connecting rod is fixedly connected to the motor output shaft. A third connecting rod is rotatably connected to the lower end of the first connecting rod and the upper end of the second connecting rod, respectively. When the motor rotates, the second connecting rod can drive the first connecting rod to move along the through hole. By driving the first connecting rod to move along the through hole, the distance between the top plate and the connecting housing can be adjusted, thereby adjusting the positions of the first piston, the air chamber, and the second piston within the connecting housing. This allows for the adjustment of the probe position, enabling the testing of devices of different thicknesses and improving the applicability of the device.

[0013] 2. The present invention provides a testing device for DFN packaged devices. Each of the two inner walls of the testing housing has a limiting block on its lower surface with an elastic sheet mounted thereon. The limiting block and the bottom inner wall of the testing housing form a cavity for sliding mounting of a substrate. A fixing groove for placing the chip under test is located at the top of the substrate inside the testing housing. A sliding groove with a slider mounted on each of the inner walls of the fixing groove is provided on both sides of the fixing groove. A first spring is provided between the slider and the inner wall of the sliding groove. When the device under test is placed in the fixing groove, the first spring is compressed. Through the cooperation of the limiting block and the elastic sheet, the substrate with the device can be quickly fixed inside the testing housing. Through the cooperation of the slider and the spring, the device can also be quickly mounted on the substrate, greatly saving device mounting time and improving overall testing efficiency. Attached Figure Description

[0014] Appendix Figure 1 This is a schematic diagram of the overall structure of the testing device for DFN packaged devices according to the present invention; Appendix Figure 2 This is a partial three-dimensional view of the testing apparatus for DFN packaged devices according to the present invention; Appendix Figure 3 This is a schematic diagram of the inside of the testing housing of the testing device for DFN packaged devices according to the present invention; Appendix Figure 4 Appendix to this invention Figure 3 Enlarged view of point A; Appendix Figure 5 This is a partial structural cross-sectional view of the testing apparatus for DFN packaged devices according to the present invention.

[0015] In the attached diagrams: 1. Base; 2. Detection housing; 3. Support plate; 4. Hydraulic rod; 5. Limiting block; 6. Elastic sheet; 7. Receiving cavity; 8. Base plate; 9. Fixing groove; 10. Sliding groove; 11. Slider; 12. First spring; 13. Connecting housing; 141. First piston; 142. Second piston; 15. Air chamber; 16. Second spring; 17. Through hole; 18. Top plate; 19. First connecting rod; 20. Fixing plate; 21. Motor; 22. Second connecting rod; 23. Third connecting rod; 24. First support rod; 25. Second support rod; 26. Probe; 27. First connecting post; 28. Second connecting post; 29. ​​Support base. Detailed Implementation

[0016] In the description of this patent, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this patent based on the specific circumstances.

[0017] Example 1: A testing device for DFN packaged devices, comprising: a base 1, a plurality of test housings 2 mounted on the top of the base 1, a hydraulic rod 4 mounted on both sides of the base 1, and a support plate 3 located above the test housings 2 mounted on the top of the two hydraulic rods 4. On the side of the support plate 3 opposite to the detection housing 2, there are several connecting housings 13 with a first piston 141 and a second piston 142 inside. The first piston 141 and the second piston 142 are distributed on the upper and lower sides and form an air chamber 15 between them. A second spring 16 is provided between the second piston 142 and the bottom inner wall of the connecting housing 13. A top plate 18 is disposed above the connecting housing 13. A first support rod 24 installed at the bottom of the top plate 18 can pass through the top wall of the connecting housing 13 and be fixedly connected to the first piston 141. The upper end of a second support rod 25 is connected to the second piston 142, and the lower end of the probe 22 is located inside the detection housing 2. The support plate 3 has a through hole 17 at each end. The top plate 18 has a first connecting rod 19 for embedding in the through hole 17. A fixing plate 20 is provided on the lower surface of the support plate 3. A motor 21 is installed on one side of the fixing plate 20. A second connecting rod 22 located directly below the first connecting rod 19 is fixedly connected to the output shaft of the motor 21. A third connecting rod 23 is rotatably connected to the lower end of the first connecting rod 19 and the upper end of the second connecting rod 22 respectively. When the motor 21 rotates, the second connecting rod 22 can drive the first connecting rod 19 to move along the through hole 17.

[0018] The second connecting rod 22 is provided with a first connecting post 27 on the side opposite to the fixed plate 20. The end of the first connecting rod 19 located below the support plate 3 is provided with a second connecting post 28. The two ends of the third connecting rod 23 are respectively fitted onto the first connecting post 27 and the second connecting post 28.

[0019] When the thickness of the detection chip changes, the probe position needs to be adjusted. When the hydraulic rod 4 is not retracted, the motor 21 is turned on to drive the second connecting rod 22 to rotate. The third connecting rod 23 is rotatably connected to the first connecting rod 19 and the second connecting rod 22. As the second connecting rod 22 rotates, it will drive the first connecting rod 19 to descend along the through hole 17, which will drive the first piston 141 below the top plate 18 to descend, compressing the air in the air chamber 15, thereby pushing the second piston 142 to descend, driving the second support rod 25 to move down, so as to realize the downward movement of the probe 26 in the detection housing.

[0020] On the two opposite inner walls of the detection housing 2, a limiting block 5 with an elastic sheet 6 mounted on its lower surface is provided. The limiting block 5 and the bottom inner wall of the detection housing 2 form a receiving cavity 7 for sliding installation of the base plate 8. With the cooperation of the limiting block 5 and the elastic sheet 6, the device can be pre-installed on the substrate 8, and then the substrate 8 with the device installed can be quickly fixed in the detection housing 2, saving the installation time of the device in the detection housing 2. The top of the substrate 8 has a fixing groove 9 for placing the device under test. Each of the inner walls on both sides of the fixing groove 9 has a sliding groove 10 on which a slider 11 is installed. A first spring 12 is provided between the slider 11 and the inner wall of the sliding groove 10. When the device under test is placed in the fixing groove 9, the first spring 12 is in a compressed state. By cooperating with the first spring 12, the substrate 8 containing the device can be quickly installed and fixed in the detection housing 2, and the device can be quickly installed and fixed, which greatly saves the device installation time, improves the device installation efficiency, and thus improves the overall detection efficiency.

[0021] A support base 29 is provided at the bottom of the base 1 and at the corner, which improves the overall stability.

[0022] The top surface of the slider 11 is arc-shaped, which makes it easier to place the DFN device into the fixing slot 11 and improves the ease of installation.

[0023] The width of the connecting housing 13 is greater than the width of the support plate 3.

[0024] The aforementioned detection housing 2 is a square housing.

[0025] The aforementioned detection housing 2 is arranged at equal intervals.

[0026] Example 2: A testing device for DFN packaged devices, comprising: a base 1, a plurality of test housings 2 mounted on the top of the base 1, a hydraulic rod 4 mounted on both sides of the base 1, and a support plate 3 located above the test housings 2 mounted on the top of the two hydraulic rods 4. On the two opposite inner walls of the detection housing 2, a limiting block 5 with an elastic sheet 6 mounted on its lower surface is provided. The limiting block 5 and the bottom inner wall of the detection housing 2 form a receiving cavity 7 for sliding installation of the base plate 8. On the side of the support plate 3 opposite to the detection housing 2, there are several connecting housings 13 with a first piston 141 and a second piston 142 inside. The first piston 141 and the second piston 142 are distributed on the upper and lower sides and form an air chamber 15 between them. A second spring 16 is provided between the second piston 142 and the bottom inner wall of the connecting housing 13. A top plate 18 is disposed above the connecting housing 13. A first support rod 24 installed at the bottom of the top plate 18 can pass through the top wall of the connecting housing 13 and be fixedly connected to the first piston 141. The upper end of a second support rod 25 is connected to the second piston 142, and the lower end of the probe 22 is located inside the detection housing 2. By cooperating with the first piston 141, the second piston 142 and the spring 16, soft contact between the probe 22 and the device can be achieved, which effectively reduces the possibility of the probe damaging the device and lowers the probability of the probe causing damage to the device. In addition, the air chamber 15 and the spring 16 can increase the moving resistance of the second support rod 25, ensure stable contact between the probe 22 and the device, and improve the positional accuracy of the probe 22.

[0027] The support plate 3 has a through hole 17 at each end. The top plate 18 has a first connecting rod 19 for embedding in the through hole 17. A fixing plate 20 is provided on the lower surface of the support plate 3. A motor 21 is installed on one side of the fixing plate 20. A second connecting rod 22 located directly below the first connecting rod 19 is fixedly connected to the output shaft of the motor 21. A third connecting rod 23 is rotatably connected to the lower end of the first connecting rod 19 and the upper end of the second connecting rod 22 respectively. When the motor 21 rotates, the second connecting rod 22 can drive the first connecting rod 19 to move along the through hole 17.

[0028] The second connecting rod 22 is provided with a first connecting post 27 on the side opposite to the fixed plate 20. The end of the first connecting rod 19 located below the support plate 3 is provided with a second connecting post 28. The two ends of the third connecting rod 23 are respectively fitted onto the first connecting post 27 and the second connecting post 28.

[0029] By rotating the second connecting rod 22, the first connecting rod 19 can be moved along the through hole 17, thereby adjusting the distance between the top plate 18 and the connecting housing 13, and thus adjusting the positions of the first piston 141, the air chamber 15, and the second piston 142 within the connecting housing 13. This allows for the adjustment of the probe 22's position, enabling the detection of devices of different thicknesses and improving the device's applicability.

[0030] The top of the substrate 8 has a fixing groove 9 for placing the device under test. Each of the inner walls on both sides of the fixing groove 9 has a sliding groove 10 on which a slider 11 is installed. A first spring 12 is provided between the slider 11 and the inner wall of the sliding groove 10. When the device under test is placed in the fixing groove 9, the first spring 12 is in a compressed state. With the cooperation of the limiting block 5 and the elastic sheet 6, the substrate 8 on which the device is placed can be quickly installed and fixed in the detection housing. With the cooperation of the slider 11 and the first spring 12, the device can also be quickly installed and fixed on the substrate, which greatly saves the device installation time and improves the overall detection efficiency.

[0031] The top surface of the slider 11 is arc-shaped, which makes it easier to place the DFN device into the fixing slot 11 and improves the ease of installation.

[0032] The aforementioned detection housing 2 is a square housing.

[0033] The aforementioned detection housing 2 is arranged at equal intervals.

[0034] Working principle: First, the DFN device body to be tested is fixed in the fixing groove 9 of the substrate 8. The slider 11 and the first spring 12 on the substrate 8 can quickly fix the DFN device body. Then, the substrate 8 is inserted under the limiting block 5. The elastic sheet 6 can squeeze the substrate 8 to improve the firmness of the substrate 8 and ensure the normal operation of the subsequent test. Next, the hydraulic rod 4 is activated to lower the support plate 3, so that the probe 26 below the second support rod 25 contacts the conductive pad on the DFN device body for product identification. In the first stage of the descent of the hydraulic rod 4, the probe 26 does not contact the DFN device. The support plate 3 moves down as a whole until the probe 26 contacts the DFN device. In the second stage of descent, after the probe 26 contacts the DFN device, the hydraulic rod 4 continues to contract and the support plate 3 continues to descend. Due to the obstruction of the DFN device, the probe 26 cannot move down, causing the second support rod 25 to move relative to the support plate 3. The second piston 142 moves upward to compress the air in the air chamber 15. With the cooperation of the second piston 142 and the second spring 16, the movement of the second support rod 25 can be buffered, and the close contact between the probe 26 and the device can be maintained. When the thickness of the detection chip changes, the probe position needs to be adjusted. The motor 21 is turned on to drive the second connecting rod 22 to rotate. The third connecting rod 23 is rotatably connected to the first connecting rod 19 and the second connecting rod 22. As the second connecting rod 22 rotates, it will drive the first connecting rod 19 to descend along the through hole 17, which will drive the first piston 141 below the top plate 18 to descend, compressing the air in the air chamber 15, thereby pushing the second piston 142 to descend, driving the second support rod 25 to move down, so as to realize the downward movement of the probe 26 in the detection housing. By controlling the extension of the hydraulic rod 4, the support plate 3 is moved upward, causing the probe 26 to detach from the device.

[0035] When using the above-mentioned testing device for DFN packaged devices, the first piston and the second piston are located inside the connecting housing and are distributed on the top and bottom, forming an air cavity between them. A second spring is provided between the second piston and the bottom inner wall of the connecting housing. A second support rod installed at the bottom of the top plate can pass through the top wall of the connecting housing and be fixedly connected to the first piston. The upper end of the second support rod is connected to the second piston, and the lower end of the probe is located inside the detection housing. Through the cooperation of the first piston, the second piston and the spring, soft contact between the probe and the device can be achieved, which effectively reduces the possibility of the probe crushing the device and lowers the probability of the probe causing damage to the device. The air cavity and the spring can also maintain a stable connection between the probe and the device, improve the positional accuracy of the probe, reduce the possibility of misjudgment caused by the probe not contacting the device, and improve the reliability of the test. Furthermore, each end of the support plate has a through hole, and the top plate has a first connecting rod for embedding in the through hole. A fixing plate is provided on the lower surface of the support plate, and a motor is installed on one side of the fixing plate. A second connecting rod located directly below the first connecting rod is fixedly connected to the output shaft of the motor. A third connecting rod is rotatably connected to the lower end of the first connecting rod and the upper end of the second connecting rod, respectively. When the motor rotates, the second connecting rod can drive the first connecting rod to move along the through hole. By driving the first connecting rod to move along the through hole, the distance between the top plate and the connecting housing can be adjusted, thereby adjusting the position of the first piston, the air chamber, and the second piston in the connecting housing, realizing the adjustment of the probe position. This allows for the detection of devices of different thicknesses, improving the applicability of the device. Furthermore, each of the two inner walls opposite to the detection housing is provided with a limiting block on its lower surface with an elastic sheet. The limiting block and the bottom inner wall of the detection housing form a receiving cavity for sliding installation of the substrate. The fixing groove for placing the chip under test is located on the top of the substrate inside the detection housing. Each inner wall of the fixing groove has a sliding groove with a slider installed. A first spring is provided between the slider and the inner wall of the sliding groove. When the device under test is placed in the fixing groove, the first spring is in a compressed state. Through the cooperation of the limiting block and the elastic sheet, the substrate with the device can be quickly installed and fixed in the detection housing. Through the cooperation of the slider and the first spring, the device can also be quickly installed and fixed, which greatly saves the device installation time and improves the overall detection efficiency.

[0036] The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A testing apparatus for DFN packaged devices, comprising: The base (1) is characterized in that: a plurality of detection housings (2) are installed on the top of the base (1), a hydraulic rod (4) is installed on both sides of the base (1), and a support plate (3) located above the detection housing (2) is installed on the top of the two hydraulic rods (4); On the side of the support plate (3) opposite to the detection housing (2), there are several connecting housings (13) with a first piston (141) and a second piston (142) inside. The first piston (141) and the second piston (142) are distributed on the upper and lower sides and form an air chamber (15) between them. A second spring (16) is provided between the second piston (142) and the bottom inner wall of the connecting housing (13). A top plate (18) is set above the connecting housing (13). A first support rod (24) installed at the bottom of the top plate (18) can pass through the top wall of the connecting housing (13) and be fixedly connected to the first piston (141). The upper end of a second support rod (25) is connected to the second piston (142), and the lower end of the rod has a probe (26) located inside the detection housing (2). The support plate (3) has a through hole (17) at each end. The top plate (18) has a first connecting rod (19) for embedding in the through hole (17). A fixing plate (20) is provided on the lower surface of the support plate (3). A motor (21) is installed on one side of the fixing plate (20). The second connecting rod (22) located directly below the first connecting rod (19) is fixedly connected to the output shaft of the motor (21). The third connecting rod (23) is rotatably connected to the lower end of the first connecting rod (19) and the upper end of the second connecting rod (22). When the motor (21) starts, the second connecting rod (22) can drive the first connecting rod (19) to move along the through hole (17).

2. The testing apparatus for DFN packaged devices according to claim 1, characterized in that: On the two inner walls opposite to the detection housing (2), there are limiting blocks (5) with elastic sheets (6) mounted on the bottom surface. The limiting blocks (5) and the bottom inner wall of the detection housing (2) form a receiving cavity (7) for sliding installation of the substrate (8). The top of the substrate (8) has a fixing groove (9) for placing the device under test. The inner walls on both sides of the fixing groove (9) have a sliding groove (10) for mounting a slider (11). A first spring (12) is provided between the slider (11) and the inner wall of the sliding groove (10). When the device under test is placed in the fixing groove (9), the first spring (12) is in a compressed state.

3. The testing apparatus for DFN packaged devices according to claim 1 or 2, characterized in that: The second connecting rod (22) has a first connecting post (27) on the side opposite to the fixed plate (20), and the first connecting rod (19) has a second connecting post (28) at the end below the support plate (3). The two ends of the third connecting rod (23) are respectively fitted onto the first connecting post (27) and the second connecting post (28).

4. The testing apparatus for DFN packaged devices according to claim 3, characterized in that: A support base (29) is provided at the bottom of the base (1) and at the corner.

5. The testing apparatus for DFN packaged devices according to claim 1, characterized in that: The width of the connecting housing (13) is greater than the width of the support plate (3).

6. The testing apparatus for DFN packaged devices according to claim 1, characterized in that: The detection housing (2) is a square housing.

7. The testing apparatus for DFN packaged devices according to claim 1, characterized in that: The detection housing (2) is arranged at equal intervals.

Images