Vertical hwcvd apparatus

Abstract

The application discloses a vertical HWCVD device, comprising: a conveying mechanism, comprising a conveying assembly and a driving assembly, the conveying assembly having a transmission wheel, the axial direction of the transmission wheel being perpendicular to the conveying direction of the conveying assembly, the transmission wheel being fixedly connected with a transmission rod arranged in parallel with the axial direction of the transmission wheel, the driving assembly being provided with a transmission hole, the transmission rod being arranged in the transmission hole so that the conveying assembly can move along the axial direction of the transmission rod relative to the driving assembly, the driving assembly being used for driving the transmission rod to rotate so that the transmission wheel rotates around the axial direction of the transmission wheel and drives the conveying assembly to operate; a hot wire assembly, which is arranged in parallel with the space directly above the conveying assembly, and the arrangement direction of the space directly above the conveying assembly is parallel to the axial direction of the transmission rod; and a distance adjusting mechanism, which is drivingly connected with the conveying assembly and is used for driving the conveying assembly to move along the axial direction of the transmission rod.

Description

Technical Field

[0001] This invention relates to the field of vertical HWCVD equipment technology, and particularly to a vertical HWCVD equipment. Background Technology

[0002] Hot filament chemical vapor deposition (HWCVD) technology has strong advantages in terms of thin film preparation cost, compound semiconductors, and stability due to its process characteristics such as high process gas utilization, high growth rate, no plasma bombardment damage, good passivation effect, and suitability for large-area thin film growth.

[0003] In hot-wire chemical vapor deposition (HWCVD) equipment, a high voltage is applied to the hot-wire assembly to generate a high temperature. Under relatively low pressure, the process gas is activated by thermal energy, which enables the process gas to undergo thermal decomposition or chemical reaction, thereby forming the desired thin film on the substrate surface.

[0004] In vertical hot-wire chemical vapor deposition (HCVD) equipment, under the same conditions, different distances between the hot-wire assembly and the substrate, i.e., different process deposition distances, will lead to different film deposition rates and deposition quality. However, most vertical hot-wire chemical vapor deposition (HCVD) equipment currently cannot adjust the process deposition distance. Even if some vertical hot-wire chemical vapor deposition (HCVD) equipment can adjust the process deposition distance, it is impossible to adjust the process deposition distance while transporting the substrate. The machine must be stopped when adjusting the process deposition distance. Summary of the Invention

[0005] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a vertical HWCVD equipment that enables simultaneous transport of the substrate and adjustment of the process deposition distance.

[0006] A vertical HWCVD apparatus according to some embodiments of the present invention includes: a transfer mechanism comprising a transfer component and a drive component, the transfer component having a drive wheel, the axial direction of the drive wheel being perpendicular to the transport direction of the transfer component, a drive rod fixedly connected to the drive wheel and arranged parallel to the axis of the drive wheel, the drive component having a drive hole, the drive rod passing through the drive hole to enable the transfer component to move relative to the drive component along the axial direction of the drive rod, the drive component being used to drive the drive rod to rotate, thereby causing the drive wheel to rotate around the axis of the drive wheel and thus running the transfer component; a hot wire assembly arranged side by side with the space directly above the transfer component, the arrangement direction of the hot wire assembly and the space directly above the transfer component being parallel to the axial direction of the drive rod; and a distance adjustment mechanism drivenly connected to the transfer component and used to drive the transfer component to move along the axial direction of the drive rod.

[0007] The vertical HWCVD equipment according to embodiments of the present invention has at least the following beneficial effects:

[0008] In the vertical HWCVD apparatus of the present invention, when the carrier disk and the hot filament assembly are arranged side by side and opposite to each other, the distance adjustment mechanism can drive the transfer assembly to move axially along the transmission rod relative to the drive assembly, thereby changing the distance between the carrier disk placed on the transfer assembly and the hot filament assembly, and thus adjusting the process deposition distance. Furthermore, in the vertical HWCVD apparatus of the present invention, even while the drive assembly is driving the transfer assembly, the position of the transfer assembly can still be adjusted without requiring a shutdown operation.

[0009] According to some embodiments of the present invention, the transmission wheel is fixedly connected to a plurality of transmission rods, the drive assembly is provided with a plurality of transmission holes, and the plurality of transmission rods are correspondingly inserted through the plurality of transmission holes.

[0010] According to some embodiments of the present invention, an axial guide structure is provided between the transmission rod and the transmission hole, the axial guide structure being configured to: allow the transmission rod to move axially along the transmission hole, and restrict the transmission rod from rotating relative to the transmission hole.

[0011] According to some embodiments of the present invention, the transmission assembly includes a mounting frame, a transmission unit disposed on the mounting frame, and a transmission unit disposed on the mounting frame and pulsatorically connected to the transmission unit. The transmission unit includes the transmission wheel, which is rotatably disposed on the mounting frame.

[0012] According to some embodiments of the present invention, the transmission unit includes a plurality of rollers spaced apart, the spacing direction of the plurality of rollers being perpendicular to the axial direction of the transmission rod, and each roller being fixedly connected to a first transmission member;

[0013] The transmission unit further includes a transmission shaft rotatably mounted on the mounting bracket and a plurality of second transmission components spaced apart along the axial direction of the transmission shaft. The axial direction of the transmission shaft is parallel to the spacing direction of the plurality of rollers. The plurality of second transmission components are in one-to-one transmission engagement with the first transmission components on the plurality of rollers. The transmission wheel is in transmission engagement with one of the second transmission components.

[0014] According to some embodiments of the present invention, the vertical HWCVD equipment further includes a coating chamber, the hot wire assembly is disposed in the coating chamber, the coating chamber is provided with a first through hole communicating with its interior, the transmission assembly is disposed in the coating chamber and the transmission rod is movably passed through the first through hole, and the drive assembly is located outside the coating chamber and the transmission hole is provided for the transmission rod to pass through.

[0015] According to some embodiments of the present invention, a sealing ring is provided between the driving component and the outer wall of the coating cavity, and the sealing ring is arranged around the through hole.

[0016] According to some embodiments of the present invention, the distance adjustment mechanism includes a drive source and a drive shaft that is driven by the drive source to move axially, the drive shaft being arranged parallel to the transmission rod and connected to the transmission assembly.

[0017] According to some embodiments of the present invention, the vertical HWCVD equipment further includes a coating chamber, the hot wire assembly is disposed in the coating chamber, the coating chamber is provided with a second through hole communicating with its interior, the transfer assembly is disposed in the coating chamber, and the drive source is located outside the coating chamber and the drive shaft passes through the second through hole and is connected to the transfer assembly.

[0018] According to some embodiments of the present invention, the distance adjustment mechanism further includes a sealing bellows, which is sleeved on the drive shaft and located outside the coating cavity. One end of the sealing bellows is sealed to the drive shaft, and the other end is sealed to the outer wall of the coating cavity.

[0019] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0021] Figure 1 This is a schematic diagram of the structure of a vertical HWCVD device according to an embodiment of the present invention;

[0022] Figure 2 This is a partial structural schematic diagram of a vertical HWCVD device according to an embodiment of the present invention;

[0023] Figure 3 This is a schematic diagram of the transmission mechanism according to an embodiment of the present invention;

[0024] Figure 4 for Figure 3 A magnified view of one of the parts;

[0025] Figure 5 This is a partial structural schematic diagram of a transmission mechanism according to an embodiment of the present invention;

[0026] Figure 6 This is a partial exploded view of the transmission mechanism according to an embodiment of the present invention;

[0027] Figure 7 for Figure 3 Another enlarged view of a portion;

[0028] Figure 8 This is a schematic diagram of the distance adjustment mechanism according to an embodiment of the present invention.

[0029] Icon labels:

[0030] 10. Carrier disk;

[0031] 100. Transmission mechanism; 110. Transmission assembly; 111. Mounting bracket; 112. Transmission unit; 1121. Roller; 11211. First transmission component; 113. Transmission unit; 1131. Transmission wheel; 1132. Transmission rod; 1133. Transmission shaft; 1134. Second transmission component; 114. Guide wheel assembly; 1141. Guide wheel; 115. Upright pole; 116. Top plate; 120. Drive assembly; 121. Drive module; 122. Transmission module; 1221. Magnetofluid; 1222. Connecting flange; 1223. Transition flange; 12231. Assembly slot; 1224. Sealing ring; 1225. Sleeve; 123. Transmission belt;

[0032] 200. Distance adjustment mechanism; 210. Drive source; 220. Drive shaft; 230. Sealed bellows;

[0033] 300. Hot wire assembly;

[0034] 400. Coating cavity. Detailed Implementation

[0035] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0036] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0037] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0038] like Figure 1 , Figure 2 As shown, the present invention provides a vertical HWCVD equipment, including a transport mechanism 100, a distance adjustment mechanism 200, and a hot wire assembly 300. The transport mechanism 100 is used to transport a carrier disk 10 loaded with silicon wafers; the hot wire assembly 300 can generate high temperatures to activate process gases, causing thermal decomposition or chemical reactions in the process gases, thereby forming the desired thin film on the silicon wafer surface; the distance adjustment mechanism 200 can adjust the distance between the carrier disk 10 and the hot wire assembly 300.

[0039] Combination Figure 2 and Figure 3 The transmission mechanism 100 includes a transmission component 110 and a drive component 120, wherein the drive component 120 is used to drive the transmission component 110 to operate, and the transmission component 110 is used to carry and transport the carrier disk 10.

[0040] It should be noted that in this embodiment, the carrier disk 10 is used to load silicon wafers. In other embodiments, the carrier disk 10 can also be used to load other components that need to be coated.

[0041] Combination Figure 4 and Figure 5 The transmission assembly 110 has a drive wheel 1131, the axis of which is perpendicular to the transport direction of the transmission assembly 110. When the drive wheel 1131 rotates about its axis, the transmission assembly 110 runs.

[0042] It is understandable that the transmission wheel 1131, as one of the components of the transmission assembly 110, can make the entire transmission assembly 110 run when it is subjected to external force and rotates around its axis. When the transmission assembly 110 runs, it can drive the carrier disk 10 to move.

[0043] Furthermore, the transmission wheel 1131 is fixedly connected to a transmission rod 1132 that is parallel to the axis of the transmission wheel 1131. Thus, by driving the transmission rod 1132 to rotate, the transmission wheel 1131 can be driven to rotate around the axis of the transmission wheel 1131, thereby enabling the entire transmission assembly 110 to operate.

[0044] The drive assembly 120 is provided with a transmission hole, and the transmission rod 1132 passes through the transmission hole so that the transmission assembly 110 can move relative to the drive assembly 120 along the axial direction of the transmission rod 1132. The drive assembly 120 is used to drive the transmission rod 1132 to rotate so that the transmission wheel 1131 rotates around the axis of the transmission wheel 1131 and thus the transmission assembly 110 runs.

[0045] Understandably, the transmission rod 1132, passing through the transmission hole, enables the drive assembly 120 to connect with the transmission rod 1132, allowing the drive assembly 120 to drive the transmission rod 1132 to rotate. This, in turn, causes the transmission wheel 1131 to rotate around its axis, thereby enabling the entire transmission assembly 110 to operate. Furthermore, the transmission rod 1132's position within the transmission hole allows it to move axially relative to the hole, thus enabling the transmission assembly 110 to move axially relative to the drive assembly 120 along the transmission rod 1132.

[0046] like Figure 5 As shown, in some embodiments, the transmission wheel 1131 is fixedly connected to a plurality of transmission rods 1132, and the drive assembly 120 is provided with a plurality of transmission holes, through which the plurality of transmission rods 1132 are respectively inserted. In this way, the power provided by the drive assembly 120 can be transmitted to the transmission wheel 1131 via the plurality of transmission rods 1132, which can reduce the risk of the transmission rods 1132 being damaged.

[0047] In addition, by setting multiple transmission rods 1132 and having them correspondingly inserted into multiple transmission holes, and with both the cross-sections of the transmission rods 1132 and the transmission holes being circular, the problem of the transmission rods 1132 rotating relative to each other within the transmission holes and thus failing to transmit power can be avoided.

[0048] In some other embodiments, an axial guide structure is provided between the transmission rod 1132 and the transmission hole. The axial guide structure is configured to allow the transmission rod 1132 to move axially along the transmission hole and to restrict the transmission rod 1132 from rotating relative to the transmission hole. In this way, the problem of the transmission rod 1132 failing to transmit power due to relative rotation within the transmission hole can also be avoided.

[0049] For example, the cross-sectional shape of the transmission rod 1132 can be set as a triangle or a quadrilateral or other polygon, and the cross-sectional shape of the transmission hole is adapted to the cross-sectional shape of the transmission rod 1132.

[0050] like Figure 2 As shown, the space directly above the hot wire assembly 300 and the transmission assembly 110 are arranged side by side, and the arrangement direction of the space directly above the hot wire assembly 300 and the transmission assembly 110 is parallel to the axial direction of the transmission rod 1132.

[0051] It is understandable that when the transfer component 110 transports the carrier 10 loaded with silicon wafers, the carrier 10 will pass through the space directly above the transfer component 110 and be parallel to and opposite the hot wire component 300.

[0052] The distance adjustment mechanism 200 is drivenly connected to the transmission component 110 and is used to drive the transmission component 110 to move axially along the transmission rod 1132.

[0053] Understandably, when the carrier tray 10 and the hot filament assembly 300 are arranged side-by-side and opposite to each other, the distance adjustment mechanism 200 can drive the transfer assembly 110 to move axially along the transmission rod 1132 relative to the drive assembly 120, thereby changing the distance between the carrier tray 10 placed on the transfer assembly 110 and the hot filament assembly 300, and thus adjusting the process deposition distance. Furthermore, in the vertical HWCVD equipment of the present invention, even while the drive assembly 120 is driving the transfer assembly 110, the position of the transfer assembly 110 can still be adjusted without stopping the machine.

[0054] like Figure 4 As shown, in some embodiments, the transmission assembly 110 includes a mounting frame 111, a transmission unit 112 disposed on the mounting frame 111, and a transmission unit 113 disposed on the mounting frame 111 and connected to the transmission unit 112 in a transmission manner. The transmission unit 113 includes a transmission wheel 1131, which is rotatably disposed on the mounting frame 111.

[0055] Understandably, the transmission unit 113 can transmit the power of the drive assembly 120 to the transmission unit 112, thereby enabling the transmission unit 112 to operate. The transmission unit 112 is used to carry and transport the carrier plate 10. As one of the components of the transmission unit 113, the transmission wheel 1131 can rotate around its axis under external force, thereby enabling the entire transmission unit 113 to operate, which in turn drives the transmission unit 112 to operate. When the transmission unit 112 is running, it can move the carrier plate 10.

[0056] In some embodiments, the transmission unit 112 includes a plurality of rollers 1121 spaced apart, the spacing direction of the plurality of rollers 1121 being perpendicular to the axial direction of the transmission rod 1132.

[0057] It is understood that the drive assembly 120 can drive all the rollers 1121 to rotate through the transmission unit 113, thereby moving the carrier 10 placed on the rollers 1121. The spacing direction of the multiple rollers 1121 is perpendicular to the axis of the transmission rod 1132, so that the transport direction of the transmission unit 112 is perpendicular to the axis of the transmission rod 1132.

[0058] Furthermore, each roller 1121 is fixedly connected to a first transmission member 11211; the transmission unit 113 also includes a transmission shaft 1133 rotatably mounted on the mounting bracket 111, and a plurality of second transmission members 1134 spaced apart along the axial direction of the transmission shaft 1133. The axial direction of the transmission shaft 1133 is parallel to the spacing direction of the plurality of rollers 1121. The plurality of second transmission members 1134 are in one-to-one transmission engagement with the first transmission members 11211 on the plurality of rollers 1121, and the transmission wheel 1131 is in transmission engagement with one of the second transmission members 1134.

[0059] Specifically, the transmission wheel 1131, the first transmission member 11211 and the second transmission member 1134 are all bevel gears, and the transmission wheel 1131 meshes with one of the second transmission members 1134, and the second transmission member 1134 meshes with its corresponding first transmission member 11211.

[0060] More specifically, the axial direction of the second transmission member 1134 is perpendicular to the axial direction of the transmission wheel 1131, and the axial direction of the first transmission member 11211 is perpendicular to the axial direction of the second transmission member 1134. Furthermore, the first transmission member 11211 and the roller 1121 are coaxially arranged. Thus, when the transmission wheel 1131 rotates, it can drive the second transmission member 1134 to rotate, thereby driving the transmission shaft 1133 to rotate. This causes the transmission shaft 1133 to drive all the second transmission members 1134 to rotate, which in turn causes all the first transmission members 11211 to drive the roller 1121 to rotate.

[0061] Combination Figure 4 and Figure 5 In some embodiments, the drive assembly 120 includes a drive module 121 and a transmission module 122 that is driven and connected to the drive module 121. A transmission hole is formed on the transmission module 122. The drive module 121 is used to drive the transmission module 122 to rotate so as to drive the transmission rod 1132 to rotate.

[0062] Specifically, the drive module 121 is used to provide power to the transmission module 122, and the transmission module 122 is used to provide power to the transmission rod 1132, thereby providing power to the transmission unit 113.

[0063] Combination Figure 5 and Figure 6 The transmission module 122 includes a magnetorheological fluid 1221 that is driven to rotate by the drive module 121, and a connecting flange 1222 that is fixedly connected to the magnetorheological fluid 1221. The connecting flange 1222 is provided with a transmission hole.

[0064] It is understood that the drive module 121 is used to drive the magnetohydrodynamic 1221 to rotate, thereby driving the connecting flange 1222 to rotate. When the connecting flange 1222 rotates, it can drive the transmission wheel 1131 to rotate through the transmission rod 1132.

[0065] Furthermore, the drive module 121 is a motor, which transmits power to the magnetic fluid 1221 through the transmission belt 123, thereby causing the magnetic fluid 1221 to rotate.

[0066] Combination Figure 1 and Figure 2 The vertical HWCVD equipment also includes a coating chamber 400, and a hot wire assembly 300 is disposed inside the coating chamber 400.

[0067] It is understandable that the coating chamber 400 can provide a coating environment. After the process gas is filled into the coating chamber 400, it can be heated by the hot wire assembly 300 to undergo thermal decomposition or chemical reaction, thereby depositing a thin film.

[0068] Combination Figure 1 , Figure 4 , Figure 5 and Figure 6 The coating cavity 400 has a first through hole communicating with its interior. The transmission component 110 is disposed inside the coating cavity 400, and the transmission rod 1132 is movably inserted through the first through hole. The drive component 120 is located outside the coating cavity 400, and the transmission hole allows the transmission rod 1132 to pass through. In this way, the power of the drive component 120 outside the coating cavity 400 can be transmitted to the transmission component 110 inside the coating cavity 400. The drive component 120 located outside the coating cavity 400 does not need to withstand the high temperature environment inside the coating cavity 400, which helps to extend the service life of the drive component 120.

[0069] Specifically, the drive module 121, the transmission belt 123, and the magnetic fluid 1221 are all located outside the cavity. In this way, the drive module 121, the transmission belt 123, and the magnetic fluid 1221 do not need to withstand the high temperature environment inside the coating cavity 400, which is beneficial to extending their respective service life.

[0070] Furthermore, the transmission module 122 also includes a transition flange 1223, which has a mounting hole for the connecting flange 1222 to rotate. The transition flange 1223 is fixed on the outer wall of the coating cavity 400 and is positioned opposite to the first through hole on the coating cavity 400.

[0071] Specifically, the mounting hole penetrates the transition flange 1223, and the connecting flange 1222 is rotatably disposed in the mounting hole and is disposed opposite to the first through hole. The connecting flange 1222 can play a sealing role to a certain extent, reducing the risk of gas exchange between the outside and the inside of the coating cavity 400 through the first through hole.

[0072] Furthermore, a sealing ring 1224 is provided between the drive assembly 120 and the outer wall of the coating cavity 400. The sealing ring 1224 is arranged around the through hole, which can improve the sealing performance.

[0073] Specifically, the transition flange 1223 is provided with an assembly groove 12231 on the side near the coating cavity 400. A sealing ring 1224 is provided in the assembly groove 12231. The sealing ring 1224 is connected to the outer wall of the coating cavity 400, which can improve the sealing effect.

[0074] In some embodiments, the magnetic fluid 1221 is further fitted with a sleeve 1225 that is fixedly connected to the transition flange 1223, and the sleeve 1225 can protect the magnetic fluid 1221.

[0075] Combination Figure 3 and Figure 7 In some embodiments, the transmission assembly 110 further includes a guide wheel assembly 114 fixed to the mounting bracket 111 and located above the transmission unit 112.

[0076] Understandably, the guide wheel assembly 114 is used to limit and guide the top of the carrier 10, thereby reducing the risk of the carrier 10 tipping over.

[0077] Specifically, a vertical pole 115 is fixed on the mounting frame 111, a top plate 116 is fixed on the vertical pole 115, and a guide wheel assembly 114 is mounted on the top plate 116.

[0078] Furthermore, there are multiple guide wheel sets 114, and the spacing direction of the multiple guide wheel sets 114 is parallel to the transport direction of the transmission unit 112.

[0079] In some embodiments, the guide wheel assembly 114 includes two guide wheels 1141 spaced apart, the spacing direction of the two guide wheels 1141 being parallel to the axial direction of the transmission wheel 1131.

[0080] Understandably, the bottom of the carrier 10 can be supported by the transmission unit 112, and the top of the carrier 10 can be inserted between two guide wheels 1141, which limit and guide the movement.

[0081] Combination Figure 2 and Figure 8 In some embodiments, the distance adjustment mechanism 200 includes a drive source 210 and a drive shaft 220 that is driven by the drive source 210 to move axially. The drive shaft 220 is arranged parallel to the transmission rod 1132 and is connected to the transmission assembly 110.

[0082] The drive source 210 can be an electric lead screw, a pneumatic cylinder, or a hydraulic cylinder. The drive source 210 is used to drive the drive shaft 220 to move axially, thereby adjusting the process deposition distance.

[0083] Combination Figure 1 , Figure 2 and Figure 8 Furthermore, the coating cavity 400 is provided with a second through hole communicating with its interior. The transmission assembly 110 is disposed in the coating cavity 400, and the drive source 210 is located outside the coating cavity 400, with the drive shaft 220 passing through the second through hole and connected to the transmission assembly 110. In this way, the force of the drive source 210 outside the coating cavity 400 can be transmitted to the transmission assembly 110 inside the coating cavity 400 through the drive shaft 220. The drive source 210 located outside the coating cavity 400 does not need to withstand the high-temperature environment inside the coating cavity 400, which helps to extend the service life of the drive source 210.

[0084] Furthermore, the distance adjustment mechanism 200 also includes a sealing bellows 230, which is sleeved on the drive shaft 220 and located outside the coating cavity 400. One end of the sealing bellows 230 is sealed to the drive shaft 220, and the other end is sealed to the outer wall of the coating cavity 400.

[0085] Understandably, the sealing bellows 230 has a sealing function, which can prevent gas inside the coating cavity 400 from leaking through the second through hole. In addition, the sealing bellows 230 can expand and contract, so that it can still maintain a seal when the drive shaft 220 moves.

[0086] In the vertical HWCVD apparatus of the present invention, when the carrier disk 10 and the hot filament assembly 300 are arranged side by side and opposite to each other, the distance adjustment mechanism 200 can drive the transfer assembly 110 to move axially along the transmission rod 1132 relative to the drive assembly 120, thereby changing the distance between the carrier disk 10 placed on the transfer assembly 110 and the hot filament assembly 300, and thus adjusting the process deposition distance. Furthermore, in the vertical HWCVD apparatus of the present invention, even while the drive assembly 120 is driving the transfer assembly 110, the position of the transfer assembly 110 can still be adjusted without requiring a shutdown operation.

[0087] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0088] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A vertical HWCVD equipment, characterized in that, include: A transmission mechanism includes a transmission component and a drive component. The transmission component has a transmission wheel, the axis of which is perpendicular to the transport direction of the transmission component. A transmission rod is fixedly connected to the transmission wheel and is arranged parallel to the axis of the transmission wheel. The drive component has a transmission hole, and the transmission rod passes through the transmission hole to enable the transmission component to move relative to the drive component along the axis of the transmission rod. The drive component is used to drive the transmission rod to rotate, so that the transmission wheel rotates around the axis of the transmission wheel, thereby making the transmission component run. A hot wire assembly is arranged side by side with the space directly above the transmission assembly, and the arrangement direction of the hot wire assembly and the space directly above the transmission assembly is parallel to the axial direction of the transmission rod; A distance adjustment mechanism is drivenly connected to the transmission component and is used to drive the transmission component to move axially along the transmission rod.

2. The vertical HWCVD equipment according to claim 1, characterized in that, The transmission wheel is fixedly connected to a plurality of transmission rods, and the drive assembly is provided with a plurality of transmission holes, with the plurality of transmission rods correspondingly passing through the plurality of transmission holes.

3. The vertical HWCVD equipment according to claim 1 or 2, characterized in that, An axial guide structure is provided between the transmission rod and the transmission hole. The axial guide structure is configured to allow the transmission rod to move axially along the transmission hole and to restrict the transmission rod from rotating relative to the transmission hole.

4. The vertical HWCVD equipment according to claim 1, characterized in that, The transmission assembly includes a mounting frame, a transmission unit disposed on the mounting frame, and a transmission unit disposed on the mounting frame and pulsatorically connected to the transmission unit. The transmission unit includes the transmission wheel, which is rotatably disposed on the mounting frame.

5. The vertical HWCVD equipment according to claim 4, characterized in that, The transmission unit includes a plurality of rollers spaced apart, the spacing direction of the plurality of rollers being perpendicular to the axial direction of the transmission rod, and each roller being fixedly connected to a first transmission component; The transmission unit further includes a transmission shaft rotatably mounted on the mounting bracket and a plurality of second transmission components spaced apart along the axial direction of the transmission shaft. The axial direction of the transmission shaft is parallel to the spacing direction of the plurality of rollers. The plurality of second transmission components are in one-to-one transmission engagement with the first transmission components on the plurality of rollers. The transmission wheel is in transmission engagement with one of the second transmission components.

6. The vertical HWCVD equipment according to claim 1, characterized in that, It also includes a coating cavity, the hot wire assembly is disposed in the coating cavity, the coating cavity is provided with a first through hole communicating with its interior, the transmission assembly is disposed in the coating cavity and the transmission rod is movably passed through the first through hole, and the drive assembly is located outside the coating cavity and the transmission hole is provided for the transmission rod to pass through.

7. The vertical HWCVD equipment according to claim 6, characterized in that, A sealing ring is provided between the drive component and the outer wall of the coating cavity, and the sealing ring is arranged around the through hole.

8. The vertical HWCVD equipment according to claim 1, characterized in that, The distance adjustment mechanism includes a drive source and a drive shaft that moves axially driven by the drive source. The drive shaft is arranged parallel to the transmission rod and is connected to the transmission component.

9. The vertical HWCVD equipment according to claim 8, characterized in that, It also includes a coating cavity, the hot wire assembly is disposed in the coating cavity, the coating cavity is provided with a second through hole communicating with its interior, the transmission assembly is disposed in the coating cavity, the drive source is located outside the coating cavity and the drive shaft passes through the second through hole and is connected to the transmission assembly.

10. The vertical HWCVD equipment according to claim 9, characterized in that, The distance adjustment mechanism also includes a sealing bellows, which is sleeved on the drive shaft and located outside the coating cavity. One end of the sealing bellows is sealed to the drive shaft, and the other end is sealed to the outer wall of the coating cavity.

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