A manual regulating valve for semiconductor wet process and its assembly method

Abstract

The invention relates to a manual regulating valve for semiconductor wet process and an assembly method thereof, wherein the regulating valve comprises a valve seat with an axial valve port, a valve cover combined with the valve seat and having an adjusting rod group installed therein, a diaphragm valve plate for closing the axial valve port, and an adjusting wheel arranged on the valve cover. The diaphragm valve plate forms an axial cone aligned with the axial valve port below the valve head. The regulating wheel has a rotation mode and a stop mode. In the rotation mode, as the regulating wheel rotates, whenever the adjusting rod of the adjusting rod group is adjusted to drop or rise by a first distance, the adjusting rod of the adjusting rod group synchronously rises or drops by a second distance in the opposite direction. The ratio of the second distance to the first distance is between 0.8 and 0.95. Combined with the taper slope of the axial cone, the manual regulating valve has the effect that the number of rotations of the regulating wheel during adjustment is close to a linear relationship with the flow rate of the regulating valve, and the precise flow rate is stably supplied when it stops after adjustment.

Description

[0001] This invention is a divisional application, and the basis of the divisional application is the invention application with application number 202311275936.0, application date September 28, 2023, and invention name "Precision flow control valve and its assembly method". Technical Field

[0002] The present invention relates to the technical field of regulating valves, and in particular to a manual regulating valve used in semiconductor wet process and an assembling method thereof. Background Art

[0003] Flow control valves are commonly used industrial valves, mainly used to control the flow of fluids in pipelines. Compared with traditional manufacturing industries, the semiconductor manufacturing industry has higher requirements for flow precision. For example, semiconductor wet processes require the use of front-end wafer cleaning, coating, developing, etching and other equipment, and have stringent precision requirements (calculated in ML / min) for the addition and supply of liquids such as photoresist, electronic chemicals, and ultrapure water, and require stable supply. The key to whether the technical indicators of the equipment can be achieved lies in whether the valve setting accuracy and setting stability of the precision flow control valve used in the pipeline system during the equipment debugging and operation stages can meet the parameter requirements of the semiconductor manufacturing process. Therefore, precision flow control valves are important components of semiconductor production equipment.

[0004] The main components of the precision flow control valve include the valve body connected to the inlet and outlet pipes, the diaphragm valve disc in the valve body for adjusting the flow, the adjusting rod that drives the diaphragm valve disc to move up and down, and the actuator that drives the adjusting rod. The actuator is located on the valve body and can be a manually operated handwheel or handle, or an electric, hydraulic or pneumatic driving wheel body. By operating the adjusting rod, the diaphragm valve disc is moved up and down, thereby changing the flow rate of the fluid. The current technical difficulty is that even if the flow rate can be precisely adjusted to the diaphragm valve disc at a suitable supply flow value, the higher the precision of the flow value, the worse the supply stability; in the actual production process, the mechanical vibration of semiconductor production equipment, the flow oscillation of pipeline fluid, etc., will change the lifting position of the diaphragm valve disc, and the actual supply flow value cannot remain stable for a long time. In other words, the fluid flow just adjusted under precise control will gradually change during the production process, and the precision flow control valve is prone to leakage or seepage during the production process. At present, a feasible approach is to detect the flow value of the precision flow control valve in real time during the semiconductor production process. When the warning value is exceeded, a relatively high-frequency flow correction adjustment is performed. This requires more monitoring equipment and frequent use, resulting in high monitoring costs and increased energy consumption. In addition, under high-frequency correction adjustments, the durability and reliability of the precision flow control valve are reduced, and the sealing performance is also reduced. How to enable the precision flow control valve to adjust the flow value as before in the semiconductor production process to maintain a long-term, continuous supply of stable fluid flow so as to be suitable for semiconductor production equipment is a technical problem that needs to be solved.

[0005] Invention patent publication number CN105190142A discloses a flow control valve for a flow control device, which can be applied to the field of semiconductor manufacturing. The flow control valve includes a valve body having a valve chamber hole portion with an opening above a valve seat and a fluid inlet passage and a fluid outlet passage connected thereto; an inverted disc-shaped metal diaphragm valve body arranged oppositely above the valve seat and having its outer periphery fixed to the bottom surface of the valve chamber hole portion; a clamping screw threadedly inserted into the valve chamber hole portion and pressing and fixing the outer periphery of the metal diaphragm valve body; a diaphragm pressing piece is provided below the bottom wall of the front end portion through the clamping screw and inserted into the valve chamber hole portion, and a lower supporting cylinder having a rectangular cutout extending from the upper end of the side wall to the middle portion is provided oppositely and through the side wall; an upper supporting cylinder screwed to the upper end portion of the lower supporting cylinder to form a cylindrical supporting cylinder; and a clamping screw mounted on the bottom of the lower supporting cylinder. A disc spring supporting platform with a retaining portion on the wall; a disc spring carried on the disc spring supporting platform; a support frame which is horizontally arranged by inserting through the cutout of the lower supporting cylinder, has a disc spring supporting platform guide hole in the center for retaining the front end of the disc spring retaining portion, and is provided with bolt insertion holes at both ends; a lower supporting platform carried on the disc spring supporting platform guide hole of the support frame; a piezoelectric element inserted into the supporting cylinder above the lower supporting platform; a guide cylinder and a flange portion protruding from its lower end to both sides, so that the supporting cylinder is inserted into the guide cylinder in a manner that it can move in the upward and downward directions, and the flange portion is opposite to the two ends of the supporting frame, and is fixed to the guide body of the valve body together with the supporting frame by fixing bolts; and a positioning nut screwed on the upper end of the upper supporting cylinder, which pushes the supporting cylinder upward by the elongation of the piezoelectric element and separates it from the valve seat by the elastic force of the metal diaphragm valve body. However, the inverted disc-shaped metal diaphragm valve body used as the material of the valve head is too hard and prone to leakage when the valve is closed, and its inverted disc shape makes it difficult for the mechanical adjustment stroke to have a quasi-linear relationship with the flow rate. In addition, the relevant prior art believes that the flow control valve can have extremely few structural components, and can achieve a significant reduction in the manufacturing cost of the existing normally closed piezoelectric element driven metal diaphragm control valve and high-precision valve opening control, but there is a lack of technical inspiration to achieve the corresponding effect. According to the conventional technical knowledge in this field, the opening control accuracy of the flow control valve depends on the precise control of the piezoelectric element at the height position, and the information-based numerical control mode is an indispensable and necessary link in the precision control of the flow control valve opening, which is an inherent thinking.

[0006] The utility model patent CN218031473U discloses a semiconductor process equipment and a flow regulating valve thereof, wherein the flow regulating valve comprises a valve body, an adjusting rod and a sleeve, wherein a liquid inlet hole and a liquid outlet hole are formed on the valve body, wherein the liquid inlet hole comprises a guide section and a liquid inlet section connected to each other, wherein one end of the liquid inlet section penetrates through the surface of the valve body to form a liquid inlet, wherein one end of the liquid outlet hole is connected to the guide section, and the other end penetrates through the surface of the valve body to form a liquid outlet; wherein the adjusting rod comprises a guide portion and a telescopic rod; wherein the guide portion can reciprocate along the guide section to drive the telescopic rod to enter the guide section from the liquid inlet section or to exit from the guide section, wherein the cross-sectional size of the liquid inlet section is smaller than that of the guide section, wherein the sleeve is sleeved and fixed on the telescopic rod and has an outer diameter corresponding to the liquid inlet section and an inner diameter corresponding to the telescopic rod, wherein at least one axially extending liquid inlet notch is formed thereon, and the width of the liquid inlet notch gradually decreases along the direction close to the guide section. In the related prior art, the liquid inlet notch is set as slender as possible by a simple technical means that is easy to think of, so as to realize that the flow regulating valve can continuously adjust a small flow. However, there is no technical insight into how to stably supply tiny flows after regulation.

[0007] In summary, the precision flow control valve in the prior art has the technical problem that the mechanical flow control valve cannot stably supply fluid on the development path of flow precision, and there is an inherent thinking that the precision of the opening control of the electric control flow control valve can only be achieved by piezoelectric elements. Summary of the invention

[0008] The main purpose of the present invention is to provide a manual regulating valve and its assembly method for semiconductor wet process. The main improvement is to solve the technical problem that the flow precision of the regulating valve cannot be stably supplied; at the same time, it also breaks the inherent thinking of achieving the precision of the flow control valve opening by simple technical means such as setting a slender piezoelectric element or a liquid inlet.

[0009] The second main purpose of the present invention is to provide a production equipment for semiconductor wet process, which can solve the technical contradiction that the high adjustment accuracy of precise liquid supply in the production process of semiconductor wet process will lead to poor stability of continuous fluid supply in the production process.

[0010] The third main purpose of the present invention is to provide an assembly method of a manual regulating valve used in a semiconductor wet process, which has the effect of quickly assembling the regulating valve.

[0011] The main purpose of the present invention is achieved through the following technical solutions:

[0012] A manual regulating valve for semiconductor wet process and an assembly method thereof are provided, comprising:

[0013] A valve seat, wherein an annular opening communicating with the first flow channel and an axial valve opening communicating with the second flow channel are provided inside the valve seat, and the axial valve opening is located in the annular opening;

[0014] A valve cover is combined with the valve seat, an adjusting rod group is connected inside the valve cover, and the valve cover can provide a movable space for the adjusting rod group, and the adjusting rod group includes an adjusting advancing rod and an adjusting retreating rod which are related to each other;

[0015] A diaphragm valve plate is arranged at one end of the adjusting rod of the adjusting rod group, the diaphragm valve plate has a valve head located in the center, which is used to close the axial valve port, and an axial cone is formed below the valve head and is aligned with the axial valve port;

[0016] An adjusting wheel is arranged on the valve cover and connected to the adjusting feed rod of the adjusting rod group, and is used for adjusting the raising and lowering of the adjusting feed rod in the valve cover; the adjusting wheel has a rotation mode and a stop mode. In the rotation mode, as the adjusting wheel rotates, whenever the adjusting feed rod is adjusted to lower or rise a first distance, the adjusting retracting rod rises or falls a second distance in the opposite direction synchronously, and the ratio of the second distance to the first distance is between 0.8 and 0.95. Combined with the cone inclination of the axial cone, the relationship between the number of rotations of the adjusting wheel and the flow rate of the regulating valve is close to linear.

[0017] The implementation principle of this basic structure example is that, in the rotation mode of the regulating wheel, the regulating rod is adjusted to descend or ascend, and the regulating rod is synchronously ascended or descended in the opposite direction, and the distance of the reverse retraction movement of the corresponding regulating rod movement is 0.8 to 0.95 of the distance of the forward extension movement of the corresponding regulating rod movement, so that the flow regulation accuracy is increased to 5 to 20 times (the reciprocal of 1 minus 0.8 is 5, and the reciprocal of 1 minus 0.95 is 20) to achieve the flow precision of the regulating valve. Combined with the diaphragm valve plate having an axial cone that does not contact the valve seat during the flow regulation process, the cone inclination of the axial cone will make the opening of the valve head and the axial valve port and the height position of the valve head present a linear relationship during the valve head lifting process, so that the relationship between the number of rotations of the regulating wheel and the flow of the regulating valve is close to linear. By utilizing the stop mode of the regulating wheel, the flow supply is fixed after adjustment, and the external shock force that may originally come from the equipment or fluid flow to affect the flow stability of the regulating valve in the production process will not affect the flow stability. Therefore, the manual regulating valve for semiconductor wet process and its assembly method of the present invention are proposed.

[0018] In a preferred example, the present invention can be further configured as follows: the adjusting wheel has a synchronous rotating rod portion located at the axis center, which is inserted into the coaxial hole of the adjusting feed rod; a plurality of limit tooth buckles are provided on the lower edge of the wheel body of the adjusting wheel, and a plurality of limit tooth grooves are provided on the end face of the upper hole of the valve cover; the adjusting wheel is provided with a plurality of bayonet pins on the periphery of the synchronous rotating rod portion, and a rotation groove and a stop groove are provided on the inner wall of the upper hole of the valve cover; when the bayonet pin is engaged with the rotation groove, the limit tooth buckle is not combined with the limit tooth groove, and the adjusting wheel is in a rotation mode; when the bayonet pin is engaged with the stop groove, the limit tooth buckle is combined with the limit tooth groove, and the adjusting wheel is in a stop mode.

[0019] By adopting the preferred technical features of the above structure, the stop mode is implemented using the adjusting wheel. After the flow is precisely adjusted, the adjusting wheel can be mechanically made non-rotatable in the stop mode to effectively fix the relative height position of the adjusting rod in the valve cover.

[0020] In a preferred example, the present invention can be further configured such that the number of the annular arrangement of the limiting tooth grooves corresponds to the number of adjustment scales of one circle of the adjustment wheel.

[0021] By adopting the preferred technical features of the above structure, the rotation angle of the adjusting wheel can be calculated by utilizing the annular arrangement of the limiting teeth and grooves of the valve cover corresponding to the rotation scale of the adjusting wheel, wherein 360 degrees is one rotation of the adjusting wheel.

[0022] In a preferred example, the present invention can be further configured such that the operable value of the number of rotations of the adjusting wheel is between 10 and 50, and at least two of the operable numbers of rotations of the adjusting wheel are in a linear relationship with the flow rate of the regulating valve.

[0023] By adopting the preferred technical features of the above-mentioned structure, the numerical value can be operated by utilizing the appropriate number of rotations of the adjusting wheel, and a linear relationship between at least two of the rotations and the regulating valve flow is established. The number of rotations of the adjusting wheel and the scale of the rotation angle can be inferred as the valve flow at a specific number of rotations, so that high-precision flow regulation can be performed more easily.

[0024] In a preferred example, the present invention can be further configured as follows: the operable value of the number of rotations of the adjusting wheel is between 15 and 25; preferably, the ratio of the second distance to the first distance is between 0.88 and 0.92; in a preferred example, the valve seat forms an outer sloped opening around the axial valve opening.

[0025] By adopting the preferred technical features of the above-mentioned structure, the large scale teeth of the valve flow are determined by utilizing the operable numerical value of a more reasonable number of rotations of the adjusting wheel, and the rotation angle of the adjusting wheel can be used as the small scale teeth of the valve flow; and the ratio of the second distance to the first distance is close to and less than one. Under the same valve opening, when the ratio selected by the adjusting rod group is closer to one, the valve flow scale teeth are more refined, and the operable number of rotations of the adjusting wheel is greater.

[0026] In a preferred example, the present invention can be further configured as follows: the adjusting withdrawing rod is in the form of a screw rod and has a withdrawing rod anti-rotation portion, so that the adjusting withdrawing rod can be lifted and lowered relatively without being rotatable in the valve cover.

[0027] By adopting the preferred technical features of the above structure, using the anti-rotation part of the adjusting rod, when the adjusting rod is relatively non-rotatable and the adjusting rod is relatively rotatable, the screw connection between the two can form a synchronous but unequal distance one drop and one small rise or one rise and one small drop in the valve cover. Compared with the adjusting rod that does not rotate, one end of the adjusting rod is connected to the diaphragm valve plate, which can increase the durability of the diaphragm valve plate.

[0028] In a preferred example, the present invention can be further configured as follows: the adjusting feed rod is in the form of a hollow screw sleeve, having an external thread at a first pitch and an internal thread hole at a second pitch, the second pitch having a pitch difference slightly smaller than the first pitch, the external thread being used to threadably connect to the internal threaded portion of the valve cover, and the internal thread hole being used to threadably connect to the external threaded portion of the adjusting retracting rod; the external thread and the internal thread hole have the same thread direction, and the ratio of the second pitch to the first pitch is the same as the ratio of the second distance to the first distance; the adjusting feed rod is relatively rotatable and can be raised and lowered in the valve cover, and the change in the raising and lowering height of the adjusting feed rod is positively correlated with the number of rotations of the adjusting wheel.

[0029] By adopting the preferred technical features of the above-mentioned structure and utilizing the specific structure of the adjusting advance rod, one rotation of the adjusting wheel is equivalent to the adjusting advance rod descending or rising by a first pitch and the adjusting retracting rod synchronously rising or descending by a second pitch, thereby realizing proportional fine-tuning of the valve flow rate.

[0030] The present invention can be further configured in a preferred example that the manual regulating valve for semiconductor wet process and the assembly method thereof further include:

[0031] A support pressing block is anti-rotationally limited in the valve cover and is used to abut against the peripheral ring portion of the diaphragm valve plate and block the rotation of the regulating retracting rod;

[0032] The elastic member is arranged on the supporting pressing block and is used to provide the supporting pressing block with downward pressure on the peripheral ring portion of the diaphragm valve sheet and provide upward thrust for the regulating retracting rod.

[0033] By adopting the preferred technical features of the above-mentioned structure, the support pressure block is used to produce three functions of preventing the elastic member from deflecting, resisting the peripheral ring portion of the diaphragm valve plate, and guiding the non-rotatable adjustment rod during lifting and lowering, thereby reducing internal components and facilitating the assembly of the precision control valve; the elastic member simultaneously maintains an upward elastic force on the adjustment rod and a downward elastic force on the support pressure block to eliminate the clearance error of the threaded connection between the adjustment rod and the adjustment rod, thereby achieving a better precision control valve flow rate.

[0034] In a preferred example, the present invention may be further configured such that the support pressing block has a pressing block anti-rotation portion, so that the support pressing block is in a relatively non-rotatable and non-liftable limiting relationship within the valve cover.

[0035] By adopting the preferred technical features of the above structure, the anti-rotation portion of the support pressure block is utilized to match the longitudinal guide groove in the valve cover, so that the support pressure block cannot rotate relative to the valve cover, and the support pressure block has a withdrawal rod anti-rotation hole, so that the adjustment withdrawal rod cannot rotate relative to the support pressure block.

[0036] In a preferred example, the present invention can be further configured as follows: the support block also has a plurality of vent holes, one of which is aligned with the exhaust hole of the valve cover.

[0037] By adopting the preferred technical features of the above-mentioned structure and utilizing the multiple air vents of the support block, the installation of the support block in the valve cover has no angular directionality, and the support block always has one air vent aligned with the exhaust hole of the valve cover to balance the internal and external pressures of the inner cavity of the valve cover between the upper part of the regulating withdrawal rod and the diaphragm valve plate and the external air pressure, thereby eliminating the pressure difference in the inner cavity caused by the lifting and lowering of the regulating withdrawal rod.

[0038] In a preferred example, the present invention can be further configured as follows: the adjusting retracting rod has a retaining ring portion, one end of the elastic member applies force to the retaining ring portion, and the other end of the elastic member is limited to the annular groove of the supporting pressure block.

[0039] By adopting the preferred technical features of the above structure, the retaining ring portion of the adjusting retracting rod is utilized to receive the upward elastic force of the elastic member.

[0040] In a preferred example, the present invention can be further configured as follows: the adjusting advance rod has a straightening portion, the valve cover has a first straightening hole for spiral axial sliding of the straightening portion, and the valve cover also has a second straightening hole for axial sliding of the retaining ring portion without rotation, and the aperture of the second straightening hole is larger than the aperture of the first straightening hole, so that the bottom edge of the first straightening hole can block the retaining ring portion of the adjusting retreat rod from rising.

[0041] By adopting the preferred technical features of the above structure, the straightening part of the adjusting rod is located at the bottom, and the outer diameter of the straightening part is exactly equal to the first straightening hole of the valve cover, and the first straightening hole does not interfere with the rotation of the straightening part; the valve cover also has a second straightening hole with a larger aperture than the first straightening hole, for the axial sliding of the retaining ring part in the valve cover, and the second straightening hole may or may not interfere with the rotation of the retaining ring part. The aperture difference between the second straightening hole and the first straightening hole can prevent the retaining ring part of the adjusting rod from rising, so when the retaining ring part of the adjusting rod rises and touches the bottom edge of the first straightening hole of the valve cover, as the maximum rising stop point, the adjusting rod and the valve head of the diaphragm valve plate change in height synchronously, so the valve is at the maximum opening, and the length of the adjusting rod extending from the adjusting rod does not change as much as the rising height of the adjusting rod, at this time, the maximum adjustment distance between the retaining ring part and the straightening part; when the retaining ring part of the adjusting rod descends and causes the adjusting rod to touch the bottom edge of the first straightening hole of the valve cover, the adjusting rod and the diaphragm valve plate are in a synchronous height change, so the valve is at the maximum opening, and the length of the adjusting rod extending from the adjusting rod does not change as much as the rising height of the adjusting rod, and at this time, the maximum adjustment distance between the retaining ring part and the straightening part is reached ... The supporting pressure block or the valve head contacts the periphery of the axial valve port as the descent stop point, the valve is at the minimum opening, the length change of the adjusting retracting rod retracted to the adjusting advance rod is less than the descent height change of the adjusting advance rod, and the minimum adjustment distance is between the retaining ring part and the straightening part; the distance between the retaining ring part and the straightening part is adjustable and variable, when the adjustment distance between the retaining ring part and the straightening part is less than and cannot be adjusted, the adjusting retracting rod retracts to the adjusting advance rod at the maximum limit, that is, it serves as the maximum descent stop point of the adjusting retracting rod.

[0042] The second main purpose of the present invention is achieved through the following technical solution, which provides a production equipment for semiconductor wet process, including a manual regulating valve for semiconductor wet process with any practicable feature combination as described above and an assembly method thereof, which can meet the stability requirements of the supplied fluid in the semiconductor wet process while pursuing the precision of flow regulation. The precisely regulated flow rate has a close linear relationship with the number of rotations of the regulating wheel or / and the same linear relationship with a partial number of rotations.

[0043] The third main purpose of the present invention is achieved by the following technical solution: an assembly method of a manual regulating valve for semiconductor wet process and an assembly method thereof with any achievable feature combination as described above, comprising:

[0044] S1, linking the adjusting rod forward and the adjusting rod backward to form an adjusting rod group;

[0045] S2, setting the adjusting rod group into the valve cover, the adjusting advance rod of the adjusting rod group is connected to the axial center hole of the valve cover until the adjusting retreat rod is located at the maximum top dead center;

[0046] S3, disposing a diaphragm valve sheet at one end of the adjusting rod of the adjusting rod group;

[0047] S4, combining the valve cover to the valve seat;

[0048] S5. An adjusting wheel is arranged on the valve cover, wherein the adjusting wheel is connected to the adjusting feed rod of the adjusting rod group.

[0049] The implementation principle of this basic method example is to use a series of assembly steps S1-S5 to manufacture a manual regulating valve; in addition, the operation of step S2 can prevent the regulating advance rod from being separated from the regulating retreat rod when the regulating retreat rod is at the top dead center.

[0050] In a preferred example, the present invention can be further configured as follows: the assembly method also includes: S6, rotating the adjusting wheel and synchronously rotating the adjusting advance rod, the adjusting advance rod rotates relative to the valve cover and descends a first distance, and the adjusting retracting rod does not rotate relative to the adjusting advance rod and rises in the opposite direction a second distance; continuously rotating the adjusting wheel until the adjusting retracting rod is located at the bottom dead point; determining the number of rotations of the adjusting wheel in the process from the valve open state to the valve closed state.

[0051] By adopting the preferred technical features of the above method, the actual operable number of rotations of the adjusting wheel is determined during the assembly process using step S6, and the ideal operable number of rotations of the adjusting wheel can be preset in step S2. By comparison, when the actual number of operable rotations is close to and less than the ideal number of operable rotations, there will be no excessive adjustment of the opening to cause damage to the valve head caused by the axial valve port, and the damage to the valve head of the diaphragm valve plate when the valve is closed can be minimized, and the manual regulating valve and its diaphragm valve plate have better durability.

[0052] In a preferred example, the present invention can be further configured such that, in the initial valve opening stage of step S6, the downward extension length of the axial cone is sufficient to prevent the axial cone of the diaphragm valve plate from completely separating from the axial valve port of the valve seat.

[0053] By adopting the preferred technical features of the above method, the axial cone of the diaphragm valve plate does not completely separate from the axial valve port during the valve opening stage, thereby achieving a fluid drainage effect from valve opening to valve closing; while in the valve closing stage, the valve head of the diaphragm valve plate touches and presses the axial valve port, specifically, contacts the outer slope port.

[0054] In summary, the technical solution of the structure or method of the present invention includes at least one of the following technical effects that contribute to the prior art:

[0055] 1. Through the combination of adjusting the advancing rod and adjusting the retreating rod, the pitch of the flow control valve can be precisely adjusted in millimeters (the unit adjustment value is obtained by subtracting the pitch of the inner screw hole from the external thread pitch of the adjusting rod when the adjusting wheel rotates one circle, mm / 360 degrees), meeting the requirements of semiconductor wet process equipment for adjustment accuracy;

[0056] 2. Through the combination of the pitch ratio between the adjustment rod and the adjustment rod (0.8-0.95) and the adjustment wheel with a specific stop mode, the manual regulating valve is mechanically structured to achieve the stability of the fluid supply in the production process while pursuing precision;

[0057] 3. The manual regulating valve is easy to assemble through the assembly steps of the regulating rod group in the valve open state;

[0058] 4. Through the combination of the ring port and the axial valve port located in the center, there is no dead angle in the diaphragm and the inner cavity of the valve seat, which meets the requirement of no dead zone for fluid supply in semiconductor wet process;

[0059] 5. Through the outer slope formed on the periphery of the axial valve port, the valve head of the diaphragm valve disc and the axial valve port of the valve seat can be statically sealed. The outer slope serves as a raised waterline of the valve seat on the periphery of the axial valve port to ensure that the fluid will not leak out when the valve is closed;

[0060] 6. Dynamic sealing of the valve and valve seat. The valve seat is provided with a raised edge around the ring to ensure the pressure-fitting seal between the valve seat and the diaphragm valve disc. BRIEF DESCRIPTION OF THE DRAWINGS

[0061] Figure 1 A schematic diagram of a three-dimensional assembly of a manual regulating valve in some preferred embodiments of the present invention is shown;

[0062] Figure 2 A diagram showing the relationship between the number of rotations of a manual regulating valve during a test and the flow rate of the regulating valve in some preferred embodiments of the present invention;

[0063] Figure 3 The following are three-dimensional exploded schematic diagrams of manual regulating valves in some preferred embodiments of the present invention and partial enlarged diagrams of corresponding diaphragm valve plates;

[0064] Figure 4 A schematic cross-sectional view of a manual regulating valve in some preferred embodiments of the present invention is shown;

[0065] Figure 5 A three-dimensional schematic diagram of an adjusting and withdrawing rod used in a manual regulating valve in some preferred embodiments of the present invention is shown;

[0066] Figure 6 A schematic diagram showing the process steps of the assembly method of the manual regulating valve in some preferred embodiments of the present invention is shown;

[0067] Figure 7 A three-dimensional schematic diagram showing the association between the adjustment of the advancing rod and the adjustment of the retreating rod in step S1 of the assembly method in some preferred embodiments of the present invention;

[0068] Figure 8 A three-dimensional schematic diagram and a three-dimensional diagram from another perspective of setting the adjusting rod assembly to the valve cover in step S2 of the assembly method in some preferred embodiments of the present invention are shown;

[0069] Fig. 9 A three-dimensional schematic diagram and a three-dimensional diagram from another viewing angle of the step S3 of setting the diaphragm valve sheet in the assembly method in some preferred embodiments of the present invention are shown;

[0070] Fig.10 A three-dimensional schematic diagram of combining the valve cover with the valve seat in step S4 of the assembly method in some preferred embodiments of the present invention is shown;

[0071] Fig.11 A three-dimensional schematic diagram and a partial three-dimensional diagram from another viewing angle are shown showing the step S5 of setting the adjusting wheel on the valve cover in the assembly method in some preferred embodiments of the present invention.

[0072] Figure numerals: 10, valve seat; 11, first flow channel; 12, second flow channel; 13, ring mouth; 14, axial valve port; 15, outer slope mouth; 16, raised edge; 20, valve cover; 21, limit tooth groove; 22, rotation groove; 23, stop groove; 24, inner threaded portion; 25, exhaust hole; 26, first straightening hole; 27, second straightening hole; 30, diaphragm valve plate; 31, valve head; 32, axial cone; 33, peripheral ring portion; 34, soft membrane portion; 40, adjustment wheel; 41, synchronous rotating rod portion; 42, limit tooth buckle; 43, bayonet; 44, scale indicator label; 50, adjustment Section rod group; 51, adjusting feed rod; 51a, coaxial hole; 51b, external thread; 51c, internal thread hole; 51d, straightening part; 52, adjusting retract rod; 52a, retract rod anti-rotation part; 52b, external threaded part; 52c, retaining ring part; 52d, valve connecting end; 60, supporting pressure block; 61, pressure block anti-rotation part; 62, vent hole; 63, retract rod anti-rotation hole; 70, elastic member; 81, first combining sleeve; 82, second combining sleeve; 83, combining rod; 84, combining nut; 85, first end plug; 86, second end plug; 87, washer; 88, elastic pad; 90, base. Implementation

[0073] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments for understanding the inventive concept of the present invention, and cannot represent all the embodiments, nor are they interpreted as the only embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field on the premise of understanding the inventive concept of the present invention are within the scope of protection of the present invention.

[0074] It should be noted that if there are directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention, the directional indications are only used to explain the relative position relationship and movement of the components in a certain posture. If the specific posture changes, the directional indications will also change accordingly. In order to facilitate the understanding of the technical solution of the present invention, the manual regulating valve of the present invention is further described and explained below, but it is not limited to the protection scope of the present invention.

[0075] See also Figures 1 to 5 Some embodiments of the present invention first provide a manual regulating valve. Figure 1 A three-dimensional assembly diagram of a manual regulating valve is shown. Figure 2 Draw a graph showing the relationship between the number of rotations of the manual control valve during the test and the flow rate of the control valve. Figure 3 This is a three-dimensional exploded schematic diagram of a manual regulating valve. Figure 4 It is a cross-sectional diagram of a manual regulating valve. Figure 5 The diagram is a three-dimensional schematic diagram of the regulating rod used in the manual regulating valve. The regulating rod 52 is an important component of the regulating rod group 50. The regulating rod 52 and the regulating rod 51 together constitute the regulating rod group 50 of the present invention. A manual regulating valve comprises: a valve seat 10 providing a flow channel, a valve cover 20 providing a movable space for the regulating rod group 50, a diaphragm valve plate 30 as a valve switch, and an adjusting wheel 40 for adjusting the valve opening. Figure 2, the relationship between the number of rotations of the regulating wheel 40 and the flow rate of the regulating valve is close to linear. The manual regulating valve of the example of the present invention can predefine the operable number of rotations of the regulating wheel 40. When the upper limit of the number of rotations is exceeded (corresponding to the maximum upper dead point of the adjusting rod 52 of the regulating rod group 50 relative to the height position of the valve cover 20), the regulating rod group 50 will not collapse, that is, no additional upper dead point limit assembly is required. When the lower limit of the number of rotations is exceeded (corresponding to the maximum lower dead point of the adjusting rod 52 of the regulating rod group 50 relative to the height position of the valve cover 20), the diaphragm valve sheet 30 will not be excessively compressed and damaged by the valve seat 10. In a specific example, the operable number of rotations of the regulating wheel 40 is defined in 0 to 20 circles, and a relationship close to linear with the flow rate of the regulating valve is presented in 2 to 17 circles (the flow rate changes in 0 to 300 mL / min), and the same linear relationship as the flow rate of the regulating valve is presented in 7 to 12 circles (the flow rate changes in 100 to 250 mL / min), which meets the ML / min linear regulation level and is suitable for production and use in semiconductor wet processes. In a specific example, in the operable number of circles, each time the adjusting wheel 40 rotates one circle, in the height position relative to the valve cover 20, the adjusting rod 51 is adjusted to drop or rise by one millimeter (mm), and the adjusting rod 52 is adjusted to rise or drop by one millimeter (mm) from zero point synchronously in the opposite direction or other proportional adjustment relationships.

[0076] For valve seat 10, see Figure 1 , Figure 3 and Figure 4 ,in particular Figure 4 The valve seat 10 is provided with a ring port 13 communicating with the first flow channel 11 and an axial valve port 14 communicating with the second flow channel 12 (such as Figure 4 As shown), the axial valve port 14 is located in the annular port 13. In this example, the first flow channel 11 is a liquid inlet flow channel, and the valve outlet of the first flow channel 11 can be equipped with a first combining pipe sleeve 81 to be detachably and tightly connected to the liquid inlet pipe; the second flow channel 12 is a liquid outlet flow channel, and the valve outlet of the second flow channel 12 can be equipped with a second combining pipe sleeve 82 to be detachably and tightly connected to the liquid outlet pipe. After the fluid enters the first flow channel 11, it reaches the second flow channel 12 through the annular port 13 and the axial valve port 14, and is discharged from the valve outlet of the second flow channel 12. The opening of the diaphragm valve plate 30 on the axial valve port 14 is used to adjust the discharge flow value. In a preferred example, the valve seat 10 is formed with an outer slope port 15 (as shown in FIG. 1 ) on the periphery of the axial valve port 14. Figure 4 As shown in FIG. 1 ), it is advantageous to utilize the diaphragm valve disc 30 in the valve closed state to block the fluid conduction between the ring opening 13 and the axial valve opening 14 with a small valve closing force. The valve seat 10 may also be provided with a raised edge 16 (as shown in FIG. 1 ) on the outer edge of the ring opening 13. Figure 4 As shown), the peripheral ring portion 33 of the diaphragm valve plate 30 is limited and fixed.

[0077] For valve cover 20, see Figure 1 , Figure 3 and Figure 4 The valve cover 20 is combined with the valve seat 10. An adjusting rod group 50 is connected inside the valve cover 20. The valve cover 20 can provide a movable space for the adjusting rod group 50. The adjusting rod group 50 includes an adjusting advance rod 51 and an adjusting retreat rod 52 that are related to each other. The adjusting advance rod 51 moves downward or upward in the valve cover 20, and the associated part of the adjusting retreat rod 52 moves upward or downward in the adjusting advance rod 51 in the opposite direction. In this example, the valve cover 20 can be mainly divided into a cylindrical upper cavity and a square seat lower cavity. The upper cavity provides a first straightening hole 26 (such as Figure 4 As shown), to align the downward and upward movement of the adjustment feed rod 51; the lower cavity provides a second alignment hole 27 (as shown Figure 4 As shown in the figure, the adjusting rod 52 is straightened to align the descending and ascending movement of the adjusting rod 52, and the retaining ring portion 52c of the adjusting rod 52 cannot enter the first straightening hole 26. The material of the valve cover 20, the first combined sleeve 81 and / or the second combined sleeve 82 can be PVDF (polyvinylidene fluoride resin), the material of the adjusting rod 51 can be PEEK (polyetheretherketone), and the material of the adjusting rod 52 can be PVDF, wherein PVDF has good hardness and wear resistance.

[0078] For diaphragm valve disc 30, see Figure 1 , Figure 3 and Figure 4 The diaphragm valve disc 30 is arranged at one end of the adjusting rod 52 of the adjusting rod group 50, and the diaphragm valve disc 30 has a valve head 31 located in the center, a peripheral ring portion 33 located at the periphery, and a soft membrane portion 34 (such as Fig. 9 As shown in the figure, the soft membrane portion 34 is relatively soft and can be deformed with the lifting and lowering movement of the valve head 31, and can withstand a lifting and lowering height of more than 1.0 mm. The valve head 31 is used to close the axial valve port 14, and an axial cone 32 is formed below the valve head 31 to align with the axial valve port 14. The axial cone 32 improves the fluid turbulence defect at the axial valve port 14. The setting of the axial cone 32 can play the role of a clean chamber, which is suitable for the cleanliness requirements of semiconductor wet process regulating valves. The material of the diaphragm valve plate 30 can be PTFE (polytetrafluoroethylene).

[0079] For adjusting wheel 40, see Figure 1 , Figure 3 and Figure 4The adjusting wheel 40 is arranged on the valve cover 20 and connected to the adjusting feed rod 51 of the adjusting rod group 50, and is used to adjust the raising and lowering of the adjusting feed rod 51 in the valve cover 20; the adjusting wheel 40 has a rotation mode and a stop mode. In the rotation mode, as the adjusting wheel 40 rotates, whenever the adjusting feed rod 51 is adjusted to lower or rise a first distance relative to the valve cover 20, the adjusting retracting rod 52 synchronously and reversely rises or falls a second distance relative to the adjusting feed rod 51, and the ratio of the second distance to the first distance is between 0.8 and 0.95, combined with the cone inclination of the axial cone 32. In this example, taking the first distance of 1.0 mm as an example, the ratio of the second distance to the first distance is 0.9, that is, the adjusting wheel 40 rotates one circle in the rotation mode, the adjusting advance rod 51 is adjusted to drop or rise the first distance (for example, 1.0 mm) relative to the valve cover 20, and the adjusting retracting rod 52 is synchronously reversely raised or lowered by 0.9 times the first distance (as the second distance, for example, 0.9 mm) relative to the adjusting advance rod 51, so the adjusting retracting rod 52 is adjusted to drop or rise 0.1 times the first distance (specifically 0.1 mm) relative to the valve cover 20, and synchronously the valve head 31 is also dropped or raised 0.1 times the first distance (0.1 mm). In this example, the adjusting wheel 40 is a hand wheel, but without limitation, the adjusting wheel 40 can be an electric wheel, or a hydraulic or pneumatic drive wheel body.

[0080] A specific implementation principle of the above-mentioned structural example is that if the valve opening is expected to be reduced, the adjusting wheel 40 is first placed in the rotation mode, and the adjusting wheel 40 is rotated clockwise. The adjusting advance rod 51 is adjusted to be lowered relative to the valve cover 20, and the adjusting retracting rod 52 is synchronously raised in the opposite direction relative to the adjusting advance rod 51. The distance of the reverse retraction movement of the corresponding adjusting retracting rod 52 is 0.8 to 0.95 of the distance of the forward extension movement of the corresponding adjusting advance rod 51. The adjusting retracting rod 52 is still slightly lowered in overall height relative to the valve cover 20, which is approximately 0.2 to 0.05 times the lowering amplitude of the adjusting advance rod 51. That is, the flow regulation accuracy is improved to 5 to 20 times (the reciprocal of 1 minus 0.8 is 5, and the reciprocal of 1 minus 0.95 is 20) to achieve flow precision of the regulating valve, and the increase in valve opening is the opposite manifestation under the same mechanism. In addition, the diaphragm valve disc 30 has an axial cone 32 that does not contact the valve seat 10 during the flow regulation process. The cone slope of the axial cone 32 allows the opening of the valve head 31 and the axial valve port 14 and the height position of the valve head 31 to present a linear relationship of more circles during the lifting and lowering of the valve head 31, so that the relationship between the number of rotations of the regulating wheel 40 and the flow of the regulating valve is close to linear. And by using the stop mode of the regulating wheel 40, the flow supply is fixed after regulation, and the external shock force that may originally come from the equipment or fluid flow to affect the flow stability of the regulating valve in the production process will not affect the flow stability.

[0081] See also Figure 3 , Figure 4 and Figure 5 , a specific technical means for realizing "the adjusting rod 52 rises or falls a second distance synchronously and reversely relative to the adjusting rod 51, and the ratio of the second distance to the first distance is between 0.8 and 0.95". In this example, Figure 5 As shown, the adjusting rod 52 is in the form of a screw, and has a rod anti-rotation portion 52a (specifically an external hexagon), an external threaded portion 52b for threading the adjusting rod 51, and a retaining ring portion 52c located between the rod anti-rotation portion 52a and the external threaded portion 52b. The adjusting rod 52 is also formed as a valve connecting end 52d at one end of the rod anti-rotation portion 52a for connecting the valve head 31 of the diaphragm valve plate 30. The rod anti-rotation portion 52a is engaged with the rod anti-rotation hole 63 (as shown in FIG. 1 ) of the support block 60. Figure 3 and Fig. 9 As shown, specifically, an inner hexagonal hole), the support pressing block 60 is non-rotatable relative to the valve cover 20, or the anti-rotation portion 52a of the adjusting retracting rod is engaged with the non-rotatable part of the valve cover 20, or the retaining ring portion 52c of the adjusting retracting rod 52 is non-rotatably guided and slid in the second straightening hole 27 of the valve cover 20, any of the above three methods can make the adjusting retracting rod 52 relatively non-rotatable and movable in the valve cover 20. By utilizing the anti-rotation portion 52a of the adjusting retracting rod 52, for example, specifically the engagement of an outer hexagon and an inner hexagon, the adjusting retracting rod 52 is relatively non-rotatable in the valve cover 20, but can be moved in a lifting and lowering manner, while the adjusting advance rod 51 is relatively rotatable and can also be moved in a lifting and lowering manner, and the screw connection relationship between the adjusting advance rod 51 and the adjusting retracting rod 52 can form a synchronous but non-equal distance movement change of one drop and a small rise or one rise and a small drop in the valve cover 20. One end of the adjusting retracting rod 52 , which does not rotate relative to the adjusting advancing rod 51 , is connected to the diaphragm valve plate 30 , which can increase the durability of the diaphragm valve plate 30 .

[0082] In addition, see Figure 3 , Figure 4 and Figure 7 The adjusting rod 51 is in the form of a hollow screw sleeve, having an external thread 51b at a first pitch and an internal thread hole 51c at a second pitch (such as Figure 4As shown in FIG. 1 ), the adjusting rod 51 also has a co-rotating shaft hole 51a (specifically an inner hexagonal hole) at one end and a straightening portion 51d at the other end. The co-rotating shaft hole 51a is limited by the synchronous rotating rod portion 41 (specifically an outer hexagonal rod body) of the adjusting wheel 40 to achieve synchronous rotation of the adjusting wheel 40 and the adjusting rod 51. On the one hand, the straightening portion 51d slides in the first straightening hole 26 of the valve cover 20 except for most of the time when the valve is closed, and the retaining ring portion 52c of the adjusting rod 52 always slides in the second straightening hole 27 (as shown in FIG. 1 ) of the valve cover 20. Figure 4 On the other hand, the second thread pitch has a thread pitch difference slightly smaller than the first thread pitch. In a specific but non-limiting example, the first thread pitch is 1.0 mm and the second thread pitch is 0.9 mm. The external thread 51b is used to thread the internal threaded portion 24 of the valve cover 20 (as shown in FIG. Figure 4 As shown in the figure, the inner screw hole 51c is used to screw the outer screw connection part 52b of the adjusting back rod 52; the outer screw thread 51b and the inner screw hole 51c have the same screw direction, for example, when viewed from the top of the regulating valve, the second screw pitch rotates downward in the clockwise direction, and the ratio of the second screw pitch to the first screw pitch is the same as the ratio of the second distance to the first distance; the adjusting feed rod 51 is relatively rotatable and moves up and down in the valve cover 20, and the change in the height of the adjusting feed rod 51 is positively correlated with the number of rotations of the adjusting wheel 40. With the specific structure of the adjusting feed rod 51, one clockwise rotation of the adjusting wheel 40 is equivalent to the adjusting feed rod 51 moving down by a first screw pitch, and synchronously the adjusting back rod 52 rises by a second screw pitch relative to the adjusting feed rod 51, and the adjusting back rod 52 moves down relative to the valve cover 20 by the difference between the first screw pitch and the second screw pitch, thereby realizing proportional fine-tuning valve flow regulation. Similarly, one counterclockwise rotation of the adjusting wheel 40 is equivalent to the adjusting advance rod 51 rising by a first pitch, and synchronously the adjusting retreat rod 52 descends by a second pitch relative to the adjusting advance rod 51, and the rising movement of the adjusting retreat rod 52 relative to the valve cover 20 is the difference between the first pitch and the second pitch.

[0083] In a preferred example, the operable value of the number of rotations of the adjusting wheel 40 is between 10 and 50, and at least two of the operable number of rotations of the adjusting wheel 40 are in a linear relationship with the flow rate of the regulating valve. By using the operable value of the appropriate number of rotations of the adjusting wheel 40, a linear relationship is established between at least two of the rotations and the flow rate of the regulating valve, and the scale of the number of rotations and the rotation angle of the adjusting wheel 40 can be inferred as the valve flow rate at a specific number of rotations, so that high-precision flow regulation can be performed more easily. Outside the upper limit of the operable value of the number of rotations of the adjusting wheel 40 from closed to open, the adjusting rod 51 of the adjusting rod group 50 has better anti-slip protection, and outside the lower limit of the operable value of the number of rotations of the adjusting wheel 40 from open to closed, the valve head 31 of the diaphragm valve plate 30 has better anti-pressure loss protection. The principle of the protection mechanism for the operable upper limit of the number of rotations of the adjusting wheel 40 from closed to open is that, at the height position of the valve cover 20, the upward movement of the adjusting advance rod 51 will inevitably drive the upward movement of the adjusting retreat rod 52, even if the upward amplitude of the adjusting retreat rod 52 is small, when the retaining ring portion 52c of the adjusting retreat rod 52 contacts the upper edge of the second straightening hole 27 of the valve cover 20, the adjusting retreat rod 52 can no longer be moved upward, and naturally the adjusting advance rod 51 cannot move upward either, thereby generating anti-detachment protection for the adjusting advance rod 51, and thereby defining the maximum operable upper limit of the adjusting wheel 40. The protection mechanism principle of the lower limit of the operable numerical value of the number of rotations of the adjusting wheel 40 from opening to closing is that, at the height position of the valve cover 20, the downward movement of the adjusting advance rod 51 will inevitably drive the outer threaded portion 52b of the adjusting retreat rod 52 to retract toward the inner threaded hole 51c of the adjusting advance rod 51 until the retraction limit state, usually the retaining ring portion 52c of the adjusting retreat rod 52 and the straightening portion 51d of the adjusting advance rod 51 are close to each other and contact each other. At this time, the outer threaded portion 52b of the adjusting retreat rod 52 has no space or length to retract into the inner threaded hole 51c, and the adjusting retreat rod 52 can no longer be moved downward, so that the valve head 31 of the diaphragm valve disc 30 is not excessively damaged by the axial valve port 14 of the valve seat 10, thereby defining the lower limit of the maximum operable numerical value of the adjusting wheel 40. The above upper and lower limits of the maximum operable numerical values ​​of the adjusting wheel 40 can be pre-defined during the assembly process (to be described in detail later).

[0084] In a more preferred example, the operable value of the number of rotations of the adjusting wheel 40 is between 15 and 25; preferably, the ratio of the second distance to the first distance is between 0.88 and 0.92. The operable value of a more reasonable number of rotations of the adjusting wheel 40 is used to determine the large scale teeth of the valve flow, and the rotation angle of the adjusting wheel 40 can be used as the small scale teeth of the valve flow; and the ratio of the second distance to the first distance is close to and less than one. Under the same valve opening, when the ratio selected by the adjusting rod group 50 is closer to one, the valve flow scale teeth are more refined, and the operable number of rotations of the adjusting wheel 40 is greater. The top surface of the adjusting wheel 40 can be attached with a scale indication label 44 (such as Figure 3 as shown).

[0085] Regarding a specific technical means for the adjusting wheel 40 to realize the rotation mode and the stop mode, refer to Figure 3 , Figure 4 and Fig.11 In addition to the adjusting wheel 40 having a synchronous rotating rod portion 41 located at the axis and inserted into the coaxial hole 51a of the adjusting feed rod 51, the lower edge of the wheel body of the adjusting wheel 40 is provided with a plurality of limit teeth 42 (such as Figure 4 and Fig.11 As shown in FIG. 1 ), the upper hole end surface of the valve cover 20 is provided with a plurality of limit tooth grooves 21. The regulating wheel 40 is provided with a plurality of bayonet pins 43 on the periphery of the synchronous rotating rod portion 41, and the inner wall of the upper hole of the valve cover 20 is provided with a rotation groove 22 and a stop groove 23 (as shown in FIG. Figure 4 As shown); when the bayonet 43 is engaged with the rotation groove 22, the limit tooth buckle 42 is not combined with the limit tooth groove 21, and the adjusting wheel 40 is in the rotation mode; the adjusting wheel 40 can be used to push the valve cover 20, when the bayonet 43 is engaged with the stop groove 23, the limit tooth buckle 42 is combined with the limit tooth groove 21, and the adjusting wheel 40 is in the stop mode. Therefore, after the flow is precisely adjusted, it can be mechanically adjusted to the stop mode, so that the adjusting wheel 40 cannot rotate, so as to effectively fix the relative height position of the adjusting advance rod 51 in the valve cover 20. The height of the adjusting advance rod 51 in the valve cover 20 is fixed, and naturally the height of the adjusting retreat rod 52 in the valve cover 20 is also fixed. The height of the adjusting retreat rod 52 in the valve cover 20 is fixed, and naturally the height of the valve head 31 of the diaphragm valve disc 30 in the valve seat 10 is also fixed. In the rotation mode, the adjusting wheel 40 can be kept at a first height; in the stop mode, the adjusting wheel 40 can be kept at a second height, and the first height can be higher than the second height. The material of the bayonet 43 can be PVDF (polyvinylidene fluoride resin). The upper edge of the rotation groove 22 can be flat to prevent the bayonet 43 from falling out; the upper edge of the stop groove 23 can have an inclination to facilitate the movement of the bayonet 43 from the stop groove 23 to the rotation groove 22.

[0086] In a preferred example, the number of the annular arrangement of the limiting tooth grooves 21 corresponds to the number of adjustment scales of one circle of the adjusting wheel 40. Since the annular arrangement of the limiting tooth grooves 21 of the valve cover 20 can correspond to the rotation scale of the adjusting wheel 40, the rotation angle of the adjusting wheel 40 can be calculated, where 360 ​​degrees is one circle of the adjusting wheel 40. The number of the annular arrangement of the limiting tooth grooves 21 can be twelve, and each corresponding scale represents 30 degrees of rotation of the adjusting wheel 40.

[0087] In a preferred example, the manual regulating valve further comprises a support pressing block 60 and an elastic member 70 such as a compression spring. The support pressing block 60 is anti-rotationally restrained in the valve cover 20, and is used to abut against the peripheral ring portion 33 of the diaphragm valve plate 30 and block the rotation of the regulating retracting rod 52; preferably, the support pressing block 60 has a pressing block anti-rotation portion 61 (such as Figure 3 and Fig. 9 As shown in the figure), the support block 60 is engaged by the guide groove corresponding to the valve cover 20, so that the support block 60 is in a relatively non-rotatable and non-liftable limiting relationship in the valve cover 20. The elastic member 70 is arranged on the support block 60, and is used to provide the support block 60 with a downward pressure on the peripheral ring portion 33 of the diaphragm valve plate 30 and provide an upward thrust for the adjustment withdrawal rod 52. The support block 60 has three functions: preventing the elastic member 70 from deflecting, contacting the peripheral ring portion 33 of the diaphragm valve plate 30, and guiding the adjustment withdrawal rod 52 to be non-rotatable when it is raised and lowered. Therefore, it can reduce internal components and facilitate the assembly of the precision control valve; the elastic member 70 simultaneously maintains the upward elastic force on the adjustment withdrawal rod 52 and the downward elastic force on the support block 60, so as to eliminate the clearance error of the threaded connection between the adjustment withdrawal rod 52 and the adjustment advance rod 51, so as to achieve a better precision control valve flow. The anti-rotation portion 61 of the support block 60 is matched with the longitudinal guide groove in the valve cover 20, so that the support block 60 cannot rotate relative to the valve cover 20. The support block 60 has a rod-retracting anti-rotation hole 63 (such as Figure 3 and Fig. 9 As shown), the adjusting rod 52 is engaged with the rod anti-rotation portion 52a of the adjusting rod 52, so that the adjusting rod 52 cannot rotate relative to the supporting pressing block 60.

[0088] In a preferred example, the support block 60 also has a plurality of vent holes 62 (such as Figure 3 and Fig. 9As shown in the figure), in the assembly without rotation angle requirement of the support pressing block 60, one of the vent holes 62 will be aligned with the exhaust hole 25 of the valve cover 20. By using the multiple vent holes 62 of the support pressing block 60, the installation of the support pressing block 60 in the valve cover 20 has no angle directionality, and the support pressing block 60 always has one vent hole 62 aligned with the exhaust hole 25 of the valve cover 20, so as to balance the internal and external pressures of the inner cavity of the valve cover 20 between the upper part of the regulating withdrawal rod 52 and the diaphragm valve plate 30 and the external air pressure, and eliminate the pressure difference of the inner cavity caused by the lifting and lowering of the regulating withdrawal rod 52.

[0089] In a preferred example, one end of the elastic member 70 applies force to the retaining ring portion 52c of the adjusting and retracting rod 52, and the other end of the elastic member 70 is limited to the annular groove of the supporting pressing block 60. The retaining ring portion 52c of the adjusting and retracting rod 52 is used to receive the upward elastic force of the elastic member 70.

[0090] In a preferred example, the adjusting advance rod 51 has a straightening portion 51d, which corresponds to the first straightening hole 26 of the valve cover 20 for the spiral axial sliding of the straightening portion 51d, and the valve cover 20 has a second straightening hole 27 for the axial sliding of the retaining ring portion 52c without rotation, and the aperture of the second straightening hole 27 is larger than the aperture of the first straightening hole 26, so that the bottom edge of the first straightening hole 26 (corresponding to the upper edge of the second straightening hole 27) can block the retaining ring portion 52c of the adjusting retreat rod 52 from rising. By utilizing the straightening portion 51d at the lower part of the adjusting rod 51, the outer diameter of the straightening portion 51d is exactly equal to the first straightening hole 26 of the valve cover 20, and the first straightening hole 26 does not interfere with the rotation of the straightening portion 51d; the valve cover 20 also has a second straightening hole 27 with a larger aperture than the first straightening hole 26, for the axial sliding of the retaining ring portion 52c in the valve cover 20, and the second straightening hole 27 may interfere or not interfere with the rotation of the retaining ring portion 52c. The aperture difference between the second straightening hole 27 and the first straightening hole 26 can prevent the retaining ring portion 52c of the adjusting rod 52 from rising. Therefore, when the retaining ring portion 52c of the adjusting rod 52 rises and touches the bottom edge of the first straightening hole 26 of the valve cover 20, as the maximum rising stop point, the adjusting rod 52 and the valve head 31 of the diaphragm valve plate 30 change in height synchronously, so the valve is at the maximum opening, and the length of the adjusting rod 52 extending out of the adjusting feed rod 51 does not change as fast as the rising height of the adjusting feed rod 51. At this time, the maximum adjustment distance is between the retaining ring portion 52c and the straightening portion 51d; when the retaining ring portion 52c of the adjusting rod 52 falls, the adjusting rod 5 2 touches the support block 60 or the valve head 31 contacts the periphery of the axial valve port 14, as the descending stop point, the valve is at the minimum opening, the length change of the adjusting retracting rod 52 retracted to the adjusting advance rod 51 is less than the descending height change of the adjusting advance rod 51, and the minimum adjustment distance is between the retaining ring part 52c and the straightening part 51d; the distance between the retaining ring part 52c and the straightening part 51d is adjustable and variable, when the adjustment distance between the retaining ring part 52c and the straightening part 51d is less than and cannot be adjusted, the adjusting retracting rod 52 retracts to the adjusting advance rod 51 at the maximum limit, that is, as the maximum descending stop point of the adjusting retracting rod 52.

[0091] The present invention also provides a production device for semiconductor wet process, including the manual regulating valve as described above, which can meet the stability requirements of the supplied fluid in the semiconductor wet process while pursuing the precision of flow regulation. The precisely regulated flow rate and the number of rotations of the regulating wheel produce a close linear relationship or / and the same linear relationship as a partial number of rotations.

[0092] Related References Figure 6The present invention also provides an assembly method of a manual regulating valve for manufacturing the manual regulating valve as described above, the assembly method comprising: step S1 of associating the regulating advance rod and the regulating retreat rod to form a regulating rod group, step S2 of setting the regulating rod group in the valve cover, step S3 of setting the diaphragm valve sheet at one end of the regulating retreat rod of the regulating rod group, step S4 of combining the valve cover with the valve seat, and step S5 of setting the regulating wheel on the valve cover, the regulating wheel being connected to the regulating advance rod of the regulating rod group. More specifically, the assembly method may also include step S6 of determining the number of rotations of the regulating wheel during the process from the valve open state to the valve closed state.

[0093] For step S1, see Figure 7 , Figure 3 and Figure 4 , the adjusting rod 51 is associated with the adjusting rod 52 to form the adjusting rod group 50; in the example, the outer threaded portion 52b of the adjusting rod 52 is threaded into the inner threaded hole 51c of the adjusting rod 51; specifically, the mutual association degree between the adjusting rod 52 and the adjusting rod 51 is to reach the bottom dead center state of the adjusting rod group 50, that is, the outer threaded portion 52b of the adjusting rod 52 is threaded into the inner threaded hole 51c of the adjusting rod 51 to the maximum extent, so that the outer threaded portion 52b cannot be screwed in any further, and the retaining ring portion 52c of the adjusting rod 52 and the straightening portion 51d of the adjusting rod 51 reach the closest degree of mutual proximity. The further rotation of the adjusting rod 52 can drive the rotation of the adjusting rod 51.

[0094] For step S2, see Figure 8 , Figure 3 and Figure 4, the adjusting rod group 50 is arranged in the valve cover 20, and the adjusting advance rod 51 of the adjusting rod group 50 is connected to the axial hole of the valve cover 20 until the adjusting retreat rod 52 is in the state of the maximum upper dead point; in the example, in the state of the lower dead point, when the adjusting retreat rod 52 rotates, the adjusting advance rod 51 also rotates, and the external thread 51b of the adjusting advance rod 51 is screwed to the internal screw connection part 24 of the valve cover. When screwed to the upper dead point state of the adjusting rod group 50, the retaining ring part 52c of the adjusting retreat rod 52 is pushed to the lower edge of the first straightening hole 26 (equivalent to the upper edge of the second straightening hole 27). Before the adjusting retreat rod 52 is not limited, the adjusting retreat rod 52 can rotate freely and slide in the second straightening hole 27. Based on the upper dead point state and the lower dead point state, if the adjusting retreat rod 52 is limited to the valve cover 20 in advance, the adjusting retreat rod 52 cannot rotate freely and cannot slide in the second straightening hole 27. Therefore, when the adjusting rod group 50 reaches the top dead center state, the adjusting advance rod 51 can be fixed first, and then the adjusting retreat rod 52 can be reversely rotated out. The number of reverse rotations of the adjusting retreat rod 52 is specifically between 10 and 50, more specifically 15 to 25, and 20 in this example, so as to predefine the precision regulating valve during the assembly process, and the number of rotations of the adjusting wheel 40 can be an operable value.

[0095] For step S3, see Fig. 9 , Figure 3 and Figure 4 , the diaphragm valve disc 30 is arranged at one end of the adjusting rod 52 of the adjusting rod assembly 50; before the diaphragm valve disc 30 is arranged, the elastic member 70 and the supporting block 60 should be arranged first. The block anti-rotation portion 61 of the supporting block 60 makes the supporting block 60 non-rotatable relative to the valve cover 20, and the rod anti-rotation hole 63 of the supporting block 60 is sleeved and limited by the rod anti-rotation portion 52a of the adjusting rod 52, so that the adjusting rod 52 is non-rotatable relative to the supporting block 60. The valve connection end 52d of the adjusting rod 52 is combined with the connection hole of the diaphragm valve disc 30 in the valve head 31.

[0096] For step S4, see Fig.10 , Figure 3 and Figure 4 , combining the valve cover 20 to the valve seat 10; in this example, multiple combining rods 83 (such as Figure 3 As shown in FIG. 1 ), the valve cover 20, the valve seat 10 and the corresponding through holes of the base 90 are passed from top to bottom, and are coupled to the corresponding coupling nut 84 (as shown in FIG. 1 ) which can be arranged in the base 90. Figure 3 As shown in FIG. 1 ), the valve cover 20 is combined with the valve seat 10. In step S4, the axial cone 32 of the diaphragm valve disc 30 can be aligned with the axial valve port 14 of the valve seat 10. In a more specific example, as shown in FIG. Figure 3 As shown, before the connecting rod 83 is inserted into the corresponding through hole of the valve cover 20, it can first pass through the elastic pad 88 and the washer 87 to increase the elastic force of the connection and avoid the occurrence of loose connection. After the connecting rod 83 is used to connect the valve cover 20 and the valve seat 10, the connecting rod 83 can be installed with a first end plug 85 (such as Figure 3 As shown); the outer end of the coupling nut 84 may be installed with a second end plug 86 (as shown Figure 3 As shown in the figure), the first end plug 85 and the second end plug 86 have corrosion resistance and valve body integrity to provide protection against acidic gases at both ends of the combining rod 83.

[0097] For step S5, see Fig.11 , Figure 3 and Figure 4 , an adjusting wheel 40 is arranged on the valve cover 20, and the adjusting wheel 40 is connected to the adjusting feed rod 51 of the adjusting rod group 50. In this step S5, the synchronous rotating rod portion 41 of the adjusting wheel 40 is slidably limited to the coaxial hole 51a of the adjusting feed rod 51. In the rotation mode, the bayonet 43 of the adjusting wheel 40 is slidably engaged with the rotation groove 22 of the valve cover 20; in the stop mode, the bayonet 43 of the adjusting wheel 40 is slidably engaged with the stop groove 23 of the valve cover 20, and the limiting tooth buckle 42 of the adjusting wheel 40 is engaged with the limiting tooth groove 21 of the valve cover 20, and the adjusting wheel 40 is non-rotatable relative to the valve cover 20. Specifically, the stop mode is switched to by pressing the adjusting wheel 40, and the rotation mode is switched to by pulling out the adjusting wheel 40.

[0098] The implementation principle of the method example of the present invention is to manufacture a manual regulating valve by using a series of assembly steps S1-S5; the operation of step S2 can prevent the regulating advance rod 51 from being separated from the regulating retreat rod 52 when the regulating retreat rod 52 is at the top dead center state.

[0099] In a preferred example, the assembly method further includes: step S6, first adjusting back to the top dead center (the adjusting rod 51 rises to the maximum possible height), rotating the adjusting wheel 40, synchronously rotating the adjusting rod 51, the adjusting rod 51 rotates relative to the valve cover 20 and descends a first distance, the adjusting rod 52 does not rotate relative to the adjusting rod 51 and rises a second distance in the opposite direction; continuously rotating the adjusting wheel 40 until the adjusting rod 52 is located at the bottom dead center; determining the number of rotations that the adjusting wheel 40 can actually operate in the process from the valve open state to the valve closed state. Step S6 is the determination of the number of rotations that can be actually operated, and step S2 is the pre-definition of the theoretical number of rotations that the adjusting rod 52 (corresponding to the adjusting wheel 40) can rotate, and the pre-defined value is slightly greater than or equal to the actual operation value. If the actual operation value of step S6 is too large less than the pre-defined value of step S2, it can be judged that the precision regulating valve has a large error in assembly and needs to be reassembled or the rationality of the preset value is redefined. Step S6 is utilized to determine the actual operable number of rotations of the adjusting wheel 40 during the assembly process. Furthermore, the ideal operable number of rotations of the adjusting wheel 40 can be preset in step S2. By comparison, when the actual operable number of rotations is close to and less than the ideal operable number of rotations, there will be no excessive adjustment of the opening to cause damage to the valve head 31 caused by the axial valve port 14. When the valve is closed, the damage to the valve head 31 of the diaphragm valve plate 30 can be minimized, and the manual regulating valve and its diaphragm valve plate 30 have better durability.

[0100] In a preferred example, in the initial valve opening stage of step S6, the downward extension length of the axial cone 32 is sufficient to prevent the axial cone 32 of the diaphragm valve disc 30 from completely separating from the axial valve port 14 of the valve seat 10. The axial cone 32 of the diaphragm valve disc 30 still does not completely separate from the axial valve port 14 during the valve opening stage, which has a fluid drainage effect from valve opening to valve closing; and in the valve closing stage, the valve head 31 of the diaphragm valve disc 30 touches and presses the axial valve port 14, specifically, the valve head 31 contacts the outer bevel port 15. Since the example of the present invention has a self-stopping lower dead point mechanism in the adjusting rod group 50, at this time, the retaining ring portion 52c and the straightening portion 51d are so close to each other that they cannot continue to rotate, and the outer bevel port 15 will not excessively damage the valve head 31 of the diaphragm valve disc 30, which can maintain a long-term stable linear relationship for the precise adjustment of the supply flow rate of the processing fluid in the semiconductor wet process.

[0101] The embodiments of this specific implementation method are all preferred embodiments for facilitating the understanding or implementation of the technical solutions of the present invention, and are not intended to limit the protection scope of the present invention. All equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A manual regulating valve for semiconductor wet process, characterized in that: include: A valve seat (10), wherein the interior of the valve seat (10) is provided with an annular opening (13) communicating with the first flow channel (11) and an axial valve opening (14) communicating with the second flow channel (12), and the axial valve opening (14) is located in the annular opening (13); A valve cover (20) is combined with the valve seat (10), an adjusting rod group (50) is connected inside the valve cover (20), the valve cover (20) can provide a movable space for the adjusting rod group (50), and the adjusting rod group (50) comprises an adjusting advancing rod (51) and an adjusting retreating rod (52) which are associated with each other; A diaphragm valve disc (30) is arranged at one end of the adjusting rod (52) of the adjusting rod assembly (50), the diaphragm valve disc (30) having a valve head (31) located at the center and used to close the axial valve port (14), and an axial cone (32) is formed below the valve head (31) and is aligned with the axial valve port (14); A support pressing block (60) is anti-rotationally restrained in the valve cover (20) and is used to abut against a peripheral ring portion (33) of the diaphragm valve plate (30) and block the rotation of the regulating retracting rod (52); an adjusting wheel (40) disposed on the valve cover (20) and connected to the adjusting feed rod (51) of the adjusting rod group (50), and used for adjusting the raising and lowering of the adjusting feed rod (51) in the valve cover (20); the adjusting wheel (40) is a hand wheel, and the adjusting wheel (40) has a rotation mode and a stop mode. In the rotation mode, as the adjusting wheel (40) rotates, whenever the adjusting feed rod (51) is adjusted to lower or raise a first distance, the adjusting retracting rod (52) synchronously rises or lowers a second distance in the opposite direction. The ratio of the second distance to the first distance is between 0.8 and 0.

95. Combined with the cone inclination of the axial cone (32), the relationship between the number of rotations of the adjusting wheel (40) and the flow rate of the regulating valve is close to linear. In the initial valve opening stage, the downward extension length of the axial cone (32) is sufficient to prevent the axial cone (32) of the diaphragm valve plate (30) from completely separating from the axial valve port (14) of the valve seat (10).

2. The manual regulating valve according to claim 1, characterized in that: The adjusting wheel (40) has a synchronous rotating rod portion (41) located at the axis, which is inserted into the coaxial hole (51a) of the adjusting feed rod (51); a plurality of position-limiting tooth buckles (42) are provided on the lower edge of the wheel body of the adjusting wheel (40), and a plurality of position-limiting tooth grooves (21) are provided on the upper hole end surface of the valve cover (20); the adjusting wheel (40) is provided with a plurality of bayonet pins (43) on the periphery of the synchronous rotating rod portion (41), and a rotation groove (22) and a stop groove (21) are provided on the inner wall of the upper hole of the valve cover (20). 23); when the latch (43) is engaged with the rotation groove (22), the limit tooth buckle (42) is not engaged with the limit tooth groove (21), and the adjusting wheel (40) is in a rotation mode; when the latch (43) is engaged with the stop groove (23), the limit tooth buckle (42) is engaged with the limit tooth groove (21), and the adjusting wheel (40) is in a stop mode; preferably, the number of annular arrangements of the limit tooth grooves (21) corresponds to the number of adjustment scales of one circle of the adjusting wheel (40).

3. The manual regulating valve according to claim 1, characterized in that: The operable value of the number of rotations of the adjusting wheel (40) is between 10 and 50, and at least two of the operable numbers of rotations of the adjusting wheel (40) are linearly related to the flow rate of the regulating valve; more preferably, the operable value of the number of rotations of the adjusting wheel (40) is between 15 and 25; preferably, the ratio of the second distance to the first distance is between 0.88 and 0.92; preferably, the valve seat (10) is formed with an outer slope opening (15) at the periphery of the axial valve opening (14).

4. The manual regulating valve according to claim 1, characterized in that: The adjusting withdrawing rod (52) is in the form of a screw rod and has a withdrawing rod anti-rotation portion (52a), so that the adjusting withdrawing rod (52) can be lifted and lowered relatively without being rotatable in the valve cover (20); preferably, the withdrawing rod anti-rotation portion (52a) is engaged with a withdrawing rod anti-rotation hole (63) of a supporting pressure block (60) provided in the valve cover (20), and the supporting pressure block (60) is non-rotatable relative to the valve cover (20).

5. The manual regulating valve according to claim 4, characterized in that: The adjusting rod (51) is in the form of a hollow screw sleeve, having an external thread (51b) with a first pitch and an internal thread hole (51c) with a second pitch, the second pitch having a pitch difference slightly smaller than the first pitch, the external thread (51b) being used for threading the internal threaded portion (24) of the valve cover (20), and the internal thread hole (51c) being used for threading the external threaded portion (52b) of the adjusting rod (52); the external thread (51b) and the internal thread hole (51c) having the same thread direction, the ratio of the second thread pitch to the first thread pitch being the same as the ratio of the second distance to the first distance; the adjusting rod (51) is relatively rotatable in the valve cover (20) to move up and down, and the change in the height of the adjusting rod (51) is positively correlated with the number of rotations of the adjusting wheel (40).

6. The manual regulating valve according to claim 1, characterized in that: The valve seat (10) is provided with a raised edge (16) at the outer edge of the ring opening (13) to limit and fix the peripheral ring portion (33) of the diaphragm valve plate (30).

7. The manual regulating valve according to any one of claims 1 to 6, characterized in that: Also includes: The elastic member (70) is arranged on the supporting pressure block (60) and is used to provide the supporting pressure block (60) with downward pressure on the peripheral ring portion (33) of the diaphragm valve plate (30) and to provide upward thrust for the regulating retracting rod (52).

8. The manual regulating valve according to claim 7, characterized in that: The support pressing block (60) has a pressing block anti-rotation portion (61), so that the support pressing block (60) is in a relatively non-rotatable and non-liftable limiting relationship within the valve cover (20); preferably, the support pressing block (60) also has a plurality of vent holes (62), one of which is aligned with the exhaust hole (25) of the valve cover (20); preferably, the adjusting retracting rod (52) has a retaining ring portion (52c), one end of the elastic member (70) applies force to the retaining ring portion (52c), and the other end of the elastic member (70) is limited to the retaining ring portion (52c). A ring groove supporting the pressure block (60); more preferably, the adjusting advance rod (51) has a straightening portion (51d), the valve cover (20) has a first straightening hole (26) for the straightening portion (51d) to slide axially in a spiral manner, and the valve cover (20) also has a second straightening hole (27) for the retaining ring portion (52c) to slide axially without rotation, and the aperture of the second straightening hole (27) is larger than the aperture of the first straightening hole (26), so that the bottom edge of the first straightening hole (26) can prevent the retaining ring portion (52c) of the adjusting retreat rod (52) from rising.

9. A production equipment for semiconductor wet process, characterized in that: It comprises the manual regulating valve as claimed in any one of claims 1 to 8.

10. An assembly method of a manual regulating valve according to any one of claims 1 to 8, characterized in that: include: S1, associating the adjusting advance rod (51) and the adjusting retreat rod (52) to form an adjusting rod assembly (50); S2, arranging the adjusting rod assembly (50) into the valve cover (20), wherein the adjusting advance rod (51) of the adjusting rod assembly (50) is connected to the axial center hole of the valve cover (20), until the adjusting retreat rod (52) is located at the maximum top dead center; S3, arranging a diaphragm valve disc (30) at one end of the adjusting retracting rod (52) of the adjusting rod assembly (50); before arranging the diaphragm valve disc 30, first arranging a support pressing block (60) in the valve cover (20), wherein the pressing block anti-rotation portion 61 of the support pressing block (60) prevents the support pressing block (60) from rotating relative to the valve cover (20), and the retracting rod anti-rotation hole (63) of the support pressing block (60) is sleeved and limited by the retracting rod anti-rotation portion (52a) of the adjusting retracting rod (52), so that the adjusting retracting rod (52) cannot rotate relative to the support pressing block (60); S4, combining the valve cover (20) with the valve seat (10); S5. Arranging an adjusting wheel (40) on the valve cover (20), wherein the adjusting wheel (40) is connected to an adjusting feed rod (51) of the adjusting rod assembly (50), and the adjusting wheel (40) is a hand wheel; S6, rotating the adjusting wheel (40) and synchronously rotating the adjusting advance rod (51), wherein the adjusting advance rod (51) rotates relative to the valve cover (20) and descends a first distance, and the adjusting retracting rod (52) does not rotate relative to the adjusting advance rod (51) and ascends a second distance in the opposite direction; continuously rotating the adjusting wheel (40) until the adjusting retracting rod (52) is located at the bottom dead center; determining the number of rotations of the adjusting wheel (40) during the process from the valve open state to the valve closed state; In the initial valve opening stage of step S6, the downward extension length of the axial cone (32) is sufficient to prevent the axial cone (32) of the diaphragm valve plate (30) from completely separating from the axial valve port (14) of the valve seat (10).

Images