Heating plate adjustment mechanism

Abstract

The present invention relates to the field of semiconductor processing and manufacturing technology, and more specifically, to a heating plate adjustment mechanism. The heating plate adjustment mechanism provided by the present invention includes a cam mechanism, a spherical hinge, a heating plate and a heating plate seat: the cam mechanism is in close contact with the heating plate seat; the heating plate is rigidly connected to the heating plate seat; the bottom of the heating plate seat is connected to the spherical hinge; wherein the cam mechanism performs a rotational motion around the axis of the heating plate, driving the heating plate to perform corresponding motions along the spherical hinge in multiple directions to achieve the centering and leveling adjustment of the heating plate. The heating plate adjustment mechanism proposed in the present invention can simultaneously achieve the centering and leveling of the heating plate through the cam mechanism, which will not only help to improve product quality, but also help to improve overall production efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing and manufacturing, and more particularly to a heating plate adjusting mechanism. Background Art

[0002] Thin film deposition technology is a key technology used to manufacture thin films for microelectronic devices, which is achieved by forming deposits on a substrate. Common thin film deposition technologies include physical vapor deposition, chemical vapor deposition and other technologies.

[0003] In existing semiconductor coating equipment, circular heating plates are generally used to heat wafers or other forms of thin film substrates during the process. In addition, these heating plates also have the function of carrying and positioning the wafers or other forms of thin film substrates.

[0004] In thin film deposition equipment, the heating plate is used to heat the wafer to achieve the corresponding thin film deposition process.

[0005] In order to ensure the reliability of the process, the relative positions of the heating plate and the spray plate need to be adjusted in the prior art to obtain the best process performance. Figure 1 The schematic diagram of the centering and leveling mechanism of the heating plate in the prior art is disclosed, such as Figure 1 As shown, the adjustment mechanism of the prior art cannot simultaneously meet the requirements of leveling and centering the heating plate, and different mechanisms need to be used to complete these two adjustments, that is, at least two sets of mechanisms are needed to complete the centering and leveling of the heating plate.

[0006] The disadvantages of this method are its complexity and inefficiency. First, using two sets of mechanisms for adjustment undoubtedly increases the complexity of operation and reduces work efficiency. Secondly, this dual-mechanism adjustment method also increases the cost and space occupied by the equipment. In addition, for scenarios where frequent adjustments to process performance are required, this method will lead to more errors and failures, thus affecting product quality and production efficiency. Summary of the invention

[0007] The object of the present invention is to provide a heating plate adjustment mechanism to solve the problem in the prior art that it is difficult to adjust the centering and leveling of the heating plate at the same time.

[0008] In order to achieve the above-mentioned object, the present invention provides a heating plate adjustment mechanism, including a cam mechanism, a spherical hinge, a heating plate and a heating plate seat:

[0009] The cam mechanism is in close contact with the heating plate seat;

[0010] The heating plate is rigidly connected to the heating plate seat;

[0011] The bottom of the heating plate seat is connected to a spherical hinge;

[0012] The cam mechanism performs a rotational motion around the axis of the heating plate, driving the heating plate to perform corresponding motions in multiple directions along the spherical hinge, thereby achieving centering and leveling adjustments of the heating plate.

[0013] In one embodiment, the heating plate adjustment mechanism further comprises a locking mechanism:

[0014] The heating plate seat has a spherical depression at the bottom;

[0015] The spherical hinge has a ball head at the upper portion engaged with the spherical recess;

[0016] The ball head and the heating disc seat are fixedly locked or unlocked through a locking mechanism.

[0017] In one embodiment, the locking mechanism comprises a movable pin;

[0018] The heating plate seat has a hole at the bottom for fixing the position;

[0019] The movable pin is inserted into or pulled out of the hole to fix, lock or unlock the ball head and the heating plate.

[0020] In one embodiment, the cam mechanism comprises a limit block, a cam shaft and a cam:

[0021] The cam is connected to the limit block via the camshaft and rotates around the camshaft;

[0022] The cam and the limit block are tightly connected and contacted with the side surfaces of the heating plate seat respectively.

[0023] In one embodiment, the side surface of the heating plate seat includes at least two first side surfaces and a second side surface with different protrusion heights:

[0024] The cam is tightly connected and in contact with the first side surface of the heating plate seat;

[0025] The limiting block is connected to and in contact with the second side surface of the heating plate seat.

[0026] In one embodiment, the axis of the camshaft is perpendicular to the horizontal plane of the heating plate;

[0027] The camshaft performs a rotational motion along the axis of the heating disk.

[0028] In one embodiment, when the locking mechanism is in the unlocking position, the ball head and the heating plate perform an unlocking activity;

[0029] The camshaft is rotated, and the camshaft drives the cam and the limit block to perform a rotary motion around the axis of the heating plate;

[0030] The cam drives the heating plate to rotate in all directions along the ball center of the spherical hinge, so that the heating plate can be leveled in any direction.

[0031] In one embodiment, when the locking mechanism is in the locking position, the ball head is fixedly locked with the heating plate:

[0032] The camshaft is rotated, and the camshaft drives the cam and the limit block to perform a rotary motion around the axis of the heating plate;

[0033] The cam drives the heating plate to move horizontally along the horizontal plane, so that the heating plate can be centered in any direction.

[0034] A heating plate adjustment mechanism proposed in the present invention realizes the centering and leveling of the heating plate simultaneously through a cam mechanism, which will not only help to improve product quality, but also help to improve overall production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which the same reference numerals always represent the same features, wherein:

[0036] Figure 1 A schematic diagram of a heating plate centering and leveling mechanism of the prior art is disclosed;

[0037] Figure 2 A schematic structural diagram of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed;

[0038] Figure 3 A front view schematic diagram of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed;

[0039] Figure 4 A partial schematic diagram of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed;

[0040] Figure 5a A top view of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed;

[0041] Figure 5b A schematic diagram of the axis of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed;

[0042] Figure 6 A schematic diagram of the camshaft rotation angle of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed;

[0043] Figure 7a A schematic diagram of a first position of a leveling operation of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed;

[0044] Figure 7bA schematic diagram of a second position of a leveling operation of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed;

[0045] Figure 8a A schematic diagram of a first position of a centering operation of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed;

[0046] Figure 8b A schematic diagram of a second position of the centering operation of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed.

[0047] The meanings of the reference numerals in the figures are as follows:

[0048] 1 heating plate;

[0049] 11 heating plate axis;

[0050] 2 heating plate seat;

[0051] 21 first side;

[0052] 22 second side;

[0053] 23 spherical depression;

[0054] 3 ball hinge;

[0055] 31 ball head;

[0056] 32 ball joint constraint surface;

[0057] 4 camshafts;

[0058] 5 cams;

[0059] 6 limit block;

[0060] 7 Removable pins. DETAILED DESCRIPTION

[0061] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and are not used to limit the invention.

[0062] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0063] Figure 2 The structure diagram of the heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 2 As shown, a heating plate adjustment mechanism proposed by the present invention comprises a cam mechanism, a spherical hinge 3, a heating plate 1 and a heating plate seat 2:

[0064] The cam mechanism is in close contact with the heating plate seat 2;

[0065] The heating plate 1 is rigidly connected to the heating plate seat 2;

[0066] The bottom of the heating plate seat 2 is connected to a spherical hinge 3;

[0067] The cam mechanism performs a rotational motion around the axis of the heating plate 1 , driving the heating plate 1 to perform corresponding motions in multiple directions along the spherical hinge 3 , thereby achieving centering and leveling adjustments of the heating plate 1 .

[0068] Figure 3 A front view schematic diagram of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 4 A partial schematic diagram of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 3 and Figure 4 As shown, the heating plate seat 2 has a spherical depression 23 at the bottom;

[0069] The ball head 31 of the spherical hinge 3 is engaged with the spherical recess 23;

[0070] The ball head 31 and the heating plate seat 2 are fixedly locked or unlocked by a locking mechanism.

[0071] The bottom of the spherical hinge 3 is a spherical hinge constraint surface 32, which is used to connect with the bottom of the chamber.

[0072] A spherical hinge 3 (hereinafter referred to as a spherical hinge) at the bottom of the heating plate seat 2 enables the heating plate 1 to move along the spherical hinge according to different constraint conditions.

[0073] like Figure 3 As shown, the locking mechanism comprises a movable pin 7;

[0074] The heating plate seat 2 is provided with holes at the bottom for fixing the position;

[0075] The movable pin 7 is inserted into or pulled out of the hole to fix and lock or unlock the ball head 31 and the heating plate 1.

[0076] The working principle of the movable pin is mainly to achieve the positioning and locking functions through the pin in the hole at the fixed position. The movable pin has the advantages of easy operation, accurate positioning, and reliable locking. It is widely used in various mechanical transmission and motion systems to limit position, transmit power or lock mechanisms.

[0077] In this embodiment, the movable pin 7 is inserted into the ball head 31, and the ball head 31 and the heating plate seat 2 can be fixedly locked by the movable pin 7;

[0078] The movable pin 7 is pulled out of the ball head 31 , and the ball head 31 and the heating plate seat 2 can rotate freely through the movable pin 7 .

[0079] Through the ball joint constraint and the insertion and removal of the movable pin 7, the heating plate seat 2 and the heating plate 1 fixedly connected thereto can achieve different movements.

[0080] like Figure 3 and Figure 4 As shown, the cam mechanism includes a limit block 6, a cam shaft 4 and a cam 5:

[0081] The cam 5 is connected to the limit block 6 via the cam shaft 4 and rotates around the cam shaft 4;

[0082] The cam 5 and the limit block 6 are tightly connected and in contact with the side surfaces of the heating plate seat 2 respectively.

[0083] By using the cam mechanism, the centering and leveling adjustment of the heating plate 1 is achieved.

[0084] like Figure 3 and Figure 4 As shown, the side surface of the heating plate seat 2 includes at least two first side surfaces 21 and second side surfaces 22 with different protrusion heights:

[0085] The cam 5 is tightly connected and in contact with the first side surface 21 of the heating plate 2;

[0086] The limiting block 6 is connected to and in contact with the second side surface 22 of the heating plate 2 .

[0087] In this embodiment, the profile of the cam 5 is a protrusion, and as the camshaft 4 rotates, it drives the heating disc seat 2 to complete a predetermined movement, and the heating disc seat 2 serves as a driven member.

[0088] In this embodiment, the limiting block 6 is a U-shaped structure, and both sides thereof are connected and in contact with the second side surface 22 of the heating plate 2 .

[0089] The camshaft 4 is arranged at the dome of the limiting block 6 .

[0090] Figure 5aA top view of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 5b The schematic diagram of the axis of the heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 5a and Figure 5b As shown, the axis of the camshaft 4 is perpendicular to the horizontal plane of the heating plate 1, and the cam 5 can rotate around the camshaft 4;

[0091] Figure 6 A schematic diagram of the camshaft rotation angle of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 5a and Figure 6 As shown by the dotted circle, the limit block 6 and the cam shaft 4 rotate along the heating plate axis 11, and the rotation angle is β.

[0092] Figure 7a A schematic diagram of a first position of a leveling operation of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 7b A schematic diagram of a second position of a leveling operation of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 7a and Figure 7b As shown, when the locking mechanism is in the unlocking position, the movable pin 7 is in the pulled-out position, and the ball head 31 and the heating plate 1 are unlocked;

[0093] The camshaft 4 is rotated, and the camshaft 4 drives the cam 5 and the limit block 6 to perform a rotary motion around the axis 11 of the heating plate;

[0094] The cam 5 drives the heating plate 1 to rotate in all directions along the center of the ball head 31 of the spherical hinge 3, so that the heating plate 1 can be leveled in any direction.

[0095] like Figure 6 As shown, the angle of rotation of the camshaft 4 along the heating plate axis 11 is β. Figure 7a and Figure 7b As shown, for the leveling operation, the heating plate 1 rotates from the first position to the second position by an angle α.

[0096] Figure 8a A schematic diagram of a first position of a centering operation of a heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 8b A schematic diagram of a second position of the centering operation of the heating plate adjustment mechanism according to an embodiment of the present invention is disclosed. Figure 8a and Figure 8b As shown, when the locking mechanism is in the locking position, the movable pin 7 is in the insertion position, and the ball head 31 is fixedly locked with the heating plate 1:

[0097] The camshaft 4 is rotated, and the camshaft 4 drives the cam 5 and the limit block 6 to perform a rotary motion around the axis 11 of the heating plate;

[0098] The cam 5 drives the heating plate 1 to make a horizontal displacement along a horizontal plane, so that the heating plate 1 can be centered in any direction.

[0099] like Figure 6 As shown, the angle of rotation of the camshaft 4 along the heating plate axis 11 is β. Figure 8a and Figure 8b As shown, the heating plate 1 moves horizontally along the ball joint constraint surface 32, that is, the heating plate 1 moves horizontally from the first position to the second position along the horizontal plane by a distance d.

[0100] A heating plate adjustment mechanism proposed in the present invention realizes the centering and leveling of the heating plate simultaneously through a cam mechanism, which will not only help to improve product quality but also help to improve overall production efficiency. When the ball joint is completely fixed and the movable pin is in the pulled-out position, the device enters the leveling mode. At this time, the heating plate can rotate in all directions along the center of the ball joint; when the ball joint constraint surface can only move along the horizontal plane and the movable pin is in the inserted position, the device enters the centering mode. At this time, the heating plate can only move horizontally in the horizontal plane.

[0101] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0102] In the description of the present invention, it should be noted that the directions or positional relationships indicated by terms such as “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0103] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0104] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the connection inside two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0105] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Persons familiar with the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A heating plate adjustment mechanism, characterized in that: Including cam mechanism, ball hinge, heating plate and heating plate seat: The cam mechanism is in close contact with the heating plate seat; The heating plate is rigidly connected to the heating plate seat; The bottom of the heating plate seat is connected to a spherical hinge; The cam mechanism performs a rotational motion around the axis of the heating plate, driving the heating plate to perform corresponding motions in multiple directions along the spherical hinge, thereby achieving centering and leveling adjustments of the heating plate; The heating plate seat has a spherical depression at the bottom; The spherical hinge has a ball head at the upper portion engaged with the spherical recess; The ball head and the heating plate seat are fixedly locked or unlocked through a locking mechanism; The locking mechanism includes a movable pin; The heating plate seat has a hole at the bottom for fixing the position; The movable pin is inserted into or pulled out of the hole to fix, lock or unlock the ball head and the heating plate.

2. The heating plate adjustment mechanism according to claim 1, characterized in that: The cam mechanism comprises a limit block, a camshaft and a cam: The cam is connected to the limit block via the camshaft and rotates around the camshaft; The cam and the limit block are tightly connected and contacted with the side surfaces of the heating plate seat respectively.

3. The heating plate adjustment mechanism according to claim 2, characterized in that: The side surface of the heating plate seat includes at least two first side surfaces and a second side surface with different protrusion heights: The cam is tightly connected and in contact with the first side surface of the heating plate seat; The limiting block is connected to and in contact with the second side surface of the heating plate seat.

4. The heating plate adjustment mechanism according to claim 2, characterized in that: The axis of the camshaft is perpendicular to the horizontal plane of the heating plate; The camshaft performs a rotational motion along the axis of the heating disk.

5. The heating plate adjustment mechanism according to claim 2, characterized in that: When the locking mechanism is in the unlocking position, the ball head and the heating plate perform unlocking activities; The camshaft is rotated, and the camshaft drives the cam and the limit block to perform a rotary motion around the axis of the heating plate; The cam drives the heating plate to rotate in all directions along the ball center of the spherical hinge, so that the heating plate can be leveled in any direction.

6. The heating plate adjustment mechanism according to claim 2, characterized in that: When the locking mechanism is in the locking position, the ball head and the heating plate are fixed and locked: The camshaft is rotated, and the camshaft drives the cam and the limit block to perform a rotary motion around the axis of the heating plate; The cam drives the heating plate to move horizontally along the horizontal plane, so that the heating plate can be centered in any direction.

7. The heating plate adjustment mechanism according to claim 3, characterized in that: The limit block is a U-shaped structure, and both sides thereof are respectively connected and contacted with the second side surface of the heating plate; A camshaft is arranged at the dome of the limiting block.

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