A three-axis accelerometer based on lamb wave tpos resonators

By using a triaxial accelerometer based on Lamb wave TPoS resonators and utilizing four Lamb wave resonators to detect resonant frequency shifts, the problems of sensor miniaturization and integration are solved, and high-sensitivity acceleration detection and signal processing circuitry are integrated.

CN117706113BActive Publication Date: 2026-07-03UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
UNIV OF ELECTRONICS SCI & TECH OF CHINA
Filing Date
2023-12-14
Publication Date
2026-07-03

AI Technical Summary

Technical Problem

Existing SAW-based resonant accelerometers face challenges in miniaturization and integration. The cantilever beam is relatively thick, which limits sensitivity, and they are also difficult to integrate with CMOS processes.

Method used

A triaxial accelerometer based on Lamb wave TPoS resonators is used to detect the resonant frequency offset using four Lamb wave resonators. The structure is simple and easy to be compatible with CMOS technology. The cantilever beam structure is thinned to realize triaxial acceleration detection.

Benefits of technology

It improves the sensitivity of the accelerometer, is easy to miniaturize and integrate, outputs a frequency signal, which facilitates interface circuit design, has strong power handling capability, and is suitable for monolithic integration with signal processing circuits.

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Abstract

This invention discloses a triaxial accelerometer based on a Lamb wave TPoS resonator, belonging to the field of microelectromechanical systems (MEMS) technology. It includes a cuboid-shaped mass block and four cantilever beam structures symmetrically arranged on the sides of the upper surface of the mass block. The mass block includes a substrate silicon layer and a first doped silicon layer. The cantilever beam structures adopt a TPoS structure, including a second doped silicon layer, a piezoelectric thin film, and interdigital transducers. The first ends of the cantilever beam structures are connected to corresponding edges on the upper surface of the mass block, and the second ends are fixed to an external support structure. The interdigital transducers are located at the ends of the cantilever beam structures. The interdigital transducers and the piezoelectric thin film below them together constitute a Lamb wave resonator. This invention utilizes four TPoS Lamb wave resonators to achieve motion acceleration detection in three directions. It is insensitive to the thickness of the cantilever beam structure, which helps improve sensitivity. The fabrication process is compatible with CMOS technology, facilitating miniaturization and integration.
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