A cooling unit and a cooling chamber of a vacuum welding furnace

Abstract

The present invention provides a cooling unit and a cooling chamber of a vacuum welding furnace, which relates to the technical field of vacuum welding furnaces. The cooling unit includes a heat dissipation plate with a plurality of air outlets, a bottom plate with an air inlet, a diversion component disposed between the heat dissipation plate and the bottom plate, and a gas supply module for blowing nitrogen into the air inlet. Nitrogen is blown into the cooling flow channel of the diversion component through the air inlet, and then blown towards the module to be cooled disposed on the heat dissipation plate through the air outlets on the heat dissipation plate, so as to cool down the module to be cooled; compared with the prior art, the present invention increases the contact area between nitrogen and the module to be cooled by means of air cooling, thereby improving the cooling efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum welding furnaces, and particularly to a cooling unit and a cooling chamber of a vacuum welding furnace. Background Art

[0002] With the booming development of the semiconductor industry, the method of welding semiconductor process modules by a vacuum welding furnace is quite popular. After welding, it is necessary to cool the semiconductor process modules in a cooling chamber.

[0003] In the prior art, the heat dissipation pin cooling method is usually adopted. A plurality of heat dissipation pins are added to the bottom of the bottom plate carrying the semiconductor process module, and the semiconductor process module is cooled by means of the bottom plate based on the principle of heat conduction. However, since the contact area between the heat dissipation pins and the bottom plate is small, the cooling efficiency is low. Summary of the Invention

[0004] In view of the above defects or deficiencies in the prior art, the present invention aims to provide a cooling unit and a cooling chamber of a vacuum welding furnace.

[0005] In a first aspect, the present invention provides a cooling unit, including:

[0006] At least one cooling module, each of the cooling modules including:

[0007] A heat dissipation plate, the heat dissipation plate having a plurality of air outlets, and a module to be cooled is placed on the heat dissipation plate;

[0008] A bottom plate, the bottom plate having an air inlet;

[0009] A flow guiding assembly, the flow guiding assembly being disposed between the heat dissipation plate and the bottom plate, the flow guiding assembly including a plurality of cooling channels with two ends respectively communicating with the air outlets and the air inlets;

[0010] The cooling unit further includes a gas supply module, the gas supply module blowing nitrogen into the air inlet, and the nitrogen blowing towards the module to be cooled from the air outlet after passing through the cooling channels.

[0011] According to the technical solution provided by the present invention, the flow guiding assembly includes a plurality of flow guiding plates, the plurality of flow guiding plates are arranged along a first direction, and a sealed space is formed between the flow guiding plates and the heat dissipation plate, between each of the flow guiding plates, and between the flow guiding plates and the bottom plate; each sealed space includes at least one cooling channel group, each cooling channel group includes at least one branch channel, and the branch channels communicating with different sealed spaces form the cooling channels.

[0012] According to the technical solution provided by the present invention, a plurality of transition air vents are provided on each of the deflector plates, and the number of the transition air vents on each of the deflector plates or the number of the air outlet vents on the heat dissipation plate is the same as the number of the branch flow channels of the sealed space adjacent to the side far from the heat dissipation plate; one ends of all the branch flow channels of the same cooling flow channel group are communicated with the transition air vents of the deflector plate on the side far from the heat dissipation plate of the sealed space where they are located, or the air inlet of the bottom plate, and the other ends are respectively communicated with the transition air vents on the deflector plate on the side close to the heat dissipation plate of the sealed space where they are located, or the air outlet vents.

[0013] According to the technical solution provided by the present invention, flow channel grooves with the same structure are provided at the corresponding positions of the mutually close ends of the bottom plate and the deflector plate close to the bottom plate, at the corresponding positions of the mutually close ends of the two deflector plates, and at the corresponding positions of the mutually close ends of the heat dissipation plate and the deflector plate close to the heat dissipation plate, and the two corresponding flow channel grooves form the branch flow channels.

[0014] According to the technical solution provided by the present invention, a sealing structure is provided at the end of the bottom plate and each deflector plate close to the heat dissipation plate.

[0015] According to the technical solution provided by the present invention, the air pressures of all the air outlet vents are the same.

[0016] According to the technical solution provided by the present invention, a plurality of air outlet vent groups are distributed on the heat dissipation plate along the second direction, and each air outlet vent group includes a plurality of the air outlet vents arranged along the third direction, the second direction is perpendicular to the first direction, and the third direction is perpendicular to the first direction and the second direction.

[0017] According to the technical solution provided by the present invention, the bottom plate is rectangular, and the air inlet of the bottom plate is provided on the center line along the length direction of the bottom plate and at a position close to any long side.

[0018] According to the technical solution provided by the present invention, the heat dissipation plate, each deflector plate and the bottom plate are connected by bolts.

[0019] In a second aspect, the present invention provides a cooling cabin of a vacuum welding furnace, including the cooling unit described above.

[0020] To sum up, the present invention provides a cooling unit. By providing a heat dissipation plate with a plurality of air outlet vents, a bottom plate with an air inlet, a deflector assembly arranged between the heat dissipation plate and the bottom plate, and a gas supply module for blowing nitrogen into the air inlet, nitrogen is blown into the cooling flow channels of the deflector assembly from the air inlet, and then blown to the module to be cooled arranged on the heat dissipation plate through the air outlet vents on the heat dissipation plate, so as to cool down the module to be cooled; compared with the prior art, the present invention increases the contact area between nitrogen and the module to be cooled by means of air cooling, thereby improving the cooling efficiency. Brief Description of the Drawings

[0021] Figure 1 Schematic diagram of the appearance of the cooling module provided by the embodiment of the present invention;

[0022] Figure 2 Schematic diagram of the structure of the bottom plate provided by the embodiment of the present invention;

[0023] Figure 3 Exploded view of the cooling module provided by the embodiment of the present invention;

[0024] Figure 4 Schematic diagram of the structure of the bottom of the first deflector provided by the embodiment of the present invention;

[0025] Figure 5 Schematic diagram of the structure of the cooling cabin (without top cover) provided by the embodiment of the present invention;

[0026] Figure 6 Schematic diagram of the structure of the bottom of the cooling cabin provided by the embodiment of the present invention.

[0027] 1. Cooling module; 11. Heat dissipation plate; 12. Bottom plate; 13. Deflector; 14. Sealing structure; 15. Flow channel groove; 21. Air outlet; 22. Air inlet; 23. Air inlet pipe; 24. First transition air outlet; 25. Second transition air outlet; 31. First branch flow channel; 32. Second branch flow channel; 33. Third branch flow channel; 4. Housing main body; 41. Cabin inlet; 42. Cabin outlet; 5. Cooling unit. Detailed Embodiments

[0028] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related invention, rather than limiting the invention. Additionally, it should be noted that for the sake of description, only the parts related to the invention are shown in the drawings.

[0029] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the drawings and embodiments.

[0030] Embodiment 1

[0031] In response to the technical problems mentioned in the background art, the present invention provides a cooling unit, including:

[0032] At least one cooling module 1, each of the cooling modules 1 including:

[0033] A heat dissipation plate 11, the heat dissipation plate 11 having a plurality of air outlets 21, and the heat dissipation plate 11 having a module to be cooled placed thereon;

[0034] A bottom plate 12, on which there is an air inlet 22;

[0035] A flow guiding assembly, which is arranged between the heat dissipation plate 11 and the bottom plate 12. The flow guiding assembly includes a plurality of cooling channels with both ends communicating with the air outlet 21 and the air inlet 22 respectively;

[0036] The cooling unit further includes a gas supply module, which blows nitrogen into the air inlet 22. After passing through the cooling channels, the nitrogen is blown from the air outlet 21 to the module to be cooled.

[0037] Please refer to Figure 1 、 Figure 2 As shown, the air outlet 21 is a through hole provided on the heat dissipation plate 11, and the air inlet 22 is a through hole provided on the bottom plate 12; a frame body is provided on the heat dissipation plate 11, and the module to be cooled is placed on the frame body. The bottom of the frame body is hollowed out to expose all the air outlets 21. Among them, the quantity and distribution of the cooling modules 1 can be determined according to the shape and the part to be cooled of the module to be cooled; Optionally, as Figure 5 shown, there are two rows, and each row has 3 cooling modules 1 arranged in sequence; as Figure 6 shown, the gas supply module includes an air inlet pipe 23 arranged at the end of the air inlet 22 away from the heat dissipation plate 11, and a gas supply device communicated with the air inlet pipe 23. There are no special requirements for the gas supply device, and it can just introduce nitrogen into the air inlet pipe 23. The present invention cools the module to be cooled by an air cooling method, which increases the contact area between nitrogen and the module to be cooled compared with cooling by heat dissipation pins in the prior art, so the cooling efficiency is improved.

[0038] In a preferred embodiment, the flow guiding assembly includes a plurality of flow guiding plates 13, and the plurality of flow guiding plates 13 are arranged along a first direction. A sealed space is formed between the flow guiding plate 13 and the heat dissipation plate 11, between each flow guiding plate 13, and between the flow guiding plate 13 and the bottom plate 12; each sealed space includes at least one cooling channel group, and each cooling channel group includes at least one branch channel. The branch channels communicated with different sealed spaces form the cooling channels.

[0039] Please refer to Figure 3 shown, the first direction is the up and down direction. A sealing structure 14 is provided at the bottom plate 12 and the end of each flow guiding plate 13 close to the heat dissipation plate 11. Among them, the sealing structure 14 includes a sealing flow channel groove provided on the top surfaces of the bottom plate 12 and each flow guiding plate 13, and a sealing ring is provided in the sealing flow channel groove. When each flow guiding plate 13, the bottom plate 12 and the heat dissipation plate 11 are connected, the sealed space is formed through the sealing structure.

[0040] Optionally, the diversion component includes two diversion plates 13, which are the first diversion plate and the second diversion plate in sequence from bottom to top; thus, the two diversion plates 13 and the heat dissipation plate 11 and the bottom plate 12 form three sealed spaces, which are the first sealed space, the second sealed space, and the third sealed space in sequence from bottom to top. The branch flow channel in the first sealed space is the first branch flow channel 31, the branch flow channel in the second sealed space is the second branch flow channel 32, and the branch flow channel in the third sealed space is the third branch flow channel 33. The interconnected first branch flow channel 31, the second branch flow channel 32, and the third branch flow channel 33 form the cooling flow channel.

[0041] In a preferred embodiment, a plurality of transition air vents are provided on each of the diversion plates 13, and the number of the transition air vents on each of the diversion plates 13 or the number of the air outlet 21 on the heat dissipation plate 11 is the same as the number of the branch flow channels in the sealed space adjacent to the side away from the heat dissipation plate 11; one ends of all the branch flow channels in the same cooling flow channel group are communicated with the transition air vents on the diversion plate 13 on the side away from the heat dissipation plate 11 of the sealed space where they are located, or the air inlet 22 of the bottom plate 12, and the other ends are respectively communicated with the transition air vents on the diversion plate 13 on the side close to the heat dissipation plate 11 of the sealed space where they are located, or the air outlet 21.

[0042] In a preferred embodiment, flow channel grooves 15 with the same structure are provided at the corresponding positions of the mutually close ends of the bottom plate 12 and the diversion plate 13 close to the bottom plate 12, at the corresponding positions of the mutually close ends of the two diversion plates 13, and at the corresponding positions of the mutually close ends of the heat dissipation plate 11 and the diversion plate 13 close to the heat dissipation plate 11. Two corresponding flow channel grooves 15 form the branch flow channel.

[0043] Please refer to Figure 3 As shown, the transition air vent is a through hole provided on the diversion plate 13; the structures of the two flow channel grooves 15 of the same branch flow channel are the same, but the structures of different branch flow channels may be different, and may be strip-shaped, arc-shaped, etc.

[0044] There is one cooling flow channel group in the first sealed space, including three first branch flow channels 31. Therefore, there are three transition air vents on the first diversion plate, which are the first transition air vents 24. There are three cooling flow channel groups in the second sealed space, and each cooling flow channel group includes two second branch flow channels 32. Therefore, there are six transition air vents on the second diversion plate, which are the second transition air vents 25. There are six cooling flow channel groups in the third sealed space, and each cooling flow channel group includes three third branch flow channels 33. Therefore, the number of the air outlets 21 is 18.

[0045] One end of each of the three first branch channels 31 communicates with the air inlet 22 of the bottom plate 12, and the other ends communicate with three first transition air outlets 24 respectively. One end of each of the two second branch channels 32 of each cooling channel group in the second sealed space communicates with the first transition air outlet 24, and the other ends communicate with the second transition air outlets 25 respectively. One end of each of the three third branch channels 33 of each cooling channel group in the third sealed space communicates with the same second transition air outlet 25, and the other ends communicate with the air outlets 21 respectively.

[0046] In a preferred embodiment, the air pressures of the air outlets 21 are the same.

[0047] Among them, by adjusting the lengths, smoothness, etc. of the branch channels in the same sealed space, the air pressures of the transition air outlets of the same flow guiding plate 13 can be made the same, and further the air pressures of the air outlets 21 of the heat dissipation plate 11 can be made the same, thereby improving the uniformity of the nitrogen gas blown to the module to be cooled.

[0048] In a preferred embodiment, a plurality of air outlet groups are distributed along the second direction on the heat dissipation plate 11. Each air outlet group includes a plurality of the air outlets 21 arranged along the third direction. The second direction is perpendicular to the first direction, and the third direction is perpendicular to the first direction and the second direction.

[0049] Please refer to Figure 3 As shown, if the module to be cooled is in a regular shape, the 18 air outlets 21 on the heat dissipation plate are evenly distributed. The second direction is the left - right direction, the third direction is the front - back direction. There are six air outlet groups evenly distributed in the left - right direction, and each air outlet group includes three air outlets 21 evenly distributed in the front - back direction.

[0050] In a preferred embodiment, the bottom plate 12 is rectangular, and the air inlet 22 of the bottom plate 12 is provided on the center line along the length direction of the bottom plate 12, near any long side.

[0051] Please refer to Figure 2As shown, optionally, the structures of the two first branch flow channels 31 at the left and right positions are symmetrical. Therefore, to ensure that the lengths of the two first branch flow channels 31 on the left and right are the same, the air inlet 22 must be provided on the center line along its length direction. If the air inlet 22 is also provided on the center line along the width direction of the bottom plate 12, that is, the air inlet 22 is provided at the center position of the bottom plate 12. In order to make the length of the first branch flow channel 31 whose extension direction is its width direction the same as the lengths of the other two first branch flow channels 31, due to the width limitation, it is necessary to make the first branch flow channel 31 whose extension direction is its width direction have several more corners to extend its length. However, the more corners there are, the greater the flow resistance of nitrogen will be, resulting in different air pressures at the first transition air outlet 24. Therefore, the air inlet 22 is provided at a position close to any long side, so as to ensure that the lengths of the three first branch flow channels 31 are the same under the condition that the curvature of the first branch flow channel 31 whose extension direction is the width direction of the bottom plate 12 is similar to that of the other two first branch flow channels 31.

[0052] In a preferred embodiment, the heat dissipation plate 11, each deflector plate 13 and the bottom plate 12 are connected by bolts.

[0053] Among them, each deflector plate 13, the heat dissipation plate 11 and the bottom plate 12 are rectangular, and threaded holes are provided at corresponding positions on each side. Bolts pass through the threaded holes at corresponding positions to fixedly connect the heat dissipation plate 11, each deflector plate 13 and the bottom plate 12.

[0054] Embodiment 2

[0055] On the basis of Embodiment 1, the present invention further provides a vacuum welding furnace cooling chamber, including the cooling unit 5 described above.

[0056] Please refer to Figure 5 and Figure 6 As shown, the cooling chamber includes:

[0057] A housing, which has a closed first space inside. The cooling unit 5 is provided at the bottom of the first space. Opposite surfaces of the housing are provided with an inlet hatch 41 and an outlet hatch 42. Hatches for opening or closing the inlet hatch 41 or the outlet hatch 42 are provided at the inlet hatch 41 and the outlet hatch 42; the housing includes a housing main body 4 and a top cover detachably connected to the housing main body 4.

[0058] A conveying assembly, which penetrates through the inlet hatch 41 and the outlet hatch 42 and is used to convey the rack and the module to be cooled placed on the rack directly above the cooling unit 5;

[0059] The intake pipe 23 penetrates through the bottom of the housing, with one end communicating with the air inlet 22 of the bottom plate 12 and the other end extending outside the housing, and can be communicated with the air supply device through a hose;

[0060] A relief valve communicating with the first space is further provided on the housing main body 4, and the nitrogen gas charged into the first space through the cooling unit 5 can be discharged through the relief valve.

[0061] The above description is only a preferred embodiment of the present invention and an explanation of the applied technical principle. Those skilled in the art should understand that the scope of the invention involved in the present invention is not limited to the technical solution formed by the specific combination of the above technical features, and should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the technical solutions formed by mutually replacing the above features with the technical features (but not limited to) having similar functions disclosed in the present invention.

Claims

1. A cooling unit, characterized in that, Comprising: At least one cooling module (1), each of the cooling modules (1) comprising: A heat dissipation plate (11), the heat dissipation plate (11) having a plurality of air outlets (21), and a module to be cooled is placed on the heat dissipation plate (11); A bottom plate (12), the bottom plate (12) having an air inlet (22); A flow guiding assembly, the flow guiding assembly being disposed between the heat dissipation plate (11) and the bottom plate (12), the flow guiding assembly comprising a plurality of cooling channels with both ends respectively communicating with the air outlet (21) and the air inlet (22); The flow guiding assembly comprises a plurality of flow guiding plates (13), the plurality of flow guiding plates (13) are arranged along a first direction, and a sealed space is formed between the flow guiding plate (13) and the heat dissipation plate (11), between each of the flow guiding plates (13), and between the flow guiding plate (13) and the bottom plate (12); each sealed space comprises at least one cooling channel group, each of the cooling channel groups comprises at least one branch channel, and the branch channels communicating with different sealed spaces form the cooling channels; A plurality of transition air vents are provided on each of the flow guiding plates (13), the number of the transition air vents on each of the flow guiding plates (13) or the number of the air outlets (21) on the heat dissipation plate (11) is the same as the number of the branch channels of the sealed space on the side away from the heat dissipation plate (11) adjacent thereto; one ends of all the branch channels of the same cooling channel group are communicated with the transition air vents of the flow guiding plate (13) on the side away from the heat dissipation plate (11) of the sealed space where they are located, or the air inlet (22) of the bottom plate (12), and the other ends are respectively communicated with the transition air vents on the flow guiding plate (13) on the side close to the heat dissipation plate (11) of the sealed space where they are located, or the air outlets (21); the bottom plate (12) is rectangular, and the air inlet (22) of the bottom plate (12) is provided at a position close to any long side on the center line along the length direction of the bottom plate (12), so as to ensure that the curvature of the branch channels with the extending direction being the width direction of the bottom plate (12) is similar to that of the other branch channels in the same sealed space, and to ensure that the lengths of the branch channels in the same sealed space are the same; The cooling unit further comprises a gas supply module, the gas supply module blows nitrogen into the air inlet (22), and the nitrogen is blown towards the module to be cooled by the air outlet (21) after passing through the cooling channels; The air pressures of all the air outlets (21) are the same; by adjusting the lengths and smoothness of the branch channels of the same sealed space, the air pressures of the transition air vents of the same flow guiding plate (13) are made the same, and further the air pressures of the air outlets (21) of the heat dissipation plate (11) are made the same, thereby improving the uniformity of the blowing towards the module to be cooled.

2. The cooling unit according to claim 1, characterized in that, At corresponding positions of the mutually approaching ends of the bottom plate (12) and the flow guiding plate (13) close to the bottom plate (12), at corresponding positions of the mutually approaching ends of the two flow guiding plates (13), and at corresponding positions of the mutually approaching ends of the heat dissipation plate (11) and the flow guiding plate (13) close to the heat dissipation plate (11), flow channel grooves (15) with the same structure are provided, and two corresponding flow channel grooves (15) form the branch flow channels.

3. The cooling unit according to claim 1, wherein A sealing structure (14) is provided at the end of the bottom plate (12) and each flow guiding plate (13) close to the heat dissipation plate (11).

4. The cooling unit according to claim 1, characterized in that, A plurality of air outlet groups are distributed along the second direction on the heat dissipation plate (11), and each air outlet group includes a plurality of air outlets (21) arranged along the third direction. The second direction is perpendicular to the first direction, and the third direction is perpendicular to the first direction and the second direction.

5. The cooling unit according to claim 1, characterized in that, The heat dissipation plate (11), each flow guiding plate (13), and the bottom plate (12) are connected by bolts.

6. A cooling chamber of a vacuum welding furnace, characterized in that, It includes the cooling unit (5) according to any one of claims 1-5.

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