Low temperature vacuum sample transfer system

Abstract

The present application relates to a low-temperature vacuum sample transfer system, comprising: a transfer module configured to carry a sample to be transferred, which is suspended on a magnetic levitation track; a transfer cavity for providing a vacuum cavity environment for sample transfer; a magnetic levitation track for contactless movement of the transfer module along the magnetic levitation track; at least one rapid sample injection cavity for realizing the sample entering the transfer cavity from the rapid sample injection cavity; at least two functional cavities for different functional operations on the sample; and a vacuum pumping module configured to maintain the inside of the cavities as a vacuum environment. The transfer system realizes the transmission of the sample in the vacuum, reduces the transmission resistance, avoids direct contact wear with the track, prolongs the service life of the track and the maintenance time of the sample at low temperature.

Description

Technical Field

[0001] This invention relates to the field of vacuum transfer technology, and more specifically to a low-temperature vacuum sample transfer system applied to a vacuum interconnect system. Background Technology

[0002] In the field of vacuum transport, vacuum interconnection systems are used to transfer and process samples in different vacuum chambers. Some samples to be transported, such as low-dimensional materials, usually need to be placed in an ultra-high vacuum environment to maintain the cleanliness of the sample surface. In addition, a large number of low-dimensional materials can only maintain specific structures and exhibit novel properties under low temperature conditions (below room temperature, especially a few mK to tens of K).

[0003] However, in currently known vacuum interconnect systems, samples already at low temperatures are typically kept at room temperature within the vacuum transfer chamber. Sample transfer is achieved via a traditional slider and rail. During transfer, friction between the slider and rail generates heat, causing the sample temperature on the slider to rise over time. This heating process can lead to irreversible changes on the sample surface. To address these issues, some vacuum interconnect systems supply cryogenic fluids to the rails, maintaining the sample's low temperature during transfer. However, if the rails are at low temperatures, the transport resistance of the sample-bearing slider increases, the transfer speed slows down, the rail's transfer rate decreases, and prolonged use can lead to wear and even damage. Summary of the Invention

[0004] Therefore, the purpose of this invention is to overcome the shortcomings of the prior art and provide a low-temperature vacuum sample transfer system. The low-temperature vacuum sample transfer system used in this invention has important applications in the fields of vacuum transport and vacuum interconnection. Therefore, the low-temperature vacuum sample transfer system of this invention has important academic applicability and economic benefits.

[0005] According to a first aspect of the present invention, a low-temperature vacuum sample transfer system is provided, comprising: a transfer module configured to carry a sample to be transferred; a transfer cavity for providing a vacuum cavity environment for sample transfer; a magnetic levitation slide rail disposed within the transfer cavity for enabling the transfer module to move without contact along the magnetic levitation slide rail; at least one rapid injection cavity connected to the outside of the transfer cavity, wherein an operation module is disposed inside the rapid injection cavity, the operation module being configured to transfer the sample to the transfer cavity via the rapid injection cavity; functional cavities connected to the outside of the transfer cavity for performing different functional operations on the sample, wherein the operation module is disposed inside each functional cavity for realizing the transfer of the sample between the operation module and the transfer module; and a vacuum module connected to the transfer cavity and configured to maintain a vacuum environment inside the cavity.

[0006] Preferably, the low-temperature vacuum sample transfer system further includes at least one cooling relay station, which is partially disposed inside the transfer cavity and has its own corresponding cooling relay station with each of the rapid sample injection cavities and each of the functional cavities; and at least one low-temperature thermostat, which is disposed outside the transfer cavity and connected to the cooling relay station to cool the cooling relay station.

[0007] Preferably, the functional cavity includes a first functional cavity and a second functional cavity, wherein the first functional cavity is used for adsorption and monitoring of molecules in the sample under low temperature conditions; and the second functional cavity is used for characterization of molecules in the sample under low temperature conditions.

[0008] Preferably, the cooling relay station is capable of telescopic movement within the transfer cavity, and the transfer module is fixed at the cooling relay station for cooling the transfer module.

[0009] Preferably, when the transfer module is moved to the cooling relay station and fixed thereon, the transfer module and the cooling relay station form a heat conduction connection.

[0010] Preferably, when the transfer module arrives at any of the functional cavities, it is fixed and cooled again by the corresponding cooling relay station.

[0011] Preferably, the transfer module includes: a slider, which has a hollow structure and contains a magnet inside for suspending it on the magnetic levitation rail; a magnetic coupling device, disposed within the transfer cavity, configured to interact with a magnetic coupling drive device outside the transfer cavity to generate magnetic force, enabling the transfer module to move without contact along the magnetic levitation rail; a shielding device, configured to wrap around the outside of the transfer module, forming a shielding space between the shielding device and the transfer module to shield the transfer module and the sample from thermal radiation from the outside of the transfer cavity; a connecting device, one end of which is connected to the shielding device and the other end of which is connected to the slider, establishing a thermal connection between the shielding device and the slider; and a cooling device, disposed on the surface of the slider, configured to absorb heat to cool the slider.

[0012] Preferably, the transfer module further includes a temperature measuring device disposed on the surface of the slider and configured to measure the temperature of the slider.

[0013] Preferably, the shielding device is made of a thermally conductive material and has an openable or closable opening for placing and removing the sample. The cooling device is made of a cold-storing material. During the movement of the transfer module, the shielding device can be used to shield thermal radiation, and the cooling device can be used to absorb heat. The two work together to maintain the low temperature of the transfer module.

[0014] Preferably, the connecting device can also be used to fix the shielding device to the slider so that the shielding device and the slider move synchronously.

[0015] This invention provides a low-temperature vacuum sample transfer system for use in vacuum interconnect systems. The transfer system of this invention replaces the traditional slider with a magnetically controlled slider that can be suspended on a magnetic levitation rail. The traditional rail is replaced with a magnetic levitation rail, and the transfer module is suspended on the magnetic levitation rail for contactless movement through magnetic coupling drive, realizing the transfer of samples in vacuum. This reduces transfer resistance, avoids direct contact wear between the transfer stage and the rail, extends the service life of the rail, and extends the low-temperature maintenance time of the sample.

[0016] Furthermore, both the transfer module and the low-temperature vacuum sample transfer system of this invention are equipped with a cooling function, ensuring that the sample is always in an ultra-high vacuum and low-temperature environment. By setting up a low-temperature relay station, the sample is periodically cooled to maintain its low temperature, preserving the cleanliness and low-temperature morphology of the sample surface. This avoids irreversible changes to the sample due to temperature increases, thereby improving experimental efficiency and success rate.

[0017] The transfer system of the present invention uses a combination of magnetic levitation sliding to reduce heat conduction, shielding devices to reduce heat radiation, cooling devices to provide cooling capacity, and cooling relay stations to provide cooling, ensuring that the sample maintains the required low temperature conditions during the transfer process between multiple points in a vacuum environment. Attached Figure Description

[0018] The embodiments of the present invention will be further described below with reference to the accompanying drawings, wherein:

[0019] Figure 1 This is a schematic diagram of the structure of a transfer system in a first application scenario according to an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the structure of a transfer module included in a transfer system in a first application scenario according to an embodiment of the present invention;

[0021] Figure 3 A schematic diagram of the structure of a transfer system in a second application scenario according to an embodiment of the present invention; and

[0022] Figure 4 This is a schematic diagram of the structure of a transfer module included in a transfer system in a second application scenario according to an embodiment of the present invention. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this invention clearer, the invention is further described in detail below through specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0024] The present invention will now be described in detail with reference to the accompanying drawings.

[0025] Figure 1 This is a schematic diagram of the structure of a transfer system 100 according to an embodiment of the present invention in a first application scenario, wherein the first application scenario is the state in which the transfer module 1 of the transfer system 100 is disconnected from the cryogenic relay station 7. In this state, the cryogenic relay station 7 does not cool the transfer module 1, and the transfer module 1 can move freely on the magnetic levitation rail 2. The cryogenic vacuum sample transfer system 100 of the present invention includes: a transfer module 1, a magnetic levitation rail 2, a transfer cavity 3, a rapid sample injection cavity 4, a first functional cavity 8, a second functional cavity 9, and a vacuum module 10.

[0026] In some embodiments, the low-temperature vacuum sample transfer system 100 of the present invention may further include a low-temperature thermostat 6 and a cooling relay station 7.

[0027] In some embodiments, the transfer chamber 3 is a vacuum chamber used to provide a vacuum environment for sample transfer and movement of the transfer module 1. The transfer chamber 3 can be a linear structure, a square structure, a spherical structure, a cylindrical structure, or other structural styles, and its ultra-vacuum environment is maintained by the vacuum module 10.

[0028] Both the transfer module 1 and the magnetic levitation slide rail 2 are located inside the transfer cavity 3. The transfer module 1 can float above the magnetic levitation slide rail 2 for contactless sliding, which reduces transmission resistance, avoids direct contact wear with the magnetic levitation slide rail 2, and extends the service life of the transfer module 1 and the magnetic levitation slide rail 2.

[0029] The transfer cavity 3 may contain multiple cooling relay stations 7, with one part of the cooling relay stations 7 located inside the transfer cavity 3 and another part located outside the transfer cavity 3. The part located outside the transfer cavity 3 is connected to a cryostat 6. The cryostat 6 can maintain the cryostat 7 at a low temperature by establishing heat conduction with the cooling relay stations, thereby enabling the cooling relay stations 7 to cool the transfer module 1 fixed to them.

[0030] The rapid injection chamber 4, the first functional chamber 8, and the second functional chamber 9 each have their own corresponding cooling relay station 7. To ensure that the transfer module 1 and the transfer chamber 3 are always in a low-temperature environment, the cooling relay station 7 is connected to the cryostat 6, and the cooling relay station 7 can extend and retract inside the transfer chamber 3 to fix or detach the transfer module 1 relative to the cooling relay station 7. When the transfer module 1 is fixed at the cooling relay station 7, heat conduction is established between the transfer module 1 and the cooling relay station 7, so that the cryostat 6 can be used to cool the transfer module 1 through the cooling relay station 7.

[0031] The cryostat 6 provides cooling for the cooling relay station 7. The transfer system 100 may include multiple cryostats 6. The number of cryostats 6 can be set according to actual needs to achieve the desired temperature. In addition to providing low temperatures (below room temperature, especially a few mK to tens of K), the cryostat 6 can also operate in an ultra-high vacuum environment.

[0032] In some implementations, the cryostat 6 can be a wet cryostat, such as a Dewar-type cryostat or a continuous flow cryostat, etc., to obtain a low temperature by supplying a cryogenic working fluid into the cryostat 6. The cryostat 6 can also be replaced by a refrigeration device such as a refrigerator to directly obtain a low temperature.

[0033] The rapid injection chamber 4 is connected to the outside of the transfer chamber 3, and an operation module (not shown in the figure) is installed inside it to realize the rapid low-temperature transfer of the sample 12 between the operation module and the transfer module 1. The sample 12 can enter the vacuum transfer chamber 3 through the rapid injection chamber 4 without disrupting the vacuum environment, and be placed on the transfer module 1 fixed at the cooling relay station 7.

[0034] like Figure 2 As shown, the transfer module 1 includes a slider 11, a magnetic coupling device 14, a shielding device 13, a connecting device 17, and a cooling device 16. The magnetic coupling device 14 is disposed inside the transfer cavity 3 and is used to interact with the magnetic coupling drive device 18 outside the transfer cavity 3 to generate magnetic force, so that the transfer module 1 can move without contact along the magnetic levitation slide rail, thereby reducing transmission resistance, avoiding direct contact wear with the magnetic levitation slide rail 2, and extending the service life of the transfer module 1 and the magnetic levitation slide rail 2.

[0035] The transfer module 1 is enclosed by a shielding device 13, which is a flexible, bendable cold shield made of a thermally conductive material such as copper or aluminum. The shielding device 13 forms an opaque shielding space with the transfer module 1 to block external heat radiation from the transfer cavity 3, preventing the temperature of the transfer module 1 from rising. The shielding device 13 also has an openable port (not shown) for placing and removing samples.

[0036] Since the shielding device 13 itself also generates heat radiation to the transfer module 1, and the higher the temperature of the shielding device 13, the stronger the heat radiation, it is also necessary to keep the shielding device 13 at a low temperature. In order to keep the shielding device 13 at a low temperature, when the transfer module 1 is moved to the cooling relay station 7 and fixed, the shielding device 13, the transfer module 1 and the cooling relay station 7 simultaneously establish a stable heat conduction relationship. The cooling relay station 7 can cool the shielding device 13 through heat conduction, keeping it at a low temperature and avoiding heat radiation to the transfer module 1. The shielding device 13 conducts heat with the transfer module 1 through the connecting device 17. The connecting device 17 can be a copper braid or other heat conduction-conducting connecting device, or other heat conduction-conducting metal materials and polymer materials. In addition, the connecting device 17 can also be used to fix the shielding device 13 to the transfer module 1, so as to prevent the shielding device 13 from detaching from the transfer module 1 during the sliding process.

[0037] In some embodiments, the transfer module 1 of the present invention further includes a temperature measuring device 15 disposed on the surface of the slider 11 for measuring the temperature of the slider 11.

[0038] In some implementations, the temperature of the transfer module 1 is measured by the temperature measuring device 15. Once the transfer module 1 reaches the required temperature, for example, when it cools down to a specified temperature, the cooling relay station 7 is detached from the transfer module 1, and the transfer module 1 is placed in a levitated state. Then, the transfer module 1 is manipulated from outside the transfer cavity 3 using a magnetic coupling drive device, allowing it to move non-contactly along the magnetic levitation rail 2. During this movement, the shielding device 13 shields the transfer module 1 from external heat radiation, thereby preventing the temperature of the transfer module 1 from rising.

[0039] A cooling device 16 is disposed on the surface of the transfer module 1 to absorb heat and cool the transfer module 1. The temperature measuring device 15 and the cooling device 16 work together to maintain and monitor the transfer module 1 at the desired low temperature condition.

[0040] In some implementations, when the transfer module 1 reaches other functional cavities, it can be fixed and cooled again by the corresponding cooling relay station 7. If necessary, the port of the shielding device 13 can be opened, and the sample can be transferred between the transfer cavity 3 and the functional cavity through the operating module (not shown in the figure) within the corresponding functional cavity. The sample 12 can also be transferred between different functional cavities or transferred back to the rapid injection cavity 4 from the functional cavity, thus ensuring that the sample is always in a low-temperature environment before being transferred to the rapid injection cavity 4.

[0041] Figure 2 This is a schematic diagram of the structure of a transfer module 1 included in a transfer system 100 in a first application scenario according to an embodiment of the present invention. The transfer module 1 includes a slider 11, a sample 12, a shielding device 13, a magnetic coupling device 14, a temperature measuring device 15, a cooling device 16, and a connecting device 17.

[0042] In some embodiments, the slider 11 in the transfer module 1 can be used to carry one or more samples 12 to be transferred. The slider 11 has a magnet inside and can be suspended on the magnetic levitation rail 2. Under the control of the magnetic coupling device 14, it can move without contact on the magnetic levitation rail 2. The magnetic levitation rail 2 and transfer module 1 described herein are not limited to... Figure 1 As shown in the diagram, multiple transfer modules 1 can be placed on the magnetic levitation rail 2 as needed.

[0043] The shielding device 13 can be a flexible radiation shield that wraps around the outside of the transfer module 1, forming a shielding space between it and the transfer module 1. This space shields the transfer module 1 and the sample 12 from external thermal radiation. The shielding device 13 is flexible and its surface also has heat dissipation capabilities, preventing it from overheating during prolonged operation and thus avoiding a corresponding increase in the temperature of the transfer module 1. The shielding device 13 also has an openable / closable opening for inserting and removing the sample.

[0044] The magnetic coupling device 14 is disposed inside the transfer cavity 3 and can interact with the magnetic coupling drive device 18 outside the transfer cavity 3 to generate a magnetic force. This magnetic force causes the transfer module 1 to move without contact along the magnetic levitation slide rail 2. The materials used for magnetic levitation and magnetic coupling can be permanent magnets, electromagnets, or superconducting magnets, etc.

[0045] The transfer module 1 is also equipped with a temperature measuring device 15 and a cooling device 16. The temperature measuring device 15 can measure the temperature of the sample at the transfer module 1 during the transfer process. The cooling device 16 is made of a cold-storing material, which is a material with a high specific heat capacity, such as oxides, rigid polyurethane tube shells, cryogenic rubber and plastic materials, etc. Its function is to store cold energy and release cold energy through heat conduction to cool the transfer module 1.

[0046] During the movement of the transfer module 1, the shielding device 13 can shield the heat radiation from outside the transfer cavity 3, and the cooling device 16 is disposed on the surface of the transfer module 1 and can be used to cool the transfer module 1. The two work together to maintain the low temperature of the transfer module 1.

[0047] Figure 3 This is a schematic diagram of the structure of a transfer system 100 provided according to an embodiment of the present invention in a second application scenario. The second application scenario is the state in which the transfer module 1 in the transfer system 100 is fixed to the cryogenic relay station 7. Figure 3 The cryogenic transfer system 100 in the middle and Figure 1 The cryogenic transfer system 100 in the middle has the same structural composition, but Figure 3 The cryogenic transfer system 100 shows the state in which the transfer module 1 is fixed by the cryogenic relay station 7.

[0048] exist Figure 3 In the illustrated state, the transfer module 1 cannot move freely on the magnetic levitation rail 2. It can be cooled by the cryogenic relay station 7. When it is fixed again by the cryogenic relay station 7 at the next relay station, it can be cooled again, thus periodically cooling the transfer module 1 to maintain a low temperature. Furthermore, cryogenic relay stations 7 can be set at different intervals according to the characteristics of the sample and its temperature sensitivity to achieve cooling in different periods. This allows for cooling according to actual needs, enhancing the flexibility and effectiveness of the cooling process. By setting up the cryogenic relay station 7 to periodically cool the sample, it keeps the sample at a low temperature, maintaining the cleanliness and low-temperature morphology of the sample surface. This avoids irreversible changes to the sample due to temperature increases, thereby improving experimental efficiency and success rate.

[0049] Figure 4 This is a schematic diagram of the structure of the transfer module 1 included in the transfer system 100 in a second application scenario according to an embodiment of the present invention. Figure 4 Transfer module 1 and Figure 2 The structure of the transfer module 1 in the middle is exactly the same. Figure 4 The transfer module 1 cannot move freely on the magnetic levitation rail 2. It can be cooled by the low temperature relay station 7. When it is fixed again by the low temperature relay station 7 at the next relay station, it can be cooled again by the low temperature relay station 7. This allows the transfer module 1 to be cooled periodically, keeping it in a low temperature state. The low temperature relay stations 7 can be set at different intervals according to the characteristics of the sample 12 and its sensitivity to temperature, so as to achieve cooling in different periodic segments. This allows for cooling according to actual needs, enhancing the flexibility and effectiveness of the cooling process.

[0050] To better illustrate the feasibility and usage of this invention, this application will describe it in conjunction with an example of molecular adsorption and characterization. In this example, the cryostat 6 on the cryogenic relay station 7 uses a pulse tube refrigerator (with a minimum achievable temperature of 10K), the transfer chamber 3 and the magnetic levitation rail 2 use a linear permanent magnet suspension structure and are driven by magnetic coupling, the first functional chamber 8 has the capability of material preparation and monitoring, and the second functional chamber 9 has the capability of material characterization (e.g., scanning tunneling microscopy, infrared spectroscopy, etc.).

[0051] In this example, the sample temperature after molecule adsorption needs to be maintained below 50K to prevent molecule desorption. The specific usage process and method are as follows:

[0052] Step 1: Freshly cleaved sample 12 can be introduced into transfer chamber 3 through rapid injection chamber 4 via sample operation module without disrupting vacuum. The sample can then be placed on transfer module 1 fixed at cooling relay station 7. Transfer chamber 3 is equipped with transfer module 1, and rapid injection chamber is equipped with operation module. Sample transfer can be performed between operation module and transfer module 1. The operation module is configured to maintain a low temperature at all times to prevent heat transfer to transfer module 1 during sample transfer.

[0053] Step 2: The cooling relay station 7 cools the transfer module 1. The temperature of the transfer module is measured by the temperature measuring device 15. Once the temperature reaches the required level (e.g., 15K), the cooling relay station 7 can be detached from the transfer module 1, allowing the transfer module 1 to be in a suspended state. Then, the transfer module 1 is manipulated outside the vacuum using a magnetic coupling drive device, allowing it to move non-contactly along the magnetic levitation rail 2 to the first functional cavity 8, where it is fixed and cooled again by the cooling relay station 7.

[0054] Step 3: After the temperature of the transfer module 1 reaches 15K again, the sample is transferred to the first functional cavity 8 using the operation module at the first functional cavity 8 for adsorption and monitoring of molecules under low temperature conditions (e.g., 10K). The first functional cavity 8 is also equipped with an operation module (not shown in the figure), which can transfer the sample with the transfer module 1 in the transfer cavity 3.

[0055] Step 4: After the desired adsorption effect is achieved, the sample is transferred again using the operation module to the transfer module 1 fixed by the cooling relay station 7 at the first functional chamber 8.

[0056] Step 5: After that, the cooling relay station 7 at the first functional cavity 8 is separated from the transfer module 1, and the transfer module 1 is made to be in a suspended state again. The magnetic coupling drive device 18 is used to manipulate the transfer module 1 outside the vacuum, so that it moves along the magnetic levitation slide rail 2 without contact to the second functional cavity 9, and is fixed and cooled again by the cooling relay station there.

[0057] Step 6: After the temperature reaches 15K again, the sample is transferred to the second functional cavity 9 using the operation module at the second functional cavity 9 for characterization of molecules under low temperature conditions (e.g., 5K). The operation module is installed inside the second functional cavity 9.

[0058] Step 7: If the temperature of the temperature measuring device 15 exceeds 50K during the transfer process between the first functional cavity 8 and the second functional cavity 9, it will cause molecular desorption, and the sample needs to be transferred back to the first functional cavity 8 to be prepared again.

[0059] Step 8: The characterized sample can be transferred back to the first functional chamber 8, or returned to the rapid injection chamber 4 for removal, or temporarily stored in the storage location inside the transfer chamber 3.

[0060] Embodiments of the present invention may include multiple samples 12, multiple transfer modules 1, and multiple functional cavities to achieve different functions, and their operation process is the same as described above.

[0061] The transfer module of this invention replaces the traditional slider with a magnetically controlled slider that can be suspended on a magnetic levitation rail. The low-temperature vacuum sample transfer system of this invention replaces the traditional rail with a magnetic levitation rail. Through magnetic coupling drive, the transfer module is suspended on the magnetic levitation rail for contactless movement, realizing the transfer of samples in a vacuum. This reduces transfer resistance, avoids direct contact wear between the transfer stage and the rail, and extends the service life of the rail.

[0062] Furthermore, both the transfer module and the low-temperature vacuum sample transfer system of this invention are equipped with a cooling function, ensuring that the sample is always in an ultra-high vacuum and low-temperature environment. By setting up a low-temperature relay station, the sample is periodically cooled to maintain its low temperature, preserving the cleanliness and low-temperature morphology of the sample surface. This avoids irreversible changes to the sample due to temperature increases, thereby improving experimental efficiency and success rate.

[0063] This invention provides a novel low-temperature sample transport design that meets the needs of most low-temperature vacuum interconnect systems. It reduces friction between the slider and the slide rail, thereby increasing the transport rate and extending the service life. This invention is mainly used in large-scale vacuum interconnect systems, such as where samples grown at low temperatures in a molecular beam epitaxy growth chamber can be directly transported to the scanning tunneling microscope cavity for characterization via a low-temperature transport stage, while maintaining the sample at a low temperature.

[0064] In addition, it can be made into a small transfer cavity to realize the transfer of vacuum cryogenic samples between non-interconnected cavities.

[0065] The various embodiments of the present invention have been described above. These descriptions are exemplary and not exhaustive, nor are they limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principles, practical application, or technical improvements to the embodiments in the market, or to enable others skilled in the art to understand the embodiments disclosed herein.

Claims

1. A low-temperature vacuum sample transfer system (100), comprising: The transfer module (1) is configured to carry the sample to be transferred; The transfer chamber (3) is configured to provide a vacuum chamber environment for sample transfer; A magnetic levitation slide rail (2) is disposed inside the transfer cavity (3) and configured to allow the transfer module (1) to move along the magnetic levitation slide rail (2) without contact. At least one rapid injection chamber (4) is connected to the outside of the transfer chamber (3), and an operation module is provided inside the rapid injection chamber (4). The operation module is configured to transfer the sample through the rapid injection chamber (4) into the transfer chamber (3). A functional cavity is connected to the outside of the transfer cavity (3) and is configured to perform different functions on the sample. The operation module is provided inside the functional cavity to realize the transfer of the sample between the operation module and the transfer module (1). A vacuum module (10) is connected to the transfer cavity (3) and configured to maintain a vacuum environment inside the cavity (3); as well as At least one cooling relay station (7) is partially located inside the transfer chamber (3), and each of the rapid injection chambers (4) and each of the functional chambers has its own corresponding cooling relay station (7).

2. The low-temperature vacuum sample transfer system (100) according to claim 1, further comprising: At least one cryogenic thermostat (6) is disposed outside the transfer cavity (3) and connected to the cooling relay station (7) for cooling the cooling relay station (7).

3. The low-temperature vacuum sample transfer system (100) according to claim 1, wherein, The functional cavity includes a first functional cavity (8) and a second functional cavity (9). The first functional cavity (8) is used to adsorb and monitor the molecules of the sample (12) under low temperature conditions; the second functional cavity (9) is used to characterize the molecules of the sample (12) under low temperature conditions.

4. The low-temperature vacuum sample transfer system (100) according to claim 1, wherein, The cooling relay station (7) can extend and retract within the transfer cavity (3), and the transfer module (1) can be fixed at the cooling relay station (7) for cooling the transfer module (1).

5. The low-temperature vacuum sample transfer system (100) according to claim 1, wherein, When the transfer module (1) is moved to the cooling relay station (7) and fixed thereon, the transfer module (1) and the cooling relay station (7) form a heat conduction.

6. The low-temperature vacuum sample transfer system (100) according to claim 1, wherein, When the transfer module (1) reaches any of the functional cavities, it is fixed and cooled again by the corresponding cooling relay station (7).

7. The low-temperature vacuum sample transfer system (100) according to claim 1, wherein, The transfer module (1) includes: The slider (11) is a hollow structure with a magnet inside, which is used to suspend it on the magnetic levitation rail (2). A magnetic coupling device (14) is disposed inside the transfer cavity (3) and configured to interact with a magnetic coupling drive device (18) outside the transfer cavity (3) to generate a magnetic force, so that the transfer module (1) moves without contact along the magnetic levitation slide rail (2); The shielding device (13) is configured to wrap around the outside of the transfer module (1) and form a shielding space between it and the transfer module (1) to shield the transfer module (1) and the sample (12) from the outside of the transfer cavity (3); A connecting device (17), one end of which is connected to the shielding device (13) and the other end of which is connected to the slider (11), establishes a thermal connection between the shielding device (13) and the slider (11); and A cooling device (16) is disposed on the surface of the slider (11) and configured to absorb heat to cool the slider (11).

8. The low-temperature vacuum sample transfer system (100) according to claim 7, wherein, The transfer module (1) also includes a temperature measuring device (15), which is disposed on the surface of the slider (11) for measuring the temperature of the slider (11).

9. The cryogenic vacuum sample transfer system (100) according to any one of claims 7 or 8, wherein, The shielding device (13) is made of thermally conductive material and has an opening that can be opened or closed for placing and removing the sample (12); the cooling device (16) is made of cold-storing material. During the movement of the transfer module (1), the shielding device (13) can be used to shield thermal radiation, and the cooling device (16) can be used to absorb heat. The two work together to maintain the low temperature of the transfer module (1).

10. The low-temperature vacuum sample transfer system (100) according to claim 7, wherein, The connecting device (17) is also used to fix the shielding device (13) to the slider (11) so that the shielding device (13) and the slider (11) move synchronously during the sliding process.

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