Film thickness monitoring method and coating equipment for diamond coated cutting tools

Abstract

The present invention discloses a film thickness monitoring method for a diamond-coated tool, wherein the tool includes a blade, and the film thickness monitoring method includes the following steps: obtaining actual parameters of the tool to be coated; determining corresponding simulation parameters according to the actual parameters, selecting corresponding reference workpieces according to the simulation parameters, wherein the reference workpiece includes a truncated cone-shaped simulated blade; constructing a film thickness calculation model, wherein the film thickness calculation model is obtained by the simulation parameters and the weight of the reference workpiece measured in real time, and characterizes the mapping relationship between the film thickness of the simulated blade and the weight of the reference workpiece when the reference workpiece is coated; obtaining the real-time weight of the tool to be coated and / or the real-time weight of the reference workpiece, and determining the real-time film thickness of the blade to be coated according to the film thickness calculation model. The present invention has a simple structure, a direct control method, and a more accurate coating thickness control, which is very conducive to actual operation.

Description

Technical Field

[0001] The invention relates to the field of diamond coating cutting tools, and in particular to a film thickness monitoring method and coating equipment for diamond coating cutting tools. Background Art

[0002] Diamond is the hardest substance in nature, with high wear resistance, low friction coefficient, high chemical inertness, etc. Diamond coating is often deposited by various chemical vapor deposition methods, such as hot wire chemical vapor deposition and plasma chemical vapor deposition, and is widely used in automotive aluminum alloys, special material processing, tool industrialization, etc.

[0003] The coating can effectively improve the hardness, wear resistance, lubricity and heat shielding properties of the tool surface, and prevent the tool from failing prematurely. During the machining process, the coating rubs against the material being machined, and the coating undergoes nano-level wear and peeling. To ensure its performance, the coating is usually required to have a certain thickness and uniform film thickness, generally 1-20μm thick, and the film thickness uniformity is ±15%. Diamond coatings are extremely hard, brittle, and thick, so their film thickness uniformity and film thickness control requirements are higher.

[0004] At present, coating monitoring and control methods are common in the field of optical coating. CN100437024C uses a computer to measure the real-time refractive index of the coating online to accurately control the coating thickness; CN113862629A uses a light source, a spectrum collector, a fixture hole, etc. to form an optical path, and collects the transmittance or reflectivity spectrum of the film deposited on the workpiece disk in real time. The film thickness is calculated in real time by the host computer, realizing online direct monitoring of the thickness of the optical film. CN114589617B uses an eddy current sensing coil and a detection circuit to measure the film thickness of the metal film on the surface of the wafer based on the amplitude method or the phase method.

[0005] Precise control of coating growth can effectively improve the tool surface hardness, wear resistance, lubricity and thermal shielding and other excellent properties. However, due to factors such as the thickness of the tool diamond coating, opacity, and poor conductivity, the above methods cannot achieve precise control. During the manufacturing process of hot-wire diamond coating, changes in temperature and gas will have a greater impact on the thickness. In the actual production process of diamond-coated tools, the coating thickness is generally measured offline, which is not timely enough. Thickness control is mainly achieved through human intervention, by adjusting parameters to compensate for differences between furnaces, and it is impossible to achieve precise control of film thickness. Summary of the invention

[0006] The object of the present invention is to provide a coating thickness control method for a diamond coated tool so as to monitor the film thickness online.

[0007] In order to achieve the above-mentioned purpose, the present invention provides a film thickness monitoring method for a diamond-coated tool, wherein the tool includes a blade, and the film thickness monitoring method includes the following steps: obtaining actual parameters of the tool to be coated; determining corresponding simulation parameters based on the actual parameters, and selecting corresponding reference workpieces based on the simulation parameters, wherein the reference workpiece includes a truncated cone-shaped simulated blade; constructing a film thickness calculation model, wherein the film thickness calculation model is obtained through the simulation parameters and the real-time measured weight of the reference workpiece, and characterizes the mapping relationship between the film thickness of the simulated blade and the weight of the reference workpiece when the reference workpiece is coated; obtaining the real-time weight of the tool to be coated and / or the real-time weight of the reference workpiece during the coating process, and determining the real-time film thickness of the blade based on the film thickness calculation model.

[0008] Preferably, the actual parameters include the diameter of the blade, the blade length of the blade and the weight of the tool to be coated, and the simulation parameters include the lower base diameter and height of the simulated blade, and the original simulated weight of the reference workpiece; the lower base diameter of the simulated blade is equal to the blade diameter, the height of the simulated blade is equal to the blade length, and the original simulated weight of the reference workpiece is equal to the weight of the tool to be coated.

[0009] Preferably, the coating thickness monitoring method also includes the steps of: obtaining a coated tool of the same specification as the tool to be coated; obtaining a coating thickness variation curve of the coated tool blade in the axial direction based on the coating thickness distribution data on the coating thickness of the coated tool blade; and determining the generatrix slope value of the simulated blade using the coating thickness variation curve.

[0010] Preferably, the coating thickness monitoring method further includes the step of placing the tool to be coated and the reference workpiece on a loading assembly of a coating chamber, wherein a weighing assembly is also provided on the loading assembly, and the weighing assembly is used to weigh the weight of the tool to be coated and / or the reference workpiece.

[0011] Preferably, in the step of obtaining the real-time weight of the tool to be coated during the coating process and determining the real-time film thickness of the blade according to the film thickness calculation model, the film thickness calculation model is:

[0012]

[0013] Among them, t is the real-time film thickness of the simulated blade, ΔW is the difference between the real-time weight and the original weight of the n cutting tools to be coated, n is the number of cutting tools to be coated, R is the lower base radius of the simulated blade, r is the upper base radius of the simulated blade, h is the height of the simulated blade, and ρ is the coating density.

[0014] Preferably, in the step of obtaining the real-time weight of the reference workpiece during the coating process and determining the real-time film thickness of the blade according to the film thickness calculation model, the film thickness calculation model is:

[0015]

[0016] Wherein, t is the real-time film thickness of the simulated blade, Δw is the difference between the real-time weight and the original weight of the reference workpiece, R is the lower base radius of the simulated blade, r is the upper base radius of the simulated blade, h is the height of the simulated blade, and ρ is the coating density.

[0017] The present invention also provides a coating device for diamond-coated cutting tools, comprising a coating chamber and a controller, wherein the coating chamber is provided with a loading assembly for loading the cutting tools to be coated, a weighing assembly for obtaining the weight of the cutting tools to be coated, and a hot wire assembly for coating the cutting tools to be coated; the controller is provided with the above-mentioned film thickness calculation model, and the controller is electrically connected to the weighing assembly and the hot wire assembly, respectively, to control the working state of the hot wire assembly according to the actual parameters and real-time weight of the cutting tools to be coated.

[0018] Preferably, the loading assembly includes a coating jig, a detection jig and a cooling table, the coating jig is used to install the tool to be coated, the detection jig is used to install the reference workpiece, the coating jig and the detection jig are both arranged on the cooling table, and the weighing assembly is arranged between the detection jig and the cooling table.

[0019] Preferably, a cooling channel is provided in the cooling platform.

[0020] Preferably, it further comprises a power supply and a switch unit, wherein the power supply, the switch unit and the hot wire assembly are connected in series, and the switch unit is also electrically connected to the controller.

[0021] Compared with the prior art, the coating thickness control method of the diamond coated tool of the present invention selects the corresponding reference workpiece to construct a film thickness calculation model, characterizes the mapping relationship between the film thickness of the simulated blade and the weight of the reference workpiece when the reference workpiece is coated, so as to determine the real-time film thickness of the blade to be coated and realize online monitoring of the film thickness. The present invention has a simple design structure, a direct control method, and more precise coating thickness control, which is very beneficial to actual operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 The present invention is a flow chart of the film thickness monitoring method of the diamond coated tool.

[0023] Figure 2 The present invention is a flow chart of obtaining the generatrix slope value of the simulated blade frustum through the coated tool in the film thickness monitoring method of the diamond coated tool of the present invention.

[0024] Figure 3 It is a schematic structural diagram of a cutting tool to be coated according to the present invention.

[0025] Figure 4 It is a schematic diagram of the structure of the tool to be coated after coating according to the present invention, that is, a schematic diagram of the structure of the coated tool.

[0026] Figure 5 This is a schematic structural diagram of a reference workpiece of the present invention.

[0027] Figure 6 This is a schematic diagram of the structure of the reference workpiece after coating in the present invention.

[0028] Figure 7 The schematic diagram of the structure of the coating equipment of the diamond-coated tool of the present invention is shown in FIG.

[0029] Figure 8 The present invention is a schematic diagram of the display layout of the industrial computer of the coating equipment of the diamond-coated tool.

[0030] Fig. 9 In the coating equipment of the diamond-coated cutting tool of the present invention, before and after coating, the controller sets the weight gain target value and the displayed film thickness value.

[0031] Fig.10 This is a linear curve obtained after data fitting for a coated tool with a diameter of 3.4 mm according to the present invention. DETAILED DESCRIPTION

[0032] In order to explain the technical content, structural features and achieved effects of the present invention in detail, the following is a detailed description in conjunction with the implementation methods and the accompanying drawings.

[0033] A tool is a tool used for cutting processing in mechanical manufacturing, also known as a cutting tool. It generally includes a shank and a blade, wherein the blade is provided with a chip edge and a chip groove. In the process of coating the tool, the coating thickness is generally measured offline, which is not timely enough. The thickness control is mainly achieved through human intervention by adjusting parameters to compensate for the differences between furnaces, and it is impossible to achieve precise control of the film thickness.

[0034] Based on this, an embodiment of the present application provides a film thickness monitoring method for a diamond-coated tool. By selecting the corresponding reference workpiece 10 to construct a film thickness calculation model, the mapping relationship between the film thickness of the simulated blade 101 and the weight of the reference workpiece 10 is characterized when the reference workpiece 10 is coated, so as to determine the real-time film thickness of the blade to be coated and realize online monitoring of the film thickness.

[0035] Figure 1 is a flow chart of a method for monitoring the film thickness of a diamond-coated tool provided in an embodiment of the present application, Figure 1 The method may include but is not limited to steps S1 to S4.

[0036] Step S1, obtaining actual parameters of the tool 9 to be coated; wherein the actual parameters include the diameter of the blade 91, the blade length of the blade 91 and the weight of the tool 9 to be coated.

[0037] In the specific implementation, Figure 3 As shown, the diameter of the blade 91 is the maximum diameter of the radial cross section of the blade 91, and the maximum diameter is 2R0. The blade length of the blade 91 is L, and the original weight of the tool 9 to be coated is W0.

[0038] S2. Determine corresponding simulation parameters according to actual parameters, and select corresponding reference workpiece 10 according to the simulation parameters, wherein the reference workpiece 10 includes a truncated cone-shaped simulated blade 101; wherein the simulated blade 101 is a truncated cone structure, and the simulation parameters include the lower base diameter, upper base diameter and height of the simulated blade 101, and the original simulated weight of the reference workpiece 10.

[0039] In the specific implementation, Figure 5 As shown, the lower base diameter of the simulated blade 101 is 2R, the height is h, and the original simulated weight of the reference workpiece 10 is w0, wherein 2R=2R0, h=L, w0=W0. Based on the above parameters, the upper base diameter of the simulated blade 101 of the corresponding reference workpiece 10 is 2r.

[0040] S3. Construct a film thickness calculation model. The film thickness calculation model is obtained through simulation parameters and the weight of the reference workpiece 10 measured in real time, and represents the mapping relationship between the film thickness of the simulated blade 101 and the weight of the reference workpiece 10 when the reference workpiece 10 is coated.

[0041] In a specific implementation, when the reference workpiece 10 is coated, the thickness variation of the simulated blade 101 and the weight variation of the reference workpiece 10 can be correlated by calculating the volume increased by the reference workpiece 10 during the coating process.

[0042] S4. Obtain the real-time weight of the tool 9 to be coated and / or the real-time weight of the reference workpiece 10 during the coating process, and determine the real-time film thickness of the cutting edge 91 according to the film thickness calculation model.

[0043] Among them, Figures 3 to 6As shown, when obtaining the real-time weight of the reference workpiece 10 during the coating process, the weight change Δw of the reference workpiece 10 can be output based on the real-time weight w1 of the reference workpiece 10 and the original simulated weight w0 of the reference workpiece 10 before coating. The weight change of the reference workpiece 10 is the weight of the coating on the simulated blade 101. The film thickness of the simulated blade 101 can be output based on the film thickness calculation model. The film thickness of the tool 9 to be coated can be obtained based on the film thickness of the simulated blade 101. Since the film thickness growth rates of the reference workpiece 10 and the tool 9 to be coated are the same, the film thickness T of the blade 91 of the tool 9 to be coated is the same as the film thickness t of the simulated blade 101.

[0044] When obtaining the real-time weight of the tool 9 to be coated during the coating process, since the original weight W0 of the tool 9 to be coated is equal to the original simulated weight w0 of the reference workpiece 10, and the film thickness growth rates of the two are the same, that is, the difference between the real-time weight W1 of a single tool 9 to be coated and the original weight W0 is the weight change Δw of the reference workpiece 10.

[0045] When obtaining the real-time weight of the tool to be coated 9 and the real-time weight of the reference workpiece 10 during the coating process, since the sum of the real-time weight W1 of the tool to be coated 9 and the real-time weight w1 of the reference workpiece 10 can be measured, the weight change Δw of the reference workpiece 10 can be obtained by dividing by the number of the tool to be coated 9 and the reference workpiece 10.

[0046] In steps S1 to S4 shown in the embodiment of the present application, a film thickness calculation model is constructed by selecting the corresponding reference workpiece 10 to characterize the mapping relationship between the film thickness of the simulated blade 101 and the weight of the reference workpiece 10 when the reference workpiece 10 is coated, so as to determine the real-time film thickness of the blade to be coated and realize online monitoring of the film thickness.

[0047] like Figure 2 As shown, in some embodiments, the coating thickness monitoring method further includes steps S01 to S03.

[0048] S01, obtaining a coated tool of the same specification as the tool to be coated 9. The coated tool of the same specification as the tool to be coated 9 means that the same specification means that the shape, structure, size and parameters are the same, and the difference between the two is only whether the coating is performed.

[0049] S02, obtaining a coating thickness variation curve based on the coating thickness distribution data on the coated tool blade 91. The coating thickness distribution on the coated tool blade 91 of the same specification is analyzed to obtain a coating thickness variation curve of the coated tool blade 91 in the axial direction.

[0050] In a specific implementation, data analysis can be performed on the coating thickness distribution on the blade 91 of a plurality of coated cutting tools of the same specification, and the accuracy of the above-mentioned variation curve can be improved by calculating the average value.

[0051] S03, determining the generatrix slope value of the simulated blade 101 according to the coating thickness variation curve.

[0052] In a specific implementation, the generatrix slope value of the simulated blade 101 and the slope value of the linear curve are designed to be the same.

[0053] like Figure 3 and 4 As shown, specifically, the coated tool is coated with a coating to form a first coating portion 93. Different specifications and sizes of the to-be-coated tools 9 have different coating thickness requirements. The embodiment of the present invention studies the diamond coating thickness of the coated tools under different specifications and sizes, and tests the coating thickness of the coated tools under different specifications and sizes. It is found that the diamond coating thickness of the coated tool is basically linear with the position change, that is, the coating growth rate from the top of the blade 91 to the bottom of the blade 91 in the axial direction of the coated tool is linear. Under the same process conditions, the coating on the top of the blade 91 grows fastest. The tool coating thickness distribution structure diagram is shown in FIG. Figure 4 As shown, the slope value of the linear curve can be obtained by collecting the coating thickness and the data of the position on the blade 91 corresponding to the coating thickness through multiple measurements and combining with mathematical statistics, such as Fig.10 As shown, data fitting is performed for a coated tool with a diameter of 3.4 mm, wherein the top of the blade 11 is point 0, and it can be obtained that the slope of the coated tool 1 with a diameter of 3.4 mm is 0.0027.

[0054] In other embodiments, the slope values ​​of the generatrix 1011 of the simulated blade on the reference workpiece corresponding to the tools of different specifications can be obtained through steps S01 to S03, so as to obtain a database in which the tools of different specifications correspond to the reference workpieces of different specifications.

[0055] In some embodiments, the coating thickness monitoring method further includes step S04.

[0056] S04, placing the tool to be coated and the reference workpiece on the loading assembly of the coating chamber; Figure 7As shown, a weighing assembly 3 is also provided on the loading assembly, and the weighing assembly 3 is used to weigh the weight of the reference workpiece 10. Specifically, the weighing assembly 3 can be a high-precision analytical balance module, and a one-hundred-thousandth balance module can be selected, with a weighing range of 0-320g, a control accuracy of 0.01mg, and a balance output signal of weight (mg). In some other embodiments, the weighing assembly 3 is used to weigh the real-time weight of the tool 9 to be coated, or the weighing assembly 3 is used to weigh the sum of the real-time weight of the tool 9 to be coated and the real-time weight of the reference workpiece 10.

[0057] In a specific implementation, when the weighing assembly 3 is used to weigh the weight of the tool 9 to be coated, in step S4, the real-time weight W1 of the tool 9 to be coated during the coating process is obtained, and the real-time film thickness of the blade is determined according to the film thickness calculation model. The film thickness calculation model is:

[0058]

[0059] Among them, t is the real-time film thickness of the simulated blade 101, ΔW is the difference between the real-time weight W1 of n cutting tools 9 to be coated and the original weight W0, n is the number of cutting tools to be coated, R is the lower bottom radius of the simulated blade 101, r is the upper bottom radius of the simulated blade 101, h is the height of the simulated blade 101, and ρ is the coating density.

[0060] Specifically, the film thickness calculation model correlates the film thickness change of the simulated blade with the weight change of the reference workpiece by calculating the volume increased by the simulated blade during the coating process.

[0061] Δv=1 / 3πh(R 2 +Rr+r 2 )-1 / 3πh(R 2 +R(r+t)+(r+t) 2 ),

[0062] Among them, the slope value of the generatrix 1011 of the simulated blade

[0063] k=h / (Rr),

[0064] The upper base radius of the simulated blade 101 can be obtained as

[0065] r = R-hk,

[0066] In summary, when the reference workpiece 10 is coated, the weight of the simulated blade 101 during the coating process is

[0067] Δw=ρΔv=1 / 3πhρ(t 2 +(R+2r)t), and Δw=ΔW / n,

[0068] By integrating the deformation, a film thickness calculation model can be obtained to characterize the mapping relationship between the film thickness of the simulated blade and the weight of the reference workpiece when the reference workpiece is coated.

[0069] In another specific implementation, when the weighing component 3 is used to weigh the real-time weight of the simulated blade 101, step S4, obtaining the real-time weight of the simulated blade 101, and determining the real-time film thickness of the blade to be coated according to the film thickness calculation model, the film thickness calculation model is:

[0070]

[0071] Among them, t is the real-time film thickness of the tool 9 to be coated, Δw is the difference between the real-time weight w1 of the simulated blade 101 and the original weight w0, R is the lower bottom radius of the simulated blade 101, r is the upper bottom radius of the simulated blade 101, h is the height of the simulated blade 101, and ρ is the coating density.

[0072] Similarly, a film thickness calculation model can be obtained to characterize the mapping relationship between the film thickness of the simulated blade and the weight of the reference workpiece when the reference workpiece is coated.

[0073] like Figures 1 to 10As shown, an embodiment of the present invention further discloses a coating device for a diamond-coated tool, comprising a coating chamber 1 and a controller 2. The coating chamber 1 is provided with a loading assembly for loading a tool 9 to be coated, a weighing assembly 3 for obtaining the weight of the tool 9 to be coated, and a hot wire assembly 4 for coating the tool 9 to be coated; the controller 2 is provided with the above-mentioned film thickness calculation model, and the controller 2 is electrically connected to the weighing assembly 3 and the hot wire assembly 4 respectively to control the working state of the hot wire assembly 4 according to the actual parameters and real-time weight of the tool 9 to be coated. Specifically, the coating equipment includes a CVD diamond coating chamber, a hot wire assembly 4, a weighing assembly 3 and a controller 2. The weighing assembly 3 can be a high-precision analytical balance module, and a one-hundred-thousandth balance module can be selected. The weighing range is 0-320g, the control accuracy is 0.01mg, and the output signal of the high-precision analytical balance module is weight (mg). The controller 2 is composed of an industrial computer 22 and a PLC 21, etc. The hot wire assembly 4 includes a wire rack and a tantalum wire. It is known that the blade diameter of a certain specification of a tool 9 to be coated is D, D=2R, and the required film thickness is t. During the growth of the diamond coating, when the tool film thickness t reaches the target thickness, the weight change of the reference workpiece 10 and / or the tool 9 to be coated is ΔW; when designing the system, the known parameters in the film thickness calculation model and the above-mentioned film thickness calculation model formula are input into the controller 2, and the logic and program of film thickness monitoring are written using the industrial computer 22. The pre-treated tool 9 to be coated and the reference workpiece 10 are placed in the CVD coating chamber. Before starting the process, the values ​​of the blade diameter D and the target thickness t are input through the industrial computer 22, and the reference workpiece 10 and / or the tool 9 to be coated are placed on the weighing component and then the weighing component is reset to zero. Fig. 9 As shown in the figure, the data read by the weighing component is the weight of the coating thickness, which is more convenient and clear to read. Start the coating process, the coating tool 9 and the reference workpiece 10 begin to increase in weight, the weighing component 3 outputs a weight signal at all times, monitors the weight and film thickness, and the PLC 21 calculates and outputs a curve of film thickness and growth time, as shown in the figure. Figure 8 As shown; when the weighing component 3 detects that the coating film thickness weight change value reaches the target value, a signal is transmitted to PLC21, so that the hot wire component 4 is disconnected and the coating process ends.

[0074] In the embodiment of the present invention, the loading assembly includes a coating jig, a detection jig and a cooling table 5. The coating jig is used to mount the tool 9 to be coated, and the detection jig is used to mount the reference workpiece 10. The coating jig and the detection jig are both arranged on the cooling table 5, and the weighing assembly 3 is arranged between the detection jig and the cooling table 5. Specifically, Figures 3 to 7As shown, the tool 9 to be coated has a blade 91 and a handle 92 arranged below the blade 91, the reference workpiece 10 includes a simulated blade 101 and a simulated handle 102 arranged below the simulated blade 101, the handle 92 has the same structure and material as the simulated handle 102, the coating jig and the inspection jig are generally made of graphite or copper, or ceramic, the blade 91 and the simulated blade 101 are made of metal, the outside of the tool 9 to be coated is covered with a first sleeve to prevent the handle 92 from being coated with a diamond coating, the first sleeve may be made of smooth copper or ceramic, and the first sleeve needs to be polished before each furnace is used, the outside of the reference workpiece 10 is covered with a second sleeve to prevent the simulated handle 102 from being coated with a diamond coating, the second sleeve may be made of smooth copper or ceramic, and the second sleeve needs to be polished before each furnace is used.

[0075] In the embodiment of the present invention, a cooling channel 6 is provided in the cooling platform 5. Specifically, during the coating process, the temperature of the hot wire assembly 4 reaches 2000°C, the temperature of the tool 9 to be coated, the reference workpiece 10, and the weighing assembly 3 continues to rise, and the cooling platform 5 is cooled by heat exchange with cold water at a temperature of 25-30 degrees at the cooling inlet and outlet, so that the temperature of the knife part and the simulated blade 101 is maintained at about 800°C for diamond coating deposition.

[0076] In the embodiment of the present invention, the coating device further comprises a power supply 7 and a switch unit 8, the power supply 7, the switch unit 8 and the hot wire assembly 4 are connected in series, and the controller 2 is also electrically connected to the controller 2 by controlling the switch unit 8. Specifically, Figure 7 As shown, the two ends of the hot wire assembly 4 are respectively connected to the positive and negative electrodes of the DC power supply 7, and the switch unit 8 can be specifically a solenoid valve. When the weighing assembly 3 detects that the weight change value of the reference workpiece 10 reaches the target value, it transmits a signal to the PLC21 to control the triggering of the solenoid valve switch, so that the hot wire assembly 4 is disconnected and the coating process ends.

[0077] In the embodiment of the present invention, during the coating process, when it is necessary to modify the design of this batch of products, the target thickness can be reset to flexibly adjust the process under the needs of new customers; during the coating monitoring process, the system can program the logic and program of weight monitoring through the industrial computer 22, and program the control parameters, such as the power of the power supply 7, the gas ratio, the cooling temperature, etc. For example, during the coating process, the current equipment coating growth data is compared, and if a large change is found, an alarm prompt is issued to remind the technician whether to make adjustments. After confirmation, the system can adjust the power output of the hot wire power supply 7, perform automatic optimization and compensation, and realize semi-automatic monitoring; through the monitoring and parameter control of the film thickness and growth rate, the deposition of the CVD diamond coating is precisely controlled to ensure the excellent performance of the surface hardness, wear resistance, lubricity and heat shielding of the diamond coating; in addition, the result control can also be set. When the film thickness of the equipment is greatly different under the same time setting, the system can automatically extend the growth time to meet the film thickness requirements; if the system detects that the process time has a large change, an alarm prompt can be issued to remind the technician to check the equipment status to maintain the stability of each furnace product.

[0078] The embodiment of the present invention studies the film thickness relationship of the diamond coating of the existing coated tool, designs a matching simulation tool, and uses the online weighing method to monitor the weight change of the simulation tool, that is, the weight change of the diamond coating, to achieve online monitoring of the film thickness. The device and method are simple and direct in design; programmable control parameters, such as power supply 7 power, etc., can be set to achieve deposition control of the CVD diamond coating, thereby accurately controlling the film thickness to ensure the excellent performance of the diamond coating surface hardness, wear resistance, lubricity and thermal shielding. The online monitoring method is designed, and the film thickness data has good timeliness and the thickness is obtained at all times; through online control growth, technicians can optimize and compensate in time, flexibly adjust the process, and respond to new customer needs.

[0079] The above disclosure is only a preferred embodiment of the present invention, and certainly cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made according to the scope of the patent application of the present invention still fall within the scope covered by the present invention.

Claims

1. A method for monitoring the film thickness of a diamond-coated tool, characterized in that: The tool comprises a blade, and the film thickness monitoring method comprises the following steps: Acquiring actual parameters of the tool to be coated, wherein the actual parameters include the diameter of the blade, the blade length of the blade, and the weight of the tool to be coated; Determine corresponding simulation parameters according to the actual parameters, select corresponding reference workpiece according to the simulation parameters, the reference workpiece includes a truncated cone-shaped simulated blade, the simulation parameters include a lower bottom diameter and a height of the simulated blade, and an original simulated weight of the reference workpiece; the lower bottom diameter of the simulated blade is equal to the blade diameter, the height of the simulated blade is equal to the blade length of the blade, and the original simulated weight of the reference workpiece is equal to the weight of the tool to be coated; Constructing a film thickness calculation model, wherein the film thickness calculation model is obtained through the simulation parameters and the weight of the reference workpiece measured in real time, and characterizes the mapping relationship between the film thickness of the simulated blade and the weight of the reference workpiece when the reference workpiece is coated; Acquire the real-time weight of the tool to be coated and / or the real-time weight of the reference workpiece during the coating process, and determine the real-time film thickness of the cutting edge according to the film thickness calculation model; The film thickness monitoring method further comprises the steps of: Obtaining a coated tool of the same specification as the tool to be coated; Obtaining a coating thickness variation curve of the coated tool blade in the axial direction according to the coating thickness distribution data on the coated tool blade; The generatrix slope value of the simulated blade is determined by the variation curve of the coating thickness.

2. The film thickness monitoring method of a diamond-coated tool according to claim 1, characterized in that: The film thickness monitoring method further comprises the steps of: The tool to be coated and the reference workpiece are placed on a loading assembly of a coating chamber. A weighing assembly is also provided on the loading assembly, and the weighing assembly is used to weigh the tool to be coated and / or the reference workpiece.

3. The film thickness monitoring method of a diamond-coated tool according to claim 1, characterized in that: In the step of obtaining the real-time weight of the tool to be coated during the coating process and determining the real-time film thickness of the blade according to the film thickness calculation model, the film thickness calculation model is: Wherein, t is the real-time film thickness of the simulated blade, is the difference between the real-time weight and the original weight of the n cutting tools to be coated, n is the number of cutting tools to be coated, R is the lower base radius of the simulated blade, r is the upper base radius of the simulated blade, h is the height of the simulated blade, is the coating density.

4. The film thickness monitoring method of a diamond-coated tool according to claim 1, characterized in that: In the step of obtaining the real-time weight of the reference workpiece during the coating process and determining the real-time film thickness of the blade according to the film thickness calculation model, the film thickness calculation model is: Wherein, t is the real-time film thickness of the simulated blade, is the difference between the real-time weight and the original weight of the reference workpiece, R is the lower base radius of the simulated blade, r is the upper base radius of the simulated blade, h is the height of the simulated blade, is the coating density.

5. A coating device for a diamond-coated tool, characterized in that: It comprises a coating chamber and a controller, wherein the coating chamber is provided with a loading assembly for loading a tool to be coated, a weighing assembly for obtaining the weight of the tool to be coated, and a hot wire assembly for coating the tool to be coated; The controller is provided with a film thickness calculation model as described in any one of claims 1-4, and the controller is electrically connected to the weighing component and the hot wire component respectively to control the working state of the hot wire component according to the actual parameters and real-time weight of the tool to be coated.

6. The coating device for diamond-coated cutting tools according to claim 5, characterized in that: The loading assembly includes a coating jig, a detection jig and a cooling table. The coating jig is used to install the tool to be coated, and the detection jig is used to install the reference workpiece. The coating jig and the detection jig are both arranged on the cooling table, and the weighing assembly is arranged between the detection jig and the cooling table.

7. The coating device for a diamond-coated tool according to claim 6, characterized in that: A cooling channel is arranged in the cooling platform.

8. The coating device for diamond-coated cutting tools according to claim 5, characterized in that: It also includes a power supply and a switch unit. The power supply, the switch unit and the hot wire assembly are connected in series, and the switch unit is also electrically connected to the controller.

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