Optical waveguide plate with vertical coupling structure and method for manufacturing vertical coupling structure

Abstract

The present application relates to a kind of optical waveguide plate with vertical coupling structure and the production method of vertical coupling structure, optical waveguide plate is provided with vertical coupling structure and waveguide channel, vertical coupling structure is arranged at waveguide channel;The vertical coupling structure includes rectangular slot and spin coating in rectangular slot with inclined plane or concave photosensitive material, inclined plane or concave corresponds with waveguide channel, and inclined plane or concave can make optical waveguide vertical diversion, inclined plane or concave is also plated with gold film or dielectric high reflection film, and resin material is also spin coated in rectangular slot.The present application opens rectangular slot on glass-based waveguide plate, and spin coating photosensitive material in rectangular slot, obtains the inclined plane mirror or concave mirror that can make optical waveguide vertical diversion in rectangular slot using laser etching or gray scale lithography method, improves mirror reflectivity by plating gold film or dielectric high reflection film on inclined plane or concave, spin coating low refractive resin material in rectangular slot protects mirror, solves the process difficulty that glass-based waveguide plate itself is difficult to laser ablation.

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