vacuum chamber

Abstract

The application discloses a vacuum cabin. The vacuum cabin comprises a cabin body, a cabin door, an opening and closing mechanism, a sealing assembly and a locking mechanism. The cabin body has a containing space and an opening, the containing space is communicated with the opening; the cabin door is rotatably installed at the opening; the opening and closing mechanism is arranged on the first side of the cabin body, the opening and closing mechanism comprises a first driving motor and a rotating assembly, the cabin door is connected to the rotating assembly, the first driving motor is drivingly connected with the rotating assembly to drive the rotating assembly to rotate, thereby enabling the cabin door to close or open the opening; the sealing assembly is arranged on the cabin body and surrounds the outer periphery of the opening; a plurality of locking mechanisms are arranged at intervals along the outer periphery of the opening, and the locking mechanisms are connected between the cabin door and the cabin body to at least apply abutting forces to different positions of the outer periphery of the cabin door. The application can solve the problems that the sealing ring between the cabin body and the cabin door in the prior art is unevenly stressed, resulting in poor sealing performance, and the cabin door is manually rotated, resulting in difficult opening and closing of the cabin door and high labor cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum chambers, in particular to a vacuum chamber. BACKGROUND

[0002] The existing vacuum chamber body is provided with a chamber door and a chamber body. The chamber door is usually connected to one side of the chamber body in a hinged manner. When the chamber door is closed with the chamber body, the two should be combined together with a close fit, so as to ensure the good operation of the internal system of the vacuum chamber body. Therefore, in order to realize the reliable sealing of the vacuum chamber, a sealing ring is usually arranged between the chamber door and the chamber body. During the process of vacuumizing after closing the door, the external atmospheric pressure will extrude the chamber door towards the chamber body, and the reliable sealing between the chamber door and the chamber body is realized through the deformation of the sealing ring.

[0003] However, since the chamber door is hinged to the chamber body, during the above-mentioned vacuumizing process, under the action of the external atmospheric pressure, the chamber door can only rotate around the hinge, and the chamber door cannot realize the whole body leaving the chamber body relative to the chamber body, but rotates to approach the chamber body under the atmospheric pressure. At this time, the pressure of the sealing ring close to the hinge is small, and the pressure of the sealing ring far from the hinge is large, which easily causes the uneven force of the sealing ring, and the reliable sealing between the chamber door and the chamber body cannot be realized. At the same time, since the chamber door is hinged to one side of the chamber body, when the chamber door is opened, the chamber door cannot completely leave the chamber body, so that the degree of the chamber door opening is limited, and the opening and closing of the chamber door is manually rotated by artificial, which is laborious and easily leads to the difficulty of opening and closing the chamber door. SUMMARY

[0004] The main purpose of the present application is to provide a vacuum chamber, so as to solve the problems of uneven force of the sealing ring between the chamber body and the chamber door in the prior art, poor sealing, and the difficulty of opening and closing the chamber door caused by manual rotation of the chamber door, and high labor cost.

[0005] According to one aspect of the present application, a vacuum chamber is provided, comprising:

[0006] a chamber body having a containing space and an opening, the containing space being in communication with the opening;

[0007] a chamber door rotatably installed at the opening;

[0008] an opening and closing mechanism arranged on a first side of the chamber body, the opening and closing mechanism comprising a first driving motor and a rotating assembly, the chamber door being connected to the rotating assembly, the first driving motor being drivingly connected with the rotating assembly to drive the rotating assembly to rotate, thereby making the chamber door close or open the opening;

[0009] a sealing assembly arranged on the chamber body and surrounding the outer periphery of the opening;

[0010] locking mechanisms, a plurality of the locking mechanisms are arranged at intervals along the outer periphery of the opening, and the locking mechanisms are connected between the hatch door and the hatch body to at least apply a thrust force to different positions of the outer periphery of the hatch door.

[0011] Further, the rotating assembly comprises:

[0012] a rotating shaft connected with the first driving motor and extending in a first direction;

[0013] a bearing assembly installed on the hatch body and sleeved on the rotating shaft;

[0014] a skeleton oil seal sleeved on the rotating shaft for sealing the bearing assembly.

[0015] Further, the rotating assembly further comprises two bearing seats arranged at intervals, each of the bearing seats is provided with the bearing assembly, both ends of the rotating shaft are installed on the bearing seats through the bearing assemblies, and the bearing assembly comprises at least two bearings.

[0016] Further, the rotating assembly further comprises:

[0017] a plurality of connecting components arranged at intervals between the hatch door and the rotating shaft in the first direction, the connecting component comprises a first connecting part, a second connecting part and an extension section, the first connecting part is sleeved on the rotating shaft and fixedly connected with the rotating shaft, the second connecting part is arranged on the hatch door and fixedly connected with the hatch door, the extension section is arranged between the first connecting part and the second connecting part and fixedly connected with the first connecting part and the second connecting part, and the extension section extends in the radial direction of the rotating shaft.

[0018] Further, the rotation angle θ of the hatch door relative to the opening end surface satisfies the relationship 0°≤θ≤270°.

[0019] Further, the sealing assembly comprises a sealing groove and a sealing ring, the sealing groove is a dovetail groove, the dovetail groove is arranged on the hatch body and surrounds the outer periphery of the opening, and the sealing ring is embedded in the sealing groove.

[0020] Further, the vacuum chamber further comprises a pressure strain sensor arranged between the sealing ring and the sealing groove for detecting the pressure at each position of the sealing ring.

[0021] Further, an annular outer flange is arranged on the outer periphery of the cabin body, the annular outer flange is arranged around the opening, and the locking mechanism comprises:

[0022] Rotary clamping cylinders are arranged on the outer periphery of the hatch door at intervals, and the piston rods of the rotary clamping cylinders extend in the thickness direction of the hatch door.

[0023] Chuck assemblies are arranged on the piston rods one by one, the chuck assemblies comprise support blocks and abutting rods, one end of the support block is fixed on the piston rod and extends in the radial direction of the piston rod by a predetermined length, the abutting rod is arranged on the end of the support block away from the piston rod, and the abutting rod is arranged on the side of the support block close to the hatch door for abutting on the annular outer flange under the driving of the rotary clamping cylinder.

[0024] Further, the locking mechanism further comprises mounting seats, the mounting seats are arranged on the outer periphery of the hatch door at intervals, and each mounting seat has a mounting portion protruding from the outer edge of the hatch door, and the rotary clamping cylinders are arranged on the mounting portions one by one.

[0025] Further, the locking mechanism further comprises:

[0026] Buckle assemblies are arranged on the outer periphery of the hatch door at intervals, and the buckle assemblies comprise buckles and hooks, one of the buckle and the hook is arranged on the hatch door, and the other is arranged on the cabin body, and the buckles or the hooks arranged on the hatch door are arranged on the outer periphery of the hatch door at intervals, and the hooks or the buckles arranged on the cabin body are arranged on the outer periphery of the opening at intervals.

[0027] When the hatch door closes the opening, the buckle assemblies and the rotary clamping cylinders are arranged alternately on the outer periphery of the opening.

[0028] In this application, when the vacuum chamber is actually used, the first drive motor drives the rotating assembly to rotate, thereby rotating the chamber door to open the opening; when the chamber door needs to be closed, the first drive motor drives the rotating assembly to rotate, thereby rotating the chamber door to close the opening. At this time, the vacuum chamber is evacuated, causing the chamber door to be tightly pressed against the chamber body. Thus, the sealing assembly set on the chamber body plays a sealing role. At the same time, the locking mechanism is set at intervals along the outer periphery of the opening and connected between the chamber door and the chamber body. After connection, the locking mechanism can apply a resisting force to different positions on the outer periphery of the chamber door, effectively ensuring that the force on the chamber door is uniform throughout, thereby avoiding the sealing assembly from reducing its sealing performance due to uneven force. In addition, the locking mechanism can also ensure that there is pressure before and after the vacuum chamber is evacuated, which can squeeze the chamber door against the chamber body. Compared with the structure of vacuum chambers in the prior art, this application uses an opening and closing mechanism to replace manual operation and provide sufficient power for the movement of the chamber door, which reduces labor costs to a certain extent. In addition, during the vacuuming process, the locking mechanism ensures that the pressure of each position of the sealing component is consistent, thereby achieving reliable sealing of the sealing component. Attached Figure Description

[0029] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0030] Figure 1 This is a partial structural schematic diagram of the vacuum chamber disclosed in an embodiment of this application;

[0031] Figure 2 This is a front view of the vacuum chamber disclosed in the embodiments of this application;

[0032] Figure 3 The appendices disclosed in the embodiments of this application Figure 1 A partially enlarged schematic diagram of structure A in the middle;

[0033] Figure 4 The appendices disclosed in the embodiments of this application Figure 1 A partially enlarged schematic diagram of the B-structure;

[0034] Figure 5 This is a partial side view of the vacuum chamber disclosed in an embodiment of this application;

[0035] Figure 6 The appendices disclosed in the embodiments of this application Figure 5 Sectional view of AA;

[0036] Figure 7 This is a front view of the vacuum chamber removal hatch disclosed in an embodiment of this application;

[0037] Figure 8A cross-sectional view of the sealing groove disclosed in the embodiments of the present application.

[0038] In the drawings:

[0039] 10, cabin body; 11, annular outer flange; 20, cabin door; 30, opening and closing mechanism; 31, first driving motor; 32, rotating assembly; 321, rotating shaft; 322, bearing assembly; 3221, bearing; 323, skeleton oil seal; 324, bearing seat; 325, connecting component; 3251, first connecting part; 3252, second connecting part; 3253, extension section; 40, sealing assembly; 41, sealing groove; 42, sealing ring; 50, locking mechanism; 51, rotating clamping cylinder; 52, chuck assembly; 521, support block; 522, abutting rod; 53, mounting seat; 531, mounting part; 54, buckle assembly; 541, buckle; 542, clamping hook; 60, pressure strain sensor. DETAILED DESCRIPTION

[0040] It should be noted that the embodiments and features of the embodiments in the present application can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0041] It should be noted that the terms used herein are only intended to describe specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form, unless the context clearly indicates otherwise, and it should also be understood that the terms "comprise" and / or "include" as used in the specification indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0042] The relative arrangement of components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present application unless otherwise specifically stated. At the same time, it should be understood that the sizes of the various parts shown in the drawings are not drawn in proportion to the actual proportions. Techniques, methods and devices known to those of ordinary skill in the relevant art can not be discussed in detail, but should be considered as part of the authorized specification, if appropriate. In all examples shown and discussed herein, any specific value should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of exemplary embodiments can have different values. It should be noted that similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0043] It should be noted that the first direction in the present application is the direction indicated by the letter X in the drawings, and the thickness direction of the cabin door is the direction indicated by the letter Y in the drawings. Figure 1 It should be noted that the first direction in the present application is the direction indicated by the letter X in the drawings, and the thickness direction of the cabin door is the direction indicated by the letter Y in the drawings.Figure 1 The direction indicated by the middle letter Y.

[0044] As mentioned in the background, the existing cabin door of the vacuum chamber is hinged on one side of the chamber body, and under the action of external atmospheric pressure, the cabin door can only rotate around the hinge, so that the sealing ring close to the hinge has smaller pressure, and the sealing ring far from the hinge has larger pressure, thereby causing uneven force on the sealing ring, ultimately reducing the sealing between the cabin door and the chamber body, and the opening and closing of the cabin door is manually rotated by artificial, which is laborious and easy to cause difficulty in opening and closing the cabin door. Therefore, in order to avoid poor sealing caused by uneven force on the sealing ring and reduce labor cost, the inventor of the present application designs a new type of vacuum chamber, which will be described in detail below.

[0045] Referring to Figures 1 to 8 As shown in the drawings, the present application provides a vacuum chamber, which comprises a chamber body 10, a cabin door 20, an opening and closing mechanism 30, a sealing assembly 40 and a locking mechanism 50.

[0046] Wherein, the chamber body 10 has a containing space and an opening (not shown in the drawings), the containing space is communicated with the opening; the cabin door 20 is rotatably installed at the opening; the opening and closing mechanism 30 is arranged on the first side of the chamber body 10, the opening and closing mechanism 30 comprises a first driving motor 31 and a rotating assembly 32, the cabin door 20 is connected to the rotating assembly 32, the first driving motor 31 is drivingly connected with the rotating assembly 32 to drive the rotating assembly 32 to rotate, thereby making the cabin door 20 close or open the opening; the sealing assembly 40 is arranged on the chamber body 10 and surrounds the outer periphery of the opening; a plurality of locking mechanisms 50 are arranged at intervals along the outer periphery of the opening, and the locking mechanism 50 is connected between the cabin door 20 and the chamber body 10 to at least apply a resisting force to different positions of the outer periphery of the cabin door 20.

[0047] In the embodiment, the cabin body 10 has a containing space and an opening, and the opening and closing mechanism 30 includes a first driving motor 31 and a rotating assembly 32. In actual processing of the vacuum cabin, the sealing assembly 40 can be arranged on the cabin body 10 and surrounds the outer periphery of the opening, then the cabin door 20 is installed at the opening, and the opening and closing mechanism 30 is arranged on the first side of the cabin body 10, wherein the first driving motor 31 is drivingly connected with the rotating assembly 32, and the cabin door 20 is connected with the rotating assembly 32. In this way, when the first driving motor 31 is started, the first driving motor 31 drives the rotating assembly 32 to rotate, thereby driving the cabin door 20 to rotate, and further enabling the cabin door 20 to open or close the opening. When the first driving motor 31 drives the rotating assembly 32 to rotate to drive the cabin door 20 to close the opening, the cabin door 20 is attached to the cabin body 10, at this time, the sealing assembly 40 plays a good sealing role, which can effectively ensure that the cabin body 10 has good sealing performance. At the same time, a plurality of locking mechanisms 50 are arranged along the outer periphery of the opening and connected between the cabin door 20 and the cabin body 10. In this way, the locking mechanisms 50 can be used to apply abutting forces to different positions of the outer periphery of the cabin door 20 to ensure that the cabin door 20 is uniformly stressed, thereby preventing the sealing assembly 40 from reducing the sealing performance due to uneven stress, and further improving the sealing performance of the vacuum cabin.

[0048] That is to say, in actual use of the vacuum cabin, when the cabin door 20 needs to be opened, the first driving motor 31 can be used to drive the rotating assembly 32 to rotate, thereby driving the cabin door 20 to rotate to open the opening. When the cabin door 20 needs to be closed, the first driving motor 31 can be used to drive the rotating assembly 32 to rotate, thereby driving the cabin door 20 to rotate to close the opening, at this time, the vacuum cabin is evacuated, and the cabin door 20 is tightly attached to the cabin body 10. In this way, the sealing assembly 40 arranged on the cabin body 10 plays a sealing role, and the locking mechanisms 50 are arranged along the outer periphery of the opening and connected between the cabin door 20 and the cabin body 10. After being connected, the locking mechanisms 50 can apply abutting forces to different positions of the outer periphery of the cabin door 20 to effectively ensure that the cabin door 20 is uniformly stressed, thereby preventing the sealing assembly 40 from reducing the sealing performance due to uneven stress. In addition, the locking mechanisms 50 can also ensure that there is pressure to press the cabin door 20 towards the cabin body 10 before and after the vacuum cabin is evacuated. Compared with the structure of the vacuum cabin in the prior art, the opening and closing mechanism 30 of the embodiment is used to replace manual operation to provide sufficient power for the movement of the cabin door 20, thereby reducing the labor cost to a certain extent, and the locking mechanisms 50 are used to ensure that the sealing assembly 40 is uniformly stressed at different positions during the evacuation process, thereby realizing reliable sealing of the sealing assembly 40.

[0049] Further, referring to Figure 1 and Figure 6As shown, the rotating assembly 32 in the embodiment includes a rotating shaft 321, a bearing assembly 322 and a skeleton oil seal 323. The rotating shaft 321 is connected with the first driving motor 31 and extends in the first direction; the bearing assembly 322 is installed on the cabin body 10 and is sleeved on the rotating shaft 321; and the skeleton oil seal 323 is sleeved on the rotating shaft 321 to seal the bearing assembly 322. The rotating shaft 321 is connected with the output shaft of the first driving motor 31 through a shaft coupling and rotates under the driving of the first driving motor 31, thereby driving the hatch door 20 to rotate to realize the opening and closing of the hatch door 20. The first driving motor 31 in the embodiment includes a torque motor and a speed reducer. The torque motor provides power for the rotating shaft 321 to drive the rotating shaft 321 to rotate, and the speed reducer functions to reduce speed and increase torque, so that a small-power motor can be selected, which is more energy-saving and environmentally friendly. The bearing assembly 322 can reduce the friction of the rotating shaft 321, so that the rotating shaft 321 can rotate smoothly, and the bearing assembly 322 can provide support for the rotating shaft 321 to ensure stable operation of the rotating shaft 321 during rotation. The presence of the skeleton oil seal 323 can prevent the lubricating grease on the bearing assembly 322 from leaking, and can isolate the bearing assembly 322 from the external environment, thereby preventing external impurities from entering the bearing assembly 322 and causing damage to the bearing assembly 322.

[0050] Further, referring to Figure 1 and Figure 6 As shown, the rotating assembly 32 in the embodiment further includes two bearing seats 324 arranged at intervals, each bearing seat 324 is provided with a bearing assembly 322, both ends of the rotating shaft 321 are installed on the bearing seats 324 through the bearing assemblies 322, and the bearing assembly 322 includes at least two bearings 3221. The bearing seat 324 can support the bearing, thereby supporting the rotating shaft 321 to rotate in the bearing seat 324 and keeping the position stable, thereby avoiding the rotating shaft 321 from deviating or tilting to ensure the stability of the rotating shaft 321 in operation. In the embodiment, the bearing seat 324 is connected with the fixed block, so that the opening and closing mechanism 30 can be installed on the first side of the cabin body 10 to provide rotating power for the hatch door 20, which is simple to operate and easy to implement. Meanwhile, the bearing 3221 in the embodiment includes a deep groove ball bearing, an angular contact ball bearing and a thrust bearing, and is arranged in each bearing seat 324 in the combination of the deep groove ball bearing and the angular contact ball bearing and the combination of the angular contact ball bearing and the thrust bearing. In this way, not only can the rotating shaft 321 be well supported, but also the rotating shaft 321 can rotate smoothly and avoid shaking or tilting, thereby being able to drive the hatch door 20 to rotate under the driving of the first driving motor 31.

[0051] Further, referring to Figures 1 to 3As shown, in order to expand the opening degree of the hatch 20 to ensure that the vacuum chamber has good passability, the rotating assembly 32 in the embodiment further comprises a connecting component 325, the connecting component 325 comprises a plurality of connecting components 325 which are arranged between the hatch 20 and the rotating shaft 321 in the first direction, the connecting component 325 comprises a first connecting portion 3251, a second connecting portion 3252 and an extension segment 3253, the first connecting portion 3251 is sleeved on the rotating shaft 321 and fixedly connected with the rotating shaft 321, the second connecting portion 3252 is arranged on the hatch 20 and fixedly connected with the hatch 20, the extension segment 3253 is arranged between the first connecting portion 3251 and the second connecting portion 3252 and fixedly connected with the first connecting portion 3251 and the second connecting portion 3252, and the extension segment 3253 extends along the radial direction of the rotating shaft 321. In this way, when the first driving motor 31 drives the rotating shaft 321 to rotate to drive the hatch 20 to open the opening, the opening degree of the hatch 20 is expanded from the circular motion with the side of the chamber body 10 as the center to the circular motion with the rotating shaft 321 as the center, the radius of the circular motion is increased by the length of the extension segment 3253, and the opening degree of the hatch 20 is increased to a certain extent.

[0052] Specifically, the rotating angle θ of the hatch 20 in the embodiment relative to the opening end surface satisfies the relationship 0°≤θ≤270°, for example, 0°, 25°, 50°, 75°, 100°, 150°, 200°, 250°, 270°. In this way, the vacuum chamber can have good passability, so that various complex parts can enter the vacuum chamber.

[0053] Further, referring to Figure 5 As a result Figure 6 As shown, in order to ensure that the vacuum chamber has good sealing performance, the sealing assembly 40 in the embodiment comprises a sealing groove 41 and a sealing ring 42, the sealing groove 41 is a dovetail groove, the dovetail groove is arranged on the chamber body 10 and surrounds the outer periphery of the opening, and the sealing ring 42 is embedded in the sealing groove 41. The existence of the dovetail groove can prevent the sealing ring 42 from falling out of the groove, thereby improving the sealing effect between the chamber body 10 and the hatch 20, and further ensuring the good operation of the internal system of the vacuum chamber.

[0054] Furthermore, the vacuum chamber in this embodiment also includes a pressure strain sensor 60, which is disposed between the sealing ring 42 and the sealing groove 41 to detect the pressure at various points on the sealing ring 42. Thus, when the vacuum chamber begins evacuation, the door 20 is forced towards the chamber body 10 under the pressure of the external air, which compresses the sealing ring 42, affecting its sealing performance. Therefore, this embodiment utilizes the pressure strain sensor 60 to detect the pressure at various points on the sealing ring 42. When the pressure strain sensor 60 detects an abnormal pressure at a certain point on the sealing ring, it will trigger an alarm through the main control system, at which point the vacuum chamber stops evacuating. During the evacuation process, if the door 20 is pressed evenly against the chamber body 10, and the contact between the door 20, the sealing ring 42, and the chamber body 10 is good, the pressure on the sealing ring 42 will remain consistent, thus maintaining a uniform compression of the pressure strain sensor 60, preventing any point from experiencing excessive compression. In this case, the pressure strain sensor 60 will not issue an alarm signal.

[0055] Further, see Figures 1 to 2 as well as Figure 4 As shown, in this embodiment, the outer periphery of the cabin 10 is provided with an annular outer flange 11, which surrounds the opening. The locking mechanism 50 includes a rotary clamping cylinder 51 and a clamping assembly 52. ​​Multiple rotary clamping cylinders 51 are spaced apart along the outer periphery of the cabin door 20, and the piston rods of the rotary clamping cylinders 51 extend along the thickness direction of the cabin door 20. Multiple clamping assemblies 52 are also included, each corresponding to a piston rod. Each clamping assembly 52 includes a support block 521 and a push rod 522. One end of the support block 521 is fixed to the piston rod and extends a predetermined length radially along the piston rod. The push rod 522 is located at the end of the support block 521 away from the piston rod and is also located on the side of the support block 521 near the cabin door 20 to abut against the annular outer flange 11 under the action of the rotary clamping cylinder 51. In this embodiment, the rotary clamping cylinder 51 is a 180° rotary clamping cylinder 51. When the first drive motor 31 drives the rotating assembly 32 to rotate, thereby causing the hatch 20 to press tightly against the cabin body 10, the system controls the clamping assembly 52 of the rotary clamping cylinder 51 to rotate 180°. Then, through the retraction of the piston rod, the abutment rod 522 abuts against the annular outer flange 11 to ensure effective force on the hatch 20. Simultaneously, this embodiment provides five rotary clamping cylinders 51. The position of these rotary clamping cylinders 51 on the hatch 20 is shown in [reference needed]. Figures 1 to 2As shown, thus, the uniform force on the hatch door 20 can be guaranteed, and the sealing performance of the sealing ring 42 in the sealing assembly 40 can be effectively avoided from being reduced due to uneven force, and the sealing effect is improved to a certain extent. It can be understood that the embodiment can also include six or more than six rotary clamping cylinders 51 and chuck assemblies 52, as long as other deformation modes under the concept of the application are within the protection scope of the application.

[0056] Further, the locking mechanism 50 in the embodiment further includes a plurality of mounting seats 53, the mounting seats 53 are arranged at intervals along the outer periphery of the hatch door 20, and each mounting seat 53 has a mounting portion 531 protruding from the outer edge of the hatch door 20, and the rotary clamping cylinder 51 is correspondingly mounted on the mounting portion 531, as shown in Figure 1 and Figure 4 As shown, the mounting seat 53 in the embodiment includes five mounting seats 53, the five mounting seats 53 are arranged at intervals along the outer periphery of the hatch door 20 and are fixedly connected with the hatch door 20 through bolts, studs and the like locking members, and the rotary clamping cylinder 51 is correspondingly mounted on the mounting portion 531 to effectively bear the force on each part of the hatch door 20. When the hatch door 20 needs to be opened, the system is first used to control the rotary clamping cylinder 51 to loosen the hatch door 20 and the cabin body 10, then the chuck assembly 52 is rotated by 180° to avoid the chuck assembly 52 from colliding with the annular outer flange 11 of the cabin body 10 when the hatch door 20 is opened, which prolongs the service life of the chuck assembly 52 to a certain extent, and effectively avoids the cabin body 10 from being damaged, and finally the first driving motor 31 is controlled by the system to drive the rotating shaft 321 to rotate to drive the hatch door 20 to rotate, so that the hatch door 20 is opened.

[0057] Further, as shown in Figures 1 to 2 and Figure 4As shown, the locking mechanism 50 in the embodiment further comprises a buckle assembly 54, the buckle assembly 54 comprises a plurality of buckle assemblies 54, each of which comprises a buckle 541 and a hook 542, one of the buckle 541 and the hook 542 is arranged on the hatch door 20, and the other is arranged on the cabin body 10, and the plurality of buckles 541 or hooks 542 arranged on the hatch door 20 are arranged along the outer periphery of the hatch door 20, and the plurality of hooks 542 or buckles 541 arranged on the cabin body 10 are arranged along the outer periphery of the opening; when the hatch door 20 closes the opening, the buckle assembly 54 and the rotary clamping air cylinder 51 are alternately arranged along the outer periphery of the opening. In the embodiment, the buckle 541 is arranged on the cabin body 10, and the hook 542 is arranged on the hatch door 20, and the clamping of the hatch door 20 and the cabin body 10 can be achieved by buckling the hook 542 on the buckle 541, thereby ensuring that the force of the hatch door 20 is evenly distributed. Of course, the buckle 541 can also be arranged on the hatch door 20, and the hook 542 can be arranged on the cabin body 10, as long as it is other deformation modes under the concept of the present application, which is within the protection scope of the present application. Specifically, the buckle assembly 54 in the embodiment is specifically a quick clamp for manually clamping and buckling the hatch door 20 and the cabin body 10. The locking mechanism 50 of the embodiment adopts two sets of locking devices of the rotary clamping air cylinder 51 and the buckle assembly 54, which are backup for each other, when the rotary clamping air cylinder 51 fails and causes uneven force of the hatch door 20, the existence of the buckle assembly 54 can make up for the deficiency of the failure of the rotary clamping air cylinder 51, thereby ensuring that the force between the hatch door 20 and the cabin body 10 always remains uniform, thereby ensuring the reliable sealing of the vacuum cabin.

[0058] In summary, the vacuum cabin in the present application has the following advantages:

[0059] (1) The vacuum cabin of the present application controls the opening and closing of the hatch door by combining the torque motor, the speed reducer and the rotating shaft. Since the motor control is accurate and controllable, the opening degree of the hatch door can be controlled at any angle, and the opening degree of the hatch door ranges from 0° to 270°, so that the vacuum cabin has good passability;

[0060] (2) The sealing groove of the vacuum cabin of the present application adopts a dovetail groove structure. When the sealing ring is clamped into the sealing groove, the blocking effect of the dovetail effectively prevents the sealing ring from falling off, thereby ensuring the reliable sealing of the vacuum cabin to a certain extent;

[0061] (3) The present application increases a pressure strain sensor between the sealing groove and the sealing ring to monitor the pressure of each part of the sealing ring in real time, so as to reflect the force condition of each part of the sealing ring in real time. When the sealing appears abnormally, the position of the air leakage can be quickly understood to ensure the quick maintenance of the system. At the same time, the pressure strain sensor can quickly alarm once it detects an abnormality, so as to achieve effective early warning of the system;

[0062] (4) The locking mechanism of the application adopts two sets of clamping devices, i.e., a rotary clamping cylinder and a buckle assembly, which are backup to each other, effectively ensuring that the clamping between the hatch and the cabin body is always effective, and making the force on each part of the hatch uniform, thereby improving the sealing performance of the vacuum cabin.

[0063] For the convenience of description, spatial relative terms such as "above", "upper", "top surface", "upper" and the like can be used herein to describe the spatial positional relationship of one device or feature with other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the drawings. For example, if the device in the drawing is inverted, the device described as "above" or "above" the other device or structure will be positioned "below" or "below" the other device or structure. Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0064] In addition, it should be noted that the use of the words "first", "second" and the like to define parts is only for the convenience of distinguishing the corresponding parts, and the above words have no special meaning unless otherwise stated, and therefore cannot be understood as limiting the scope of protection of the application.

[0065] The above is only the preferred embodiment of the application and is not intended to limit the application. For those skilled in the art, the application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the application shall be included in the protection scope of the application.

Claims

1. A vacuum chamber, characterized in that, include: The cabin (10) has a accommodating space and an opening, the accommodating space being in communication with the opening; A hatch (20) is rotatably mounted at the opening; An opening and closing mechanism (30) is provided on the first side of the cabin (10). The opening and closing mechanism (30) includes a first drive motor (31) and a rotating assembly (32). The cabin door (20) is connected to the rotating assembly (32). The first drive motor (31) is driven to drive the rotating assembly (32) to rotate, thereby causing the cabin door (20) to close or open the opening. A sealing assembly (40) is disposed on the cabin (10) and surrounds the outer periphery of the opening; Locking mechanisms (50), a plurality of said locking mechanisms (50) are spaced apart along the outer periphery of said opening, and said locking mechanisms (50) are connected between said hatch (20) and said cabin (10) to at least apply a resisting force at different positions on the outer periphery of said hatch (20); The outer periphery of the cabin (10) is provided with an annular outer flange (11), the annular outer flange (11) is arranged around the opening, and the locking mechanism (50) includes: Rotary clamping cylinder (51), the rotary clamping cylinder (51) includes a plurality of cylinders, the plurality of rotary clamping cylinders (51) are spaced apart along the outer periphery of the hatch (20), and the piston rod of the rotary clamping cylinder (51) extends along the thickness direction of the hatch (20); The chuck assembly (52) includes multiple chuck assemblies (52), each of which is correspondingly disposed on the piston rod. Each chuck assembly (52) includes a support block (521) and a push rod (522). One end of the support block (521) is fixed to the piston rod and extends a predetermined length in the radial direction of the piston rod. The push rod (522) is disposed at the end of the support block (521) away from the piston rod and is disposed on the side of the support block (521) near the hatch (20) for abutting against the annular outer flange (11) under the drive of the rotary clamping cylinder (51).

2. The vacuum chamber according to claim 1, characterized in that, The rotating assembly (32) includes: A rotating shaft (321) is connected to the first drive motor (31) and extends along a first direction; A bearing assembly (322) is mounted on the housing (10) and sleeved on the rotating shaft (321); A skeleton oil seal (323) is sleeved on the rotating shaft (321) to seal the bearing assembly (322).

3. The vacuum chamber according to claim 2, characterized in that, The rotating assembly (32) further includes two spaced bearing seats (324), each bearing seat (324) is provided with the bearing assembly (322), the two ends of the rotating shaft (321) are respectively mounted on the bearing seat (324) through the bearing assembly (322), and the bearing assembly (322) includes at least two bearings (3221).

4. The vacuum chamber according to claim 2, characterized in that, The rotating assembly (32) further includes: A connecting component (325) is provided, comprising a plurality of connecting components (325), which are spaced apart along the first direction between the hatch (20) and the rotating shaft (321). Each connecting component (325) includes a first connecting portion (3251), a second connecting portion (3252), and an extension portion (3253). The first connecting portion (3251) is sleeved on the rotating shaft (321) and fixedly connected to the rotating shaft (321). The second connecting portion (3252) is disposed on the hatch (20) and fixedly connected to the hatch (20). The extension portion (3253) is disposed between the first connecting portion (3251) and the second connecting portion (3252) and fixedly connected to both the first connecting portion (3251) and the second connecting portion (3252). The extension portion (3253) extends along the radial direction of the rotating shaft (321).

5. The vacuum chamber according to claim 1, characterized in that, The rotation angle θ of the hatch (20) relative to the opening end face satisfies the relationship 0°≤θ≤270°.

6. The vacuum chamber according to claim 1, characterized in that, The sealing assembly (40) includes a sealing groove (41) and a sealing ring (42). The sealing groove (41) is a dovetail groove, which is disposed on the cabin body (10) and surrounds the outer periphery of the opening. The sealing ring (42) is embedded in the sealing groove (41).

7. The vacuum chamber according to claim 6, characterized in that, The vacuum chamber also includes a pressure strain sensor (60), which is disposed between the sealing ring (42) and the sealing groove (41) for detecting the pressure at various points of the sealing ring (42).

8. The vacuum chamber according to claim 1, characterized in that, The locking mechanism (50) further includes a mounting base (53), which includes a plurality of mounting bases (53) and is spaced apart along the outer periphery of the hatch (20). Each mounting base (53) has a mounting portion (531) protruding from the outer edge of the hatch (20), and the rotary clamping cylinder (51) is mounted on the mounting portion (531) in a corresponding manner.

9. The vacuum chamber according to claim 1, characterized in that, The locking mechanism (50) further includes: The latching assembly (54) includes multiple latching assemblies (54), each of which includes a latch (541) and a hook (542). One of the latch (541) and the hook (542) is disposed on the hatch (20), and the other is disposed on the cabin body (10). The multiple latches (541) or hooks (542) disposed on the hatch (20) are spaced apart along the outer periphery of the hatch (20), and the multiple hooks (542) or latches (541) disposed on the cabin body (10) are spaced apart along the outer periphery of the opening. When the hatch (20) closes the opening, the latch assembly (54) and the rotary clamping cylinder (51) are alternately arranged along the outer periphery of the opening.

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