Storage unit structure and preparation method thereof, read-write circuit and memory

Abstract

The present disclosure relates to a memory cell structure and a preparation method thereof, a read-write circuit and a memory, wherein the memory cell structure comprises a substrate, an isolation structure, a floating cell structure, a channel structure, a first gate structure and a second gate structure; the isolation structure is formed on the surface of the substrate; the floating cell structure is located on the surface of the isolation structure away from the substrate and extends along a first direction; the channel structure partially overlaps with the floating cell structure, comprising a first part located on the outer surface of the floating cell structure, and a second part and a third part located on opposite sides of the floating cell structure along a second direction; the first gate structure is located on the surface of the first part away from the substrate; the second gate structure is formed at one end of the floating cell structure along the first direction and is insulated from the first gate structure, thereby avoiding the refresh circuit from causing an increase in the volume and power consumption of the memory cell, and improving the reliability, response speed and storage density of the semiconductor memory device.

Description

Technical Field

[0001] The present disclosure relates to the technical field of integrated circuit design and manufacturing, and in particular to a storage unit structure and a preparation method thereof, a read-write circuit and a memory. Background Art

[0002] With the continuous development of integrated circuit manufacturing technology, the market has put forward higher requirements on the performance and size of semiconductor products. For semiconductor memory devices, how to ensure that the power consumption of the product does not increase, the response speed and storage density do not decrease while the device size is miniaturized is one of the goals that relevant researchers are constantly pursuing.

[0003] However, in a conventional dynamic random access memory, a storage cell is made of a single transistor and a single capacitor. For a semiconductor memory device of this structure, reading consumes the power of the capacitor, resulting in a reduced response speed. Even if reading is not performed, the charge may leak from the capacitor through the transistor, resulting in a reduced reliability of the semiconductor memory device. Therefore, the storage cell of a single transistor and a single capacitor needs to be refreshed regularly to maintain data, resulting in increased power consumption of the device. In addition, the refresh circuit also occupies the volume of the storage cell, which hinders the miniaturization of the size of the dynamic random access memory. Summary of the invention

[0004] Based on this, the present disclosure provides a storage cell structure and its preparation method, a read-write circuit and a memory, which can at least avoid the increase in the volume and power consumption of the storage cell due to the refresh circuit, and avoid the reduction in the reliability of the semiconductor storage device due to charge leakage of the storage cell, thereby improving the response speed and storage density of the semiconductor storage device.

[0005] In order to solve the above-mentioned technical problems and other problems, according to some embodiments, one aspect of the present disclosure provides a memory cell structure, which includes a substrate, an isolation structure, a floating cell structure, a channel structure, a first gate structure and a second gate structure; the isolation structure is formed on the surface of the substrate; the floating cell structure is located on the surface of the isolation structure away from the substrate, extending along a first direction; the channel structure partially overlaps with the floating cell structure and is insulated from each other, and the channel structure is configured as: including a first part located on the outer surface of the floating cell structure, and a second part and a third part located on opposite sides of the floating cell structure along a second direction, the second part and the third part are both electrically connected to the first part and are both located on the surface of the isolation structure away from the substrate, and the second direction intersects with the first direction; the first gate structure is located on the surface of the first part away from the substrate; the second gate structure is formed at one end of the floating cell structure along the first direction, and is insulated from the first gate structure.

[0006] In the memory cell structure of the above-mentioned embodiment, an isolation structure, a floating cell structure, a channel structure, a first gate structure and a second gate structure are sequentially arranged on a substrate, so that charge can be stored in the floating cell structure, and a current flows between the floating cell structure and the channel structure to realize the storage function of the memory cell while avoiding charge leakage. Since the volume of the separate capacitor structure is relatively reduced and the energy consumption of the peripheral circuit is reduced, the present embodiment reduces the power consumption of the semiconductor memory device, and can reduce the volume of the memory cell while ensuring the storage capacity of the semiconductor memory device, thereby improving the response speed and storage density of the semiconductor memory device.

[0007] In some embodiments, the first portion, the second portion, and the third portion of the channel structure are an integrally formed structure prepared using the same process steps, and an insulating layer is provided between the first portion of the channel structure and the floating unit structure.

[0008] In some embodiments, the first gate structure includes a first gate dielectric layer and a first gate conductive layer; the first gate dielectric layer at least covers the outer surface of the channel structure; the first gate conductive layer is located on the surface of the first gate dielectric layer away from the substrate, and at least covers the surface of the first part of the floating unit structure away from the substrate.

[0009] In some embodiments, the storage cell structure also includes a target protection structure, which covers the exposed outer surface of the floating cell structure and is configured as follows: the target protection structure includes a first oxide protection layer, a nitride protection layer and a second oxide protection layer, the first oxide protection layer is formed on the outer surface of the floating cell structure, the nitride protection layer is located on the surface of the first oxide protection layer away from the floating cell structure, and the second oxide protection layer is located on the surface of the nitride protection layer away from the floating cell structure, wherein the top surface of the second oxide protection layer is flush with the top surface of the first gate conductive layer.

[0010] In some embodiments, the second gate structure includes a second gate conductive layer and a second gate dielectric layer; the second gate conductive layer and the first gate conductive layer are prepared in the same process step and are located at an end surface of the floating unit structure; the second gate dielectric layer is the portion of the second oxide protective layer located between the end surface and the second gate conductive layer.

[0011] In some embodiments, the memory cell structure also includes a first gate electrode structure, a second gate electrode structure, a source electrode structure and a drain electrode structure; the first gate electrode structure is located on the top surface of the first gate conductive layer; the second gate electrode structure is located on the top surface of the second gate conductive layer; the source electrode structure is located on the top surface of the second part of the channel structure; and the drain electrode structure is located on the top surface of the third part of the channel structure.

[0012] In some embodiments, the isolation structure includes a first oxide isolation layer, a nitride isolation layer and a second oxide isolation layer; the first oxide isolation layer is located on the surface of the substrate; the nitride isolation layer is located on the surface of the first oxide isolation layer away from the substrate; the second oxide isolation layer is located on the surface of the nitride isolation layer away from the substrate.

[0013] In some embodiments, the material of the channel structure includes polysilicon, indium gallium zinc oxide, indium gallium arsenide, gallium nitride or a combination thereof; and the material of the floating unit structure includes doped polysilicon.

[0014] According to some embodiments, another aspect of the present disclosure provides a read-write circuit, which includes a storage cell structure of any of the above embodiments, and is configured as follows: a first gate structure is electrically connected to a read word line; a second gate structure is electrically connected to a write word line; a second portion of the channel structure is electrically connected to a read bit line; a third portion of the channel structure is electrically connected to a write bit line; during a write state: the write word line is controlled to provide a first level signal to the second gate structure, so that the floating cell structure captures and stores electrons and is written to a first value; the write word line is controlled to provide a second level signal to the second gate structure, and the read word line is controlled to provide a third level signal to the first gate structure, so that the electrons stored in the floating cell structure are reset and are written to a second value, and the amplitude of the second level signal is smaller than the amplitude of the first level signal; during a read state: the read word line is controlled to provide a third level signal to the first gate structure, and the first value is determined to be read based on the acquired first drain current, and the second value is determined to be read based on the acquired second drain current, and the amplitude of the first drain current is smaller than the amplitude of the second drain current.

[0015] In the read-write circuit of the above embodiment, the first gate structure and the second gate structure are electrically connected to the word line, and the channel structure is electrically connected to the bit line. The word line is controlled to provide a level signal to the first gate structure and the second gate structure, the flow of electrons in the floating unit structure, and the acquisition of the drain current, thereby realizing the storage function and the read-write function of the storage unit, while avoiding charge leakage. Since the volume of the separate capacitor structure is relatively reduced and the energy consumption of the peripheral circuit is reduced, this embodiment reduces the power consumption of the semiconductor memory device, and can reduce the volume of the storage unit while ensuring the storage capacity of the semiconductor memory device, thereby improving the response speed and storage density of the semiconductor memory device.

[0016] In some embodiments, multiple memory cell structures are arranged in multiple rows and columns, and are configured as follows: the memory cell structures located in the same row are all connected to the same read word line and the same write word line; the memory cell structures located in the same column are all connected to the same read bit line and the same write bit line; the memory cell structures in two adjacent rows are connected to different read word lines and different write word lines; the memory cell structures in two adjacent columns are connected to different read bit lines and different write bit lines.

[0017] In some embodiments, the first value is "0" and the second value is "1", thereby realizing the reading and writing functions of the read-write circuit for the value "0" and the value "1".

[0018] According to some embodiments, another aspect of the present disclosure provides a memory, the memory comprising the read / write circuit of any one of the above embodiments.

[0019] According to some embodiments, another aspect of the present disclosure provides a read-write circuit control method, the read-write circuit includes a storage cell structure of any one of the above embodiments, and the storage cell structure is configured as: a first gate structure is electrically connected to a read word line, a second gate structure is electrically connected to a write word line, a second part of the channel structure is electrically connected to a read bit line, and a third part of the channel structure is electrically connected to a write bit line; the read-write control method includes: during a write state: controlling the write word line to provide a first level signal to the second gate structure, so that the floating cell structure captures and stores electrons and is written to a first value; or controlling the write word line to provide a second level signal to the second gate structure, and the read word line to provide a third level signal to the first gate structure, so that the electrons stored in the floating cell structure are reset and are written to a second value, and the amplitude of the second level signal is smaller than the amplitude of the first level signal; during a read state: controlling the read word line to provide a third level signal to the first gate structure, determining to read out a first value based on the acquired first drain current, and determining to read out a second value based on the acquired second drain current, and the amplitude of the first drain current is smaller than the amplitude of the second drain current.

[0020] In the read-write circuit control method of the above-mentioned embodiment, the write word line is controlled to provide a level signal to the first gate structure and the second gate structure, causing the flow of electrons in the floating unit structure, thereby realizing the storage function and the write function of the storage unit; the read word line is controlled to provide a level signal to the first gate structure and obtain the drain current, thereby realizing the read function of the storage unit; since the volume of the separate capacitor structure is relatively reduced and the energy consumption of the peripheral circuit is reduced, this embodiment reduces the power consumption of the semiconductor memory device, and can reduce the volume of the storage unit while ensuring the storage capacity of the semiconductor memory device, thereby improving the response speed and storage density of the semiconductor memory device.

[0021] According to some embodiments, another aspect of the present disclosure provides a method for preparing a memory cell structure, the method for preparing a memory cell structure comprising: providing a substrate; forming an isolation structure on the surface of the substrate; forming a floating cell structure extending along a first direction on the surface of the isolation structure away from the substrate; forming a channel structure partially overlapping with the floating cell structure, the channel structure comprising a first part located on the outer surface of the floating cell structure, and a second part and a third part located on opposite sides of the floating cell structure along a second direction, the second part and the third part are both electrically connected to the first part and are both located on the surface of the isolation structure away from the substrate; the second direction intersects with the first direction; forming a first gate structure on the surface of the first part away from the substrate, and forming a second gate structure at one end of the floating cell structure along the first direction, the second gate structure and the first gate structure are insulated from each other.

[0022] In the method for preparing the memory cell structure of the above-mentioned embodiment, an isolation structure, a floating cell structure, a channel structure, a first gate structure and a second gate structure are sequentially formed on a substrate, so that charges can be stored in the floating cell structure, and current flows between the floating cell structure and the channel structure to realize the storage function of the memory cell while avoiding charge leakage. Since the volume of the separate capacitor structure is relatively reduced and the energy consumption of the peripheral circuit is reduced, this embodiment reduces the power consumption of the semiconductor memory device, and can reduce the volume of the memory cell while ensuring the storage capacity of the semiconductor memory device, thereby improving the response speed and storage density of the semiconductor memory device.

[0023] In some embodiments, the method for preparing a storage unit structure also includes: the outer surface of the floating unit structure is covered with an initial protection structure; forming a channel structure that partially overlaps with the floating unit structure includes: removing part of the initial protection structure to obtain a target protection structure with the floating unit structure exposed in the middle, and forming an insulating layer on the exposed outer surface of the floating unit structure; forming a channel structure on the outer surface covering the insulating layer, the channel structure including a first part covering the outer surface of the floating unit structure, and a second part and a third part located on opposite sides of the floating unit structure along the second direction.

[0024] In some embodiments, the target protection structure includes a first oxide protection layer, a nitride protection layer and a second oxide protection layer, the first oxide protection layer is formed on the outer surface of the floating unit structure, the nitride protection layer is located on the surface of the first oxide protection layer away from the floating unit structure, and the second oxide protection layer is located on the surface of the nitride protection layer away from the floating unit structure; a first gate structure is formed on the surface of the first part away from the substrate, and a second gate structure is formed at one end of the floating unit structure along the first direction, including: forming a first gate dielectric layer covering the outer surface of the channel structure; while forming a first gate conductive layer on the surface of the first gate dielectric layer away from the substrate, a second gate conductive layer is formed on an end surface of the floating unit structure, the first gate conductive layer at least covers the surface of the first part of the floating unit structure away from the substrate; the top surface of the first gate conductive layer is flush with the top surface of the second oxide protection layer, the first gate dielectric layer and the first gate conductive layer constitute a first gate structure; the part of the second oxide protection layer located between the end surface and the second gate conductive layer constitutes a second gate dielectric layer, and the second gate dielectric layer and the second gate conductive layer constitute a second gate structure.

[0025] In some embodiments, the method for preparing a memory cell structure further includes: removing a portion of the first gate dielectric layer located on the top surface of the second portion of the channel structure to obtain a first via hole exposing the top surface of the second portion; removing a portion of the first gate dielectric layer located on the top surface of the third portion of the channel structure to obtain a second via hole exposing the top surface of the third portion; forming a source electrode structure that passes through the first via hole and is in contact with the top surface of the second portion; and forming a drain electrode structure that passes through the second via hole and is in contact with the top surface of the third portion.

[0026] In some embodiments, the method for preparing a memory cell structure further includes: forming a first gate electrode structure on a top surface of the first gate conductive layer; and forming a second gate electrode structure on a top surface of the second gate conductive layer.

[0027] In some embodiments, the method for preparing a memory cell structure also includes: forming an isolation structure on the surface of a substrate, including: forming a first oxide isolation layer on the surface of the substrate; forming a nitride isolation layer on the surface of the first oxide isolation layer away from the substrate; and forming a second oxide isolation layer on the surface of the nitride isolation layer away from the substrate.

[0028] In some embodiments, the method for preparing a memory cell structure further includes: the material of the channel structure includes: polysilicon, indium gallium zinc oxide, indium gallium arsenide, gallium nitride or a combination thereof; the material of the floating cell structure includes doped polysilicon. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0030] Figure 1 A partial three-dimensional structural schematic diagram of a storage unit structure provided in one embodiment of the present disclosure;

[0031] Figure 2 for Figure 1 The schematic diagram of the three-dimensional structure is a cross-sectional schematic diagram along the AA' direction;

[0032] Figure 3 for Figure 1 The schematic diagram of the three-dimensional structure is a cross-sectional schematic diagram along the BB' direction;

[0033] Figure 4 A schematic diagram of a method for preparing a memory cell structure provided in an embodiment of the present disclosure;

[0034] Figure 5a to Figure 5g Schematic diagram of a three-dimensional structure obtained in different steps of a method for preparing a storage unit structure in an embodiment of the present disclosure;

[0035] Figure 6 A schematic diagram of a read-write circuit provided in an embodiment of the present disclosure.

[0036] Description of reference numerals:

[0037] 10. Substrate; 20. Isolation structure; 210. First oxide isolation layer; 220. Nitride isolation layer; 230. Second oxide isolation layer; 30. Floating unit structure; 310. Insulating layer; 301. Sacrificial layer of floating unit structure; 40. Channel structure; 410. First part of channel structure; 420. Second part of channel structure; 430. Third part of channel structure; 510. First gate structure; 511. First gate dielectric layer; 512. First gate conductive layer; 513. First gate electrode structure; 520. Second gate structure; 521. Second gate dielectric layer; 522. Second gate conductive layer; 523. Second gate electrode structure; 60. Target protection structure; 601. Initial protection structure; 610. First oxide protection layer; 620. Nitride protection layer; 630. Second oxide protection layer; 710. Source electrode structure; 720. Drain electrode structure. DETAILED DESCRIPTION

[0038] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. The preferred embodiments of the present application are given in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0040] The term "and / or" used herein includes any and all combinations of one or more of the related listed items. In the case of using "including", "having", and "comprising" described herein, another component may be added unless a clear limiting term such as "only", "consisting of", etc. is used. Unless mentioned to the contrary, a term in the singular form may include a plural form and is not to be understood as having one number.

[0041] It should be understood that although the terms "first", "second", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element without departing from the scope of the present disclosure.

[0042] In the description of the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0043] In the description of the present disclosure, the "deposition" process includes but is not limited to one or more of physical vapor deposition (PVD), chemical vapor deposition (CVD) or atomic layer deposition (ALD). Please note that the mutual insulation between the two described in the embodiments of the present disclosure includes but is not limited to one or more of the presence of insulating material, insulating atmosphere or gap between the two.

[0044] In order to better meet the requirements of device size reduction, semiconductor processes are gradually transitioning from planar transistors to three-dimensional transistors with higher efficiency. In particular, the development of three-dimensional dynamic random access memory (3D DRAM) technology occupies an important position in the semiconductor memory device market. The traditional 3D DRAM storage cell consists of a single transistor and a single capacitor (1T1C structure). The logical state is distinguished by whether the charge is stored on the capacitor. For semiconductor memory devices of this structure, reading consumes the power of the capacitor, resulting in a decrease in response speed. Even if no reading is performed, the charge will leak out of the capacitor, resulting in reduced reliability. Therefore, the storage cell of a single transistor and a single capacitor needs to be refreshed regularly to maintain data, resulting in increased power consumption. In addition, the refresh circuit will also occupy the volume of the storage cell, which hinders the size reduction of the dynamic random access memory. At present, the specific process of size reduction of the traditional 1T1C 3DDRAM is less developable. For example, at small size nodes, the complexity of the capacitor manufacturing process increases, the risk of charge leakage increases, and the static power consumption increases.

[0045] The present disclosure aims to provide a memory cell structure and a preparation method thereof, a read / write circuit and a memory, which can at least reduce the charge leakage and power consumption of the memory cell and improve the response speed, storage density and reliability of the semiconductor memory device.

[0046] Please refer to Figure 1-Figure 3In some embodiments, a memory cell structure is provided, the memory cell structure comprising a substrate 10, an isolation structure 20, a floating cell structure 30, a channel structure 40, a first gate structure 510 and a second gate structure 520; the isolation structure 20 is formed on the surface of the substrate 10; the floating cell structure 30 is located on the surface of the isolation structure 20 away from the substrate 10, and extends along a first direction, for example, the first direction can be parallel to the OX direction; the channel structure 40 partially overlaps with the floating cell structure 30 and is insulated from each other, and the channel structure 40 comprises a first portion 410, a second portion The first part 410 of the channel structure is located on the outer surface of the floating unit structure 30, the second part 420 and the third part 430 of the channel structure are located on the opposite sides of the floating unit structure 30 along the second direction, the second part 420 and the third part 430 of the channel structure are electrically connected to the first part 410 and are located on the surface of the isolation structure 20 away from the substrate 10; the second direction can be parallel to the OY direction, and the second direction intersects with the first direction; for example, the angle between the first direction and the second direction can be 30 degrees, 45 degrees, 60 degrees, 75 degrees, 90 degrees, 135 degrees or 120 degrees, etc.; the first gate structure 510 is located on the surface of the first part 410 away from the substrate 10; the second gate structure 520 is formed at one end of the floating unit structure 30 along the first direction, and is insulated from the first gate structure 510.

[0047] Please continue to refer to Figure 1-Figure 2 In some embodiments, an isolation structure 20, a floating cell structure 30, a channel structure 40, a first gate structure 510, and a second gate structure 520 are sequentially arranged on a substrate 10, so that charges can be stored in the floating cell structure 30, and current flows between the floating cell structure 30 and the channel structure 40 to form a current, thereby realizing the storage function of the storage cell and avoiding charge leakage. Since the volume of the separate capacitor structure is relatively reduced and the energy consumption of the peripheral circuit is reduced, the power consumption of the semiconductor memory device is reduced. Under the premise of ensuring the storage capacity of the semiconductor memory device, the volume of the storage unit can be reduced, and the response speed and storage density of the semiconductor memory device can be improved.

[0048] Please continue to refer to Figure 1-Figure 2In some embodiments, an insulating layer 310 is provided between the floating unit structure 30 and the channel structure 40, and electrons can form an FN tunneling effect between the floating unit structure 30 and the channel structure 40. The FN tunneling effect (Fowler-Nordheim Tunneling) refers to the ability of microscopic particles to tunnel into a potential barrier region that is impossible to enter according to the laws of classical mechanics. It is a basic effect that reflects the wave nature of microscopic particles. According to the theory of quantum mechanics, electrons have wave properties. The phenomenon of electron migration in semiconductors or insulators can be understood as electrons bound to an atom under an external electric field, which have a probability of tunneling through a potential barrier with higher energy than themselves to another atom. In some embodiments, the insulating layer 310 constitutes a potential barrier. When a voltage is applied between the second gate structure 520 and the substrate 10, an electric field is generated in the insulating layer 310. Since the effective mass and interface barrier of the hole are larger than those of the electron, when the insulating layer 310 is 0 reaches a certain intensity E, and the insulating layer 310 reaches a certain thickness S, electrons can pass through the tunneling dielectric layer from the channel structure 40 into the floating unit structure 30 to form an FN tunneling effect, thereby forming a tunneling current; the electric field intensity E of the insulating layer 310 can be set to a range of 10 megavolts per centimeter to 100 megavolts per centimeter, for example, E can be set to 10 megavolts per centimeter, 30 megavolts per centimeter, 50 megavolts per centimeter, 70 megavolts per centimeter, 90 megavolts per centimeter or 100 megavolts per centimeter, etc.; the thickness S of the insulating layer 310 can be set to a range of 1 nanometer to 10 nanometers, for example, S can be set to 1 nanometer, 2 nanometers, 4 nanometers, 6 nanometers, 8 nanometers or 10 nanometers, etc.; in some embodiments, the material of the insulating layer 310 includes polycrystalline silicon oxide, and the insulating layer 310 can be formed by a deposition process; because the occurrence speed of the tunnel effect is faster than the response speed of a traditional capacitor, there is no limit on the transit time, thereby further improving the response speed of the semiconductor memory device.

[0049] Please refer to Figure 2 In some embodiments, the first portion 410, the second portion 420 and the third portion 430 of the channel structure are an integrally formed structure prepared using the same process steps, thereby simplifying the process flow.

[0050] Please refer to Figure 2In some embodiments, the first gate structure 510 includes a first gate dielectric layer 511 and a first gate conductive layer 512; the first gate dielectric layer 511 at least covers the outer surface of the channel structure 40; the first gate conductive layer 512 is located on the surface of the first gate dielectric layer 511 away from the substrate 10, and at least covers the surface of the first part 410 of the channel structure on the floating unit structure 30 away from the substrate 10; in some embodiments, the material of the first gate conductive layer 512 includes titanium, tungsten, tantalum, molybdenum, cobalt, platinum, titanium tungsten, tungsten nitride, titanium nitride, titanium silicide or a combination thereof; the material of the first gate dielectric layer 511 may include silicon oxide, aluminum oxide, hafnium oxide, hafnium oxynitride, zirconium oxide, tantalum oxide, titanium oxide, strontium titanium oxide or a combination thereof.

[0051] Please refer to Figure 3 In some embodiments, the storage cell structure further includes a target protection structure 60, which covers the exposed outer surface of the floating cell structure 30 and is configured as follows: the target protection structure 60 includes a first oxide protection layer 610, a nitride protection layer 620 and a second oxide protection layer 630, wherein the first oxide protection layer 610 is formed on the outer surface of the floating cell structure 30, the nitride protection layer 620 is located on the surface of the first oxide protection layer 310 away from the floating cell structure 30, and the second oxide protection layer 630 is located on the surface of the nitride protection layer 620 away from the floating cell structure 30, wherein the top surface of the second oxide protection layer 630 is flush with the top surface of the first gate conductive layer 512; in some embodiments, the nitride isolation layer 220 and the second oxide protection layer 630 are formed by a furnace tube low pressure chemical vapor deposition (LPCVD) process, and the first oxide protection layer 610 The first oxide protective layer 610 and the second oxide protective layer 630 are formed by a thermal oxidation process, or the first oxide protective layer 610 and the second oxide protective layer 630 are formed by a thermal oxidation process, and the nitride protective layer 620 is formed by a CVD deposition process. Alternatively, the first oxide protective layer 610, the nitride protective layer 620 and the second oxide protective layer 630 can be formed in one stop in the same machine, for example, by sequentially depositing them in a plasma enhanced chemical vapor deposition method (PECVD). In some embodiments, the material of the first oxide protective layer 610 includes silicon oxide, the material of the nitride protective layer 620 includes silicon nitride, and / or the material of the second oxide protective layer 630 includes silicon oxide. The target protection structure 60 is used to avoid charge leakage in the floating unit structure 30, improve the charge retention and reliability of the device, reduce the power consumption and defect density of the device, and extend the mean time between failures.

[0052] Please refer to Figure 2-Figure 3In some embodiments, the second gate structure 520 includes a second gate conductive layer 522 and a second gate dielectric layer 521; the second gate conductive layer 522 and the first gate conductive layer 512 are prepared in the same process step, and the second gate conductive layer 522 is located at one end surface of the floating body unit structure 30; the second gate dielectric layer 521 is the portion of the second oxide protection layer 630 located between the end surface of the floating body unit structure 30 and the second gate conductive layer 522; in some embodiments, the material of the second gate conductive layer 522 includes titanium, tungsten, tantalum, molybdenum, cobalt, platinum, titanium tungsten, tungsten nitride, titanium nitride, titanium silicide or a combination thereof; the material of the second gate dielectric layer 521 includes silicon oxide, aluminum oxide, hafnium oxide, hafnium oxynitride, zirconium oxide, tantalum oxide, titanium oxide, strontium titanium oxide or a combination thereof. By adopting a laterally distributed double gate structure, the on-resistance of the channel structure is reduced, the flow capacity and control capability are enhanced, and the generation of leakage current is reduced.

[0053] Please refer to Figure 2-Figure 3 In some embodiments, the memory cell structure further includes a first gate electrode structure 513, a second gate electrode structure 523, a source electrode structure 710 and a drain electrode structure 720; the first gate electrode structure 513 is located on the top surface of the first gate conductive layer 512; the second gate electrode structure 523 is located on the top surface of the second gate conductive layer 522; the source electrode structure 710 is located on the top surface of the second part 420 of the channel structure; the drain electrode structure 720 is located on the top surface of the third part 430 of the channel structure, so as to facilitate read and write control and / or performance testing of the memory cell structure through the first gate electrode structure 513, the second gate electrode structure 523, the source electrode structure 710 and the drain electrode structure 720, thereby improving the performance and reliability of the product.

[0054] Please refer to Figure 2-Figure 3In some embodiments, the isolation structure 20 includes a first oxide isolation layer 210, a nitride isolation layer 220, and a second oxide isolation layer 230; the first oxide isolation layer 210 is located on the surface of the substrate 10; the nitride isolation layer 220 is located on the surface of the first oxide isolation layer 210 away from the substrate 10; and the second oxide isolation layer 230 is located on the surface of the nitride isolation layer 220 away from the substrate 10. In some embodiments, the nitride isolation layer 220 and the second oxide isolation layer 230 are formed by a furnace tube low pressure chemical vapor deposition (LPCVD) process, and the first oxide isolation layer 210 is formed by a thermal oxidation process, or the first oxide isolation layer 210 and the second oxide isolation layer 230 are formed by a thermal oxidation process, and the nitride isolation layer 220 is formed by a CVD deposition process, or the first oxide isolation layer 210, the nitride isolation layer 220, and the second oxide isolation layer 230 can be formed in one stop in the same machine, for example, sequentially deposited by plasma enhanced chemical vapor deposition (PECVD). In some embodiments, the material of the first oxide isolation layer 210 includes silicon oxide, the material of the nitride isolation layer 220 includes silicon nitride and / or the material of the second oxide isolation layer 230 includes silicon oxide. The isolation structure 20 is used to prevent charge leakage in the floating unit structure 30, improve the charge retention and reliability of the device, reduce the power consumption and defect density of the device, and extend the mean time between failures.

[0055] Please refer to Figure 1-Figure 3 In some embodiments, the material of the channel structure 40 includes polysilicon, indium gallium zinc oxide (IGZO), indium gallium arsenide (InGaAs), gallium nitride (GaN) or a combination thereof; the material of the floating unit structure 30 includes doped polysilicon. By adopting the above materials, the stress and doping problems of traditional materials in the process stacking process are overcome, thereby reducing the difficulty of the multi-layer deposition process; as an example, the carrier mobility of IGZO is 20 to 30 times that of amorphous silicon. The use of IGZO can improve the charge and discharge rate and response speed, and achieve a faster refresh frequency.

[0056] Please refer to Figure 1-Figure 4 According to some embodiments, the present disclosure provides a method for preparing a memory cell structure, comprising:

[0057] Step S10: providing a substrate 10;

[0058] Step S20: forming an isolation structure 20 on the surface of the substrate 10;

[0059] Step S30: forming a floating unit structure 30 extending along a first direction on a surface of the isolation structure 20 away from the substrate 10;

[0060] Step S40: forming a channel structure 40 partially overlapping with the floating body unit structure 30, the channel structure 40 comprising a first channel structure portion 410 located on the outer surface of the floating body unit structure 30, and a second channel structure portion 420 and a third channel structure portion 430 located on opposite sides of the floating body unit structure 30 along the second direction, the second channel structure portion 420 and the third channel structure portion 430 are both electrically connected to the first channel structure portion 410 and are both located on the surface of the isolation structure 20 away from the substrate 10; the second direction intersects with the first direction;

[0061] Step S50 : forming a first gate structure 510 on a surface of the first channel structure portion 410 away from the substrate 10 , and forming a second gate structure 520 at one end of the floating unit structure 30 along the first direction, wherein the second gate structure 520 is insulated from the first gate structure 510 .

[0062] In step S10, please refer to Figure 5a , provide a substrate 10; in step S20, please continue to refer to Figure 5a , forming an isolation structure 20 on the surface of the substrate 10; in step S30, please refer to Figure 5b and 5c , a floating unit structure 30 extending along a first direction is formed on a surface of the isolation structure 20 away from the substrate 10, and the first direction may be parallel to the OX direction; for example, a floating unit structure sacrificial layer 301 extending along the first direction is formed on a surface of the isolation structure 20 away from the substrate 10 by a deposition process, and then a portion of the floating unit structure sacrificial layer 301 is removed by an etching process to form the floating unit structure 30; in step S40, please refer to Figure 2 , Figure 5e and Figure 5g , forming a channel structure 40 partially overlapping with the floating unit structure 30, the channel structure 40 includes a first portion 410 located on the outer surface of the floating unit structure 30, and a second portion 420 and a third portion 430 located on opposite sides of the floating unit structure 30 along the second direction, the second portion 420 and the third portion 430 are both electrically connected to the first portion 410 and are both located on the surface of the isolation structure 20 away from the substrate 10; the second direction can be parallel to the OY direction, and the second direction intersects with the first direction. For example, the angle between the first direction and the second direction can be 30 degrees, 45 degrees, 60 degrees, 75 degrees, 90 degrees, 135 degrees or 120 degrees, etc.; in step S50, please refer to Figure 1 A first gate structure 510 is formed on a surface of the first portion 410 away from the substrate 10 , and a second gate structure 520 is formed at one end of the floating unit structure 30 along the first direction. The second gate structure 520 is insulated from the first gate structure 510 .

[0063] Please refer to Figure 1 , Figure 2 , Figure 5a to Figure 5g In some embodiments, an isolation structure 20, a floating cell structure 30, a channel structure 40, a first gate structure 510 and a second gate structure 520 are sequentially formed on a substrate 10, so that charge can be stored in the floating cell structure 30, and a current flows between the floating cell structure 30 and the channel structure 40, thereby realizing the storage function of the storage cell and avoiding charge leakage. Since the volume of the separate capacitor structure is relatively reduced and the energy consumption of the peripheral circuit is reduced, this embodiment reduces the power consumption of the semiconductor memory device, and can reduce the volume of the storage unit while ensuring the storage capacity of the semiconductor memory device, thereby improving the response speed and storage density of the semiconductor memory device.

[0064] Please refer to Figure 1 and Figure 5f In some embodiments, the method for preparing a memory cell structure further includes: forming an insulating layer 310 between the floating cell structure 30 and the channel structure 40. When a voltage is applied between the second gate structure 520 and the substrate 10, an electric field is established in the insulating layer 310, and electrons can pass through the tunnel dielectric layer from the channel structure 40 into the floating cell structure 30 to form a FN tunneling effect, thereby forming a tunneling current. In some embodiments, the material of the insulating layer 310 includes polysilicon oxide, and the insulating layer 310 can be formed by a deposition process. Since the tunneling effect occurs faster than the response speed of a traditional capacitor, there is no limit on the transit time, which can further improve the response speed of the semiconductor memory device.

[0065] Please refer to Figure 2 , Figure 5c-5g In some embodiments, the method for preparing the memory cell structure further includes: referring to FIG. 5d, the outer surface of the floating cell structure 30 is covered with an initial protection structure 601; forming a channel structure 40 partially overlapping with the floating cell structure 30 includes: referring to Figure 5d to Figure 5e , removing part of the initial protection structure, obtaining the target protection structure 60 with the floating unit structure 30 exposed in the middle; please refer to Figure 5f , forming an insulating layer 310 on the exposed outer surface of the floating unit structure 30; please refer to Figure 5e and Figure 5g , forming a channel structure 40 covering the exposed outer surface of the floating unit structure 30, please refer to Figure 2 The channel structure 40 includes a first portion 410 covering the outer surface of the floating unit structure 30 , and a second portion 420 and a third portion 430 located at opposite sides of the floating unit structure 30 along the second direction.

[0066] Please refer to Figure 2 and Figure 3In some embodiments, the target protection structure 60 includes a first oxide protection layer 610, a nitride protection layer 620 and a second oxide protection layer 630, the first oxide protection layer 610 is formed on the outer surface of the floating unit structure 30, the nitride protection layer 620 is located on the surface of the first oxide protection layer 310 away from the floating unit structure 30, and the second oxide protection layer 630 is located on the surface of the nitride protection layer 620 away from the floating unit structure 30; in some embodiments, the nitride isolation layer 620 and the second oxide protection layer 630 are formed by a furnace tube low pressure chemical vapor deposition (LPCVD) process, the first oxide protection layer 610 is formed by a thermal oxidation process, or the first oxide protection layer 610 and the second oxide protection layer 630 are formed by a furnace tube low pressure chemical vapor deposition (LPCVD) process, The nitride protection layer 620 is formed by a thermal oxidation process, and is formed by a CVD deposition process. Alternatively, the first oxide protection layer 610, the nitride protection layer 620, and the second oxide protection layer 630 can be formed in one stop in the same machine, for example, by sequentially depositing them in a plasma enhanced chemical vapor deposition method (PECVD). In some embodiments, the material of the first oxide protection layer 610 includes silicon oxide, the material of the nitride protection layer 620 includes silicon nitride, and / or the material of the second oxide protection layer 630 includes silicon oxide. The target protection structure 60 is used to avoid charge leakage in the floating unit structure 30, improve the charge retention and reliability of the device, reduce the power consumption and defect density of the device, and extend the mean time between failures.

[0067] Please continue to refer to Figure 2 and Figure 3In some embodiments, the method for preparing a memory cell structure further includes: forming a first gate structure 510 on a surface of the first portion 410 of the channel structure away from the substrate 10, and forming a second gate structure 520 at one end of the floating cell structure 30 along the first direction, including: forming a first gate dielectric layer 511 covering the outer surface of the channel structure 40; forming a first gate conductive layer 512 on a surface of the first gate dielectric layer 511 away from the substrate 10, and forming a second gate conductive layer 522 on an end surface of the floating cell structure 30, the first gate conductive layer 512 at least covering the surface of the first portion 410 of the channel structure of the floating cell structure 30 away from the substrate 10; the top surface of the first gate conductive layer 512 is flush with the top surface of the second oxide protective layer 630, the first gate dielectric layer 511 and the first gate conductive layer 512 constitute the first gate structure 510; the portion of the second oxide protective layer 630 between the end surface and the second gate conductive layer 522 constitutes the second gate dielectric layer 521, and the second gate dielectric layer 521 and the second gate conductive layer 522 constitute the second gate structure 520. In some embodiments, the material of the first gate conductive layer 512 includes titanium, tungsten, tantalum, molybdenum, cobalt, platinum, titanium tungsten, tungsten nitride, titanium nitride, titanium nitride, or a combination thereof; the material of the first gate dielectric layer 511 may include silicon oxide, aluminum oxide, hafnium oxide, hafnium oxynitride, zirconium oxide, tantalum oxide, titanium oxide, strontium titanium oxide, or a combination thereof. By adopting a laterally distributed dual-gate structure, the on-resistance of the channel structure is reduced, the flow capacity and control capability are enhanced, and the generation of leakage current is reduced.

[0068] Please refer to Figure 2 In some embodiments, the method for preparing a memory cell structure further includes: removing a portion of the first gate dielectric layer 511 located on the top surface of the second portion 420 of the channel structure to obtain a first via hole (not shown in the figure) exposing the top surface of the second portion 420 of the channel structure; removing a portion of the first gate dielectric layer 511 located on the top surface of the third portion 430 of the channel structure to obtain a second via hole (not shown in the figure) exposing the top surface of the third portion 430 of the channel structure; forming a source electrode structure 710 that passes through the first via hole and is in contact with the top surface of the second portion 420 of the channel structure; forming a drain electrode structure 720 that passes through the second via hole and is in contact with the top surface of the third portion 430 of the channel structure, so as to facilitate read and write control and / or performance testing of the memory cell structure via the first gate electrode structure 513, the second gate electrode structure 523, the source electrode structure 710 and the drain electrode structure 720, thereby improving product performance and reliability.

[0069] Please refer to Figure 3In some embodiments, the method for preparing a memory cell structure further includes: forming a first gate electrode structure 513 on the top surface of the first gate conductive layer 512; forming a second gate electrode structure 523 on the top surface of the second gate conductive layer 522. By adopting a laterally distributed dual gate electrode structure, the on-resistance of the channel structure is reduced, the current carrying capacity and control capability are enhanced, and the generation of leakage current is reduced.

[0070] Please refer to Figure 5c In some embodiments, the isolation structure 20 is formed on the surface of the substrate 10, including: forming a first oxide isolation layer 210 on the surface of the substrate 10; forming a nitride isolation layer 220 on the surface of the first oxide isolation layer 210 away from the substrate 10; and forming a second oxide isolation layer 230 on the surface of the nitride isolation layer 220 away from the substrate 10. In some embodiments, the nitride isolation layer 220 and the second oxide isolation layer 230 are formed by a furnace tube low pressure chemical vapor deposition (LPCVD) process, and the first oxide isolation layer 210 is formed by a thermal oxidation process, or the first oxide isolation layer 210 and the second oxide isolation layer 230 are formed by a thermal oxidation process, and the nitride isolation layer 220 is formed by a CVD deposition process. Alternatively, the first oxide isolation layer 210, the nitride isolation layer 220, and the second oxide isolation layer 230 can be formed in one stop in the same machine, for example, sequentially deposited by plasma enhanced chemical vapor deposition (PECVD). In some embodiments, the material of the first oxide isolation layer 210 includes silicon oxide, the material of the nitride isolation layer 220 includes silicon nitride and / or the material of the second oxide isolation layer 230 includes silicon oxide. The isolation structure 20 is used to prevent charge leakage in the floating unit structure 30, improve the charge retention and reliability of the device, reduce the power consumption and defect density of the device, and extend the mean time between failures.

[0071] In some embodiments, the material of the channel structure 40 includes polysilicon, indium gallium zinc oxide, indium gallium arsenide, gallium nitride or a combination thereof; the material of the floating unit structure 30 includes doped polysilicon. By using the above materials, the stress and doping problems of traditional materials in the process stacking process are overcome, thereby reducing the difficulty of the multi-layer deposition process; as an example, the carrier mobility of IGZO is 20 to 30 times that of amorphous silicon. Using IGZO can improve the charge and discharge rate and response speed, and achieve a faster refresh rate.

[0072] Please refer to Figure 1 , Figure 3 and Figure 6, according to some embodiments, the present disclosure provides a read / write circuit. The read / write circuit includes the memory cell structure of any of the above embodiments and is configured as follows: The first gate structure 510 is electrically connected to the read word line RWL; the second gate structure 520 is electrically connected to the write word line WWL; the second part 420 of the channel structure is electrically connected to the read bit line RBL; the third part 430 of the channel structure is electrically connected to the write bit line WBL; during the write state: control the write word line WWL to provide a first level signal to the second gate structure 520, so that the floating body cell structure 30 captures and stores electrons and is written with a first value; control the write word line WWL to provide a second level signal to the second gate structure 520, and the read word line RWL to provide a third level signal to the first gate structure 510, so that the electrons stored in the floating body cell structure 30 are reset and are written with a second value, and the amplitude of the second level signal is less than the amplitude of the first level signal; during the read state: control the read word line RWL to provide a third level signal to the first gate structure 510, determine the first value read according to the acquired first drain current Id1, and determine the second value read according to the acquired second drain current. The amplitude of the first drain current is less than the amplitude of the second drain current.

[0073] Please continue to refer to Figure 1 , Figure 3 and Figure 6 , in some embodiments, during the write state: the relationship between the voltage VG2 of the second gate electrode structure 523 and the amplitude of the first level signal G21 includes: VG2 = G21 > 0, and the amplitude of the voltage VD of the drain electrode structure 710 is equal to the amplitude of the drain supply voltage VDD, so as to write the first value; the relationship between the voltage VG3 of the second gate electrode structure 513 and the amplitude of the second level signal G22 includes: G22 = VG3 < 0, and the relationship between the voltage VG1 of the first gate electrode structure 513 and the amplitude of the third level signal G1 includes: VG1 = G1 > 0, so as to write the second value. The relationship between the second level signal G22 and the amplitude of the first level signal G1 includes: G22 < G1; during the read state: the relationship between the voltage VG1 of the first gate electrode structure 513 and the amplitude of the third level signal G1 includes: VG1 = G1; the relationship between the amplitude of the first drain current Id1 and the amplitude of the second drain current Id2 includes: Id1 < Id2. In some embodiments, the first gate structure 510 and the second gate structure 520 are electrically connected to the word line, and the channel structure 40 is electrically connected to the bit line. By controlling the word line to provide level signals to the first gate structure 510 and the second gate structure 520, the electron flow in the floating body cell structure 30, and acquiring the drain current, the storage function and read / write function of the memory cell are realized. Since there is no traditional capacitor and refresh circuit in the read / write circuit, the power consumption increase caused by frequent refreshing of the refresh circuit is reduced, and the response speed and storage density of the semiconductor memory device can be improved on the premise of ensuring the storage capacity of the semiconductor memory device.

[0074] Please refer to Figure 6 In some embodiments, a plurality of memory cell structures are arranged in multiple rows and columns, and are configured as follows: the memory cell structures in the same row are all connected to the same read word line RWL and the same write word line WWL; the memory cell structures in the same column are all connected to the same read bit line RBL and the same write bit line WBL; the memory cell structures in two adjacent rows are connected to different read word lines RWL and different write word lines WWL; the memory cell structures in two adjacent columns are connected to different read bit lines RBL and different write bit lines WBL, so as to facilitate the implementation of read and write functions and / or performance testing in the read and write circuit via word lines and bit lines, thereby improving the performance and reliability of the product.

[0075] In some embodiments, the first value is "0" and the second value is "1", thereby realizing the reading and writing functions of the read-write circuit for the value "0" and the value "1".

[0076] According to some embodiments, the present disclosure provides a memory, which includes the read / write circuit of any one of the above embodiments, and can at least reduce the charge leakage and power consumption of the memory, and improve the response speed, storage density and reliability of the memory.

[0077] Please refer to Figure 1 , Figure 3 and Figure 6 According to some embodiments, the present disclosure provides a read-write circuit control method, the read-write circuit includes a memory cell structure of any one of the above embodiments, the memory cell structure is configured as follows: a first gate structure 510 is electrically connected to a read word line RWL, a second gate structure 520 is electrically connected to a write word line WWL, a second portion 420 of the channel structure is electrically connected to a read bit line RBL, and a third portion 430 of the channel structure is electrically connected to a write bit line WBL; the read-write circuit control method includes: during a write state: controlling the write word line WWL to provide a first level signal to the second gate structure 520, so that the floating cell structure 30 captures and stores electricity The first value is written into the floating cell structure 30; or the write word line WWL is controlled to provide a second level signal to the second gate structure 520, and the read word line RWL is controlled to provide a third level signal to the first gate structure 510, so that the electrons stored in the floating cell structure 30 are reset and written into the second value, and the amplitude of the second level signal is smaller than the amplitude of the first level signal; during the read state: the read word line RWL is controlled to provide a third level signal to the first gate structure 510, and the first value is read out according to the obtained first drain current, and the second value is read out according to the obtained second drain current, and the amplitude of the first drain current is smaller than the amplitude of the second drain current.

[0078] Please continue to refer to Figure 1 , Figure 3 and Figure 6, in some embodiments, during the write state: the relationship between the voltage VG2 of the second gate electrode structure 523 and the amplitude of the first level signal G21 includes: VG2 = G21 > 0, and the amplitude of the voltage VD of the drain electrode structure 710 is equal to the amplitude of the drain supply voltage VDD, thereby writing the first numerical value; the relationship between the voltage VG3 of the second gate electrode structure 513 and the amplitude of the second level signal G22 includes: G22 = VG3 < 0, and the relationship between the voltage VG1 of the first gate electrode structure 513 and the amplitude of the third level signal G1 includes: VG1 = G1 > 0, thereby writing the second numerical value, and the relationship between the amplitude of the second level signal G22 and the amplitude of the first level signal G1 includes: G22 < G1; during the read state: the relationship between the voltage VG1 of the first gate electrode structure 513 and the amplitude of the third level signal G1 includes: VG1 = G1; the relationship between the amplitude of the first drain current Id1 and the amplitude of the second drain current Id2 includes: Id1 < Id2. As an example, the first numerical value is "0" and the second numerical value is "1". In some embodiments, by controlling the write word line WWL to provide level signals to the first gate electrode structure 510 and the second gate electrode structure 520, electron flow in the floating body cell structure 30 is caused, thereby realizing the storage function and write function of the storage unit; by controlling the read word line RWL to provide a level signal to the first gate electrode structure 510 and obtaining the drain current, the read function of the storage unit is realized; since there is no traditional capacitor and refresh circuit in the memory, charge leakage caused by the capacitor is avoided, and at the same time, the power consumption increase caused by frequent refreshing of the refresh circuit is reduced, and the response speed and storage density of the semiconductor storage device can be improved on the premise of ensuring the storage capacity of the semiconductor storage device.

[0079] Please note that the above embodiments are for illustrative purposes only and do not imply a limitation to the present disclosure.

[0080] Each embodiment in this specification is described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts among the embodiments can be referred to each other.

[0081] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0082] The above embodiments only represent several implementation manners of the present disclosure. Their descriptions are relatively specific and detailed, but they should not be construed as a limitation to the scope of the disclosed patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present disclosure, several deformations and improvements can still be made, and these all belong to the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure patent should be subject to the appended claims.

Claims

1. A storage unit structure, characterized in that: include: substrate; An isolation structure formed on the surface of the substrate; A floating unit structure, located on a surface of the isolation structure away from the substrate and extending along a first direction; a channel structure partially overlapping with the floating unit structure and insulated from each other, comprising a first portion located on the outer surface of the floating unit structure, and a second portion and a third portion located on opposite sides of the floating unit structure along a second direction, wherein the second portion and the third portion are both electrically connected to the first portion and are both located on a surface of the isolation structure away from the substrate; the second direction intersects with the first direction; A first gate structure is located on a surface of the first portion away from the substrate; The second gate structure is formed at one end of the floating body unit structure along the first direction and is insulated from the first gate structure.

2. The storage unit structure according to claim 1, characterized in that: The first part, the second part and the third part of the channel structure are an integrally formed structure prepared by the same process steps; and An insulating layer is provided between the first portion and the floating unit structure.

3. The storage unit structure according to claim 2, characterized in that: The first gate structure comprises: a first gate dielectric layer, covering at least an outer surface of the channel structure; and The first gate conductive layer is located on a surface of the first gate dielectric layer away from the substrate and at least covers a surface of a first portion of the floating unit structure away from the substrate.

4. The storage unit structure according to claim 3, characterized in that: Also includes: a target protection structure covering an exposed outer surface of the floating unit structure; The target protection structure comprises: a first oxide protection layer formed on the outer surface of the floating unit structure, a nitride protection layer located on a surface of the first oxide protection layer away from the floating unit structure, and a second oxide protection layer located on a surface of the nitride protection layer away from the floating unit structure; Wherein, the top surface of the first gate conductive layer is flush with the top surface of the second oxide protection layer.

5. The storage unit structure according to claim 4, characterized in that: The second gate structure comprises: A second gate conductive layer, which is prepared in the same process step as the first gate conductive layer and is located at one end surface of the floating unit structure; The second gate dielectric layer is a portion of the second oxide protection layer located between the end surface and the second gate conductive layer.

6. The storage unit structure according to claim 5, characterized in that: Also includes: A first gate electrode structure, located on a top surface of the first gate conductive layer; A second gate electrode structure, located on a top surface of the second gate conductive layer; a source electrode structure, located on a top surface of the second portion of the channel structure; as well as The drain electrode structure is located on the top surface of the third portion of the channel structure.

7. The storage unit structure according to any one of claims 1 to 6, characterized in that: The isolation structure comprises: A first oxide isolation layer, located on the surface of the substrate; a nitride isolation layer, located on a surface of the first oxide isolation layer away from the substrate; and The second oxide isolation layer is located on a surface of the nitride isolation layer away from the substrate.

8. The storage unit structure according to any one of claims 1 to 6, characterized in that: The material of the channel structure includes: polysilicon, indium gallium zinc oxide, indium gallium arsenide, gallium nitride or a combination thereof; and / or The material of the floating unit structure includes doped polysilicon.

9. A read-write circuit, characterized in that: include: The storage unit structure according to any one of claims 1 to 8 is configured as follows: The first gate structure is electrically connected to the read word line; The second gate structure is electrically connected to the write word line; A second portion of the channel structure is electrically connected to the read bit line; A third portion of the channel structure is electrically connected to the write bit line; During the write state: Controlling the write word line to provide a first level signal to the second gate structure, so that the floating body unit structure captures and stores electrons and is written with a first value; Controlling the write word line to provide a second level signal to the second gate structure, and the read word line to provide a third level signal to the first gate structure, so that the electrons stored in the floating body unit structure are reset and written to a second value, and the amplitude of the second level signal is smaller than the amplitude of the first level signal; During the read state: The read word line is controlled to provide the third level signal to the first gate structure, the first value is read out according to the acquired first drain current, and the second value is read out according to the acquired second drain current, wherein the amplitude of the first drain current is smaller than the amplitude of the second drain current.

10. The read / write circuit according to claim 9, characterized in that: The plurality of storage unit structures are arranged in multiple rows and columns; The memory cell structures in the same row are all connected to the same read word line and the same write word line; The memory cell structures in the same column are all connected to the same read bit line and the same write bit line; The memory cell structures in two adjacent rows are connected to different read word lines and different write word lines; The memory cell structures in two adjacent columns are connected to different read bit lines and different write bit lines.

11. The read-write circuit according to claim 9 or 10, characterized in that: The first value is "0" and the second value is "1".

12. A memory, characterized in that: include: The read / write circuit according to any one of claims 9 to 11.

13. A read-write circuit control method, characterized in that: The read / write circuit comprises the memory cell structure according to any one of claims 1 to 8, wherein the memory cell structure is configured as follows: a first gate structure is electrically connected to a read word line, a second gate structure is electrically connected to a write word line, a second portion of the channel structure is electrically connected to a read bit line, and a third portion of the channel structure is electrically connected to a write bit line; and the control method comprises: During the write state: the write word line is controlled to provide a first level signal to the second gate structure, so that the floating body unit structure captures and stores electrons and is written with a first value; or the write word line is controlled to provide a second level signal to the second gate structure, and the read word line is controlled to provide a third level signal to the first gate structure, so that the electrons stored in the floating body unit structure are reset and are written with a second value, and the amplitude of the second level signal is smaller than the amplitude of the first level signal; During the read state: the read word line is controlled to provide the third level signal to the first gate structure, the first value is read out according to the obtained first drain current, and the second value is read out according to the obtained second drain current, and the amplitude of the first drain current is smaller than the amplitude of the second drain current.

14. A method for preparing a storage unit structure, characterized in that: include: providing a substrate; forming an isolation structure on the surface of the substrate; forming a floating unit structure extending along a first direction on a surface of the isolation structure away from the substrate; forming a channel structure partially overlapping with the floating unit structure, the channel structure comprising a first portion located on the outer surface of the floating unit structure, and a second portion and a third portion located on opposite sides of the floating unit structure along a second direction, the second portion and the third portion are both electrically connected to the first portion and are both located on a surface of the isolation structure away from the substrate; the second direction intersects with the first direction; A first gate structure is formed on a surface of the first portion away from the substrate, and a second gate structure is formed at one end of the floating unit structure along the first direction, wherein the second gate structure is insulated from the first gate structure.

15. The method for preparing a memory cell structure according to claim 14, characterized in that: The outer surface of the floating unit structure is covered with an initial protection structure; the channel structure partially overlapping with the floating unit structure is formed, including: Removing part of the initial protection structure to obtain a target protection structure with the floating unit structure exposed in the middle; forming an insulating layer on the exposed outer surface of the floating unit structure; A channel structure covering the outer surface of the insulating layer is formed, wherein the channel structure includes a first portion covering the outer surface of the floating unit structure, and the second portion and the third portion located at opposite sides of the floating unit structure along the second direction.

16. The method for preparing a memory cell structure according to claim 15, characterized in that: The target protection structure comprises: a first oxide protection layer formed on the outer surface of the floating body unit structure, a nitride protection layer located on a surface of the first oxide protection layer away from the floating body unit structure, and a second oxide protection layer located on a surface of the nitride protection layer away from the floating body unit structure; the first gate structure is formed on the surface of the first portion away from the substrate, and the second gate structure is formed at one end of the floating body unit structure along the first direction, comprising: forming a first gate dielectric layer covering an outer surface of the channel structure; While a first gate conductive layer is formed on a surface of the first gate dielectric layer away from the substrate, a second gate conductive layer is formed on an end surface of the floating unit structure, the first gate conductive layer at least covers a first part of the surface of the floating unit structure away from the substrate; the top surface of the first gate conductive layer is flush with the top surface of the second oxide protective layer, the first gate dielectric layer and the first gate conductive layer constitute the first gate structure; the part of the second oxide protective layer located between the end surface and the second gate conductive layer constitutes a second gate dielectric layer, the second gate dielectric layer and the second gate conductive layer constitute the second gate structure.

17. The method for preparing a memory cell structure according to claim 16, wherein: Also includes: removing a portion of the first gate dielectric layer located on the top surface of the second portion of the channel structure to obtain a first via hole exposing the top surface of the second portion; removing a portion of the first gate dielectric layer located on the top surface of the third portion of the channel structure to obtain a second via hole exposing the top surface of the third portion; forming a source electrode structure penetrating through the first via hole and in contact with the top surface of the second portion; A drain electrode structure is formed which penetrates the second via hole and is in contact with the top surface of the third portion.

18. The method for preparing a memory cell structure according to claim 16, wherein: Also includes: forming a first gate electrode structure on a top surface of the first gate conductive layer; A second gate electrode structure is formed on the top surface of the second gate conductive layer.

19. The method for preparing a storage unit structure according to any one of claims 14 to 18, characterized in that: The step of forming an isolation structure on the surface of the substrate comprises: forming a first oxide isolation layer on the surface of the substrate; forming a nitride isolation layer on a surface of the first oxide isolation layer away from the substrate; A second oxide isolation layer is formed on a surface of the nitride isolation layer away from the substrate.

20. The method for preparing a memory cell structure according to any one of claims 14 to 18, characterized in that: The material of the channel structure includes: polysilicon, indium gallium zinc oxide, indium gallium arsenide, gallium nitride or a combination thereof: and / or The material of the floating unit structure includes doped polysilicon.

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