Boat state management system

Abstract

The application relates to an evaporation boat state management system and relates to the technical field of evaporation equipment, and comprises an image acquisition device, a monitoring model, evaporation equipment, an evaporation boat arranged in the evaporation equipment and a programmable controller. The programmable controller comprises a memory and a central controller, is used for calling the monitoring model to identify the evaporation boat state image and generates an identification result. An observation window is arranged on a side wall of the evaporation equipment, the image acquisition device is arranged outside the evaporation equipment, and the image acquisition device and the observation window are located at the same height. The evaporation boat state image is collected through the observation window by the image acquisition device, then the evaporation boat state image is identified by calling the monitoring model through the central controller, an identification result is generated, if the evaporation boat state image is identified as being abnormal, the programmable controller adjusts the temperature of the evaporation boat in the evaporation equipment, and the dependence on manual operation during vacuum coating is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of evaporation boat state management system. BACKGROUND

[0002] The evaporation boat is a kind of equipment for evaporation, which is usually used in the vacuum coating process. In the vacuum evaporation equipment, the liquid material on the evaporation boat can be converted into gas by heating the evaporation boat, and then deposited into a film on the surface of the evaporation boat.

[0003] In the vacuum coating equipment, it is extremely important to control the temperature of the evaporation boat. In order to produce products that meet the requirements, the wire feeding speed and the temperature of the evaporation boat need to be accurately controlled according to the requirements of different products.

[0004] At present, in the process of vacuum aluminum coating, the aluminum liquid is placed in the evaporation boat. In order to maximize the evaporation of aluminum, the entire tank surface of the evaporation boat should be fully utilized, and then the evaporation boat can be heated to make the aluminum liquid evaporate in a vacuum environment. In the process of vacuum aluminum coating, the evaporation boat is heated to a high enough temperature to make the internal aluminum liquid evaporate into aluminum atoms or molecules. In the ideal state, these atoms or molecules form a uniform aluminum film around the evaporation boat, and then deposit on the surface of the substrate.

[0005] When the aluminum liquid is placed in the evaporation boat and the temperature of the evaporation boat is controlled, if the temperature of the evaporation boat is too high, the aluminum liquid may evaporate too fast, resulting in insufficient or uneven gas molecules, which makes the deposited aluminum film uneven, thick, or even have holes or impurities. If the temperature of the evaporation boat is too low, the aluminum liquid may not evaporate fully, resulting in slow deposition rate, thin film layer or even failure to form a complete film layer.

[0006] At present, in order to make the aluminum liquid uniformly distributed at the bottom of the evaporation boat and maintain appropriate temperature and evaporation rate, engineers need to observe with their eyes, and engineers need to have relatively skilled experience. Long time will cause the engineers to have eye fatigue, and the temperature adjustment by artificial is not accurate enough, which is easy to make mistakes. SUMMARY

[0007] In order to reduce the dependence on artificial in vacuum coating, the present application provides an evaporation boat state management system.

[0008] The present application provides an evaporation boat state management system, which adopts the following technical scheme:

[0009] The evaporation boat state management system comprises:

[0010] An image acquisition device is used to acquire the evaporation boat state image;

[0011] A monitoring model is used to identify the evaporation boat state image;

[0012] Evaporation equipment

[0013] Evaporation boat arranged in the evaporation equipment, used for evaporating aluminum liquid to perform film plating

[0014] Wire feeding shaft rotatably connected to the evaporation equipment, used for feeding aluminum wire into the evaporation boat, and an aluminum wire roll is arranged outside the wire feeding shaft

[0015] Programmable controller, electrically connected to the evaporation equipment, used for adjusting the temperature of the evaporation boat inside the evaporation equipment

[0016] The programmable controller comprises:

[0017] The memory one is used for storing the monitoring model

[0018] The central controller is used for calling the monitoring model to identify the evaporation boat state image and generate an identification result

[0019] An observation window is arranged on a side wall of the evaporation equipment, and the image acquisition device is arranged outside the evaporation equipment, and the image acquisition device and the observation window are at the same height.

[0020] By using the above technical scheme, the evaporation boat state image is collected through the observation window by the image acquisition device, and then the central controller calls the monitoring model to identify the evaporation boat state image and generates an identification result. If the evaporation boat state image is identified as abnormal, the programmable controller adjusts the temperature of the evaporation boat in the evaporation equipment, or slows down the wire feeding speed of the wire feeding shaft into the evaporation boat, thereby ensuring the film plating effect and reducing the dependence on manual operation during vacuum film plating.

[0021] Optionally, the programmable controller further comprises

[0022] The programmable controller comprises a data acquisition module and a memory two

[0023] The data acquisition module is used for acquiring the evaporation boat temperature data and the consumed electric energy data

[0024] The memory two is used for storing the evaporation boat temperature data and the consumed electric energy data

[0025] The monitoring model is further used for monitoring the evaporation boat temperature data and the electric energy data

[0026] The central controller is further used for calling the monitoring model to monitor the evaporation boat temperature data and the consumed electric energy data

[0027] By adopting the technical scheme, if the temperature of the evaporation boat is abnormal, the power consumption of the evaporation boat will be abnormal. The monitoring model monitors the temperature data and the corresponding power data of the evaporation boat. If the temperature data and the power data are abnormal, the monitoring model can transmit the monitoring result to the programmable controller. The programmable controller adjusts the temperature of the evaporation boat in the evaporation device, thereby reducing the dependence on manual operation during vacuum coating.

[0028] Optionally, the monitoring model comprises the following steps for training:

[0029] A1, label the evaporation boat state image to obtain a labeled image; label the temperature data and the power data to obtain labeled data;

[0030] A2, use a group of the evaporation boat state images obtained and the labeled images as a training set, use another group of the evaporation boat state images obtained as a test set and a verification set, input the training set into the monitoring model for training, and then input the verification set into the monitoring model for verification to obtain a trained monitoring model;

[0031] A3, use a group of the temperature data and the power data obtained as a training set, use another group of the temperature data and the power data obtained as a test set and a verification set, input the training set into the monitoring model for training, and then input the verification set into the monitoring model for verification to obtain a trained monitoring model.

[0032] By adopting the technical scheme, the labeled images and the labeled data are used to train the monitoring model. The trained monitoring model can identify the collected image data and the power data, and then judge the state of the evaporation boat. The programmable controller adjusts the temperature of the evaporation boat based on the judgment result of the monitoring model, thereby reducing the dependence on manual operation during vacuum coating.

[0033] Optionally, the evaporation device is rotationally connected with a flashing roller. The flashing roller is located at one end of the evaporation device in the length direction, and the observation window is located at the same height as the flashing roller.

[0034] By adopting the technical scheme, the image acquisition device passes through the flashing roller after passing through the observation window. When the image acquisition device acquires images, the flashing roller rotates continuously, so that the image acquisition device can acquire images of the evaporation boat. When the evaporation boat is heated, the flashing roller rotates on the side of the observation window close to the evaporation boat, thereby reducing the occurrence of fogging of the observation window, improving the clarity of the images acquired by the image acquisition device, improving the accuracy of the state judgment of the evaporation boat by the monitoring model, and improving the accuracy of the subsequent temperature adjustment of the evaporation boat.

[0035] Optionally, the evaporation device is slidably connected with a cleaning part, the cleaning part is sleeved outside the flash frequency roller, and a scraping plate one is arranged on the side close to the flash frequency roller.

[0036] By adopting the above technical scheme, the outer surface of the flash frequency roller can be cleaned regularly by the cleaning part. During cleaning, the scraping plate one moves along the length direction of the flash frequency roller by sliding the cleaning part. With the movement of the scraping plate one, the dust and mist on the outer surface of the flash frequency roller can be scraped off, so as to improve the cleanliness of the flash frequency roller, the definition of the image collected by the image collection device, and the accuracy of the state judgment of the evaporation boat by the monitoring model, and the accuracy of the subsequent temperature adjustment of the evaporation boat.

[0037] Optionally, the evaporation device is rotatably connected with a threaded rod, and a limiting rod is arranged in the evaporation device and arranged in parallel with the threaded rod. The upper end of the cleaning part is threadedly connected with the threaded rod, and the upper end of the cleaning part is sleeved outside the limiting rod.

[0038] By adopting the above technical scheme, the cleaning part can be moved along the length direction of the flash frequency roller by rotating the threaded rod, and the dust and mist on the outer surface of the flash frequency roller can be scraped off. The structure is simple and convenient to operate.

[0039] Optionally, the cleaning part comprises a scraping plate two, which is slidably connected to the inside of the evaporation device. A cylinder is vertically arranged above the evaporation device, and the piston rod of the cylinder is fixedly connected with the scraping plate two. When the piston rod of the cylinder is extended, the scraping plate two is in contact with the surface of the flash frequency roller.

[0040] By adopting the above technical scheme, the dust and mist on the outer surface of the flash frequency roller can be scraped off by moving the scraping plate to the position in contact with the flash frequency roller. The structure is simple and convenient to operate.

[0041] Optionally, the outer surface of the flash frequency roller is provided with an anti-fog coating.

[0042] By adopting the above technical scheme, the anti-fog coating sprayed on the outer surface of the flash frequency roller can reduce the frequent fogging of the surface of the flash frequency roller, and improve the definition of the image collected by the image collection device.

[0043] In summary, the present application has at least one of the following beneficial technical effects:

[0044] The image collection device collects the state image of the evaporation boat through the observation window, and then the central controller calls the monitoring model to identify the state image of the evaporation boat to generate an identification result. If the state image of the evaporation boat is identified as abnormal, the programmable controller adjusts the temperature of the evaporation boat in the evaporation device, thereby reducing the dependence on manual operation during vacuum coating.

[0045] If the temperature of the evaporation boat is abnormal, the power consumption of the evaporation boat will be abnormal. The monitoring model monitors the temperature data and the corresponding power data of the evaporation boat. If the temperature data and the power data are abnormal, the monitoring model can transmit the monitoring result to the programmable controller. The programmable controller adjusts the temperature of the evaporation boat in the evaporation equipment, thereby reducing the dependence on manual operation during vacuum coating.

[0046] The monitoring model is trained by using the labeled images and the labeled data. The trained monitoring model can identify the collected image data and the power data, and then judge the state of the evaporation boat. The programmable controller adjusts the temperature of the evaporation boat according to the judgment result of the monitoring model, thereby reducing the dependence on manual operation during vacuum coating. BRIEF DESCRIPTION OF DRAWINGS

[0047] Figure 1 is a schematic diagram of the overall structure of example one.

[0048] Figure 2 is a schematic diagram of the structure of the evaporation boat state management system in example one.

[0049] Figure 3 is a sectional view of the highlighted scraping plate one in example one.

[0050] Figure 4 is a schematic diagram of highlighting the aluminum liquid area on the evaporation boat in example one.

[0051] Figure 5 is a schematic diagram of highlighting the brightness of the evaporation boat in example one.

[0052] Figure 6 is a schematic diagram of the overall structure of example two.

[0053] Figure 7 is a sectional view of the highlighted scraping plate two in example two.

[0054] BRIEF DESCRIPTION OF DRAWINGS: 1, evaporation equipment; 11, evaporation boat; 2, image acquisition device; 3, monitoring model; 4, programmable controller; 41, memory one; 42, central controller; 43, memory two; 44, data acquisition module; 5, flashing roller; 51, motor one; 6, scraping plate one; 61, threaded rod; 62, limiting rod; 63, motor two; 7, scraping plate two; 71, air cylinder; 8, observation window; 9, wire feeding shaft; 91, motor three. DETAILED DESCRIPTION

[0055] The application will be further described in detail below in combination with all the drawings.

[0056] The application discloses an evaporation boat state management system.

[0057] Reference Figure 1 and Figure 2 The evaporation boat status management system includes an image acquisition device 2, a monitoring model 3, a vapor deposition equipment 1, an evaporation boat 11, a wire feeding shaft 9, and a programmable controller 4.

[0058] Image acquisition device 2 is used to acquire images of the evaporation boat 11 in its current state.

[0059] The image acquisition device 2 can be a camera or other image acquisition device 2, which can acquire images.

[0060] Monitoring model 3 is electrically connected to image acquisition device 2 and is used to identify the status image of the evaporation boat 11;

[0061] An evaporation boat 11, located in the vapor deposition equipment 1, is used to evaporate aluminum liquid for coating.

[0062] The wire feeding shaft 9, which is rotatably connected to the vapor deposition equipment 1, is used to feed aluminum wire into the evaporation boat 11. An aluminum wire roll is sleeved on the outside of the wire feeding shaft 9.

[0063] The programmable controller 4 is electrically connected to the vapor deposition equipment 1 and is used to regulate the temperature of the evaporation boat 11 inside it.

[0064] Reference Figure 2 and Figure 3 An evaporation boat 11 is located inside the evaporation coating equipment 1 and is used to evaporate aluminum liquid for coating. An observation window 8 is provided on one side wall of the evaporation coating equipment 1. An image acquisition device 2 is located outside the evaporation coating equipment 1, and the image acquisition device 2 and the observation window 8 are at the same height. A flash roller 5 is rotatably connected inside the evaporation coating equipment 1. The flash roller 5 is located at one end of the length direction of the evaporation coating equipment 1, and the observation window 8 and the flash roller 5 are at the same height.

[0065] Reference Figure 1 and Figure 2 One end of the vapor deposition equipment 1 is equipped with a motor 51, and the output shaft of the drive motor is connected to the flash roller 5 (see reference). Figure 3 ) Fixed connection; during the coating process on the evaporation boat 11, the motor 51 is rotated; then, the image acquisition device 2 is used to acquire images of the evaporation boat 11, with the camera of the image acquisition device 2 passing through the observation window 8 and the flash roller 5 (see reference). Figure 3 When the image acquisition device 2 is acquiring images, the flash roller 5 (refer to...) Figure 3 The image acquisition device 2 continuously rotates, allowing it to capture images of the evaporation boat 11 (see reference). Figure 3 (Image of ).

[0066] Reference Figure 2 and Figure 3The evaporation boat 11 is provided with a motor three 91, and the output shaft of the motor three 91 is fixedly connected with the wire feeding shaft 9. When the temperature of the evaporation boat 11 continuously rises to a temperature at which film coating can be performed, the motor three is operated to rotate and feed the wire into the evaporation boat 11.

[0067] When the evaporation boat 11 is heated, the flashing roller 5 rotates on the side of the observation window 8 close to the evaporation boat 11, thereby reducing the occurrence of fogging of the observation window 8, improving the clarity of the image collected by the image collection device 2, improving the accuracy of the state judgment of the evaporation boat 11 by the monitoring model 3, and improving the accuracy of the subsequent temperature adjustment of the evaporation boat 11.

[0068] The programmable controller 4 comprises:

[0069] The memory one 41 is configured to store the monitoring model 3.

[0070] The central controller 42 is configured to call the monitoring model 3 to identify the state image of the evaporation boat 11 and generate an identification result.

[0071] The central controller 42 is configured to input the image of the evaporation boat 11 collected by the image collection device 2 into the monitoring model 3.

[0072] Before the monitoring model 3 is used, the following steps are required to train the monitoring model 3:

[0073] A1, the state image of the evaporation boat 11 is labeled to obtain a labeled image; the temperature data and the electric energy data are labeled to obtain labeled data;

[0074] Referring to Figure 2 and Figure 4 When the labeled image is labeled, one needs to label the brightness of the evaporation boat 11 state image, and the other needs to mark the area of the aluminum liquid in the evaporation boat 11 state image.

[0075] A2, using a group of the evaporation boat 11 state images obtained and the labeled images as a training set, using another group of the evaporation boat 11 state images obtained as a test set and a verification set, inputting the training set into the monitoring model 3 for training, and then inputting the verification set into the monitoring model 3 for verification to obtain the trained monitoring model 3;

[0076] Referring to Figures 2-5 After training, the verification set is input into the monitoring model 3 for verification. If the following results can be achieved, it means that the training is successful:

[0077] 1). The monitoring model 3 can monitor the area of the molten aluminum on the evaporation boat 11, classify the image, classify the evaporation boat 11 image as too large, too small, normal aluminum liquid area, and feed back the classified recognition result to the programmable controller 4;

[0078] 2). The monitoring model 3 classifies the evaporation boat 11 images in the training set according to the brightness of the evaporation boat 11 images, and classifies the evaporation boat 11 state image as too low, normal, and too high according to the brightness of the evaporation boat 11 image after inputting the evaporation boat 11 image in the verification set. And feed back the high temperature warning or low temperature warning to the programmable controller 4.

[0079] A3, using a set of acquired temperature data and power data as a training set, using another set of acquired temperature data and power data as a test set and a verification set, inputting the training set into the monitoring model 3 for training, and then inputting the verification set into the monitoring model 3 for verification to obtain the trained monitoring model 3.

[0080] After training, the verification set is input into the monitoring model 3 for verification. If the input temperature is too high or too low, the test model can issue a high temperature warning or a low temperature warning to the programmable controller 4.

[0081] The power data includes but is not limited to voltage data and current data.

[0082] The programmable controller 4 is electrically connected with the motor three 91. If the programmable controller 4 receives a high temperature warning, the programmable controller 4 controls the temperature of the evaporation boat 11 in the evaporation device 1 to be reduced. If the programmable controller 4 receives a low temperature warning, the motor three 91 slows down the wire feeding speed, thereby ensuring the film plating effect. Then the programmable controller 4 controls the temperature of the evaporation boat 11 in the evaporation device 1 to be increased, thereby reducing the dependence on manual operation during vacuum plating.

[0083] The temperature of the evaporation boat 11 can be adjusted by reducing or increasing the power consumption, which is a prior art and will not be described in detail herein.

[0084] Because the evaporation boat 11 will be continuously heated, smoke and impurities will inevitably be generated inside the evaporation device 1 during evaporation plating. The cleaning part is slidably connected in the evaporation device 1, the cleaning part is sleeved outside the flash frequency roller 5, the cleaning part is provided with a scraping plate one 6 close to the side of the flash frequency roller 5, and the end of the scraping plate one 6 close to the flash frequency roller 5 is attached to the flash frequency roller 5. The outer surface of the flash frequency roller 5 can be cleaned by sliding the cleaning part at regular intervals.

[0085] Referring to Figure 1 and Figure 3The threaded rod 61 is rotationally connected in the evaporation equipment 1, one end of the evaporation equipment 1 is rotationally connected with a motor two 63, the output shaft of the motor two 63 is fixedly connected with the threaded rod 61, the evaporation equipment 1 is provided with a limiting rod 62, the limiting rod 62 and the threaded rod 61 are arranged in parallel, the upper end of the cleaning part is threadedly connected with the threaded rod 61, and the upper end of the cleaning part is sleeved outside the limiting rod 62; the output shaft of the motor two 63 is rotated to drive the cleaning part to move along the length direction of the stroboscopic roller 5, and the stroboscopic roller 5 is rotated and the cleaning part is moved, so that the steam and impurities on the outer surface of the stroboscopic roller 5 are scraped off, the cleanliness of the stroboscopic roller 5 is ensured, and the definition of the image collected by the image acquisition device 2 is improved.

[0086] With reference to Figure 1 and Figure 3 Before the evaporation equipment 1 is used, the surfaces of the stroboscopic roller 5 and the observation window 8 can also be sprayed with an anti-fog coating, so that the fogging of the surfaces of the observation window 8 and the stroboscopic roller 5 is reduced, and the definition of the image collected by the image acquisition device 2 is improved.

[0087] In the above embodiment, the motor one 51 and the motor two 63 are both special motors resistant to high temperature.

[0088] The implementation principle of the evaporation boat state management system in the embodiment is as follows: the image acquisition device 2 collects the image of the evaporation boat 11 through the observation window 8 and the stroboscopic roller 5, the central controller 42 calls the monitoring model 3 to identify the state image of the evaporation boat 11, generates an identification result, if the programmable controller 4 receives a temperature overheat warning, the programmable controller 4 controls the temperature of the evaporation boat 11 in the evaporation equipment 1 to be reduced, if the programmable controller 4 receives a temperature overheat warning, the programmable controller 4 controls the temperature of the evaporation boat 11 in the evaporation equipment 1 to be increased, thereby reducing the dependence on manual operation during vacuum coating, the outer surface of the stroboscopic roller 5 can be cleaned by the sliding cleaning part at regular time intervals, the definition of the image collected by the image acquisition device 2 is improved, the accuracy of the state judgment of the evaporation boat 11 by the monitoring model 3 is improved, and the accuracy of the subsequent temperature adjustment of the evaporation boat 11 is improved.

[0089] Embodiment two:

[0090] With reference to Figure 6 and Figure 7 The difference between embodiment two and embodiment one is that the cleaning part is arranged differently.

[0091] The cleaning part comprises a second scraping plate 7, which is slidingly connected to the inside of the evaporation device 1. A pneumatic cylinder 71 is vertically arranged above the evaporation device 1. The piston rod of the pneumatic cylinder 71 is fixedly connected to the second scraping plate 7. When the piston rod of the pneumatic cylinder 71 is extended, the second scraping plate 7 is in contact with the surface of the stroboscopic roller 5. The piston rod of the pneumatic cylinder 71 can be controlled to extend at a certain time, so as to control the second scraping plate 7 to move to a position in contact with the stroboscopic roller 5. With the continuous rotation of the stroboscopic roller 5, the second scraping plate 7 can scrape the mist and impurities on the outer surface of the stroboscopic roller 5. The structure is simple, the operation is convenient, the image clarity collected by the image acquisition device 2 is improved, the accuracy of the state judgment of the evaporation boat 11 by the monitoring model 3 is improved, and the accuracy of the subsequent temperature adjustment of the evaporation boat 11 is improved.

[0092] In the above embodiment, the pneumatic cylinder 71 is a special pneumatic cylinder 71 resistant to high temperature.

[0093] The above are preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. Therefore, any equivalent changes made according to the structure, shape and principle of the present application shall be covered within the protection scope of the present application.

Claims

1. An evaporation boat status management system, characterized in that: include: Image acquisition device (2) is used to acquire images of the evaporation boat (11) status; The monitoring model (3) is used to classify the state of the evaporation boat (11) based on the brightness and aluminum liquid area of ​​the evaporation boat (11) state image and generate identification results; Evaporation equipment (1); An evaporation boat (11) located in the vapor deposition equipment (1) is used to evaporate aluminum liquid for coating; The wire feeding shaft (9) connected to the vapor deposition equipment (1) is rotated to feed aluminum wire into the evaporation boat (11). The wire feeding shaft (9) is fitted with an aluminum wire roll. The programmable controller (4) is electrically connected to the vapor deposition equipment (1) and is used to regulate the temperature of the evaporation boat (11) inside it; The programmable controller (4) includes: Memory 1 (41) is used to store the monitoring model (3); The central controller (42) is used to retrieve the monitoring model (3) to identify the status image of the evaporation boat (11), generate identification results, and control the programmable controller (4) to adjust the temperature of the evaporation boat (11) according to the identification results; An observation window (8) is provided on one side wall of the vapor deposition equipment (1), and an image acquisition device (2) is located outside the vapor deposition equipment (1). The image acquisition device (2) and the observation window (8) are at the same height.

2. The evaporation boat status management system according to claim 1, characterized in that: Also includes The programmable controller (4) includes a data acquisition module (44) and a second memory (43). The data acquisition module (44) is used to collect the temperature data and the electrical energy consumed by the evaporation boat (11); The second memory (43) is used to store the temperature data and the electrical energy consumed by the evaporation boat (11); The monitoring model (3) is also used to monitor the temperature and power data of the evaporation boat (11); The central controller (42) can also be used to retrieve the monitoring model (3) to monitor the temperature data and power consumption data of the evaporation boat (11).

3. The evaporation boat status management system according to claim 2, characterized in that: The monitoring model (3) is trained by the following steps: A1, the state image of the evaporation boat (11) is annotated to obtain an annotated image; the temperature data and electrical energy data are annotated to obtain annotated data; A2, using a set of state images of the evaporation boat (11) and the labeled images as the training set, and another set of state images of the evaporation boat (11) as the test set and validation set, the training set is input into the monitoring model (3) for training, and the validation set is input into the monitoring model (3) for validation, so as to obtain the trained monitoring model (3). A3. Using one set of acquired temperature data and electrical energy data as a training set, and another set of acquired temperature data and electrical energy data as a test set and a validation set, the training set is input into the monitoring model (3) for training, and the validation set is input into the monitoring model (3) for validation, thus obtaining the trained monitoring model (3).

4. The evaporation boat status management system according to claim 1, characterized in that: The vapor deposition equipment (1) is rotatably connected to a flash roller (5), which is located at one end of the length direction of the vapor deposition equipment (1). The observation window (8) is at the same height as the flash roller (5).

5. The evaporation boat status management system according to claim 4, characterized in that: The vapor deposition equipment (1) has a cleaning section that is slidably connected inside. The cleaning section is sleeved on the outside of the flash roller (5). A scraper plate (6) is provided on the side of the cleaning section near the flash roller (5). The end of the scraper plate (6) near the flash roller (5) is in contact with the flash roller (5).

6. The evaporation boat status management system according to claim 5, characterized in that: The vapor deposition equipment (1) is rotatably connected to a threaded rod (61), and a limiting rod (62) is provided inside the vapor deposition equipment (1). The limiting rod (62) and the threaded rod (61) are arranged parallel to each other. The upper end of the cleaning part is threadedly connected to the threaded rod (61), and the upper end of the cleaning part is sleeved on the outside of the limiting rod (62).

7. The evaporation boat status management system according to claim 5, characterized in that: The cleaning section includes a scraper plate 2 (7), which is slidably connected to the inside of the vapor deposition equipment (1). A cylinder (71) is vertically provided above the vapor deposition equipment (1). The piston rod of the cylinder (71) is fixedly connected to the scraper plate. When the piston rod of the cylinder (71) extends, the scraper plate 2 (7) is in contact with the surface of the flash roller (5).

8. The evaporation boat status management system according to claim 4, characterized in that: The outer surface of the flash roller (5) is covered with an anti-fog coating.

Images