actuator

By placing the cushioning material between the mounting component and the deformable part of the elastic support in the actuator and overlapping it in the thickness direction, the bonding surface is increased. The remaining part of the cushioning material is covered by the cover component, and the cushioning material is compressed to reduce the amount of deformation. This solves the problems of difficulty in reducing the amount of cushioning material used and limited vibration damping effect, and achieves a reduction in the amount of material used and an improvement in vibration damping effect.

CN117940223BActive Publication Date: 2026-06-05FOSTER ELECTRIC CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
FOSTER ELECTRIC CO LTD
Filing Date
2022-08-26
Publication Date
2026-06-05

AI Technical Summary

Technical Problem

The amount of buffer material used in existing actuators is difficult to reduce, and the vibration damping effect of the buffer material is limited.

Method used

In the actuator, a cushioning material is placed between the mounting component and the deformable part of the elastic support. The bonding surface is increased by overlapping the cushioning material in the thickness direction. The remaining part of the cushioning material is covered by a cover component, and the cushioning material is compressed to reduce the amount of deformation.

Benefits of technology

It effectively reduces the amount of cushioning material used, while improving vibration damping, inhibiting repeated deformation and deterioration of the cushioning material, and reducing changes in resonant frequency.

✦ Generated by Eureka AI based on patent content.

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Abstract

An actuator includes a mounting member configured to include a coil, a movable member configured to displace the mounting member by energizing the coil, an elastic support, and a cushioning material. The elastic support includes a mounting member side fixed portion fixed to the mounting member, a movable member side fixed portion fixed to the movable member, and a deformation portion connecting the mounting member side fixed portion and the movable member side fixed portion. The cushioning material is provided between the mounting member and the deformation portion and deforms in conjunction with a flexural deformation of the deformation portion.
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Description

Technical Field

[0001] This disclosure relates to actuators. Background Technology

[0002] International Publication No. 2020 / 184439 discloses an actuator comprising: a mounting member having a coil; and a movable member supported on the mounting member by an elastic support, which is displaced by energizing the coil. The elastic support described in this document comprises a pair of spring members formed of a metal plate and a cushioning material disposed between the pair of spring members. Thus, displacement of the movable member is allowed by the flexing of the elastic support. Furthermore, the cushioning material in the elastic support enables rapid damping of vibrations of the elastic support. Summary of the Invention

[0003] However, the elastic support described in International Publication No. 2020 / 184439 requires the bonding of cushioning material, shaped to correspond to a pair of spring components, to one spring component and the other spring component. Therefore, it is difficult to reduce the amount of cushioning material used.

[0004] Taking into account the above facts, the purpose of this disclosure is to provide an actuator capable of reducing the amount of cushioning material used.

[0005] The actuator of the first type includes: a mounting member comprising a coil; a movable member having a magnet disposed opposite to the coil, which is displaced relative to the mounting member by energizing the coil; an elastic support having: a mounting member-side fixed portion fixed to the mounting member; a movable member-side fixed portion fixed to the movable member; and a deformable portion connecting the mounting member-side fixed portion and the movable member-side fixed portion; and a cushioning material disposed between the mounting member and the deformable portion, which deforms along with the flexural deformation of the deformable portion.

[0006] In the actuator of the first type, when the coil is energized, the movable part with the magnet is displaced relative to the mounting part. Furthermore, when the movable part is displaced relative to the mounting part, the deformable portion of the elastic support undergoes flexural deformation. When the deformable portion of the elastic support undergoes flexural deformation, the buffer material disposed between the mounting part and the deformable portion of the elastic support deforms. This attenuates the vibration of the elastic support. In this embodiment, the buffer material is disposed between the mounting part and the deformable portion of the elastic support. Therefore, in this embodiment, for example, the elastic support comprises a pair of spring members, and the buffer material, shaped corresponding to the pair of spring members, is bonded to one spring member and the other spring member. Compared to this configuration, the amount of buffer material used can be reduced.

[0007] The actuator of the second type is based on the actuator of the first type, wherein the elastic support and the cushioning material are arranged to overlap each other in the thickness direction, and the deformable side of the cushioning material has an adhesive surface that is bonded to the deformable portion.

[0008] In the actuator of the second type, the adhesive surface of the cushioning material is bonded to the deformable portion of the elastic support. Therefore, even if the area observed in the thickness direction decreases, the damping effect of the cushioning material can be improved.

[0009] The actuator of the third type is based on the actuator of the second type, wherein the mounting component side of the cushioning material has an adhesive surface that is bonded to the mounting component.

[0010] In the actuator of the third type, the adhesive surface of the cushioning material is bonded to the mounting component. Therefore, even though the area observed in the thickness direction is smaller, the damping effect of the cushioning material can be further improved.

[0011] The actuator of the fourth type is based on the actuator of the second or third type. The cushioning material has a remaining portion that does not overlap with the deformable portion when viewed from its thickness direction, and also has a cover member. The deformable portion is disposed between the cover member and the cushioning material, and the cover member is attached to the remaining portion.

[0012] In the actuator of the fourth type, a deformable portion is disposed between the cover member and the cushioning material, and the cover member is adhered to the remaining portion. This allows the cover member to cover the remaining portion of the cushioning material. Furthermore, by distributing the deformable portion between the cushioning material and the cover member, the damping effect can be improved.

[0013] The actuator of the fifth type is based on the actuator of the fourth type, wherein the cover component has an adhesive surface that is bonded to the deformable portion and the cushioning material.

[0014] In the actuator of the fifth type, the adhesive surface of the cover component can be bonded to the deformable part and the cushioning material.

[0015] The actuator of the sixth type is based on the actuator of any one of the first to fifth types, and the cushioning material is provided in a state where it is compressed between the mounting component and the deformable part.

[0016] In the actuator of the sixth embodiment, the cushioning material is provided in a compressed state between the mounting member and the deformable portion of the elastic support. Therefore, even when the deformable portion of the elastic support deforms toward the side opposite to the mounting member, the contact state between the cushioning material and the deformable portion of the elastic support, as well as the contact state between the cushioning material and the mounting member, can be maintained.

[0017] The actuator of the seventh type is based on the actuator of any one of the first to sixth types, and the buffer material is provided on the fixed part side of the mounting component in the deformable part.

[0018] In the actuator of the seventh embodiment, the cushioning material is disposed in the deformable portion of the elastic support on the mounting component side and the fixed portion side. Therefore, compared to a configuration where the cushioning material is disposed on the fixed portion side closer to the moving component side, the deformation amount of the deformable portion is smaller, thus suppressing the deformation of the cushioning material. This suppresses the deterioration associated with repeated deformation of the cushioning material.

[0019] The actuator of the eighth embodiment is based on the actuator of the seventh embodiment. When the displacement direction of the movable member is taken as the ±Z direction, and the mutually perpendicular directions in the plane orthogonal to the ±Z direction are taken as the X and Y directions, the deformable part has an arm extending from the fixed part on the movable member side to the fixed part on the mounting member side. The arm has: a first X-direction outward extension that extends outward in the X direction from the fixed part on the movable member side; a first folding-back part formed on the fixed part on the mounting member side than the first X-direction outward extension, with its extension direction folding back from the X-direction outward to the X-direction inward; and an X-direction inward extension that extends from the first folding-back part in the X direction. The device comprises: an inner extension; a second fold-back portion formed on the side of the fixed portion near the movable member, which is longer than the inner extension portion in the X direction, and the extension direction folds back from the inner side in the X direction to the outer side in the X direction; a second outer extension portion in the X direction, which extends outward from the second fold-back portion in the X direction; a third fold-back portion formed on the side of the fixed portion near the mounting member, which is longer than the second outer extension portion in the X direction, and the extension direction folds back from the outer side in the X direction to the outer side in the Y direction; and an outer extension portion in the Y direction, which extends outward from the third fold-back portion in the Y direction and is connected to the fixed portion on the mounting member side, wherein the cushioning material is provided along the second outer extension portion in the X direction, the third fold-back portion, and the outer extension portion in the Y direction.

[0020] In the actuator of the eighth embodiment, the arm of the deformable portion of the elastic support includes a first X-direction outward extension, a first fold-back portion, an X-direction inward extension, a second fold-back portion, a second X-direction outward extension, a third fold-back portion, and a Y-direction outward extension. Therefore, compared to a configuration without the third fold-back portion and the Y-direction outward extension, the length of the arm of the deformable portion can be extended. By extending the arm length, the resonant frequency can be reduced. Furthermore, the load on the elastic support can be reduced, as can the load applied to the fixed portion on the moving part side and the fixed portion on the mounting part side, making metal fatigue less likely. Additionally, a cushioning material is provided along the second X-direction outward extension, the third fold-back portion, and the Y-direction outward extension. Thus, by providing the third fold-back portion and the Y-direction outward extension, it is easy to place the cushioning material between the mounting part and a position where the arm deformation is small. Compared to the case where the cushioning material is provided along the first X-direction outward extension, the first fold-back portion, the X-direction inward extension, and the second fold-back portion, the deformation of the cushioning material can be suppressed. Therefore, it is possible to suppress the deterioration that accompanies repeated deformation of the cushioning material.

[0021] The actuator of the ninth embodiment is based on the actuator of the eighth embodiment and includes two cushioning materials. The elastic support has four mounting member-side fixed portions and four arms. Two of the four arms are arranged on one side of the X direction and symmetrically formed in the Y direction relative to the movable member-side fixed portion. The other two of the four arms are arranged on the other side of the X direction and symmetrically formed in the Y direction relative to the movable member-side fixed portion. One cushioning material is provided along the second X-direction outer extension, the third folding portion, and the Y-direction outer extension of the two arms arranged on one side of the X direction relative to the movable member-side fixed portion. The other cushioning material is provided along the second X-direction outer extension, the third folding portion, and the Y-direction outer extension of the two arms arranged on the other side of the X direction relative to the movable member-side fixed portion.

[0022] In the actuator of the ninth type, two cushioning materials are provided for each of the four arms. This reduces the number of cushioning materials compared to a configuration where four cushioning materials are provided for each of the four arms.

[0023] The actuator of the 10th embodiment is based on the actuator of the 9th embodiment. The deformable part is formed in the shape of a plate and has a Y-direction connecting portion that connects the third folding portion of the two arms that are fixed to the movable part on one side in the X direction in the Y direction. It also has a Y-direction connecting portion that connects the third folding portion of the two arms that are fixed to the movable part on the other side in the X direction in the Y direction. One of the cushioning materials is disposed along one of the Y-direction connecting portions, and the other cushioning material is disposed along the other Y-direction connecting portion.

[0024] In the actuator of the tenth embodiment, a Y-direction connecting portion is provided in the third folding portion of the connecting arm in the Y direction. This improves the flatness of the deformable portion formed by the plate shape compared to a configuration without a Y-direction connecting portion. Furthermore, since the flatness of the deformable portion can be maintained during the individual component assembly process, it is difficult to generate individual component differences, and it can suppress the inconsistency of spring coefficients (inconsistency of hardness and stiffness).

[0025] The actuator disclosed herein has the excellent effect of reducing the amount of cushioning material used. Attached Figure Description

[0026] Figure 1 This is a three-dimensional diagram representing the actuator.

[0027] Figure 2 It is an exploded three-dimensional diagram representing the actuator.

[0028] Figure 3A This is a top view of the actuator.

[0029] Figure 3B Is with Figure 3A The corresponding top view omits the illustration of the cover component.

[0030] Figure 4 It means along Figure 3A The cross-sectional view of the actuator cut along line 4-4 is shown.

[0031] Figure 5 This is a top view of the elastic support.

[0032] Figure 6 This is a three-dimensional diagram representing another type of elastic support.

[0033] Figure 7 This is a top view showing another type of elastic support.

[0034] Figure 8 This is a top view showing another type of elastic support. Detailed Implementation

[0035] use Figures 1-5 The actuator 10 according to the embodiments of this disclosure will be described. Furthermore, the arrows X, Y, and Z shown in the figures represent various directions of the actuator 10. In the following description, the +Z direction shown in each figure is referred to as the upward direction, and the -Z direction as the downward direction. These are directional concepts based on the actuator and are not used to limit the installation posture of the actuator. Additionally, the axis parallel to the Z direction and passing through the center of gravity of the movable member 14 (described later) is referred to as the center of gravity axis AX of the movable member 14. Thus, the direction in the X direction approaching the center of gravity axis AX of the movable member 14 is referred to as the inner side of the X direction, and the direction away from it is referred to as the outer side of the X direction. Similarly, the direction in the Y direction approaching the center of gravity axis AX of the movable member 14 is referred to as the inner side of the Y direction, and the direction away from it is referred to as the outer side of the Y direction. Furthermore, the +X direction is referred to as one side of the X direction, the -X direction as the other side of the X direction, the +Y direction as one side of the Y direction, the -Y direction as the other side of the Y direction, the +Z direction as one side of the Z direction, and the -Z direction as the other side of the Z direction.

[0036] like Figures 1-4 As shown, the actuator 10 in this embodiment is an example of an actuator that vibrates a display unit such as a liquid crystal panel or various controllers that are configured as touch panels. By controlling the power supply to the actuator 10, various tactile sensations can be provided to the fingers of users touching the touch panel or controllers.

[0037] like Figure 1 as well as Figure 2 As shown, the actuator 10 includes: a mounting member 12 mounted on a mounting object such as a tablet computer terminal display; a movable member 14 that moves relative to the mounting member 12; and an elastic support 16 that elastically supports the movable member 14 relative to the mounting member 12. Furthermore, the actuator 10 includes: two cushioning materials 18 that dampen vibrations of the elastic support 16; and two cover members 20 mounted on the elastic support 16 and covering one side of the cushioning materials 18.

[0038] (Composition of mounting component 12)

[0039] like Figure 2 As shown, the mounting component 12 includes a box-shaped frame 22; a coil 24 formed by a circularly wound conductive wire; a mounting adhesive sheet 26; and a pair of terminals 28.

[0040] Frame 22, as an example, is formed using resin material and is box-shaped with one side open in the Z direction. Frame 22 has a bottom wall 30, which is rectangular in shape, with its thickness along the Z direction and its longer side along the X direction and its shorter side along the Y direction when viewed from the Z direction. Figure 2 as well as Figure 4 As shown, in the bottom wall portion 30, a circular opening 32 extending through the Z direction is formed at the center of both the X and Y directions. Additionally, the frame 22 has annular ribs 34 protruding from the edge of the opening 32 in the bottom wall portion 30 toward the Z direction.

[0041] In addition, the frame 22 includes: a pair of first sidewall portions 36, which stand up from the ends of the bottom wall portion 30 in the X direction and the other side toward the Z direction; and a pair of second sidewall portions 38, which stand up from the ends of the bottom wall portion 30 in the Y direction and the other side toward the Z direction.

[0042] like Figure 2 As shown, from the end face of one side of the first sidewall portion 36 in the Z direction, on the Y direction side and the other side, two rectangular block-shaped pedestal portions 40 protrude toward the Z direction side respectively. In addition, starting from the two pedestal portions 40, cylindrical welding protrusions 42 (welding portions) in the state before welding (described later) protrude toward the Z direction side.

[0043] Furthermore, the frame 22 includes a central protrusion 44 that protrudes from the central portion in the Y direction of one first sidewall portion 36 toward the other first sidewall portion 36. Further, the frame 22 includes a central protrusion 44 that protrudes from the central portion in the Y direction of the other first sidewall portion 36 toward the other first sidewall portion 36. In this embodiment, a plurality of recesses 44A open in the Z direction are formed in these central protrusions 44. Here, the Z-direction end face of one central protrusion 44 and the Y-direction central portion of the Z-direction end face of one first sidewall portion 36 become the cushioning material bonding surface 46 for bonding one cushioning material 18 (described later). Additionally, the Z-direction end face of the other central protrusion 44 and the Y-direction central portion of the Z-direction end face of the other first sidewall portion 36 become the cushioning material bonding surface 46 for bonding the other cushioning material 18 (described later).

[0044] (The structure of coil 24)

[0045] like Figure 2 as well as Figure 4 As shown, a coil 24 is formed by winding a conductive wire in a loop around a coil base 48 that is formed in a loop with the Z-direction as the axial direction. The coil 24 and the coil base 48 are supported together on a frame 22. Furthermore, with the coil 24 and coil base 48 supported on the frame 22, the coil 24 abuts against the ribs 34 of the frame 22. Additionally, a pair of terminal portions 24A of the coil 24 are respectively connected to a pair of terminals 28 supported on the frame 22.

[0046] (Composition of the adhesive sheet 26 for installation)

[0047] The mounting adhesive sheet 26 is a component used to mount the actuator 10 to the object to be mounted. The mounting adhesive sheet 26 is an adhesive sheet with adhesive surfaces on both sides. The mounting adhesive sheet 26 is bonded to the lower side of the bottom wall portion 30 of the frame 22. Furthermore, the mounting adhesive sheet 26 has a circular opening 26A corresponding to the opening 32 formed in the bottom wall portion 30 of the frame 22.

[0048] (Composition of moving part 14)

[0049] The movable component 14 is composed of a magnetic yoke 50, a magnet 52, and a pole core 54.

[0050] The magnetic yoke 50 is formed using a soft magnetic material. The magnetic yoke 50 includes: a top wall portion 50A formed in the shape of a circular plate with its thickness along the Z direction; and a peripheral wall portion 50B extending downward from the outer periphery of the top wall portion 50A. Additionally, the magnetic yoke 50 includes a fixing protrusion 50C that protrudes from the center of one side of the top wall portion 50A in the Z direction toward the Z direction side.

[0051] The magnet 52 is formed in the shape of a circular plate with the Z direction as the axis. The magnet 52 is fixed to the lower side of the top wall portion 50A of the yoke 50 when it is disposed inside the peripheral wall portion 50B of the yoke 50.

[0052] The pole core 54 is formed using a soft magnetic material. The pole core 54 is formed in the shape of a circular plate with the Z-axis as the axis and is fixed to the lower side of the magnet 52.

[0053] On the movable part 14 described above, a magnetic circuit is formed by the yoke 50, the magnet 52, and the pole core 54. A space is formed between the magnet 52 and the pole core 54 and the peripheral wall portion 50B of the yoke 50, and a coil 24 is arranged in this space. The lower end of the peripheral wall portion 50B of the yoke 50 is at the same height as the lower end of the pole core 54. Furthermore, the pole core 54 may also have a downward protrusion height compared to the lower end of the peripheral wall portion 50B.

[0054] (Composition of elastic support 16)

[0055] As shown in Figure 3 and Figure 5 As shown, the elastic support 16 is formed using a plate-shaped (planar) metal plate. In its free state (without external force), the elastic support 16 is formed as a plate along a direction orthogonal to the Z-direction.

[0056] The elastic support 16 is partially fixed to the mounting member 12 and partially fixed to the movable member 14. The portion of the elastic support 16 between the portion fixed to the mounting member 12 and the portion fixed to the movable member 14 is a deformable portion 60, which deforms when the movable member 14 undergoes displacement (vibration). Specifically, the elastic support 16 consists of four mounting member-side fixed portions 56 fixed to the mounting member 12, movable member-side fixed portions 58 fixed to the movable member 14, and a deformable portion 60 connecting the mounting member-side fixed portions 56 and the movable member-side fixed portions 58.

[0057] The four mounting component-side fixing portions 56, viewed from the Z-direction, are rectangular in shape corresponding to the four pedestal portions 40 of the frame 22. Each of these four mounting component-side fixing portions 56 has a circular fixing hole 56A extending along the Z-direction. Thus, the four welding protrusions 42 of the frame 22 are inserted into the fixing holes 56A of the four mounting component-side fixing portions 56. Furthermore, the Z-direction end of the welding protrusions 42 of the frame 22 is welded (hot-riveted), thereby fixing the four mounting component-side fixing portions 56 to the four pedestal portions 40 of the frame 22. Furthermore, with the four mounting component-side fixing portions 56 fixed to the four pedestal portions 40 of the frame 22, the four mounting component-side fixing portions 56 cannot be separated from the four pedestal portions 40 of the frame 22. Additionally, the figures show the state after the welding protrusions 42 have been hot-riveted.

[0058] The movable component-side fixing portion 58 is circular in shape, and when viewed from the Z direction, its diameter is smaller than that of the top wall portion 50A of the magnetic yoke 50, which constitutes part of the movable component 14. A circular fixing hole 58A is formed in the center of this movable component-side fixing portion 58. Thus, the fixing protrusion 50C of the magnetic yoke 50 is inserted into the fixing hole 58A of the movable component-side fixing portion 58. Furthermore, the Z-direction end of the fixing protrusion 50C of the magnetic yoke 50 is deformed (riveted) due to drilling or the like, thereby fixing the movable component-side fixing portion 58 to the magnetic yoke 50. Furthermore, the deformed state of the fixing protrusion 50C is not shown in the figures.

[0059] The deformable portion 60 extends from the beginning end 62 toward the end end 64, and includes a one-sided starting point portion 66A and a other-sided starting point portion 66B, and four arm portions 68A, 68B, 68C, and 68D. Furthermore, in the following description, the four arm portions 68A, 68B, 68C, and 68D are sometimes referred to as the first arm portion 68A, the second arm portion 68B, the third arm portion 68C, and the fourth arm portion 68D, respectively.

[0060] Here, when the deformable portion 60 is defined as the portion extending from the movable component-side fixed portion 58 towards the mounting component-side fixed portion 56, the starting end 62 refers to the beginning portion of the deformable portion 60. Specifically, the starting end 62 coincides with the boundary between the movable component-side fixed portion 58 and the deformable portion 60. Furthermore, in this embodiment, there are two starting ends 62: one on one side in the Y direction and one on the other side in the Y direction.

[0061] Furthermore, when the deformable portion 60 is defined as the portion extending from the movable member-side fixed portion 58 towards the mounting member-side fixed portion 56, the terminal 64 refers to the ending portion of the deformable portion 60. Specifically, it corresponds to the boundary between the deformable portion 60 and the mounting member-side fixed portion 56. In this embodiment, there are four terminals 64 corresponding to the four mounting member-side fixed portions 56 and the four arm portions 68A, 68B, 68C, and 68D.

[0062] Both the starting point 66A on one side and the starting point 66B on the other side are adjacent to the fixed part 58 on the movable part side in the Y direction. The starting point 66A on one side of the fixed part 58 on the movable part side in the Y direction is located on one side, and the starting point 66B on the other side of the fixed part 58 on the movable part side in the Y direction is located on the other side.

[0063] The deformable portion 60 branches off from one starting point 66A in the X direction to one side and the other side, respectively connecting to the first arm portion 68A and the second arm portion 68B. The deformable portion 60 also branches off from the other starting point 66B in the X direction to one side and the other side, respectively connecting to the third arm portion 68C and the fourth arm portion 68D. Furthermore, when there is no specific distinction between the one starting point 66A and the other starting point 66B, it is simply referred to as the starting point 66.

[0064] In this embodiment, the modified portion 60 is symmetrical in both the X and Y directions, and the four arms 68A, 68B, 68C, and 68D are identical in shape. In detail, the first arm 68A and the third arm 68C are positioned on one side of the movable member side of the fixed portion 58 and are symmetrically formed in the Y direction. Furthermore, the second arm 68B and the fourth arm 68D are positioned on the other side of the movable member side of the fixed portion 58 and are symmetrically formed in the Y direction. Further, the first arm 68A and the second arm 68B are symmetrically formed in the X direction. Additionally, the third arm 68C and the fourth arm 68D are also symmetrically formed in the X direction.

[0065] Each arm portion 68A, 68B, 68C, and 68D is fixed to the mounting component side from the starting point portion 66 and has, in sequence, a first X-direction outward extension portion 70a, a first folding-back portion 70b, an X-direction inward extension portion 70c, a second folding-back portion 70d, a second X-direction outward extension portion 70e, a third folding-back portion 70f, and a Y-direction outward extension portion 70g.

[0066] The first X-direction outward extension 70a is a portion that extends outward in the X-direction from the side of the movable member fixed portion 58. The extension direction of the first X-direction outward extension 70a is parallel to the X-direction.

[0067] The first folding portion 70b is formed on the side of the mounting component fixed portion 56 that is closer to the outer extension portion 70a in the first X direction. The extension directions of the arm portions 68A, 68B, 68C, and 68D in the first folding portion 70b are folded inward in the Y direction.

[0068] The X-direction inner extension 70c is the portion that extends from the first folded-back portion 70b toward the inside in the X direction. The extension direction of the X-direction inner extension 70c is parallel to the X direction.

[0069] The second folding portion 70d is formed on the side of the fixed portion 58 near the movable component side of the extension portion 70c in the X direction. In this second folding portion 70d, the extension directions of the arms 68A, 68B, 68C, and 68D are folded inward toward the Y direction.

[0070] The second X-direction outward extension 70e is the portion that extends outward in the X-direction from the second fold-back portion 70d. The second X-direction outward extension 70e is shaped such that the angle of inclination of its extension direction relative to the X-direction gradually decreases as it moves outward in the X-direction.

[0071] The third folding portion 70f is formed on the side of the mounting component fixed portion 56 that is closer to the second X-direction outer extension portion 70e. In this third folding portion 70f, the extension direction of the arms 68A, 68B, 68C, and 68D folds back from the X-direction outer side toward the Y-direction outer side.

[0072] The Y-direction outward extension 70g extends outward from the third fold-back portion 70f in the Y-direction direction and is connected to the fixing portion 56 on the opposite side of the third fold-back portion 70f and the mounting component side. The extension direction of the Y-direction outward extension 70g is parallel to the Y-direction.

[0073] Furthermore, the elastic support 16 of this embodiment includes a Y-direction connecting portion 72 that connects the third fold-back portion 70f of the first arm portion 68A and the third fold-back portion 70f of the third arm portion 68C in the Y direction, and also includes a Y-direction connecting portion 72 that connects the third fold-back portion 70f of the second arm portion 68B and the third fold-back portion 70f of the fourth arm portion 68D in the Y direction. Each Y-direction connecting portion 72 extends along the Y direction at the same position as each Y-direction outward extension portion 70g in the X direction.

[0074] (Composition of cushioning material 18)

[0075] like Figure 2 , Figure 3B as well as Figure 4 As shown, the cushioning material 18 is formed in a plate shape using a viscoelastic raw material, with its thickness along the Z direction and a rectangular shape when viewed from the Z direction. Specifically, the cushioning material 18 is rectangular when viewed from the Z direction, with its long side along the Y direction and its short side along the X direction. The dimensions of the cushioning material 18 along the Y and X directions are set to correspond to the dimensions of the cushioning material bonding surface 46 of the frame 22 along the Y and X directions.

[0076] The other side (bottom) of the cushioning material 18 in the Z direction becomes the first adhesive surface 18A, which can be bonded to other components. Additionally, one side (top) of the cushioning material 18 in the Z direction becomes the second adhesive surface 18B, which can be bonded to other components. Furthermore, it is possible that only the top and bottom sides of the cushioning material 18 become adhesive surfaces, or neither the top nor the bottom sides of the cushioning material 18 become adhesive surfaces. Further, the thickness T of the individual component state of the cushioning material 18 (the state before deformation when sandwiched between the cushioning material adhesive surface 46 of the frame 22 and the elastic support 16) is set to be greater than the size of the gap between the cushioning material adhesive surface 46 of the frame 22 and the elastic support 16.

[0077] Thus, the first adhesive surface 18A of one cushioning material 18 is adhered to the first cushioning material adhesive surface 46 of the frame 22. Therefore, one cushioning material 18 is installed on the first cushioning material adhesive surface 46 of the frame 22. Similarly, the first adhesive surface 18A of the other cushioning material 18 is adhered to the other cushioning material adhesive surface 46 of the frame 22. Therefore, the other cushioning material 18 is installed on the other cushioning material adhesive surface 46 of the frame 22. Furthermore, in a configuration where the first adhesive surface 18A is not provided on the cushioning material 18, a retaining portion such as a recess for holding the position of the cushioning material 18 can be provided in the portion corresponding to the cushioning material adhesive surface 46 of the frame 22.

[0078] Next, the four weld protrusions 42 of the frame 22 are respectively inserted into the fixing holes 56A of the four mounting parts fixed to the elastic support 16, and the end of the weld protrusion 42 on the Z-direction side is welded. Thus, the elastic support 16 is installed on the frame 22.

[0079] Here, with the elastic support 16 installed on the frame 22, a cushioning material 18 is disposed along the second X-direction outer extension 70e, the third fold-back portion 70f, the Y-direction outer extension 70g, and the Y-direction connecting portion 72 of each of the first arm 68A and the third arm 68C. Furthermore, with the elastic support 16 installed on the frame 22, the second adhesive surface 18B of the cushioning material 18 is adhered to the other side (below) in the Z-direction of each of the second X-direction outer extension 70e, the third fold-back portion 70f, the Y-direction outer extension 70g, and the Y-direction connecting portion 72 of the first arm 68A and the third arm 68C. Furthermore, with the elastic support 16 installed on the frame 22, the cushioning material 18 is flattened (compressed) between the second X-direction outer extension 70e, the third fold-back portion 70f, and the Y-direction outer extension 70g of the first arm portion 68A and the third arm portion 68C, and the cushioning material adhesive surface 46 of the frame 22.

[0080] Similarly, with the elastic support 16 installed on the frame 22, the other cushioning material 18 is disposed along the second X-direction outer extension 70e, the third fold-back portion 70f, and the Y-direction outer extension 70g of each of the second arm 68B and the fourth arm 68D, and the other Y-direction connecting portion 72. Furthermore, with the elastic support 16 installed on the frame 22, the second adhesive surface 18B of the other cushioning material 18 is adhered to the other side (below) in the Z-direction of each of the second X-direction outer extension 70e, the third fold-back portion 70f, and the Y-direction outer extension 70g of the second arm 68B and the fourth arm 68D, and the other Y-direction connecting portion 72. Furthermore, with the elastic support 16 installed on the frame 22, the other cushioning material 18 is flattened (compressed) between the second X-direction outer extension 70e, the third fold-back portion 70f, and the Y-direction outer extension 70g of the second arm portion 68B and the fourth arm portion 68D, and the other Y-direction connecting portion 72 and the other cushioning material bonding surface 46 of the frame 22.

[0081] Furthermore, the figures do not show the state in which the cushioning material 18 is flattened between the second X-direction outer extension 70e, the third fold-back portion 70f, and the Y-direction outer extension 70g of each arm 68A, 68B, 68C, 68D and the other cushioning material bonding surface 46 of the frame 22.

[0082] Figure 3B The diagram shows a top view of the actuator 10 before the installation of the two cover components 20. The portion of the cushioning material 18 shown in the diagram where the second adhesive surface 18B is visible is referred to as the remaining portion 18C of the cushioning material 18. Specifically, the portion of the cushioning material 18 shown in the diagram that does not overlap with the second X-direction outer extension 70e, the third fold-back portion 70f, the Y-direction outer extension 70g, and the Y-direction connecting portion 72 in the Z-direction of each arm 68A, 68B, 68C, 68D is referred to as the remaining portion 18C of the cushioning material 18.

[0083] (Composition of cover component 20)

[0084] The cover component 20 is formed in a sheet shape using a viscoelastic raw material, with its thickness along the Z direction and a rectangular shape when viewed from the Z direction. Specifically, the cover component 20 is formed in a rectangular shape, with its long side along the Y direction and its short side along the X direction when viewed from the Z direction. The dimensions of the cover component 20 along the Y and X directions are set to correspond to the dimensions of the cushioning material 18 along the Y and X directions.

[0085] The other side (bottom) in the Z direction of the cover member 20 becomes an adhesive surface 20A that can be bonded to other parts. Conversely, one side (top) in the Z direction of the cover member 20 does not become an adhesive surface. Figure 3A as well as Figure 3BAs shown, the adhesive surface 20A of one cover component 20 is adhered to the second adhesive surface 18B of the remaining portion 18C of one cushioning material 18, and is also adhered to one side (top) in the Z direction of the second X-direction outer extension 70e, the third fold-back portion 70f, the Y-direction outer extension 70g, and the one Y-direction connecting portion 72 of the first arm portion 68A and the third arm portion 68C, respectively. Thus, the second X-direction outer extension 70e, the third fold-back portion 70f, and the one Y-direction connecting portion 72 of the first arm portion 68A and the third arm portion 68C are disposed between the cushioning material 18 and the cover component 20. Similarly, the adhesive surface 20A of the other cover component 20 is adhered to the second adhesive surface 18B of the remaining portion 18C of the other cushioning material 18, and is adhered to one side (top) in the Z direction of the second X-direction outer extension 70e, the third fold-back portion 70f, and the Y-direction outer extension 70g of the second arm portion 68B and the fourth arm portion 68D, and the other Y-direction connecting portion 72. Thus, the second X-direction outer extension 70e, the third fold-back portion 70f, and the Y-direction outer extension 70g of the second arm portion 68B and the fourth arm portion 68D, and the other Y-direction connecting portion 72 are disposed between the other cushioning material 18 and the other cover component 20. Furthermore, the state in which the adhesive surface 20A of the cover component 20 is adhered to the second adhesive surface 18B of the remaining portion 18C of the cushioning material 18 is not shown in the figures.

[0086] (The function and effects of this implementation method)

[0087] The function and effects of this embodiment will be explained below.

[0088] like Figure 1 , Figure 2 as well as Figure 4 As shown, in the actuator 10 described above, the movable part 14 is supported on the elastic support 16. When the coil 24 is not energized, the movable part 14 is located... Figure 4 The origin position is shown. In the actuator 10 of this embodiment, the coil 24 is fixed to the frame 22, and the magnet 52, etc., are provided in the movable member 14. Therefore, by energizing the coil 24, a thrust as a reaction force is generated in the movable member 14, which is generated from the force of the coil 24. Thus, by energizing the coil 24 with alternating current, the movable member 14 vibrates in the vertical direction along the center of gravity axis AX.

[0089] Here, when the movable part 14 is displaced relative to the mounting part 12, the deformable portion 60 of the elastic support 16 undergoes flexural deformation. When the deformable portion 60 of the elastic support 16 flexes, the two cushioning materials 18 disposed between the mounting part 12 and the deformable portion 60 of the elastic support 16 deform. This attenuates the vibration of the elastic support 16. In this embodiment, the cushioning material 18 is disposed between the mounting part 12 and the deformable portion 60 of the elastic support 16. Therefore, in this embodiment, for example, the elastic support 16 comprises a pair of spring members, and compared to a configuration where cushioning material with a shape corresponding to the pair of spring members is bonded to one spring member and the other, the amount of cushioning material 18 used can be reduced.

[0090] Furthermore, in this embodiment, the first adhesive surface 18A and the second adhesive surface 18B of the cushioning material 18 are respectively bonded to the cushioning material adhesive surface 46 of the frame 22 and the elastic support 16. Therefore, even if the area of ​​the cushioning material 18 viewed from the thickness direction is reduced, the damping effect of the cushioning material 18 can be improved.

[0091] In addition, in this embodiment, the cushioning material 18 is provided on the side of the mounting member fixed to the fixed portion 56 in the deformable portion 60 of the elastic support 16. That is, the cushioning material 18 is provided on the side of the deformable portion 60 of the elastic support 16 with smaller amplitude. As will be described in detail... Figure 3B as well as Figure 5 As shown, the cushioning material 18 is only provided on the portions corresponding to the second X-direction outward extension 70e, the third fold-back portion 70f, the Y-direction outward extension 70g, and the Y-direction connecting portion 72 of each arm portion 68A, 68B, 68C, and 68D. Therefore, compared to a configuration where the cushioning material 18 is provided on the side of the fixed portion 58 closer to the moving part than this portion, the deformation of the cushioning material 18 can be suppressed. This suppresses the deterioration associated with repeated deformation of the cushioning material 18. Furthermore, by suppressing the deterioration associated with repeated deformation of the cushioning material 18, changes in the resonant frequency of the vibration system including the elastic support 16 can be suppressed.

[0092] In addition, in this embodiment, such as Figure 3A as well as Figure 3BAs shown, the cover member 20 is adhered to the second adhesive surface 18B of the remaining portion 18C of the cushioning material 18, as well as the Z-direction side (top) of the second X-direction outward extension 70e, the third fold-back portion 70f, the Y-direction outward extension 70g, and the Y-direction connecting portion 72 of each of the arms 68A, 68B, 68C, and 68D. In this configuration, the remaining portion 18C of the cushioning material 18 can be covered by the cover member 20. As a result, foreign matter such as dust can be prevented from adhering to the second adhesive surface 18B of the remaining portion 18C of the cushioning material 18. In addition, the damping effect of the cover member 20 can also be obtained. Therefore, compared with the configuration of only providing the cushioning material 18, the damping effect can be improved.

[0093] Furthermore, in this embodiment, the second X-direction outward extension 70e, the third fold-back portion 70f, the Y-direction outward extension 70g, and the Y-direction connecting portion 72 of each arm 68A, 68B, 68C, and 68D are clamped by the cushioning material 18 and the cover member 20. Therefore, in addition to the vibration attenuation effect of the cushioning material 18 on the elastic support 16, the vibration attenuation effect of the cover member 20 on the elastic support 16 can also be obtained. Furthermore, since vibration can be attenuated by both the cushioning material 18 and the cover member 20, the durability of the cushioning material 18 can be improved compared to the case where only the cushioning material 18 is provided.

[0094] Furthermore, in this embodiment, the cushioning material 18 is flattened (compressed) between the second X-direction outward extension 70e, the third fold-back portion 70f, the Y-direction outward extension 70g, and the Y-direction connecting portion 72 of each arm 68A, 68B, 68C, and 68D and the cushioning material bonding surface 46 of the frame 22. Therefore, when the second X-direction outward extension 70e, the third fold-back portion 70f, the Y-direction outward extension 70g, and the Y-direction connecting portion 72 of each arm 68A, 68B, 68C, and 68D deforms toward the side opposite to the mounting member 12 (the Z-direction side), the contact state between the cushioning material 18 and the elastic support 16, as well as the contact state between the cushioning material 18 and the mounting member 12, can be maintained.

[0095] Furthermore, in this embodiment, each arm 68A, 68B, 68C, and 68D of the deformable portion 60 of the elastic support 16 includes a first X-direction outward extension 70a, a first fold-back portion 70b, an X-direction inward extension 70c, a second fold-back portion 70d, a second X-direction outward extension 70e, a third fold-back portion 70f, and a Y-direction outward extension 70g. Therefore, compared to a configuration without the third fold-back portion 70f and the Y-direction outward extension 70g, the length of each arm 68A, 68B, 68C, and 68D of the deformable portion 60 can be extended. This reduces the load on each arm 68A, 68B, 68C, and 68D, and also reduces the load applied to the movable component-side fixed portion 58 and the mounting component-side fixed portion 56, making metal fatigue less likely. Therefore, the durability of each arm 68A, 68B, 68C, and 68D can be improved. In addition, compared with the configuration without the third folding part 70f and the Y-direction outward extension part 70g, the resonant frequency of the vibration system including the elastic support 16 can be reduced.

[0096] Furthermore, the cushioning material is provided along the outer extension 70e in the second X direction, the third fold-back portion 70f, and the outer extension 70g in the Y direction. In this way, by providing the third fold-back portion 70f and the outer extension 70g in the Y direction, the cushioning material 18 can be easily placed between the mounting component 12 and the position where the deformation of each arm portion 68A, 68B, 68C, and 68D is small.

[0097] Furthermore, in this embodiment, the first arm portion 68A and the third arm portion 68C, having the third folding portion 70f and the Y-direction outward extension portion 70g, are positioned on one side of the movable member side of the fixed portion 58 in the X direction and are symmetrically formed in the Y direction. Additionally, the second arm portion 68B and the fourth arm portion 68D, having the third folding portion 70f and the Y-direction outward extension portion 70g, are positioned on the other side of the movable member side of the fixed portion 58 in the X direction and are symmetrically formed in the Y direction. Further, the first arm portion 68A and the second arm portion 68B are symmetrically formed in the X direction. Additionally, the third arm portion 68C and the fourth arm portion 68D are symmetrically formed in the X direction. Therefore, when viewed from the Z direction, the length ratio of the four arms 68A, 68B, 68C, and 68D to the proprietary area of ​​the elastic support 16 can be increased.

[0098] Furthermore, in this embodiment, two cushioning materials 18 are provided for each of the four arm portions 68A, 68B, 68C, and 68D. In detail, one cushioning material 18 is provided at the position where two arm portions (first arm portion 68A and third arm portion 68C) are bonded to the same side, and the other cushioning material 18 is provided at the position where two arm portions (second arm portion 68B and fourth arm portion 68D) are bonded to the same side. Therefore, compared to a configuration where four cushioning materials 18 are provided for each of the four arm portions 68A, 68B, 68C, and 68D, the number of cushioning materials 18 can be reduced.

[0099] Furthermore, in this embodiment, the elastic support 16 includes a Y-direction connecting portion 72 that connects the third fold-back portion 70f of the first arm portion 68A and the third fold-back portion 70f of the third arm portion 68C in the Y direction, and also includes a Y-direction connecting portion 72 that connects the third fold-back portion 70f of the second arm portion 68B and the third fold-back portion 70f of the fourth arm portion 68D in the Y direction. Therefore, compared to a configuration without the Y-direction connecting portion 72, the flatness of the deformable portion 60 of the plate-shaped elastic support 16 in its free state can be improved. In particular, the flatness of the deformable portion 60 during stamping of the elastic support 16 can be improved. Furthermore, because the flatness of the deformable portion 60 can be maintained, it is difficult to produce individual component differences, and the inconsistency of spring coefficients (inconsistency of hardness and stiffness) can be suppressed.

[0100] Furthermore, in this embodiment, with the four mounting component-side fixing portions 56 of the elastic support 16 respectively fixed to the four pedestal portions 40 of the frame 22, the four mounting component-side fixing portions 56 cannot be separated from the four pedestal portions 40 of the frame 22. Therefore, changes in the contact state between the mounting component-side fixing portions 56 and the fixed portions of the pedestal portions 40 can be suppressed. This suppresses the misalignment of the resonance point of the elastic support 16 caused by changes in the contact state.

[0101] Furthermore, in the example described above, the elastic support 16 includes a Y-direction connecting portion 72 that connects the third fold-back portion 70f of the first arm 68A and the third fold-back portion 70f of the third arm 68C in the Y direction, and also includes a Y-direction connecting portion 72 that connects the third fold-back portion 70f of the second arm 68B and the third fold-back portion 70f of the fourth arm 68D in the Y direction. This example has been described, but the disclosure is not limited thereto. For example, as... Figure 6 as well as Figure 7 As shown in the elastic support 80, it can also be configured without the Y-direction connecting portion 72. Furthermore, in Figure 6 as well as Figure 7 The portion of the elastic support 80 shown that corresponds to the aforementioned elastic support 16 is labeled with the same symbols as the portion corresponding to the aforementioned elastic support 16.

[0102] Furthermore, the above-described example illustrates an example where both sides of the elastic support 16 are planar, but this disclosure is not limited thereto. For example, as Figure 8 As shown in the diagram, the elastic support 82 can also be configured with stepped portions 84 formed at four locations corresponding to the end 64 of the deformable portion 60. Alternatively, although not shown in the diagram, it can also be configured with stepped portions formed at two locations corresponding to the beginning of the deformable portion of the elastic support. Figure 8 In the configuration shown, the movable component side fixed portion 58 and the deformable portion 60 are offset along one side of the Z-direction relative to the four mounting component side fixed portions 56. Thus, in... Figure 8 In this design, a stepped portion 84 is formed, and the movable component-side fixed portion 58 and the deformable portion 60 are offset in the Z-direction relative to the mounting component-side fixed portion 56. However, a shape offset in the other Z-direction could also be used. By providing the stepped portion 84, the stepped portion can serve as the base point of the deformable portion 60, thereby reducing the stress applied to the mounting component-side fixed portion 56. Furthermore, as... Figure 8 As shown, by adopting a shape in which the fixed portion 58 on the moving part side and the deformable portion 60 are offset in the Z direction relative to the fixed portion 56 on the mounting part side, it is possible to suppress the overall height increase of the actuator and to expand the degree of freedom in the thickness dimension of the cushioning material, thereby amplifying the adjustment range of the cushioning material's attenuation effect. Furthermore, in Figure 8 The portion of the elastic support 82 shown that corresponds to the aforementioned elastic support 16 is marked with the same symbols as the portion corresponding to the aforementioned elastic support 16.

[0103] Furthermore, the example described above illustrates an example in which the four mounting component-side fixing portions 56 are welded and fixed to the four pedestal portions 40 of the frame 22, but this disclosure is not limited thereto. For example, the four mounting component-side fixing portions 56 may also be detachably fixed to the four pedestal portions 40 of the frame 22 using screws or the like.

[0104] Furthermore, in the example described above, a configuration with two buffer materials 18 provided relative to the four arms 68A, 68B, 68C, and 68D was described, but this disclosure is not limited thereto. The number of arms 68A, 68B, 68C, and 68D, and the number of buffer materials 18, can be appropriately set considering the vibration characteristics required by the actuator 10, etc.

[0105] Furthermore, in the examples described above, an example was given in which the cushioning material 18 was only provided in the portions corresponding to the second X-direction outer extension 70e, the third fold-back portion 70f, the Y-direction outer extension 70g, and the Y-direction connecting portion 72 of each of the arms 68A, 68B, 68C, and 68D. However, this disclosure is not limited to this. For example, a configuration in which the cushioning material 18 is provided on the side of the fixed portion 58 closer to the moving part than this position can also be adopted. In this way, the position of the cushioning material 18 can be appropriately set considering the required durability of the cushioning material 18. In addition, for example, by adjusting the size of the cushioning material 18 along the X direction, the resonant frequency of the vibration system including the elastic support 16 can be adjusted. For example, in Figure 3B As shown by the two-dotted lines, the dimension from the end opposite to the movable part 58 of the cushioning material 18 in the Y direction can be set to half the dimension of the example described above (1 / 2W), or it can be set to 2 / 3 of the dimension of the example described above (2 / 3W). In this case, by shortening the dimension from the end opposite to the movable part 58 of the cushioning material 18 in the Y direction, the resonant frequency of the vibration system including the elastic support 16 can be reduced.

[0106] Furthermore, as illustrated in the examples above, an example of providing a cover member 20 has been given, but this disclosure is not limited thereto. Whether or not to provide a cover member 20 can be appropriately determined by considering factors such as the type or size of foreign matter attached to the second adhesive surface 18B of the cushioning material 18, or the damping effect of the elastic support 16 required by the cover member 20 for vibration.

[0107] Furthermore, as illustrated in the examples above, an example has been described where the entire surface of one side of the cover member 20 has an adhesive surface; however, this disclosure is not limited to this. For example, even if the cover member does not have an adhesive surface, it can still be adhered to the adhesive surface of the cushioning material. In this case, by providing a deformable portion between the cushioning material and the cover member, the damping effect can be improved. Additionally, an adhesive surface can be provided locally on one side of the cover member. For example, considering factors such as providing an adhesive surface only at the contact point with the deformable portion or the damping effect on the vibration of the elastic support, it can be appropriately set.

[0108] Furthermore, the configuration described above can also be applied to actuators consisting of different elastic supports, including each arm 68A, 68B, 68C, and 68D.

[0109] The above describes one embodiment of the present disclosure. However, the present disclosure is not limited to the above content. Undoubtedly, various modifications can be made in addition to the above content without departing from its spirit.

[0110] The publication of Japanese Patent Application No. 2021-141919, filed on August 31, 2021, is incorporated herein by reference in its entirety.

Claims

1. An actuator comprising: Mounting component, the mounting component being configured to include a coil; A movable component having a magnet arranged opposite to the coil, which moves relative to the mounting component when the coil is energized; An elastic support body has: a mounting member-side fixed portion fixed to the mounting member; a movable member-side fixed portion fixed to the movable member; and a deformable portion connecting the mounting member-side fixed portion and the movable member-side fixed portion; as well as A cushioning material is disposed between the mounting component and the deformable part, and deforms along with the flexural deformation of the deformable part; The elastic support and the cushioning material are arranged to overlap each other in the thickness direction. The deformable portion side of the cushioning material has an adhesive surface that adheres to the deformable portion; The cushioning material has a remaining portion that, when viewed from its thickness direction, does not overlap with the deformed portion. The actuator also has a cover component. The deformable portion is disposed between the cover component and the cushioning material. The cover component is attached to the remaining portion.

2. The actuator according to claim 1, The mounting component side of the cushioning material has an adhesive surface that adheres to the mounting component.

3. The actuator according to claim 1, The cover component has an adhesive surface that is bonded to the deformable portion and the cushioning material.

4. The actuator according to any one of claims 1 to 3, The cushioning material is placed in a state where it is compressed between the mounting component and the deformable part.

5. The actuator according to any one of claims 1 to 3, The cushioning material is provided on the side of the mounting component and the side of the fixed part in the deformable part.

6. The actuator according to claim 5, When the displacement direction of the moving part is taken as the ±Z direction, and the directions perpendicular to each other in the plane orthogonal to the ±Z direction are taken as the X and Y directions, The deformable portion includes an arm extending from the fixed portion on the movable component side to the fixed portion on the mounting component side. The arm has: The first X-direction outward extension extends outward from the fixed part side of the movable component side in the X-direction outward; The first folding portion is formed on the side of the fixed portion relative to the mounting member side compared to the first X-direction outer extension portion, and the extension direction is folded back from the X-direction outer side to the X-direction inner side. The inner extension portion in the X direction extends from the first folded portion inward in the X direction; The second folding portion is formed on the side of the fixed portion relative to the movable member side compared to the inner extension portion in the X direction, and the extension direction is folded back from the inner side in the X direction to the outer side in the X direction. The second X-direction outward extension extends outward from the second folded-back portion in the X-direction; The third folding portion is formed on the side of the fixed portion relative to the mounting member, compared to the second X-direction outward extension portion, and its extension direction is folded back from the X-direction outward to the Y-direction outward; and The Y-direction outward extension extends outward from the third fold-back portion in the Y direction and is connected to the mounting component side fixing portion; The cushioning material is provided along the outer extension portion in the second X direction, the third fold-back portion, and the outer extension portion in the Y direction.

7. The actuator according to claim 6, The actuator has two of the aforementioned cushioning materials. The elastic support body has four mounting component side fixing portions and four arm portions. Of the four arms, two are fixed relative to the movable component side, positioned on one side in the X direction, and symmetrical in the Y direction. Of the four arms, two other arms are fixed to the movable component on the opposite side in the X direction and are symmetrical in the Y direction. One of the cushioning materials is provided at a position where the two arm portions, which are fixed to the moving part side, are positioned on one side in the X direction, and are bonded to the same surface. Another of the cushioning materials is provided, on the same side, at the position of the two arms that are fixed relative to the moving part side and are arranged on the other side in the X direction.

8. The actuator according to claim 7, The deformable portion is formed into a plate shape. The device includes a Y-direction connecting portion that connects in the Y direction to the third folding portion of the two arms that are fixed relative to the movable component side and disposed on one side in the X direction, and a Y-direction connecting portion that connects in the Y direction to the third folding portion of the two arms that are fixed relative to the movable component side and disposed on the other side in the X direction. One of the cushioning materials is disposed along a connection in the Y direction. Another of the aforementioned cushioning materials is disposed along another of the aforementioned Y-direction connections.