A multi-axis planar motion platform suitable for vacuum environments

Abstract

This invention discloses a multi-axis planar motion platform suitable for vacuum environments, comprising: a vacuum chamber, a mounting top plate, an adjusting column, a motion stage, a support platform, a drive assembly, a secondary guide rail, a primary guide rail, and a primary slider. The vacuum chamber is a sealed cavity, with the mounting top plate positioned at the top inner side of the vacuum chamber. The support platform is a hollow square structure connected to the mounting top plate via the adjusting column. The motion stage and secondary guide rail are both located inside the support platform, while the drive assembly is located outside the support platform. The output end of the drive assembly is connected to the secondary guide rail, which extends horizontally through the inner side of the motion stage. Both ends of the secondary guide rail are connected to the primary slider, which slides on the primary guide rail. The primary guide rail is located at the edge of the support platform. Driven by the drive assembly, the secondary guide rail, primary slider, and primary guide rail cooperate to achieve relative sliding of the motion stage within the support platform along the X-axis or Y-axis. This invention has the advantages of compact structure, simple operation, and high motion accuracy.

Description

Technical Field

[0001] This invention relates to the field of precision motion platform technology, and more specifically to a multi-axis planar motion platform suitable for vacuum environments. Background Technology

[0002] Precision motion platforms have a wide range of applications, typically requiring end-effectors to possess multiple degrees of freedom, large stroke, and high precision, and their implementation varies. With technological advancements, the demands for manufacturing precision are increasing: in the chip manufacturing industry, nanoscale processing demands extremely stringent environmental conditions; any minute particles or environmental disturbances can cause process failure. This presents a challenge to motion platform design: while possessing multiple degrees of freedom, large stroke, and high precision motion performance, motion platforms must also have fast response speeds to meet production efficiency requirements; the process environment must be vacuum clean, vibration-free, non-magnetic, and heat-free; furthermore, they should have a compact structure, be adaptable to frequent start-stop cycles, and possess long-term stability.

[0003] The commonly used planar motion platforms in vacuum environments have the following main drawbacks:

[0004] (1) The motor needs to be sealed, temperature controlled and magnetically shielded, which makes the overall structure complex;

[0005] (2) The backlash of the ball screw cannot be eliminated, resulting in limited motion accuracy of the platform;

[0006] (3) The transmission chain is long, which is prone to error accumulation and affects the platform's response speed and overall accuracy. Summary of the Invention

[0007] The technical problem to be solved by the present invention is to overcome the shortcomings of existing planar motion platforms, such as complex structure, complex error causes, and limited accuracy, and to provide a multi-axis planar motion platform that is compact, easy to operate, and has high motion accuracy and is suitable for vacuum environments.

[0008] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0009] A multi-axis planar motion platform suitable for vacuum environments includes: a vacuum chamber, a mounting top plate, an adjusting column, a motion stage, a support platform, a drive assembly, a secondary guide rail, a primary guide rail, and a primary slider. The vacuum chamber is a sealed cavity. The mounting top plate is located on the top inner side of the vacuum chamber. The support platform has a hollow square structure and is connected to the mounting top plate via the adjusting column. The motion stage and the secondary guide rail are both located inside the support platform. The drive assembly is located outside the support platform, and its output end is connected and fixed to the secondary guide rail. The secondary guide rail extends horizontally through the inner side of the motion stage, and its two ends are respectively connected and fixed to the primary slider. The primary slider is slidably mounted on the primary guide rail, which is located at the edge of the support platform. Under the drive of the drive assembly, the secondary guide rail, the primary slider, and the primary guide rail cooperate to achieve relative sliding of the motion stage within the support platform along the X-axis or Y-axis.

[0010] As a further improvement of the present invention, the motion table has a double-layer structure, including an upper motion table and a lower motion table, which are fixed together by bolts; the bottom of the upper motion table and the bottom of the lower motion table are respectively provided with mutually perpendicular auxiliary guide rails, so as to realize the relative sliding of the motion table on the inner side of the support platform along the X-axis or Y-axis.

[0011] As a further improvement of the present invention, the secondary guide rail includes a first secondary guide rail and a second secondary guide rail. The side of the upper motion stage is embedded with a first secondary slider that moves along the Y-axis direction. The first secondary slider cooperates with the first secondary guide rail to realize relative sliding of the motion stage along the X-axis direction. The side of the lower motion stage is embedded with a first secondary slider that moves along the X-axis direction. The first secondary slider cooperates with the second secondary guide rail to realize relative sliding of the motion stage along the Y-axis direction.

[0012] As a further improvement of the present invention, the main guide rail includes a first main guide rail and a second main guide rail; the first main guide rail and the second main guide rail are each arranged in pairs, the first main guide rail is arranged on the upper surface of the support platform along a direction parallel to the Y-axis, and the second main guide rail is arranged on the lower surface of the support platform along a direction parallel to the X-axis.

[0013] As a further improvement of the present invention, the main slider includes a first main slider and a second main slider; the first main slider and the second main slider are each in pairs; the first main slider is slidably disposed on a first main guide rail; the two ends of a first auxiliary guide rail are respectively connected and fixed to the first main slider; the first main slider cooperates with the first main guide rail to realize relative sliding of the motion table along the Y-axis direction; the second main slider is slidably disposed on a second main guide rail; the two ends of the second auxiliary guide rail are respectively connected and fixed to the second main slider; the second main slider cooperates with the second main guide rail to realize relative sliding of the motion table along the X-axis direction.

[0014] As a further improvement of the present invention, the driving assembly includes a driving member and a push rod. One end of the push rod is connected to the output end of the driving member, and the other end of the push rod is connected to the secondary guide rail. Under the drive of the driving member, the push rod drives the secondary guide rail to slide relative to each other along the X-axis or Y-axis.

[0015] As a further improvement of the present invention, the driving component includes a first driving component and a second driving component; the push rod includes a first push rod and a second push rod; one end of the first push rod is fixedly connected to the output end of the first driving component, and the other end of the first push rod is fixedly connected to the first auxiliary guide rail, and the first driving component drives the first auxiliary guide rail to generate a translational motion along the Y-axis; one end of the second push rod is fixedly connected to the output end of the second driving component, and the other end of the second push rod is fixedly connected to the second auxiliary guide rail, and the second driving component drives the second auxiliary guide rail to generate a translational motion along the X-axis.

[0016] As a further improvement of the present invention, the push rod passes through the panel of the vacuum cavity to transmit the motion of the drive component to the secondary guide rail inside the vacuum cavity, and the passage position is sealed with magnetohydrodynamics.

[0017] As a further improvement of the present invention, the driving component is a servo motor, a cylinder, a hydraulic cylinder, or an electric push rod.

[0018] As a further improvement of the present invention, the vacuum cavity is formed by a vacuum top plate, a first side plate, a second side plate, a vacuum bottom plate, a third side plate, and a fourth side plate. The vacuum cavity has a reserved process window and pipeline channel, and the mounting top plate is connected to the vacuum top plate through the circumference of the central hole.

[0019] Compared with the prior art, the advantages of the present invention are as follows:

[0020] 1. The multi-axis planar motion platform of the present invention, suitable for vacuum environments, comprises a vacuum chamber, a mounting top plate, adjusting columns, a motion stage, a support platform, a drive assembly, secondary guide rails, primary guide rails, and a main slider, forming the main structure of the motion platform. The mounting top plate is located on the top inner side of the vacuum chamber, and the support platform is a hollow square structure. The support platform is suspended by four adjusting columns at a position where the mounting top plate does not contact the top panel of the vacuum chamber. Since this position is completely exposed to the vacuum, errors caused by deformation of the mounting panel during vacuum generation are avoided. The primary guide rails of the motion stage along the X and Y axes are respectively installed on the lower and upper surfaces of the support platform, making the overall structure compact. The drive assembly is located on the outside of the support platform, eliminating the need for complex isolation and cooling devices, simplifying the structure, and making it suitable for working environments with limited space. At the same time, it reduces the impact of the drive assembly on the process environment.

[0021] 2. The multi-axis planar motion platform of the present invention, suitable for vacuum environments, has the output end of the drive motor directly connected to the push rod, transmitting motion to the motion table. This simplifies the structure and avoids the influence of intermediate transmission devices on motion accuracy. The coplanar translational motion is decoupled through the main and auxiliary guide rails, ensuring that mutually perpendicular translational motions do not interfere with each other, making it easy to achieve large stroke motion. The overall structure of the drive assembly is simple, with a small surface area exposed to the vacuum environment, making it easy to establish and maintain the vacuum, clean, vibration-free, non-magnetic, and heat-free environment required by the process, meeting a wide range of process conditions. The stroke of the motion table can be adjusted by changing the size of the structural components, providing high flexibility. Attached Figure Description

[0022] Figure 1 This is a schematic diagram illustrating the explosive structure principle of a multi-axis planar motion platform suitable for a vacuum environment in a specific embodiment of the present invention.

[0023] Figure 2 This is a schematic diagram of the partial structure of a multi-axis planar motion platform suitable for a vacuum environment in a specific embodiment of the present invention.

[0024] Figure 3 This is a schematic diagram illustrating the assembly structure of a multi-axis planar motion platform suitable for a vacuum environment, as described in a specific embodiment of the present invention.

[0025] Legend: 1. Vacuum cavity; 1-1. Vacuum top plate; 1-2. First side plate; 1-3. Second side plate; 1-4. Vacuum bottom plate; 1-5. Third side plate; 1-6. Fourth side plate; 2. Mounting top plate; 3. Adjusting column; 3-1. First adjusting column; 3-2. Second adjusting column; 3-3. Third adjusting column; 3-4. Fourth adjusting column; 4. Moving platform; 4-1. Upper moving platform; 4-2. Lower moving platform; 5. Support platform; 6. Secondary slide Block; 6-1, First auxiliary slider; 6-2, Second auxiliary slider; 7, Driving component; 7-1, First driving component; 7-2, Second driving component; 8, Secondary guide rail; 8-1, First auxiliary guide rail; 8-2, Secondary guide rail; 9, Push rod; 9-1, First push rod; 9-2, Second push rod; 10, Main guide rail; 10-1, First main guide rail; 10-2, Second main guide rail; 11, Main slider; 11-1, First main slider; 11-2, Second main slider. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0027] Example

[0028] like Figures 1 to 3As shown, the multi-axis planar motion platform suitable for vacuum environments of the present invention includes: a vacuum chamber 1, a mounting top plate 2, an adjusting column 3, a motion stage 4, a support platform 5, a drive assembly, a secondary guide rail 8, a primary guide rail 10, and a primary slider 11. The vacuum chamber 1 is a sealed cavity. The mounting top plate 2 is located on the top inner side of the vacuum chamber 1. The support platform 5 has a hollow square structure, i.e., it is a square frame. The support platform 5 is connected to the mounting top plate 2 via the adjusting column 3, which can adjust the installation distance and angle of the support platform 5 relative to the mounting top plate 2. The motion stage 4 and the secondary guide rail 8 are both located inside the support platform 5. The drive assembly is located outside the support platform 5, and its output end is connected and fixed to the secondary guide rail 8. The secondary guide rail 8 extends horizontally through the inner side of the motion stage 4. Both ends of the secondary guide rail 8 are connected and fixed to the primary slider 11. The primary slider 11 is slidably mounted on the primary guide rail 10, which is located at the edge of the support platform 5. Driven by the drive assembly, the secondary guide rail 8, the main slider 11 and the main guide rail 10 cooperate to enable the motion table 4 to slide relative to the support table 5 along the X-axis or Y-axis.

[0029] like Figure 1 As shown, in this embodiment, the vacuum chamber 1 is formed by a vacuum top plate 1-1, a first side plate 1-2, a second side plate 1-3, a vacuum bottom plate 1-4, a third side plate 1-5, and a fourth side plate 1-6. The vacuum chamber 1 has a reserved process window and pipeline channel. The mounting top plate 2 is connected to the vacuum top plate 1-1 through the circumference of the central hole.

[0030] In this embodiment, the main structure of the motion platform consists of a vacuum chamber 1, a mounting top plate 2, adjusting columns 3, a motion stage 4, a support platform 5, a drive assembly, a secondary guide rail 8, a main guide rail 10, and a main slider 11. The mounting top plate 2 is located on the top inner side of the vacuum chamber 1, and the support platform 5 is a hollow square structure. The support platform is suspended and installed at a position where the mounting top plate 2 does not contact the top panel of the vacuum chamber 1 through four adjusting columns 3. Since this position is completely exposed to the vacuum, errors caused by deformation of the mounting panel during vacuum generation are avoided. The main guide rails 10 of the motion stage 4 along the X and Y axes are respectively installed on the lower and upper surfaces of the support platform 5, making the overall structure compact. The drive assembly is located on the outside of the support platform 5, eliminating the need for complex isolation and cooling devices, simplifying the structure, and making it suitable for working environments with limited space. At the same time, it reduces the impact of the drive assembly on the process environment.

[0031] like Figure 1 and Figure 2As shown, in this embodiment, the motion table 4 has a double-layer structure, including an upper motion table 4-1 and a lower motion table 4-2, which are fixed together by bolts. The bottom of the upper motion table 4-1 and the bottom of the lower motion table 4-2 are respectively provided with mutually perpendicular auxiliary guide rails 8, so as to enable the motion table 4 to slide relative to each other along the X-axis or Y-axis direction within the support platform 5.

[0032] like Figure 1 and Figure 2 As shown, in this embodiment, the secondary guide rail 8 includes a first secondary guide rail 8-1 and a second secondary guide rail 8-2. A first secondary slider 6-1, which moves along the Y-axis, is embedded in the side of the upper motion stage 4-1. The first secondary slider 6-1 cooperates with the first secondary guide rail 8-1 to achieve relative sliding of the motion stage 4 along the X-axis. Similarly, a first secondary slider 6-2, which moves along the X-axis, is embedded in the side of the lower motion stage 4-2. The first secondary slider 6-2 cooperates with the second secondary guide rail 8-2 to achieve relative sliding of the motion stage 4 along the Y-axis.

[0033] like Figure 1 and Figure 2 As shown, in this embodiment, the main guide rail 10 includes a first main guide rail 10-1 and a second main guide rail 10-2; the first main guide rail 10-1 and the second main guide rail 10-2 are each arranged in pairs. The first main guide rail 10-1 is arranged on the upper surface of the support platform 5 along a direction parallel to the Y-axis, and the second main guide rail 10-2 is arranged on the lower surface of the support platform 5 along a direction parallel to the X-axis.

[0034] like Figure 1 and Figure 2 As shown, in this embodiment, the main slider 11 includes a first main slider 11-1 and a second main slider 11-2; the first main slider 11-1 and the second main slider 11-2 are each paired together. The first main slider 11-1 is slidably mounted on the first main guide rail 10-1, and both ends of the first auxiliary guide rail 8-1 are respectively connected and fixed to the first main slider 11-1. The first main slider 11-1 cooperates with the first main guide rail 10-1 to achieve relative sliding of the motion table 4 along the Y-axis direction; the second main slider 11-2 is slidably mounted on the second main guide rail 10-2, and both ends of the second auxiliary guide rail 8-2 are respectively connected and fixed to the second main slider 11-2. The second main slider 11-2 cooperates with the second main guide rail 10-2 to achieve relative sliding of the motion table 4 along the X-axis direction.

[0035] In this embodiment, the driving assembly includes a driving component 7 and a push rod 9. One end of the push rod 9 is connected to the output end of the driving component 7, and the other end of the push rod 9 is connected to the secondary guide rail 8. Under the drive of the driving component 7, the push rod 9 drives the secondary guide rail 8 to slide relative to each other along the X-axis or Y-axis. Specifically, the driving component 7 is a servo motor. In other embodiments, the driving component 7 can be a cylinder, a hydraulic cylinder, or an electric push rod.

[0036] like Figure 1 and Figure 2 As shown, in this embodiment, the driving component 7 includes a first driving component 7-1 and a second driving component 7-2; the push rod 9 includes a first push rod 9-1 and a second push rod 9-2. One end of the first push rod 9-1 is fixedly connected to the output end of the first driving component 7-1, and the other end of the first push rod 9-1 is fixedly connected to the first secondary guide rail 8-1. The first driving component 7-1 drives the first secondary guide rail 8-1 to generate a translational movement along the Y-axis. One end of the second push rod 9-2 is fixedly connected to the output end of the second driving component 7-2, and the other end of the second push rod 9-2 is fixedly connected to the second secondary guide rail 8-2. The second driving component 7-2 drives the second secondary guide rail 8-2 to generate a translational movement along the X-axis.

[0037] In this embodiment, the push rod 9 passes through the panel of the vacuum chamber 1 to transmit the movement of the drive component 7 to the secondary guide rail 8 inside the vacuum chamber 1, and the passage position is sealed with magnetohydrodynamics.

[0038] The working principle of the planar motion platform suitable for vacuum environment in this embodiment is as follows: The first drive motor 7-1 drives the first push rod 9-1, which, together with the first auxiliary guide rail 8-1, generates a translational motion along the Y-axis under the guidance of the first main guide rail 10-1. The motion table 4, under the action of the first auxiliary slider 6-1, translates together along the Y-axis. During this process, the interference of the motion table 4 in the X-axis direction is relieved by the second auxiliary guide rail 8-2 and the second auxiliary slider 6-2. The second drive motor 7-2 drives the second push rod 9-2, which, together with the second auxiliary guide rail 8-2, generates a translational motion along the X-axis under the guidance of the second main guide rail 10-2. The motion table 4, under the action of the second auxiliary slider 6-2, translates together along the X-axis. During this process, the interference of the motion table 4 in the Y-axis direction is relieved by the first auxiliary guide rail 8-1 and the first auxiliary slider 6-1. The motion table 4 moves within the hollow square structure of the support platform 5. That is, the stroke of the motion table 4 along the X (Y) axis is the side length of the central square hole of the support platform 5 along the X (Y) axis minus the side length of the motion table 4 along the X (Y) axis.

[0039] In this embodiment, the output end of the drive motor is directly connected to the push rod, transmitting the motion to the motion table. This simplifies the structure and avoids the impact of intermediate transmission devices on motion accuracy. The coplanar translational motion is decoupled through the main and auxiliary guide rails, ensuring that mutually perpendicular translational motions do not interfere with each other, making it easy to achieve large-stroke motion. The overall structure of the drive assembly is simple, with a small surface area exposed to the vacuum environment, making it easy to establish and maintain the vacuum clean, vibration-free, non-magnetic, and heat-free environment required by the process, thus meeting a wide range of process conditions. The stroke of the motion table can be adjusted by changing the dimensions of the structural components, offering high flexibility.

[0040] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention, or modify them into equivalent embodiments, without departing from the spirit and technical essence of the invention. Therefore, any simple modifications, equivalent substitutions, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention, shall still fall within the scope of protection of the present invention.

Claims

1. A multi-axis planar motion platform suitable for vacuum environments, characterized in that, include: The vacuum chamber (1), mounting top plate (2), adjusting column (3), motion table (4), support platform (5), drive assembly, secondary guide rail (8), main guide rail (10), and main slider (11) are all included. The vacuum chamber (1) is a sealed chamber. The mounting top plate (2) is located on the top of the inner side of the vacuum chamber (1). The support platform (5) is a hollow square structure. The support platform (5) is connected to the mounting top plate (2) through the adjusting column (3). The motion table (4) and secondary guide rail (8) are both located inside the support platform (5). The drive assembly is located outside the support platform (5). On the side, the output end of the drive component is connected and fixed to the secondary guide rail (8). The secondary guide rail (8) passes through the inner side of the motion table (4) in the horizontal direction. The two ends of the secondary guide rail (8) are connected and fixed to the main slider (11). The main slider (11) is slidably arranged on the main guide rail (10). The main guide rail (10) is arranged on the edge of the support platform (5). Under the drive of the drive component, the secondary guide rail (8), the main slider (11) and the main guide rail (10) cooperate to realize that the motion table (4) generates relative sliding in the X-axis direction or Y-axis direction on the inner side of the support platform (5). The motion table (4) has a double-layer structure, including an upper motion table (4-1) and a lower motion table (4-2). The upper motion table (4-1) and the lower motion table (4-2) are fixed together by bolts. The bottom of the upper motion table (4-1) and the bottom of the lower motion table (4-2) are respectively provided with mutually perpendicular auxiliary guide rails (8) to enable the motion table (4) to slide relative to each other along the X-axis or Y-axis direction inside the bearing platform (5). The secondary guide rail (8) includes a first secondary guide rail (8-1) and a second secondary guide rail (8-2). The side of the upper motion stage (4-1) is embedded with a first secondary slider (6-1) that moves along the Y-axis. The first secondary slider (6-1) cooperates with the first secondary guide rail (8-1) to achieve relative sliding of the motion stage (4) along the X-axis. The side of the lower motion stage (4-2) is embedded with a second secondary slider (6-2) that moves along the X-axis. The second secondary slider (6-2) cooperates with the second secondary guide rail (8-2) to achieve relative sliding of the motion stage (4) along the Y-axis. The main guide rail (10) includes a first main guide rail (10-1) and a second main guide rail (10-2); the first main guide rail (10-1) and the second main guide rail (10-2) are arranged in pairs, the first main guide rail (10-1) is arranged on the upper surface of the support platform (5) along the direction parallel to the Y axis, and the second main guide rail (10-2) is arranged on the lower surface of the support platform (5) along the direction parallel to the X axis; The main slider (11) includes a first main slider (11-1) and a second main slider (11-2); the first main slider (11-1) and the second main slider (11-2) are each in pairs. The first main slider (11-1) is slidably mounted on the first main guide rail (10-1). The two ends of the first auxiliary guide rail (8-1) are respectively connected and fixed to the first main slider (11-1). The first main slider (11-1) cooperates with the first main guide rail (10-1) to realize the relative sliding of the motion table (4) along the Y-axis direction. The second main slider (11-2) is slidably mounted on the second main guide rail (10-2). The two ends of the second auxiliary guide rail (8-2) are respectively connected and fixed to the second main slider (11-2). The second main slider (11-2) cooperates with the second main guide rail (10-2) to realize the relative sliding of the motion table (4) along the X-axis direction.

2. The multi-axis planar motion platform suitable for vacuum environments according to claim 1, characterized in that, The drive assembly includes a drive member (7) and a push rod (9). One end of the push rod (9) is connected to the output end of the drive member (7), and the other end of the push rod (9) is connected to the secondary guide rail (8). Under the drive of the drive member (7), the push rod (9) drives the secondary guide rail (8) to slide relative to each other along the X-axis or Y-axis.

3. The multi-axis planar motion platform suitable for vacuum environments according to claim 2, characterized in that, The driving component (7) includes a first driving component (7-1) and a second driving component (7-2); the push rod (9) includes a first push rod (9-1) and a second push rod (9-2); one end of the first push rod (9-1) is connected and fixed to the output end of the first driving component (7-1), and the other end of the first push rod (9-1) is connected and fixed to the first auxiliary guide rail (8-1). The first driving component (7-1) drives the first auxiliary guide rail (8-1) to generate a translational motion along the Y-axis; one end of the second push rod (9-2) is connected and fixed to the output end of the second driving component (7-2), and the other end of the second push rod (9-2) is connected and fixed to the second auxiliary guide rail (8-2). The second driving component (7-2) drives the second auxiliary guide rail (8-2) to generate a translational motion along the X-axis.

4. The multi-axis planar motion platform suitable for vacuum environments according to claim 2, characterized in that, The push rod (9) passes through the panel of the vacuum chamber (1) and transmits the motion of the drive unit (7) to the secondary guide rail (8) inside the vacuum chamber (1). The passage position is sealed with magnetic fluid.

5. The multi-axis planar motion platform suitable for vacuum environments according to claim 2, characterized in that, The drive component (7) is a servo motor, a pneumatic cylinder, a hydraulic cylinder, or an electric push rod.

6. The multi-axis planar motion platform suitable for vacuum environments according to any one of claims 1 to 5, characterized in that, The vacuum chamber (1) is formed by a vacuum top plate (1-1), a first side plate (1-2), a second side plate (1-3), a vacuum bottom plate (1-4), a third side plate (1-5), and a fourth side plate (1-6). The vacuum chamber (1) has a reserved process window and pipeline channel. The mounting plate (2) is connected to the vacuum top plate (1-1) through the circumference of the central hole.

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