A multi-torch OVD deposition method and optical fiber preform production equipment

Abstract

This invention discloses a multi-torch OVD deposition method and an optical fiber preform production device, comprising: setting up an openable enclosed space; loading a core rod into the enclosed space; setting up a mobile device inside the enclosed space for loading a mobile torch; supplying raw materials to the mobile torch through a feeding device; and the mobile device driving the mobile torch to process the core rod along the core rod. A clamping shaft drives a moving sleeve block to press a force-applying spring, causing adjacent moving sleeve blocks to move closer to each other, thereby reducing the length of the feeding pipe coiled inside the pipe compartment. This allows part of the feeding pipe to extend out from the inside of the pipe compartment, ensuring that the length of the feeding pipe outside the pipe compartment meets the movement requirements of the moving structure. Through this solution, the feeding pipes remain in an orderly arrangement during the movement of the structure, preventing the feeding pipes from scattering and tangling on the ground.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical fiber preform manufacturing, in particular to a multi-lamp OVD deposition method and an optical fiber preform production device. BACKGROUND

[0002] The external chemical vapor deposition method is a simple process developed by Kapron of the United States Corning Company in 1970; It is a kind of optical fiber preform manufacturing process technology which was put into application in 1980. The chemical reaction mechanism of OVD process is flame hydrolysis, that is, the required core glass composition is obtained by gradually depositing the powder generated by gaseous halide (SiCl4, etc.) carried in hydrogen-oxygen flame or methane flame.

[0003] The existing lamp supply pipeline cannot be effectively positioned during production, and the supply pipeline will be pulled during the movement of the lamp, and the long supply pipeline will be scattered on the ground, and the problem of winding will be caused by being pulled. SUMMARY

[0004] In view of the problems existing in the prior art, the present application is proposed.

[0005] Therefore, the purpose of the present application is to provide a lamp OVD deposition method.

[0006] To solve the above technical problems, the present application provides the following technical scheme: a multi-lamp OVD deposition method, comprising: setting an openable closed space; loading a core rod in the closed space; setting a moving device on the inside of the closed space for loading a moving lamp; supplying raw materials to the moving lamp through a feeding device; and driving the moving lamp along the core rod by the moving device to process the core rod.

[0007] As a preferred scheme of the multi-lamp OVD deposition method of the present application, wherein: the core rod is in a rotatable state when loaded in the closed space.

[0008] As a preferred scheme of the multi-lamp OVD deposition method of the present application, wherein: the raw material supplied to the moving lamp by the feeding device is gaseous halide.

[0009] The present application also provides an optical fiber preform production device, which comprises the above-mentioned feeding device; it comprises: a feeding pipeline for conveying raw materials; a winding and unwinding mechanism comprising a pipeline cabin, a tensioning component arranged on the inside of the pipeline cabin, and a pipeline shaft group arranged on the tensioning component.

[0010] As a preferred scheme of the optical fiber preform production device of the present application, wherein: the pipeline cabin has an opening, and the pipeline cabin is provided with a positioning shaft at the opening.

[0011] As a preferred scheme of the optical fiber preform production equipment, the pipe cabin is provided with a plurality of parallel grooves; the tensioning component comprises a parallel shaft group, a plurality of horizontal shafts with the same number as the parallel grooves, a plurality of the horizontal shafts being parallel; a force spring is arranged outside the horizontal shaft; a plurality of moving sleeve blocks with the same number as the horizontal shafts are arranged outside the horizontal shafts one by one and abut against the force spring, and the moving sleeve blocks on adjacent horizontal shafts are located at the ends away from each other.

[0012] As a preferred scheme of the optical fiber preform production equipment, the moving sleeve block is provided with a mounting column, and the pipe shaft group comprises a plurality of pressing shafts with the same number as the moving sleeve blocks, and the pressing shafts are fixed to the mounting column.

[0013] As a preferred scheme of the optical fiber preform production equipment, the outer side of the feeding pipe is wrapped with a friction sleeve layer, and the friction sleeve layer replaces the feeding pipe to contact the pipe shaft group.

[0014] As a preferred scheme of the optical fiber preform production equipment, the moving mechanism comprises a vehicle body and a driving component arranged on the vehicle body; the deposition mechanism comprises a base arranged on the vehicle body, a torch arranged on the base, and a connecting port arranged on the base; the pipe supporting mechanism comprises an inner shaft arranged on the base and a support arranged on the inner shaft; the positioning mechanism comprises a rotating ring rotatably arranged on the inner shaft, a clamping arm arranged on the rotating ring, and a protective cover plate connected to the clamping arm.

[0015] As a preferred scheme of the optical fiber preform production equipment, the connecting mechanism further comprises a penetrating rod slidingly arranged on the protective cover plate, an abutting head arranged at the end of the penetrating rod, an elastic member sleeved outside the penetrating rod and abutting against the abutting head and the penetrating rod, and a connecting shaft arranged at the end of the penetrating rod.

[0016] The beneficial effects of the present application are as follows: when the moving structure moves away from the pipe cabin, the feeding pipe is pulled, in this case, the feeding pipe transmits the pulling force to the pressing shaft, the pressing shaft drives the moving sleeve block to press the force spring, so that the adjacent moving sleeve blocks move towards each other, thereby reducing the length of the feeding pipe wound on the inner side of the pipe cabin, so that part of the feeding pipe extends from the inner side of the pipe cabin, and the length of the feeding pipe outside the pipe cabin can meet the moving requirement of the moving structure. Through this scheme, the feeding pipe is always in an orderly arrangement state when the moving structure moves, and the problem of winding of the feeding pipe scattered on the ground is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0018] Figure 1 This is a schematic diagram of the feeding device in this invention.

[0019] Figure 2 This is a schematic diagram of the internal structure of the feeding device in this invention.

[0020] Figure 3 This is a schematic diagram of the tensioning component structure in this invention.

[0021] Figure 4 This is a schematic diagram of the movable sleeve block and the clamping shaft structure in this invention.

[0022] Figure 5 This is a schematic diagram of the overall structure of the optical fiber preform production equipment in this invention.

[0023] Figure 6 This is a schematic diagram of the feeding device and deposition mechanism in this invention.

[0024] Figure 7 This is a schematic diagram of the pipe support mechanism described in this invention.

[0025] Figure 8 This is a front view of the pipe support mechanism described in this invention.

[0026] Figure 9 As described in this invention Figure 8 Enlarged view of point A in the middle.

[0027] Figure 10 This is a schematic diagram of the unlocking mechanism described in this invention.

[0028] Figure 11 This is a schematic diagram of the adjustment mechanism described in this invention. Detailed Implementation

[0029] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0030] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0031] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0032] Secondly, the present invention is described in detail with reference to the schematic diagrams. When detailing the embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In addition, actual fabrication should include three-dimensional spatial dimensions of length, width, and depth.

[0033] Example 1

[0034] This embodiment provides a multi-torch OVD deposition method, including,

[0035] S1: Set up an openable enclosed space;

[0036] Setting up an enclosed space separates the processing area from other production areas. The enclosed space should have a certain degree of thermal insulation to prevent the temperature and flue gas from affecting other production areas during the deposition and fabrication of optical fiber preforms.

[0037] S2: Load the mandrel into the enclosed space;

[0038] When the mandrel is loaded inside the enclosed space, it is in a rotatable state. The mandrel is preferably placed horizontally so that the moving torch can perform stable processing on the mandrel.

[0039] S3: Install a mobile device inside the enclosed space to load the portable torch;

[0040] The mobile device can move along the mandrel. During the movement, when the mobile torch is installed on the mobile device, it is located below the mandrel. When the mobile device moves, it can drive the mobile torch to move along the mandrel, thereby processing the mandrel above.

[0041] S4: Supply raw materials to the mobile torch via the feeding device X;

[0042] The feeding device X supplies the mobile torch with gaseous halides. In this embodiment, the gaseous halide is SiCl4, and the chemical reaction mechanism is flame hydrolysis. The required core glass composition is obtained by gradually depositing SiCl4 powder carried in an oxyhydrogen flame or a methane flame layer by layer. The chemical formula is as follows:

[0043] 2H₂ + O₂ → 2H₂O (exothermic)

[0044] SiCl4(g)+2H2O→SiO2(s)+4HCl↑

[0045] By feeding materials through the feeding device X, the problem of the feeding pipe 100 falling to the ground and getting tangled due to movement of the feeding pipe 100 can be avoided.

[0046] S5: The mobile device drives the mobile torch to process the mandrel along the mandrel.

[0047] Example 2

[0048] Reference Figure 2 To avoid the problem of pipes scattering and getting tangled on the ground during movement, this embodiment differs from the first embodiment in that: an optical fiber preform production equipment includes the feeding device X in embodiment 1; it includes a feeding pipe 100 for conveying raw materials; and a take-up and release mechanism 200, including a pipe compartment 201, a tensioning member 202 disposed inside the pipe compartment 201, and a pipe shaft assembly 203 disposed on the tensioning member 202.

[0049] In order to enable the feeding pipe 100 to move during processing, a certain length of the feeding pipe 100 needs to be reserved inside the enclosed space. When the moving structure approaches the take-up and release mechanism 200, the excess length of the feeding pipe 100 is taken into the inside of the take-up and release mechanism 200. When the moving structure moves away from the take-up and release mechanism 200, the feeding pipe 100 is released from the inside of the pipe compartment 201, so that the length of the feeding pipe 100 extending out of the pipe compartment 201 can meet the movement of the moving structure.

[0050] When the excess length of the feed pipe 100 is located inside the pipe compartment 201, the tensioning member 202 can keep the feed pipe 100 arranged in an orderly manner inside the pipe compartment 201 to avoid entanglement. When the moving structure moves and pulls the feed pipe 100, the feed pipe 100 can transmit force to the tensioning member 202, so that the feed pipe 100 can be released from the inside of the pipe compartment 201.

[0051] Specifically, the pipe compartment 201 has an opening 201a, and a positioning shaft 201b is installed in the opening 201a of the pipe compartment 201.

[0052] The feeding pipe 100 enters the inside of the pipe compartment 201 through the opening 201a. The positioning shaft 201b is used to support the feeding pipe 100 and avoid hard contact between the feeding pipe 100 and the pipe compartment 201. In addition, the positioning shaft 201b is rotatably mounted on the pipe compartment 201 through a shaft connection. When the feeding pipe 100 moves, the positioning shaft 201b replaces the pipe compartment 201 in contact with the positioning shaft 201b, so that the hard friction of the feeding pipe 100 is converted into rolling friction.

[0053] Furthermore, the pipe compartment 201 is provided with several parallel grooves 201c; the tensioning component 202 includes a parallel shaft group 202a, which includes a number of horizontal shafts 202a-1 equal to the number of parallel grooves 201c, and several horizontal shafts 202a-1 are parallel to each other; a force spring 202b is provided on the outside of the horizontal shafts 202a-1; and a movable sleeve block 202c, which is the same number as the number of horizontal shafts 202a-1, with several movable sleeve blocks 202c being sleeved on the outside of the horizontal shafts 202a-1 and abutting against the force springs 202b, and the movable sleeve blocks 202c on adjacent horizontal shafts 202a-1 being located at ends that are far apart from each other.

[0054] The movable sleeve 202c is provided with a mounting column 202c-1, and the pipe shaft assembly 203 includes a number of clamping shafts 203a that are equivalent to the number of movable sleeve 202c. The clamping shafts 203a are fixed on the mounting column 202c-1.

[0055] By applying force spring 202b, the movable sleeve block 202c can be pushed, causing the movable sleeve blocks 202c on adjacent horizontal axes 202a-1 to move away from each other. Therefore, in the natural state, the moving structure is close to the pipe chamber 201 and will not pull the feeding pipe 100. At this time, the feeding pipe 100 does not apply pressure to the movable sleeve block 202c, and the feeding pipe 100 is coiled in an S-shape around the inside of the pipe chamber 201.

[0056] When the moving structure moves away from the pipe compartment 201, it will pull on the feed pipe 100. In this case, the feed pipe 100 will transmit the tension to the clamping shaft 203a. The clamping shaft 203a will drive the moving sleeve block 202c to press the force spring 202b, so that the adjacent moving sleeve blocks 202c move closer to each other, thereby reducing the length of the feed pipe 100 coiled inside the pipe compartment 201, so that part of the feed pipe 100 extends out from the inside of the pipe compartment 201, and the length of the feed pipe 100 outside the pipe compartment 201 can meet the movement requirements of the moving structure.

[0057] This design ensures that the feeding pipes 100 remain in an orderly arrangement as the structure moves, preventing them from scattering and becoming tangled on the ground.

[0058] Furthermore, the outer side of the feeding pipe 100 is wrapped with a friction sleeve 101. The friction sleeve 101 replaces the feeding pipe 100 and contacts the pipe shaft assembly 203. The friction sleeve 101 is fixedly sleeved on the inner side of the feeding pipe 100, and one end of the friction sleeve 101 is fixedly connected to the inner wall of the pipe chamber 201. Therefore, when the feeding pipe 100 is pulled, the friction sleeve 101 can effectively transmit the force to the clamping shaft 203a.

[0059] Another effect of the friction sleeve 101 is to reduce the wear of the feed pipe 100, as the feed pipe 100 does not directly contact or rub against the clamping shaft 203a.

[0060] The rest of the structure is the same as in Example 1.

[0061] Example 3

[0062] Reference Figure 2 This embodiment differs from the above embodiments in that: the device also includes a moving mechanism 300, including a vehicle body 301 and a driving component 302 disposed on the vehicle body 301. The entire moving mechanism 300 is a tracked vehicle, and the driving component 302 is the power component and track wheels of the tracked vehicle. The entire moving mechanism 300 is located inside the deposition chamber. The moving mechanism 300 moves inside the deposition chamber to complete the preparation of the optical fiber preform.

[0063] The deposition mechanism 400 includes a base 401 mounted on the vehicle body 301, a blowtorch 402 mounted on the base 401, and a connection port 403 mounted on the base 401. When the moving mechanism 300 moves, it can drive the base 401 to move synchronously, thereby driving the blowtorch 402 to move synchronously. One end of the connection port 403 is connected to the blowtorch 402, which conveys the raw material to the blowtorch 402. When the moving mechanism 300 moves, it can drive the blowtorch 402 to move along the optical fiber preform to process the optical fiber preform.

[0064] The pipe support mechanism 500 includes an inner shaft 501 mounted on the base 401 and a bracket 502 mounted on the inner shaft 501. The pipe support mechanism 500 is mainly used to support the feeding pipe 100. In this embodiment, the inner shaft 501 is mounted on the side of the base 401 and its position corresponds to the position of the connection port 403. The inner shaft 501 supports the entire bracket 502, and the bracket 502 limits and supports the feeding pipe 100, so that the moving mechanism 300 will not rub or crush the feeding pipe 100 during its movement, thereby improving the stability of the optical fiber preform production process and avoiding the problem of production efficiency being affected by damage to the feeding pipe 100.

[0065] The positioning mechanism 600 includes a rotating ring 601 rotatably mounted on the inner shaft 501, a clamping arm 602 mounted on the rotating ring 601, and a protective cover plate 603 connected to the clamping arm 602. Multiple feed pipes 100 can be placed on the bracket 502. Through the positioning mechanism 600, the feed pipes 100 can be positioned on the bracket 502, and the protective cover plate 603 can cover the feed pipes 100 to prevent the outside of the feed pipes 100 from being deposited and causing problems that are difficult to clean.

[0066] Specifically, the bracket 502 includes a channel beam 502a, an end plate 502b installed at the end of the channel beam 502a, and a limiting ring 502c installed on the inner shaft 501; the end plate 502b is fixed to the outside of the inner shaft 501, and the rotating ring 601 is rotatably installed between the end plate 502b and the limiting ring 502c.

[0067] The channel beam 502a has a pipe groove, and the feeding pipe 100 can be placed inside the pipe groove. In order to adapt to different production environments, the number of channel beams 502a can be determined according to the number of feeding pipes 100 that need to be installed. In this embodiment, there are four channel beams 502a and two end plates 502b, which are respectively installed at the ends of the four channel beams 502a. The function of the limiting ring 502c is to limit the rotating ring 601, so that the rotating ring 601 can rotate outside the inner shaft 501 but cannot move. When the rotating ring 601 rotates clockwise, it can drive the clamping arm 602 to move, pressing the feeding pipe 100 against the inside of the channel beam 502a.

[0068] Furthermore, the clamping arm 602 includes a follower 602a mounted on the rotating ring 601, a rotating body 602b connected to the follower 602a, and a contact body 602c mounted on the rotating body 602b.

[0069] When the rotating ring 601 rotates clockwise, it can drive the follower 602a to rotate clockwise, and at the same time drive the rotating body 602b to rotate clockwise, so that the contact body 602c can contact the feeding pipe 100 and press the feeding pipe 100 against the inner side of the pipe groove. In this embodiment, in order to position the four feeding pipes 100 inside the four groove beams 502a, four clamping arms 602 are also used to position the feeding pipes 100 inside the four groove beams 502a respectively.

[0070] Operation process: When the moving mechanism 300 moves, it can drive the base 401 to move synchronously, thereby driving the torch 402 to move synchronously. One end of the connection port 403 is connected to the torch 402, and the raw material is delivered to the torch 402. When the moving mechanism 300 moves, it can drive the torch 402 to move along the optical fiber preform. The support 502 limits and supports the feeding pipe 100, so that the moving mechanism 300 will not rub or crush the feeding pipe 100 during the movement, thereby improving the stability of the optical fiber preform production process and avoiding the problem of production efficiency being affected by damage to the feeding pipe 100.

[0071] Furthermore, in order to drive the anti-slip cover to rotate synchronously when the clamping arm 602 rotates clockwise, the device also includes a connecting mechanism 700; which includes a through rod 701, which is slidably mounted on the protective cover 603; an abutment head 702, which is located at the end of the through rod 701; an elastic element 703, which is sleeved on the outside of the through rod 701 and abuts against the abutment head 702 and the through rod 701; and a connecting shaft 704, which is located at the end of the through rod 701 and connected to the contact body 602c.

[0072] The protective cover 603 is arc-shaped, and the end plate 502b is circular. The inner arc surface of the protective cover 603 fits against the end plate 502b. The pipe groove of the channel beam 502a has a groove 502a-1, which faces away from the center of the end plate 502b. When the feeding pipe 100 is placed inside the pipe groove, the protective cover 603 does not block the groove 502a-1, and the clamping arm 602 and the groove 502a-1 are misaligned. When the feeding pipe 100 is placed... Then, rotate the rotating ring 601 clockwise. The rotating ring 601 drives the clamping arm 602 so that the contact body 602c of the clamping arm 602 reaches the slot 502a-1, pressing the feeding pipe 100 against the inside of the pipe slot. At the same time, it drives the anti-slip cover plate to reach the slot 502a-1 and close the slot 502a-1. While positioning the feeding pipe 100, the protective cover plate 603 can close the slot 502a-1, thereby reducing the serious deposition on the outside of the feeding pipe 100.

[0073] Specifically, the positioning mechanism 600 also includes a locking block 604 located at the end of the bracket 502, and a limiting member 605 mounted on the rotating body 602b.

[0074] When the rotating ring 601 rotates clockwise, it drives the follower 602a to rotate. The follower 602a drives the rotating body 602b to rotate, which in turn drives the contact body 602c to rotate, so that the contact body 602c reaches the slot 502a-1 position. At the same time, the clockwise rotation of the rotating body 602b can drive the limiting member 605 to approach the locking block 604. When the locking block 604 abuts against the limiting member 605, the rotating body 602b can only rotate clockwise and cannot rotate counterclockwise. When the rotating body 602b drives the contact body 602c to rotate clockwise and abut against the feeding pipe 100, the locking block 604 and the limiting member 605 can prevent the rotating body 602b from rotating counterclockwise, so that the rotating body 602b is positioned and the contact body 602c can be stably positioned in the feeding pipe 100.

[0075] Furthermore, the locking block 604 has a biasing surface 604a, and the locking block 604 is provided with a ratchet set 604b on the biasing surface 604a; the limiting member 605 includes an extension 605a fixed to the follower 602a, and a locking tooth 605b installed on the extension 605a.

[0076] The end of the bias surface 604a closest to the corresponding groove beam 502a is biased towards the center of the rotating ring 601, which is the near end 604a-1. The end of the bias surface 604a furthest from the corresponding groove beam 502a is furthest from the center of the rotating ring 601, which is the far end 604a-2. When the rotating body 602b drives the limiting member 605 to rotate clockwise, the locking tooth 605b starts to abut against the locking block 604 from the far end 604a-2. As the rotating body 602b continues to rotate, the limiting member 605 applies pressure to the rotating body 602b in the direction of the center of the rotating ring 601 under the abutment of the bias surface 604a, thereby causing the rotating body 602b to drive the contact body 602c to move in the direction of the center. During this process, the contact body 602c drives the through rod 701 to move in the direction of the center of the rotating ring 601 through the connecting shaft 704, so that the contact head 702 presses the elastic member 703, thereby causing the elastic member 703 to deform.

[0077] At the same time, the contact body 602c moves towards the center of the rotating ring 601, which can bring the feeding pipe 100 against the inside of the pipe groove.

[0078] In this embodiment, the rotating body 602b and the follower body 602a are connected by a groove and a slider. The elastic element 703 can be a spring, preferably a flexible material with elasticity. It has two functions: first, it transmits force to the locking tooth 605b through the contact head 702, the through rod 701, the connecting shaft 704, the contact body 602c, the rotating body 602b, and the extension body 605a, so that the locking tooth 605b can press against the bias surface 604a; second, when the limiting member 605 is not under force, it can push the through rod 701, thereby driving the contact body 602c and the rotating body 602b to reset and remain in place.

[0079] In order to release the positioning of the feed pipe 100, an unlocking mechanism 800 is also included; it includes a collar 801, which is slidably sleeved on the outside of the inner shaft 501; a first spring 802, which is sleeved on the outside of the inner shaft 501; an abutment plate 803, which is fixed on the inner shaft 501; and a mounting arm 804, which is fixed on the collar 801; one end of the first spring 802 abuts against the collar 801, and the other end abuts against the abutment plate 803; and a locking block 604 is mounted on the mounting arm 804.

[0080] The collar 801 is slidably but not rotatably fitted onto the outer side of the inner shaft 501. In its natural state, the first spring 802 pushes the collar 801, causing the collar 801 to abut against the end plate 502b, so that the position of the locking block 604 corresponds to the position of the limiting member 605. At this time, the limiting body rotates counterclockwise, and the locking tooth 605b can contact the locking block 604. When unlocking is required, the collar 801 can be pushed away from the end plate 502b. The collar 801 drives the locking block 604, causing the locking tooth 605b and the locking block 604 to separate, thereby unlocking the rotating body 602b and the contact body 602c.

[0081] In this embodiment, there are four mounting arms 804, and four locking blocks 604 are respectively mounted on the four mounting arms 804. Therefore, when unlocking is performed by moving the collar 801, the four rotating bodies 602b and the contact bodies 602c can be unlocked simultaneously.

[0082] In daily use, when it is necessary to disassemble the feeding pipes 100, it is often not necessary to disassemble all the feeding pipes 100. In order to disassemble the feeding pipes 100 that need to be inspected separately during maintenance, this device also includes an adjustment mechanism 900 mounted on the rotating ring 601 to adjust the follower 602a. The rotating ring 601 has a mounting groove 601a, a side groove 601b on its side wall, and an insertion hole 601c on the rotating ring 601 in the side groove 601b. The adjustment mechanism 900 includes a moving part 901, which is slidably disposed on the inner side of the side groove 601b and connected to the follower 602a; and a pin 902, which is slidably disposed on the moving part 901 and can be inserted into the inner side of the insertion hole 601c.

[0083] The mounting groove 601a allows the follower 602a and the rotating ring 601 to slide together. The end of the follower 602a is mounted inside the mounting groove 601a via a slider and a sliding groove structure. The side groove 601b is designed to mount the moving part 901. By moving the moving part 901, the position of the corresponding follower 602a is adjusted. By adjusting the position of the follower 602a, the rotating part 602b and the limiting part 605 can be moved closer to the center of the rotating ring 601, thereby disengaging the locking teeth 605b and the locking block 604, and allowing the corresponding clamping arm 602 to contact the corresponding feed pipe 100 for positioning. The pin 902 is designed to ensure the stability of the moving part 901. The pin 902 is inserted into the inside of the insertion hole 601c to prevent the moving part 901 from moving on its own, thus ensuring that the clamping arm 602 is stably positioned to position the feed pipe 100.

[0084] Specifically, a force-bearing column 602a-1 is fixed on the follower 602a; a limiting groove 901a is provided on the moving part 901, with the two ends of the limiting groove 901a being the outer end 901a-1 and the inner end 901a-2, respectively, and the inner end 901a-2 being biased towards the center of the rotating ring 601 relative to the outer end 901a-1.

[0085] When the feeding pipe 100 is positioned, the force-bearing column 602a-1 is located inside the outer end 901a-1, making the follower far from the center of the rotating ring 601. At this time, the pin 902 is inserted into the inner side of the socket 601c, which can maintain the position of the moving part 901. When unlocking is required, the pin 902 can be pulled out from the inner side of the socket 601c, allowing the moving part 901 to move. This pushes the moving part 901 to move inside the side groove 601b, so that the position of the force-bearing column 602a-1 and the inner end 901a-1 are aligned. Corresponding to the position, under the push of the limiting groove 901a, the follower moves towards the center of the rotating ring 601 until it can pull the rotating part, so that the rotating part moves a small distance towards the center of the rotating ring 601. During this process, the contact part pulls the through rod 701, so that the abutment head 702 presses the elastic part 703 to produce a small deformation, and finally the locking teeth 605b of the limiting part 605 and the locking block 604 are disengaged. At this time, the clamping arm 602 can rotate and disengage from the feeding pipe 100, and the limiting part 605 can also rotate and disengage from the locking block 604.

[0086] Furthermore, the rotating ring 601 has an arc groove 601d formed on the groove wall of the side groove 601b, and a guide block is installed on the moving part 901; the guide block extends to the inner side of the arc groove 601d.

[0087] The side groove 601b is arc-shaped, and the arc groove 601d is opened along the inner wall of the side groove 601b. The guide block extends to the inner side of the arc groove 601d, and the moving block is also arc-shaped. This allows the moving part 901 to move inside the side groove 601b, but it will not detach from the inner side of the side groove 601b.

[0088] The rest of the structure is the same as in Example 2.

[0089] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape, and proportions of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of the invention. The order or sequence of any process or method steps may be changed or rearranged according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structurally equivalent but also equivalent in structure. Other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments without departing from the scope of the invention. Therefore, the present invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0090] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the invention as currently considered, or those features that are not relevant to implementing the invention) may be omitted.

[0091] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0092] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A multi-lamp OVD deposition method characterized by: include, Set up an enclosed space that can be opened; The mandrel is loaded into an enclosed space; A mobile device is installed inside the enclosed space to mount the portable torch. Raw materials are supplied to the mobile torch via the feeding device (X); The mobile device drives the mobile torch to process the mandrel along the mandrel; The feeding device (X) includes, The feed pipe (100) is used to transport raw materials; The retraction mechanism (200) includes a pipe compartment (201), a tensioning component (202) disposed inside the pipe compartment (201), and a pipe shaft assembly (203) disposed on the tensioning component (202). It also includes, The moving mechanism (300) includes a vehicle body (301) and a drive component (302) disposed on the vehicle body (301). The deposition mechanism (400) includes a base (401) mounted on the vehicle body (301), a blowtorch (402) provided on the base (401), and a connection port (403) provided on the base (401). The pipe support mechanism (500) includes an inner shaft (501) mounted on the base (401) and a bracket (502) mounted on the inner shaft (501). The bracket (502) includes a channel beam (502a), an end plate (502b) installed at the end of the channel beam (502a), and a limiting ring (502c) installed on the inner shaft (501); the end plate (502b) is fixed to the outside of the inner shaft (501), and the swivel ring (601) is rotatably installed between the end plate (502b) and the limiting ring (502c); The positioning mechanism (600) includes a rotating ring (601) rotatably mounted on the inner shaft (501), a clamping arm (602) mounted on the rotating ring (601), and a protective cover plate (603) connected to the clamping arm (602). The channel beam (502a) has a pipe groove, and the feeding pipe (100) can be placed inside the pipe groove. There are four channel beams (502a) and two end plates (502b), which are installed at the ends of the four channel beams (502a). The limiting ring (502c) limits the rotating ring (601), so that the rotating ring (601) can rotate outside the inner shaft (501) but cannot move. When the rotating ring (601) rotates clockwise, it can drive the clamping arm (602) to move, pressing the feeding pipe (100) against the inside of the channel beam (502a).

2. The multi-torch OVD deposition method of claim 1, wherein: The mandrel is rotatable when loaded inside the enclosed space.

3. The multi-torch OVD deposition method of claim 2, wherein: The feeding device (X) supplies the moving torch with gaseous halides as raw materials.

4. The multi-torch OVD deposition method of claim 3, wherein: The pipe compartment (201) has an opening (201a) and a positioning shaft (201b) is installed in the opening (201a).

5. The multi-lamp OVD deposition method of claim 4, wherein: The pipe compartment (201) is provided with several parallel grooves (201c); the tensioning component (202) includes, The parallel shaft group (202a) includes a number of horizontal shafts (202a-1) equal to the number of parallel slots (201c), and several of the horizontal shafts (202a-1) are parallel. A force spring (202b) is arranged outside the horizontal shaft (202a-1); A plurality of moving sleeve blocks (202c) are arranged outside the horizontal shaft (202a-1) and are in contact with the force spring (202b), and the moving sleeve blocks (202c) on the adjacent horizontal shafts (202a-1) are located at the ends away from each other.

6. The multi-lamp OVD deposition method of claim 5, wherein: The moving sleeve block (202c) is provided with a mounting column (202c-1), and the pipe shaft group (203) comprises a plurality of top pressing shafts (203a) corresponding to the moving sleeve blocks (202c), and the top pressing shafts (203a) are fixed to the mounting columns (202c-1).

7. The multi-torch OVD deposition method of claim 6, wherein: The outer side of the feeding pipe (100) is wrapped with a friction sleeve layer (101), and the friction sleeve layer (101) is in contact with the pipe shaft group (203) instead of the feeding pipe (100).

8. The multi-lamp OVD deposition method of claim 7, wherein: Further comprising a connecting mechanism (700), which further comprises A through rod (701) is slidingly arranged on the protective cover plate (603); A contact head (702) is arranged at the end of the through rod (701); An elastic member (703) is sleeved outside the through rod (701) and is in contact with the contact head (702) and the through rod (701); A connecting shaft (704) is arranged at the end of the through rod (701); The clamping arm (602) comprises a follower (602a) arranged on the rotating ring (601), a rotating body (602b) connected with the follower (602a), and a contact body (602c) arranged on the rotating body (602b); The locking block (604) has a biasing surface (604a), and the locking block (604) is provided with a ratchet set (604b) on the biasing surface (604a); the limiting member (605) comprises an extension body (605a) fixed to the follower (602a) and a clamping tooth (605b) arranged on the extension body (605a); The biasing surface (604a) is close to the end of the corresponding channel beam (502a) and is close to the center of the rotating ring (601), which is close to the end (604a-1); the biasing surface (604a) is away from the end of the corresponding channel beam (502a) and is away from the center of the rotating ring (601), which is away from the end (604a-2); when the rotating body (602b) drives the limiting member (605) to rotate clockwise, the clamping tooth (605b) starts to contact the locking block (604) from the away end (604a-2); with the continuous rotation of the rotating body (602b), the limiting member (605) applies pressure to the rotating body (602b) in the direction close to the center of the rotating ring (601) under the contact of the biasing surface (604a), so that the rotating body (602b) drives the contact body (602c) to move in the direction close to the center, and in this process, the contact body (602c) drives the through rod (701) to move in the direction of the center of the rotating ring (601) through the connecting shaft (704), so that the contact head (702) presses the elastic member (703), thereby causing the elastic member (703) to deform.

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