hydrostatic guideway

Abstract

The application discloses a static pressure linear rail, which comprises a guide rail, a sliding block and a throttler. The sliding block is slidably arranged on the guide rail, and a static pressure cavity is arranged between the sliding block and the guide rail. The throttler is arranged on the sliding block. The throttler comprises a main body, a cover plate and a diaphragm. The main body has a first side and a second side. The first side of the main body is provided with a groove. A throttling boss is arranged in the center of the groove. The throttling boss is provided with a first channel. The first channel extends from the first side to the second side. The second side of the main body is provided with a recess. The recess and the guide rail form an oil supply channel. The main body is further provided with an oil supply port, a first throttling channel and a second throttling channel. The cover plate is arranged on the first side of the main body. The diaphragm is arranged between the cover plate and the main body. The application solves the problem that the static pressure linear rail in the prior art cannot automatically adjust the oil film stiffness between the sliding block and the guide rail according to the load on the sliding block.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ultra-precision machining machine tool parts, in particular to a static pressure linear rail. BACKGROUND

[0002] The static pressure linear rail is a high-precision, high-stability linear motion precision equipment core component using liquid static pressure to provide support. The static pressure linear rail includes a slider and a guide rail, the slider is arranged on the guide rail, and an oil cavity exists between the slider and the guide rail. When the oil cavity is supplied with oil, an oil film is formed between the guide rail and the slider through stable oil flow, so that the slider has extremely low friction and wear during sliding, thereby realizing high-precision motion control. Based on the superiority of the liquid static pressure linear rail, it plays an important role in many fields such as precision manufacturing, detection and measurement, large scientific equipment, and provides a reliable motion control solution for various high-precision linear motion equipment.

[0003] However, the existing static pressure linear rail cannot automatically adjust the oil film stiffness between the slider and the guide rail according to the load on the slider. SUMMARY

[0004] The main purpose of the present application is to provide a static pressure linear rail to at least solve the problem that the existing static pressure linear rail cannot automatically adjust the oil film stiffness between the slider and the guide rail according to the load on the slider.

[0005] According to one aspect of the present application, a static pressure linear rail is provided, comprising:

[0006] a guide rail;

[0007] a slider, the slider being slidably arranged on the guide rail, and a static pressure cavity being arranged between the slider and the guide rail;

[0008] a restrictor, the restrictor being arranged on the slider, the restrictor comprising:

[0009] a main body, the main body having a first side and a second side, the first side of the main body being provided with a recess, a restrictor boss being arranged in the center of the recess, a first channel being arranged on the restrictor boss, the first channel extending from the first side to the second side, a recessed portion being arranged on the second side of the main body, the recessed portion and the guide rail surrounding to form an oil supply channel, the main body further being provided with an oil supply port, a first restrictor channel and a second restrictor channel, the oil supply port being in communication with the oil supply channel and the second restrictor channel;

[0010] a cover plate, the cover plate being arranged on the first side of the main body;

[0011] A diaphragm is arranged between the cover plate and the main body, and the diaphragm and the space outside the throttling boss of the groove form a pressure stabilizing cavity, and the diaphragm and the cover plate form an adjusting cavity.

[0012] The two ends of the first throttling channel are respectively communicated with the oil supply channel and the pressure stabilizing cavity, the two ends of the second throttling channel are respectively communicated with the adjusting cavity and the oil supply channel, and the first channel is communicated with the static pressure cavity and the oil supply channel.

[0013] Further, a bearing boss is arranged in the groove, and the height of the bearing boss is the same as the height of the throttling boss.

[0014] Further, an arc-shaped boss is arranged on the cover plate, a spiral groove is arranged on the end face of the arc-shaped boss, the center of the spiral groove is located on the axis of the throttling boss, and the spiral groove is communicated with the second throttling channel.

[0015] Further, a first sealing groove is arranged between the cover plate and the main body, a second sealing groove is arranged between the main body and the slider, and a sealing member is arranged in each of the first sealing groove and the second sealing groove.

[0016] Further, the static pressure cavity is arranged on the side of the guide rail close to the slider; and / or,

[0017] The static pressure cavity is arranged on the side of the slider close to the guide rail.

[0018] Further, limit grooves are arranged on the opposite sides of the guide rail, the limit grooves are recessed along the width direction of the guide rail, limit protrusions are arranged on the slider and are matched with the limit grooves, the side wall surface of the limit groove close to the top surface of the guide rail is a first inclined surface, and the first inclined surface is inclined to the top surface of the guide rail.

[0019] Further, the side wall surface of the limit protrusion close to the limit groove is a second inclined surface, and the side wall surface of the slider close to the top surface of the guide rail is a first surface;

[0020] The static pressure cavity includes an upper static pressure cavity and lower static pressure cavities, the upper static pressure cavity is arranged on the first surface and extends along the length direction of the slider, and the lower static pressure cavities are at least two, and each of the lower static pressure cavities is arranged on the second inclined surface of the limit protrusion and extends along the length direction of the slider.

[0021] Further, the upper static pressure cavities include two, two upper static pressure cavities are arranged on the first surface at intervals, the lower static pressure cavities include two, two lower static pressure cavities are arranged on the second inclined surfaces of the two limiting protrusions respectively;

[0022] The throttles include four, two throttles are arranged on each of the opposite side wall surfaces of the slider respectively, and the two throttles arranged on the same side wall surface are arranged in high and low positions, the two throttles arranged at the higher positions are in one-to-one correspondence with the two upper static pressure cavities, and the two throttles arranged at the lower positions are in one-to-one correspondence with the two lower static pressure cavities.

[0023] Further, a shunt channel is arranged in the slider, the shunt channel is in communication with the oil supply port, an oil inlet is formed in the slider, and the oil inlet is in communication with the shunt channel.

[0024] Further, a plurality of oil inlets are formed, and the plurality of oil inlets are arranged on the side wall surfaces of the slider respectively, and the slider further includes a plurality of oil plugs, the plurality of oil plugs are detachable and are installed in the plurality of oil inlets in one-to-one correspondence.

[0025] Compared with the prior art, the static pressure linear rail can monitor the pressure of the oil through the diaphragm, and automatically adjust the volume change of the static pressure cavity relative to the stable pressure cavity according to the oil pressure, so as to control the flow of the oil entering the static pressure cavity through the throttle, and dynamically adjust the rigidity of the oil film on the static pressure cavity. BRIEF DESCRIPTION OF DRAWINGS

[0026] The drawings described herein are used to provide further understanding of the present application, and form a part of the present application. The schematic embodiments of the present application and the descriptions thereof are used to explain the present application, and do not constitute improper limitations on the present application. In the drawings:

[0027] Figure 1 It is a structural schematic view of the static pressure linear rail disclosed by the present application in a first perspective view;

[0028] Figure 2 It is a perspective view of the static pressure linear rail disclosed by the present application;

[0029] Figure 3 It is a structural schematic view of the throttle disclosed by the present application;

[0030] Figure 4 It is an exploded structural schematic view of the throttle disclosed by the present application;

[0031] Figure 5 It is a structural schematic view of the second side of the main body of the throttle disclosed by the present application;

[0032] Figure 6A structural schematic view of a cover plate of a throttle disclosed in the present application;

[0033] Figure 7 A structural schematic view of a static pressure track disclosed in the present application from a second perspective;

[0034] Figure 8 A sectional view of a static pressure track disclosed in the present application;

[0035] Figure 9 Another sectional view of a static pressure track disclosed in the present application;

[0036] Figure 10 A structural schematic view of a guide rail disclosed in the present application;

[0037] Figure 11 A structural schematic view of a slider disclosed in the present application from a first perspective;

[0038] Figure 12 A structural schematic view of a slider disclosed in the present application from a second perspective.

[0039] Wherein, the above-mentioned drawings include the following reference signs:

[0040] 10, guide rail; 11, limiting groove; 12, top surface; 13, first inclined surface; 20, slider; 21, limiting protrusion; 22, first surface; 23, second inclined surface; 30, static pressure cavity; 31, upper static pressure cavity; 32, lower static pressure cavity; 40, throttle; 41, main body; 42, cover plate; 43, diaphragm; 50, shunt passage; 60, oil inlet; 70, oil plug; 80, sealing element; 411, first side surface; 412, second side surface; 413, oil supply port; 414, first throttling passage; 415, second throttling passage; 421, arc-shaped boss; 422, helical groove; 423, first sealing groove; 4111, groove; 4112, throttling boss; 4113, first passage; 4114, bearing boss; 4121, recessed portion; 4122, second sealing groove. DETAILED DESCRIPTION

[0041] It should be noted that the embodiments and features of the embodiments in the present application can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0042] It should be noted that the terms used herein are only for describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form, unless the context clearly indicates otherwise, and it should also be understood that, when the terms "comprise" and / or "include" are used in the specification, there is a presence of a feature, step, operation, device, component and / or combinations thereof.

[0043] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0044] See Figures 1 to 5 As shown, according to an embodiment of this application, a hydrostatic linear guide is provided, including: a guide rail 10, a slider 20, and a throttle 40.

[0045] The slider 20 is slidably mounted on the guide rail 10, and a static pressure chamber 30 is provided between the slider 20 and the guide rail 10. The throttle 40 is mounted on the slider 20 and includes a main body 41, a cover plate 42, and a diaphragm sheet 43. The main body 41 has a first side 411 and a second side 412. The first side 411 of the main body 41 has a groove 4111, and a throttling boss 4112 is provided in the center of the groove 4111. A first channel 4113 is provided on the throttling boss 4112, which extends from the first side 411 to the second side 412. A recess 4121 is provided on the second side 412 of the main body 41. The recess 4121 and the guide rail 10 form an oil supply channel. The main body 41 also has an oil supply port 413, a first throttling channel 414, and a second throttling channel 415. The oil supply port 413 is connected to the oil supply channel and the second throttling channel 415. A cover plate 42 is placed on the first side 411 of the main body 41. A diaphragm sheet 43 is disposed between the cover plate 42 and the main body 41, and the space between the diaphragm sheet 43 and the groove 4111 located outside the throttling boss 4112 forms a pressure stabilizing cavity, and the space between the diaphragm sheet 43 and the cover plate 42 forms an adjusting cavity. The two ends of the first throttling channel 414 are respectively connected to the oil supply channel and the pressure stabilizing cavity, the two ends of the second throttling channel 415 are respectively connected to the adjusting cavity and the oil supply channel, the first channel 4113 is connected to both the static pressure cavity 30 and the oil supply channel, and the oil supply port 413 is connected to the second throttling channel 415.

[0046] In the embodiment, the stiffness of the oil film in the static pressure cavity 30 can be automatically adjusted by the throttle 40. Specifically, when there is no load on the slider 20, the oil film in the static pressure cavity 30 does not generate pressure on the oil in the oil supply channel. Meanwhile, the external oil circuit supplies oil to the oil supply channel through the oil supply port 413, which is in communication with the second throttle channel 415, so that the oil flows into the adjusting cavity, causing the hydraulic pressure in the adjusting cavity to be higher than that in the stable pressure cavity. Meanwhile, because the hydraulic pressure in the adjusting cavity is higher than that in the stable pressure cavity, the diaphragm 43 is attached to the opening of the first channel 4113 of the throttle boss 4112, so that the oil cannot enter the stable pressure cavity through the first channel 4113. In addition, the oil flows through the oil supply channel to the junction of the oil supply channel and the first channel 4113, and then flows into the static pressure cavity 30. When there is a load on the slider 20, the oil film on the static pressure cavity 30 is subjected to pressure and transmits the pressure to the oil in the oil supply channel, causing the oil in the first throttle channel 414 flowing into the stable pressure cavity to exert a pushing force on the diaphragm 43, so that the diaphragm 43 bends towards the adjusting cavity, the opening on the first channel 4113 is opened, the oil in the stable pressure cavity flows out through the first channel 4113, and flows into the static pressure cavity 30 together with the oil in the oil supply channel, increasing the oil flow, so that the oil film thickness changes little, thereby enhancing the stiffness of the oil film. When the load on the slider 20 changes, the stable pressure cavity and the adjusting cavity monitor the pressure of the oil in the static pressure cavity 30, thereby controlling the oil flow from the first channel 4113 into the static pressure cavity, so as to automatically adjust the stiffness of the oil film.

[0047] Compared with the prior art, the static pressure linear rail of the embodiment can monitor the pressure of the oil by the diaphragm 43, and automatically adjust the change of the relative volume of the stable pressure cavity and the static pressure cavity according to the oil pressure, so as to control the flow of the oil entering the static pressure cavity 30 through the throttle 40, thereby dynamically adjusting the stiffness of the oil film on the static pressure cavity 30.

[0048] In the embodiment, the throttle 40 is provided with a fixing hole, and a fixing member is arranged in the fixing hole to fix the throttle 40 on the slider. Meanwhile, the diaphragm 43 in the embodiment is selected to be a metal diaphragm with good ductility, so as to avoid damage to the diaphragm when the oil pressure is too high.

[0049] Further, the recess 4111 is further provided with a bearing boss 4114, and the height of the bearing boss 4114 is the same as that of the throttle boss 4112. Specifically, the bearing boss 4114 is arranged outside the throttle boss 4112 and is used to support the diaphragm 43, so as to avoid damage to the diaphragm 43 when the hydraulic pressure in the adjusting cavity is too high. The height of the bearing boss 4114 is the same as that of the throttle boss 4112, so that the bearing boss 4114 and the throttle boss 4112 provide more uniform support to the diaphragm 43.

[0050] As shown in the drawings,Figure 6 As shown, the cover plate 42 is provided with an arc-shaped boss 421, and the end face of the arc-shaped boss 421 is provided with a spiral groove 422, the center of the spiral groove 422 is located on the axis of the throttling boss 4112, and the spiral groove 422 is in communication with the second throttling channel 415.

[0051] Specifically, the arc-shaped boss 421 is inserted into the groove 4111 and abuts against the diaphragm 43, and an adjusting cavity is formed between the diaphragm 43 and the spiral groove 422. In this embodiment, the spiral groove 422 is arranged such that the oil liquid in the spiral groove 422 exerts more uniform pressure on the diaphragm 43, avoiding damage to the diaphragm 43 caused by uneven force on different parts of the diaphragm 43, thereby improving the service life of the flow regulator 40 to a certain extent.

[0052] In addition, a first sealing groove 423 is arranged between the cover plate 42 and the main body 41, a second sealing groove 4122 is arranged between the main body 41 and the slider 20, and a sealing member 80 is arranged in each of the first sealing groove 423 and the second sealing groove 4122. Specifically, the cover plate 42 and the main body 41 are sealed by the first sealing groove 423 to prevent the oil liquid in the adjusting cavity from leaking out. Similarly, the main body 41 and the slider 20 are sealed by the second sealing groove 4122 to prevent the oil liquid in the oil supply channel from leaking out. In this embodiment, the sealing member 80 includes a rubber sealing member.

[0053] Further, the static pressure cavity 30 is arranged on the side of the guide rail 10 close to the slider 20; and / or, the static pressure cavity 30 is arranged on the side of the slider 20 close to the guide rail 10.

[0054] It should be noted that “the static pressure cavity 30 is arranged on the side of the guide rail 10 close to the slider 20; and / or, the static pressure cavity 30 is arranged on the side of the slider 20 close to the guide rail 10” means one of the following three cases: the static pressure cavity 30 is arranged on the side of the guide rail 10 close to the slider 20, the static pressure cavity 30 is arranged on the side of the slider 20 close to the guide rail 10, and the static pressure cavity 30 is arranged on the side of the guide rail 10 close to the slider 20 and the static pressure cavity 30 is arranged on the side of the slider 20 close to the guide rail 10. In a specific embodiment, the static pressure cavity 30 is arranged on the side of the slider 20 close to the guide rail 10. Compared with other arrangements, this arrangement has a smaller volume of the static pressure cavity 30, and the static pressure cavity 30 can move with the slider 20, thereby saving manufacturing costs and having strong versatility.

[0055] As shown in FIG. 1, the guide rail 10 is provided with a plurality of static pressure cavities 30 arranged in the width direction of the guide rail 10. Figure 7 As shown in FIG. 1, the guide rail 10 is provided with a plurality of static pressure cavities 30 arranged in the width direction of the guide rail 10. Figure 12 As shown in FIG. 1, the guide rail 10 is provided with a plurality of static pressure cavities 30 arranged in the width direction of the guide rail 10. Figure 10The limiting recess 11 is recessed in the Y direction, and the slider 20 is provided with a limiting protrusion 21 matched with the limiting recess 11. The side wall surface of the limiting recess 11 close to the top surface 12 of the guide rail 10 is a first inclined surface 13, which is inclined to the top surface 12 of the guide rail 10.

[0056] Specifically, the limiting recess 11 and the limiting protrusion 21 are matched with each other, so that when the pressure on the slider 20 is uneven, the limiting recess 11 applies a force in the opposite direction to the limiting protrusion 21, avoiding the slider 20 from deviating to the place with large load. It is worth mentioning that the "first inclined surface 13 is inclined to the top surface 12 of the guide rail 10" means that the projection edge of the first inclined surface 13 of the two limiting recesses 11 in the length direction of the guide rail 10 and the height direction (as shown in the figure) has a certain angle. In the embodiment, the limiting recess 11 includes two setting modes, that is, the width of the limiting recess 11 gradually decreases along the recess direction of the limiting recess 11, or the width of the limiting recess 11 gradually increases along the recess direction of the limiting recess 11. Both of the above two modes can make the limiting recess 11 apply a force in the opposite direction to the load pressure direction to the limiting protrusion 21, so as to keep the slider 20 horizontal. Figure 1

[0057] Further, the side wall surface of the limiting protrusion 21 close to the limiting recess 11 is a second inclined surface 23, and the side wall surface of the slider 20 close to the top surface 12 of the guide rail 10 is a first surface 22. The static pressure cavity 30 includes an upper static pressure cavity 31 and a lower static pressure cavity 32. The upper static pressure cavity 31 is arranged on the first surface 22 and extends in the length direction of the slider 20. The lower static pressure cavity 32 includes at least two, and the at least two lower static pressure cavities 32 are respectively arranged on the second inclined surfaces 23 of the two limiting protrusions 21 and extend in the length direction of the slider 20.

[0058] Specifically, in the embodiment, the upper static pressure cavity 31 provides a preloading force, so that the initial stiffness of the oil film is high, thereby improving the motion accuracy of the static pressure linear rail. Meanwhile, the at least two lower static pressure cavities 32 respectively arranged on the two second inclined surfaces 23 can provide a support force in the opposite direction to the overturning force on the slider 20 when the machining part on the slider 20 generates the overturning force on the slider 20, thereby improving the flatness of the slider 20. Meanwhile, the arrangement of the lower static pressure cavities 32 can avoid the direct contact between the guide rail 10 and the slider 20, thereby improving the service life of the static pressure linear rail. In addition, when the weight of the machining part changes, the support force of the oil film on the slider 20 will also change correspondingly under the automatic adjustment of the restrictor 40.

[0059] ​Further, the upper static pressure cavities 31 are spaced apart on the first surface 22, and the lower static pressure cavities 32 are arranged on the second inclined surfaces 23 of the two limiting protrusions 21. The restrictors 40 are four, two of which are arranged on each of the opposite side walls of the slider 20, and the two restrictors 40 arranged on the same side wall are arranged in high and low positions, and the two restrictors 40 arranged at the higher position are in one-to-one correspondence with the two upper static pressure cavities 31, and the two restrictors 40 arranged at the lower position are in one-to-one correspondence with the two lower static pressure cavities 32.

[0060] Specifically, the two upper static pressure cavities 31 mainly support the slider 20, and the two lower static pressure cavities 32 balance the overturning force. At the same time, the two restrictors 40 arranged on the same side wall are arranged in high and low positions, so as to reduce the distance between the restrictor 40 and the upper static pressure cavity 31 or the lower static pressure cavity 32, and reduce the manufacturing cost. In addition, the two restrictors 40 arranged in high and low positions do not protrude from the upper surface of the slider 20 or the lower surface of the slider 20, so as to avoid interference between the restrictor 40 and the guide rail 10. The two pairs of restrictors 40 arranged on the two side walls of the slider 20 are symmetrically arranged, so that the center of gravity of the integrated structure of the slider 20 and the restrictor 40 is located on the static pressure guide rail 10. At the same time, the four static pressure cavities 30 and the four restrictors 40 are arranged to adjust the stress of the slider 20 at all times, so that the upper surface of the slider 20 always remains horizontal.

[0061] Of course, the upper static pressure cavities 31 can also be spaced apart as three or four, and the second inclined surfaces 23 of the two limiting protrusions 21 can also be spaced apart to arrange multiple lower static pressure cavities 32. The number of restrictors 40 can be arranged corresponding to the number of upper static pressure cavities 31 and lower static pressure cavities 32, so as to ensure the stability of the slider 20 by more static pressure cavities 30 and restrictors 40. As long as it is within the concept of the present application, other deformation modes are within the protection scope of the present application.

[0062] Further, the slider 20 is provided with a shunt channel 50, the shunt channel 50 is in communication with the oil supply port 413, and the slider 20 is provided with an oil inlet 60, the oil inlet 60 is in communication with the shunt channel 50. Specifically, a plurality of channels are arranged in the slider 20 and are in communication with each other, and the shunt channel 50 is formed between the plurality of channels. The oil enters the shunt channel 50 through the oil inlet 60, and then connects with the oil supply port 413 of each restrictor 40 through each channel to supply oil to the restrictor 40.

[0063] In addition, the oil inlet 60 is provided with a plurality of oil inlets 60, and the plurality of oil inlets 60 are arranged on the side walls of the slider 20, and the slider 20 further comprises a plurality of oil plugs 70, and the plurality of oil plugs 70 are detachable and are installed in the plurality of oil inlets 60 in one-to-one correspondence.

[0064] In this embodiment, each side wall surface is provided with an oil inlet 60 to improve the applicability of the hydrostatic rail. Specifically, when the top of the slider 20 is convenient for connecting to an external oil circuit, the remaining oil inlets 60 are plugged with oil plugs 70, or when the side wall surface is convenient for connecting to an external oil circuit, the oil inlets 60 on the remaining surfaces are plugged. Of course, the oil inlets 60 can also be used for oil supply, i.e. the oil supply port 413 of the restrictor 40 can be connected to the oil inlet 60 to make the oil in the shunt passage 50 flow into the restrictor 40.

[0065] In a preferred embodiment, the upper hydrostatic cavity 31 and the lower hydrostatic cavity 32 are both two. The two upper hydrostatic cavities 31 provide support, and the two lower hydrostatic cavities 32 balance the overturning moment. Under the action of the overturning moment, the upper and lower oil film shapes are close to triangles, the oil film support reaction force is opposite to the overturning moment, and the output is automatically adjusted by the restrictor 40, so that the system is balanced, i.e. the load capacity of the hydrostatic cavity 30 can be adjusted through the pressure-flow characteristic matching design of the hydrostatic cavity 30 and the restrictor 40, realizing a closed structure between the hydrostatic rail and the hydrostatic cavity 30, thereby greatly improving the oil film stiffness. At the same time, the restrictor 40 includes four, and two of the four restrictors 40 are arranged on one side wall surface of the slider 20, and the other two restrictors 40 are arranged on the opposite side wall surface of the slider 20, and the two restrictors 40 on the same side wall surface are arranged high and low. The two high restrictors 40 supply oil to the two upper hydrostatic cavities 31 respectively to ensure the stiffness of the oil film. The two low restrictors 40 supply oil to the two lower hydrostatic cavities 32 respectively to keep the rail always horizontal.

[0066] When the hydrostatic rail of the embodiment works, the oil enters the four restrictors 40 through the shunt passage 50, and then flows into the upper hydrostatic cavity 31 and the lower hydrostatic cavity 32 respectively, which lifts the slider 20 and forms an oil film of 0.02mm to 0.03mm in the height direction of the hydrostatic guide rail 10 and the inclination direction of the second inclined surface 23. The existence of the oil film ensures that the frictional resistance of the slider 20 sliding on the guide rail 10 is extremely small, and the friction coefficient is about 0.005, and the anti-vibration performance is excellent. When bearing load, whether the thickness of the oil film changes directly determines the stiffness of the hydrostatic rail, and then affects the precision of the hydrostatic rail. The hydrostatic rail of the embodiment can ensure that the oil film basically does not change due to the self-adaptive compensation characteristics of the restrictor 40. After oiling, the slider 20 can easily slide on the guide rail 10, and cooperate with other power mechanisms to realize the control of the linear reciprocating motion of the hydrostatic rail.

[0067] The static pressure linear rail of the embodiment uses the characteristic that the flow of the throttling device 40 changes with the change of the external load, so that the oil film thickness does not change substantially during the operation, so that the oil film has high rigidity. Compared with the traditional ball linear rail, the static pressure linear rail of the embodiment uses hydraulic oil as the working medium, so that the static pressure linear rail has good shock resistance, and the slider 20 has nearly frictionless movement when sliding on the guide rail 10. There is almost no mechanical contact between the components on the static pressure linear rail, so it has a long service life. At the same time, the oil film has a homogenizing effect, which also indirectly improves the accuracy of the linear rail.

[0068] For the convenience of description, spatial relative terms such as "above", "upper", "top", "top surface", "upper", etc. can be used herein to describe the spatial positional relationship of one device or feature with other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the drawings. For example, if the device in the drawing is inverted, the device described as "above" or "above" other devices or structures will be positioned "below" or "below" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0069] In addition, it should be noted that the use of the words "first", "second", etc. to define parts is only for the convenience of distinguishing the corresponding parts, and the above words have no special meaning unless otherwise stated, and therefore cannot be understood as limiting the scope of protection of the present application.

[0070] The above is only a preferred embodiment of the present application and is not intended to limit the present application. Those skilled in the art can make various modifications and changes to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A hydrostatic track, characterized in that, The utility model relates to a slide rail (10) and a slider (20) slidably arranged on the slide rail (10), wherein a static pressure cavity (30) is arranged between the slide rail (10) and the slider (20), and a throttle (40) is arranged on the slider (20), the throttle (40) comprising a main body (41) having a first side (411) and a second side (412), a recess (4111) is formed on the first side (411) of the main body (41), a throttle boss (4112) is arranged in the center of the recess (4111), a first channel (4113) is arranged on the throttle boss (4112), the first channel (4113) extends from the first side (411) to the second side (412), a recessed part (4121) is arranged on the second side (412) of the main body (41), the recessed part (4121) and the slide rail (10) form an oil supply channel, the main body (41) is further provided with an oil supply port (413), a first throttle channel (414) and a second throttle channel (415), the oil supply port (413) is in communication with the oil supply channel and the second throttle channel (415), a cover plate (42) is arranged on the first side (411) of the main body (41), a diaphragm (43) is arranged between the cover plate (42) and the main body (41), the diaphragm (43) and the space outside the throttle boss (4112) of the recess (4111) form a pressure stabilizing cavity, and the diaphragm (43) and the cover plate (42) form an adjusting cavity, the two ends of the first throttle channel (414) are in communication with the oil supply channel and the pressure stabilizing cavity respectively, the two ends of the second throttle channel (415) are in communication with the adjusting cavity and the oil supply channel respectively, the first channel (4113) is in communication with the static pressure cavity (30) and the oil supply channel. The recess (4111) further comprises a bearing boss (4114) having the same height as the throttle boss (4112). The cover plate (42) comprises an arc boss (421) having a helical groove (422) on the end face, the center of the helical groove (422) is located on the axis of the throttle boss (4112), and the helical groove (422) is in communication with the second throttle channel (415). The cover plate (42) and the main body (41) are provided with a first sealing groove (423), and the main body (41) and the slider (20) are provided with a second sealing groove (4122), and the first sealing groove (423) and the second sealing groove (4122) are provided with a sealing element (80). The static pressure cavity (30) is arranged on the side of the slide rail (10) close to the slider (20), and / or ​ ​ ​ ​ ​ ​ 2. The hydrostatic track of claim 1, wherein, ​ 3. The hydrostatic track of claim 1, wherein, ​ 4. The hydrostatic track of claim 1, wherein, ​ 5. The hydrostatic track of claim 1, wherein, ​ The static pressure cavity (30) is arranged on the side of the sliding block (20) close to the guide rail (10).

6. The hydrostatic track according to any one of claims 1 to 5, characterized in that The opposite sides of the guide rail (10) are provided with limiting grooves (11), the limiting grooves (11) are recessed along the width direction of the guide rail (10), the sliding block (20) is provided with limiting protrusions (21) matched with the limiting grooves (11), and the side wall surface of the limiting groove (11) close to the top surface (12) of the guide rail (10) is a first inclined surface (13) inclined to the top surface (12) of the guide rail (10).

7. The hydrostatic track of claim 6, wherein, The side wall surface of the limiting protrusion (21) close to the limiting groove (11) is a second inclined surface (23), and the side wall surface of the sliding block (20) close to the top surface (12) of the guide rail (10) is a first surface (22). The static pressure cavity (30) comprises an upper static pressure cavity (31) and a lower static pressure cavity (32), the upper static pressure cavity (31) is arranged on the first surface (22) and extends along the length direction of the sliding block (20), and the lower static pressure cavity (32) comprises at least two, and the at least two lower static pressure cavities (32) are arranged on the second inclined surfaces (23) of the two limiting protrusions (21) respectively and extend along the length direction of the sliding block (20).

8. The hydrostatic track of claim 7, wherein, The upper static pressure cavity (31) comprises two, the two upper static pressure cavities (31) are arranged on the first surface (22) at intervals, the lower static pressure cavity (32) comprises two, and the two lower static pressure cavities (32) are arranged on the second inclined surfaces (23) of the two limiting protrusions (21) respectively. The throttles (40) comprise four, two throttles (40) are arranged on each of the opposite side wall surfaces of the sliding block (20), and the two throttles (40) arranged on the same side wall surface are arranged in high and low positions, the two throttles (40) arranged at the higher positions are in one-to-one correspondence with the two upper static pressure cavities (31), and the two throttles (40) arranged at the lower positions are in one-to-one correspondence with the two lower static pressure cavities (32).

9. The hydrostatic track according to any one of claims 1 to 5, characterized in that, The sliding block (20) is provided with a shunt channel (50) therein, the shunt channel (50) is in communication with the oil supply port (413), and the sliding block (20) is provided with an oil inlet (60), and the oil inlet (60) is in communication with the shunt channel (50).

10. The hydrostatic track of claim 9, wherein, The oil inlet (60) is provided with a plurality of oil inlets (60), and the plurality of oil inlets (60) are arranged on the side wall surfaces of the sliding block (20), and the sliding block (20) further comprises a plurality of oil plugs (70), and the plurality of oil plugs (70) are detachable and installed in the plurality of oil inlets (60) in one-to-one correspondence.

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