A curved surface fitting adaptive eddy current detection probe and adjustment method thereof

Abstract

The invention discloses an eddy current detection probe with self-adaptive surface fitting degree and an adjustment method thereof, wherein a pressure sensor is bonded to the eddy current detection probe, an X / Y rotation limit ring is sleeved on the eddy current detection probe, the X / Y rotation limit ring is fixedly connected to one end of a sliding body, the eddy current detection probe is inserted into the cavity of the sliding body, the sliding body is slidingly arranged in a sliding body sleeve, a Z-direction spring-loaded compensation spring is arranged in the sliding body sleeve, a mechanical arm connection back cover is arranged at the bottom end of the sliding body sleeve, the Z-direction spring-loaded compensation spring is arranged between the eddy current detection probe and the mechanical arm connection back cover, and the mechanical arm connection back cover is connected to the mechanical arm; the posture of the eddy current detection probe is adjusted according to feedback information of the pressure sensor, so that the eddy current detection probe can follow the normal line of the surface of a workpiece to be inspected on any curved surface to complete the curved surface detection task, the probe has a small volume, high adaptability to complex curved surface working conditions, high degree of automation, good stability, high degree of freedom, and various types of auxiliary adjustment devices.

Description

Technical Field

[0001] The present invention relates to the technical field of eddy current automated detection, and in particular to an eddy current detection probe with self-adaptive curved surface fit and an adjustment method thereof. Background Art

[0002] At present, all walks of life are moving towards automation, and the field of non-destructive testing is no exception. For eddy current testing, automated testing can reduce the impact of human factors and greatly improve the stability and efficiency of testing. The automated development of eddy current testing is the trend of the times. In automated testing, detection stability is a very important part. For workpieces with complex surfaces, the probe scanning motion trajectory file has been programmed offline. When the robot arm carries the eddy current detection probe, under ideal conditions, the rigid eddy current detection probe end face can perfectly follow the programmed trajectory and always fit the workpiece surface movement (that is, the eddy current detection probe centerline is always perpendicular to the workpiece surface). However, in reality, due to mechanical motion errors, parts and workpiece processing errors, assembly errors and other factors, the eddy current detection probe axis will deviate from the workpiece surface normal, resulting in poor accuracy of the detection results. Therefore, it is extremely important to study methods or ways to improve the stability of eddy current testing.

[0003] The technical solutions proposed in the prior art to improve the stability of eddy current detection still have certain technical defects. For example, the patent application number 202010862938.X for "an interconnected differential weld eddy current detection sensor" discloses: an excitation module, a detection module and an auxiliary detection module; the excitation module generates an eddy current field and is composed of a single excitation coil, and the axis of the excitation coil is perpendicular to the detection surface; the detection module is used to pick up detection information containing defects, and the detection module is composed of two sets of differential detection coils, and the differential detection coil is located inside the excitation coil. However, in this technical solution, the eddy current detector The head profiling tooling can only solve the problem of fitting some surfaces with fixed features; the patent application number is "A weld detection device and detection method" 202110004421.1, the device includes a frame ultrasonic detector, a guide device and an adaptive adjustment device, the ultrasonic detector further includes an instrument body and a creeping wave probe, the creeping wave probe can provide ultrasonic creeping waves for detection; the instrument body receives the signal transmitted by the creeping wave probe and displays the data that can reflect the structure of the weld being tested based on the signal. The device proposed by this technical solution is large in size and is not suitable for the detection of small curved surfaces. Therefore, it is urgent to provide an eddy current detection probe that is adaptive to the fit of the curved surface and can adapt to the detection of any curved surface, so as to improve the effect of eddy current automated detection. Summary of the invention

[0004] The purpose of the present invention is to provide an eddy current detection probe with adaptive surface fit and an adjustment method thereof, which has a simple structure, a small size, and high adaptability to complex surface working conditions; a high degree of automation and good stability; a high degree of freedom and a variety of auxiliary adjustment devices, thereby improving the eddy current automated detection effect.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] A surface-adaptive eddy current detection probe comprises: a pressure sensor, an X / Y-axis rotation limit ring, an eddy current detection probe, a sliding body, a Z-axis spring-loaded compensation spring, a sliding body sleeve, and a mechanical arm connection back cover; the pressure sensor is bonded to the eddy current detection probe, the X / Y-axis rotation limit ring is sleeved on the eddy current detection probe, the X / Y-axis rotation limit ring is fixedly connected to one end of the sliding body, the eddy current detection probe is inserted into the cavity of the sliding body, the sliding body is slidably arranged in the sliding body sleeve, the Z-axis spring-loaded compensation spring is arranged in the sliding body sleeve, the mechanical arm connection back cover is arranged at the bottom end of the sliding body sleeve, the Z-axis spring-loaded compensation spring is arranged between the eddy current detection probe and the mechanical arm connection back cover, and the mechanical arm connection back cover is connected to the mechanical arm.

[0007] Furthermore, two limiting grooves are symmetrically provided on the side wall of the sliding body, and limiting holes are provided at positions of the sliding body sleeve corresponding to the limiting grooves, and limiting pins are inserted into the limiting holes and the limiting grooves in sequence.

[0008] Furthermore, a probe limiting sleeve is arranged in the cavity of the sliding body, and the probe limiting sleeve is arranged at a position corresponding to the two limiting grooves, and the limiting pin passes through the limiting groove and abuts against the probe limiting sleeve; the Z-direction spring-compression compensation spring is arranged between the probe limiting sleeve and the rear cover of the robotic arm connection.

[0009] Furthermore, the robot arm connection back cover includes a base and a threaded body on the base, and the inner side wall of the sliding body sleeve near one end of the robot arm connection back cover is provided with an internal thread adapted to the threaded body, and the threaded body is threadedly connected to the sliding body sleeve.

[0010] Furthermore, a hole is provided at the center of the threaded body, one end of the Z-direction spring pressure compensation spring is arranged in the hole, and the other end of the Z-direction spring pressure compensation spring is arranged in the cavity of the sliding body.

[0011] Furthermore, a double-ear structure is provided at the front end of the sliding body, and the X / Y rotation limit ring includes a ring body, an outer circular pin and an inner circular pin. The two outer circular pins are arranged on the outer circumferential surface of the ring body and inserted into the circular holes of the double-ear structure at the front end of the sliding body. The outer circular pin can rotate to drive the X / Y rotation limit ring and the eddy current detection probe to rotate around the X-axis; the two inner circular pins are arranged on the inner circumferential surface of the ring body and inserted into the shell of the eddy current detection probe. The eddy current detection probe can rotate around the inner circular pins to realize rotation around the Y-axis.

[0012] The present invention also provides a method for adjusting an eddy current detection probe with self-adaptive curved surface fit, which is applied to the above-mentioned eddy current detection probe with self-adaptive curved surface fit, and comprises the following steps:

[0013] The robotic arm carries the eddy current detection probe with adaptive surface fit to scan the workpiece to be inspected;

[0014] The excitation coil in the eddy current detection probe generates an induced eddy current field on the workpiece to be inspected. The induced eddy current field moves with the eddy current detection probe. When a defect is encountered, the induced eddy current field is disturbed. The disturbance is transmitted to the detection coil in the eddy current detection probe through the induced alternating magnetic field. The defect information can be obtained by analyzing the changes in the electrical signal of the detection coil.

[0015] The pressure sensor provides real-time feedback of the force applied to the eddy current detection probe. The controller of the robotic arm adjusts the posture of the eddy current detection probe according to the feedback information until the force applied to the eddy current detection probe reaches the set threshold, so that the eddy current detection probe can follow the normal of the surface of the workpiece to be inspected on any curved surface to complete the curved surface detection task.

[0016] Further, the controller of the mechanical arm adjusts the posture of the eddy current detection probe according to the feedback information, specifically including:

[0017] The controller of the robotic arm determines the difference between the force value detected by the pressure sensor and the set upper limit and the set lower limit according to the feedback information;

[0018] Determine the compensation amount of the coordinate value of the current detection point of the current eddy current detection probe along the normal line of the surface of the workpiece to be detected according to the difference;

[0019] According to the compensation amount of the coordinate value, the X / Y rotation limit ring is adjusted, and the sliding amount of the sliding body in the sliding body sleeve is adjusted, and then the Z-direction spring pressure compensation spring is adjusted to achieve the adjustment of the eddy current detection probe posture.

[0020] According to the specific embodiments provided by the present invention, the present invention discloses the following technical effects: the present invention provides an eddy current detection probe with adaptive surface fit and an adjustment method thereof, a pressure sensor is arranged in front of the eddy current detection probe, which can provide real-time feedback on the stress condition of the eddy current detection probe, a sliding body is slidably arranged in the sliding body sleeve, which can drive the eddy current detection probe to move, and realize Z-direction compensation through the Z-direction elastic compensation spring, and at the same time, an X / Y-direction rotation limit ring is arranged to realize X / Y-direction compensation, and the robotic arm adjusts the posture of the eddy current detection probe according to the feedback information of the pressure sensor until the stress on the eddy current detection probe reaches the set threshold value, so that the eddy current detection probe can follow the normal of the surface of the workpiece to be inspected on any curved surface to complete the curved surface detection task; it can be seen that the probe provided by the present invention has a simple structure and a small volume, and has high adaptability to complex curved surface working conditions; the adjustment method has a high degree of automation and good stability; the probe has a high degree of freedom and various types of auxiliary adjustment devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0022] Figure 1 It is a schematic diagram of the exploded structure of the eddy current detection probe with self-adaptive curved surface fit according to an embodiment of the present invention;

[0023] Figure 2 It is a schematic diagram of the overall structure of an eddy current detection probe with adaptive curved surface fit according to an embodiment of the present invention;

[0024] Figure 3 A schematic diagram of the adjustment principle of an eddy current detection probe with self-adaptive curved surface fit according to an embodiment of the present invention;

[0025] Figure 4 It is a flow chart of a method for adjusting a curved surface fit adaptive eddy current detection probe according to an embodiment of the present invention;

[0026] Figure 5 This is a schematic diagram of the structure of the Z-direction spring under compression according to an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram of the structure of the Z-direction spring under non-compression state according to an embodiment of the present invention;

[0028] Figure 7 Schematic diagram of the installation structure of the X / Y-axis rotation limit ring according to an embodiment of the present invention;

[0029] Figure 8This is a schematic diagram of the eddy current detection probe according to an embodiment of the present invention rotating around the X-axis under the action of the X / Y-axis rotation limit ring;

[0030] Fig. 9 This is a schematic diagram of the eddy current detection probe according to an embodiment of the present invention rotating around the Y axis under the action of the X / Y rotation limit ring;

[0031] Explanation of the accompanying drawings: 1. Pressure sensor; 2. X / Y rotation limit ring; 2-1. Ring body; 2-2. Circular pin outside the ring; 2-3. Circular pin inside the ring; 3. Eddy current detection probe; 4. Limit groove; 5. Sliding body; 6. Probe limit sleeve; 7. Z-direction spring-loaded compensation spring; 8. Limit pin; 9. Sliding body sleeve; 10. Robot arm connected to the back cover. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] The purpose of the present invention is to provide an eddy current detection probe with adaptive surface fit and an adjustment method thereof, which has a simple structure, a small size, and high adaptability to complex surface working conditions; a high degree of automation and good stability; a high degree of freedom and a variety of auxiliary adjustment devices, thereby improving the eddy current automated detection effect.

[0034] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] like Figure 1 and Figure 2As shown, the eddy current detection probe with adaptive surface fit provided by an embodiment of the present invention includes: a pressure sensor 1, an X / Y rotation limit ring 2, an eddy current detection probe 3, a sliding body 5, a Z-direction spring pressure compensation spring 7, a sliding body sleeve 9, and a mechanical arm connection back cover 10; the pressure sensor 1 is bonded to the eddy current detection probe 3, the X / Y rotation limit ring 2 is sleeved on the eddy current detection probe 3, the X / Y rotation limit ring 2 is fixedly connected to one end of the sliding body 5, the eddy current detection probe 3 is inserted into the cavity of the sliding body 5, the sliding body 5 is slidably arranged in the sliding body sleeve 9, the Z-direction spring pressure compensation spring 7 is arranged in the sliding body sleeve 9, the mechanical arm connection back cover 10 is arranged at the bottom end of the sliding body sleeve 9, the Z-direction spring pressure compensation spring 7 is arranged between the eddy current detection probe 3 and the mechanical arm connection back cover 10, and the mechanical arm connection back cover 10 is connected to the mechanical arm. For example, the pressure sensor 1 is a pressure sensing patch, which can be electrically connected to the controller of the robot arm.

[0036] Two limiting grooves 4 are symmetrically provided on the side wall of the sliding body 5 , limiting holes are provided at positions of the sliding body sleeve 9 corresponding to the limiting grooves 4 , and limiting pins 8 are inserted into the limiting holes and the limiting grooves 4 in sequence.

[0037] A probe limiting sleeve 6 is arranged in the cavity of the sliding body 5, and the probe limiting sleeve 6 is arranged at positions corresponding to the two limiting grooves 4. The limiting pin 8 passes through the limiting grooves 4 and abuts against the probe limiting sleeve 6; the Z-direction spring-compression compensation spring 7 is arranged between the probe limiting sleeve 6 and the rear cover 10 connected to the robotic arm.

[0038] The robot arm connection back cover 10 includes a base and a threaded body on the base, and the inner side wall of the sliding body sleeve 9 close to one end of the robot arm connection back cover 10 is provided with an internal thread adapted to the threaded body, and the threaded body is threadedly connected to the sliding body sleeve 9.

[0039] The center of the threaded body is provided with a hole, one end of the Z-direction spring pressure compensation spring 7 is arranged in the hole, and the other end of the Z-direction spring pressure compensation spring 7 is pressed against the limit sleeve 6. The limit sleeve 6 has threaded holes on both sides, and is fixed in the sliding body sleeve 9 by the limit pin 8. Its function is to limit the return pressure stroke of the eddy current detection probe 3 (that is, after the eddy current detection probe 3 is compressed backward for a certain stroke along with the sliding body 5, the rear end of the eddy current detection probe 3 will hit the limit sleeve 6, preventing the rear end cable of the eddy current detection probe 3 from being directly pressed against the connection back cover 10. Figure 5 This is a schematic diagram of the structure of the Z-direction spring under compression. Figure 6 It is a schematic diagram of the structure of the Z-direction spring under non-compression state. At this time, the eddy current detection probe 3 and the Z-direction spring 7 are just in contact.

[0040] For example, Figure 7 As shown, the front end of the sliding body 5 is provided with a double-ear structure, and the X / Y-axis rotation limit ring 2 includes a ring body 2-1, an outer circular pin 2-2 and an inner circular pin 2-3. The two outer circular pins 2-2 are arranged on the outer circumference of the ring body 2-1 and inserted into the circular holes of the double-ear structure at the front end of the sliding body 5. The outer circular pin 2-2 can rotate to drive the X / Y-axis rotation limit ring 2 and the eddy current detection probe 3 to rotate around the X-axis. Figure 8 As shown; the two circular pins 2-3 in the ring are arranged on the inner circumference of the ring body 2-1 and are inserted into the housing of the eddy current detection probe 3. The eddy current detection probe 3 can rotate around the circular pins 2-3 in the ring to realize rotation around the Y axis, such as Fig. 9 shown.

[0041] like Figure 3 and Figure 4 As shown, the present invention also provides a method for adjusting an eddy current detection probe with self-adaptive curved surface fit, which is applied to the above-mentioned eddy current detection probe with self-adaptive curved surface fit, and comprises the following steps:

[0042] The robotic arm carries the eddy current detection probe with adaptive surface fit to scan the workpiece to be inspected;

[0043] The excitation coil in the eddy current detection probe 3 generates an induced eddy current field on the workpiece to be inspected. The induced eddy current field moves with the eddy current detection probe 3. When a defect is encountered, the induced eddy current field is disturbed. The disturbance is transmitted to the detection coil in the eddy current detection probe 3 through the induced alternating magnetic field. The defect information can be obtained by analyzing the changes in the electrical signal of the detection coil.

[0044] The pressure sensor 1 provides real-time feedback of the force applied to the eddy current detection probe 3. The controller of the robotic arm adjusts the posture of the eddy current detection probe 3 according to the feedback information until the force applied to the eddy current detection probe 3 reaches a set threshold, so that the eddy current detection probe 3 can follow the normal of the surface of the workpiece to be inspected on any curved surface to complete the curved surface detection task.

[0045] The controller of the mechanical arm adjusts the posture of the eddy current detection probe 3 according to the feedback information, specifically including:

[0046] The controller of the robot arm determines the difference between the force value detected by the pressure sensor 1 and the set upper limit and the set lower limit according to the feedback information;

[0047] Determine the compensation amount of the coordinate value of the current detection point of the current eddy current detection probe 3 along the normal line of the surface of the workpiece to be detected according to the difference;

[0048] According to the coordinate value compensation amount, the X / Y rotation limit ring 2 is adjusted, and the sliding amount of the sliding body 5 in the sliding body sleeve 9 is adjusted, and then the Z-direction pressure compensation spring 7 is adjusted to achieve the adjustment of the posture of the eddy current detection probe 3.

[0049] For example, the robot arm carries a probe to contact the workpiece to be inspected. The front-end pressure sensing patch of the probe feeds back the posture of the probe to the controller of the robot arm in the form of an electrical signal according to the contact situation of the probe. The controller of the robot arm automatically corrects the posture of the probe according to a predetermined program until the signal of the pressure sensor is less than the adjustment threshold. The robot arm compensation method is: pre-collect the signal value of the pressure sensor when the probe is completely attached to the workpiece and when it is suspended. The sensor signal value when it is completely attached is recorded as: 1, and the pressure sensor signal value when the probe is suspended is recorded as: 0. When the probe detects the workpiece, when the pressure sensor is at 0-1, the robot arm adjusts the probe posture through the built-in repositioning control command. The signal of the pressure sensor changes with the probe posture until it is close to ±5% of 1 and the robot arm stops adjusting the probe. This process is automatically controlled.

[0050] At this time, the normal line of the probe coincides with the detection surface, which is in the best detection state. The robotic arm executes the scanning program to complete the detection task of any surface.

[0051] The remaining technical features in this embodiment can be flexibly selected by those skilled in the art according to actual conditions to meet different specific practical needs. However, it is obvious to those skilled in the art that it is not necessary to adopt these specific details to implement the present invention. In other examples, in order to avoid confusing the present invention, the well-known components, structures or parts are not specifically described, which are all within the technical protection scope defined by the technical solution claimed for protection in the claims of the present invention.

[0052] Modifications and changes made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the scope of protection of the claims attached to the present invention. In the above description, a large number of specific details are set forth in order to provide a thorough understanding of the present invention. However, it is obvious to those of ordinary skill in the art that these specific details are not necessary to practice the present invention. In other examples, in order to avoid confusing the present invention, well-known technologies, such as specific construction details, operating conditions and other technical conditions, are not specifically described.

[0053] The principles and implementation methods of the present invention are described in this article using specific examples. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. An eddy current detection probe with self-adaptive surface fit, characterized in that: include: A pressure sensor (1), an X / Y rotation limit ring (2), an eddy current detection probe (3), a sliding body (5), a Z-direction pressure compensation spring (7), a sliding body sleeve (9), and a mechanical arm connection back cover (10); the pressure sensor (1) is bonded to the eddy current detection probe (3), the X / Y rotation limit ring (2) is sleeved on the eddy current detection probe (3), the X / Y rotation limit ring (2) is fixedly connected to one end of the sliding body (5), and the eddy current detection probe (10) is connected to the sliding body (5). The probe (3) is inserted into the cavity of the sliding body (5), the sliding body (5) is slidably arranged in the sliding body sleeve (9), the Z-direction spring pressure compensation spring (7) is arranged in the sliding body sleeve (9), the bottom end of the sliding body sleeve (9) is arranged with the mechanical arm connection back cover (10), the Z-direction spring pressure compensation spring (7) is arranged between the eddy current detection probe (3) and the mechanical arm connection back cover (10), and the mechanical arm connection back cover (10) is connected to the mechanical arm; Two limiting grooves (4) are symmetrically provided on the side wall of the sliding body (5); limiting holes are provided at positions of the sliding body sleeve (9) corresponding to the limiting grooves (4); and limiting pins (8) are inserted into the limiting holes and the limiting grooves (4) in sequence; A probe limiting sleeve (6) is arranged in the cavity of the sliding body (5), and the probe limiting sleeve (6) is arranged at a position corresponding to the two limiting grooves (4), and the limiting pin (8) passes through the limiting grooves (4) and abuts against the probe limiting sleeve (6); the Z-direction spring pressure compensation spring (7) is arranged between the probe limiting sleeve (6) and the mechanical arm connection back cover (10); The front end of the sliding body (5) is provided with a double-ear structure. The X / Y-direction rotation limit ring (2) comprises a ring body (2-1), an outer circular pin (2-2) and an inner circular pin (2-3). The two outer circular pins (2-2) are arranged on the outer circumference of the ring body (2-1) and inserted into the circular holes of the double-ear structure at the front end of the sliding body (5). The outer circular pin (2-2) can rotate to drive the X / Y-direction rotation limit ring (2) and the eddy current detection probe (3) to rotate around the X-axis. The two inner circular pins (2-3) are arranged on the inner circumference of the ring body (2-1) and inserted into the shell of the eddy current detection probe (3). The eddy current detection probe (3) can rotate around the inner circular pin (2-3) to achieve rotation around the Y-axis.

2. The eddy current detection probe with self-adaptive curve fit according to claim 1, characterized in that: The robot arm connection back cover (10) comprises a base and a threaded body on the base, and the inner side wall of the sliding body sleeve (9) close to one end of the robot arm connection back cover (10) is provided with an internal thread adapted to the threaded body, and the threaded body is threadedly connected to the sliding body sleeve (9).

3. The eddy current detection probe with self-adaptive surface fit according to claim 2, characterized in that: A hole is provided at the center of the threaded body, one end of the Z-direction spring pressure compensation spring (7) is arranged in the hole, and the other end of the Z-direction spring pressure compensation spring (7) is arranged in the cavity of the sliding body (5).

4. A method for adjusting an eddy current detection probe with self-adaptive curved surface fit, applied to the eddy current detection probe with self-adaptive curved surface fit according to any one of claims 1 to 3, characterized in that: The following steps are involved: The robotic arm carries the eddy current detection probe with adaptive surface fit to scan the workpiece to be inspected; The excitation coil in the eddy current detection probe (3) generates an induced eddy current field on the workpiece to be detected. The induced eddy current field moves with the eddy current detection probe (3). When a defect is encountered, the induced eddy current field is disturbed. The disturbance is transmitted to the detection coil in the eddy current detection probe (3) through the induced alternating magnetic field. The defect information can be obtained by analyzing the change of the electrical signal of the detection coil. The pressure sensor (1) provides real-time feedback of the stress condition of the eddy current detection probe (3), and the controller of the robot arm adjusts the posture of the eddy current detection probe (3) according to the feedback information until the stress on the eddy current detection probe (3) reaches a set threshold value, so that the eddy current detection probe (3) can follow the normal line of the surface of the workpiece to be detected on any curved surface to complete the curved surface detection task.

5. The method for adjusting the eddy current detection probe with self-adaptive curved surface fit according to claim 4, characterized in that: The controller of the mechanical arm adjusts the posture of the eddy current detection probe (3) according to the feedback information, specifically comprising: The controller of the mechanical arm determines the difference between the force value detected by the pressure sensor (1) and the set upper limit and the set lower limit according to the feedback information; Determine the compensation amount of the coordinate value of the current detection point of the current eddy current detection probe (3) along the normal line of the surface of the workpiece to be detected according to the difference; According to the coordinate value compensation amount, the X / Y rotation limit ring (2) is adjusted, and the sliding amount of the sliding body (5) in the sliding body sleeve (9) is adjusted, and then the Z-direction pressure compensation spring (7) is adjusted to achieve the adjustment of the posture of the eddy current detection probe (3).

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