A vacuum apparatus and vacuum valve arrangement

Abstract

The application discloses a vacuum equipment and a vacuum valve device, which comprises a valve plate, a rotating shaft and two or more than two balance springs; the valve plate is arranged opposite to a valve port and is connected to the rotating shaft through a connecting arm; the rotating shaft rotates circumferentially to drive the valve plate to close or open the valve port; the connecting arm and the valve plate are rotatably connected through a hinged shaft, and balance springs are arranged on both sides of the rotating direction of the hinged shaft; during the closing process of the valve plate, the two ends of the balance springs are respectively abutted against the connecting arm and the valve plate, so that the upper part and the lower part of the sealing ring simultaneously contact the sealing surface of the valve port. During the closing process of the valve plate, the balance springs can make the upper part and the lower part of the sealing ring simultaneously contact the sealing surface of the valve port, so that local wear of the sealing ring of the valve plate can be avoided, and the vacuum sealing property is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic production equipment, in particular to a vacuum equipment and a vacuum valve device. BACKGROUND

[0002] A solar cell is a kind of photovoltaic semiconductor wafer that directly generates electricity by using sunlight, also known as "solar chip" or "photovoltaic cell". It can output voltage and generate current in a loop as long as it is illuminated by light with a certain illumination condition. In physics, it is called solar photovoltaic (Photovoltaic, abbreviated as PV) and photovoltaic.

[0003] A PVD (Physical Vapor Deposition) device is a device that uses physical vapor deposition technology to deposit various materials in a vacuum environment. PVD devices are mainly used to form a uniform and smooth thin film layer on a substrate. This technology does not rely on chemical reagents, so it will not cause environmental pollution and is a green and environmentally friendly process.

[0004] In the production process of solar cells, PVD equipment is needed to make a thin film layer on the surface of a silicon wafer. As the existing silicon wafer size continues to increase, the size of the single vacuum cavity of the PVD equipment continues to increase, and the size of the corresponding vacuum valve continues to increase. Therefore, the length and width of the sealed valve plate continue to increase. The valve after increasing the size has the problems of difficult installation, debugging and sealing, large deformation of the flange at the valve port of the cavity, and leakage after the valve is sealed. And the existing PVD equipment or other vacuum equipment, the valve exists the problem of gas leakage after a period of use or when the temperature of the cavity changes. In the prior art, when the valve plate of the valve deforms or the sealing surface of the valve port deforms, the valve plate cannot be adjusted to adapt to the deformation, resulting in leakage of the entire valve. When the length of the valve plate increases, the deformation of the valve plate or the valve port leads to the problem of vacuum leakage. Therefore, how to improve the vacuum tightness of the valve of the PVD equipment and other vacuum equipment has become a technical problem that needs to be solved in the field. SUMMARY

[0005] In view of the above problems, the present application provides a vacuum valve device of a vacuum equipment for solving the technical problem that the deformation of the valve plate or the sealing surface of the valve port of the above-mentioned vacuum equipment leads to the leakage of the valve.

[0006] To achieve the above-mentioned purpose, the inventors provide a vacuum valve device of a vacuum equipment for sealing a valve port on a vacuum cavity of the vacuum equipment, the vacuum valve device comprising: a valve plate, a rotating shaft and two or more balance springs.

[0007] The valve plate is arranged opposite to the valve port and is connected to the rotating shaft through a connecting arm, and the rotating shaft rotates to drive the valve plate to cover or open the valve port.

[0008] The connecting arm and the valve plate are rotatably connected through a hinge shaft, and the balance spring is arranged on both sides of the rotating direction of the hinge shaft, and both ends of the balance spring abut against the connecting arm and the valve plate during the process of covering the valve port by the valve plate, and the balance spring offsets the rotating torque of the valve plate caused by gravity, so that the upper and lower parts of the sealing ring simultaneously contact the valve port sealing surface.

[0009] Further, one end of the balance spring is provided with a tension bolt for adjusting the pre-tightening amount of the balance spring.

[0010] Further, the side of the valve plate close to the valve port is provided with a sealing ring for sealing the valve port sealing surface.

[0011] Further, the surface of the valve plate close to the connecting arm is provided with a valve plate connecting seat, and the middle part of the valve plate connecting seat is provided with a connecting part for rotatably connecting with the hinge shaft.

[0012] The valve plate connecting seat is provided with two or more adjusting bolts, and the adjusting bolts are used to adjust the flatness between the valve plate connecting seat and the valve plate, and the flatness is used to compensate the deformation amount of the valve port sealing surface and / or the flatness deformation amount of the valve plate itself.

[0013] Further, the valve plate connecting seat is fixedly connected with the valve plate through a locking bolt, and the locking bolt is coaxially arranged with the adjusting bolt.

[0014] Further, the four corners of the valve plate connecting seat are respectively provided with the adjusting bolts, and each side of the rotating direction of the hinge shaft is provided with one balance spring.

[0015] Further, the rotating shaft is provided with two or more rotating shaft fixing seats along the axis, and the two ends of the rotating shaft are respectively provided with a rotating force arm, and the rotating force arm is connected to a power cylinder, and the power cylinder drives the rotating shaft to rotate through the rotating force arm.

[0016] Further, the vacuum equipment is a PVD equipment, and the valve plate is arranged on the vacuum side or the atmospheric side of the vacuum cavity.

[0017] When the valve plate is arranged on the vacuum side, the valve plate group is fixed by a magnetic fluid for vacuum rotation and vacuum sealing.

[0018] To solve the above technical problems, another technical scheme is also provided in the application.

[0019] A vacuum device comprises a vacuum valve device for covering a valve port on a vacuum cavity of the vacuum device, and the vacuum valve device is the vacuum valve device of any one of the above technical solutions.

[0020] Different from the prior art, the valve plate is rotatably connected with the connecting arm through the hinge shaft, and the balance spring is arranged on both sides of the hinge shaft in the rotation direction, and the two ends of the balance spring are respectively abutted with the connecting arm and the valve plate. During the covering process of the valve plate, the balance spring offsets the rotation torque of the valve plate caused by gravity, so that the upper and lower parts of the sealing ring simultaneously contact the valve port sealing surface, and local wear or deformation of the sealing ring on the valve plate due to local contact and sliding friction is avoided.

[0021] The above invention content is only a summary of the technical solutions of the present application. In order to enable those skilled in the art to more clearly understand the technical solutions of the present application, and then can be implemented according to the content of the description and the drawings, and in order to make the above and other purposes, characteristics and advantages of the present application more easily understood, the following will be described in combination with the specific embodiments of the present application and the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0022] The accompanying drawings are only used to show the principles, implementation manners, applications, characteristics and effects of the specific embodiments and other related contents of the present application, and cannot be considered as limitations of the present application.

[0023] In the drawings of the specification:

[0024] Figure 1 The structure schematic diagram of the vacuum device described in the specific embodiment;

[0025] Figure 2 The schematic diagram of the driving structure of the valve plate described in the specific embodiment;

[0026] Figure 3 The connection structure schematic diagram of the valve plate and the connecting arm described in the specific embodiment;

[0027] Figure 4 The connection relationship schematic diagram of the valve plate and the balance spring described in the specific embodiment;

[0028] Figure 5 The connection relationship sectional view of the valve plate and the balance spring described in the specific embodiment;

[0029] Figure 6 The connection relationship sectional view of the valve plate and the adjusting bolt and the locking bolt described in the specific embodiment;

[0030] Figure 7This is a schematic diagram showing the positional relationship between the valve plate and the vacuum chamber in another specific embodiment;

[0031] The reference numerals used in the above figures are explained as follows:

[0032] 101. Vacuum chamber; 1011. Valve port sealing surface; 201. Power cylinder; 202. Rotating lever arm; 203. Rotating shaft fixing seat;

[0033] 301, Solenoid valve assembly; 401, Valve plate assembly; 4011, Rotary shaft; 4012, Valve plate;

[0034] 4013, Sealing ring;

[0035] 501. Connecting arm;

[0036] 502. Valve plate connecting seat;

[0037] 503. Hinge shaft;

[0038] 504, Adjusting Bolt;

[0039] 505. Locking bolts;

[0040] 506. Lock nut;

[0041] 507. Balance spring;

[0042] 508. Tightening bolts;

[0043] 601. Magnetofluid; Detailed Implementation

[0044] To illustrate the possible application scenarios, technical principles, implementable specific solutions, and achievable objectives and effects of this application in detail, the following description, in conjunction with the listed specific embodiments and accompanying drawings, provides a detailed explanation. The embodiments described herein are merely illustrative of the technical solutions of this application and are therefore intended to limit the scope of protection of this application.

[0045] In this document, the term "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The term "embodiment" appearing in various places throughout the specification does not necessarily refer to the same embodiment, nor does it specifically limit its independence or connection with other embodiments. In principle, in this application, as long as there are no technical contradictions or conflicts, the technical features mentioned in each embodiment can be combined in any way to form corresponding implementable technical solutions.

[0046] Unless otherwise defined, the meanings of technical terms used in the present application are the same as those commonly understood by one of ordinary skill in the art to which the present application belongs; the use of related terms herein is only for the purpose of describing specific embodiments of the present application and is not intended to limit the present application.

[0047] In the description of the present application, the phrase "and / or" is a description of the logical relationship between objects, which means that there can be three relationships, for example, A and / or B, which means that there are three cases: A exists, B exists, and A and B exist at the same time. In addition, the character " / " herein generally represents that the associated objects before and after are a "or" logical relationship.

[0048] In the present application, the terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual quantity, primary and secondary, or order relationship between the entities or operations.

[0049] In the present application, the "includes", "contains", "has" or other similar open-ended expressions used in the sentence are intended to cover non-exclusive inclusion, and these expressions do not exclude the presence of additional elements in the process, method or product including the described elements, so that the process, method or product including a series of elements can not only include those limited elements, but also include other elements not explicitly listed, or also include elements inherent to such process, method or product.

[0050] As the same as the understanding in the "Guidelines for Examination", in the present application, the expressions such as "greater than", "less than", "exceed" are understood as not including the number; the expressions such as "above", "below", "within" are understood as including the number. In addition, in the description of the embodiments of the present application, the meaning of "multiple" is more than two (including two), and similar expressions related to "multiple" are also understood in this way, for example, "multiple groups", "multiple times" and the like, unless otherwise explicitly limited.

[0051] In the description of the embodiments of the present application, the spatial-related expressions used, such as "center", "longitudinal", "transverse", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "vertical", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the specific embodiments or the drawings, and are only for the convenience of describing the specific embodiments of the present application or for the reader to understand, and are not intended to indicate or imply that the indicated device or component must have a specific position, a specific orientation, or be constructed or operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0052] Unless otherwise clearly indicated or implied to the contrary by context, the terms "mount", "couple", "connect", "attach", "engage", "interface" and like terms have broad meanings consistent with their ordinary and customary usage in the art. For example, the terms "couple" or "connect" as used herein can mean the joining of two components by a direct connection, by an indirect connection, by an intervening medium, or by some combination of these. Such connection can be permanent or releasable, and can be mechanical, electrical, or communicative. The terms "mount", "couple", "connect", "attach", "engage", "interface" and like terms as used herein can also mean the joining of two components by an intermediary medium, such as a solder, glue, or like medium. The terms "mount", "couple", "connect", "attach", "engage", "interface" and like terms as used herein also can mean the joining of two components by an intermediary medium that can be permanent or releasable, and can be mechanical, electrical, or communicative.

[0053] In related PVD equipment valve technology, when the valve plate deforms or the valve port sealing surface 1011 deforms, the valve plate cannot be adjusted to adapt to the deformation, resulting in air leakage of the entire valve. Or a non-deformed valve plate needs to be reprocessed or a deformed valve plate needs to be reinstalled. When the valve plate lengthens, the valve plate or the valve port deforms, causing vacuum sealing to leak, or when the vacuum chamber deforms under heating, the valve cannot be adjusted to prevent vacuum sealing from leaking. In the vacuum valve device of the vacuum equipment of the present application, a plurality of balance springs are arranged between the valve plate and the connecting arm to dynamically adjust the posture (i.e., the angle) of the valve plate, so that the valve plate can self-adaptively adjust the deformation amount of the valve plate or the deformation amount of the valve port sealing surface 1011 during the covering process of the valve plate and the valve port sealing surface 1011, ensuring the vacuum sealing of the valve plate and the valve port, and avoiding local wear or deformation caused by local stress on the valve plate, thereby prolonging the service life of the equipment.

[0054] Please refer to Figure 1 The present embodiment provides a vacuum valve device of a vacuum equipment. The vacuum valve device of the vacuum equipment can be applied to a PVD equipment, and can also be applied to other similar vacuum equipment. The vacuum valve device of the vacuum equipment is used to cover the valve port on the vacuum chamber 101 of the vacuum equipment. When the vacuum equipment is a PVD equipment, a device for physical vapor deposition is placed in the vacuum chamber 101, for example, a silicon wafer is placed in the vacuum chamber 101 to make a thin film layer on its surface during the production process of a solar cell.

[0055] As Figure 3 , Figure 4 and Figure 5As shown, the vacuum valve device comprises a valve plate 4012, a rotating shaft 4011 and two or more balance springs 507. The valve plate 4012 is arranged opposite to the valve port and is connected to the rotating shaft 4011 through a connecting arm 501. The rotating shaft 4011 rotates in the circumferential direction to drive the valve plate 4012 to close or open the valve port. In order to reduce the gap between the valve plate 4012 and the valve port sealing surface 1011, a sealing groove is arranged on the side of the valve plate 4012 facing the valve port, and a sealing strip is arranged in the sealing groove.

[0056] The connecting arm 501 is rotatably connected to the valve plate 4012 through a hinge shaft, and the two sides of the hinge shaft in the rotating direction are respectively provided with the balance springs 507. During the closing process of the valve plate 4012 to the valve port, the two ends of the balance spring 507 are respectively abutted against the connecting arm 501 and the valve plate 4012. The balance spring counteracts the rotational moment of the valve plate due to gravity, so that the upper and lower parts of the sealing ring simultaneously contact the valve port sealing surface.

[0057] It should be noted that in the present embodiment, the main purpose of the balance spring 507 is to counteract the rotational moment of the valve plate 4012 under the action of gravity, so as to ensure that the upper and lower parts of the sealing ring on the valve plate 4012 simultaneously contact the valve port sealing surface (i.e. the cavity surface), thereby avoiding local wear of the sealing ring. If the upper and lower balance springs 507 are removed, the valve plate 4012 will rotate around the rotating shaft under the action of its own gravity. When the valve plate is closed, the upper sealing ring of the valve plate 4012 will first contact the sealing surface of the cavity. During the continuous closing process of the valve plate, the sealing ring and the valve port sealing surface have relative sliding friction. After a long time, the sealing ring is easy to be damaged. When the balance spring 507 is provided, the upper and lower sealing rings (i.e. the upper and lower parts of the sealing ring) of the valve plate 4012 simultaneously contact the cavity, thereby prolonging the service life of the sealing ring.

[0058] The two sides of the hinge shaft in the rotating direction are the one side and the other side of the rotating shaft 4011 along the axial direction of the connecting arm 501. The surface of the valve plate 4012 close to the connecting arm 501 is provided with a valve plate connecting seat 502, and the middle part of the valve plate connecting seat 502 is provided with a connecting part for rotationally connecting with the hinge shaft.

[0059] In the present embodiment, the connecting arm 501 is driven to rotate by the circumferential rotation of the rotating shaft 4011, so as to drive the valve plate 4012 to open and close the valve port. Figure 2As shown, the rotating shaft 4011 is provided with a plurality of rotating shaft fixing seats 203 in the axial direction, and the rotating shaft 4011 is rotatably connected with the rotating shaft fixing seat 203. The rotating shaft 4011 is provided with a rotating force arm 202 and a power cylinder 201 at two ends respectively, and the push rod of the power cylinder 201 is hinged with the rotating force arm 202, so that the axial extension and contraction movement of the power cylinder 201 drives the rotating shaft 4011 to rotate circumferentially through the rotating force arm 202.

[0060] In the embodiment, the vacuum valve device further comprises an electromagnetic valve group 301 for controlling the movement of the power cylinder 201. When the control valve plate 4012 is closed, under the control of the electromagnetic valve group 301, the power cylinder 201 drives the rotating shaft 4011 to rotate circumferentially through the hinge structure of the rotating force arm 202, so as to drive the connecting arm 501 and the valve plate group 401 to rotate and approach the valve port. The valve plate group 401 comprises the valve plate 4012, the valve plate connecting seat 502, the balance spring 507, and the fastener between the valve plate and the valve plate connecting seat 502. When the valve plate group 401 moves to just contact the valve port sealing surface 1011 of the vacuum cavity 101, the sealing ring 4013 at this time is in steel contact with the valve port sealing surface 1011, and the valve plate group 401 continues to rotate under the tension of the power cylinder 201, and the sealing ring 4013 is elastically deformed under the action of external force to the valve plate group 401. Because there is a hinge shaft 503, the valve plate is parallel to the valve port sealing surface 1011, the connecting arm 501 and the valve plate have an angle and are not parallel to each other, the balance spring 507 on both sides of the hinge shaft 503 is deformed, the connecting arm 501 and the valve plate connecting seat 502 are connected through the hinge shaft 503, and under the joint action of the hinge group connecting arm 501, the valve plate connecting seat 502 and the hinge shaft 503, the valve plate can always be parallel to the valve port sealing surface 1011, the balance spring 507 balances the gravity of the valve plate, the sealing ring 4013 on the valve plate allows the connecting arm 501 and the valve plate to be parallel to each other before contacting the valve port sealing surface 1011, and at the moment of contact of the sealing ring 4013, each position of the sealing ring 4013 can be in contact with the valve port sealing surface 1011 at the same time. If there is no balance spring 507, the sealing ring 4013 close to the upper side will contact the sealing surface first at the moment of rotation of the valve plate to the valve port sealing surface 1011, thereby causing the wear of this position to increase. With the balance spring 507, each position of the sealing ring 4013 can be in contact with the valve port sealing surface 1011 at the same time, thereby avoiding the wear caused by local contact and sliding friction of the sealing ring.

[0061] As shown in Figure 4 and Figure 5 In the embodiment, the valve port sealing surface 1011 can be on the atmospheric side, that is, the valve plate is located outside the vacuum cavity 101 and is opened to the outside of the vacuum cavity 101. As shown in Figure 7As shown in another embodiment, the valve port sealing surface 1011 can also be used in a vacuum environment, i.e. the valve plate is located in the vacuum chamber 101 and opens to the inside of the vacuum chamber 101. When the valve plate group 401 is used in a vacuum environment, the valve plate group 401 is fixed for vacuum rotation and vacuum sealing. The magnetic fluid 601 is a magnetic material in liquid form, which is a colloidal system formed by dispersing strong magnetic particles with a particle size of about 10 nm in a suitable base fluid by adsorbing surfactant molecules on the surface. According to the different magnetic particles, it can be divided into three types: iron oxygen system, metal system and nitrogen iron system. According to the different base fluid, it can be water-based, oil-based, ether-based and ester-based.

[0062] As shown in another embodiment, the valve port sealing surface 1011 can also be used in a vacuum environment, i.e. the valve plate is located in the vacuum chamber 101 and opens to the inside of the vacuum chamber 101. When the valve plate group 401 is used in a vacuum environment, the valve plate group 401 is fixed for vacuum rotation and vacuum sealing. The magnetic fluid 601 is a magnetic material in liquid form, which is a colloidal system formed by dispersing strong magnetic particles with a particle size of about 10 nm in a suitable base fluid by adsorbing surfactant molecules on the surface. According to the different magnetic particles, it can be divided into three types: iron oxygen system, metal system and nitrogen iron system. According to the different base fluid, it can be water-based, oil-based, ether-based and ester-based. Figure 4 As shown in another embodiment, the valve port sealing surface 1011 can also be used in a vacuum environment, i.e. the valve plate is located in the vacuum chamber 101 and opens to the inside of the vacuum chamber 101. When the valve plate group 401 is used in a vacuum environment, the valve plate group 401 is fixed for vacuum rotation and vacuum sealing. The magnetic fluid 601 is a magnetic material in liquid form, which is a colloidal system formed by dispersing strong magnetic particles with a particle size of about 10 nm in a suitable base fluid by adsorbing surfactant molecules on the surface. According to the different magnetic particles, it can be divided into three types: iron oxygen system, metal system and nitrogen iron system. According to the different base fluid, it can be water-based, oil-based, ether-based and ester-based.

[0063] The valve plate connecting seat 502 is provided with two or more adjusting bolts 504 for adjusting the flatness between the valve plate connecting seat 502 and the valve plate, which is used to compensate for the deformation of the valve port sealing surface and / or the flatness deformation of the valve plate itself. In this embodiment, the adjusting bolt is used to adjust the flatness of the long strip-shaped valve plate. For example, when the flatness of the sealing surface of the chamber does not meet the requirements, the flatness of the valve plate is adjusted to compensate for the deformation of the valve port sealing surface, and the flatness of the valve plate itself can also be adjusted. That is, whether the valve port sealing surface or the flatness of the valve plate itself is deformed, or both.

[0064] When the valve port sealing surface of the vacuum chamber is slightly deformed, the adjusting bolt 504 is tightened at the corresponding deformed position to allow the valve plate and the valve plate connecting seat 502 to have a gap (i.e. adjust the deflection angle between the valve plate connecting seat 502 and the valve plate), so that the initial position of the valve plate is appropriately deformed to compensate for the deformation of the valve port sealing surface. When the valve plate group 401 is closed, the sealing ring 4013 can always be in close contact with the sealing surface. When the valve port sealing surface is deformed, the valve plate group 401 can be adjusted without the need to process the valve port sealing surface again. Or because the vacuum chamber 101 is heated and deformed, or because the valve port sealing surface of the vacuum chamber 101 is lengthened and deformed, or because the valve plate has a long deformation due to its size, all of which can be adjusted and compensated by this mechanism.

[0065] AsFigure 6 As shown, the valve plate connecting seat 502 is fixedly connected with the valve plate through a locking bolt 505 and a locking nut 506, and the locking bolt 505 is coaxially arranged with the adjusting bolt 504 and the locking nut 506. The four corners of the valve plate connecting seat 502 are respectively provided with the adjusting bolt 504, and the two sides of the rotating direction of the hinge shaft are respectively provided with one balance spring 507.

[0066] To solve the above technical problems, the present application also provides another technical scheme:

[0067] A vacuum device, comprising a vacuum valve device for covering a valve port on a vacuum cavity 101 of the vacuum device, wherein the vacuum valve device is the vacuum valve device of the vacuum device according to any one of the above technical schemes.

[0068] Finally, it should be noted that, although the above embodiments have been described in the specification and drawings of the present application, the patent protection scope of the present application should not be limited. Any equivalent structure or equivalent flow replacement or modification based on the essential concept of the present application, using the content described in the specification and drawings of the present application, and directly or indirectly implementing the technical solutions of the above embodiments in other related technical fields, etc., are all included in the patent protection scope of the present application.

Claims

1. A vacuum valve device for a vacuum equipment, used to seal the valve port on the vacuum chamber of the vacuum equipment, characterized in that, The vacuum valve device includes: a valve plate, a rotating shaft, and two or more balance springs; The valve plate is disposed opposite to the valve port and is connected to the rotating shaft via a connecting arm. The rotating shaft rotates circumferentially to drive the valve plate to close or open relative to the valve port. A valve plate connecting seat is provided on the surface of the valve plate near the connecting arm, and a connecting part for rotatably connecting with the hinge shaft is provided in the middle of the valve plate connecting seat. The connecting arm and the valve plate are rotatably hinged through a hinge shaft. Adjusting bolts are respectively provided at the four corners of the valve plate connecting seat. The adjusting bolts are used to adjust the flatness between the valve plate connecting seat and the valve plate. The flatness is used to compensate for the deformation of the valve port sealing surface and / or the flatness deformation of the valve plate itself. The valve plate connecting seat is fixedly connected to the valve plate by a locking bolt, which is coaxial with the adjusting bolt. Balance springs are respectively provided on both sides of the hinge shaft in the direction of rotation, and a tensioning bolt is provided at one end of each balance spring to adjust its pre-tension. A sealing ring for sealing the valve port sealing surface is provided on the side of the valve plate near the valve port. During the process of the valve plate closing the valve port, both ends of the balance spring abut against the connecting arm and the valve plate respectively. The balance spring counteracts the rotational torque generated by the valve plate due to gravity, causing the upper and lower parts of the sealing ring to simultaneously contact the valve port sealing surface.

2. The vacuum valve device of the vacuum equipment according to claim 1, characterized in that, The rotating shaft has two or more rotating shaft fixing seats along its axis, and rotating arms are respectively provided at both ends of the rotating shaft. The rotating arms are connected to a power cylinder, and the power cylinder drives the rotating shaft to rotate through the rotating arms.

3. The vacuum valve device of the vacuum equipment according to claim 2, characterized in that, The vacuum equipment is a PVD equipment, and the valve plate is disposed on the vacuum side or atmospheric side of the vacuum chamber. When the valve plate is positioned on the vacuum side, the valve plate assembly is fixed by a magnetohydrodynamic fluid for vacuum rotation and vacuum sealing.

4. A vacuum device, comprising a vacuum valve assembly, the vacuum valve assembly being used to seal a valve port on the vacuum chamber of the vacuum device, characterized in that, The vacuum valve device is the vacuum valve device of the vacuum equipment as described in any one of claims 1 to 3.

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