Intelligent processing of multi-surface tail wing complex structure parts of chemical mechanical polishing equipment and method

Abstract

The application relates to a kind of intelligent processing multi-surface tail wing complex structure parts' chemical mechanical polishing equipment and method, including intelligent control module and part processing module, the part processing module includes polishing liquid tank, electric valve, polishing pool, polishing liquid hose, curved surface polishing device, inclined surface polishing device and vertical surface polishing device, polishing pool is divided into two working areas, one working area is used to complete the curved surface polishing of tail wing, another working area is used to complete the inclined surface polishing and vertical surface polishing of tail wing, the polishing liquid tank is installed on the polishing pool, the polishing liquid tank bottom is provided with the polishing liquid interface for connecting the polishing liquid hose, and the polishing liquid is supplied to two working areas respectively. The equipment is very convenient to install and remove, and the equipment can be maintained regularly. The equipment is easy to operate, and the degree of automation is high, which reduces the operation difficulty of workers; the application can process parts with surface, inclined surface, curved surface and even base point simultaneously.

Description

Technical Field

[0001] This invention relates to the field of mechanical parts processing technology, and more particularly to a chemical mechanical polishing equipment and method for intelligently processing complex multi-surface tail fin structure parts. Background Technology

[0002] like Figure 12 The high-temperature alloy multi-surface tail fin complex structure parts shown are widely used in aerospace, military and other fields. They are core thermal components of high-end equipment in aviation, aerospace and energy fields. The surface quality of multi-surface tail fin structure parts directly affects the performance and service life of the equipment.

[0003] Conventional polishing equipment struggles to perform multi-surface processing on such tail fin structural parts, and the surface processing quality often fails to meet the requirements of high-end equipment. Therefore, there is an urgent need for equipment that utilizes ultra-precision machining technology to polish multi-surface structural parts of tail fins, thereby meeting the high surface quality requirements of complex aerospace components. Summary of the Invention

[0004] In response to the aforementioned technical problems, a chemical mechanical polishing device and method for intelligently processing complex multi-surface tail fin structure parts are provided.

[0005] The technical means employed in this invention are as follows:

[0006] A chemical mechanical polishing (CMP) device for intelligently processing complex multi-surface tail fin structures includes an intelligent control module and a parts processing module. The parts processing module includes a polishing fluid tank, an electric valve, a polishing pool, a polishing fluid hose, a curved surface polishing device, an inclined surface polishing device, and a vertical surface polishing device. The polishing pool is divided into two working areas: one working area is used to complete the curved surface polishing of the tail fin, and the other working area is used to complete the inclined surface polishing and vertical surface polishing of the tail fin. The polishing fluid tank is installed on the polishing pool, and the bottom of the polishing fluid tank is provided with a polishing fluid interface for connecting the polishing fluid hose, which supplies polishing fluid to the two working areas respectively.

[0007] Furthermore, the intelligent control module includes a main power switch, a processing parameter adjustment knob, and a parameter display screen. The polishing liquid tank has a built-in pressure sensor. The curved surface polishing device, the inclined surface polishing device, and the vertical surface polishing device are all equipped with actuating components. The control panel is a centralized adjustment and processing area for processing parameters. Each processing parameter is controlled by the corresponding processing parameter adjustment knob and displayed on the corresponding display screen.

[0008] Furthermore, the bottom of the polishing liquid tank is mounted on the polishing pool via a support column. The polishing liquid tank is equipped with an electric air pump installation port and a cleaning blockage port. Drainage ports are provided below the two working areas of the polishing pool.

[0009] Furthermore, each polishing pool is equipped with a worktable, with parallel linear guides installed on both sides of the worktable. The worktable is provided with positioning pin holes, and the linear guide fixing device is installed by the positioning pins. The workpiece is installed on the linear guide and its position is determined by the moving frame.

[0010] Furthermore, the curved surface polishing device includes a bending moving module, a first moving frame, a motor coupling housing, a first flexible hose moving nozzle, a curved surface polishing brush, a first coupling, a first high-precision motor, and a first extended cylindrical fixing device. The bending moving module has two moving guide rails, which are respectively set on the inner wall of the polishing pool. The moving guide rails are arranged parallel to the linear guide rails. The first moving frame is installed on the moving guide rails. The first high-precision motor is installed inside the motor coupling housing. The output end of the first high-precision motor is connected to the curved surface polishing brush through the first coupling. The first high-precision motor is installed on the first moving frame through the first extended cylindrical fixing device. A flexible hose moving nozzle installation port is provided above the first moving frame. The first flexible hose moving nozzle can move back and forth to match the contact position between the curved surface polishing brush and the part, ensuring that the polishing liquid can be accurately dripped onto the part processing position.

[0011] Furthermore, the inclined surface polishing device includes a linear moving module, a second moving frame, a second high-precision motor, a second coupling, a movable joint, a second extended cylindrical fixing device, and a second flexible hose moving nozzle. The linear moving module has two moving guide rails, each set on the inner wall of the polishing tank. The moving guide rails are parallel to the linear guide rails. The second moving frame is mounted on the moving guide rails. The second high-precision motor is installed inside the second moving frame. The second high-precision motor is connected to the second extended cylindrical fixing device via the second coupling and to the polishing disc via the movable joint device. The polishing disc can adjust its angle to fit different inclined surfaces using the movable joint device. A flexible hose moving nozzle mounting port is provided above the second moving frame. The second flexible hose moving nozzle can move back and forth to match the contact position between the surface polishing head and the part, ensuring that the polishing liquid can be accurately dripped onto the part processing position.

[0012] Furthermore, the vertical surface polishing device includes a linear moving module, a third moving frame, a third high-precision motor, a third coupling, a third extended cylindrical fixing device, a rotatable housing, gears, a housing, and a third flexible hose moving nozzle. The third moving frame is installed on the moving guide rail of the linear moving module. The third high-precision motor is installed inside the rotatable housing and connected to the rotatable polishing disc via the third coupling. The gears are installed in another housing, and the third extended cylindrical fixing device supports and fixes the housing and is connected to the third moving frame. The first gear rotates in reverse and meshes with the second gear rotates in the forward direction, and the third gear rotates in reverse and meshes with the second gear. The housing has mounting interfaces for the rotatable housing and motors that match the first, second, and third gears. The rotatable housing is installed with the first and third gears. Each gear is driven by a corresponding motor. The motor drives the gears to rotate, and the rotatable housing rotates up, down, left, and right via gear transmission.

[0013] Furthermore, the polishing slurry ejector is connected to the polishing slurry tank via a hose, and the polishing slurry ejector uses an air pump to pressurize and eject the polishing slurry to polish the workpiece's curved surface at the base point.

[0014] The present invention also discloses a polishing method based on the above-mentioned polishing equipment, comprising the following steps:

[0015] S1: After correctly installing the electric valve on the polishing liquid tank, install the polishing liquid tank on the polishing pool, check whether the installation is firm, then inject an appropriate amount of polishing liquid into the polishing liquid tank and check whether the air tightness is good, and connect the air pump to the electric valve.

[0016] S2: Install the machined parts on the linear guide rail fixing equipment, determine the position, fix it with locking bolts, and check whether it is fixed properly;

[0017] S3: Adjust the part surface polishing device to the initial position, and adjust the extension distance of the polishing brush to a position where it makes good contact with the curved surface of the part to be processed. At the same time, adjust the hose moving nozzle to align it with the contact position between the surface polishing brush and the part to be processed. Use the hose to connect the polishing liquid injector and the hose moving nozzle, and check the airtightness and firmness of the connection.

[0018] S4: Adjust the jet ejector device to the initial position and adjust the extension distance of the nozzle to a position where it makes good contact with the base point of the workpiece. Use a hose to connect the jet ejector to the polishing liquid tank and check the airtightness and firmness of the connection.

[0019] S4: Adjust the vertical surface polishing device of the part to the initial position, and adjust the extension distance of the polishing head to a position with good contact with the curved surface of the part to be processed. Ensure that the gear moving device can completely cover the entire vertical surface of the part when it drives the polishing disc to move and rotate. At the same time, adjust the hose moving nozzle to align it with the contact position between the surface polishing brush and the part to be processed. Use a hose to connect the polishing liquid sprayer and the hose moving nozzle, and check the airtightness and firmness of the connection.

[0020] S5: Adjust the bevel polishing device to the initial position and adjust the adjustable joint to make the polishing disc and the bevel of the workpiece at the same angle and in good contact. At the same time, adjust the hose moving nozzle to align it with the contact position between the bevel polishing disc and the workpiece. Use the hose to connect the polishing liquid sprayer and the hose moving nozzle, and check the airtightness and firmness of the connection.

[0021] S6: Turn on the main switch and open the electric valve of the air pump;

[0022] S7: Set the speed of the curved surface motor through the corresponding control knob, set the air pump pressure suitable for curved surface polishing through the air pump pressure regulating valve, and start the bending linear movement module to ensure that the curved surface can be polished well; in order to ensure that each polishing equipment can work perfectly, start S8 after the processing of step S7 is completed.

[0023] S8: Set the air pump pressure to a suitable level for surface polishing by adjusting the air pump pressure valve, so that the jet injector can spray polishing liquid at high speed to achieve the purpose of polishing the base point. After S8 is completed, start step S9.

[0024] S9: Set the vertical surface motor speed through the corresponding control knob, set the air pump pressure suitable for surface polishing through the air pump pressure regulating valve, and start the linear movement module to ensure that the surface can be polished well. After the processing of step S9 is completed, start step S10.

[0025] S10: Set the speed of the inclined plane motor through the corresponding control knob, set the air pump pressure suitable for inclined plane polishing through the air pump pressure regulating valve, and start the linear movement module to ensure that the inclined plane can be polished well.

[0026] S11: After all processing steps are completed, turn off the equipment by turning the knob and clean the polishing liquid tank.

[0027] Compared with the prior art, the present invention has the following advantages: (1) The equipment is easy to install and disassemble, and can be maintained regularly. (2) The equipment is simple to operate and highly automated, reducing the difficulty of operation for workers. (3) The present invention can process parts that simultaneously have surfaces, inclined surfaces, curved surfaces, and even base points. It solves the problem that it is difficult or even impossible to process parts with surfaces, inclined surfaces, curved surfaces, and even base points. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a three-dimensional schematic diagram of a chemical mechanical polishing (CMP) device.

[0030] Figure 2 This is a 3D schematic diagram of the equipment processing module.

[0031] Figure 3 This is a three-dimensional schematic diagram of the mobile frame device.

[0032] Figure 4 This is a cross-sectional view of the mobile frame device.

[0033] Figure 5 This is an internal diagram of the gear transmission of a vertical surface polishing device.

[0034] Figure 6 This is a cross-sectional view of the gear transmission of a vertical surface polishing device.

[0035] Figure 7 This is a three-dimensional schematic diagram of a curved surface polishing device.

[0036] Figure 8 This is a cross-sectional view of the curved surface polishing device.

[0037] Figure 9 This is a diagram of the surface of the polishing brush in a curved surface polishing device.

[0038] Figure 10 This is a cross-sectional view of the linear guide rail device.

[0039] Figure 11 This is a three-dimensional schematic diagram of a linear guide rail device.

[0040] Figure 12 This is a schematic diagram of the structure of the workpiece to be processed.

[0041] In the diagram: 1. Main power switch; 2. Air pump pressure control knob; 3. Curved surface motor control knob; 4. Inclined surface motor control knob; 5. Vertical surface motor control knob; 6. Display screen; 7. Polishing tank; 8. Waste liquid discharge port; 9. Hose; 10. Polishing liquid interface; 11. Air pump electric valve; 12. Polishing liquid tank; 13. Polishing liquid tank support column; 14. Polishing liquid tank cleaning blockage; 15. Foot; 16. Vertical surface polishing device; 17. Hose moving nozzle interface; 18. Linear moving module; 19. Moving module moving guide rail; 20. Extended cylindrical support fixing device; 21. Soft 21. Pipe moving device; 22. Hose interface; 23. Polishing disc; 24. Movable and rotatable adjusting joint; 25. Moving frame; 26. Locking bolt; 27. Motor coupling housing; 28. Curved polishing brush; 29. ​​Linear guide rail; 30. Worktable; 31. Linear guide rail fixing device moving carriage; 32. Bending moving module; 33. Polishing jet; 34. Gear; 35. High-precision motor; 36. Extended cylindrical fixing support device; 37. Housing; 38. Rotatable polishing disc; 39. Coupling; 40. Hose moving frame mounting interface; 41. Polishing brush surface; 42. Positioning fixing pin. Detailed Implementation

[0042] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0043] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0045] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0046] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention. The directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0047] For ease of description, spatial relative terms such as "above," "over," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation besides the orientation of the device as described in the figures. For example, if the device in the figures is inverted, a device described as "above" or "above" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0048] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0049] like Figure 12As shown, existing high-temperature alloy multi-surface tail fin complex structure parts include a base and an upper structure, the upper structure of which requires polishing of curved surfaces, inclined surfaces and straight surfaces.

[0050] Therefore, such as Figures 1-11 As shown in the figure, this invention discloses an intelligent chemical mechanical polishing (CMP) device for processing complex multi-surface tail fin structures. The device includes an intelligent control module and a parts processing module. The parts processing module includes a polishing fluid tank 12, an electric valve 11, a polishing pool 7, a polishing fluid hose 9, a curved surface polishing device, an inclined surface polishing device, and a vertical surface polishing device. The polishing pool is divided into two working areas: one for polishing the curved surface of the tail fin, and the other for polishing the inclined and vertical surfaces. The polishing fluid tank is mounted on the polishing pool. Specifically, the two polishing pools are respectively located on both sides of the device, and the polishing fluid tank is mounted on a fixing device between the two polishing pools. An opening is provided at the top of the polishing fluid tank for adding polishing fluid. A polishing fluid interface 10 is provided at the bottom of the polishing fluid tank for connecting the polishing fluid hose, supplying polishing fluid to the two working areas. The bottom of the polishing pool is provided with feet 15. There are six and three through holes on the left and right sides of the bottom, respectively, for connecting the polishing fluid hose. Two support columns are located at the bottom of the polishing fluid tank. The hoses are used for polishing curved, inclined, and straight surfaces, respectively. Processing waste is disposed of separately in each work area. In this embodiment, all exposed structural connections of the polishing devices are equipped with sealing gaskets or sealing covers.

[0051] The intelligent control module includes a main power switch 1, processing parameter adjustment knobs, and a parameter display screen 6. The polishing liquid tank has a built-in pressure sensor. The curved surface polishing device, the inclined surface polishing device, and the vertical surface polishing device are all equipped with actuators. The control panel is a centralized area for adjusting processing parameters; each processing parameter is controlled by its corresponding adjustment knob and displayed on the corresponding display screen. In this embodiment, the processing parameter adjustment knobs include an air pump pressure control knob 2, a curved surface motor control knob 3, an inclined surface motor control knob 4, and a vertical surface motor control knob 5.

[0052] The polishing fluid tank is mounted on the polishing pool via a support column 13. The polishing fluid tank is equipped with an electric air pump mounting port and a cleaning port 14. Drainage ports 8 are located below both working areas of the polishing pool. Specifically, the linear movement module and the bending movement module are mounted on the inner walls of both sides of the working area using strong adhesive.

[0053] Each polishing tank is equipped with a worktable 30, on both sides of which are parallel linear guide rails 29. Positioning pin holes are provided on the worktable, and positioning pins 42 are used to install the linear guide rail fixing device. The workpiece is mounted on the linear guide rail and its position is determined by a movable bracket. Each movable guide rail has at least two movable carriages 31. After the movable carriage 31 slides to correspond with the base of the workpiece, it is in a suitable position to clamp the part, and the workpiece can be fixed in the appropriate position by locking bolts 26.

[0054] The curved surface polishing device includes a bending moving module 32, a first moving frame, a motor coupling housing, a first flexible hose moving nozzle, a curved surface polishing brush 28, a first coupling, a first high-precision motor, and a first extended cylindrical fixing device. The surface 41 of the curved surface polishing brush is as shown... Figure 9 As shown. The bending moving module has two moving guide rails, each set on the inner wall of the polishing tank. The moving guide rails are parallel to the linear guide rails. A first moving frame is mounted on the moving guide rails. A first high-precision motor is mounted inside the motor coupling housing 27. The output end of the first high-precision motor is connected to the curved surface polishing brush via a first coupling 39. The first high-precision motor is mounted to the first moving frame via a first extended cylindrical fixing device. A flexible hose moving nozzle mounting port 40 is provided above the first moving frame. The first flexible hose moving nozzle can move back and forth to match the contact position between the curved surface polishing brush and the part, ensuring that the polishing liquid can be accurately dripped onto the part processing position. In this embodiment, the movement of the flexible hose moving nozzle is completed manually or automatically.

[0055] In this embodiment, the workpiece to be processed is a standard part. Therefore, the length of each extended cylindrical fixing device is a fixed value, just enough to contact the workpiece. Correspondingly, the positions of each specific polishing tool are also pre-set because the workpiece is a standard part.

[0056] The inclined surface polishing device includes a linear moving module, a second moving frame, a second high-precision motor, a second coupling, a movable joint, a second extended cylindrical fixing device, and a second flexible hose moving nozzle. The linear moving module has two moving guide rails, each set on the inner wall of the polishing tank, parallel to the linear guide rail. The second moving frame is mounted on the moving guide rails. The second high-precision motor is installed inside the second moving frame. The second high-precision motor is connected to the second extended cylindrical fixing device via the second coupling and to the polishing disc via the movable joint device. The polishing disc can adjust its angle to fit different inclined surfaces using the movable joint device. A flexible hose moving nozzle mounting port is located above the second moving frame. The second flexible hose moving nozzle can move back and forth to match the contact position between the surface polishing head and the part, ensuring that the polishing liquid can accurately drip onto the part's processing position.

[0057] The vertical surface polishing device 16 includes a linear moving module 18, a third moving frame 25, a third high-precision motor, a third coupling, a third extended cylindrical fixing device 20, a rotatable housing, gears 34, a housing, and a third flexible hose moving nozzle 17. The third moving frame is mounted on the moving guide rail 19 of the linear moving module. The third high-precision motor is installed inside the rotatable housing and connected to the rotatable polishing disc 38 via the third coupling. The gears are installed in another housing 37, and the third extended cylindrical fixing device supports and fixes the housing and is connected to the third moving frame. The first gear rotates in reverse and meshes with the second gear rotates in the forward direction, and the third gear rotates in reverse and meshes with the second gear. The housing has mounting interfaces for the rotatable housing and motors that match the first, second, and third gears. The rotatable housing is installed with the first and third gears. Each gear is driven by a corresponding motor 35. In other words, in addition to the polishing motor, the vertical surface polishing device also has three rotating motors. The motors drive the gears to rotate, and the rotatable housing rotates up, down, left, and right by gear transmission. The vertical surface polishing device is equipped with a flexible hose moving device 21 for adjusting the alignment of the hose ejection end with the vertical polishing position. The end of the flexible hose moving device is a flexible hose interface 22, and a polishing disc 23 is positioned directly below the interface. The polishing disc polishes the vertical portion of the workpiece. The three sets of gears described above enable the movable and rotatable adjustment joint 24 to achieve vertical surface polishing at different angles. The extended cylindrical fixing device is secured by an extended cylindrical fixing support device 36.

[0058] The polishing fluid ejector 33 is connected to the polishing fluid tank via a hose. The polishing fluid ejector uses an air pump to pressurize the workpiece and eject the polishing fluid to polish the workpiece's curved surface base point.

[0059] The present invention also discloses a polishing method based on the above-mentioned polishing equipment, comprising the following steps:

[0060] S1: After correctly installing the electric valve on the polishing liquid tank, install the polishing liquid tank on the polishing pool, check whether the installation is firm, then inject an appropriate amount of polishing liquid into the polishing liquid tank and check whether the air tightness is good, and connect the air pump to the electric valve.

[0061] S2: Install the machined parts on the linear guide rail fixing equipment, determine the position, fix it with locking bolts, and check whether it is fixed properly;

[0062] S3: Adjust the part surface polishing device to the initial position, and adjust the extension distance of the polishing brush to a position where it makes good contact with the curved surface of the part to be processed. At the same time, adjust the hose moving nozzle to align it with the contact position between the surface polishing brush and the part to be processed. Use the hose to connect the polishing liquid injector and the hose moving nozzle, and check the airtightness and firmness of the connection.

[0063] S4: Adjust the jet ejector device to the initial position and adjust the extension distance of the nozzle to a position where it makes good contact with the base point of the workpiece. Use a hose to connect the jet ejector to the polishing liquid tank and check the airtightness and firmness of the connection.

[0064] S4: Adjust the vertical surface polishing device of the part to the initial position, and adjust the extension distance of the polishing head to a position with good contact with the curved surface of the part to be processed. Ensure that the gear moving device can completely cover the entire vertical surface of the part when it drives the polishing disc to move and rotate. At the same time, adjust the hose moving nozzle to align it with the contact position between the surface polishing brush and the part to be processed. Use a hose to connect the polishing liquid sprayer and the hose moving nozzle, and check the airtightness and firmness of the connection.

[0065] S5: Adjust the bevel polishing device to the initial position and adjust the adjustable joint to make the polishing disc and the bevel of the workpiece at the same angle and in good contact. At the same time, adjust the hose moving nozzle to align it with the contact position between the bevel polishing disc and the workpiece. Use the hose to connect the polishing liquid sprayer and the hose moving nozzle, and check the airtightness and firmness of the connection.

[0066] S6: Turn on the main switch and open the electric valve of the air pump;

[0067] S7: Set the speed of the curved surface motor through the corresponding control knob, set the air pump pressure suitable for curved surface polishing through the air pump pressure regulating valve, and start the bending linear movement module to ensure that the curved surface can be polished well; in order to ensure that each polishing equipment can work perfectly, start S8 after the processing of step S7 is completed.

[0068] S8: Set the air pump pressure to a suitable level for surface polishing by adjusting the air pump pressure valve, so that the jet injector can spray polishing liquid at high speed to achieve the purpose of polishing the base point. After S8 is completed, start step S9.

[0069] S9: Set the vertical surface motor speed through the corresponding control knob, set the air pump pressure suitable for surface polishing through the air pump pressure regulating valve, and start the linear movement module to ensure that the surface can be polished well. After the processing of step S9 is completed, start step S10.

[0070] S10: Set the speed of the inclined plane motor through the corresponding control knob, set the air pump pressure suitable for inclined plane polishing through the air pump pressure regulating valve, and start the linear movement module to ensure that the inclined plane can be polished well.

[0071] S11: After all processing steps are completed, turn off the equipment by turning the knob and clean the polishing liquid tank.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A chemical mechanical polishing device for intelligently processing complex multi-surface tail fin structure parts, characterized in that, It includes an intelligent control module and a parts processing module. The parts processing module includes a polishing fluid tank, an electric valve, a polishing pool, a polishing fluid hose, a curved surface polishing device, an inclined surface polishing device, and a vertical surface polishing device. The polishing pool is divided into two working areas. One working area is used to complete the curved surface polishing of the tail fin, and the other working area is used to complete the inclined surface polishing and vertical surface polishing of the tail fin. The polishing fluid tank is installed on the polishing pool. The bottom of the polishing fluid tank is provided with a polishing fluid interface for connecting the polishing fluid hose, so as to supply polishing fluid to the two working areas respectively. The curved surface polishing device includes a bending moving module, a first moving frame, a motor coupling housing, a first flexible hose moving nozzle, a curved surface polishing brush, a first coupling, a first high-precision motor, and a first extended cylindrical fixing device. The bending moving module has two moving guide rails, which are respectively set on the inner wall of the polishing pool. The moving guide rails are arranged parallel to the linear guide rails. The first moving frame is installed on the moving guide rails. The first high-precision motor is installed inside the motor coupling housing. The output end of the first high-precision motor is connected to the curved surface polishing brush through the first coupling. The first high-precision motor is installed on the first moving frame through the first extended cylindrical fixing device. A flexible hose moving nozzle installation port is provided above the first moving frame. The first flexible hose moving nozzle can move back and forth to match the contact position between the curved surface polishing brush and the part, ensuring that the polishing liquid can be accurately dripped onto the part processing position. The inclined surface polishing device includes a linear moving module, a second moving frame, a second high-precision motor, a second coupling, a movable joint, a second extended cylindrical fixing device, and a second flexible hose moving nozzle. The linear moving module has two moving guide rails, each set on the inner wall of the polishing tank, parallel to the linear guide rails. The second moving frame is mounted on the moving guide rails. The second high-precision motor is installed inside the second moving frame. The second high-precision motor is connected to the second extended cylindrical fixing device via the second coupling and to the polishing disc via the movable joint device. The polishing disc can adjust its angle to fit different inclined surfaces using the movable joint device. A flexible hose moving nozzle mounting port is located above the second moving frame. The second flexible hose moving nozzle can move back and forth to match the contact position between the surface polishing head and the part, ensuring that the polishing liquid can accurately drip onto the part's processing position. The vertical surface polishing device includes a linear moving module, a third moving frame, a third high-precision motor, a third coupling, a third extended cylindrical fixing device, a rotatable housing, gears, a housing, and a third flexible hose moving nozzle. The third moving frame is mounted on the moving guide rail of the linear moving module. The third high-precision motor is installed inside the rotatable housing and connected to the rotatable polishing disc via the third coupling. The gears are mounted in another housing. The third extended cylindrical fixing device supports and fixes the housing and is connected to the third moving frame. The first gear rotates in reverse and meshes with the second gear rotates in the forward direction. The third gear rotates in reverse and meshes with the second gear. The housing has mounting interfaces for the rotatable housing and the motor that match the first, second, and third gears. The rotatable housing is mounted with the first and third gears. Each gear is driven by a corresponding motor. The motor drives the gears to rotate, and the rotatable housing rotates up, down, left, and right via gear transmission.

2. The intelligent chemical mechanical polishing equipment for processing complex multi-surface tail fin structures according to claim 1, characterized in that, The intelligent control module includes a main power switch, a processing parameter adjustment knob, and a parameter display screen. The polishing liquid tank has a built-in pressure sensor. The curved surface polishing device, the inclined surface polishing device, and the vertical surface polishing device are all equipped with motion components. The control panel is a centralized adjustment and processing area for processing parameters. Each processing parameter is controlled by the corresponding processing parameter adjustment knob and displayed on the corresponding display screen.

3. The intelligent chemical mechanical polishing equipment for processing complex multi-surface tail fin structures according to claim 1, characterized in that, The polishing liquid tank is mounted on the polishing pool via a support column at its bottom. The polishing liquid tank is equipped with an electric air pump installation port and a cleaning blockage port. Drainage ports are provided below the two working areas of the polishing pool.

4. The intelligent chemical mechanical polishing equipment for processing complex multi-surface tail fin structures according to claim 1, characterized in that, Each polishing tank is equipped with a worktable, with parallel linear guides installed on both sides of the worktable. The worktable is provided with positioning pin holes, and the linear guide fixing device is installed by the positioning pins. The workpiece is installed on the linear guide and its position is determined by the moving frame.

5. The intelligent chemical mechanical polishing equipment for processing complex multi-surface tail fin structures according to claim 1, characterized in that, The polishing fluid ejector is connected to the polishing fluid tank via a hose. The polishing fluid ejector uses an air pump to pressurize the workpiece and eject the polishing fluid to the base point of the curved surface.

6. A polishing method based on the polishing equipment according to any one of claims 1 to 5, characterized in that, Includes the following steps: S1: After correctly installing the electric valve on the polishing liquid tank, install the polishing liquid tank on the polishing pool, check whether the installation is firm, then inject an appropriate amount of polishing liquid into the polishing liquid tank and check whether the air tightness is good, and connect the air pump to the electric valve. S2: Install the machined parts on the linear guide rail fixing equipment, determine the position, fix it with locking bolts, and check whether it is fixed properly; S3: Adjust the part surface polishing device to the initial position, and adjust the extension distance of the polishing brush to a position where it makes good contact with the curved surface of the part to be processed. At the same time, adjust the hose moving nozzle to align it with the contact position between the surface polishing brush and the part to be processed. Use the hose to connect the polishing liquid injector and the hose moving nozzle, and check the airtightness and firmness of the connection. S4: Adjust the jet ejector device to the initial position and adjust the extension distance of the nozzle to a position where it makes good contact with the base point of the workpiece. Use a hose to connect the jet ejector to the polishing liquid tank and check the airtightness and firmness of the connection. S4: Adjust the vertical surface polishing device of the part to the initial position, and adjust the extension distance of the polishing head to a position with good contact with the curved surface of the part to be processed. Ensure that the gear moving device can completely cover the entire vertical surface of the part when it drives the polishing disc to move and rotate. At the same time, adjust the hose moving nozzle to align it with the contact position between the surface polishing brush and the part to be processed. Use a hose to connect the polishing liquid sprayer and the hose moving nozzle, and check the airtightness and firmness of the connection. S5: Adjust the bevel polishing device to the initial position and adjust the adjustable joint to make the polishing disc and the bevel of the workpiece at the same angle and in good contact. At the same time, adjust the hose moving nozzle to align it with the contact position between the bevel polishing disc and the workpiece. Use the hose to connect the polishing liquid sprayer and the hose moving nozzle, and check the airtightness and firmness of the connection. S6: Turn on the main switch and open the electric valve of the air pump; S7: Set the speed of the curved surface motor through the corresponding control knob, set the air pump pressure suitable for curved surface polishing through the air pump pressure regulating valve, and start the bending linear movement module to ensure that the curved surface can be polished well; in order to ensure that each polishing equipment can work perfectly, start S8 after the processing of step S7 is completed. S8: Set the air pump pressure to a suitable level for surface polishing by adjusting the air pump pressure valve, so that the jet injector can spray polishing liquid at high speed to achieve the purpose of polishing the base point. After S8 is completed, start step S9. S9: Set the vertical surface motor speed through the corresponding control knob, set the air pump pressure suitable for surface polishing through the air pump pressure regulating valve, and start the linear movement module to ensure that the surface can be polished well. After the processing of step S9 is completed, start step S10. S10: Set the speed of the inclined plane motor through the corresponding control knob, set the air pump pressure suitable for inclined plane polishing through the air pump pressure regulating valve, and start the linear movement module to ensure that the inclined plane can be polished well. S11: After all processing steps are completed, turn off the equipment by turning the knob and clean the polishing liquid tank.

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