Silicon carbide substrate cleaning device

Abstract

The present invention relates to the technical field of semiconductor production equipment, and in particular to a silicon carbide substrate cleaning device. A silicon carbide substrate cleaning device comprises a bristle assembly, which is mounted on a base plate and is used to clean the silicon carbide substrate; a blowing assembly, which is used to blow air to the bristles and the silicon carbide substrate; and a driving assembly, which is used to extrude the extrusion portion. The present invention extrudes the extrusion portion by the driving assembly, causing the deformation portion to deform, causing the air outlet portion to blow air to the bristles, thereby causing the bristles to swing rapidly, thereby increasing the brushing frequency of the bristles on the silicon carbide substrate. The bristles quickly clean up debris and residue remaining on the silicon carbide substrate as they move on the surface of the silicon carbide substrate.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production equipment, and in particular to a silicon carbide substrate cleaning device. Background Art

[0002] As one of the most important third-generation semiconductor materials, silicon carbide is widely used in power electronics, radio frequency devices, optoelectronic devices and other fields due to its excellent properties such as large bandgap, high saturated electron mobility, strong breakdown field and high thermal conductivity. Silicon carbide substrates are usually prepared by cutting silicon carbide crystal rods with electroplated diamond wire. However, during the preparation process, some debris and residue may remain on the surface of the silicon carbide substrate that needs to be cleaned.

[0003] Existing silicon carbide substrate cleaning devices, such as Patent No. CN 216968289 U, disclose a brush head device for scrubbing silicon carbide substrates. This utility model utilizes a bristle unit for scrubbing the substrate, a brush head unit for mounting the bristle unit, and a push-button unit disposed on the brush head unit for adjusting the position of the bristle unit to achieve the technical effect of adjusting the bristle area.

[0004] When the device is used to clean the silicon carbide substrate, the effect of cleaning the debris and residue on the surface of the silicon carbide substrate only by using the bristles is not ideal and cannot meet actual needs. Summary of the Invention

[0005] The purpose of the present invention is to solve the above-mentioned shortcomings in the prior art and to propose a silicon carbide substrate cleaning device.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] Design a silicon carbide substrate cleaning device, including

[0008] A bristle assembly mounted on a base plate for cleaning a silicon carbide substrate, wherein the bristle assembly comprises a plurality of bristle sections spaced apart on the base plate, the bristle sections comprising straight rods arranged in an annular array and bristles disposed at ends of the straight rods;

[0009] an air blowing assembly for blowing air toward the bristles and the silicon carbide substrate sheet, wherein the air blowing assembly includes an extrusion portion provided on one side of the straight rod, a deformation portion communicated with the extrusion portion, and an air outlet portion communicated with the deformation portion, wherein after the extrusion portion is squeezed, the deformation portion is deformed, causing the air outlet portion to blow air toward the bristles, thereby causing the bristles to swing rapidly;

[0010] A driving assembly is used for pressing the pressing portion.

[0011] Furthermore, the deformation portion includes a cavity provided in the straight rod and a deformation band provided in the cavity, and the deformation band separates the cavity into an air inlet cavity and an air outlet cavity.

[0012] Furthermore, the extrusion portion includes a pressing airbag and a through hole connecting the pressing airbag and the air inlet cavity.

[0013] Furthermore, the air outlet portion includes a plurality of first channels and second channels spaced apart at the bottom of the straight rod, wherein the first channels and the second channels are respectively connected to the air outlet cavity, and the air outlet directions of the first channels and the second channels are respectively toward the bristles.

[0014] Furthermore, the angle between the air outlet direction of the first channel and the length direction of the bristles is 30°-50°.

[0015] Furthermore, the angle between the air outlet direction of the second channel and the length direction of the bristles is 20°-30°.

[0016] Furthermore, the driving assembly includes a sliding hole opened on the bottom plate corresponding to the bristle part, a force-applying part that slides with the sliding hole to press the extrusion part, and a power part that drives the force-applying part to move up and down.

[0017] Furthermore, the force-applying portion includes a lifting rod, a boss provided at an end portion of the lifting rod, and an inclined pressing surface provided on the boss corresponding to the extrusion portion.

[0018] Furthermore, the power unit includes a top plate for fixing the lifting rod, a spring connecting the top plate and the bottom plate, a magnetic block provided on the top plate, and an electromagnet provided on the bottom plate and cooperating with the magnetic block.

[0019] The present invention provides a silicon carbide substrate cleaning device, which has the following beneficial effects:

[0020] The present invention squeezes the extrusion part through the driving component, causing the deformation part to deform, so that the air outlet part blows air to the bristles, thereby causing the bristles to swing rapidly, thereby increasing the brushing frequency of the bristles on the silicon carbide substrate sheet. In the process of the bristles moving on the surface of the silicon carbide substrate sheet, the debris and residue remaining on the silicon carbide substrate sheet will be quickly cleaned. At the same time, the blowing component can blow air to the silicon carbide substrate sheet, blowing the debris and residue away from the surface of the silicon carbide substrate sheet, avoiding the debris and residue from staying on the silicon carbide substrate sheet, and improving the cleaning effect of the silicon carbide substrate sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic structural diagram of a silicon carbide substrate cleaning device proposed by the present invention;

[0022] Figure 2 Schematic diagram of the bristle assembly;

[0023] Figure 3 A bottom view of the bristle assembly;

[0024] Figure 4 Schematic diagram of the bristle portion;

[0025] Figure 5 Schematic diagram of the air blowing assembly;

[0026] Figure 6 for Figure 5 Enlarged schematic diagram of point A in the middle. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0028] Reference Figure 1-6 , a silicon carbide substrate cleaning device, comprising

[0029] A bristle assembly 1 is mounted on a base plate 2 and is used to clean a silicon carbide substrate. The bristle assembly 1 includes a plurality of bristle sections 101 spaced apart on the base plate 2. The bristle sections 101 include straight rods 10101 arranged in an annular array and bristles 10102 disposed at the ends of the straight rods 10101.

[0030] The air blowing assembly 3 is used to blow air toward the bristles 10102 and the silicon carbide substrate sheet. The air blowing assembly 3 includes an extrusion portion 301 provided on one side of the straight rod 10101, a deformation portion 302 communicating with the extrusion portion 301, and an air outlet portion 303 communicating with the deformation portion 302. After the extrusion portion 301 is squeezed, the deformation portion 302 is deformed, causing the air outlet portion 303 to blow air toward the bristles 10102, thereby causing the bristles 10102 to swing rapidly.

[0031] The driving assembly 4 is used to extrude the extrusion portion 301 .

[0032] The present invention squeezes the extrusion part 301 through the driving component 4, and the deformation part 302 is deformed, so that the air outlet part 303 blows air to the bristles 10102, thereby making the bristles 10102 swing quickly, thereby increasing the brushing frequency of the bristles 10102 on the silicon carbide substrate sheet. The bristles 10102 quickly clean up the debris and residue remaining on the silicon carbide substrate sheet during the movement on the surface of the silicon carbide substrate sheet. At the same time, the blowing component 3 can blow air to the silicon carbide substrate sheet to blow the debris and residue away from the surface of the silicon carbide substrate sheet, thereby preventing the debris and residue from staying on the silicon carbide substrate sheet, and improving the cleaning effect of the silicon carbide substrate sheet.

[0033] In an optional embodiment of the present invention, the deformation part 302 includes a cavity 30201 provided in the straight rod 10101 and a deformation band 30202 provided in the cavity 30201. The deformation band 30202 separates the cavity 30201 into an air inlet cavity 30203 and an air outlet cavity 30204. Preferably, the deformation band 30202 in this embodiment can be implemented by rubber. The upper end of the deformation band 30202 is sealed and fixedly connected to the inner wall of the cavity 30201, and the lower end is recessed from the air inlet cavity 30203 to the air outlet cavity 30204.

[0034] In an optional embodiment of the present invention, the extrusion portion 301 includes a pressing airbag 30101 and a through hole 30102 connecting the pressing airbag 30101 and the air inlet cavity 30203. After the pressing airbag 30101 is squeezed, the air in the pressing airbag 30101 enters the air inlet cavity 30203 through the through hole 30102, causing the deformation belt 30202 to deform into the air outlet cavity 30204, thereby squeezing the air in the air outlet cavity 30204 and quickly discharging the air in the air outlet cavity 30204 to the air outlet portion 303.

[0035] In an optional embodiment of the present invention, the air outlet portion 303 includes a plurality of first channels 30301 and second channels 30302 spaced apart at the bottom of the straight rod 10101, wherein the first channels 30301 and the second channels 30302 are respectively connected to the air outlet cavity 30204, and the air outlet directions of the first channels 30301 and the second channels 30302 are respectively toward the bristles 10102, and the air in the air outlet cavity 30204 is quickly discharged from different directions to the bristles 10102 through the first channels 30301 and the second channels 30302. After being subjected to forces in multiple directions, the bristles 10102 swing rapidly, thereby increasing the brushing frequency of the bristles 10102 on the silicon carbide substrate sheet. The bristles 10102 quickly clean up the debris and residue remaining on the silicon carbide substrate sheet during the movement on the surface of the silicon carbide substrate sheet.

[0036] In an optional embodiment of the present invention, the angle between the air outlet direction of the first channel 30301 and the length direction of the bristles 10102 is 30°-50°, and the angle between the air outlet direction of the second channel 30302 and the length direction of the bristles 10102 is 20°-30°. Preferably, in this embodiment, there are three first channels 30301 and three second channels 30302 respectively, and the lengths of the first channel 30301 and the second channel 30302 can be set to different lengths, so that the air in the air cavity 30204 can be discharged at different times; through such a setting, the first channel 30301 and the second channel 30302 can be directed towards the bristles 10102 at different angles, so that the bristles 10102 can be subjected to forces from multiple different directions, thereby increasing the frequency of swinging.

[0037] In an optional embodiment of the present invention, the driving component 4 includes a sliding hole 401 opened on the base plate 2 corresponding to the bristle part 101, a force-applying part 402 that slides with the sliding hole 401 to press the extrusion part 301, and a power part 403 for driving the force-applying part 402 to move up and down. The power part 403 drives the force-applying part 402 to move in the sliding hole 401, so that the force-applying part 402 presses the extrusion part 301, thereby driving the blowing component 3 to move.

[0038] In an optional embodiment of the present invention, the force-applying portion 402 includes a lifting rod 40201, a boss 40202 provided at the end of the lifting rod 40201, and an inclined pressure surface 40203 corresponding to the extrusion portion 301 provided on the boss 40202. Preferably, a limit plate 40204 can be provided between the straight rods 10101 distributed in the array, and the limit plate 40204 is fixedly connected to the straight rod 10101. During the descending process of the lifting rod 40201, the boss 40202 drives the inclined pressure surface 40203 to squeeze and press the airbag 30101, so that the air in the pressing airbag 30101 quickly enters the air inlet chamber 30203. When the boss 40202 contacts the limit plate 40204, the lifting rod 40201 stops descending.

[0039] In an optional embodiment of the present invention, the power unit 403 includes a top plate 40301 for fixing the lifting rod 40201, a spring 40302 connecting the top plate 40301 and the bottom plate 2, a magnetic block 40303 provided on the top plate 40301, and an electromagnet 40304 provided on the bottom plate 2 and cooperating with the magnetic block 40303. Preferably, the electromagnet 40304 attracts the magnetic block 40303 with opposite polarities after being energized, and a handle can be connected to one side of the bottom plate 2. 40305. A switch 40306 for controlling the power on and off of the electromagnet 40304 can be provided on the handle 40305. By holding the handle 40305 and dragging the base plate 2, the bristles 10102 move on the surface of the silicon carbide substrate. While holding the handle 40305, the switch 40306 can be pressed to control the power on of the electromagnet 40304, so that the electromagnet 40304 and the magnetic block 40303 attract each other with opposite charges, driving the lifting rod 40201 to move.

[0040] The above are only preferred specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with this technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solutions and inventive concepts of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A silicon carbide substrate cleaning device, characterized in that: include A bristle assembly (1) is mounted on a base plate (2) and is used for cleaning a silicon carbide substrate sheet, wherein the bristle assembly (1) comprises a plurality of groups of bristle portions (101) spaced apart on the base plate (2), the bristle portions (101) comprising straight rods (10101) distributed in an annular array and bristles (10102) arranged at the ends of the straight rods (10101); An air blowing assembly (3) for blowing air onto the bristles (10102) and the silicon carbide substrate sheet, wherein the air blowing assembly (3) comprises an extrusion portion (301) provided on one side of the straight rod (10101), a deformation portion (302) communicating with the extrusion portion (301), and an air outlet portion (303) communicating with the deformation portion (302); after the extrusion portion (301) is extruded, the deformation portion (302) is deformed, causing the air outlet portion (303) to blow air onto the bristles (10102), thereby causing the bristles (10102) to swing rapidly; A driving assembly (4) for extruding the extrusion portion (301); The deformation portion (302) comprises a cavity (30201) provided in the straight rod (10101) and a deformation band (30202) provided in the cavity (30201), wherein the deformation band (30202) separates the cavity (30201) into an air inlet cavity (30203) and an air outlet cavity (30204); The air outlet portion (303) comprises a plurality of first channels (30301) and second channels (30302) spaced apart and arranged at the bottom of the straight rod (10101), wherein the first channels (30301) and the second channels (30302) are respectively connected to the air outlet cavity (30204), and the air outlet directions of the first channels (30301) and the second channels (30302) are respectively directed toward the bristles (10102); The angle between the air outlet direction of the first channel (30301) and the length direction of the bristles (10102) is 30°-50°; The angle between the air outlet direction of the second channel (30302) and the length direction of the bristles (10102) is 20°-30°.

2. The silicon carbide substrate cleaning device according to claim 1, characterized in that: The extrusion portion (301) comprises a pressing airbag (30101) and a through hole (30102) connecting the pressing airbag (30101) and the air inlet cavity (30203).

3. The silicon carbide substrate cleaning device according to claim 1, characterized in that: The driving assembly (4) comprises a sliding hole (401) provided on the bottom plate (2) corresponding to the bristle portion (101), a force-applying portion (402) that slides in cooperation with the sliding hole (401) and is used to press the extrusion portion (301), and a power portion (403) that is used to drive the force-applying portion (402) to move upward and downward.

4. The silicon carbide substrate cleaning device according to claim 3, characterized in that: The force-applying portion (402) comprises a lifting rod (40201), a boss (40202) provided at the end of the lifting rod (40201), and an inclined pressing surface (40203) provided on the boss (40202) corresponding to the extrusion portion (301).

5. The silicon carbide substrate cleaning device according to claim 4, characterized in that: The power unit (403) includes a top plate (40301) for fixing the lifting rod (40201), a spring (40302) connecting the top plate (40301) and the bottom plate (2), a magnetic block (40303) provided on the top plate (40301), and an electromagnet (40304) provided on the bottom plate (2) and cooperating with the magnetic block (40303).

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