A convex grating mechanical scribing system and method based on a quadrature rotating shaft system

Abstract

The present application relates to mechanical grating ruling technical field, specifically to a convex grating mechanical ruling system and method based on orthogonal rotary shaft system, the ruling system includes ruling track planning mechanism and ruling motion execution mechanism, the ruling track planning mechanism includes index motion mechanism, ruling motion mechanism and ruling bearing table, the ruling motion mechanism and the index motion mechanism jointly constitute the orthogonal rotary shaft system, the ruling bearing table is equipped with correction adjusting mechanism, the grating base is located on the correction adjusting mechanism, the ruling motion execution mechanism includes tool holder bearing table and tool setting displacement table, when ruling, the ruling tool performs one-way extrusion ruling on the grating base. The ruling method comprises: S1, the preparation work of installation and adjustment before grating base ruling; S2, mechanical ruling is carried out on the grating base. The present application can realize the mechanical ruling of convex grating with large aperture, small blaze angle and high groove shape precision.

Description

Technical Field

[0001] This invention relates to the field of mechanical grating scribing technology, specifically providing a convex grating mechanical scribing system and method based on an orthogonal rotation axis system. Background Technology

[0002] A convex grating is a spectroscopic component with periodic micro-grooves, widely used in imaging spectrometers with Offner spectroscopic structures and other types of spectroscopic instruments to achieve high imaging quality and compact size. It plays a crucial role in applications such as deep space exploration and optical remote sensing. As a core component of spectrometers, the aperture and groove quality of the convex grating directly constrain the further development of imaging spectrometers and other spectroscopic instruments. For example, in the ultraviolet spectral range, a small blaze angle is required to achieve high diffraction efficiency in the ultraviolet band, while extremely high surface quality is needed across the entire spectral range to reduce stray light and improve the instrument's signal-to-noise ratio.

[0003] Existing methods for fabricating convex gratings mostly employ optical techniques such as single-point diamond turning, electron beam direct writing, and holographic ion beam etching. While each method has its advantages, they suffer from technical challenges such as high surface roughness, limited grating blaze angle fabrication, and poor control over the groove apex angle. These limitations prevent the fabrication of convex blaze gratings that simultaneously meet the requirements of large aperture, arbitrary blaze angle, and high diffraction efficiency. Therefore, designing a mechanical scribing method for fabricating convex blaze gratings with large aperture, arbitrary blaze angle, and high groove shape accuracy to promote the development of high-end imaging spectrometers is an urgent problem to be solved. Summary of the Invention

[0004] To address the aforementioned problems, this invention provides a mechanical scribing system and method for convex gratings based on an orthogonal rotation axis system. Compared with existing convex grating fabrication methods, this invention can prepare convex blazed gratings that simultaneously possess large aperture, small blaze angle, and high diffraction efficiency. Furthermore, the prepared convex gratings have regular groove morphology, no zero-order surface, and low surface roughness.

[0005] The present invention provides a convex grating mechanical scribing system based on an orthogonal rotary axis system, comprising a scribing trajectory planning mechanism and a scribing motion execution mechanism;

[0006] The engraving trajectory planning mechanism includes an indexing motion mechanism, an engraving motion mechanism, and an engraving support platform. The engraving motion mechanism is connected to the indexing motion mechanism, and the axis of the engraving motion mechanism is perpendicular to the axis of the indexing motion mechanism. The engraving motion mechanism and the indexing motion mechanism together form an orthogonal rotary axis system. The engraving support platform is connected to the engraving motion mechanism. A correction and adjustment mechanism is provided on the engraving support platform, and the grating substrate is placed on the correction and adjustment mechanism. The grating substrate is driven by the indexing motion mechanism to move along the grating period direction and by the engraving motion mechanism to move along the grating engraving line direction.

[0007] The scribing motion actuator includes a tool holder support platform and a tool setting displacement platform that slides on the tool holder support platform. The tool setting displacement platform is equipped with a tool holder support mechanism for supporting the scribing tool and a tool lifting and lowering drive mechanism for driving the tool holder support mechanism to extend and retract to realize the lifting and lowering action of the scribing tool. During scribing, the scribing tool performs unidirectional extrusion scribing on the grating substrate.

[0008] The tool holder support mechanism is equipped with a ball center coincidence error compensation component, and an indexing error compensation component is provided between the tool holder support mechanism and the tool setting displacement table.

[0009] Furthermore, the tool holder support mechanism includes a clamping seat located on the tool setting displacement stage, a fixed support seat connected within the clamping seat, and a movable support seat hinged to the fixed support seat. The movable support seat is located between the grating substrate and the tool lifting and lowering drive mechanism, and the scribing tool is connected to the movable support seat. The tool lifting and lowering drive mechanism can drive the movable support seat to swing to achieve the lifting and lowering of the scribing tool. The sphere center coincidence error compensation component is located between the movable support seat and the fixed support seat, and the indexing error compensation component is located between the clamping seat and the tool setting displacement stage.

[0010] Furthermore, the tool lifting and lowering drive mechanism includes a tool lifting and lowering drive component and a guide seat. The guide seat is located between the tool setting displacement stage and the indexing error compensation component. The power output end of the tool lifting and lowering drive component is connected to a tool lifting and lowering hook, which passes through the guide seat and extends between the guide seat and the grating substrate. The tool lifting and lowering hook includes a hook head located between the guide seat and the grating substrate. The hook head hooks or releases the movable support seat to realize the lifting and lowering action of the engraving tool.

[0011] Furthermore, the indexing error compensation component is a piezoelectric ceramic.

[0012] Furthermore, the calibration and adjustment mechanism is located close to the grating substrate and is a three-dimensional adjustment structure, including a radius direction adjustment body, a scale direction adjustment body, and a graduation direction adjustment body.

[0013] Furthermore, the indexing motion mechanism includes an indexing rotary table located on the side of the tool holder support table and an indexing system support table located at the upper end of the indexing rotary table; the scribing motion mechanism includes a scribing system support table located at the upper end of one side of the indexing system support table and a scribing rotary table connected to the scribing system support table and located above the indexing system support table; the scribing support table is connected to the scribing rotary table and is perpendicular to the indexing system support table as a whole.

[0014] A mechanical scribing method for convex gratings based on an orthogonal rotation axis system, comprising the following steps:

[0015] S1. Perform assembly and adjustment preparation work before grating substrate scribing;

[0016] S11. Install the indexing motion mechanism, the engraving motion mechanism, the engraving support table, and the correction and adjustment mechanism to form an orthogonal rotary shaft system;

[0017] S12. Measure and adjust the grating substrate to make the center of the grating substrate coincide with the center of the orthogonal rotation axis system.

[0018] S13. Install the scribing tool according to the groove shape parameters of the grating substrate, and move the scribing tool toward the grating substrate so that the scribing tool contacts the metal film layer deposited on the surface of the grating substrate.

[0019] S2. Perform mechanical scribing on the grating substrate;

[0020] S21. Drive the lifting and lowering hook to move, lift the tool and make the engraving tool move to the initial position of the first groove;

[0021] S22, The tool is lowered, and the first groove is completed through the engraving motion mechanism;

[0022] S23, lift the tool, the scribing motion mechanism returns to its initial position, and at the same time rotate the indexing motion mechanism so that the grating substrate moves one step in the indexing direction until the scribing tool is located at the initial position of the second groove on the grating substrate.

[0023] S24. The tool is lowered again, and the second groove is completed through the engraving motion mechanism;

[0024] S25. Lift the blade again, and both the engraving motion mechanism and the indexing motion mechanism return to their initial positions;

[0025] S26. Repeat S21 to S25 until the fabrication of the grating substrate is complete.

[0026] Furthermore, in S11, the indexing rotary table, the indexing system support table, the marking rotary table, and the marking system support table are first installed and together form an orthogonal rotary axis system; then the marking support table is installed on the marking rotary table, and the correction and adjustment mechanism is installed on the marking support table;

[0027] In S12, the grading rotary table rotates repeatedly to measure the undulations of the grating substrate using an external displacement detection device, and then adjusts and corrects the grating substrate using a calibration mechanism. The indexing rotary table rotates repeatedly to measure the undulations of the grating substrate, and the calibration and adjustment mechanism adjusts and corrects the grating substrate again. Finally, the center of the grating substrate is aligned with the center of the orthogonal rotation axis, achieving the initial setup of the grating substrate. At this point, the motion trajectory of the orthogonal rotation axis is the grading trajectory of the grating substrate.

[0028] Furthermore, the method for engraving the first groove in S22 is as follows: After the tool is lowered, when the engraving tool contacts the grating substrate, the engraving rotary table is rotated clockwise to create the first groove on the grating substrate; at this time, the coincidence error between the center of the grating substrate and the center of the orthogonal rotation axis during the initial setup process is compensated by the center of the grating substrate coincidence error compensation component on the tool holder support mechanism;

[0029] The error generated when the indexing motion mechanism in S23 completes the indexing action is compensated by piezoelectric ceramics;

[0030] The second groove in S24 is engraved as follows: After the tool is dropped, when the engraving tool contacts the grating substrate, the engraving rotary table is rotated clockwise to generate the second groove on the grating substrate (5).

[0031] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0032] 1. In this invention, during the scribing process, the scribing tool performs unidirectional extrusion scribing on the grating substrate. That is, this invention utilizes the non-chip removal extrusion grooving processing mechanism of mechanical scribing to achieve the fabrication of convex blazed grating grooves with small blaze angle and low surface roughness.

[0033] 2. This invention also utilizes an orthogonal rotation axis system to construct the scribing trajectory of the convex grating, which can realize the fabrication of convex grating lines similar to the Earth's meridians. In conjunction with the piezoelectric ceramic under the scribing tool, it can precisely step the grating period distance and has the characteristic of large rotation angle, thus possessing the capability to fabricate large-diameter convex gratings.

[0034] 3. The tool holder support mechanism used in the mechanical scribing method of this invention has a sphere center coincidence error compensation component, specifically a flexible hinge mechanism. This mechanism can suppress the rotational error caused by the misalignment of the sphere center of the convex grating substrate with the sphere center of the orthogonal rotation axis system, thereby obtaining highly consistent convex grating grooves and achieving mechanical scribing. Compared with existing technologies, the convex grating mechanical scribing method based on the orthogonal rotation axis system has advantages in terms of manufacturing mechanism, achieving a small blaze angle and low surface roughness, and in terms of manufacturing method, it has advantages in terms of large aperture, high scribing line position accuracy, and good scribing line consistency. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the overall structure of the convex grating mechanical scribing system provided in an embodiment of the present invention. Figure 1 ;

[0036] Figure 2 This is a schematic diagram of the overall structure of the convex grating mechanical scribing system provided in an embodiment of the present invention. Figure 2 ;

[0037] Figure 3This is a partial structural schematic diagram of a convex grating mechanical scribing system provided according to an embodiment of the present invention;

[0038] Figure 4 This is a schematic diagram of the marking trajectory of a convex grating mechanical marking system provided in an embodiment of the present invention;

[0039] Figure 5 This is a schematic diagram of a groove-forming method for a convex grating mechanical scribing system provided in an embodiment of the present invention;

[0040] Figure 6 This is a schematic diagram of the finished structure of a convex grating according to an embodiment of the present invention;

[0041] Figure 7 This is a flowchart of the scribing method of the convex grating mechanical scribing system provided in an embodiment of the present invention.

[0042] The reference numerals in the accompanying drawings include: 1. Indexing motion mechanism; 2. Grating motion mechanism; 3. Grating support platform; 4. Correction and adjustment mechanism; 5. Grating substrate; 6. Tool holder adapter fixture; 7. Grating motion actuator; 8. Tool holder support platform; 9. Tool setting displacement platform; 10. Tool holder support mechanism; 11. Tool lifting and lowering drive mechanism; 12. Indexing error compensation component; 13. Clamping seat; 14. Fixed support seat; 15. Movable support seat; 16. Tool lifting and lowering drive component; 17. Guide seat; 18. Tool lifting and lowering hook; 19. Hook head; 23. Indexing rotary table; 24. Indexing system support platform; 25. Grating system support platform; 26. Grating rotary table; 27. Radius direction adjustment rod; 28. Grating line direction adjustment rod; 29. ​​Indexing direction adjustment rod; 30. Swing rod; 31. Grating tool. Detailed Implementation

[0043] The appendix will be referenced below. Figures 1-7 Embodiments of the present invention are described below. In the following description, the same modules are denoted by the same reference numerals. Where the same reference numerals are used, their names and functions are also the same. Therefore, their detailed description will not be repeated.

[0044] To make the objectives, technical solutions, and advantages of this invention clearer, the following description is provided in conjunction with the appendix. Figures 1-7 The present invention will be further described in detail below with reference to specific embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and do not constitute a limitation thereof.

[0045] A convex grating mechanical scribing system based on an orthogonal rotation axis system, such as Figures 1-6As shown, it includes a scribe trajectory planning mechanism and a scribe motion execution mechanism 7. The scribe trajectory planning mechanism includes an indexing motion mechanism 1, a scribe motion mechanism 2, and a scribe support platform 3. The scribe motion mechanism 2 is connected to the indexing motion mechanism 1. The axis of the scribe motion mechanism 2 is perpendicular to the axis of the indexing motion mechanism 1. The scribe motion mechanism 2 and the indexing motion mechanism 1 together form an orthogonal rotary axis system. The orthogonal rotary axis system can realize the path planning of grating slotting. The scribe support platform 3 is connected to the scribe motion mechanism 2. The scribe support platform 3 is provided with a correction and adjustment mechanism 4. The grating substrate 5 is placed on the correction and adjustment mechanism 4.

[0046] The marking trajectory planning mechanism is responsible for the marking and indexing motions during the marking process of the convex grating. The grating substrate 5 is driven by the indexing motion mechanism 1 to move along the grating period direction and by the marking motion mechanism 2 to move along the grating marking line direction. The marking motion execution mechanism 7 is responsible for the displacement motion of the marking tool 31 in the arc height direction of the convex grating and the micro-positioning compensation motion in the indexing direction. The marking tool 31 is a diamond grating marking structure. It uses an orthogonal rotation axis system to drive the convex grating substrate 5 to perform indexing and marking motions. By using the diamond grating marking tool to perform micro-extrusion mechanical marking on the convex grating, it is possible to achieve the fabrication of convex blazed grating grooves with small blaze angles and low surface roughness.

[0047] The indexing motion mechanism 1 includes an indexing rotary table 23 and an indexing system support table 24 located on the upper end of the indexing rotary table 23. The engraving motion mechanism 2 includes an engraving system support table 25 located on the upper end of one side of the indexing system support table 24 and an engraving rotary table 26 connected to the engraving system support table 25. The engraving rotary table 26 is located above the indexing system support table 24. The engraving support table 3 is connected to the engraving rotary table 26 and is perpendicular to the indexing system support table 24. The correction and adjustment mechanism 4 is located close to the grating substrate 5. The correction and adjustment mechanism 4 is a three-dimensional adjustment structure. The three-dimensional adjustment mechanism can adjust the spatial pose of the grating substrate 5 during initial assembly. The three-dimensional adjustment structure includes a radius direction adjustment body, a scribe line direction adjustment body, and an indexing direction adjustment body. The radius direction adjustment body, the scribe line direction adjustment body, and the indexing direction adjustment body each include a radius direction adjustment rod 27, a scribe line direction adjustment rod 28, and an indexing direction adjustment rod 29, respectively.

[0048] The engraving motion actuator 7 includes a tool holder support platform 8 and a tool setting displacement platform 9 slidably located on the tool holder support platform 8. The tool setting displacement platform 9 is provided with a tool holder support mechanism 10 and a tool lifting and lowering drive mechanism 11. The tool holder support mechanism 10 is used to support the engraving tool 31, and the tool lifting and lowering drive mechanism 11 is used to drive the tool holder support mechanism 10 to extend and retract to realize the lifting and lowering action of the engraving tool 31. The indexing rotary table 23 is located on the side of the tool holder support platform 8.

[0049] The tool holder support mechanism 10 includes a clamping seat 13 located on the tool setting displacement stage 9, a fixed support seat 14 connected in the clamping seat 13, and a movable support seat 15 hinged to the fixed support seat 14. The movable support seat 15 is located between the grating substrate 5 and the tool lifting and lowering drive mechanism 11. The scribing tool 31 is connected to the movable support seat 15. The tool lifting and lowering drive mechanism 11 can drive the movable support seat 15 to swing so as to realize the lifting and lowering of the scribing tool 31.

[0050] The tool holder support mechanism 10 is equipped with a spherical center coincidence error compensation component, which is a flexible hinge structure, specifically a cross-shaped flexible hinge. An indexing error compensation component 12 is provided between the tool holder support mechanism 10 and the tool setting displacement stage 9. The indexing error compensation component 12 is made of piezoelectric ceramic. The spherical center coincidence error compensation component is located between the movable support base 15 and the fixed support base 14, and the indexing error compensation component 12 is located between the clamping base 13 and the tool setting displacement stage 9. The tool setting displacement stage 9 and the piezoelectric ceramic can realize the functions of sag compensation and accuracy compensation, and can realize the supplementary mechanism function of different curvature radii and high-precision scribing, further enhancing the advantages of the orthogonal rotary axis scribing method.

[0051] The tool lifting and lowering drive mechanism 11 includes a tool lifting and lowering drive component 16 and a guide seat 17. The guide seat 17 is located between the tool setting displacement stage 9 and the indexing error compensation component 12. The tool lifting and lowering drive component 16 is a drive motor. The power output end of the tool lifting and lowering drive component 16 is connected to a tool lifting and lowering hook 18. The tool lifting and lowering hook 18 passes through the guide seat 17 and extends between the guide seat 17 and the grating base 5. The tool lifting and lowering hook 18 includes a hook head 19 located between the guide seat 17 and the grating base 5. The hook head 19 hooks or releases the movable support seat 15 to realize the lifting and lowering action of the engraving tool 31. Specifically, the lower end of the movable support seat 15 is provided with a swing rod 30. The hook head 19 can hook or release the swing rod 30 to realize the lifting and lowering action of the engraving tool 31. The tool setting displacement stage 9 is equipped with a tool holder adapter 6. The tool holder support mechanism 10 and the tool lifting and lowering drive mechanism 11 are both connected to the tool holder adapter 6. The tool setting displacement stage 9 can slide on the tool holder bearing platform 8 and drive the tool holder adapter 6, the tool holder support mechanism 10 and the scribing tool 31 to move towards the grating substrate 5. The tool holder adapter 6 can improve the stability and flexibility of the connection and use of each component.

[0052] During the scribing process, the scribing tool 31 performs unidirectional extrusion scribing on the grating substrate 5. In this embodiment, a scribing trajectory construction system for a convex grating is built based on an orthogonal rotation axis system, and a micro-extrusion mechanical scribing method is used to fabricate the convex blazed grating. This improves the fabrication accuracy and allows for the fabrication of convex blazed gratings that simultaneously possess large aperture, small blaze angle, low surface roughness, and high diffraction efficiency. The mechanical scribing trajectory of the convex blazed grating substrate 5 is as follows: Figure 4As shown, X is the grading axis of the grading rotary table 26, Z is the indexing axis of the indexing rotary table 23, Y is the axis of the grading bearing table 3, and the intersection of X and Z is the center of the orthogonal rotary axis system.

[0053] A mechanical scribing method for convex gratings based on an orthogonal rotation axis system, comprising the following steps:

[0054] S1. Perform the assembly and preparation work before scribing the grating substrate 5.

[0055] S11. Install the indexing motion mechanism 1, the engraving motion mechanism 2, the engraving support table 3, and the correction and adjustment mechanism 4 to form an orthogonal rotary axis system. In S11, first install the indexing rotary table 23, the indexing system support table 24, the engraving rotary table 26, and the engraving system support table 25 to form an orthogonal rotary axis system. Then, install the engraving support table 3 on the engraving rotary table 26 with screws and install the correction and adjustment mechanism 4 on the engraving support table 3 with screws, which together serve as the support mechanism for the convex grating substrate 5.

[0056] S12. The grating substrate 5 is measured and adjusted to make the center of the sphere of the grating substrate 5 coincide with the center of the sphere of the orthogonal rotation axis system. In S12, the grading rotary table 26 is rotated repeatedly, and the undulation of the grating substrate 5 is measured by an external precision displacement detection device such as an inductive micrometer. The grating substrate 5 is adjusted and corrected by the correction and adjustment mechanism 4. Similarly, the indexing rotary table 23 is rotated repeatedly to measure the undulation of the grating substrate 5. The grating substrate 5 is adjusted and corrected by the correction and adjustment mechanism 4. Finally, the center of the sphere of the grating substrate 5 is made to coincide with the center of the sphere of the orthogonal rotation axis system, and the initial assembly and adjustment of the grating substrate 5 is achieved. At this time, the motion trajectory of the orthogonal rotation axis system is the grading trajectory of the grating substrate 5.

[0057] S13. Install the scribing tool 31 according to the groove shape parameters of the grating substrate 5. Specifically, install the scribing tool 31 on the movable support seat 15 in the tool holder support mechanism 10. The clamping seat 13 in the tool holder support mechanism 10 is then threadedly connected to the piezoelectric ceramic. Move the scribing tool 31 toward the grating substrate 5 so that the scribing tool 31 contacts the metal film layer deposited on the surface of the grating substrate 5. This completes the assembly and adjustment preparation work.

[0058] S2. Perform mechanical scribing on the grating substrate 5.

[0059] S21. Different loads are applied to the marking tool 31 according to the different grating groove shapes, so that the marking tool 31 is pressed into the metal film surface of the grating substrate 5. The tool lifting and lowering drive 16 drives the lifting and lowering hook 18 to perform reciprocating extension and retraction motion, so that the marking tool 31 performs the lifting and lowering action. Specifically, the lifting and lowering hook 18 is driven to move first, lifting the tool and causing the marking tool 31 to move to the initial position of the first groove.

[0060] S22, The tool is lowered, and the first groove is completed through the engraving motion mechanism 2. The first groove is as follows: Figure 5 As shown in 'a', the specific method for etching the first groove is as follows: After the tool is lowered, when the etching tool 31 contacts the grating substrate 5, the etching rotary table 26 is rotated clockwise, causing the first groove to be generated on the grating substrate 5. At this time, the coincidence error between the center of the grating substrate 5 and the center of the orthogonal rotation axis during the initial setup process is compensated by the sphere coincidence error compensation component on the tool holder support mechanism 10, namely the cross flexible hinge. During etching, the etching tool 31 etches the first groove of the grating substrate 5 using unidirectional extrusion etching.

[0061] S23, the cutting tool is lifted, and the marking motion mechanism 2 returns to its initial position. Specifically, the marking rotary table 26 is rotated counterclockwise, so that the marking motion mechanism 2 returns to its initial position as a whole. At the same time, the indexing rotary table 23 in the indexing motion mechanism 1 is rotated so that the grating substrate 5 moves one step in the indexing direction until the marking tool 31 is located at the initial position of the second groove of the grating substrate 5. At this time, the error generated when the indexing rotary table 23 in the indexing motion mechanism 1 completes the indexing action is compensated by the piezoelectric ceramic.

[0062] S24. The tool is lowered again, and the second groove is completed by the engraving motion mechanism 2. The second groove is as follows: Figure 5 As shown in b in the figure. The second groove is etched as follows: After the tool is lowered, when the etching tool 31 contacts the grating substrate 5, the etching rotary table 26 is rotated clockwise to create a second groove on the grating substrate 5. During etching, the etching tool 31 etchs the second groove on the grating substrate 5 by unidirectional extrusion etching.

[0063] S25. Lift the cutter again and rotate the engraving rotary table 26 counterclockwise so that the engraving motion mechanism 2 returns to its initial position, and the indexing motion mechanism 1 also returns to its initial position.

[0064] S26. Repeat S21 to S25 to complete n grooves. The n grooves are as follows: Figure 5 As shown in c, until the fabrication of the grating substrate 5 is completed, the finished convex grating is as follows: Figure 6 As shown, the entire characterization process is as follows: Figure 7 As shown.

[0065] In this process, different convex blazed grating target groove parameters can be prepared using different scribing tools 31. The blazed angle is not limited, and the mechanical scribing method that does not produce chips can obtain very small surface roughness. The orthogonal rotation axis system also greatly expands the scribing diameter. The piezoelectric ceramic and the indexing rotary table 23 form a two-stage indexing and positioning system, which can ensure the scribing line position accuracy of the convex grating.

[0066] Although embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

[0067] The specific embodiments of the present invention described above do not constitute a limitation on the scope of protection of the present invention. Any other corresponding changes and modifications made in accordance with the technical concept of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A convex grating mechanical ruling system based on orthogonal rotating shafts, characterized in that, The engraving trajectory planning mechanism and the engraving motion execution mechanism (7) are included. The engraving trajectory planning mechanism includes an indexing motion mechanism (1), an engraving motion mechanism (2) and an engraving bearing table (3), the axis of the engraving motion mechanism (2) is perpendicular to the axis of the indexing motion mechanism (1), the engraving motion mechanism (2) and the indexing motion mechanism (1) jointly constitute an orthogonal rotary shaft system; the engraving bearing table (3) is connected to the engraving motion mechanism (2); the engraving bearing table (3) is provided with a correction adjusting mechanism (4) and a grating base (5) is placed on the correction adjusting mechanism (4), the grating base (5) is driven by the indexing motion mechanism (1) to move along the grating period direction and is driven by the engraving motion mechanism (2) to move along the grating ruling direction; the correction adjusting mechanism (4) is arranged close to the grating base (5) and is a three-dimensional adjusting structure including a radius direction adjusting body, a ruling direction adjusting body and an indexing direction adjusting body. The engraving motion execution mechanism (7) includes a tool holder bearing table (8) and a tool setting displacement table (9) sliding on the tool holder bearing table (8), the tool setting displacement table (9) is provided with a tool holder supporting mechanism (10) for supporting the engraving tool (31) and a tool lifting and falling driving mechanism (11) for driving the tool holder supporting mechanism (10) to extend and retract to realize the lifting and falling action of the engraving tool (31); during engraving, the engraving tool (31) performs one-way extrusion and engraving on the grating base (5). The tool holder supporting mechanism (10) is provided with a ball center coincidence error compensation member, a division error compensation member (12) is arranged between the tool holder supporting mechanism (10) and the tool setting displacement table (9); the tool holder supporting mechanism (10) includes a clamping seat (13) on the tool setting displacement table (9), a fixed supporting seat (14) connected in the clamping seat (13) and a movable supporting seat (15) hinged to the fixed supporting seat (14), the movable supporting seat (15) is located between the grating base (5) and the tool lifting and falling driving mechanism (11) and the engraving tool (31) is connected to the movable supporting seat (15), the tool lifting and falling driving mechanism (11) can drive the movable supporting seat (15) to swing to realize the lifting and falling of the engraving tool (31); the ball center coincidence error compensation member is located between the movable supporting seat (15) and the fixed supporting seat (14), and the division error compensation member (12) is located between the clamping seat (13) and the tool setting displacement table (9).

2. The convex grating mechanical ruling system based on orthogonal rotating shafts according to claim 1, wherein, The tool lifting and falling driving mechanism (11) includes a tool lifting and falling driving member (16) and a guide seat (17), the guide seat (17) is located between the tool setting displacement table (9) and the division error compensation member (12); the power output end of the tool lifting and falling driving member (16) is connected with a tool lifting and falling hook (18), the tool lifting and falling hook (18) is arranged in the guide seat (17) and extends into the guide seat (17) and the grating base (5); the tool lifting and falling hook (18) includes a hook head (19) located between the guide seat (17) and the grating base (5), the hook head (19) hooks or releases the movable supporting seat (15) to realize the lifting and falling action of the engraving tool (31).

3. The convex grating mechanical ruling system based on orthogonal rotating shafts according to claim 2, characterized in that, The index error compensation member (12) is a piezoelectric ceramic.

4. The convex grating mechanical ruling system based on orthogonal rotating shafts according to claim 3, characterized in that, The index motion mechanism (1) comprises an index rotary table (23) located at the side of the tool holder bearing table (8) and an index system bearing table (24) located at the upper end of the index rotary table (23), and the ruling motion mechanism (2) comprises a ruling system bearing table (25) located at the upper end of one side of the index system bearing table (24) and a ruling rotary table (26) connected to the ruling system bearing table (25) and located above the index system bearing table (24); the ruling bearing table (3) is connected to the ruling rotary table (26) and is perpendicular to the index system bearing table (24) as a whole.

5. A mechanical ruling method of convex grating based on orthogonal rotary shaft system, ruling is carried out according to the mechanical ruling system of convex grating based on orthogonal rotary shaft system in claim 4, characterized in that, The method comprises the following steps: S1, performing installation and adjustment preparation work before ruling of the grating substrate (5); S11, installing the index motion mechanism (1), the ruling motion mechanism (2), the ruling bearing table (3) and the correction adjustment mechanism (4) to form an orthogonal rotary shaft system; S12, measuring and adjusting and correcting the grating substrate (5) to make the spherical center of the grating substrate (5) coincide with the spherical center of the orthogonal rotary shaft system; S13, installing the ruling tool (31) according to the groove shape parameter requirement of the grating substrate (5), and moving the ruling tool (31) to the grating substrate (5) to make the ruling tool (31) contact with the metal film layer plated on the surface of the grating substrate (5); S2, performing mechanical ruling on the grating substrate (5); S21, driving the lifting and falling tool hook (18) to move, lifting the tool and making the ruling tool (31) travel to the initial position of the first ruled groove; S22, falling the tool, and completing the first ruled groove through the ruling motion mechanism (2); S23, lifting the tool, and returning the ruling motion mechanism (2) to its initial position, while rotating the index motion mechanism (1) to make the grating substrate (5) move one step in the index direction until the ruling tool (31) is located at the initial position of the second ruled groove of the grating substrate (5); S24, falling the tool again, and completing the second ruled groove through the ruling motion mechanism (2); S25, lifting the tool again, and returning the ruling motion mechanism (2) and the index motion mechanism (1) to their respective initial positions; S26, repeating S21 to S25 until the preparation of the grating substrate (5) is completed.

6. The convex grating mechanical ruling method based on an orthogonal rotary shaft system according to claim 5, characterized in that, In S11, the index rotary table (23), the index system bearing table (24), the ruling rotary table (26) and the ruling system bearing table (25) are first installed and jointly form the orthogonal rotary shaft system, and then the ruling bearing table (3) is installed on the ruling rotary table (26) and the correction adjustment mechanism (4) is installed on the ruling bearing table (3). In S12, the rotary table (26) is repeatedly rotated, the fluctuation of the grating substrate (5) is measured by the external displacement detection device, the grating substrate (5) is adjusted and corrected by the correction adjusting mechanism (4), the indexing rotary table (23) is repeatedly rotated, the fluctuation of the grating substrate (5) is measured, the grating substrate (5) is adjusted and corrected by the correction adjusting mechanism (4), and finally the spherical center of the grating substrate (5) coincides with the spherical center of the orthogonal rotary shaft system, the initial installation and adjustment of the grating substrate (5) are realized, and the motion track of the orthogonal rotary shaft system is the scribing track of the grating substrate (5).

7. The convex grating mechanical scribing method based on the orthogonal rotary shaft system according to claim 6, characterized in that, In S22, the scribing method of the first scribing groove is as follows: after the tool is lowered, when the scribing tool (31) contacts the grating substrate (5), the scribing rotary table (26) is rotated in the clockwise direction, so that the first scribing groove is generated on the grating substrate (5); at this time, the coincidence error of the spherical center of the grating substrate (5) and the spherical center of the orthogonal rotary shaft in the initial installation and adjustment process is compensated by the spherical center coincidence error compensation element on the tool rest supporting mechanism (10); In S23, the error generated when the indexing motion mechanism (1) completes the indexing action is compensated by the piezoelectric ceramic; In S24, the scribing method of the second scribing groove is as follows: after the tool is lowered, when the scribing tool (31) contacts the grating substrate (5), the scribing rotary table (26) is rotated in the clockwise direction, so that the second scribing groove is generated on the grating substrate (5).

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