Prism Alignment Device, System and Method

Abstract

The present invention discloses a prism alignment device, system and method. The prism alignment device includes a mounting plate and an alignment plate; a plurality of through holes are provided on the mounting plate, and a plurality of prism mounting seats are provided around each through hole; the alignment member includes an alignment plate and a plurality of alignment blocks, the alignment blocks are arranged on the alignment plate and correspond to the through holes one by one, the alignment plate is connected to the mounting plate, the alignment blocks pass through the through holes, a top mark is provided on the top surface of the alignment block, and a side mark is provided on the side surface of the alignment block; the prism mounted on the prism mounting seat can reflect the side mark, so that the top mark and the side mark can be observed above the alignment block. By setting high-contrast marks on the top and side of the alignment block, using an object-space telecentric imaging system to image the marks on the top and side of the alignment block, and using an image algorithm to accurately calculate the position and angle of the side mark image relative to the top mark image, quantifying the six-degree-of-freedom errors of the prism, and realizing high-precision adjustment of the six degrees of freedom of the reflecting prism.

Description

Technical Field

[0001] The present invention relates to the technology of optical element assembly, and particularly to a prism alignment device, system and method. Background Art

[0002] Conventional plastic encapsulated chip detection equipment needs to complete the 6S detection of the chip, namely: the top surface, the bottom surface and 4 side surfaces. Among them, the top surface and the bottom surface can be directly irradiated by a light source, and then imaged into the optical imaging system through the reflection of the object surface, and the corresponding detection tasks can be completed. However, for the detection of the 4 side surfaces, usually 4 reflectors placed around the chip are used to reflect the 4 side surfaces of the chip into the optical imaging system through a prism. The existing installation process of the prism array is as Figure 1 shown. A positioning reference line is provided on the mechanism mounting plate 30. Each coated reflecting prism 20 is inserted into the corresponding hole on the mechanism mounting plate 30. The microscope 10 is used to obtain the images of the reflecting prism and the reference line and display them on the display screen 40. The position of the reflecting prism is adjusted according to the images on the display screen 40 to make the edge of the reflecting prism parallel or coincident with the positioning reference line. There are the following problems in installing the prism array using this method:

[0003] 1. Adjusting the prism by observing through a microscope to make the chamfer edge of the prism parallel or coincident with the positioning reference line can control the rotation and translation errors of installing the reflecting prism to a certain extent, so as to realize the installation and adjustment of the reflecting prism. However, there are often processing errors on the chamfer edge, and it is very difficult to make the chamfer edge parallel or coincident with the positioning reference line. In addition, relying on manual identification of the parallelism or coincidence of the chamfer edge and the positioning reference line, there are artificial judgment errors, which ultimately lead to the inability to effectively guarantee the installation accuracy and installation consistency of the prism array.

[0004] 2. Precise installation of the reflecting prism requires adjustment of six degrees of freedom including X, Y, Z translation and Rx, Ry, Rz rotation. Using the method of making the chamfer edge parallel or coincident with the positioning reference line, only three degrees of freedom of X translation, Ry and Rz rotation can be adjusted, which is difficult to meet the requirements of six-degree-of-freedom adjustment. Summary of the Invention

[0005] Aiming at the deficiencies of the existing technology, the purpose of the present invention is to provide a prism alignment device, system and method, which can achieve high-precision adjustment of six degrees of freedom of a single reflecting prism.

[0006] The first aspect of the present disclosure provides a prism alignment device, including:

[0007] A mounting plate, on which a plurality of through holes are provided, and a plurality of prism mounting seats are provided around each through hole;

[0008] The assembly and adjustment component includes an assembly and adjustment plate and a plurality of assembly and adjustment blocks. The assembly and adjustment blocks are arranged on the assembly and adjustment plate and correspond to the through holes one by one. The assembly and adjustment plate is connected to the mounting plate. The assembly and adjustment blocks pass through the through holes. A top mark is provided on the top surface of the assembly and adjustment block, and a side mark is provided on the side surface of the assembly and adjustment block. The prism mounted on the prism mounting seat can reflect the side mark, so that the top mark and the side mark can be observed above the assembly and adjustment block.

[0009] Optionally, the assembly and adjustment component further includes a first connecting piece;

[0010] A plurality of accommodation grooves are provided on the upper surface of the assembly and adjustment plate, corresponding to the assembly and adjustment blocks one by one. An assembly and adjustment block connecting hole is provided in the accommodation groove, and the assembly and adjustment block connecting hole penetrates the bottom of the accommodation groove and the lower surface of the assembly and adjustment plate. A connecting groove is provided on the bottom surface of the assembly and adjustment block. The assembly and adjustment block is accommodated in the accommodation groove, and the first connecting piece passes through the assembly and adjustment block connecting hole and the connecting groove to fixedly connect the assembly and adjustment block to the assembly and adjustment plate.

[0011] Optionally, the through hole penetrates the upper surface and the lower surface of the mounting plate. The prism mounting seat is arranged on the upper surface of the mounting plate, and the assembly and adjustment plate is closely attached to the lower surface of the mounting plate.

[0012] Optionally, a glue injection hole is provided on the prism mounting seat.

[0013] Optionally, the prism assembly and adjustment device further includes a second connecting piece;

[0014] A first connecting hole and a first positioning portion are provided on the mounting plate, and a second connecting hole and a second positioning portion are provided on the assembly and adjustment plate. The first positioning portion matches the second positioning portion. The second connecting piece passes through the second connecting hole and the first connecting hole to fixedly connect the assembly and adjustment plate to the mounting plate.

[0015] Optionally, the assembly and adjustment block is a cube, and side marks are provided on all four side surfaces of the cube.

[0016] Optionally, the plurality of through holes are arranged in a rectangular array on the mounting plate, and the plurality of assembly and adjustment blocks are arranged in a rectangular array on the assembly and adjustment plate.

[0017] The second aspect of the present disclosure provides a prism assembly and adjustment system, including a camera device, a processor, a displacement device, the prism assembly and adjustment device of the first aspect above, and a prism;

[0018] The prism is installed on the prism mounting base of the prism alignment device. The imaging device is arranged above the prism alignment device. The displacement device is used to drive the prism alignment device and the prism to approach or move away from the imaging device along the Z direction, so that the imaging device can image the top mark of the alignment block and the side mark reflected by the prism respectively.

[0019] The processor is connected to the imaging device and is used to synthesize the top mark image and the side mark image acquired by the imaging device into a composite image, and output the position relationship data between the top mark and the side mark in the composite image. The position relationship data is used to guide the position adjustment of the prism.

[0020] A third aspect of the present disclosure provides a prism alignment method, which is applied to the prism alignment system described in the second aspect above. The method includes:

[0021] S1. Place the prism on the prism mounting base of the prism alignment device.

[0022] S2. Adjust the position between the prism alignment device and the imaging device so that the imaging device images the top mark of the alignment block of the prism alignment device; obtain the top mark image.

[0023] S3. Adjust the position between the prism alignment device and the imaging device so that the imaging device images the side mark of the alignment block reflected by the prism, and obtain the side mark image.

[0024] S4. The processor synthesizes the top mark image and the side mark image into a composite image, and outputs the position relationship data between the top mark and the side mark in the composite image.

[0025] S5. Adjust the position of the prism according to the position relationship data.

[0026] S6. Obtain the side mark image again, and return to execute step S4 until the position relationship between the top mark and the side mark in the composite image meets the preset conditions. At this time, it is determined that the prism adjustment is in place. The preset conditions include: the side edges of the side mark image are parallel to the side edges of the top mark image, and the distance between the side edges of the side mark image and the side edges of the top mark image meets the theoretical design value.

[0027] Optionally, after step S6, it further includes: applying glue between the prism and the prism mounting base to fix the prism on the prism mounting base.

[0028] Implementing the above solution has the following beneficial effects:

[0029] The present invention discloses a prism adjustment device, which includes a mounting plate and an adjustment member, wherein the adjustment member is fixedly connected to the mounting plate, and a plurality of adjustment blocks are arranged on the adjustment member, wherein the adjustment blocks pass through the through holes on the mounting plate and are surrounded by the prism mounting seat on the mounting plate, and each adjustment block is provided with a top mark on the top surface and a side mark on the side, and both the top mark and the side mark are high-contrast marks. When the prism is placed on the prism mounting seat, the prism can reflect the side mark of the adjustment block, and the top mark and the side mark are imaged by a camera device, and the position and angle of the side mark image relative to the top mark image can be accurately calculated by an image algorithm, and the six degrees of freedom errors of the reflecting prism can be quantified, so as to realize high-precision adjustment of the six degrees of freedom of a single reflecting prism.

[0030] The prism adjustment device disclosed in the present invention can assist in prism adjustment, reduce the difficulty of prism adjustment, improve the precision and accuracy of prism adjustment, ensure the consistency of adjustment of each group of reflective prism arrays, and facilitate batch adjustment and acceptance of reflective prism arrays. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the installation of a prism array in the prior art;

[0032] Figure 2 is a schematic diagram of the assembly structure of the prism adjustment device and the prism according to an embodiment of the present disclosure;

[0033] Figure 3 is a schematic diagram of the assembly structure of the prism adjustment device and the prism according to an embodiment of the present disclosure;

[0034] Figure 4 is a schematic diagram of the assembly structure of the prism adjustment device and the prism according to an embodiment of the present disclosure;

[0035] Figure 5 is a cross-sectional view of the prism adjustment device and the prism after being assembled in the embodiment of the present disclosure;

[0036] Figure 6 is a schematic structural diagram of a mounting plate in a prism mounting and adjusting device according to an embodiment of the present disclosure;

[0037] Figure 7 is a schematic structural diagram of a mounting plate in a prism mounting and adjusting device according to an embodiment of the present disclosure;

[0038] Figure 8 is a schematic structural diagram of a mounting plate in a prism mounting and adjusting device according to an embodiment of the present disclosure;

[0039] Figure 9 is a schematic structural diagram of an adjustment plate in a prism adjustment device according to an embodiment of the present disclosure;

[0040] Figure 10 is a schematic structural diagram of an adjustment plate in a prism adjustment device according to an embodiment of the present disclosure;

[0041] Figure 11 is a schematic structural diagram of an adjustment plate in a prism alignment device according to an embodiment of the present disclosure;

[0042] Figure 12 is a schematic structural diagram of an adjustment block in a prism alignment device according to an embodiment of the present disclosure;

[0043] Figure 13 is a schematic structural diagram of an adjustment block in a prism alignment device according to an embodiment of the present disclosure;

[0044] Figure 14 is a flowchart of a prism alignment method according to an embodiment of the present disclosure;

[0045] Figure 15 is a schematic diagram of adjusting the distance between a telecentric lens and a prism alignment device according to an embodiment of the present disclosure;

[0046] Figure 16 is a schematic assembly structure diagram of a prism alignment device and a prism according to an embodiment of the present disclosure;

[0047] Figure 17 is a schematic diagram of a three-dimensional coordinate system of a transverse prism;

[0048] Figure 18 is a schematic diagram of a three-dimensional coordinate system of a longitudinal prism;

[0049] Figure 19 is a schematic diagram of the influence of the X-axis rotation error of a transverse prism on the top and side marking images of an adjustment block;

[0050] Figure 20 is a schematic diagram of the influence of the Y-axis rotation error of a transverse prism on the top and side marking images of an adjustment block;

[0051] Figure 21 is a schematic diagram of the influence of the Z-axis rotation error of a transverse prism on the top and side marking images of an adjustment block;

[0052] Figure 22 is a schematic diagram of the influence of the X-axis translation error of a transverse prism on the top and side marking images of an adjustment block;

[0053] Figure 23 is a schematic diagram of the influence of the Y-axis translation error of a transverse prism on the top and side marking images of an adjustment block;

[0054] Figure 24 is a schematic diagram of the influence of the Z-axis translation error of a transverse prism on the top and side marking images of an adjustment block.

[0055] In the figure:

[0056] 10 microscope, 20 coated reflection prism, 30 mechanism mounting plate, 40 display screen.

[0057] 100 Mounting plate, 101 Through hole, 102 Prism mounting base, 103 Glue injection hole, 104 First positioning portion, 105 First connection hole, 106 Fixture connection hole,

[0058] 200 Alignment plate, 201 Accommodating groove, 202 Alignment block connection hole, 203 Second positioning portion, 204 Second connection hole,

[0059] 300 Alignment block, 301 Top mark, 302 Side mark, 303 Connection groove,

[0060] 400 First connecting piece,

[0061] 500 Second connecting piece,

[0062] 600 Telecentric lens;

[0063] 700 Prism. Detailed implementation manners

[0064] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are some but not all of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0065] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0066] It should be noted that: Similar reference numerals and letters denote similar items in the following accompanying drawings. Therefore, once an item is defined in one accompanying drawing, it does not need to be further defined and explained in subsequent accompanying drawings.

[0067] Please refer to Figures 2 - 6, this embodiment provides a prism alignment device, which includes a mounting plate 100, a second connecting member 500, and an alignment plate 200. The alignment plate 200 is connected to the mounting plate 100 through the second connecting member 500. A plurality of through holes 101 are provided on the mounting plate 100, and a plurality of prism mounting seats 102 are provided around each through hole 101. The prism mounting seats 102 are used to mount a triangular prism 700. The alignment member includes an alignment plate 200, a plurality of alignment blocks 300, and a first connecting member 400. The alignment blocks 300 are provided on the alignment plate 200 through the first connecting member 400. The alignment blocks 300 correspond to the through holes 101 one by one. The alignment plate 200 is connected to the mounting plate 100. The alignment blocks 300 pass through the through holes 101. A top mark 301 is provided on the top surface of the alignment block 300, and a side mark 302 is provided on the side surface of the alignment block 300. The prism 700 mounted on the prism mounting seat 102 can reflect the side mark 302, so that the top mark 301 and the side mark 302 can be observed above the alignment block 300.

[0068] Please refer to Figure 12 and Figure 13 , a connecting groove 303 is provided on the bottom surface of the alignment block 300, a top mark 301 is provided on the top surface of the alignment block 300, and a side mark 302 is provided on the side surface of the alignment block 300. The side mark 302 is close to the top mark 301 and parallel to the top mark 301. In a possible implementation, the alignment block 300 is a cube structure, the top mark 301 is a square-shaped mark surrounding the top surface of the cube, and the side mark 302 is provided on each side surface of the cube. All the side marks 302 are close to the top mark 301. As Figure 12 shown, the side mark 302 is a strip-shaped mark and parallel to the top mark 301.

[0069] Please refer to Figures 9 - 11 , a plurality of receiving grooves 201 are provided on the upper surface of the alignment plate 200, and the plurality of receiving grooves 201 are arranged in a rectangular array on the alignment plate 200. A mounting block connection hole 202 is provided in each receiving groove 201, and the mounting block connection hole 202 penetrates the bottom of the receiving groove 201 and the lower surface of the alignment plate 200. Please refer to Figure 2 , each receiving groove 201 accommodates an alignment block 300. The first connecting member 400 passes through the mounting block connection hole 202 on the alignment plate 200 and the connecting groove 303 on the alignment block 300 to fixedly connect the alignment block 300 to the alignment plate 200. The first connecting member 400 can be a screw, and the screw is in threaded cooperation with the mounting block connection hole 202 and the connecting groove 303.

[0070] Please refer to Figures 6 - 8, a plurality of through holes 101 are provided on the mounting plate 100, and the plurality of through holes 101 are arranged in a rectangular array on the mounting plate 100. The through holes 101 correspond to the accommodating grooves 201 on the adjustment plate 200 one by one, and each through hole 101 penetrates the upper surface and the lower surface of the mounting plate 100. A plurality of prism mounting seats 102 are provided around the through holes 101 on the upper surface of the mounting plate 100. The prism mounting seats 102 are used to fix the prism 700. Glue injection holes 103 are provided on the prism mounting seats 102, and the glue injection holes 103 penetrate the prism mounting seats 102 and the lower surface of the mounting plate 100. When the adjustment part is combined with the mounting plate 100, the upper surface of the adjustment plate 200 is closely attached to the lower surface of the mounting plate 100. The adjustment blocks 300 on the adjustment plate 200 pass through the through holes 101 on the mounting plate 100. The prism mounting seats 102 surround the adjustment blocks 300, and the side marks 302 of the adjustment blocks 300 are higher than the prism mounting seats 102, ensuring that the side mark images reflected by the prism 700 can be observed from above the adjustment blocks 300. In a possible implementation manner, the through holes 101 on the mounting plate 100 are square holes, and the four sides of the square holes respectively correspond to a prism mounting seat 102. A prism mounting seat 102 is arranged between two adjacent through holes 101, and each side mark 302 on the adjustment block 300 can be reflected by a reflecting surface on the triangular prism 700.

[0071] A first connection hole 105 and a first positioning portion 104 are provided on the mounting plate 100, a second connection hole 204 and a second positioning portion 203 are provided on the adjustment plate 200. The first positioning portion 104 matches the second positioning portion 203. The second connecting member 500 penetrates into the second connection hole 204 and the first connection hole 105 to fixedly connect the adjustment plate 200 and the mounting plate 100. In a possible implementation manner, the first positioning portion 104 and the second positioning portion 203 are holes with the same shape, and the holes can be in shapes such as oval, triangular, rectangular, etc. The first positioning portion 104 matching the second positioning portion 203 means that the edges of the two holes are aligned and communicate with each other. In another possible implementation manner, the first positioning portion 104 is a hole, and the second positioning portion 203 is a positioning rod. The first positioning portion 104 matching the second positioning portion 203 means that the positioning rod penetrates into the hole.

[0072] A jig connection hole 106 is further provided on the mounting plate 100. After the prism 700 is installed, the mounting plate is separated from the adjustment part, and then the mounting plate 100 with the prism 700 installed is connected to the jig through the jig connection hole 106.

[0073] The prism alignment device of this embodiment includes a mounting plate and an alignment member. The alignment member is fixedly connected to the mounting plate. The alignment member is provided with a plurality of alignment blocks. The alignment blocks pass through the through holes on the mounting plate and are surrounded by the prism mounting seats on the mounting plate. The top surface of each alignment block is provided with a top mark, and the side surface is provided with a side mark. Both the top mark and the side mark are high-contrast marks. When the prism is placed on the prism mounting seat, the prism can reflect the side mark of the alignment block. The imaging device is used to image the top mark and the side mark, and the image algorithm can accurately calculate the position and angle of the side mark image relative to the top mark image, quantify the six-degree-of-freedom error of the reflecting prism, and achieve high-precision adjustment of the six degrees of freedom of a single reflecting prism.

[0074] This embodiment provides a prism alignment system. The prism alignment system includes an imaging device, a processor, a displacement device, the above-mentioned prism alignment device, and a prism 700. The prism 700 is mounted on the prism mounting seat 102 of the prism alignment device. The imaging device is arranged above the prism alignment device. The displacement device is used to drive the prism alignment device and the prism 700 to approach or move away from the imaging device along the Z direction, so that the imaging device can image the top mark 301 of the alignment block 300 and the side mark 302 reflected by the prism 700 respectively. The processor is connected to the imaging device and is used to synthesize the top mark image and the side mark image obtained by the imaging device into a composite image, and output the position relationship data between the top mark 301 and the side mark 302 in the composite image. The position relationship data is used to guide the position adjustment of the prism 700.

[0075] Please refer to Figure 5 , the prism 700 is a triangular prism 700. When the prism 700 is located in the alignment block 300 array, the prism 700 is between two alignment blocks 300. Two reflecting surfaces of the prism 700 respectively reflect the side marks 302 on one alignment block 300. When the prism 700 is at the edge of the alignment block 300 array, the prism 700 is only located on one side of the alignment block 300, and one reflecting surface of the prism 700 reflects the side mark 302 on the adjacent alignment block 300. Specifically, the side mark 302 of the alignment block 300 is higher than the prism mounting seat 102 to ensure that the side mark image reflected by the prism 700 can be observed from above the alignment block 300.

[0076] This embodiment also provides a prism alignment method. Please refer to Figure 14 , the method is applied to the above-mentioned prism alignment system and includes:

[0077] S1. Place the prism on the prism mounting seat of the prism alignment device.

[0078] Specifically, use an auxiliary fixture to place the prism on the prism mounting base, such that the reflecting surface of the prism is close to the side surface of the alignment block. For the alignment block with a cubic structure, the prism surrounding the alignment block has two states: horizontally placed and vertically placed.

[0079] S2. Adjust the position between the prism alignment device and the imaging device, such that the imaging device images the top mark of the alignment block of the prism alignment device; obtain the top mark image.

[0080] S3. Adjust the position between the prism alignment device and the imaging device, such that the imaging device images the side mark of the alignment block reflected by the prism; obtain the side mark image.

[0081] S4. The processor synthesizes the top mark image and the side mark image into a composite image, and outputs the position relationship data between the top mark and the side mark in the composite image.

[0082] S5. Adjust the position of the prism according to the position relationship data.

[0083] S6. Obtain the side mark image again, and return to execute step S4 until the position relationship between the top mark and the side mark in the composite image meets the preset conditions, and then determine that the prism adjustment is in place. The preset conditions include that the side mark image border is parallel to the top mark image border, and the distance between the side mark image border and the top mark image border meets the theoretical design value.

[0084] In the prism alignment system, the top mark 301 of the alignment block 300 of the prism alignment device directly enters the object-side telecentric lens 600 of the imaging device for imaging, and the side mark 302 enters the object-side telecentric lens 600 for imaging after being reflected by the reflecting prism 700. The top mark 301 does not enter the object-side telecentric lens 600 for imaging after being reflected by the prism 700, and does not carry the rotation and translation attitude parameter information of the prism 700. The position of this mark image will not change with the change of the position of the prism 700; the side mark 302 enters the object-side telecentric lens 600 for imaging after being reflected by the prism 700, and carries the rotation and translation attitude parameter information of the prism 700. The position of this mark image will change with the change of the position of the prism 700. Therefore, according to the relative position and angular relationship between the side mark image and the top mark image, the six-degree-of-freedom error magnitude during the installation of the prism 700 can be judged, and finally the installation adjustment of the rotation and translation attitude of the prism 700 can be realized.

[0085] To achieve high-precision adjustment, a high-resolution object-space telecentric lens 600 needs to be matched. Since the depth of field of the lens is small, it is difficult to achieve clear imaging of both the side marks 302 and the top marks 301 of the alignment block 300 simultaneously. Therefore, it is necessary to first focus on and image the top marks 301 of the alignment block 300 and record the top mark images; then use the displacement device to drive the combined device composed of the prism array and the prism alignment device to move along the Z direction, so that the side marks 302 of the alignment block 300 are focused and imaged, lock the Z-direction position, and refresh the side mark images in real time, as Figure 15 shown. Then, the top mark images and the side mark images are synthesized into a composite image. According to the top mark images, the positions and angles of each top mark image are recorded. Using image algorithms, the positions and angles of the side mark images relative to the top mark images are calculated in real time, and the position relationship data between the top marks 301 and the side marks 302 in the composite image are obtained. Furthermore, according to the position relationship data, the positions and angles of the prisms 700 on the prism alignment device are adjusted.

[0086] There are two types of prism arrays on the prism alignment device: a horizontal prism array and a vertical prism array, as Figure 16 shown. R1, R2, R3......R10 are denoted as the horizontal prism array, and C1, C2, C3......C12 are denoted as the vertical prism array. For the horizontal prism, its three-dimensional coordinate system is as Figure 17 shown, and the coordinate vertex is denoted as O. For the vertical prism, its three-dimensional coordinate system is as Figure 18 shown, and the coordinate vertex is denoted as O.

[0087] Taking the horizontal prism as an example, when there are six-degree-of-freedom errors in the installation of the horizontal prism, according to the relative position and angular relationship between the top mark 301 edge images and the side mark 302 edge images of two adjacent alignment blocks 300, the magnitudes of the six-degree-of-freedom errors can be judged. The principle is explained as follows:

[0088] 1. As Figure 19 shown, the included angles between the top mark 301 edge images and the side mark

[0089] 302 edge images of two adjacent alignment blocks 300 are respectively denoted as θ1 and θ2, and these two included angles can be accurately calculated by image algorithms. When there is an X-axis rotation error in the horizontal prism, θ1 = -θ2 ≠ 0°; by adjusting the X-axis rotation of the horizontal prism to eliminate the X-axis rotation error, at this time θ1 = -θ2 = 0°.

[0090] 2. As Figure 21As shown in the figure, the angles between the edge images of the top marks 301 and the side marks 302 of two adjacent alignment blocks 300 are denoted as θ3 and θ4 respectively, and these two angles can be accurately calculated by image algorithms. When there is a Z-axis rotation error in the transverse prism, θ3 = θ4 ≠ 0°; by adjusting the Z-axis rotation of the transverse prism to eliminate the Z-axis rotation error, at this time θ3 = θ4 = 0°.

[0091] 3. As Figure 20 shown in the figure, the distances between the edge images of the top marks 301 and the side marks 302 of two adjacent alignment blocks 300 are denoted as d7 and d8 respectively, and these two distances can be accurately calculated by image algorithms. When there is a Y-axis rotation error in the transverse prism, d7 ≠ d8; by adjusting the Y-axis rotation of the transverse prism to eliminate the Y-axis rotation error, at this time d7 = d8.

[0092] 4. As Figure 22 shown in the figure, the distances between the edge images of the top marks 301 and the side marks 302 of two adjacent alignment blocks 300 are denoted as d1 and d2 respectively, and these two distances can be accurately calculated by image algorithms. When there is an X-axis translation error in the transverse prism, d1 ≠ d2; by adjusting the X-axis translation of the transverse prism to eliminate the X-axis translation error, at this time d1 = d2.

[0093] 5. As Figure 23 shown in the figure, the distances between the edge images of the top marks 301 and the side marks 302 of two adjacent alignment blocks 300 are denoted as d3 and d4 respectively, and these two distances can be accurately calculated by image algorithms. When there is a Y-axis translation error in the transverse prism, d3 ≠ d4; by adjusting the Y-axis translation of the transverse prism to eliminate the Y-axis translation error, at this time d3 = d4.

[0094] 6. As Figure 24 shown in the figure, the distances between the edge images of the top marks 301 and the side marks 302 of two adjacent alignment blocks 300 are denoted as d5 and d6 respectively, and these two distances can be accurately calculated by image algorithms. The theoretically designed distance between the top mark image and the side mark image of the alignment block 300 is defined as k0. When there is a Z-axis translation error in the transverse prism, d5 = d6 ≠ k0; by adjusting the Z-axis translation of the transverse prism to eliminate the Z-axis translation error, at this time d5 = d6 = k0.

[0095] During the process of adjusting the installation attitude of the prism 700, follow the principle of "adjust rotation first, then translation". First, adjust Rx and Rz rotations respectively to make θ1 = θ2 = 0° and θ3 = θ4 = 0°; then adjust Ry rotation to make d7 = d8; then adjust X, Y, and Z-axis translations respectively to make d1 = d2, d3 = d4, and d5 = d6 = k0.

[0096] Through the above analysis and attitude adjustment, the high-precision and consistent installation of the transverse prism array can be achieved. For the longitudinal prism array, the reference coordinate system is as shown in Figure 18 . The installation and adjustment process thereof also refers to the above 1 to 6 to achieve the high-precision and consistent installation of the longitudinal prism array. Thus, the installation and adjustment process of the complete prism array is completed.

[0097] Furthermore, after the step S6, it further includes: applying glue between the prism 700 and the prism mounting seat 102 to fix the prism 700 on the prism mounting seat 102. Specifically, glue can be first applied to the contact part between the prism 700 and the mounting plate 100 to fix the prism 700 on the upper surface of the mounting plate 100, then the whole device is turned over, the second connecting piece 500 is removed to separate the adjustment part from the mounting plate 100, and then glue is applied to the glue injection hole 103 from the lower surface of the mounting plate 100. Since the bottom surface of the prism 700 contacts the glue injection hole 103, applying glue from the glue injection hole 103 can firmly fix the prism 700 on the mounting plate 100.

[0098] The present disclosure designs an adjustment block array for the installation of a prism array. The adjustment blocks have high-contrast marks on the top and side. The top and side marks of the adjustment blocks are imaged by an object-side telecentric imaging system, and the position and angle of the side mark image of the adjustment block relative to the top mark image are accurately calculated by using an image algorithm to quantify the six-degree-of-freedom errors of the reflecting prism, realizing the high-precision adjustment of the six degrees of freedom of a single reflecting prism. The design of the present disclosure reduces the difficulty of prism adjustment, improves the precision and accuracy of prism adjustment, ensures the consistency of the adjustment of each group of reflecting prism arrays, and helps with the batch adjustment and acceptance of the reflecting prism arrays.

[0099] Note that the above is only a preferred embodiment of the present invention and the technical principles applied. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein. Various obvious changes, re-adjustments, and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, it can also include more other equivalent embodiments, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A prism alignment device, characterized in that, Comprising: A mounting plate (100), on which a plurality of through holes (101) are provided, and a plurality of prism mounting seats (102) are provided around each through hole (101); An alignment member, including an alignment plate (200) and a plurality of alignment blocks (300), the alignment blocks (300) are provided on the alignment plate (200) and correspond to the through holes (101) one by one, the alignment plate (200) is connected to the mounting plate (100), the alignment blocks (300) pass through the through holes (101), a top mark (301) is provided on the top surface of the alignment block (300), and a side mark (302) is provided on the side surface of the alignment block (300); A prism (700) mounted on the prism mounting seat (102) can reflect the side mark (302) so that the top mark (301) and the side mark (302) can be observed above the alignment block (300).

2. The device according to claim 1, wherein The alignment member further includes a first connecting member (400); A plurality of accommodating grooves (201) are provided on the upper surface of the alignment plate (200), the accommodating grooves (201) correspond to the alignment blocks (300) one by one, an alignment block connecting hole (202) is provided in the accommodating groove (201), the alignment block connecting hole (202) penetrates the bottom of the accommodating groove (201) and the lower surface of the alignment plate (200), a connecting groove (303) is provided on the bottom surface of the alignment block (300), the alignment block (300) is accommodated in the accommodating groove (201), and the first connecting member (400) penetrates the alignment block connecting hole (202) and the connecting groove (303) to fixedly connect the alignment block (300) and the alignment plate (200).

3. The device according to claim 2, wherein The through hole (101) penetrates the upper surface and the lower surface of the mounting plate (100), the prism mounting seat (102) is provided on the upper surface of the mounting plate (100), and the alignment plate (200) is closely attached to the lower surface of the mounting plate (100).

4. The device according to any one of claims 1-3, wherein A glue injection hole (103) is provided on the prism mounting seat (102).

5. The device according to claim 1, wherein The prism alignment device further includes a second connecting member (500); A first connecting hole (105) and a first positioning portion (104) are provided on the mounting plate (100), a second connecting hole (204) and a second positioning portion (203) are provided on the alignment plate (200), the first positioning portion (104) matches the second positioning portion (203), and the second connecting member (500) penetrates the second connecting hole (204) and the first connecting hole (105) to fixedly connect the alignment plate (200) and the mounting plate (100).

6. The device according to claim 1, wherein The alignment block (300) is a cube, and side markings (302) are provided on four side surfaces of the cube.

7. The device according to claim 1, wherein A plurality of the through holes (101) are arranged in a rectangular array on the mounting plate (100), and a plurality of the alignment blocks (300) are arranged in a rectangular array on the alignment plate (200).

8. A prism alignment system, characterized in that, Comprising a camera device, a processor, a displacement device, the prism alignment device according to any one of claims 1-7, and a prism (700); The prism (700) is mounted on a prism mounting seat (102) of the prism alignment device, the camera device is disposed above the prism alignment device, and the displacement device is used to drive the prism alignment device and the prism (700) to approach or move away from the camera device along the Z direction, so that the camera device respectively images a top marking (301) of the alignment block (300) and a side marking (302) reflected by the prism (700); The processor is connected to the camera device, and is used to synthesize a top marking image and a side marking image obtained by the camera device into a composite image, and output position relationship data between the top marking (301) and the side marking (302) in the composite image, and the position relationship data is used to guide the position adjustment of the prism (700).

9. A method for prism alignment and adjustment, characterized in that, The method is applied to the prism alignment system according to claim 8, and the method includes: S1. Place the prism on the prism mounting seat of the prism alignment device; S2. Adjust the position between the prism alignment device and the camera device so that the camera device images the top marking of the alignment block of the prism alignment device; obtain a top marking image; S3. Adjust the position between the prism alignment device and the camera device so that the camera device images the side marking of the alignment block reflected by the prism, and obtain a side marking image; S4. The processor synthesizes the top marking image and the side marking image into a composite image, and outputs position relationship data between the top marking and the side marking in the composite image; S5. Adjust the position of the prism according to the position relationship data; S6. Obtain the side marking image again, and return to execute step S4 until the position relationship between the top marking and the side marking in the composite image meets a preset condition, and then determine that the prism adjustment is in place, wherein the preset condition includes: the side edges of the side marking image are parallel to the side edges of the top marking image, and the distance between the side edges of the side marking image and the side edges of the top marking image meets a theoretical design value.

10. The prism alignment method according to claim 9, wherein After the step S6, it further includes: applying glue between the prism and the prism mounting seat to fix the prism on the prism mounting seat.

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