Hybrid five-degree-of-freedom micro-assembly robot

Abstract

The application discloses a hybrid five-degree-of-freedom micro-assembly robot, which comprises a robot base, a five-degree-of-freedom hybrid mechanism and an MCU main control core. The five-degree-of-freedom hybrid mechanism comprises a three-degree-of-freedom motion series mechanism arranged on the robot base and a parallel mechanism arranged on the three-degree-of-freedom motion series mechanism. The three-degree-of-freedom motion series mechanism comprises an X-axis screw slide table, a Z-axis screw slide table and a Y-axis rotary table which are used for moving along the X-axis and Z-axis directions and rotating around the Y-axis, respectively. The parallel mechanism comprises two active translation joints and two passive joints arranged between the two active translation joints, and the passive joints are connected with a robot end effector. The hybrid configuration scheme of the series mechanism and the parallel mechanism is adopted, the advantages of the large stroke of the series mechanism and the compact structure, the strong bearing capacity and the high resolution of the parallel mechanism are utilized, the overall performance of the robot is improved, and the working flexibility, the operation accuracy and the load capacity of the micro-assembly robot are improved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of robots, and particularly relates to a hybrid five-degree-of-freedom micro-assembly robot. BACKGROUND

[0002] With the rapid development of technology, micro-assembly technology plays an important role in the fields of semiconductor manufacturing, microelectronic assembly, precision medical device assembly, etc. In semiconductor manufacturing, micro-assembly technology is used for precise positioning and packaging of chips; in the field of microelectronic assembly, it is used for the assembly of microelectronic components and the assembly of circuit boards; in the field of precision medical devices, micro-assembly technology is used to produce highly precise medical devices and instruments, such as microsurgical instruments, sensors, etc. With the increasing demand for applications, micro-assembly technology faces many challenges, including how to improve the precision and efficiency of assembly, how to achieve complex operations in limited space, and how to meet the compactness requirements of the assembly system for the rapid development of industry, etc.

[0003] Most of the current micro-assembly robots have a mechanism configuration of two major categories: serial mechanism and parallel mechanism (Lu Qian. Key technology research on six-degree-of-freedom hybrid precision positioning platform based on piezoelectric driving[D]. Nanjing University of Aeronautics and Astronautics, 2020.). The advantage of serial mechanism is that the structure is simple, it is easy to intuitively establish the motion equation and the motion range is large, but the inertia of the robot increases and the compactness of the mechanism decreases due to the fixed connection of the motion platform and the drive motor at the end. The relative coupling between the joints of the parallel mechanism makes the design of the parallel mechanism more complex, the establishment of the motion model relatively difficult, and the motion stroke relatively short.

[0004] The control precision of micro-assembly robots is also a major problem in the industry. Although most micro-assembly robots can ensure the accuracy of the motor output shaft, the gap of the mechanical structure, the motor step loss and other problems still affect the operation precision of the end mechanism. With the increase of the degrees of freedom of the mechanical structure, these errors will also accumulate accordingly, thereby reducing the overall operation precision. SUMMARY

[0005] In order to at least solve one of the problems existing in the prior art, the present application provides a hybrid five-degree-of-freedom micro-assembly robot, which adopts a hybrid configuration scheme of serial and parallel mechanisms, takes advantage of the large stroke of serial mechanism, and the structural compactness, high carrying capacity, high resolution and other advantages of parallel mechanism, improves the overall performance of the robot, and improves the working flexibility, operation precision and load capacity of the micro-assembly robot.

[0006] In order to achieve the purpose of the present application, the present application provides a hybrid five-degree-of-freedom micro-assembly robot, which comprises a robot base, a five-degree-of-freedom hybrid mechanism and an MCU main control core,

[0007] The robot base is used to provide a stable support foundation for the whole robot, the five-degree-of-freedom hybrid mechanism comprises a three-degree-of-freedom motion serial mechanism arranged on the robot base and a parallel mechanism arranged on the three-degree-of-freedom motion serial mechanism, the three-degree-of-freedom motion serial mechanism comprises an X-axis screw sliding table, a Z-axis screw sliding table and a Y-axis rotating table for moving along the X-axis and Z-axis directions and rotating around the Y-axis respectively, the X-axis screw sliding table, the Z-axis screw sliding table and the Y-axis rotating table are driven by motors respectively, and the ends of the joints are provided with grating rulers for end feedback.

[0008] The parallel mechanism comprises two active translation joints and two passive joints arranged between the two active translation joints, the passive joints are connected with a robot end effector, and the parallel mechanism is used to realize the translation and rotation of the end joint, wherein the translation degree of freedom in the Y-axis direction is that the two active translation joints of the parallel mechanism move in the same direction to drive the end joint to move, the rotation degree of freedom in the X-axis direction is that the two active translation joints of the parallel mechanism move relatively to drive the end joint to rotate, the active translation joints are driven by motors, and the ends of the driving joints are provided with grating rulers for feedback.

[0009] The MCU main control core is used to send a driving signal to a corresponding motor driver to control the corresponding motor to drive the end to translate, and the motor driver collects an analog signal of the grating ruler encoder to realize closed-loop driving of the active translation joints of the parallel mechanism by taking the analog signal as position feedback.

[0010] Further, in the three-degree-of-freedom motion serial mechanism, the guide rail of the X-axis screw sliding table is fixed to the robot base, the guide rail of the Z-axis screw sliding table is fixed to the workbench of the X-axis screw sliding table through a mechanism support, the screw drives the workbench to realize the translation of the joint in the respective degree of freedom direction, and the Y-axis rotating table is located on the workbench of the Z-axis screw sliding table and rotates the workbench through a motor shaft.

[0011] Further, the mechanism support is in an L shape. The mechanism support is used to connect and support the X-axis and Z-axis serial mechanism to ensure the stability of the robot during movement.

[0012] Further, the parallel mechanism further comprises a parallel mechanism base, the Y-axis rotating table is arranged on the parallel mechanism base, and the parallel mechanism base is fixed to the rotating workbench of the Y-axis rotating table.

[0013] Further, in the three-degree-of-freedom motion serial mechanism, three motors are used as the joint driving of the three-degree-of-freedom motion serial mechanism, and three grating rulers are used as the end feedback of the joints; in the parallel mechanism, two motors are used as the driving of the two active translation joints of the parallel mechanism, and two grating rulers are used as the end feedback of the two active joints of the parallel mechanism.

[0014] As Figure 1The parallel component shown in the figure comprises two active translational joints (6-1, 6-4), two passive joints (6-2, 6-3) and a fixed support, and constitutes a parallel mechanism with a configuration of PRRRP. Specifically, the translational freedom in the Y-axis direction is that the two active joints of the parallel mechanism move in the same direction to drive the end joint to move. The rotational freedom in the X-axis direction is that the two active joints of the parallel mechanism move relatively to drive the end joint to rotate.

[0015] Further, when the series joint is driven, the MCU master core sends a driving signal to the motor driver to control the motor in the three-degree-of-freedom series mechanism to drive the end to translate or rotate, and at the same time, the MCU master core collects the analog signal of the grating ruler encoder in the three-degree-of-freedom series mechanism as position feedback to realize closed-loop driving. When the parallel active joint is driven, the MCU master core sends a driving signal to the motor driver to control the motor in the parallel mechanism to drive the end to translate, and at the same time, the motor driver collects the analog signal of the grating ruler encoder in the parallel mechanism as position feedback to realize closed-loop driving.

[0016] Further, the robot end effector is a micro-operation clamp.

[0017] Further, the robot end effector is a micro-operation clamp is a dispensing head.

[0018] Further, the parallel mechanism comprises two linear motor modules and three end rods, defined as a first linear motor module and a second linear motor module, a first end rod, a second end rod and a third end rod, the first linear motor module and the second linear motor module are oppositely arranged, one end of the first end rod is connected with the first linear motor module through an angular contact ball bearing, two ends of the second end rod are connected with the other end of the first end rod and one end of the third end rod through angular contact ball bearings respectively, and the other end of the third end rod is connected with the output end of the second linear motor module.

[0019] Further, the robot end effector is installed on the second end rod.

[0020] Further, in the hybrid mechanism driving scheme, the series driving component selects a step lead screw sliding table with strong load capacity as the drive; and the parallel driving component adopts two smaller linear motors as the drive, and each driving joint end is matched with a high-precision grating ruler as feedback.

[0021] Further, the series component comprises a lead screw sliding table moving along the X-axis and Z-axis directions and a rotary table rotating around the Y-axis, and constitutes a series mechanism with a configuration of PPR.

[0022] Further, the robot control scheme is divided into a series control scheme and a parallel control scheme. The series control scheme adopts three high-precision stepping motors as the driving of the joints of the series mechanism and three high-precision grating scales as the feedback of the ends of the joints of the series mechanism. The parallel control scheme adopts two high-precision linear motors as the driving of two active joints of the parallel mechanism and two high-precision grating scales as the feedback of the ends of the two active joints of the parallel mechanism. The traditional motor end encoder feedback mode detects the displacement of the motor output end, and cannot effectively detect the end displacement due to mechanical transmission error. In order to realize the accurate closed-loop control of the joints of the robot, the servo control scheme of the motor as the driving and the grating scale as the feedback is adopted.

[0023] Further, the hardware scheme includes an MCU main control core, a communication protocol (including but not limited to CAN, EtherCAT, etc.), a grating scale reading head, a motor driver, a motor encoder and the like electronic elements. When the series joint is driven, the MCU main control core sends a driving signal to the stepping motor driver to control the stepping motor to drive the end to translate / rotate, and at the same time, the main control core collects the analog signal of the grating scale reading head as position feedback to realize closed-loop driving. When the parallel active joint is driven, the main control core sends a driving signal to the linear motor driver to control the linear motor to drive the end to translate, and at the same time, the linear motor driver collects the analog signal of the grating scale reading head as position feedback to realize closed-loop driving.

[0024] Compared with the prior art, the present application has at least the following advantages:

[0025] 1. The hybrid five-degree-of-freedom mechanism design takes into account flexibility and precision: the series part adopts a screw slide as the driving to ensure the movement space, load capacity and control precision of the part. The parallel part is a two-degree-of-freedom parallel mechanism, which adopts a small-size linear motor as the driving to ensure that the part has compact structure, good load capacity and control precision.

[0026] 2. The servo control system realizes high-precision joint closed-loop control: in view of the mechanical transmission error in the traditional motor end encoder feedback mode for end displacement detection, the present application adopts a joint closed-loop control scheme, combines the motor and high-resolution grating scale, and realizes high-precision closed-loop control of the joints of the robot. The end grating scale detects the position feedback of the mechanism in real time, compensates and corrects the movement of the motor, and can effectively improve the positioning accuracy and repeatability of the movement of the joints of the robot, thereby providing reliable accuracy guarantee for micro-assembly tasks. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 A three-dimensional structure schematic diagram of a hybrid five-degree-of-freedom micro-assembly robot as a whole is provided for the embodiments of the present application.

[0028] Figure 2 This is a three-dimensional structural schematic diagram of a hybrid five-degree-of-freedom micro-assembly robot serial mechanism in an embodiment of the present invention.

[0029] Figure 3 This is a three-dimensional structural schematic diagram of a parallel mechanism for a hybrid five-degree-of-freedom micro-assembly robot according to an embodiment of the present invention.

[0030] Figure 4 This is a simplified diagram of the mechanism of a hybrid five-degree-of-freedom micro-assembly robot according to an embodiment of the present invention.

[0031] Figure 5 This is a hardware connection diagram of a hybrid five-degree-of-freedom micro-assembly robot according to an embodiment of the present invention.

[0032] Figure 6 This is a three-dimensional structural schematic diagram of a hybrid five-degree-of-freedom micro-assembly robot embodiment 3 of the present invention.

[0033] Figure 7 This is a three-dimensional structural schematic diagram of Embodiment 4 of a hybrid five-degree-of-freedom micro-assembly robot according to an embodiment of the present invention. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] Example 1

[0036] like Figure 1 As shown, the present invention provides a hybrid five-degree-of-freedom micro-assembly robot, including a robot base 1, a three-degree-of-freedom motion serial mechanism, a two-degree-of-freedom parallel mechanism with a PRRRP configuration, and a robot end effector. The robot base 1 is used to provide a stable support foundation for the entire robot.

[0037] The three-degree-of-freedom motion series mechanism comprises an X-axis screw slide 2, a Z-axis screw slide 4 and a Y-axis rotary table 5, and is configured as a PPR series mechanism. The X-axis screw slide 2 is fixedly arranged on a robot base 1. The Z-axis screw slide 4 is connected to an end workbench of the X-axis screw slide 2 through a mechanism support 3. The mechanism support 3 firmly connects and supports the two series structures of the X-axis screw slide 2 and the Z-axis screw slide 4, and ensures the stability during the robot movement. The Y-axis rotary table 5 is fixed to the end workbench of the Z-axis screw slide 4. A parallel mechanism 6 is fixed to a rotary workbench of the Y-axis step rotary table 5 through two parallel mechanism bases. A robot end effector is fixed to an end joint of the parallel mechanism 6. The parallel mechanism 6 comprises two active translation joints (6-1, 6-4) and two passive joints (6-2, 6-3) between the two active translation joints (6-1, 6-4). The translation degree of freedom in the Y-axis direction is the movement of the end joint driven by the coordinated movement of the two active translation joints of the parallel mechanism. The rotation degree of freedom in the X-axis direction is the rotation of the end joint driven by the relative movement of the two active translation joints of the parallel mechanism.

[0038] In the embodiment, the driving part comprises three high-precision stepping motors as the joint driving of the three-degree-of-freedom motion series mechanism and two high-precision linear motors as the active joint driving of the two-degree-of-freedom parallel mechanism. The feedback part comprises five end gratings arranged on the active joints for displacement detection. The hardware part comprises an MCU control core, a CAN, a grating reading head (grating encoder), a motor driver, a motor encoder and other electronic elements.

[0039] In the embodiment, the mechanism support 3 is in an L shape.

[0040] Embodiment 2

[0041] As shown in Figure 2 the three-degree-of-freedom motion series mechanism of the embodiment comprises three stepping screw slides, namely an X-axis stepping screw slide 1-2, a Z-axis stepping screw slide 1-4 and a Y-axis stepping rotary table 1-5. The end moving workbench of the X-axis stepping screw slide 1-2 is connected to the end of the screw rod of the X-axis stepping screw slide 1-2. The screw slide guide is used as a fixed end and is connected to the robot base 1-1 to keep fixed. The end moving workbench of the Z-axis stepping screw slide 1-4 is connected to the end of the screw rod of the Z-axis stepping screw slide 1-4. The screw slide guide is used as a fixed end and is connected to the end moving workbench of the X-axis stepping screw slide 1-2 to keep fixed. The rotary workbench of the Y-axis stepping rotary table 1-5 is connected to the output shaft of the motor of the Y-axis stepping rotary table 1-5. The fixed end of the Y-axis stepping rotary table is connected to the end moving workbench of the Z-axis stepping screw slide 1-4 to keep fixed. The parallel mechanism is arranged on the rotary workbench of the Y-axis stepping rotary table 1-5.

[0042] As shown in Figure 3As shown, the parallel mechanism of the embodiment includes two parallel mechanism bases 2-1-1, 2-1-2, two linear motor modules 2-2-1, 2-2-2, three angular contact ball bearings 2-3-1, 2-3-2, 2-3-3, and three end rods 2-4-1, 2-4-2, 2-4-3. The two parallel mechanism bases 2-1-1, 2-1-2 are stacked and the parallel mechanism is fixed to the work surface of the three-degree-of-freedom motion series mechanism through the two parallel mechanism bases. The parallel mechanism bases are used to fix and install the two linear motor modules, i.e., the two linear motor modules 2-2-1, 2-2-2 are arranged on the two parallel mechanism bases 2-1-1, respectively. The two linear motor modules serve as the driving mechanism of the parallel mechanism and are used to drive the passive end rods. The connection relationship between the rod mechanisms is as follows: the first end rod 2-4-1 is connected to the first linear motor module 2-2-1 through the angular contact ball bearing 2-3-1, the second end rod 2-4-2 is connected to the first end rod 2-4-1 through the angular contact ball bearing 2-3-2, and one end of the third end rod 2-4-3 is connected to the second end rod 2-4-2 through the angular contact ball bearing 2-3-3, and the other end of the third end rod 2-4-3 is fixedly connected to the second linear motor module 2-2-2. The first linear motor module 2-2-1 serves as the driving mechanism and drives the first end rod 2-4-1 through the angular contact ball bearing 2-3-1, and the first end rod 2-4-1 drives the second end rod 2-4-2 through the angular contact ball bearing 2-3-2. Similarly, the second linear motor module 2-2-2 serves as the driving mechanism and is fixedly connected to the third end rod 2-4-3, and the third end rod 2-4-3 drives the second end rod 2-4-2 through the angular contact ball bearing 2-3-3. In the embodiment, the second end rod 2-4-2 is the mounting position of the micro-operation clamp, which is mounted through an adapter plate to achieve the clamping and assembly of precision parts.

[0043] The movement of the micro-operation clamp at the end of the mechanism is transmitted and output by the above five joint movements. The three joints of the three-degree-of-freedom motion series mechanism are independently driven by the respective stepping screw slides / stepping rotary tables to realize X-axis translation, Z-axis translation, and Y-axis rotation. The two driving translation joints of the parallel mechanism are driven by the two linear motors to realize the translation of the driving joints and thus drive the Y-axis translation and X-axis rotation of the micro-operation clamp at the end.

[0044] The hardware system of the robot is as follows Figure 5As shown, the system includes an MCU main control core, a CAN bus, an ADC acquisition unit, a linear encoder reading head, a motor driver, and a motor encoder. The MCU main control core sends drive signals to the stepper motor driver, controlling the stepper motor to drive the end effector to translate / rotate. Simultaneously, the MCU main control core uses the ADC to acquire the analog signal from the linear encoder reading head, using it as position feedback to achieve closed-loop drive of each joint in the three-degree-of-freedom motion series mechanism. The MCU main control core also sends drive signals to the motor driver, controlling the motor to drive the end effector to translate. Simultaneously, the motor driver acquires the analog signal from the linear encoder reading head, using it as position feedback to achieve closed-loop drive of the active joints in the parallel mechanism.

[0045] Example 3

[0046] like Figure 6 As shown, the three-degree-of-freedom motion series mechanism of this embodiment includes three stepper screw slides: an X-axis stepper screw slide 4-2, a Z-axis stepper screw slide 4-4, and a Y-axis stepper rotary table 4-5. The end movable worktable of the X-axis stepper screw slide 4-2 is connected to the end of its own screw, and the screw slide guide rail serves as a fixed end connected to the robot base 4-1 for fixation. The end movable worktable of the Z-axis stepper screw slide 4-4 is connected to the end of its own screw, and the screw slide guide rail serves as a fixed end connected to the end movable worktable of the X-axis stepper screw slide 4-2 for fixation. The rotary worktable of the Y-axis stepper rotary table 4-5 is connected to its own motor output shaft, and the fixed end of the Y-axis stepper rotary table is connected to the end movable worktable of the Z-axis stepper screw slide 4-4 for fixation. A parallel mechanism 4-6 is disposed on the rotary worktable of the Y-axis stepper rotary table 4-5.

[0047] The micro-operation clamp 4-7 is mounted on the parallel mechanism 4-6.

[0048] Example 4

[0049] like Figure 7 As shown, the three-degree-of-freedom motion series mechanism of this embodiment includes three stepper screw slides: an X-axis stepper screw slide 5-2, a Z-axis stepper screw slide 5-4, and a Y-axis stepper rotary table 5-5. The end movable worktable of the X-axis stepper screw slide 5-2 is connected to the end of its own screw, and the screw slide guide rail serves as a fixed end connected to the robot base 5-1 for fixation. The end movable worktable of the Z-axis stepper screw slide 5-4 is connected to the end of its own screw, and the screw slide guide rail serves as a fixed end connected to the end movable worktable of the X-axis stepper screw slide 5-2 for fixation. The rotary worktable of the Y-axis stepper rotary table 5-5 is connected to the output shaft of its own motor, and the fixed end of the Y-axis stepper rotary table is connected to the end movable worktable of the Z-axis stepper screw slide 5-4 for fixation.

[0050] Different from the micro-operation clamps 4-7 in the embodiment 3, the robot end effector in the present embodiment is a dispensing head, i.e. a dispensing head 5-7 is arranged on the end joint of the parallel mechanism 6.

[0051] The present embodiment increases the dispensing head as a micro-assembly executor on the basis of the end motion of the hybrid serial-parallel five-degree-of-freedom micro-assembly robot, and can realize the five-degree-of-freedom high-precision translation and rotation control of the end dispensing head.

[0052] The hardware design part in the foregoing embodiments of the present application provides a grating ruler high-precision end feedback system for each joint shaft of the micro-assembly robot to realize the full closed-loop control of the joint, and improves the absolute control precision of the micro-assembly robot.

[0053] The hybrid structure design in the foregoing embodiments of the present application improves the working flexibility, operation precision and load capacity of the micro-assembly robot. The robot provided in the foregoing embodiments adopts a hybrid scheme, including a serial open chain composed of two translation joints and one rotation joint and a parallel closed chain with a PRRRP configuration, and can realize the three-degree-of-freedom translation motion in space and the two-degree-of-freedom rotation motion. In the control scheme, the driving precision, load capacity and size conditions are comprehensively considered, the serial translation component selects a step lead screw sliding table with strong load capacity as the drive, the serial rotation component selects a step rotation displacement platform with strong load capacity as the drive, and the parallel component selects two smaller linear motors as the drive, and each driving joint end is matched with a high-precision grating ruler as the feedback. In the hardware scheme, an MCU master control core is selected for signal acquisition and processing and control of peripheral devices, and the process is as follows: the MCU master control core acquires the grating ruler feedback displacement signal at the end of the serial mechanism joint in real time, and adjusts the driving joint speed to realize the closed-loop driving of the serial mechanism; at the same time, the target position information is sent to the servo driver of the parallel mechanism active joint, the driver acquires the displacement signal of the grating ruler feedback at the joint end in real time, and realizes the closed-loop driving of the parallel mechanism.

[0054] In the above embodiments, the description of each embodiment has its own emphasis, and the parts not described in detail in a certain embodiment can be referred to the related description of other embodiments.

[0055] The above embodiments are the preferred embodiments of the present application, but the embodiments of the present application are not limited by the above embodiments, and any changes, modifications, substitutions, combinations and simplifications made without departing from the spirit and principles of the present application shall be equivalent replacement modes and shall be included in the protection scope of the present application.

Claims

1. A hybrid series-parallel five-degree-of-freedom micro-assembly robot, characterized in that, It comprises a robot base, a five-degree-of-freedom hybrid mechanism and an MCU main control core, The five-degree-of-freedom hybrid mechanism comprises a three-degree-of-freedom motion serial mechanism arranged on the robot base and a parallel mechanism arranged on the three-degree-of-freedom motion serial mechanism, the three-degree-of-freedom motion serial mechanism comprises an X-axis screw slide table for moving along the X-axis direction, a Z-axis screw slide table for moving along the Z-axis direction and a Y-axis rotary table for rotating around the Y-axis, the X-axis screw slide table, the Z-axis screw slide table and the Y-axis rotary table are all driven by motors, and the translation worktable surface of the X-axis screw slide table, the translation worktable surface of the Z-axis screw slide table and the rotary worktable surface of the Y-axis rotary table are all provided with grating rulers for output feedback. The parallel mechanism comprises two active translation joints and two passive joints arranged between the two active translation joints, the passive joints are connectable with a robot end effector, and the parallel mechanism is used for realizing the translation and rotation movement of the robot end effector, wherein the translation degree of freedom in the Y-axis direction is that the two active translation joints of the parallel mechanism move in the same direction to drive the robot end effector to move, the rotation degree of freedom in the X-axis direction is that the two active translation joints of the parallel mechanism move relatively to drive the robot end effector to rotate, the active translation joints are driven by motors, and the ends of the active translation joints are all provided with grating rulers for feedback. When the three-degree-of-freedom motion serial mechanism is driven, the MCU main control core sends a driving signal to the motor driver to control the motor in the three-degree-of-freedom motion serial mechanism to drive the output end to translate or rotate, and simultaneously the MCU main control core collects the analog signal of the grating ruler encoder in the three-degree-of-freedom motion serial mechanism as position feedback to realize closed-loop driving, when the active translation joint of the parallel mechanism is driven, the MCU main control core sends a driving signal to the motor driver to control the motor in the parallel mechanism to drive the robot end effector to translate, and simultaneously the motor driver collects the analog signal of the grating ruler encoder in the parallel mechanism as position feedback to realize closed-loop driving.

2. The hybrid five-degree-of-freedom micro-assembly robot according to claim 1, wherein, In the three-degree-of-freedom motion serial mechanism, the guide rail of the X-axis screw slide table is fixed to the robot base, the guide rail of the Z-axis screw slide table is fixed to the translation worktable surface of the X-axis screw slide table through a mechanism support, the screw drives the translation worktable surface to realize the translation movement of the translation worktable surfaces on the X-axis screw slide table and the Z-axis screw slide table along their respective degrees of freedom, and the Y-axis rotary table is located on the translation worktable surface of the Z-axis screw slide table and drives the rotary worktable surface to rotate through a motor shaft.

3. The hybrid five-degree-of-freedom micro-assembly robot according to claim 2, wherein, The mechanism support is in an L shape.

4. The hybrid five-degree-of-freedom micro-assembly robot of claim 1, wherein, The parallel mechanism further comprises a parallel mechanism base, the Y-axis rotary table is arranged on the translation worktable surface of the Z-axis screw slide table, and the parallel mechanism base is fixed to the rotary worktable surface of the Y-axis rotary table.

5. The hybrid five-degree-of-freedom micro-assembly robot of claim 1, wherein, In the three-degree-of-freedom motion serial mechanism, three motors are used as the driving of the translation worktable surface of the X-axis screw slide table, the translation worktable surface of the Z-axis screw slide table and the rotary worktable surface of the Y-axis rotary table, and three grating rulers are used as the output feedback, and in the parallel mechanism, two motors are used as the driving of the two active translation joints of the parallel mechanism, and two grating rulers are used as the feedback at the ends of the two active translation joints of the parallel mechanism.

6. The hybrid five-degree-of-freedom micro-assembly robot of claim 1, wherein, The robot end effector is a micro-operation clamp.

7. The hybrid five-degree-of-freedom micro-assembly robot of claim 1, wherein, The robot end effector is a dispensing head.

8. The hybrid five-DOF micro-assembly robot according to any one of claims 1-7, wherein, The parallel mechanism comprises two linear motor modules and three end rods, defined as a first linear motor module and a second linear motor module, a first end rod, a second end rod and a third end rod, the first linear motor module and the second linear motor module are oppositely arranged, one end of the first end rod is connected with the first linear motor module through an angular contact ball bearing, two ends of the second end rod are respectively connected with the other end of the first end rod and one end of the third end rod through angular contact ball bearings, the other end of the third end rod is connected with the output end of the second linear motor module, two active translation joints are formed through the connection of the first linear motor module and the first end rod and the connection of the second linear motor module and the third end rod, two passive joints are formed through the connection between the first end rod and the second end rod and the connection between the second end rod and the third end rod.

9. The hybrid five-degree-of-freedom micro-assembly robot according to claim 8, wherein, The robot end effector is mounted on the second end rod.

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