A peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling and its preparation method and drive control method

Abstract

The present invention relates to the field of micro-nanorobotics, and in particular to a peanut-shaped micro-nanorobotic device driven by optical / electrical / magnetic coupling, and its preparation method and drive control method. The method comprises the following steps: S1, mixing a ferric chloride solution with a sodium hydroxide solution; S2, heating the ferric hydroxide colloid to obtain an iron oxide peanut-shaped micro-nanorobotic device; and S3, sputtering a 60-80 nanometer thick gold layer on the surface of the iron oxide peanut-shaped micro-nanorobotic device to obtain an optical / electrical / magnetic coupling driven peanut-shaped micro-nanorobotic device. The drive control method comprises the following steps: the micro-nanorobotic device can be driven by visible light, an electric field, or a magnetic field. The speed can be controlled by adjusting the light intensity or hydrogen peroxide concentration, the speed can be controlled by adjusting the electric field intensity, and the direction can be controlled by adjusting the electric field frequency. The direction can be controlled by adjusting the magnetic field direction. The present invention can be driven by optical / electrical / magnetic fields, thereby achieving effective movement in complex and changing practical application environments.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano robots, and in particular to an optical / electrical / magnetic coupling driven peanut-shaped micro-nano robot and a preparation method and a drive control method thereof. Background Art

[0002] Micro-nano robots are small, high-thrust-to-weight ratio, highly controllable, and highly capable micro- and nano-actuators. They can convert other forms of energy into mechanical energy for their own motion, enabling precise movement and complex functions within tiny environments. However, existing experiments involving micro-nano robots are mostly conducted in laboratory hydrostatic environments, where the environmental structure is relatively simple and the physicochemical characteristics of the environment are relatively stable. Furthermore, most existing micro-nano robots rely on a single chemical or physical field as their energy source, resulting in weak driving capability, a single control method, and poor control accuracy. In contrast, in actual applications, micro-nano robots often face complex and ever-changing environments characterized by complex structures, high fluid flow rates and viscosities, and high interfacial tension. Therefore, existing micro-nano robots struggle to meet the demands of their application in complex and ever-changing real-world environments, significantly limiting their application in fields such as biomedicine, targeted drug delivery, and environmental protection. Therefore, there is an urgent need to propose a new multi-field coupling driven micro-nano robot and its preparation and drive control method, which can couple the advantages of multiple external physical fields, overcome the shortcomings of existing single-field driven micro-nano robots, improve the driving ability and controllability of existing micro-nano robots, enhance the adaptability of micro-nano robots to complex application environments, realize their effective movement in complex and changeable actual application environments, and broaden the practical application scope of micro-nano robots. Summary of the Invention

[0003] The purpose of the present invention is to provide a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling and its preparation method and drive control method. The micro-nano robot can be driven by optical / electrical / magnetic fields, thereby achieving effective movement in complex and changeable practical application environments.

[0004] The purpose of the present invention is achieved through the following technical solutions:

[0005] A method for preparing a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling includes the following steps:

[0006] S1, taking ferric chloride solution and sodium hydroxide solution and mixing them to obtain ferric hydroxide colloidal solution;

[0007] S2, heating the iron hydroxide colloidal solution to obtain an iron oxide peanut-shaped micro-nano robot;

[0008] S3. Using the magnetron sputtering method, a gold layer of 60-80 nanometers, preferably 80 nanometers thick, is sputtered on the surface of the iron oxide peanut-shaped micro-nano robot to obtain an optical / electrical / magnetic coupling driven peanut-shaped micro-nano robot.

[0009] Preferably, the step S1 is specifically to slowly dropwise add 90 mL of 5 mol / L sodium hydroxide solution into 100 mL of 2 mol / L ferric chloride solution, and stir for 5-10 minutes, preferably 10 minutes.

[0010] Preferably, step S2 is specifically to place the ferric hydroxide colloidal solution in a muffle furnace and heat it at 95-100° C., preferably 100° C. for 8-10 days, preferably 10 days.

[0011] Preferably, after the heating in step S2 is completed, the obtained solution is centrifuged and washed three times with anhydrous ethanol, and then the obtained solution is centrifuged and washed three times with deionized water. The obtained solution is placed in a drying oven at 70-80°C, preferably 80°C, and dried for 10-12 hours, preferably 12 hours, to obtain an iron oxide peanut-shaped micro-nano robot.

[0012] Preferably, step S3 is specifically to dissolve the iron oxide peanut-shaped micro-nano robot in anhydrous ethanol, ultrasonically treat the solution for 3 minutes to uniformly disperse the micro-nano robot in anhydrous ethanol, dropwise add the dispersed solution to the surface of the glass sheet to make it evenly diffuse and naturally evaporate and dry in the air, place the dried glass sheet in a magnetron sputtering device, and sputter a 60-80 nanometer, preferably 80 nanometer thick gold layer at a vacuum degree of 0.1 Pa and a power of 60W.

[0013] A peanut-shaped micro-nano robot driven by light / electricity / magnetism coupling is prepared using a method for preparing a peanut-shaped micro-nano robot driven by light / electricity / magnetism coupling.

[0014] The driving control method of the peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling is described, and the micro-nano robot can be driven by visible light or electric field or magnetic field.

[0015] The driving control method of the peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling can control the movement speed of the micro-nano robot by adjusting the light intensity or hydrogen peroxide concentration.

[0016] The driving control method of the peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling can control the movement speed of the micro-nano robot by adjusting the electric field intensity, and can control the movement direction of the micro-nano robot by adjusting the electric field frequency.

[0017] The driving control method of the peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling can control the movement direction of the robot by adjusting the direction of the magnetic field.

[0018] Beneficial effects of the present invention:

[0019] The proposed peanut-shaped micro-nano robot is composed of metal material gold and dielectric material iron oxide. It has photocatalytic properties, paramagnetism and material asymmetry. It can respond to external light field, magnetic field and electric field stimulation and exhibit movement behavior; the micro-nano robot can move under the action of the coupling field. Compared with the method of relying on a single external physical field for driving, the movement speed of the micro-nano robot under the coupling field is greater than the simple superposition of the single field driving speed, and the movement speed is significantly improved. At the same time, the movement of the micro-nano robot is controllable; by changing the characteristic parameters of the coupling field such as electric field strength, electric field frequency, light field intensity, and magnetic field direction, the movement speed and direction of the micro-nano robot can be precisely controlled. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is the scanning electron microscope image and energy spectrum of the peanut-shaped micro-nano robot;

[0021] Figure 2 This is the absorption / diffuse reflection test result of the peanut-shaped micro-nano robot;

[0022] Figure 3 This is a diagram showing the components of the drive and control device for a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling;

[0023] Figure 4 Schematic diagram of the driving control of the peanut-shaped micro-nano robot under light field and electric field;

[0024] Figure 5 This is a diagram of the driving control experiment of the peanut-shaped micro-nano robot under the optical / magnetic coupling field;

[0025] Figure 6 This is a diagram of the driving control experiment of the peanut-shaped micro-nano robot under the electric / magnetic coupling field;

[0026] Figure 7 This is a diagram of the driving control experiment of the peanut-shaped micro-nano robot under the optical / electrical / magnetic coupling field;

[0027] Figure 8 The motion velocity measurement characterization of peanut-shaped micro-nano robot in single field and coupled field.

[0028] In the picture:

[0029] 1-Microscope; 2-Borosilicate glass sheet; 3-AC signal source; 4-Light source; 5-Indium tin oxide coating; 6-Polyimide patch; 7-Micro-nano robot experimental area; 8-Helmholtz coil. DETAILED DESCRIPTION

[0030] The preparation method of the peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling is described in detail:

[0031] Example 1:

[0032] A method for preparing a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling includes the following steps:

[0033] S1. Mixing a ferric chloride solution and a sodium hydroxide solution to react, to obtain a ferric hydroxide colloidal solution; specifically, slowly adding 90 mL of a 5 mol / L sodium hydroxide solution to 100 mL of a 2 mol / L ferric chloride solution, and stirring for 10 minutes.

[0034] S2. Heat the iron hydroxide colloidal solution to obtain an iron oxide peanut-shaped micro-nano robot. Specifically, the iron hydroxide colloidal solution is heated in a muffle furnace at 100°C for 10 days. After heating, the resulting solution is centrifuged and washed three times with anhydrous ethanol, then centrifuged and washed three times with deionized water, and then dried in a drying oven at 80°C for 12 hours to obtain the iron oxide peanut-shaped micro-nano robot.

[0035] S3. Using magnetron sputtering, a gold layer is sputtered onto the surface of the iron oxide peanut-shaped micro-nanorobot to obtain an optically / electrically / magnetically coupled driven peanut-shaped micro-nanorobot. Specifically, the iron oxide peanut-shaped micro-nanorobot is dissolved in anhydrous ethanol. The solution is ultrasonically treated for 3 minutes to uniformly disperse the micro-nanorobot in the anhydrous ethanol. The dispersed solution is then dripped onto the surface of a glass slide to allow it to spread evenly and then naturally evaporate and dry in air. The dried glass slide is then placed in a magnetron sputtering device and sputtered with an 80-nanometer-thick gold layer at a vacuum of 0.1 Pa and a power of 60 W.

[0036] Example 2:

[0037] A method for preparing a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling includes the following steps:

[0038] S1. Mixing a ferric chloride solution and a sodium hydroxide solution to react, to obtain a ferric hydroxide colloidal solution; specifically, slowly adding 90 mL of a 5 mol / L sodium hydroxide solution to 100 mL of a 2 mol / L ferric chloride solution, and stirring for 8 minutes.

[0039] S2. Heat the iron hydroxide colloidal solution to obtain an iron oxide peanut-shaped micro-nano robot. Specifically, the iron hydroxide colloidal solution is heated in a muffle furnace at 98°C for 9 days. After heating, the resulting solution is centrifuged and washed three times with anhydrous ethanol, then centrifuged and washed three times with deionized water, and then dried in a drying oven at 75°C for 11 hours to obtain the iron oxide peanut-shaped micro-nano robot.

[0040] S3. Using magnetron sputtering, a gold layer is sputtered onto the surface of an iron oxide peanut-shaped micro-nanorobot to obtain an optically / electrically / magnetically coupled driven peanut-shaped micro-nanorobot. Specifically, the iron oxide peanut-shaped micro-nanorobot is dissolved in anhydrous ethanol. The solution is ultrasonically treated for 3 minutes to evenly disperse the micro-nanorobot in the anhydrous ethanol. The dispersed solution is then dripped onto the surface of a glass slide to allow it to spread evenly and then naturally evaporate and dry in air. The dried glass slide is then placed in a magnetron sputtering device and a 70-nanometer-thick gold layer is sputtered at a vacuum of 0.1 Pa and a power of 60 W.

[0041] Example 3:

[0042] A method for preparing a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling includes the following steps:

[0043] S1. Mixing a ferric chloride solution and a sodium hydroxide solution to react, to obtain a ferric hydroxide colloidal solution; specifically, slowly adding 90 mL of a 5 mol / L sodium hydroxide solution to 100 mL of a 2 mol / L ferric chloride solution, and stirring for 5 minutes.

[0044] S2. Heat the iron hydroxide colloidal solution to obtain an iron oxide peanut-shaped micro-nano robot. Specifically, heat the iron hydroxide colloidal solution at 95°C in a muffle furnace for 8 days. After heating, the resulting solution is centrifuged and washed three times with anhydrous ethanol, then centrifuged and washed three times with deionized water, and then dried in a drying oven at 70°C for 10 hours to obtain the iron oxide peanut-shaped micro-nano robot.

[0045] S3. Using magnetron sputtering, a gold layer is sputtered onto the surface of the iron oxide peanut-shaped micro-nanorobot to obtain an optically / electrically / magnetically coupled driven peanut-shaped micro-nanorobot. Specifically, the iron oxide peanut-shaped micro-nanorobot is dissolved in anhydrous ethanol. The solution is ultrasonically treated for 3 minutes to evenly disperse the micro-nanorobot in the anhydrous ethanol. The dispersed solution is then dripped onto the surface of a glass slide to allow it to spread evenly and then naturally evaporate and dry in air. The dried glass slide is then placed in a magnetron sputtering apparatus and a 60-nanometer-thick gold layer is sputtered at a vacuum of 0.1 Pa and a power of 60 W.

[0046] In Examples 1 to 3, the optical / electrical / magnetic coupling driven peanut-shaped micro-nano robot prepared was characterized using a scanning electron microscope and an energy dispersive spectrometer. The characterization results are shown in FIG. Figure 1 As shown in the analysis and characterization results, it can be seen that the micro-nano robot is made of iron oxide material as a whole, and a gold layer is deposited on half of the surface, forming an asymmetric material structure. The absorption / diffuse reflectance spectrum of the prepared peanut-shaped micro-nano robot was tested using a spectrophotometer, as shown in the figure below. Figure 2Analysis and test results show that the peanut-shaped micro-nano robot can effectively absorb ultraviolet and visible light with a wavelength less than 561 nanometers. Further analysis and test results show that the band gap width of the prepared peanut-shaped micro-nano robot is about 2.0eV.

[0047] Furthermore, the driving control device of the peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling is described in detail:

[0048] A driving control device for a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling mainly consists of a microscope, a light source, an electric field generator, and a magnetic field generator. The electric field generator is composed of borosilicate glass coated with indium tin oxide, a polyimide patch, and an AC signal source. Figure 3 As shown in the figure, the borosilicate glass surface is coated with a 200nm thick indium tin oxide coating, which serves as a conductive layer. A 20kHz, 10V sinusoidal signal is generated by an AC signal source and input into the indium tin oxide coating of the borosilicate glass, generating a spatial AC electric field within the experimental area. A cylindrical hole with a diameter of 3mm is perforated in an 80μm-thick polyimide patch, separating the two electrodes and serving as the experimental area for the micro-nano robot. The magnetic field generator utilizes two sets of Helmholtz coils. A signal generator generates a 4V DC signal, which is amplified fourfold by a power amplifier and then input into the Helmholtz coils as a signal source. By controlling the relative amplitudes of the signals input to the two sets of Helmholtz coils, a uniform magnetic field can be generated in any direction within a plane. A 475nm wavelength light source provides the optical field conditions for the micro-nano robot's optical actuation. Observation is performed using a microscope.

[0049] Furthermore, the driving control method of the peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling is described in detail:

[0050] The optical / electrical / magnetic coupling driven peanut-shaped micro-nano robot proposed in the present invention can simultaneously respond to external light field, electric field and magnetic field stimulation and exhibit motion behavior. A driving and control method for an optical / electrical / magnetic field coupled driven peanut-shaped micro-nano robot is as follows: Figure 4 As shown:

[0051] First, at an intensity of 15mW / mm 2Under irradiation with visible light at a wavelength of 475 nm, the microrobot exhibited motion in a 5% hydrogen peroxide solution. Electrons in the valence band on the iron oxide side of the microrobot absorbed the energy of the photon and transitioned to the conduction band, where they flowed further into the gold side. This ultimately caused an asymmetric disproportionation reaction of hydrogen peroxide on the surfaces of the two materials. Oxidation occurred on the iron oxide side, generating hydrogen ions; reduction occurred on the gold side, consuming hydrogen ions. This resulted in an asymmetric distribution of hydrogen ions around the microrobot and formed an ion concentration gradient. This asymmetric distribution of hydrogen ions generated a self-generated electric field, driving the negatively charged peanut-shaped microrobot toward the iron oxide side. The microrobot's speed could be controlled by varying the light intensity and hydrogen peroxide concentration. The microrobot's speed increased with increasing light intensity and hydrogen peroxide concentration.

[0052] Secondly, under the influence of an external AC electric field at 20kHz and 10V, the microrobot becomes polarized in the electric field, generating induced charges within the electric double layer surrounding the microrobot. The uneven distribution of induced charges drives the fluid around the microrobot, forming an electroosmotic flow. Furthermore, due to the significant difference in the dielectric constants of the two materials comprising the microrobot, the polarizability under the electric field also differs significantly, ultimately forming an asymmetric electroosmotic flow around the microrobot, pushing it toward the iron oxide side. By varying the amplitude and frequency of the applied AC electric field, the speed and direction of the microrobot's movement can be controlled. The microrobot's speed increases with increasing amplitude of the applied electric field, while its direction of movement is determined by the frequency of the applied electric field. When the applied electric field frequency is above 100kHz, the microrobot exhibits counterclockwise motion; when the applied electric field frequency is below 100kHz, the microrobot exhibits clockwise motion.

[0053] Finally, a 4V DC signal is applied to the two sets of Helmholtz coils and amplified fourfold. Because the peanut-shaped microrobot is made of paramagnetic iron oxide, it is magnetized by the magnetic field, generating an induced magnetic dipole moment within it. The microrobot, subjected to the magnetic torque in the magnetic field, exhibits steering behavior until the induced magnetic dipole moment within it becomes parallel to the external magnetic field. By controlling the relative amplitudes of the electrical signals input to the two sets of Helmholtz coils, and thus the direction of the applied magnetic field, the microrobot's motion can be controlled.

[0054] Further Figure 5 As shown in the figure, the motion ability and motion controllability of the peanut-shaped micro-nano robot under light / magnetic field are verified by experiments:

[0055] When the light field is turned on, the micro-nano robot quickly transitions from a stationary state to a moving state. By varying the external light intensity and the concentration of hydrogen peroxide in the solution, the robot's speed can be controlled. Furthermore, because the micro-nano robot is paramagnetic, the direction and trajectory of the robot's movement can be precisely controlled by utilizing an external magnetic field and adjusting its direction.

[0056] Further Figure 6 As shown in the figure, the motion ability and motion controllability of the peanut-shaped micro-nano robot under electric / magnetic fields were verified by experiments:

[0057] When the AC electric field is activated, the micro-nano robot rapidly switches from a horizontally collapsed state to an upright state, exhibiting motion. By varying the strength and frequency of the externally applied electric field, the speed and direction of the micro-nano robot's motion can be controlled. Furthermore, because the micro-nano robot exhibits paramagnetism, the direction and trajectory of its motion can be precisely controlled by adjusting the direction of the external magnetic field.

[0058] Further Figure 7 As shown, the motion ability and motion controllability of the peanut-shaped micro-nano robot under the optical / electrical / magnetic coupling field are verified:

[0059] Under the influence of the coupling field, the micro-nano robot quickly switches from a horizontal state to an upright state, and exhibits significantly increased speed under the influence of the coupling field. Furthermore, by controlling the direction of the external magnetic field, the direction of the micro-nano robot's movement can be precisely controlled.

[0060] Further:

[0061] Under the action of the light field, the movement of the peanut-shaped micro-nano robot depends on the direction of the interface between the metal and dielectric materials that make up the micro-nano robot. When the normal direction of the interface is parallel to the substrate, the micro-nano robot has the best movement behavior, and its instantaneous movement speed will reach the maximum value at this time. However, due to the small size of the micro-nano robot itself and the strong Brownian motion, the normal direction of the interface is in an unstable dynamic change state during its movement, which limits the improvement of the movement speed of the micro-nano robot. Under the action of the electric field, the peanut-shaped micro-nano robot undergoes polarization and is subjected to electric torque, so that the interface of the micro-nano robot is always parallel to the direction of the external electric field, that is, the normal direction of the interface is always parallel to the substrate. Therefore, under the coupling of the light field and the electric field, the movement speed of the micro-nano robot will be significantly improved, which is not equal to the simple superposition of the movement speed under a single field, such as Figure 8The average speed of the micro-nano robot in the optical field is about 7 μm / s, the average speed in the electric field is about 10 μm / s, and the average speed in the optical / electric coupled field is about 23 μm / s, proving that the coupled field effect can achieve force amplification and speed increase of the micro-nano robot.

[0062] The basic principles of the present invention are:

[0063] The fabrication process for a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling consists of two main steps. First, peanut-shaped iron oxide particles are chemically prepared. Second, a gold layer is deposited on the surface of the iron oxide particles using magnetron sputtering. Finally, a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling with material asymmetry is obtained.

[0064] A drive control device for a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling consists primarily of a microscope, a light source, an electric field generator, and a magnetic field generator. The electric field generator consists of borosilicate glass coated with indium tin oxide (ITO), a polyimide patch, and an AC signal source. The ITO-coated borosilicate glass serves as the electrode for generating the electric field. The AC signal source generates a sinusoidal signal, which is input into the ITO coating of the borosilicate glass, ultimately generating a uniform AC electric field between the two glass sheets. The polyimide patch separates the two electrodes and contains a cylindrical hole that serves as the experimental area for the micro-nano robot. The magnetic field generator utilizes two sets of Helmholtz coils. A signal generator generates a DC signal, which is amplified by a power amplifier and then input into the Helmholtz coils as a signal source, generating a uniform magnetic field in any direction within a plane. The light source provides the optical field conditions for the optical drive of the micro-nano robot. Observation is performed using a microscope.

[0065] Because the micro-nano robot's asymmetric structure, composed of a conductive material, gold, and a dielectric material, iron oxide, creates a moving behavior under the influence of an AC electric field. By controlling the amplitude and frequency of the applied electric field, the speed and direction of the micro-nano robot's movement can be controlled. Because the micro-nano robot is composed of a photocatalytic material, iron oxide, it can catalyze the decomposition of hydrogen peroxide in a solution under visible light, generating a motion gradient in the solution. Controlling the light intensity and hydrogen peroxide concentration allows the micro-nano robot's speed to be controlled. Because the iron oxide material, which makes up the micro-nano robot, is paramagnetic, it responds to external magnetic field stimulation and exhibits steering behavior. Controlling the direction of the uniform magnetic field allows precise control of the micro-nano robot's direction of movement.

Claims

1. A method for preparing a peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling, characterized by: The following steps are involved: S1, taking ferric chloride solution and sodium hydroxide solution and mixing them to obtain ferric hydroxide colloidal solution; S2, heating the iron hydroxide colloidal solution to obtain an iron oxide peanut-shaped micro-nano robot; S3. Using magnetron sputtering, a gold layer is sputtered on the surface of the iron oxide peanut-shaped micro-nano robot to obtain an optical / electrical / magnetic coupling driven peanut-shaped micro-nano robot; Specifically, step S1 comprises slowly adding 90 mL of a 5 mol / L sodium hydroxide solution to 100 mL of a 2 mol / L ferric chloride solution, and stirring for 5-10 minutes. The step S2 specifically comprises placing the iron hydroxide colloidal solution in a muffle furnace and heating it at 95-100° C. for 8-10 days; After the heating is completed in step S2, the obtained solution is centrifuged and washed three times with anhydrous ethanol, and then the obtained solution is centrifuged and washed three times with deionized water, and the obtained solution is placed in a drying oven at 70-80° C. and dried for 10-12 hours to obtain an iron oxide peanut-shaped micro-nano robot; Specifically, step S3 comprises dissolving the peanut-shaped iron oxide micro-nanorobot in anhydrous ethanol, ultrasonically treating the solution for 3 minutes to uniformly disperse the micro-nanorobot in the anhydrous ethanol, dripping the dispersed solution onto the surface of a glass sheet to allow it to diffuse evenly and evaporate naturally in the air to dry, and placing the dried glass sheet in a magnetron sputtering device to sputter a 60-80 nm thick gold layer at a vacuum degree of 0.1 Pa and a power of 60 W.

2. A peanut-shaped micro-nano robot driven by optical / electrical / magnetic coupling, prepared using the preparation method described in claim 1.

3. The driving control method of the micro-nano robot according to claim 2, characterized in that: The micro-nano robot can be driven by visible light, electric field or magnetic field.

4. The driving control method of the micro-nano robot according to claim 3, characterized in that: The movement speed of the micro-nano robot can be controlled by adjusting the light intensity or the hydrogen peroxide concentration.

5. The driving control method of the micro-nano robot according to claim 3, characterized in that: The movement speed of the micro-nano robot can be controlled by adjusting the electric field intensity, and the movement direction of the micro-nano robot can be controlled by adjusting the electric field frequency.

6. The driving control method of the micro-nano robot according to claim 3, characterized in that: The movement direction of the micro-nano robot can be controlled by adjusting the direction of the magnetic field.

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