A photolithography precision measuring device and a method for improving photolithography precision

Abstract

The application relates to the technical field of optical engineering, and discloses a photoetching precision measuring device and a method for improving photoetching precision, which comprises a supporting frame, a mounting frame is fixedly connected to the top right side of the supporting frame, a protection plate is fixedly connected to the inner side of the mounting frame, two guide rods are fixedly connected to the inside of the protection plate, a reset spring is arranged on the outside of the guide rods, two movable plates are slidably connected to the outside of the guide rods, two traction rods are rotatably connected to the bottom of the movable plates, and a fixed plate is rotatably connected to the bottom end of the traction rods. The step motor, the rotating disc, the driving block, the swing plate, the rotating shaft, the sector gear and the rack plate are used in combination, so that dust on the surface of a test probe can be automatically blown off, the surface of the test probe can be kept clean, scattering or absorption of the dust on the light beam is prevented, and the measurement accuracy and stability are maintained.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical engineering, in particular to a photoetching precision measuring device and a method for improving photoetching precision. BACKGROUND

[0002] In the field of micro-nano manufacturing, photoetching technology is a crucial process step, which is widely used in the manufacturing of semiconductor chips, flat panel displays and other microelectronic devices. Through photoetching technology, the designed pattern can be accurately transferred to the silicon wafer or other substrate, thereby defining the microstructure, such as transistors, circuit connection lines and sensor elements, etc.

[0003] However, the successful application of photoetching technology not only depends on the precise design of optical system and high-quality optical elements, but also depends on the accuracy and stability of photoetching precision. Photoetching precision refers to the matching degree between the defined pattern and the position and size of the target surface. Accurate photoetching precision can ensure the performance, reliability and production cost of microelectronic devices. However, there are some problems in the existing photoetching precision measuring device and method, for example, the test probe is easy to be physically damaged, such as collision, falling, etc., which affects the measurement accuracy, and the surface of the test probe may be affected by dust, which affects the accuracy and stability of the measurement. Therefore, based on the above shortcomings, a photoetching precision measuring device and a method for improving photoetching precision are proposed to solve the above problems. SUMMARY

[0004] In view of the deficiencies of the prior art, the present application provides a photoetching precision measuring device and a method for improving photoetching precision, which solves the problem of low measurement accuracy of the photoetching precision measuring device in the prior art.

[0005] To achieve the above purpose, the present application realizes the following technical scheme: a photoetching precision measuring device, comprising a support frame, a mounting frame is fixedly connected to the top right side of the support frame, a protective plate is fixedly connected to the inner side of the mounting frame, two guide rods are fixedly connected to the inside of the protective plate, a reset spring is sleeved outside the guide rod, two movable plates are slidably connected to the outside of the guide rod, two traction rods are rotatably connected to the bottom of the movable plate, a fixed plate is rotatably connected to the bottom end of the traction rod, a test probe is installed at the bottom end of the fixed plate, a group of fixed blocks are installed on the front and rear sides of the mounting frame, a servo motor is installed outside the fixed block on the front side, a bidirectional screw rod is fixedly connected to the output end of the servo motor, two threaded blocks are threadedly connected to the outside of the bidirectional screw rod, a moving plate is slidably connected to the lower surface of the mounting frame, a rigid traction rope is fixedly connected to the outside of the movable plate, an adjusting assembly is installed on the top of the support frame, and a dust removal assembly is installed outside the protective plate.

[0006] Preferably, the outside of the protective plate is externally mounted with a stepping motor, the output end of the stepping motor is fixedly connected with a rotating disc, the outside of the rotating disc is fixedly connected with a driving block at the eccentric position, the outside of the protective plate is rotatably connected with a swing plate through a rotating shaft, the bottom end of the swing plate is fixedly connected with a sector gear, the outer side of the sector gear is meshingly connected with a rack plate, one end of the rack plate is fixedly connected with a movable rod, the outside of the movable rod is slidably connected with a fixed cylinder, the inside of the fixed cylinder is slidably connected with a rubber piston, the outside of the fixed cylinder is communicated with a connecting pipe, one end of the connecting pipe is fixedly connected with a jet pipe, the inside of the connecting pipe and the rubber piston is provided with a check valve.

[0007] Preferably, the outside of the rubber piston is fixedly connected with one end of the movable rod, and a plurality of air holes are formed in the outside of the fixed cylinder.

[0008] Preferably, the inside of the swing plate is provided with a groove, and the driving block is slidably connected in the groove.

[0009] Preferably, the adjusting assembly comprises two electric guide rails, the electric guide rails are fixedly installed at the top end of the support frame, the outside of the electric guide rails is provided with an electric sliding block, the inside of the two electric sliding blocks is fixedly connected with a connecting plate, the top end of the connecting plate is fixedly connected with a support plate, the inside of the support plate is rotatably connected with a reflecting mirror through a rotating shaft, the outside of the reflecting mirror is fixedly connected with an adjusting screw rod, the outside of the adjusting screw rod is threadedly connected with an adjusting nut, and the outer surface of the support plate is provided with an adjusting groove.

[0010] Preferably, the straight radius of the adjusting screw rod is smaller than the inner diameter of the adjusting groove, and the inside of the adjusting nut is provided with a gasket.

[0011] Preferably, the inside of the rear fixed block is fixedly connected with a fixed rod, the outside of the fixed rod is slidably connected with a sliding block, and the outside of the two sliding blocks is fixedly connected with the mobile plate at the corresponding positions.

[0012] Preferably, one end of the reset spring is fixedly connected with the outside of the movable plate, and the other end of the reset spring is fixedly connected with the inner wall of the protective plate.

[0013] Preferably, the left and right sides of the protective plate are fixedly connected with a fixed pulley, and one end of the rigid traction rope penetrates through the outer surface of the fixed pulley and is fixedly connected with one side of the bottom end of the mobile plate.

[0014] A method for improving the precision of photolithography, comprising the following steps:

[0015] Step one, first by the electric guide rail and electric slide block under the action, drive the interface plate to move, change the horizontal position of the mirror, and through the rotation of the mirror, so that the adjusting screw moves along the inside of the adjusting groove, adjusts the angle of the mirror, and then rotates the adjusting nut, so that the adjusting nut moves along the outer surface of the adjusting screw, until the adjusting nut moves with the outer surface of the supporting plate, so as to adjust the position and angle of the incident light beam, so as to realize the fine adjustment of the light path, and ensure that the light beam accurately enters the measuring equipment.

[0016] Step two, by starting the stepping motor to make the rotating disc rotate, so as to drive the driving block to eccentric rotation, so as to further drive the swing plate to eccentric rotation along the outer surface of the rotating shaft, so as to drive the fan-shaped gear to move synchronously, further drive the rack plate to move left and right, so as to drive the rubber piston to move synchronously, when the movable rod moves along the direction of the rubber piston, the gas in the fixed cylinder enters the inside of the jet pipe through the connecting pipe, and is sprayed out through the nozzle arranged on the outer surface, so as to clean the dust on the outer surface of the test probe, prevent the scattering or absorption of dust to the light beam, so as to keep the accuracy and stability of the measurement.

[0017] Step three, when the measurement is completed, the servo motor is started to make the bidirectional screw rotate, so that the two threaded blocks move towards each other along the outer surface of the bidirectional screw, and then drive the two moving plates to move synchronously, until the two moving plates are closed, at this time, under the action of the reset spring, the movable plate is reset, so that the top end of the traction rod swings, under the action of the traction force of the traction rod, the fixed plate moves upward, so that the test probe is stored in the inside of the protective plate, so as to prevent the test probe from being physically collided, so as to indirectly improve the measurement accuracy.

[0018] The application provides a photolithography precision measuring device and a method for improving photolithography precision.

[0019] 1、The application can store and protect the test probe in the photometric measuring device when it is not used, avoid physical damage such as collision and falling, ensure normal use and long-term stability, and indirectly improve the photolithography precision measurement accuracy.

[0020] 2、The application can automatically blow off the dust on the surface of the test probe, ensure that the surface of the test probe is kept clean, prevent the scattering or absorption of dust to the light beam, and keep the accuracy and stability of the measurement.

[0021] 3、The present application can adjust the position and angle of incident light beam through the mutual cooperation of the electric guide rail, the electric sliding block, the connecting plate, the supporting plate, the mirror and other structures, so that the fine adjustment of the light path can be realized, and the light beam can accurately enter the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a perspective view of the present application;

[0023] Figure 2 is a schematic view of the rotating disc structure of the present application;

[0024] Figure 3 is a schematic view of the air injection pipe structure of the present application;

[0025] Figure 4 is a schematic view of the bidirectional screw structure of the present application;

[0026] Figure 5 is a schematic view of the moving plate structure of the present application;

[0027] Figure 6 is Figure 1 an enlarged view of A in the figure;

[0028] Figure 7 is Figure 1 an enlarged view of B in the figure;

[0029] Figure 8 is a sectional view of the fixed cylinder of the present application.

[0030] 1, support frame; 2, mounting frame; 301, electric guide rail; 302, electric sliding block; 303, connecting plate; 304, supporting plate; 305, mirror; 306, adjusting groove; 307, adjusting nut; 308, adjusting screw; 401, protective plate; 402, servo motor; 403, bidirectional screw; 404, fixed block; 405, threaded block; 406, movable plate; 407, guide rod; 408, fixed pulley; 409, rigid traction rope; 410, traction rod; 411, return spring; 412, fixed plate; 413, test probe; 414, moving plate; 5, fixed rod; 6, sliding block; 701, stepper motor; 702, rotating disc; 703, driving block; 704, swing plate; 705, rotating shaft; 706, sector gear; 707, rack plate; 708, fixed cylinder; 709, connecting pipe; 710, one-way valve; 711, movable rod; 712, air vent; 713, air injection pipe; 714, rubber piston. DETAILED DESCRIPTION

[0031] With reference to the drawings of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0032] Embodiments:

[0033] Please refer to the drawings of the present application Figure 1 , the drawings of the present application Figure 4 and the drawings of the present application Figure 5 , the present application provides a kind of photolithography precision measuring device, including support frame 1, the top right side of support frame 1 is fixedly connected with mounting bracket 2, mounting bracket 2 inner side is fixedly connected with guard plate 401, the inside of guard plate 401 is fixedly connected with two guide rods 407, the outside of guide rod 407 is equipped with reset spring 411, the outside of guide rod 407 is slidably connected with two movable plates 406, the bottom of movable plate 406 is rotatably connected with two traction rods 410, the bottom of traction rod 410 is rotatably connected with fixed plate 412, fixed plate 412 is installed with test probe 413, the front and rear sides of mounting bracket 2 are both installed with a group of fixed blocks 404, the outside of front fixed block 404 is installed with servo motor 402, the output of servo motor 402 is fixedly connected with two-way screw rod 403, the outside of two-way screw rod 403 is threadedly connected with two threaded blocks 405, the lower surface of mounting bracket 2 is slidably connected with moving plate 414, the outside of movable plate 406 is fixedly connected with rigid traction rope 409, the top of support frame 1 is installed with adjusting assembly, the outside of guard plate 401 is installed with dust removal assembly, one end of reset spring 411 is fixedly connected with the outside of movable plate 406, the other end of reset spring 411 is fixedly connected with the inner wall of guard plate 401.

[0034] Specifically, wherein test probe 413 is used to receive the light signal emitted from the photolithography system. Once test probe 413 is in contact with or close to the sample, the photosensitive element inside it will receive the light signal. The photosensitive element will convert the light signal into an electrical signal, the intensity of which is proportional to the intensity of the received light. Through data processing, the matching degree between the measured structure and the design pattern is evaluated. By starting servo motor 402 to drive two-way screw rod 403 to rotate synchronously, further make two threaded blocks 405 away from each other along the outer wall of two-way screw rod 403, at this time drive movable plate 406 to move synchronously, so that one end of rigid traction rope 409 follows the swing, at this time rigid traction rope 409 moves under the auxiliary movement of fixed pulley 408, drive two movable plates 406 to move, so that one end of traction rod 410 swings, thereby realizing the downward movement of fixed plate 412, so that when two moving plates 414 are fully unfolded, test probe 413 just leaks out at this time, which is convenient for photolithography measurement;

[0035] When the measurement is over, the servo motor 402 is started to rotate the bidirectional screw rod 403, and finally the two moving plates 414 are closed, at this time, under the elastic force of the reset spring 411, the movable plate 406 is reset, thus the top end of the traction rod 410 swings, under the traction of the traction rod 410, the fixed plate 412 moves upward, thus the test probe 413 is stored in the inside of the protective plate 401, the test probe 413 is prevented from being physically collided, and the measurement precision is indirectly improved.

[0036] Please refer to the accompanying drawings Figure 3 , the drawings Figure 7 and the drawings Figure 8 , the outside of the protective plate 401 is provided with a stepping motor 701, the output end of the stepping motor 701 is fixedly connected with a rotating disc 702, the outside of the rotating disc 702 is fixedly connected with a driving block 703 at the eccentric position, the outside of the protective plate 401 is rotatably connected with a swing plate 704 through a rotating shaft 705, the bottom end of the swing plate 704 is fixedly connected with a sector gear 706, the outer side of the sector gear 706 is meshedly connected with a rack plate 707, one end of the rack plate 707 is fixedly connected with a movable rod 711, the outside of the movable rod 711 is slidably connected with a fixed cylinder 708, the inside of the fixed cylinder 708 is slidably connected with a rubber piston 714, the outside of the fixed cylinder 708 is in communication with a connecting pipe 709, one end of the connecting pipe 709 is fixedly connected with a gas jet pipe 713, the inside of the connecting pipe 709 and the rubber piston 714 is provided with a one-way valve 710, the outside of the rubber piston 714 is fixedly connected with one end of the movable rod 711, and a plurality of air holes 712 are arranged on the outside of the fixed cylinder 708.

[0037] Specifically, by starting the stepper motor 701 to make the rotating disc 702 rotate synchronously, so that the driving block 703 is driven to rotate eccentrically, further driving the swing plate 704 to rotate eccentrically along the outer surface of the rotating shaft 705, in turn driving the sector gear 706 to rotate eccentrically synchronously, further driving the rack plate 707 to move back and forth, so as to drive the rubber piston 714 to move synchronously, when the movable rod 711 moves along the direction of the rubber piston 714, the one-way valve 710 inside the connecting pipe 709 is in an open state, and the one-way valve 710 inside the rubber piston 714 is in a closed state, at this time, the gas in the fixed cylinder 708 enters the inside of the jet pipe 713 through the connecting pipe 709, and is sprayed through the spray head arranged on the outer surface thereof, so as to clean the dust on the outer surface of the test probe 413, prevent the scattering or absorption of the dust to the light beam, and thus maintain the accuracy and stability of the measurement. When the movable rod 711 moves away from the direction of the rubber piston 714, the one-way valve 710 inside the connecting pipe 709 is in a closed state, and the one-way valve 710 inside the rubber piston 714 is in an open state, so that the outside air enters the inside of the fixed cylinder 708 through the air hole 712, and is replenished for the next exhaust.

[0038] Please refer to the accompanying drawings Figure 7 The inside of the swing plate 704 is provided with a groove, and the driving block 703 is slidingly connected in the groove.

[0039] Specifically, when the driving block 703 rotates along the outer surface of the rotating disc 702, the driving block 703 moves in the groove, thereby driving the swing plate 704 to swing back and forth.

[0040] Please refer to the accompanying drawings Figure 1 , the accompanying drawings Figure 2 and the accompanying drawings Figure 6 , the adjusting assembly comprises two electric rails 301, the electric rails 301 are fixedly installed at the top end of the support frame 1, the electric rails 301 are provided with electric sliding blocks 302 outside, the inner sides of the two electric sliding blocks 302 are fixedly connected with a connecting plate 303, the top end of the connecting plate 303 is fixedly connected with a supporting plate 304, the supporting plate 304 is connected with a reflecting mirror 305 through a rotating shaft on the inner side, the reflecting mirror 305 is fixedly connected with an adjusting screw 308 outside, the adjusting screw 308 is threadedly connected with an adjusting nut 307 outside, and the outer surface of the supporting plate 304 is provided with an adjusting groove 306. The straight radius of the adjusting screw 308 is smaller than the inner diameter of the adjusting groove 306, and the inner side of the adjusting nut 307 is provided with a gasket.

[0041] Specifically, the electric guide rail 301 and the electric sliding block 302 are existing mature technology products, powered by an external power supply, and the electric guide rail 301 is externally provided with a guide rail motor, so that the electric sliding block 302 can move along the outer surface of the electric guide rail 301, and the gasket can make the adjusting nut 307 fixed to the reflecting mirror 305 more stable, and the butt joint plate 303 is adjusted in the horizontal position by the electric guide rail 301 and the electric sliding block 302, the adjusting nut 307 is moved along the outer surface of the adjusting screw 308 by rotating the adjusting nut 307, until the adjusting nut 307 is moved away from the outer surface of the supporting plate 304, so as to adjust the position and angle of the incident light beam, and the fine adjustment of the light path can be realized, and the light beam can accurately enter the measuring device.

[0042] Please refer to the accompanying drawings Figure 2 and the accompanying drawings Figure 4 The inner side of the rear fixed block 404 is fixedly connected with a fixed rod 5, and the outer side of the fixed rod 5 is slidably connected with a sliding block 6, and the two sliding blocks 6 are fixedly connected with the outer sides of the moving plates 414 in the corresponding positions.

[0043] Specifically, when the moving plate 414 moves, the sliding block 6 will move along the outer surface of the fixed rod 5, thereby ensuring the stability of the moving plate 414 during movement.

[0044] Please refer to the accompanying drawings Figure 1 and the accompanying drawings Figure 2 The left and right sides of the protection plate 401 are fixedly connected with a fixed pulley 408, and one end of a rigid traction rope 409 passes through the outer surface of the fixed pulley 408 and is fixedly connected with the bottom end of the moving plate 414.

[0045] Specifically, the design of the fixed pulley 408 can greatly reduce the resistance of the rigid traction rope 409 during movement, and facilitate the subsequent storage of the test probe 413 by means of the rigid traction rope 409.

[0046] A method for improving the precision of photolithography, comprising the following steps:

[0047] Step one, first, the butt joint plate 303 is moved by the electric guide rail 301 and the electric sliding block 302, the horizontal position of the reflecting mirror 305 is changed, and the adjusting screw 308 is moved along the inside of the adjusting groove 306 by rotating the reflecting mirror 305, after adjusting the angle of the reflecting mirror 305, the adjusting nut 307 is moved along the outer surface of the adjusting screw 308 by rotating the adjusting nut 307, until the adjusting nut 307 is moved away from the outer surface of the supporting plate 304, so as to adjust the position and angle of the incident light beam, and the fine adjustment of the light path can be realized, and the light beam can accurately enter the measuring device;

[0048] Step two, by starting the stepper motor 701 so that the rotating disc 702 rotates, so that the drive block 703 eccentric rotation, so as to further drive the swing plate 704 along the outer surface of the rotating shaft 705 eccentric rotation, so as to drive the fan gear 706 synchronous movement, further drive the rack plate 707 left and right reciprocating movement, so as to drive the rubber piston 714 synchronous movement, when the activity rod 711 along the direction of the rubber piston 714 moves, Will fixed cylinder 708 inside the gas through the connecting pipe 709 into the jet pipe 713 inside, and through its outer surface set of nozzle to spray, so as to clean the outer surface of the test probe 413 dust, prevent dust scattering or absorption of light beam, so as to keep the accuracy and stability of measurement;

[0049] Step three, when the measurement is completed, by starting the servo motor 402 so that the bidirectional screw 403 rotates, so that the two screw blocks 405 along the outer surface of the bidirectional screw 403 close to each other, in turn drive the two moving plates 414 synchronous movement, until the two moving plates 414 are closed, at this time under the action of the reset spring 411, drive the activity plate 406 reset, so as to drive the top end of the traction rod 410 swing, under the action of the traction rod 410 traction force, drive the fixed plate 412 upward movement, so as to test the probe 413 stored in the protective plate 401 inside, prevent the test probe 413 by physical collision, so as to improve the measurement accuracy indirectly.

[0050] Although the embodiments of the present application have been shown and described, it is understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A lithographic precision measuring device comprising a support frame (1), characterized in that, The top right side of the support frame (1) is fixedly connected with a mounting frame (2), the inner side of the mounting frame (2) is fixedly connected with a protective plate (401), the inside of the protective plate (401) is fixedly connected with two guide rods (407), the outside of the guide rod (407) is sleeved with a reset spring (411), the outside of the guide rod (407) is slidably connected with two movable plates (406), the bottom of the movable plate (406) is rotatably connected with two traction rods (410), the bottom end of the traction rod (410) is rotatably connected with a fixed plate (412), the bottom end of the fixed plate (412) is provided with a test probe (413), the front and rear sides of the mounting frame (2) are both provided with a group of fixed blocks (404), the outside of the front fixed block (404) is provided with a servo motor (402), the output end of the servo motor (402) is fixedly connected with a bidirectional screw rod (403), the outside of the bidirectional screw rod (403) is threadedly connected with two threaded blocks (405), the lower surface of the mounting frame (2) is slidably connected with a moving plate (414), the outside of the movable plate (406) is fixedly connected with a rigid traction rope (409), the top of the support frame (1) is provided with an adjusting assembly, and the outside of the protective plate (401) is provided with a dust removal assembly.

2. The lithography precision measurement apparatus according to claim 1, wherein The outside of the protective plate (401) is provided with a stepping motor (701), the output end of the stepping motor (701) is fixedly connected with a rotating disc (702), the outside of the rotating disc (702) is fixedly connected with a driving block (703) at the eccentric position, the outside of the protective plate (401) is rotatably connected with a swing plate (704) through a rotating shaft (705), the bottom end of the swing plate (704) is fixedly connected with a sector gear (706), the outer side of the sector gear (706) is meshedly connected with a rack plate (707), one end of the rack plate (707) is fixedly connected with a movable rod (711), the outside of the movable rod (711) is slidably connected with a fixed cylinder (708), the inside of the fixed cylinder (708) is slidably connected with a rubber piston (714), the outside of the fixed cylinder (708) is in communication with a connecting pipe (709), one end of the connecting pipe (709) is fixedly connected with a jet pipe (713), the inside of the connecting pipe (709) and the rubber piston (714) is provided with a one-way valve (710).

3. A lithographic precision measuring device according to claim 2, characterized in that The outside of the rubber piston (714) is fixedly connected with one end of the movable rod (711), and a plurality of air holes (712) are formed in the outside of the fixed cylinder (708).

4. The photolithography precision measuring device according to claim 2, wherein The inside of the swing plate (704) is provided with a groove, and the driving block (703) is slidably connected in the groove.

5. The photolithography precision measuring device of claim 1, wherein, The adjusting assembly includes two electric guide rails (301) fixedly installed at the top end of the support frame (1), an electric sliding block (302) is installed outside the electric guide rail (301), the inner sides of the two electric sliding blocks (302) are fixedly connected with a connecting plate (303), the top end of the connecting plate (303) is fixedly connected with a supporting plate (304), the inside of the supporting plate (304) is connected with a reflecting mirror (305) through a rotating shaft, the outside of the reflecting mirror (305) is fixedly connected with an adjusting screw (308), the outside of the adjusting screw (308) is threadedly connected with an adjusting nut (307), and the outer surface of the supporting plate (304) is provided with an adjusting groove (306).

6. A lithographic precision measuring device according to claim 5, characterized in that The straight radius of the adjusting screw (308) is smaller than the inner diameter of the adjusting groove (306), and the inner side of the adjusting nut (307) is provided with a gasket.

7. The photolithography precision measuring device of claim 1, wherein, The inside of the rear fixed block (404) is fixedly connected with a fixed rod (5), the outside of the fixed rod (5) is slidingly connected with a sliding block (6), and the two sliding blocks (6) are fixedly connected with the outer sides of the moving plates (414) at corresponding positions.

8. The photolithography precision measuring device of claim 1, wherein, One end of the reset spring (411) is fixedly connected with the outside of the movable plate (406), and the other end of the reset spring (411) is fixedly connected with the inner wall of the protection plate (401).

9. The photolithography precision measuring device of claim 1, wherein, The left and right sides of the protection plate (401) are fixedly connected with a fixed pulley (408), and one end of the rigid traction rope (409) penetrates through the outer surface of the fixed pulley (408) and is fixedly connected with the bottom end of the moving plate (414).

10. A method of improving lithographic accuracy, using a lithographic accuracy measuring device according to any one of claims 1-9, characterized in that, The method comprises the following steps: Step one, first, the electric guide rail (301) and the electric sliding block (302) are used to drive the connecting plate (303) to move, change the horizontal position of the reflecting mirror (305), and rotate the reflecting mirror (305), so that the adjusting screw (308) moves along the inside of the adjusting groove (306), after adjusting the angle of the reflecting mirror (305), the adjusting nut (307) is rotated to move along the outer surface of the adjusting screw (308), until the adjusting nut (307) moves away from the outer surface of the supporting plate (304), so as to adjust the position and angle of the incident light beam, and the light path can be finely adjusted, and the light beam can accurately enter the measuring device. Step two, by starting the stepper motor (701) so that the rotating disc (702) rotation, so as to drive the block (703) eccentric rotation, so as to further drive the swing plate (704) along the outer surface of the rotating shaft (705) eccentric rotation, so as to drive the sector gear (706) synchronous movement, further drive the rack plate (707) left and right reciprocating movement, so as to drive the rubber piston (714) synchronous movement, when the activity rod (711) along the direction of the rubber piston (714) moves, will be fixed in the cylinder (708) inside the gas through the connecting pipe (709) into the jet pipe (713) inside, and through its outer surface is provided with the nozzle to spray, thus to the test probe (413) the outer surface of the dust cleaning, prevent dust scattering or absorption of light beam, so as to keep the accuracy and stability of measurement; Step three, when the measurement is completed, by starting the servo motor (402) so that the two way screw (403) rotation, makes two screw block (405) along the outer surface of the two way screw (403) close to each other, in turn drive two moving plate (414) synchronous movement, until two moving plate (414) is closed, at this time in the reset spring (411) elastic force, drive the movable plate (406) reset, so as to drive the top end of the traction rod (410) swing, under the action of the traction rod (410) traction force, drive the fixed plate (412) upward movement, thus the test probe (413) is stored in the protective plate (401) inside, prevent the test probe (413) by physical collision, thus indirectly improve the measurement accuracy.

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