Radio Frequency Signal Modulation Circuit, Radio Frequency Signal Generation Device, and Radio Frequency Power Supply Equipment

Abstract

The present application provides a radio frequency signal modulation circuit, a radio frequency signal generating device, and a radio frequency power supply device, relating to the technical field of radio frequency. The radio frequency signal modulation circuit includes: a signal input end, a modulation unit, a comparison unit, and a signal output end. The signal input end is used for inputting an initial radio frequency signal; the modulation unit is used for modulating the initial radio frequency signal to obtain an intermediate radio frequency signal; the comparison unit is used for comparing the intermediate radio frequency signal with a direct current voltage signal to obtain a target radio frequency signal and outputting the target radio frequency signal through the output end. The conduction duty cycle of the target radio frequency signal is different from that of the initial radio frequency signal, and the frequency of the target radio frequency signal is the same as that of the initial radio frequency signal; the signal output end is used for outputting the target radio frequency signal; wherein, at least one of the intermediate radio frequency signal and the direct current voltage signal is variable so that the conduction duty cycle of the target radio frequency signal changes. The present application can flexibly adjust the conduction duty cycle of the radio frequency signal.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular, to a radio frequency signal modulation circuit, a radio frequency signal generating device, and a radio frequency power supply device. Background Art

[0002] Radio Frequency (RF) is a technology that uses electromagnetic waves for wireless communication and has a wide range of applications in multiple fields. In recent years, radio frequency technology has developed rapidly and been widely used. With the popularization of radio frequency, there are gradually requirements for the conduction duty cycle of radio frequency signals. However, the frequency range of radio frequency signals is between 300 kHz and 300 GHz, with extremely high frequencies and extremely short periods, making it very difficult to adjust the conduction duty cycle of radio frequency signals. Therefore, how to flexibly adjust the conduction duty cycle of radio frequency signals to meet the requirements of the conduction duty cycle of radio frequency signals has become an issue that needs to be considered. Summary of the Invention

[0003] The present application provides a radio frequency signal modulation circuit, a radio frequency signal generating device, and a radio frequency power supply device, which can flexibly adjust the conduction percentage of radio frequency signals.

[0004] In a first aspect, a radio frequency signal modulation circuit is provided. The radio frequency signal modulation circuit includes: a signal input end, a modulation unit, a comparison unit, and a signal output end. The signal input end is used for inputting an initial radio frequency signal; the modulation unit is connected to the signal input end and is used for modulating the initial radio frequency signal to obtain an intermediate radio frequency signal; the comparison unit includes two input ends and an output end. One of the input ends is connected to the modulation unit to receive the intermediate radio frequency signal, and the other input end is used for receiving a direct current voltage signal. The comparison unit is used for comparing the intermediate radio frequency signal with the direct current voltage signal to obtain a target radio frequency signal and outputting it through the output end. Among them, the conduction duty cycle of the target radio frequency signal is different from that of the initial radio frequency signal, and the frequency of the target radio frequency signal is the same as that of the initial radio frequency signal; the signal output end is connected to the output end of the comparison unit and is used for outputting the target radio frequency signal; wherein, at least one of the intermediate radio frequency signal and the direct current voltage signal is variable, so that the conduction duty cycle of the target radio frequency signal changes.

[0005] In a possible implementation, the radio frequency signal modulation circuit further includes a DC power supply, the DC power supply is connected to another input end of the comparison unit, the DC power supply is used to output the DC voltage signal, the modulation unit has an adjustable resistance value and / or an adjustable capacitance value, wherein, the change of the resistance value and / or the capacitance value of the modulation unit causes the intermediate radio frequency signal to change, and the conduction duty cycle of the target radio frequency signal changes according to the change of the intermediate radio frequency signal.

[0006] In a possible implementation, the modulation unit is used to perform waveform modulation on the initial radio frequency signal to obtain an intermediate radio frequency signal with a specific waveform, wherein, within at least part of a period, the voltage value of the intermediate radio frequency signal changes with time, and the waveform parameters of the intermediate radio frequency signal change at least according to the change of the resistance value and / or the capacitance value of the modulation unit, so that the conduction duty cycle of the target radio frequency signal changes accordingly.

[0007] In a possible implementation, the two input ends of the comparison unit include a first input end and a second input end, the DC power supply is connected to the second input end, the modulation unit includes a first resistor and a first capacitor, the first resistor and the first capacitor are connected in series between the signal input end and the ground in sequence, the connection point between the first resistor and the first capacitor is connected to the first input end, the first capacitor is used to charge during the high-level duration of the initial radio frequency signal and discharge during the low-level duration of the initial radio frequency signal, the first resistor is used to affect the charging speed and the discharging speed of the first capacitor; wherein, when the resistance value of the first resistor and / or the capacitance value of the first capacitor change, the waveform parameters of the intermediate radio frequency signal change accordingly, so that the conduction duty cycle of the target radio frequency signal changes.

[0008] In a possible implementation, one end of the first resistor is connected to the signal input end, the other end of the first resistor is connected to the first input end and one end of the first capacitor, the other end of the first capacitor is grounded, the first resistor is an adjustable resistor, so that the modulation unit has an adjustable resistance value; wherein, when the resistance value of the first resistor increases, the conduction duty cycle of the target radio frequency signal decreases, and when the resistance value of the first resistor decreases, the conduction duty cycle of the target radio frequency signal increases.

[0009] In a possible implementation, one end of the first resistor is connected to the signal input terminal, the other end of the first resistor is connected to the first input terminal and one end of the first capacitor, and the other end of the first capacitor is grounded. The first capacitor is an adjustable capacitor, so that the modulation unit has an adjustable capacitance value. Wherein, when the capacitance value of the first capacitor increases, the conduction duty cycle of the target radio frequency signal decreases, and when the resistance-capacitance value of the first capacitor decreases, the conduction duty cycle of the target radio frequency signal increases.

[0010] In a possible implementation, the two input terminals of the comparison unit include a first input terminal and a second input terminal. The DC power supply is connected to the second input terminal. The modulation unit includes a first resistor and a first capacitor. The first resistor and the first capacitor are connected in series between the signal input terminal and the ground in sequence. The first resistor has an adjustment terminal, and the adjustment terminal of the first resistor is connected to the first input terminal. The first capacitor is used to charge during the high-level duration of the initial radio frequency signal and discharge during the low-level duration of the initial radio frequency signal. The first resistor is used to affect the charging speed and the discharging speed of the first capacitor. Wherein, when the adjustment terminal of the first resistor moves, the waveform parameters of the intermediate radio frequency signal change accordingly, so that the conduction duty cycle of the target radio frequency signal changes.

[0011] In a possible implementation, one end of the first resistor is connected to the signal input terminal, the other end of the first resistor is connected to one end of the first capacitor, and the adjustment terminal of the first resistor is connected to the first input terminal. The other end of the first capacitor is grounded. Wherein, when the adjustment terminal of the first resistor moves towards one end of the first resistor, the conduction duty cycle of the target radio frequency signal increases, and when the adjustment terminal of the first resistor moves towards the other end of the first resistor, the conduction duty cycle of the target radio frequency signal decreases.

[0012] In a second aspect, a radio frequency signal generating device is further provided. The radio frequency signal generating device includes a radio frequency signal modulation circuit. The radio frequency signal modulation circuit includes: a signal input end, a modulation unit, a comparison unit, and a signal output end. The signal input end is used for inputting an initial radio frequency signal; the modulation unit is connected to the signal input end and is used for modulating the initial radio frequency signal to obtain an intermediate radio frequency signal; the comparison unit includes two input ends and an output end, one of the input ends is connected to the modulation unit for receiving the intermediate radio frequency signal, and the other input end is used for receiving a direct current voltage signal. The comparison unit is used for comparing the intermediate radio frequency signal with the direct current voltage signal to obtain a target radio frequency signal and outputting it through the output end. Among them, the conduction duty cycle of the target radio frequency signal is different from that of the initial radio frequency signal, and the frequency of the target radio frequency signal is the same as that of the initial radio frequency signal; the signal output end is connected to the output end of the comparison unit and is used for outputting the target radio frequency signal; among them, at least one of the intermediate radio frequency signal and the direct current voltage signal is variable so that the conduction duty cycle of the target radio frequency signal changes.

[0013] In a third aspect, a radio frequency power supply device is further provided. The radio frequency power supply device includes a radio frequency signal generating device. The radio frequency signal generating device includes a radio frequency signal modulation circuit.

[0014] For the radio frequency signal modulation circuit, radio frequency signal generating device, and radio frequency power supply device of the present application, by setting a modulation unit to modulate the initial radio frequency signal to obtain an intermediate radio frequency signal, and by setting a comparison unit to compare the intermediate radio frequency signal with a direct current voltage signal to obtain a target radio frequency signal, it is possible to flexibly adjust the conduction duty cycle of the radio frequency signal by making at least one of the intermediate radio frequency signal and the direct current voltage signal variable, meeting the requirements for the conduction duty cycle of the radio frequency signal. Description of the Drawings

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 It is a block diagram of a radio frequency signal modulation circuit in an embodiment of the present application.

[0017] Figure 2 It is a waveform diagram of an intermediate radio frequency signal and a direct current voltage signal of a radio frequency signal modulation circuit in an embodiment of the present application.

[0018] Figure 3 It is a circuit diagram of a radio frequency signal modulation circuit in an embodiment of the present application.

[0019] Figure 4 Schematic circuit diagram of a radio frequency signal modulation circuit in another embodiment of the present application.

[0020] Figure 5 Schematic circuit diagram of a radio frequency signal modulation circuit in an embodiment of the present application, which further includes an adjustment unit and a control unit.

[0021] Figure 6 Block diagram of a radio frequency signal generating device in an embodiment of the present application.

[0022] Figure 7 Block diagram of a radio frequency power supply device in an embodiment of the present application.

[0023] Explanation of reference numerals: 10, radio frequency signal modulation circuit; 100, signal input terminal; RF1, initial radio frequency signal; 200, modulation unit; R1, first resistor; C1, first capacitor; RF2, intermediate radio frequency signal; 300, DC power supply; DC, DC voltage signal; 400, comparison unit; In1, first input terminal; In2, second input terminal; O1, output terminal; RF3, target radio frequency signal; 500, signal output terminal; 600, isolation unit; 700, adjustment unit; 710, first adjustment module; 720, second adjustment module; 800, control unit; GND, ground; 20, crystal oscillator circuit; 1000, radio frequency signal generating device; 1, radio frequency power supply device; RL, load. Detailed implementation manners

[0024] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0025] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly defined and limited, the terms "connected" and "connection" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0026] Hereinafter, the terms "first" and "second" are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present application, unless otherwise specified, the meaning of "a plurality" is two or more.

[0027] In addition, the terms "comprise" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or server that comprises a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0028] Please refer to Figure 1 , Figure 1 which is a block diagram of a radio frequency signal modulation circuit in an embodiment of the present application. As Figure 1 shown, the present application provides a radio frequency signal modulation circuit 10, and the radio frequency signal modulation circuit 10 includes: a signal input terminal 100, a modulation unit 200, a comparison unit 400, and a signal output terminal 500. The signal input terminal 100 is used for inputting an initial radio frequency signal RF1; the modulation unit 200 is connected to the signal input terminal 100 and is used for modulating the initial radio frequency signal RF1 to obtain an intermediate radio frequency signal RF2; the comparison unit 400 includes two input terminals and an output terminal O1, one of the input terminals is connected to the modulation unit 200 for receiving the intermediate radio frequency signal RF1, and the other input terminal is used for receiving a direct current voltage signal DC. The comparison unit 400 is used for comparing the intermediate radio frequency signal RF2 with the direct current voltage signal DC to obtain a target radio frequency signal RF3 and outputting it through the output terminal O1. Among them, the conduction duty cycle of the target radio frequency signal RF3 is different from that of the initial radio frequency signal RF1, and the frequency of the target radio frequency signal RF3 is the same as that of the initial radio frequency signal RF1; the signal output terminal 500 is connected to the output terminal O1 of the comparison unit 400 and is used for outputting the target radio frequency signal RF3; among them, the conduction duty cycle of the target radio frequency signal RF3 changes at least according to the change of the resistance value and / or capacitance value of the modulation unit 200.

[0029] Therefore, in the above radio frequency signal modulation circuit 10 of the present application, by setting the modulation unit 200 to modulate the initial radio frequency signal RF1 to obtain an intermediate radio frequency signal RF2, and by setting the comparison unit 400 to compare the intermediate radio frequency signal RF2 with the DC voltage signal DC to obtain a target radio frequency signal RF3, it is possible to flexibly adjust the conduction duty cycle of the radio frequency signal by making at least one of the intermediate radio frequency signal RF2 and the DC voltage signal DC variable, meeting the requirements for different conduction duty cycles of the radio frequency signal.

[0030] As Figure 1 shown, the radio frequency signal modulation circuit 10 further includes a DC power supply 300. The DC power supply 300 is connected to another input terminal of the comparison unit 400. The DC power supply 300 is used to output the DC voltage signal DC. The modulation unit 200 has an adjustable resistance value and / or an adjustable capacitance value. Among them, the change in the resistance value and / or capacitance value of the modulation unit 200 causes the intermediate radio frequency signal RF2 to change, and the conduction duty cycle of the target radio frequency signal RF3 changes according to the change in the intermediate radio frequency signal RF2.

[0031] Therefore, it is possible to flexibly adjust the conduction duty cycle of the radio frequency signal at least according to the resistance value and / or capacitance value of the modulation unit 200, meeting the requirements for different conduction duty cycles of the radio frequency signal.

[0032] Specifically, the initial radio frequency signal RF1 is a signal with a conduction duty cycle of 50%, extremely high frequency, and extremely short period. However, when applied to certain fields, such as when outputting a radio frequency signal to a plasma load, the conduction duty cycle of the initial radio frequency signal RF1 needs to be 20%, 30%, 40%, 60%, etc., or the conduction duty cycle of the initial radio frequency signal RF1 needs to be adjusted at any time. Currently, it is difficult to meet the adjustment requirements for the conduction duty cycle of the initial radio frequency signal RF1. In the above radio frequency signal modulation circuit 10 of the present application, after the modulation unit 200 modulates the initial radio frequency signal RF1 to obtain an intermediate radio frequency signal RF2, the comparison unit 400 can compare the intermediate radio frequency signal RF2 with the DC voltage signal DC, so that the conduction duty cycle of the obtained target radio frequency signal RF3 is different from that of the initial radio frequency signal RF1, but the frequency of the target radio frequency signal RF3 is still the same as that of the initial radio frequency signal RF1. Therefore, it is equivalent to obtaining radio frequency signals with different conduction duty cycles. In addition, it is also possible to further change the conduction duty cycle of the target radio frequency signal RF3 by adjusting the resistance value and / or capacitance value of the modulation unit 200, meeting the requirements for different conduction duty cycles of the radio frequency signal and providing a radio frequency signal with the required conduction duty cycle.

[0033] Among them, in some embodiments, the conduction duty cycle of the initial radio frequency signal RF1 may be 50%, and it is a square wave signal. Obviously, the initial radio frequency signal RF1 may also have any other conduction duty cycle and may be a waveform signal of any shape. For example, the conduction duty cycle of the initial radio frequency signal RF1 may be 40%, and it is a sine wave signal.

[0034] Among them, the conduction duty cycle of the target radio frequency signal RF3 is different from that of the initial radio frequency signal RF1, the frequencies are the same, and the waveforms are all square wave waveforms.

[0035] Please refer to Figure 2 , Figure 2 , which is a waveform schematic diagram of the intermediate radio frequency signal and the DC voltage signal of the radio frequency signal modulation circuit in an embodiment of the present application. As Figure 1 , Figure 2 shown, the modulation unit 200 is used to perform waveform modulation on the initial radio frequency signal RF1 to obtain an intermediate radio frequency signal RF2 with a specific waveform. Among them, in at least part of a period, the voltage value of the intermediate radio frequency signal RF2 changes with time, and the waveform parameters of the intermediate radio frequency signal RF2 change at least according to the change of the resistance value and / or capacitance value of the modulation unit 200, so that the conduction duty cycle of the target radio frequency signal RF3 changes accordingly.

[0036] Among them, as Figure 2 shown, in at least part of a period, the voltage value of the intermediate radio frequency signal RF2 changes with time, that is, at this time, the intermediate radio frequency signal RF2 is not a square wave with constant positive and negative amplitudes in a period, but a non-square wave signal. For example, as Figure 2 shown, the specific waveform of the intermediate radio frequency signal RF2 may be an S-shaped waveform (Sigmoid function waveform) similar to a triangular wave waveform. Therefore, when the amplitude of the DC voltage signal DC changes, when the comparison unit 400 compares the intermediate radio frequency signal RF2 with the DC voltage signal DC, then in one period of the intermediate radio frequency signal RF2, the period where the amplitude of the voltage of the intermediate radio frequency signal RF2 greater than the DC voltage signal DC is located will change accordingly, and the period when the comparison unit 400 outputs a high level or a low level will change, so that the high and low level ratio in one period changes, and the conduction duty cycle of the target radio frequency signal RF3 changes.

[0037] Among them, Figure 2 illustrates with the specific waveform of the intermediate radio frequency signal RF2 being an S-shaped waveform (Sigmoid function waveform) similar to a triangular wave waveform. In one or more embodiments, the intermediate radio frequency signal RF2 may also be a triangular wave waveform or a waveform with an irregular shape, etc., which is different from the waveform of the initial radio frequency signal RF1, and the present application is not limited thereto.

[0038] In one or more embodiments, the waveform parameters of the intermediate radio frequency signal RF2 include parameters such as the rate of change, amplitude, period, frequency, etc. of the specific waveform that the intermediate radio frequency signal RF2 has.

[0039] Please refer to Figure 3 , Figure 3 which is a circuit schematic diagram of a radio frequency signal modulation circuit in an embodiment of the present application. As Figure 3 shown, the two input terminals of the comparison unit 400 include a first input terminal In1 and a second input terminal In2. The DC power supply 300 is connected to the second input terminal In2. The modulation unit 200 includes a first resistor R1 and a first capacitor C1. The first resistor R1 and the first capacitor C1 are connected in series between the signal input terminal 100 and the ground GND in sequence. The connection point between the first resistor R1 and the first capacitor C1 is connected to the first input terminal In1. The first capacitor C1 is used to charge during the high-level duration of the initial radio frequency signal RF1 and discharge during the low-level duration of the initial radio frequency signal RF1. The first resistor R1 is used to affect the charging speed and the discharging speed of the first capacitor C1. Wherein, when the resistance value of the first resistor R1 and / or the capacitance value of the first capacitor C1 change, the waveform parameters of the intermediate radio frequency signal RF2 change accordingly, so that the conduction duty cycle of the target radio frequency signal RF3 changes.

[0040] Thus, in the above radio frequency signal modulation circuit 10 of the present application, by setting the first resistor R1, the first capacitor C1 of the modulation unit 200 and the corresponding connection relationship, it can charge during the high-level duration of the initial radio frequency signal RF1 and discharge during the low-level duration of the initial radio frequency signal RF1 to obtain the intermediate radio frequency signal RF2, and utilize the charge and discharge characteristics of the capacitor, and the resistor can affect the charge and discharge speed of the capacitor. When the resistance value of the first resistor R1 and / or the capacitance value of the first capacitor C1 change, the waveform parameters of the intermediate radio frequency signal RF2 change accordingly, and the conduction duty cycle of the target radio frequency signal RF3 obtained after comparison with the DC voltage signal DC changes.

[0041] Specifically, as Figure 2 shown, taking the conduction duty cycle of the initial radio frequency signal RF1 as 50% as an example, the waveform of the intermediate radio frequency signal RF2 is simulated. When the modulation unit 200 includes the first resistor R1 and the first capacitor C1, the specific waveform that the intermediate radio frequency signal RF2 has is an S-shaped waveform. Among them, the first capacitor C1 charges during the high-level duration of the initial radio frequency signal RF1. When starting to charge, the voltage value of the intermediate radio frequency signal RF2 rises very fast, that is, the rate of change of the waveform parameters is very large. However, as the first capacitor C1 charges, the voltage value of the intermediate radio frequency signal RF2 rises gradually slowly until it approaches the voltage value of the initial radio frequency signal RF1.Figure 2 The Vrf shown is the voltage value of the initial radio frequency signal RF1; the first capacitor C1 discharges during the low-level duration of the initial radio frequency signal RF1. When starting to discharge, the voltage value of the intermediate radio frequency signal RF2 drops rapidly, that is, the change rate of the waveform parameters is very large. However, as the first capacitor C1 discharges, the voltage value of the intermediate radio frequency signal RF2 drops gradually slowly until it approaches the zero voltage value. When the resistance value of the first resistor R1 and / or the capacitance value of the first capacitor C1 change, the change rate and amplitude in the waveform parameters of the intermediate radio frequency signal RF2 change accordingly, so that the conduction duty cycle of the target radio frequency signal RF3 obtained after comparison with the DC voltage signal DC with a voltage value of Vdc changes.

[0042] It should be noted that since the initial radio frequency signal RF1 alternates between high and low levels periodically, the first capacitor C1 also charges and discharges periodically to obtain the intermediate radio frequency signal RF2, and the period of the intermediate radio frequency signal RF2 and the period of the initial radio frequency signal RF1 are both as Figure 2 shown as T1, therefore, the frequency of the intermediate radio frequency signal RF2 is also equal to the frequency of the initial radio frequency signal RF1.

[0043] As Figure 3 shown, one end of the first resistor R1 is connected to the signal input terminal 100, the other end of the first resistor R1 is connected to the first input terminal In1 and one end of the first capacitor C1, the other end of the first capacitor C1 is grounded to GND, and the first resistor R1 is an adjustable resistor so that the modulation unit 200 has an adjustable resistance value; wherein, when the resistance value of the first resistor R1 increases, the conduction duty cycle of the target radio frequency signal RF3 decreases, and when the resistance value of the first resistor R1 decreases, the conduction duty cycle of the target radio frequency signal RF3 increases.

[0044] Therefore, in the above radio frequency signal modulation circuit 10 of the present application, when the first resistor R1 and the first capacitor C1 are connected to the signal input terminal 100 and the first input terminal In1 in the above manner, and the first resistor R1 is an adjustable resistor, when the resistance value of the first resistor R1 increases, the conduction duty cycle of the target radio frequency signal RF3 decreases, and when the resistance value of the first resistor R1 decreases, the conduction duty cycle of the target radio frequency signal RF3 increases. It can adjust the conduction duty cycle of the radio frequency signal by adjusting the resistance value of the first resistor R1 to meet the requirement of the conduction duty cycle of the radio frequency signal.

[0045] Specifically, when the resistance value of the first resistor R1 increases, the charging and discharging speeds of the first capacitor C1 slow down, the change rate in the waveform parameters of the intermediate radio frequency signal RF2 decreases, the amplitude that can be achieved within the same charging time also decreases, the portion of the intermediate radio frequency signal RF2 that is higher than the DC voltage signal DC decreases, and the conduction duty cycle of the target radio frequency signal RF3 decreases; when the resistance value of the first resistor R1 decreases, the charging and discharging speeds of the first capacitor C1 increase, the portion of the intermediate radio frequency signal RF2 that is higher than the DC voltage signal DC increases, and the conduction duty cycle of the target radio frequency signal RF3 decreases.

[0046] In one or more embodiments, the first resistor R1 can be an electronically adjustable resistor or a mechanically adjustable resistor. Among them, the electronically adjustable resistor can be a resistor whose resistance value is adjusted by adjusting the voltage or current, and the mechanically adjustable resistor can be a resistor whose resistance value is adjusted by rotation or sliding.

[0047] Specifically, when the first resistor R1 is a potentiometer, the first resistor R1 can have an adjustment terminal, and the adjustment terminal of the first resistor R1 is connected to one end or the other end of the first resistor R1. Then, when the adjustment terminal of the first resistor R1 moves, that is, when the position of the adjustment terminal of the first resistor R1 on the first resistor R1 changes, the resistance value of the first resistor R1 changes accordingly.

[0048] As Figure 3 shown, one end of the first resistor R1 is connected to the signal input terminal 100, the other end of the first resistor R1 is connected to the first input terminal In1 and one end of the first capacitor C1, the other end of the first capacitor C1 is grounded to GND, and the first capacitor C1 is an adjustable capacitor so that the modulation unit 200 has an adjustable capacitance value; among them, when the capacitance value of the first capacitor C1 increases, the conduction duty cycle of the target radio frequency signal RF3 decreases, and when the resistance capacitance value of the first capacitor C1 decreases, the conduction duty cycle of the target radio frequency signal RF3 increases.

[0049] Therefore, in the above radio frequency signal modulation circuit 10 of the present application, when the first resistor R1 and the first capacitor C1 are connected to the signal input terminal 100 and the first input terminal In1 in the above manner, and the first capacitor C1 is an adjustable capacitor, when the capacitance value of the first capacitor C1 increases, the conduction duty cycle of the target radio frequency signal RF3 decreases, and when the resistance capacitance value of the first capacitor C1 decreases, the conduction duty cycle of the target radio frequency signal RF3 increases. It is possible to adjust the conduction duty cycle of the radio frequency signal as needed by adjusting the capacitance value of the first capacitor C1 to meet the requirements for the conduction duty cycle of the radio frequency signal.

[0050] Specifically, when the capacitance value of the first capacitor C1 increases, the charging speed and the discharging speed of the first capacitor C1 slow down, the change rate in the waveform parameters of the intermediate radio frequency signal RF2 decreases, and the amplitude that can be achieved within the same charging time also decreases. Then, the portion of the intermediate radio frequency signal RF2 that is higher than the DC voltage signal DC decreases, and the conduction duty cycle of the target radio frequency signal RF3 decreases. When the resistance-capacitance value of the first capacitor C1 decreases, the charging speed and the discharging speed of the first capacitor C1 increase, the portion of the intermediate radio frequency signal RF2 that is higher than the DC voltage signal DC increases, and the conduction duty cycle of the target radio frequency signal RF3 decreases.

[0051] Please refer to Figure 4 , Figure 4 which is a circuit schematic diagram of a radio frequency signal modulation circuit in another embodiment of the present application. As Figure 4 shown, the two input terminals of the comparison unit 400 include a first input terminal In1 and a second input terminal In2. The DC power supply 300 is connected to the second input terminal In2. The modulation unit 200 includes a first resistor R1 and a first capacitor C1. The first resistor R1 and the first capacitor C1 are connected in series between the signal input terminal 100 and the ground GND in sequence. The first resistor R1 has an adjustment terminal, and the adjustment terminal of the first resistor R1 is connected to the first input terminal In1. The first capacitor C1 is used to charge during the high-level duration of the initial radio frequency signal RF1 and discharge during the low-level duration of the initial radio frequency signal RF1. The first resistor R1 is used to affect the charging speed and the discharging speed of the first capacitor C1. Among them, when the adjustment terminal of the first resistor R1 moves, the waveform parameters of the intermediate radio frequency signal RF2 change accordingly, so that the conduction duty cycle of the target radio frequency signal RF3 changes.

[0052] Thus, in the above radio frequency signal modulation circuit 10 of the present application, when the first resistor R1 and the first capacitor C1 are connected to the signal input terminal 100 and the first input terminal In1 in the above manner, and the first resistor R1 has an adjustment terminal, when the adjustment terminal of the first resistor R1 moves, the waveform parameters of the intermediate radio frequency signal RF2 change accordingly, so that the conduction duty cycle of the target radio frequency signal RF3 changes. It is possible to adjust the position of the adjustment terminal of the first resistor R1 on the first resistor R1 according to needs to adjust the conduction duty cycle of the radio frequency signal to meet the requirement of the conduction duty cycle of the radio frequency signal.

[0053] Specifically, the first resistor R1 can be an adjustable resistor. Further, the first resistor R1 can be a sliding rheostat. However, the adjustment terminal of the first resistor R1 is only connected to the first input terminal In1. Then, when the adjustment terminal of the first resistor R1 moves, that is, when the position of the adjustment terminal of the first resistor R1 on the first resistor R1 changes, the resistance value of the first resistor R1 does not change.

[0054] AsFigure 4 As shown, one end of the first resistor R1 is connected to the signal input terminal 100, the other end of the first resistor R1 is connected to one end of the first capacitor C1, the adjustment terminal of the first resistor R1 is connected to the first input terminal In1, and the other end of the first capacitor C1 is grounded to GND; wherein, when the adjustment terminal of the first resistor R1 moves towards one end of the first resistor R1, the conduction duty cycle of the target radio frequency signal RF3 increases, and when the adjustment terminal of the first resistor R1 moves towards the other end of the first resistor R1, the conduction duty cycle of the target radio frequency signal RF3 decreases.

[0055] Therefore, in the above radio frequency signal modulation circuit 10 of the present application, when the adjustment terminal of the first resistor R1 moves towards one end of the first resistor R1, the conduction duty cycle of the target radio frequency signal RF3 increases, and when the adjustment terminal of the first resistor R1 moves towards the other end of the first resistor R1, the conduction duty cycle of the target radio frequency signal RF3 decreases, and it can adjust the conduction duty cycle of the radio frequency signal as needed to meet the requirement of the conduction duty cycle of the radio frequency signal.

[0056] Specifically, when the adjustment terminal of the first resistor R1 moves towards one end of the first resistor R1, the part of the intermediate radio frequency signal RF2 higher than the DC voltage signal DC increases, and the conduction duty cycle of the target radio frequency signal RF3 increases; when the adjustment terminal of the first resistor R1 moves towards the other end of the first resistor R1, the part of the intermediate radio frequency signal RF2 higher than the DC voltage signal DC decreases, and the conduction duty cycle of the target radio frequency signal RF3 decreases.

[0057] Please refer to again Figure 3 、 Figure 4 。As Figure 3 、 Figure 4 shown, the comparison unit 400 includes an operational amplifier. The first input terminal In1, the second output terminal O1, and the output terminal O1 of the comparison unit 400 are respectively the non-inverting input terminal, the inverting input terminal, and the output terminal O1 of the operational amplifier. The operational amplifier is used to compare the intermediate radio frequency signal RF2 with the DC voltage signal DC. When the voltage value of the intermediate radio frequency signal RF2 is greater than the voltage value of the DC voltage signal DC, a high level is output, and when the voltage value of the intermediate radio frequency signal RF2 is less than the voltage value of the DC voltage signal DC, a low level is output to obtain the target radio frequency signal RF3.

[0058] Therefore, in the above radio frequency signal modulation circuit 10 of the present application, by setting the comparison unit 400 to include an operational amplifier, a high level can be output when the voltage value of the intermediate radio frequency signal RF2 is greater than the voltage value of the DC voltage signal DC, and a low level can be output when the voltage value of the intermediate radio frequency signal RF2 is less than the voltage value of the DC voltage signal DC to obtain the target radio frequency signal RF3.

[0059] Specifically, as Figure 2As shown, within one period T1 of the intermediate RF signal RF2 and the initial RF signal RF1, the operational amplifier outputs a low level, a high level, and a low level in sequence. However, the period T2 of the obtained target RF signal RF3 is still equal to T1. Therefore, the frequency of the target RF signal RF3 is also equal to the frequency of the initial RF signal RF1. The conduction duty cycle of the initial RF signal RF1 is the first half within one period T1, while the conduction duty cycle of the target RF signal RF3 is Figure 2 d2 shown, and the conduction duty cycle of the target RF signal RF3 is not the same as that of the initial RF signal RF1.

[0060] Specifically, when designing the voltage value and period of the initial RF signal RF1, the capacitance value of the first capacitor C1, the resistance value of the first resistor R1, and the voltage value of the DC voltage signal DC, to avoid the conduction duty cycle of the output target RF signal RF3 being zero, as Figure 2 shown, the voltage amplitude of the intermediate RF signal RF2 can be at least greater than the voltage value of the DC voltage signal DC, and the minimum voltage that the first capacitor C1 can discharge to should be at least less than the voltage value of the DC voltage signal DC. That is, according to the characteristics of the RC charge and discharge circuit composed of the first capacitor C1 and the first resistor R1, within the period T1 as Figure 2 shown, the voltage amplitude that the first capacitor C1 can charge to can be at least greater than the voltage value of the DC voltage signal DC, and the minimum voltage that the first capacitor C1 can discharge to can be at least less than the voltage value of the DC voltage signal DC.

[0061] In one or more embodiments, the RF signal modulation circuit 10 may further include a phase shift unit. The phase shift unit is connected between the comparison unit 400 and the signal output terminal 500, and is used to perform phase shift on the phase of the target RF signal RF3 so that the phase difference from the initial RF signal RF1 is zero. Among them, the phase shift angle of the phase shift unit can be set according to the angle corresponding to the time when the first capacitor C1 charges to the voltage value of the DC voltage signal DC.

[0062] In one or more embodiments, the conduction duty cycle of the target RF signal RF3 can also change according to the voltage value of the DC voltage signal DC output by the DC power supply 300. Among them, when the voltage value of the DC voltage signal DC increases, the conduction duty cycle of the target RF signal RF3 decreases, and when the voltage value of the DC voltage signal DC decreases, the conduction duty cycle of the target RF signal RF3 increases.

[0063] In one or more embodiments, the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the voltage value of the DC voltage signal DC can be adjusted separately, or the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the voltage value of the DC voltage signal DC can be adjusted simultaneously, or the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the voltage value of the DC voltage signal DC can be adjusted in any order. The present application is not limited thereto. When the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the voltage value of the DC voltage signal DC are simultaneously increased, the conduction duty cycle of the target radio frequency signal RF3 decreases; when the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the voltage value of the DC voltage signal DC are simultaneously decreased, the conduction duty cycle of the target radio frequency signal RF3 increases. Thus, the conduction duty cycle of the required target radio frequency signal RF3 can be obtained more quickly.

[0064] In one or more embodiments, in actual use, since the influence of the change in the voltage value of the DC voltage signal DC on the conduction duty cycle of the target radio frequency signal RF3 is greater than the influence of the change in the resistance value and / or capacitance value of the modulation unit 200 on the conduction duty cycle of the target radio frequency signal RF3. Therefore, first adjust the voltage value of the DC voltage signal DC, and then further adjust the resistance value and / or capacitance value of the modulation unit 200, that is, further adjust the resistance value and / or capacitance value of the first resistor R1 and the first capacitor C1. Thus, the conduction duty cycle of the target radio frequency signal RF3 can be roughly adjusted first, and then the conduction duty cycle of the target radio frequency signal RF3 can be finely adjusted to more accurately obtain the conduction duty cycle of the required radio frequency signal.

[0065] As Figure 3 、 Figure 4 shown, the radio frequency signal modulation circuit 10 further includes an isolation unit 600. The isolation unit 600 is connected between the signal input terminal 100 and the modulation unit 200 for isolating the signal input terminal 100 and the modulation unit 200.

[0066] Thus, in the above radio frequency signal modulation circuit 10 of the present application, by providing that the radio frequency signal modulation circuit 10 further includes an isolation unit 600 and the isolation unit 600 is connected between the signal input terminal 100 and the modulation unit 200, the signal input terminal 100 and the modulation unit 200 can be isolated to isolate the initial radio frequency signal RF1 and the intermediate radio frequency signal RF2, and prevent the intermediate radio frequency signal RF2 from affecting the output of the initial radio frequency signal RF1.

[0067] In one or more embodiments, the isolation unit 600 includes an operational amplifier. The non-inverting input terminal of the operational amplifier is connected to the signal input terminal 100, the inverting input terminal of the operational amplifier is grounded to GND, the output terminal of the operational amplifier is connected to the modulation unit 200, the non-inverting input terminal of the operational amplifier inputs an initial radio frequency signal RF1, and outputs the initial radio frequency signal RF1 through the output terminal.

[0068] Please refer to Figure 5 , Figure 5 which is a circuit schematic diagram of the radio frequency signal modulation circuit further including an adjustment unit and a control unit in an embodiment of the present application. As Figure 5 shown, the radio frequency signal modulation circuit 10 further includes an adjustment unit 700. The adjustment unit 700 is connected to the modulation unit 200 and is used to adjust the resistance value and / or capacitance value of the modulation unit 200.

[0069] As Figure 5 shown, the adjustment unit 700 includes a first adjustment module 710 and a second adjustment module 720. The first adjustment module 710 is connected to the first resistor R1, and the second adjustment module 720 is connected to the first capacitor C1. Among them, the first adjustment module 710 is used to adjust the resistance value of the first resistor R1, and the second adjustment module 720 is used to adjust the capacitance value of the first capacitor C1.

[0070] In one or more embodiments, according to the selection types of the first resistor R1 and the first capacitor C1, the first adjustment module 710 and the second adjustment module 720 can be a rotating motor or other adjustment circuits composed of electronic components. The present application is not limited thereto, as long as the resistance value of the first resistor R1 and the capacitance value of the first capacitor C1 can be adjusted.

[0071] In one or more embodiments, when the first resistor R1 has an adjustment terminal, the first adjustment module 710 adjusts the resistance value of the first resistor R1 by adjusting the adjustment terminal of the first resistor R1. Specifically, the first adjustment module 710 adjusts the resistance value of the first resistor R1 by adjusting the position of the adjustment terminal of the first resistor R1 on the first resistor R1.

[0072] As Figure 5 shown, the radio frequency signal modulation circuit 10 further includes a control unit 800. The control unit 800 is at least connected to the adjustment unit 700, and the control unit 800 is at least used to output a control signal to control the adjustment unit 700 to adjust the resistance value and / or capacitance value of the modulation unit 200.

[0073] In one or more embodiments, the control unit 800 is connected to both the first adjustment module 710 and the second adjustment module 720, and is configured to output corresponding control signals to control the first adjustment module 710 to adjust the resistance value of the first resistor R1, and control the second adjustment module 720 to adjust the capacitance value of the first capacitor C1. Wherein, when the first adjustment module 710 and the second adjustment module 720 are rotating motors, the corresponding control signals may be pulse signals.

[0074] As Figure 5 shown, the control unit 800 is also connected to the DC power supply 300, and the control unit 800 is further configured to control the voltage value of the DC voltage signal DC.

[0075] In one or more embodiments, the control unit 800 may also be configured to simultaneously increase the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the voltage value of the DC voltage signal DC, or simultaneously decrease the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the voltage value of the DC voltage signal DC.

[0076] In one or more embodiments, the control unit 800 may also be configured to first adjust the voltage value of the DC voltage signal DC, and then further adjust the resistance value and / or capacitance value of the modulation unit 200, that is, further adjust the resistance value and / or capacitance value of the first resistor R1 and the first capacitor C1.

[0077] In one or more embodiments, the control unit 800 may be a general-purpose processor such as a Central Processing Unit (CPU), or may be a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field-Programmable Gate Array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or may also be a microprocessor such as a Micro Control Unit (MCU).

[0078] With the above structure, the radio frequency signal modulation circuit 10 of the present application can make the conduction duty cycle of the obtained target radio frequency signal RF3 different from that of the initial radio frequency signal RF1, but the frequency of the target radio frequency signal RF3 is still the same as that of the initial radio frequency signal RF1. It can also further change the conduction duty cycle of the target radio frequency signal RF3 through various adjustment methods, accurately obtain the required conduction duty cycle of the radio frequency signal, and meet the requirements for the conduction duty cycle of the radio frequency signal.

[0079] Please refer to Figure 6 , Figure 6 , which is a block diagram of a radio frequency signal generating device in an embodiment of the present application. As shown in Figure 6 , the present application also provides a radio frequency signal generating device 1000. The radio frequency signal generating device 1000 includes the radio frequency signal modulation circuit 10 in any of the foregoing embodiments.

[0080] Please refer to again Figure 1 . As shown in Figure 1 , the radio frequency signal modulation circuit 10 includes: a signal input terminal 100, a modulation unit 200, a comparison unit 400, and a signal output terminal 500. The signal input terminal 100 is used to input an initial radio frequency signal RF1; the modulation unit 200 is connected to the signal input terminal 100 and is used to modulate the initial radio frequency signal RF1 to obtain an intermediate radio frequency signal RF2; the comparison unit 400 includes two input terminals and an output terminal O1. One of the input terminals is connected to the modulation unit 200 to receive the intermediate radio frequency signal RF1, and the other input terminal is used to receive a direct current voltage signal DC. The comparison unit 400 is used to compare the intermediate radio frequency signal RF2 with the direct current voltage signal DC to obtain a target radio frequency signal RF3 and output it through the output terminal O1. Among them, the conduction duty cycle of the target radio frequency signal RF3 is different from that of the initial radio frequency signal RF1, and the frequency of the target radio frequency signal RF3 is the same as that of the initial radio frequency signal RF1; the signal output terminal 500 is connected to the output terminal O1 of the comparison unit 400 and is used to output the target radio frequency signal RF3; among them, the conduction duty cycle of the target radio frequency signal RF3 changes at least according to the change of the resistance value and / or capacitance value of the modulation unit 200.

[0081] Among them, for the more specific structure of the radio frequency signal modulation circuit 10, reference can be made to the relevant content of the radio frequency signal modulation circuit 10 in any of the foregoing embodiments, which will not be elaborated here.

[0082] As shown in Figure 6 , the radio frequency signal generating device 1000 may further include a crystal oscillator circuit 20. The crystal oscillator circuit 20 is connected to the radio frequency signal modulation circuit 10. The crystal oscillator circuit 20 is used to output the initial radio frequency signal RF1. The radio frequency signal generating device 1000 is used to be connected to a load RL to output the target radio frequency signal RF3 to the load RL.

[0083] Among them, the crystal oscillator circuit 20 may be a quartz crystal oscillator, which has a piezoelectric effect. The conduction duty cycle of the generated initial radio frequency signal RF1 is 50%, and it is a square wave signal.

[0084] The RF signal modulation circuit 10 and the RF signal generating device 1000 of the present application, through the above structure, can make the conduction duty cycle of the obtained target RF signal RF3 different from that of the initial RF signal RF1, but the frequency of the target RF signal RF3 is still the same as that of the initial RF signal RF1. It can also further change the conduction duty cycle of the target RF signal RF3 through various adjustment methods, accurately obtain the required conduction duty cycle of the RF signal, meet the requirements of the conduction duty cycle of the RF signal, and better output to the load RL.

[0085] Please refer to Figure 7 , Figure 7 which is a block diagram of the RF power supply device in an embodiment of the present application. As Figure 7 shown, the present application also provides an RF power supply device 1, and the RF power supply device 1 includes the RF signal generating device 1000 in any of the foregoing embodiments.

[0086] Please refer to again Figure 6 . As Figure 6 shown, the RF signal generating device 1000 includes an RF signal modulation circuit 10.

[0087] Among them, the more specific structure of the RF signal generating device 1000 can be seen in the relevant content of the RF signal generating device 1000 in any of the foregoing embodiments, which will not be elaborated here.

[0088] In one or more embodiments, the RF power supply device 1 may further include devices such as a power supply device, an RF signal amplification device, an RF signal detection device, and an impedance matching network. The RF power supply device 1 is used to be connected to the load RL to output an RF signal obtained based on the target RF signal RF3 to the load RL.

[0089] Among them, the RF signal generating device 1000 can be connected between the power supply device and the load RL. When the RF power supply device 1 includes devices such as an RF signal amplification device, an RF signal detection device, and an impedance matching network, the RF power supply device 1 including devices such as an RF signal amplification device, an RF signal detection device, and an impedance matching network can be sequentially connected between the RF signal generating device 1000 and the load RL.

[0090] The RF signal modulation circuit 10, the RF signal generating device 1000, and the RF power supply device 1 of the present application, through the above structure, can make the conduction duty cycle of the obtained target RF signal RF3 different from that of the initial RF signal RF1, but the frequency of the target RF signal RF3 is still the same as that of the initial RF signal RF1. It can also further change the conduction duty cycle of the target RF signal RF3 through various adjustment methods, accurately obtain the required conduction duty cycle of the RF signal, meet the requirements of the conduction duty cycle of the RF signal, and better output to the load RL.

[0091] The above description is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should be covered within the protection scope of the present application; without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A radio frequency signal modulation circuit, characterized in that Comprising: A signal input terminal for inputting an initial radio frequency signal; A modulation unit connected to the signal input terminal for modulating the initial radio frequency signal to obtain an intermediate radio frequency signal; A comparison unit including two input terminals and an output terminal. One of the input terminals is connected to the modulation unit for receiving the intermediate radio frequency signal, and the other input terminal is for receiving a DC voltage signal. The comparison unit is used to compare the intermediate radio frequency signal with the DC voltage signal to obtain a target radio frequency signal and output it through the output terminal. Wherein, the conduction duty cycle of the target radio frequency signal is different from that of the initial radio frequency signal, and the frequency of the target radio frequency signal is the same as that of the initial radio frequency signal; A signal output terminal connected to the output terminal of the comparison unit for outputting the target radio frequency signal; Wherein, at least one of the intermediate radio frequency signal and the DC voltage signal is variable so that the conduction duty cycle of the target radio frequency signal changes; The radio frequency signal modulation circuit further includes a DC power supply for outputting the DC voltage signal. The two input terminals of the comparison unit include a first input terminal and a second input terminal. The DC power supply is connected to the second input terminal. The modulation unit includes a first resistor and a first capacitor. The first resistor and the first capacitor are connected in series between the signal input terminal and the ground in sequence. The first resistor has an adjustment terminal, and the adjustment terminal of the first resistor is connected to the first input terminal. The first capacitor is used to charge during the high-level duration of the initial radio frequency signal and discharge during the low-level duration of the initial radio frequency signal. The first resistor is used to affect the charging speed and discharging speed of the first capacitor; Wherein, when the adjustment terminal of the first resistor moves, the waveform parameters of the intermediate radio frequency signal change accordingly, so that the conduction duty cycle of the target radio frequency signal changes; Wherein, one end of the first resistor is connected to the signal input terminal, the other end of the first resistor is connected to one end of the first capacitor, and the other end of the first capacitor is grounded. When the adjustment terminal of the first resistor moves towards one end of the first resistor, the conduction duty cycle of the target radio frequency signal increases. When the adjustment terminal of the first resistor moves towards the other end of the first resistor, the conduction duty cycle of the target radio frequency signal decreases; The radio frequency signal modulation circuit further includes a phase shift unit connected between the comparison unit and the signal output terminal for phase-shifting the phase of the target radio frequency signal so that the phase difference from the initial radio frequency signal is zero. Wherein, the phase shift angle of the phase shift unit is set according to the angle corresponding to the time when the first capacitor charges to the voltage value of the DC voltage signal; 2. The radio frequency signal modulation circuit according to claim 1, wherein The modulation unit has an adjustable resistance value and / or an adjustable capacitance value. Wherein, the change of the resistance value and / or capacitance value of the modulation unit causes the intermediate radio frequency signal to change, and the conduction duty cycle of the target radio frequency signal changes according to the change of the intermediate radio frequency signal.

3. The radio frequency signal modulation circuit according to claim 2, wherein, The modulation unit is used to perform waveform modulation on the initial radio frequency signal to obtain an intermediate radio frequency signal with a specific waveform. Wherein, within at least part of a period, the voltage value of the intermediate radio frequency signal changes with time, and the waveform parameters of the intermediate radio frequency signal change at least according to the change of the resistance value and / or capacitance value of the modulation unit, so that the conduction duty cycle of the target radio frequency signal changes accordingly.

4. A radio frequency signal generating device, characterized in that, It includes the radio frequency signal modulation circuit according to any one of claims 1-3.

5. A radio frequency power supply device, characterized in that, It includes the radio frequency signal generating device according to claim 4.

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