Cleanroom-Compatible Robot End-Effector Exchange System

Abstract

The system includes a robot interface disposed on a robot arm and an end effector configured to be selectively coupled to the robot arm via the robot interface. The end effector includes an upper jaw portion, a lower jaw portion, and a pair of arms configured to carry a substrate. The upper jaw portion and the lower jaw portion are spaced apart in a first direction and biased together, and the pair of arms are spaced apart in a second direction orthogonal to the first direction. When the end effector is coupled to the robot arm, the robot interface is disposed between the upper jaw portion and the lower jaw portion. To exchange the end effector, the upper jaw portion and the lower jaw portion can be separated to release the robot interface.

Description

[0001] Cross - Reference to Related Applications

[0002] This application claims priority to the provisional patent application filed on February 7, 2022, and designated as U.S. Application No. 63 / 307,247, and the provisional patent application filed on December 29, 2022, and designated as U.S. Application No. 63 / 477,761, the entire disclosures of which are hereby incorporated by reference. Technical Field

[0003] The present disclosure relates to robotic arms and, more particularly, to an end effector for a robotic arm. Background Art

[0004] The evolution of the semiconductor manufacturing industry has placed increasing demands on yield management and, in particular, on metrology and inspection systems. Critical dimensions continue to shrink, but the industry needs to reduce the time to achieve high-yield, high-value production. Minimizing the total time from detecting a yield issue to resolving the issue determines the return on investment for semiconductor manufacturers.

[0005] Manufacturing semiconductor devices, such as logic and memory devices, typically involves processing semiconductor wafers using a large number of manufacturing processes to form various features and multiple levels of the semiconductor device. For example, lithography is a semiconductor manufacturing process that involves transferring a pattern from a reticle to a photoresist disposed on a semiconductor wafer. Additional examples of semiconductor manufacturing processes include, but are not limited to, chemical mechanical polishing (CMP), etching, deposition, and ion implantation. Multiple semiconductor devices may be fabricated on a single semiconductor wafer and then separated into individual semiconductor devices.

[0006] Inspection processes are used at various steps during semiconductor manufacturing to detect defects on the wafers to facilitate higher yields and thus higher profits during the manufacturing process. Inspection has always been an important part of manufacturing semiconductor devices, such as integrated circuits (ICs). However, as the size of semiconductor devices decreases, inspection becomes even more important for the successful manufacture of acceptable semiconductor devices because smaller defects can cause device failures. For example, as the size of semiconductor devices decreases, it has become necessary to detect defects having decreasing sizes because even relatively small defects can cause unwanted aberrations in semiconductor devices.

[0007] Between various manufacturing processes and inspection processes, a robotic arm can be used to transport substrates. An end effector connected to the robotic arm can be specifically shaped to perform various tasks and carry specific objects. However, existing end effectors are typically very bulky and are configured to carry objects that are larger and / or heavier than semiconductor substrates. Existing end effectors are also typically limited when used with compatible robotic arm manufacturers. Therefore, there is a need to redesign semiconductor manufacturing and inspection systems to accommodate these end effectors.

[0008] Each step in the manufacturing and inspection processes may require a different end effector to handle the substrate. Therefore, it may be necessary to quickly switch between end effectors connected to the robotic arm. However, a large number of existing end effectors require equally powerful tool changers and a larger footprint to accommodate. In addition, existing tool changers are not cleanroom-compatible and can contaminate the system and the substrate.

[0009] Therefore, there is a need for an end effector and a tool exchange system for carrying semiconductor substrates that are lightweight, compact, robot-agnostic, externally actuated, and cleanroom-compatible. Summary of the Invention

[0010] Embodiments of the present disclosure provide a system that includes a robotic interface disposed on a robotic arm and an end effector configured to be selectively coupled to the robotic arm via the robotic interface. The end effector may include an upper jaw, a lower jaw, and a pair of arms configured to carry a substrate. The upper jaw and the lower jaw may be spaced apart in a first direction and biased together, and the pair of arms may be spaced apart in a second direction orthogonal to the first direction. When the end effector is coupled to the robotic arm, the robotic interface may be disposed between the upper jaw and the lower jaw.

[0011] According to an embodiment of the present disclosure, the end effector may further include a spring connected to the upper jaw and the lower jaw. The spring may be preloaded to push the upper jaw and the lower jaw together.

[0012] According to an embodiment of the present disclosure, a first motion coupler may be disposed between an upper surface of the lower jaw and a lower surface of the robotic interface. A second motion coupler may be disposed between a lower surface of the upper jaw and an upper surface of the robotic interface. When the robotic interface is disposed between the upper jaw and the lower jaw, the first motion coupler and the second motion coupler may engage the robotic interface with the upper jaw and the lower jaw.

[0013] According to an embodiment of the present disclosure, the end effector may further include a plunger and the robotic interface may further include a plunger socket. When the end effector is coupled to the robotic arm, the plunger may be coupled to the plunger socket. The plunger may be moved in an axial direction by the robotic arm to selectively couple to the plunger socket.

[0014] According to an embodiment of the present disclosure, the system may further include a tool changer having a pair of gripping arms. The pair of gripping arms may be configured to separate the upper jaw portion from the lower jaw portion. The tool changer may be disposed in a garage, and when the end effector is positioned in the garage, the pair of gripping arms may be configured to separate the upper jaw portion from the lower jaw portion. An optical sensor may be disposed in the garage, and the optical sensor may be configured to detect when the end effector is positioned in the garage. A measurement sensor may be disposed in the garage, and the measurement sensor may be configured to detect the thickness of the end effector.

[0015] Another embodiment of the present disclosure provides a method. The method may include: disposing a robotic interface on a robotic arm; selectively coupling an end effector to the robotic arm via the robotic interface; and disposing a substrate on a pair of arms of the end effector. The end effector may include an upper jaw portion and a lower jaw portion that are spaced apart in a first direction and biased together, and the pair of arms may be spaced apart in a second direction orthogonal to the first direction. When the end effector is coupled to the robotic arm, the robotic interface may be disposed between the upper jaw portion and the lower jaw portion.

[0016] According to an embodiment of the present disclosure, selectively coupling the end effector to the robotic arm via the robotic interface may include: separating the upper jaw portion from the lower jaw portion with a tool changer including a pair of gripping arms; inserting the robotic interface between the upper jaw portion and the lower jaw portion; and closing the upper jaw portion and the lower jaw portion onto the robotic interface.

[0017] According to an embodiment of the present disclosure, the tool changer may be disposed in a garage, and separating the upper jaw portion from the lower jaw portion with a tool changer including a pair of gripping arms may include: separating the upper jaw portion from the lower jaw portion with the pair of gripping arms when the end effector is positioned in the garage.

[0018] According to an embodiment of the present disclosure, the method may further include detecting when the end effector is positioned in the garage by an optical sensor.

[0019] According to an embodiment of the present disclosure, the method may further include detecting the thickness of the end effector positioned in the storage area by a measurement sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] To more fully understand the nature and objects of the present disclosure, reference should be made to the following detailed description taken in conjunction with the accompanying drawings, in which:

[0021] Figure 1 Illustrates a system according to an embodiment of the present disclosure;

[0022] Figure 2A is a top view of an end effector coupled to a robot interface according to an embodiment of the present disclosure;

[0023] Figure 2B are decoupled from each other Figure 2A of the end effector and the robot interface;

[0024] Figure 3A are coupled to each other Figure 2A of the end effector and the robot interface;

[0025] Figure 3B are decoupled from each other Figure 3A of the end effector and the robot interface;

[0026] Figure 4A is Figure 2A of the upper jaw of the end effector;

[0027] Figure 4B is Figure 2A of the end effector;

[0028] Figure 4C is Figure 2A of the lower jaw of the end effector;

[0029] Figure 4D is Figure 4C of the lower jaw;

[0030] Figure 5A Illustrates a storage area for storing an end effector according to an embodiment of the present disclosure;

[0031] Figure 5B Illustrates a tool changer for separating Figure 5A the upper jaw and the lower jaw of the end effector;

[0032] Figure 6A is a cross-sectional top view of an end effector coupled to a robot interface according to another embodiment of the present invention;

[0033] Figure 6B are decoupled from each otherFigure 6A Cross-sectional top view of the end effector and the robot interface;

[0034] Figure 7A Top view of the end effector coupled to the robot interface according to another embodiment of the present invention;

[0035] Figure 7B Are decoupled from each other Figure 7A Top view of the end effector and the robot interface;

[0036] Figure 8A Are coupled to each other by a ball lock mechanism Figure 7A Side view of the end effector and the robot interface;

[0037] Figure 8B Are decoupled from each other Figure 8A Side view of the end effector and the robot interface;

[0038] Figure 9A Are coupled to each other by a pin lock mechanism Figure 7A Side view of the end effector and the robot interface;

[0039] Figure 9B Are decoupled from each other Figure 9A Side view of the end effector and the robot interface;

[0040] Figure 10A Are coupled to each other by a cam lock mechanism Figure 7A Side view of the end effector and the robot interface;

[0041] Figure 10B Are decoupled from each other Figure 10A Side view of the end effector and the robot interface;

[0042] Figure 11A Top view of the end effector coupled to the robot interface according to another embodiment of the present invention;

[0043] Figure 11B Are decoupled from each other Figure 11A Top view of the end effector and the robot interface;

[0044] Figure 12A Are coupled to each other by a dovetail lock mechanism Figure 11A Side view of the end effector and the robot interface;

[0045] Figure 12B Are decoupled from each other Figure 12A Side view of the end effector and the robot interface;

[0046] Figure 13Aare coupled to each other by a marble lock mechanism Figure 11A Side view of the end effector and the robotic interface of

[0047] Figure 13B are decoupled from each other Figure 13A Side view of the end effector and the robotic interface of

[0048] Figure 14 is a flowchart of a method according to an embodiment of the present disclosure; and

[0049] Figure 15 is a flowchart of a method according to another embodiment of the present disclosure. DETAILED DESCRIPTION

[0050] Although the claimed subject matter will be described with reference to specific embodiments, other embodiments (including embodiments that do not provide all of the benefits and features set forth herein) are also within the scope of the present disclosure. Various structural, logical, process, step, and electronic changes may be made without departing from the scope of the present disclosure. Accordingly, the scope of the present disclosure is defined only by reference to the appended claims.

[0051] Referring Figure 1 to FIGS. 1 to 5, embodiments of the present disclosure provide a system 100. The system 100 may include a robotic arm 110. The robotic arm 110 may move with six degrees of freedom within a robotic envelope. The size and shape of the robotic envelope may depend on the particular configuration of the robotic arm 110 (e.g., the length of the arm, the number of joints, etc.) and are not limited herein. The robotic arm 110 may include any number of links, joints, or tracks and any rotational or linear actuator mechanisms to allow the robotic arm 110 to have degrees of freedom, range, and space suitable for a particular application. It should be understood that the phrase "robotic arm" as used herein may refer to any part of a robotic system and need not be embodied as an "arm".

[0052] System 100 may further include a robot interface 120. The robot interface 120 may be made of a suitable material for weight, strength, and hardness for a particular application. For example, the robot interface 120 may be made of aluminum, titanium, ceramic, carbon fiber, steel, or other materials. The robot interface 120 may be disposed on the robot arm 110. For example, the robot interface 120 may be disposed on the distal end of the robot arm 110. It should be understood that the manner in which the robot interface 120 is disposed on and / or fixed to the robot arm 110 may depend on the particular structure of the robot arm 110 and is not limited herein. For example, the robot interface 120 may be attached to a set of positioning features or a flange having axial / rotational locking features of the robot arm 110 and fixed with three or more bolts or welding. The robot interface 120 may be an integral part of the robot arm 110, or a portion of the robot arm 110 may be replaced with the robot interface 120.

[0053] System 100 may further include an end effector 130. The end effector 130 may be made of a suitable material for weight, strength, and hardness for a particular application. For example, the end effector 130 may be made of aluminum, titanium, ceramic, carbon fiber, steel, or other materials. The end effector 130 may be configured to be selectively coupled to the robot arm 110 via the robot interface 120. The end effector 130 may include an upper jaw 140 and a lower jaw 150, as Figure 3A and 3B shown. The upper jaw 140 and the lower jaw 150 may be spaced apart in a first direction. The upper jaw 140 and the lower jaw 150 may be biased together. When the end effector 130 is coupled to the robot arm 110, the robot interface 120 may be disposed between the upper jaw 140 and the lower jaw 150.

[0054] The end effector 130 may further include a pair of arms 132, as Figure 2A and 2B shown. The pair of arms 132 may be integrally formed with the upper jaw 140 and / or the lower jaw 150. The pair of arms 132 may be configured to carry a substrate 101. The substrate 101 may have a circular or rectangular shape. The pair of arms 132 may be spaced apart in a second direction. The second direction may be orthogonal to the first direction. The pair of arms 132 may include one or more protrusions 133 configured to contact the substrate 101. The one or more protrusions 133 may include an elastomeric material and may provide clamping when contacting the substrate 101. The one or more protrusions 133 may have a hook-like structure or an angled surface forming an acute angle to provide a force vector pressing the substrate 101 onto the pair of arms 132. It should be understood that the end effector 130 may alternatively include structures other than the pair of arms 132 configured to carry the substrate 101. Such structures may be of any shape, such as a T-shape, a mesh structure, a solid plate, or other structures.

[0055] The end effector 130 may further include a spring 134 connected to the upper jaw portion 140 and the lower jaw portion 150. For example, as Figure 3A shown, a first end 134a of the spring 134 may be connected to the upper jaw portion 140, and a second end 134b of the spring 134 may be connected to the lower jaw portion 150. The spring 134 may be disposed in an upper guide member 143 of the upper jaw portion 140 and a lower guide member 153 of the lower jaw portion 150. The upper guide member 143 and the lower guide member 153 may be cylindrical channels extending through the upper jaw portion 140 and the lower jaw portion 150, respectively. The upper guide member 143 may include an upper cross-bar 144 spanning the upper guide member 143 on an upper surface 141 of the upper jaw portion 140, and the lower guide member 153 may include a lower cross-bar 154 spanning the lower guide member 153 on a lower surface 152 of the lower jaw portion 150. The first end 134a of the spring 134 may be connected to the upper cross-bar 144 and the second end 134b of the spring may be connected to the lower cross-bar 154. For example, the first end 134a and the second end 134b of the spring may have hook or loop shapes that may loop around the upper cross-bar 144 and the lower cross-bar 154, respectively. The spring 134 may be pre-loaded to push the upper jaw portion 140 and the lower jaw portion 150 together. In other words, the distance between a lower surface 142 of the upper jaw portion 140 and an upper surface 151 of the lower jaw portion 150 may be less than the free length of the spring 134. In this way, the spring 134 may push the upper jaw portion 140 and the lower jaw portion 150 together.

[0056] According to an embodiment of the present disclosure, the end effector 130 may include four springs 134 connected to the upper jaw portion 140 and the lower jaw portion 150. Each spring 134 may be disposed in a corresponding upper guide member 143 and lower guide member 153, and may have a first end 134a connected to the upper cross-bar 144 and a second end 134b connected to the lower cross-bar 154, the upper cross-bar 144 and the lower cross-bar 154 being disposed in their respective upper guide members 143 and lower guide members 153, respectively. The four springs 134 may be arranged in a square or rectangular shape, as Figure 4A , 4C and as shown in 4D.

[0057] System 100 may further include one or more motion couplers. When the end effector 130 is coupled to the robotic arm 110 via the robotic interface 120, the motion couplers may engage with each other. When the motion couplers are engaged, relative movement between the end effector 130 and the robotic interface 120 may be prevented (i.e., the end effector 130 and the robotic interface 120 may be restricted in all six degrees of freedom). The one or more motion couplers may include contact between a conical, spherical, hemispherical, cylindrical, or canoe-shaped feature of one of the end effector 130 and the robotic interface 120 and a tetrahedral groove, conical groove, V-shaped groove, or flat groove of the other of the end effector 130 and the robotic interface 120. It should be understood that to restrict all six degrees of freedom, the motion couplers may provide at least six contact points between the end effector 130 and the robotic interface 120. The six contact points may be constructed by a combination of one or more of a tetrahedral groove (three contact points), a V-shaped groove (two contact points), or a flat groove (one contact point). Alternatively, the motion couplers may provide annular contact between the end effector 130 and the robotic interface 120 with a conical groove.

[0058] A first motion coupler may be disposed between the upper surface 151 of the jaw portion 150 and the lower surface 122 of the robotic interface 120. For example, one or more spherical structures 156 may be disposed on the upper surface 151 of the jaw portion 150 (as Figure 4C shown), and one or more V-shaped grooves 126 may be disposed on the lower surface 122 of the robotic interface 120 (as Figure 4Bas shown). In an embodiment, the first motion coupler may be defined by three spherical structures 156 and three V-grooves 126, where each of the three spherical structures 156 is aligned (in the axial direction and the second direction) with a corresponding one of the three V-grooves 126. Thus, when the end effector 130 is coupled to the robotic arm 110 via the robotic interface 120, the first motion coupler may provide six contact points (i.e., two contact points for each pair of the spherical structure 156 and the V-groove 126) to limit all six degrees of freedom. The three spherical structures 156 and the three V-grooves 126 may be arranged in a triangle. For example, two of the spherical structures 156 and two of the V-grooves 126 may be disposed on one side of the lower jaw 150 and the robotic interface 120, respectively, and the other one of the spherical structure 156 and the V-groove 126 may be disposed on the other side of the lower jaw 150 and the robotic interface 120, respectively. The three V-grooves 126 may be angled relative to each other. For example, the three V-grooves 126 may be angled approximately 120° relative to each other. Although the spherical structures 156 and the V-grooves 126 are described as parts of the lower jaw 150 and the robotic interface 120, respectively, the reverse arrangement (i.e., where the lower jaw 150 has V-grooves and the robotic interface 120 has spherical structures) is also considered to be within the scope of the present disclosure.

[0059] The second motion coupler may be disposed between the lower surface 142 of the upper jaw 140 and the upper surface 121 of the robotic interface 120. For example, one or more spherical structures 146 may be disposed on the lower surface 142 of the upper jaw 140 (as Figure 4A shown), and one or more V-grooves 127 may be disposed on the upper surface 121 of the robotic interface 120 (as Figure 2B(shown in). In an embodiment, the second motion coupling may be defined by three spherical structures 146 and three V-shaped grooves 127, where each of the three spherical structures 146 is aligned with a corresponding one of the three V-shaped grooves 127 (in the axial direction and the second direction). Thus, when the end effector 130 is coupled to the robotic arm 110 via the robotic interface 120, the second motion coupling may provide six contact points (i.e., two contact points for each pair of spherical structure 146 and V-shaped groove 127) to limit all six degrees of freedom. The three spherical structures 146 and the three V-shaped grooves 127 may be arranged in a triangle. For example, two of the spherical structures 146 and two of the V-shaped grooves 127 may be disposed on one side of the upper jaw 140 and the robotic interface 120, respectively, and the other one of the spherical structure 146 and the V-shaped groove 127 may be disposed on the other side of the upper jaw 140 and the robotic interface 120, respectively. The three V-shaped grooves 127 may be angled relative to each other. For example, the three V-shaped grooves 127 may be angled approximately 120° relative to each other. Although the spherical structures 146 and the V-shaped grooves 127 are described as parts of the upper jaw 140 and the robotic interface 120, respectively, the opposite arrangement (i.e., where the upper jaw 140 has V-shaped grooves and the robotic interface 120 has spherical structures) is also considered to be within the scope of the present disclosure.

[0060] According to an embodiment of the present disclosure, system 100 may include both the first motion coupler and the second motion coupler described above. Thus, when the end effector 130 is coupled to the robotic arm 110 via the robotic interface 120, the first motion coupler and the second motion coupler may each provide six contact points (i.e., two contact points for each pair of spherical structures 156 and V-grooves 126 and two contact points for each pair of spherical structures 146 and V-grooves 127) to limit all six degrees of freedom. The first motion coupler and the second motion coupler may be aligned relative to each other. For example, each of the spherical structures 156 of the lower jaw 150, the spherical structures 146 of the upper jaw 140, and the V-grooves 126 and V-grooves 127 of the robotic interface 120 may be aligned in a first direction and a second direction. Alternatively, the first motion coupler and the second motion coupler may not be aligned relative to each other. For example, the pairs of spherical structures 156 and V-grooves 126 of the first motion coupler may not be aligned with the pairs of spherical structures 146 and V-grooves 127 of the second motion coupler in the first direction and / or the second direction. In an embodiment, the first motion coupler and the second motion coupler may be arranged relative to each other. For example, the positions of the pairs of spherical structures 156 and V-grooves 126 of the first motion coupler may be a mirror image of the positions of the pairs of spherical structures 146 and V-grooves 127 of the second motion coupler. Thus, when the robotic interface 120 is flipped on either side (i.e., such that the spherical structures 156 and the spherical structures 146 may contact the V-grooves 126 or the V-grooves 127 in two orientations), the first motion coupler and the second motion coupler may engage properly.

[0061] Reference Figure 2A and 2B, the end effector 130 may further include a plunger 135. The plunger 135 may be centrally disposed in the end effector 130 in a second direction. The plunger 135 may have a first end 135a and a second end 135b. The robotic interface 120 may further include a plunger socket 125. The plunger socket 125 may have a first end 125a and a second end 125b. When the end effector 130 is coupled to the robotic arm 110 via the robotic interface 120, the plunger 135 may be coupled to the plunger socket 125. For example, the first end 135a of the plunger 135 may be coupled to the second end 125b of the plunger socket 125. The robotic arm 110 may be configured to move the coupled plunger 135 and plunger socket 125 in an axial direction using a pneumatic actuator or other mechanism. For example, the robotic arm 110 may interact with the first end 125a of the plunger socket 125 to move the coupled plunger 135 and plunger socket 125 in an axial direction. The second end 135b of the plunger 135 may be configured to contact a substrate 101 disposed on the end effector 130. Thus, by moving the coupled plunger 135 and plunger socket 125 in an axial direction, the second end 135b of the plunger 135 may press against the substrate 101 and hold the substrate on the end effector 130. The second end 135b of the plunger 135 may include an elastomeric material and may provide clamping when contacting the substrate 101. The robotic arm 110 may also be configured to retract the coupled plunger 135 and plunger socket 125 to release the clamping of the substrate 101. The end effector 130 may include a preload spring 136 configured to bias the plunger 135 toward the retracted position to assist in retracting the coupled plunger 135 and plunger socket 125 by the robotic arm 110. Alternatively, the robotic arm 110 may be configured to retract the coupled plunger 135 and plunger socket 125 without assistance. The plunger 135 may be disposed in a bushing 137 disposed on the upper surface 151 of the jaw portion 150.

[0062] Reference Figure 5A and 5B, the system 100 may further include a tool exchanger 160. The tool exchanger 160 may include a pair of clamping arms 161. The pair of clamping arms 161 may include an upper clamping arm 161a and a lower clamping arm 161b. The upper clamping arm 161a and the lower clamping arm 161b may be configured to separate the upper jaw portion 140 from the lower jaw portion 150. For example, the upper clamping arm 161a may contact the lower surface 142 of the upper jaw portion 140, and the lower clamping arm 161b may contact the upper surface 151 of the lower jaw portion 150. Thus, when the pair of clamping arms 161 separates the upper jaw portion 140 from the lower jaw portion 150, the robotic interface 120 may be withdrawn from (or received within) the end effector 130, thereby providing an efficient tool exchange. The tool exchanger 160 may include a single pair of clamping arms 161 disposed on the side of the end effector 130, or may include two pairs of clamping arms 161 disposed on opposite sides of the end effector 130.

[0063] The tool exchanger 160 may be disposed in a storage area 165. The storage area 165 may be configured to store one or more end effectors 130 (as Figure 1 shown). For example, the storage area 165 may include one or more platforms 166, and one end effector 130 may be disposed on each platform 166. Each end effector 130 may be disposed upside down on the platform 166 (i.e., such that the upper jaw portion 140 is disposed on the platform 166). Alternatively, each end effector 130 may be disposed such that the lower jaw portion 150 is disposed on the platform 166. One or more platforms 166 may be vertically arranged within the storage area 165. Each platform 166 may move vertically within the storage area 165. The tool exchanger 160 may move vertically within the storage area 165. When the end effector 130 is positioned in the storage area 165, the pair of clamping arms 161 may be configured to separate the upper jaw portion 140 from the lower jaw portion 150. For example, the pair of clamping arms 161 may move vertically within the storage area 165 to align with the end effector 130. The pair of clamping arms 161 may also move inwards / outwards to engage with the upper jaw portion 140 and the lower jaw portion 150. It should be understood that the combination of the vertical movement and the inwards / outwards movement of the pair of clamping arms 161 may be used to avoid contact with the end effector 130 during the vertical movement of the tool exchanger 160 and / or to engage with the upper jaw portion 140 and the lower jaw portion 150. In some embodiments, the pair of clamping arms 161 may only move vertically within the storage area 165 to perform tool exchange without any inwards / outwards movement. The pair of clamping arms 161 may be configured not to apply a lateral force to the end effector 130 during tool exchange so as not to trip the robotic servo open loop of the robotic arm 110.

[0064] The system 100 may further include a processor 170. The processor 170 may include a microprocessor, a microcontroller, or other device.

[0065] The processor 170 can be coupled to the components of the system 100 in any suitable manner (e.g., via one or more transmission media, which may include wired and / or wireless transmission media), such that the processor 170 can receive the output. The processor 170 can be configured to perform many functions using the output. The wafer inspection tool can receive instructions or other information from the processor 170. Optionally, the processor 170 can communicate electronically with another wafer inspection tool, wafer metrology tool, or wafer inspection tool (not shown) to receive additional information or send instructions.

[0066] The processor 170 can be part of various systems, including personal computer systems, image computers, mainframe computer systems, workstations, network appliances, Internet appliances, or other devices. The subsystem or system can also include any suitable processor known in the art, such as a parallel processor. Additionally, the subsystem or system can include a platform with high-speed processing and software as a stand-alone or network-linked tool.

[0067] The processor 170 can be placed in the system 100 or another device or otherwise be part of the system 100 or another device. In an example, the processor 170 can be part of an independent control unit or in a centralized quality control unit. Multiple processors 170 can be used, thereby defining multiple subsystems of the system 100.

[0068] The processor 170 can be implemented in practice by any combination of hardware, software, and firmware. Furthermore, its functions as described herein can be performed by one unit, or divided among different components, each of which can in turn be implemented by any combination of hardware, software, and firmware. The program code or instructions for the processor 170 to implement various methods and functions can be stored in a readable storage medium (e.g., a memory).

[0069] If the system 100 includes more than one subsystem, then different processors 170 can be coupled to each other such that images, data, information, instructions, etc. can be sent between the subsystems. For example, one subsystem can be coupled to an additional subsystem via any suitable transmission media, which may include any suitable wired and / or wireless transmission media known in the art. Two or more of such subsystems can also be effectively coupled via a shared computer-readable storage medium (not shown).

[0070] The processor 170 can be configured to perform many functions using the output of the system 100 or other outputs. For example, the processor 170 can be configured to send the output to an electronic data storage unit or another storage medium. The processor 170 can be further configured as described herein.

[0071] The processor 170 may be part of a defect inspection system, a metrology system, a metrology system, or some other type of system. Thus, the embodiments disclosed herein describe some configurations that can be customized in many ways for systems with different capabilities that are more or less suitable for different applications.

[0072] The processor 170 may be configured according to any of the embodiments described herein. The processor 170 may also be configured to perform other functions or additional steps using the output of the system 100 or using images or data from other sources.

[0073] The processor 170 may be communicatively coupled to any of the various components or subsystems of the system 100 in any manner known in the art. In addition, the processor 170 may be configured to receive and / or obtain data or information (e.g., inspection results from an inspection system such as an inspection tool, a remote database containing design data, and the like) from other systems via a transmission medium that may include wired and / or wireless portions. In this way, the transmission medium can serve as a data link between the processor 170 and other subsystems of the system 100 or systems external to the system 100. The various steps, functions, and / or operations of the system 100 and method disclosed herein are performed by one or more of the following: electronic circuits, logic gates, multiplexers, programmable logic devices, ASICs, analog or digital control / switches, microcontrollers, or computing systems. Program instructions for implementing a method such as the methods described herein may be transmitted via a carrier medium or stored on a carrier medium. The carrier medium may include storage media such as read-only memory, random access memory, magnetic or optical disks, non-volatile memory, solid-state memory, magnetic tape, and the like. The carrier medium may include a transmission medium such as wires, cables, or wireless transmission links. For example, the various steps described throughout this disclosure may be performed by a single processor 170 (or computer subsystem) or alternatively by multiple processors 170 (or multiple computer subsystems). In addition, different subsystems of the system 100 may include one or more computing or logic systems. Thus, the above description should not be construed as limiting the disclosure but merely as illustrative.

[0074] System 100 may further include an optical sensor 171. The optical sensor 171 may be in electronic communication with the processor 170. The optical sensor 171 may be disposed in the storage area 165 (e.g., on the platform 166). The optical sensor 171 may be configured to detect when the end effector 130 is positioned in the storage area 165 (i.e., on the platform 166). For example, the optical sensor 171 may generate an output signal based on light received from a light source 172. The light source 172 may be disposed above the platform 166 in the storage area 165. The output signal may be distinguishable when the end effector 130 is positioned in the storage area 165. For example, when the end effector 130 is not positioned in the storage area 165, the optical sensor 171 may receive light from the light source 172, and when the end effector 130 is disposed in the storage area 165, the end effector 130 may block or interrupt the light received by the optical sensor 171. In this way, system 100 may use the optical sensor 171 to distinguish which platforms 166 have the end effector 130 disposed thereon, and the processor 170 may control the tool exchanger 160 to move to the appropriate platform 166 for coupling / decoupling the end effector 130 with the robotic arm 110 via the robotic interface 120. System 100 may include other sensors configured to detect when the end effector 130 is positioned in the storage area 165, such as microswitches, magnetic switches (e.g., reed switches, Hall effect switches, etc.), or pneumatic pressure sensors (e.g., orifice / drop sensors).

[0075] System 100 may further include a measurement sensor 173. The measurement sensor 173 may be in electronic communication with the processor 170. The measurement sensor 173 may be disposed above the platform 166 in the storage area. The measurement sensor 173 may be configured to detect the thickness of the end effector 130. For example, the measurement sensor 173 may emit a laser that is reflected from the surface of the end effector 130. Based on the amount of time between the laser emission and detection by the measurement sensor 173, the thickness of the end effector 130 may be determined. It should be understood that different end effectors 130 may have different thicknesses, and thus the measurement sensor 173 may be used to determine which type of end effector 130 is disposed on the platform 166. Additionally, the thickness of the end effector 130 may depend on the alignment of the end effector 130 and the robotic interface 120 during coupling. For example, the measurement sensor 173 may detect a greater thickness of the end effector 130 when the end effector 130 and the robotic interface 120 are misaligned compared to when the end effector 130 and the robotic interface 120 are properly aligned. In this manner, the processor 170 may use the measurement sensor 173 to detect whether the end effector 130 is properly coupled to the robotic arm 110 via the robotic interface 120, and may control the tool exchanger 160 and / or the robotic arm 110 to realign the end effector 130 with the robotic interface 120 for proper coupling. System 100 may include other sensors configured to detect the thickness of the end effector 130, such as an optical micrometer that measures how much of a wide beam is blocked by the end effector 130, a capacitive or inductive proximity sensor, a pressure sensor, an ultrasonic sensor, or a shadowgraph camera-based sensor.

[0076] Regarding system 100, an end effector and a tool exchange system for carrying a semiconductor substrate are provided, which may offer several advantages over the related art. For example, system 100 may be lightweight so as not to affect the robot speed or system throughput. System 100 may also be compact so as not to limit the robot envelope. System 100 may be robot-agnostic so as to integrate with existing and new robotic arms. System 100 may also be externally actuated so as not to require integration with the robotic arm and to allow for safety checks to ensure proper coupling. By generating low particles (e.g., particles less than 45 nm) during tool exchange, system 100 may be cleanroom-compatible.

[0077] Reference Figure 6A and 6B and, another embodiment of the present disclosure provides system 200. System 200 differs from system 100 in the structure of the robotic interface 220 and the end effector 230. Except as otherwise described herein, the components of system 100 may also be applied to system 200.

[0078] The end effector 230 may include a first sleeve 240 and a second sleeve 250. The first sleeve 240 and the second sleeve 250 may extend in the axial direction toward the robot interface 220. The first sleeve 240 and the second sleeve 250 may be spaced apart in a second direction. The first sleeve 240 may have a first internal space 245, and the second sleeve 250 may have a second internal space 255. The first internal space 245 and the second internal space 255 may have a cylindrical or rectangular shape. The distal ends 246 of the first internal space 245 and the distal ends 256 of the second internal space 255 may include tetrahedral grooves, conical grooves, V-shaped grooves, or flat grooves.

[0079] The end effector 230 may further include a pair of arms 232. The pair of arms 232 may be configured to carry a substrate (not shown). The pair of arms 232 may be spaced apart in a second direction. The pair of arms 232 may include one or more protrusions 233 configured to contact the substrate. The one or more protrusions 233 may include an elastomeric material and may provide clamping when contacting the substrate.

[0080] The robot interface 220 may include a first insertion member 223 and a second insertion member 224. The first insertion member 223 and the second insertion member 224 may extend in the axial direction toward the end effector 230. The first insertion member 223 and the second insertion member 224 may be spaced apart in a second direction. The first insertion member 223 and the second insertion member 224 may have a cylindrical or rectangular shape. The distal ends 226 of the first insertion member 223 and the distal ends 227 of the second insertion member 224 may have a hemispherical shape. When the end effector 230 is coupled to the robot arm 210, the first insertion member 223 and the second insertion member 224 of the robot interface 220 may be received in the first sleeve 240 and the second sleeve 250. For example, the distal end 226 of the first insertion member 223 may contact the distal end 246 of the first internal space 245, and the distal end 227 of the second insertion member 224 may contact the distal end 256 of the second internal space 255.

[0081] The end effector 230 may further include a first pair of cam locks 247 and a second pair of cam locks 257. The first pair of cam locks 247 and the second pair of cam locks 257 may be disposed in the first internal space 245 and the second internal space 255, respectively. The first pair of cam locks 247 and the second pair of cam locks 257 may rotate between an unlocked position where the cam locks do not extend into the internal spaces of the respective sleeves and a locked position where the cam locks extend into the internal spaces of the respective sleeves. The first pair of cam locks 247 and the second pair of cam locks 257 may be rotated externally by a tool changer (not shown) to change between the unlocked position and the locked position.

[0082] The robot interface 220 may further include a first circumferential groove 228 on the first insertion member 223 and a second circumferential groove 229 on the second insertion member 224. When the first insertion member 223 and the second insertion member 224 are respectively received in the first sleeve 240 and the second sleeve 250, the first circumferential groove 228 may be aligned with the first pair of cam locks 247, and the second circumferential groove 229 may be aligned with the second pair of cam locks 257. Accordingly, when the first pair of cam locks 247 and the second pair of cam locks 257 are rotated to the locked position, the first pair of cam locks 247 may be received in the first circumferential groove 228, and the second pair of cam locks 257 may be received in the second circumferential groove 229. In this way, the robot interface 220 may be restricted within the first sleeve 240 and the second sleeve 250, such that the end effector 230 is selectively coupled to the robot arm 210 via the robot interface 220.

[0083] The end effector 230 may further include a plunger 235. The plunger 235 may be centrally disposed within the end effector 230 in a second direction. The plunger 235 may have a first end 235a and a second end 235b. The robot interface 220 may further include a plunger socket 225. The plunger socket 225 may have a first end 225a and a second end 225b. When the end effector 230 is coupled to the robot arm 210 via the robot interface 220, the plunger 235 may be coupled to the plunger socket 225. For example, the first end 235a of the plunger 235 may be coupled to the second end 225b of the plunger socket 225. The robot arm 210 may be configured to move the coupled plunger 235 and plunger socket 225 in an axial direction. For example, the robot arm 210 may interact with the first end 225a of the plunger socket 225 to move the coupled plunger 235 and plunger socket 225 in the axial direction. The second end 235b of the plunger 235 may be configured to contact a substrate disposed on the end effector 230. Accordingly, by moving the coupled plunger 235 and plunger socket 225 in the axial direction, the second end 235b of the plunger 235 may press against the substrate and hold the substrate on the end effector 230. The second end 235b of the plunger 235 may include an elastomeric material and may provide clamping when contacting the substrate. The robot arm 210 may also be configured to retract the coupled plunger 235 and plunger socket 225 to release the clamping of the substrate. The end effector 230 may include a preload spring (not shown) configured to bias the plunger 235 toward a retracted position to assist in retracting the coupled plunger 235 and plunger socket 225 by the robot arm 210. Alternatively, the robot arm 210 may be configured to retract the coupled plunger 235 and plunger socket 225 without assistance.

[0084] Regarding system 200, an end effector and a tool exchange system for carrying a semiconductor substrate are provided, which can offer several advantages compared to related technologies. For example, system 200 can be lightweight so as not to affect the robot speed or system throughput. System 200 can also be compact so as not to limit the robot envelope. System 200 can be robot-agnostic so as to integrate with existing and new robot arms. System 200 can also be externally actuated so as not to require integration with the robot arm and to allow for safety checks to ensure proper coupling. By generating low particles (e.g., particles less than 45 nm) during tool exchange, system 200 can be cleanroom-compatible.

[0085] Referring to FIGS. 7 to 10, another embodiment of the present disclosure provides system 300. System 300 differs from system 100 in terms of the structure of the robot interface 320 and the end effector 330. Except as otherwise described herein, the components of system 100 can also be applied to system 300.

[0086] The robot interface 320 can include one or more hemispherical structures 323 disposed on the lower surface 322 of the robot interface 320. The one or more hemispherical structures 323 can be at different heights in a first direction. For example, one of the hemispherical structures 323 can be higher than another hemispherical structure 323 in the first direction. In an embodiment, the robot interface 320 can include three hemispherical structures 323. The three hemispherical structures 323 can be arranged in a triangle. For example, two of the hemispherical structures 323 can be disposed at a lower height on the lower surface 322 of the robot interface 320, and the third hemispherical structure 323 can be disposed at a higher height on the lower surface 322 of the robot interface 320.

[0087] The end effector 330 can include one or more grooves 346 disposed on the upper surface 331 of the end effector 330. The one or more grooves 346 can include one or more of a tetrahedral groove, a tapered groove, a V-shaped groove, or a flat groove. The one or more grooves 346 can be at different heights in a first direction. For example, one of the grooves 346 can be higher than another groove 346 in the first direction. In an embodiment, the end effector 330 can include three V-shaped grooves 346. The three grooves 346 can be arranged in a triangle. For example, two of the V-shaped grooves 346 can be disposed at a lower height on the upper surface 331 of the end effector 330, and the third V-shaped groove 346 can be disposed at a higher height on the upper surface 331 of the end effector 330. The three V-shaped grooves 346 can be angled relative to each other. For example, the three V-shaped grooves 346 can be angled relative to each other by about 120°. When the robot interface 320 is disposed on the end effector 330, the one or more hemispherical structures 323 can align with and contact the one or more grooves 346.

[0088] The end effector 330 may further include a pair of arms 332, as Figure 7A and 7B shown. The pair of arms 332 may be configured to carry a substrate (not shown). The pair of arms 332 may be spaced apart in a second direction. The pair of arms 332 may include one or more protrusions 333 configured to contact the substrate. The one or more protrusions 333 may include an elastomeric material and may provide clamping when contacting the substrate.

[0089] The robot interface 320 may include a locking mechanism 340. The locking mechanism may be configured to selectively couple the end effector 330 to the robot arm 310 via the robot interface 320. The locking mechanism may be engaged to lock and / or unlock using a tool changer (not shown) operable from the upper surface 321 of the robot interface 320.

[0090] The locking mechanism 340 may include a ball lock mechanism. As Figure 8A and 8B shown, the ball lock mechanism may include a lock pin 324 and one or more ball locks 326 disposed in a shaft 327. The shaft 327 may be biased in a first direction by a preload spring 334. When the end effector 330 is coupled to the robot arm 310 via the robot interface 320, the shaft 327 may be received in a corresponding hole 347 of the end effector 330. The lock pin 324 may move inside the shaft 327 in the first direction (e.g., by the tool changer). When the lock pin 324 moves downward into the shaft 327, the ball locks 326 may move radially outward such that they engage with a circumferential groove 348 of the hole 347. Thus, the robot interface 320 and the end effector 330 may be locked together by the ball lock mechanism. The lock pin 324 may move in the opposite direction to cause the ball locks 326 to move radially inwardly such that the shaft 327 may be withdrawn from the hole 347.

[0091] Alternatively, the locking mechanism 340 may include a pin lock mechanism. As Figure 9A and 9B shown, the pin lock mechanism may include a removable pin 357. The removable pin 357 may be inserted into a first pore 358 in the shaft 327 and into a second pore 359 in the hole 347. When the shaft 327 is received in the hole 347, the first pore 358 and the second pore 359 may be aligned in the first direction such that the removable pin 357 may be inserted into the first pore 358 and the second pore 359. The removable pin 357 may be inserted in the second direction (e.g., by the tool changer).

[0092] Alternatively, the locking mechanism 340 may include a cam lock mechanism. As Figure 10A and 10BAs shown, the cam lock mechanism may include one or more radial protrusions 328 extending from the shaft member 327. The shaft member 327 may be rotated (e.g., by a tool changer). When the shaft member 327 is received in the hole 347, the radial protrusions 328 may be received in the keyway 349 of the hole 347. The keyway 349 may penetrate to the upper surface 331 of the end effector 330 and may extend downwardly and circumferentially around the hole 347. By rotating the shaft member 327, the radial protrusions 328 may be received in the locking portion 353 of the keyway 349, which may prevent the shaft member 327 from being withdrawn from the hole 347. Thus, the robotic interface 320 and the end effector 330 may be locked together by the cam lock mechanism. The shaft member 327 may be rotated in the opposite direction to move the radial protrusions 328 out of the locking portion 353 of the keyway 349, such that the shaft member 327 may be withdrawn from the hole 347.

[0093] Reference Figure 7A and 7B As shown in FIGS. and, the end effector 330 may further include a plunger 335. The plunger 335 may be centrally disposed in the end effector 330 in a second direction. The plunger 335 may have a first end 335a and a second end 335b. The robotic interface 320 may further include a plunger socket 325. The plunger socket 325 may have a first end 325a and a second end 325b. When the end effector 330 is coupled to the robotic arm 310 via the robotic interface 320, the plunger 335 may be coupled to the plunger socket 325. For example, the first end 335a of the plunger 335 may be coupled to the second end 325b of the plunger socket 325. The robotic arm 310 may be configured to move the coupled plunger 335 and plunger socket 325 in an axial direction. For example, the robotic arm 310 may interact with the first end 325a of the plunger socket 325 to move the coupled plunger 335 and plunger socket 325 in an axial direction. The second end 335b of the plunger 335 may be configured to contact a substrate disposed on the end effector 330. Thus, by moving the coupled plunger 335 and plunger socket 325 in an axial direction, the second end 335b of the plunger 335 may press against the substrate and hold the substrate on the end effector 330. The second end 335b of the plunger 335 may include an elastomeric material and may provide clamping when contacting the substrate. The robotic arm 310 may also be configured to retract the coupled plunger 335 and plunger socket 325 to release the clamping of the substrate. The end effector 330 may include a preload spring 336 configured to bias the plunger 335 toward a retracted position to assist in retracting the coupled plunger 335 and plunger socket 325 by the robotic arm 310. Alternatively, the robotic arm 310 may be configured to retract the coupled plunger 335 and plunger socket 325 without assistance. The plunger 335 may be disposed in a bushing 337 disposed on the upper surface 331 of the end effector 330.

[0094] Regarding system 300, an end effector and a tool exchange system for carrying a semiconductor substrate are provided, which can offer several advantages compared to related technologies. For example, system 300 can be lightweight so as not to affect robot speed or system throughput. System 300 can also be compact so as not to limit the robot envelope. System 300 can be robot-agnostic so as to integrate with existing and new robot arms. System 300 can also be externally actuated so as not to require integration with the robot arm and to allow safety checks to ensure proper coupling. By generating low particles (e.g., particles smaller than 45 nm) during tool exchange, system 300 can be cleanroom-compatible.

[0095] Referring to FIGS. 11 to 13, another embodiment of the present disclosure provides system 400. System 400 differs from system 100 in the structure of the robot interface 420 and the end effector 430. Except as otherwise described herein, the components of system 100 can also be applied to system 400.

[0096] The end effector 430 can include an upper jaw portion 440 and a lower jaw portion 450, as Figure 12A and 12B shown. The upper jaw portion 440 and the lower jaw portion 450 can be spaced apart in a first direction. The upper jaw portion 440 and the lower jaw portion 450 can be biased together. When the end effector 430 is coupled to the robot arm 410, the robot interface 420 can be disposed between the upper jaw portion 440 and the lower jaw portion 450. The upper jaw portion 440 and the lower jaw portion 450 can be separated by a tool exchanger (not shown) to allow the robot interface 420 to be received between and / or withdrawn from the upper jaw portion 440 and the lower jaw portion 450.

[0097] The end effector 430 can further include a pair of arms 432, as Figure 11A and 11B shown. The pair of arms can be integrally formed with the upper jaw portion 440 and / or the lower jaw portion 450. The pair of arms 432 can be configured to carry a substrate (not shown). The pair of arms 432 can be spaced apart in a second direction. The pair of arms 432 can include one or more protrusions 433 configured to contact the substrate. The one or more protrusions 433 can include an elastomeric material and can provide clamping when contacting the substrate.

[0098] The robot interface 420 can include a dovetail lock mechanism. As Figure 12A and 12BAs shown, the dovetail lock mechanism may include a dovetail protrusion 427 extending from the robotic interface 420 toward the end effector 430. The upper jaw 440 may include a first dovetail surface 445 on its lower surface 442, and the lower jaw 450 may include a second dovetail surface 455 on its upper surface 451. When the robotic interface 420 is coupled to the end effector 430, the first dovetail surface 445 and the second dovetail surface 455 may be configured to engage the dovetail protrusion 427 of the robotic interface 420. The robotic interface 420 may further include a pair of hemispherical structures 426 adjacent to the dovetail protrusion 427 that engage the flat end faces of the upper jaw 440 and the lower jaw 450 when the robotic interface 420 is coupled to the end effector 430.

[0099] Alternatively, the end effector 430 may include a ball lock mechanism. As Figure 13A and 13B shown, the ball lock mechanism may include a lock pin 457 and one or more ball locks 456 disposed in a shaft 446. The shaft 446 may be biased in the axial direction by a preload spring 438. When the end effector 430 is coupled to the robotic arm 410 via the robotic interface 420, the shaft 446 may be received in a corresponding hole 424 of the robotic interface 420. The lock pin 457 may move axially within the shaft 446 (e.g., by a tool changer (not shown) that may be operated from outside the end effector 430). When the lock pin 457 is moved into the shaft 446, the ball locks 456 may move radially outward such that they engage a circumferential groove 423 of the hole 424. Thus, the robotic interface 420 and the end effector 430 may be locked together by the ball lock mechanism. The lock pin 457 may be moved in the opposite direction to cause the ball locks 456 to move radially inwardly such that the shaft 446 may be withdrawn from the hole 424. The robotic interface 420 may further include a pair of hemispherical structures 426 adjacent to the hole 424 that engage the flat end faces of the end effector 430 when the robotic interface 420 is coupled to the end effector 430.

[0100] Reference Figure 12A and 12B, the end effector 430 may further include a plunger 435. The plunger 435 may be centrally disposed in the end effector 430 in a second direction. The plunger 435 may have a first end 435a and a second end 435b. The robotic interface 420 may further include a plunger socket 425. The plunger socket 425 may have a first end 425a and a second end 425b. When the end effector 430 is coupled to the robotic arm 410 via the robotic interface 420, the plunger 435 may be coupled to the plunger socket 425. For example, the first end 435a of the plunger 435 may be coupled to the second end 425b of the plunger socket 425. The robotic arm 410 may be configured to move the coupled plunger 435 and plunger socket 425 in an axial direction. For example, the robotic arm 410 may interact with the first end 425a of the plunger socket 425 to move the coupled plunger 435 and plunger socket 425 in the axial direction. The second end 435b of the plunger 435 may be configured to contact a substrate disposed on the end effector 430. Thus, by moving the coupled plunger 435 and plunger socket 425 in the axial direction, the second end 435b of the plunger 435 may press against the substrate and hold the substrate on the end effector 430. The second end 435b of the plunger 435 may include an elastomeric material and may provide clamping when contacting the substrate. The robotic arm 410 may also be configured to retract the coupled plunger 435 and plunger socket 425 to release the clamping of the substrate. The end effector 430 may include a preload spring 436 configured to bias the plunger 435 toward a retracted position to assist in retracting the coupled plunger 435 and plunger socket 425 by the robotic arm 410. Alternatively, the robotic arm 410 may be configured to retract the coupled plunger 435 and plunger socket 425 without assistance. The plunger 435 may be disposed in a bushing 437 disposed on the upper surface 451 of the jaw portion 450.

[0101] The end effector 330 may further include a spring 434 connected to the upper jaw portion 440 and the lower jaw portion 450. For example, a first end 434a of the spring 434 may be connected to the upper jaw portion 440, and a second end 434b of the spring 434 may be connected to the lower jaw portion 450. The spring 434 may be disposed in an upper guide member 443 of the upper jaw portion 440 and a lower guide member 453 of the lower jaw portion 450. The upper guide member 443 and the lower guide member 453 may be cylindrical channels extending through the upper jaw portion 440 and the lower jaw portion 450, respectively. The upper guide member 443 may include an upper cross bar 444 spanning the upper guide member 443 on an upper surface 441 of the upper jaw portion 440, and the lower guide member 453 may include a lower cross bar 454 spanning the lower guide member 453 on a lower surface 452 of the lower jaw portion 450. The first end 434a of the spring 434 may be connected to the upper cross bar 444 and the second end 434b of the spring 434 may be connected to the lower cross bar 454. For example, the first end 434a and the second end 434b of the spring may have hook or loop shapes that can loop around the upper cross bar 444 and the lower cross bar 454, respectively. The spring 434 may be preloaded to push the upper jaw portion 440 and the lower jaw portion 450 together. In other words, the distance between a lower surface 442 of the upper jaw portion 440 and an upper surface 451 of the lower jaw portion 450 may be less than the free length of the spring 434. In this way, the spring 434 may push the upper jaw portion 440 and the lower jaw portion 450 together.

[0102] Regarding the system 400, an end effector and a tool exchange system for carrying a semiconductor substrate are provided, which may provide several advantages compared to the related art. For example, the system 400 may be lightweight so as not to affect the robot speed or system throughput. The system 400 may also be compact so as not to limit the robot envelope. The system 400 may be robot-independent so as to integrate with existing and new robot arms. The system 400 may also be externally actuated so as not to require integration with the robot arm and to allow safety checks to ensure proper coupling. By generating low particles (e.g., particles less than 45 nm) during tool exchange, the system 400 may be cleanroom-compatible.

[0103] Another embodiment of the present disclosure provides a method 500. As Figure 14 shown, the method 500 may include the following steps.

[0104] In step 510, a robot interface is disposed on the robot arm. For example, the robot interface may be disposed on the remote of the robot arm. It should be understood that the manner in which the robot interface is disposed on and / or fixed to the robot arm may depend on the specific structure of the robot arm and is not limited herein. The robot arm may move with six degrees of freedom within the robot envelope. The size and shape of the robot envelope may depend on the specific structure of the robot arm (e.g., the length of the arm, the number of joints, etc.) and are not limited herein.

[0105] In step 520, the end effector is selectively coupled to the robotic arm via a robotic interface. The end effector may include an upper jaw and a lower jaw. The upper jaw and the lower jaw are spaced apart in a first direction and biased together. When the end effector is coupled to the robotic arm, the robotic interface may be disposed between the upper jaw and the lower jaw.

[0106] In step 530, a substrate is placed on a pair of arms of the end effector. The pair of arms may be integrally formed with the upper jaw or the lower jaw. The pair of arms are spaced apart in a second direction orthogonal to the first direction. The pair of arms may include one or more protrusions configured to contact the substrate. The one or more protrusions may include an elastomeric material and may provide clamping when contacting the substrate.

[0107] In step 540, a plunger of the end effector is extended in an axial direction to contact the substrate. The robotic arm may be configured to extend the plunger in the axial direction. The plunger may be centrally disposed in the end effector in the second direction. The plunger may have a first end and a second end. The robotic interface may further include a plunger socket. The plunger socket may have a first end and a second end. When the end effector is coupled to the robotic arm via the robotic interface, the plunger may be coupled to the plunger socket. For example, the first end of the plunger may be coupled to the second end of the plunger socket. The robotic arm may be configured to move the coupled plunger and plunger socket in the axial direction. For example, the robotic arm may interact with the first end of the plunger socket to move the coupled plunger and plunger socket in the axial direction. The second end of the plunger may be configured to contact the substrate placed on the end effector. Thus, by moving the coupled plunger and plunger socket in the axial direction, the second end of the plunger may contact and press against the substrate and hold the substrate on the end effector. The second end of the plunger may include an elastomeric material and may provide clamping when contacting the substrate. The robotic arm may also be configured to retract the coupled plunger and plunger socket to release the clamping of the substrate. The end effector may include a preload spring configured to bias the plunger toward a retracted position to assist in retracting the coupled plunger and plunger socket by the robotic arm. Alternatively, the robotic arm may be configured to retract the coupled plunger and plunger socket without assistance.

[0108] According to an embodiment of the present disclosure, step 520 may include Figure 15 the following steps shown in

[0109] In step 522, a tool exchanger including a pair of clamping arms separates the upper jaw portion from the lower jaw portion. The pair of clamping arms may include an upper clamping arm and a lower clamping arm. The upper clamping arm and the lower clamping arm may be configured to separate the upper jaw portion from the lower jaw portion. For example, the upper clamping arm may contact the lower surface of the upper jaw portion, and the lower clamping arm may contact the upper surface of the lower jaw portion. The tool exchanger may include a single pair of clamping arms disposed on a side of the end effector, or may include two pairs of clamping arms disposed on opposite sides of the end effector.

[0110] In step 524, a robot interface is inserted between the upper jaw portion and the lower jaw portion. It should be understood that the pair of clamping arms separates the upper jaw portion from the lower jaw portion in step 522 such that there is not enough clearance in the end effector to receive the robot interface. The amount of clearance required may depend on the geometries of the end effector and the robot interface. When the robot interface is inserted between the upper jaw portion and the lower jaw portion, the robot arm may move the robot interface in the axial direction. The robot arm may also move the robot interface in a second direction to align it with the upper jaw portion and the lower jaw portion.

[0111] In step 526, the upper jaw portion and the lower jaw portion are closed onto the robot interface. The pair of clamping arms of the tool exchanger may be configured to close the upper jaw portion and the lower jaw portion of the end effector onto the robot interface. The end effector may include springs connected to the upper jaw portion and the lower jaw portion, and the springs may push the upper jaw portion and the lower jaw portion together. Thus, with or without corresponding movement of the pair of clamping arms, the springs may cause the upper jaw portion and the lower jaw portion to close onto the robot interface.

[0112] One or more motion coupling members may be provided between the end effector and the robot interface. When the upper jaw portion and the lower jaw portion are closed onto the robot interface, the motion coupling members may engage with each other in step 526. When the motion coupling members are engaged, relative movement between the end effector and the robot interface may be prevented (i.e., the end effector and the robot interface may be restricted in all six degrees of freedom). One or more motion coupling members may include contact between a spherical or hemispherical feature of one of the end effector and the robot interface and a tetrahedral groove, a conical groove, a V - groove, or a flat groove of the other of the end effector and the robot interface. It should be understood that to restrict all six degrees of freedom, the motion coupling members may provide at least six contact points between the end effector and the robot interface. Six contact points may be constructed by a combination of one or more of a tetrahedral groove (three contact points), a V - groove (two contact points), or a flat groove (one contact point). Alternatively, the motion coupling members may provide annular contact between the end effector and the robot interface with a conical groove.

[0113] In an embodiment according to the present disclosure, the workpiece exchanger is disposed in the storage area. Accordingly, step 522 may include separating the upper jaw portion from the lower jaw portion with the pair of clamping arms when the end effector is positioned in the storage area. The storage area may be configured to store one or more end effectors. For example, the storage area may include one or more platforms, and one end effector may be disposed on each platform. The one or more platforms may be vertically arranged in the storage area. The tool exchanger may move vertically in the storage area. When the end effector is positioned in the storage area, the pair of clamping arms may be configured to separate the upper jaw portion from the lower jaw portion. For example, the pair of clamping arms may move vertically in the storage area to align with the end effector. The pair of clamping arms may also move inwards / outwards to engage with the upper jaw portion and the lower jaw portion. It should be understood that the combination of the vertical movement and the inwards / outwards movement of the pair of clamping arms may be used to avoid contact with the end effector during the vertical movement of the tool exchanger and / or to engage with the upper jaw portion and the lower jaw portion.

[0114] According to an embodiment of the present disclosure, method 500 may further include, at step 515, detecting when the end effector is positioned in the storage area by an optical sensor. It should be understood that step 515 may be performed before step 520 to detect when the end effector is positioned in the storage area to complete tool exchange and / or to detect which platforms in the storage area are occupied by the end effector. Step 515 may also be performed after step 520 to detect which platforms in the storage area are not occupied by the end effector.

[0115] According to an embodiment of the present disclosure, method 500 may further include, at step 525, detecting the thickness of the end effector positioned in the storage area by a measurement sensor. It should be understood that step 525 may be performed before step 520 to detect which type of end effector is stored on the platform in the storage area. Step 525 may also be performed after step 520 to confirm that the end effector is correctly coupled to the robotic arm via the robotic interface.

[0116] The optical sensor and the measurement sensor may be in electronic communication with a processor. The processor may be configured to control the robotic arm and / or the tool exchanger based on the information received from the optical sensor and / or the measurement sensor.

[0117] It should be understood that although method 500 is described with respect to the components of system 100, method 500 may also be applied to systems 200, 300, and 400 described herein, and any changes or modifications to method 500 to be applicable to systems 200, 300, and 400 are considered to be within the scope of the present disclosure.

[0118] Regarding method 500, a method is provided for selectively coupling an end effector to a robotic arm, which method may offer several advantages over the related art. For example, the end effector may be lightweight so as not to affect robotic speed or system throughput. The end effector may also be compact so as not to limit the robotic envelope. The end effector may be robot-agnostic so as to integrate with existing and new robotic arms. The end effector may also be externally actuated so as not to require integration with the robotic arm and to allow for safety checks to ensure proper coupling. By generating low particles (e.g., particles less than 45 nm) during tool exchange, method 500 may be cleanroom-compatible.

[0119] Although the present disclosure has been described with respect to one or more particular embodiments, it will be understood that other embodiments of the present disclosure may be made without departing from the scope of the present disclosure. Accordingly, the present disclosure is considered to be limited only by the appended claims and their reasonable interpretation.

Claims

1. A robotic system, comprising: A robotic interface disposed on a robotic arm; And An end effector configured to be selectively coupled to the robotic arm via the robotic interface, wherein the end effector includes: An upper jaw and a lower jaw, the upper jaw and the lower jaw being spaced apart in a first direction and biased together; A pair of arms configured to carry a substrate, the pair of arms being spaced apart in a second direction orthogonal to the first direction; and A spring connected to the upper jaw and the lower jaw, and the spring being preloaded to pull the upper jaw and the lower jaw together; Wherein when the end effector is coupled to the robotic arm, the robotic interface is disposed between the upper jaw and the lower jaw.

2. The robotic system according to claim 1, wherein a first motion coupling member is disposed between an upper surface of the lower jaw and a lower surface of the robotic interface.

3. The robotic system according to claim 2, wherein a second motion coupling member is disposed between a lower surface of the upper jaw and an upper surface of the robotic interface.

4. The robotic system according to claim 1, wherein the end effector further includes a plunger and the robotic interface further includes a plunger socket, and when the end effector is coupled to the robotic arm, the plunger is coupled to the plunger socket and is movable in an axial direction by the robotic arm.

5. The robotic system according to claim 1, further comprising: A tool exchanger including a pair of gripping arms configured to separate the upper jaw and the lower jaw.

6. The robotic system according to claim 5, wherein the tool exchanger is disposed in a storage area, and when the end effector is positioned in the storage area, the pair of gripping arms are configured to separate the upper jaw and the lower jaw.

7. The robotic system according to claim 6, further comprising an optical sensor disposed in the storage area, wherein the optical sensor is configured to detect when the end effector is positioned in the storage area.

8. The robotic system according to claim 6, further comprising a measurement sensor disposed in the storage area, wherein the measurement sensor is configured to detect the thickness of the end effector.

9. A method for a robotic system, the method comprising: Disposing a robotic interface on a robotic arm; Selectively coupling an end effector to the robotic arm via the robotic interface, wherein the end effector includes an upper jaw and a lower jaw, the upper jaw and the lower jaw being spaced apart in a first direction and biased together; And Placing a substrate on a pair of arms of the end effector, the pair of arms being spaced apart in a second direction orthogonal to the first direction; Wherein the end effector further includes a spring connected to the upper jaw and the lower jaw, and the spring is preloaded to pull the upper jaw and the lower jaw together; and Wherein when the end effector is coupled to the robotic arm, the robotic interface is disposed between the upper jaw portion and the lower jaw portion.

10. The method according to claim 9, wherein a first motion coupling member is disposed between an upper surface of the lower jaw portion and a lower surface of the robotic interface.

11. The method according to claim 10, wherein a second motion coupling member is disposed between a lower surface of the upper jaw portion and an upper surface of the robotic interface.

12. The method according to claim 9, wherein the end effector further includes a plunger and the robotic interface further includes a plunger socket, and when the end effector is coupled to the robotic arm, the plunger is coupled to the plunger socket and is movable in an axial direction by the robotic arm.

13. The method according to claim 9, wherein selectively coupling the end effector to the robotic arm via the robotic interface includes: separating the upper jaw portion and the lower jaw portion with a tool changer including a pair of clamping arms; inserting the robotic interface between the upper jaw portion and the lower jaw portion; and closing the upper jaw portion and the lower jaw portion onto the robotic interface.

14. The method according to claim 13, wherein the tool changer is disposed in a storage area, and separating the upper jaw portion and the lower jaw portion with the tool changer including a pair of clamping arms includes: when the end effector is positioned in the storage area, separating the upper jaw portion and the lower jaw portion with the pair of clamping arms.

15. The method according to claim 14, further comprising detecting when the end effector is positioned in the storage area by an optical sensor.

16. The method according to claim 14, further comprising detecting a thickness of the end effector positioned in the storage area by a measurement sensor.

Images