A method for ultra-precision end face fly cutting precision tool setting based on straight groove positioning

Abstract

The present invention relates to the field of ultra-precision machining technology, and in particular to an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning. The diamond milling cutter is mounted on the C-axis of the ultra-precision machine tool, and the workpiece is clamped on the B-axis. Four straight groove structures are fly-cut on the workpiece surface, and then the processed workpiece surface is placed under a laser interferometer to accurately measure the distance between the lowest point of the four straight grooves and the specified edge. According to the geometric center position of the workpiece, the distance between the lowest point of the four straight grooves and the specified edge is accurately measured. O w , actual measured distance, tool movement distance along the X-axis and Y-axis x 0. y 0, ‑ x 0, ‑ y 0, and the tool setting errors #imgabs0# and #imgabs1#, establish equations to calculate the tool setting errors in the X and Y axes. These tool setting errors are then compensated in the machine tool system, achieving ultra-precision end face flycutting precision tool setting. This method requires only two clamping test cuts, eliminating the repetitive work required with traditional test cuts, improving tool setting efficiency and saving costs.

Description

Technical Field

[0001] The invention relates to the technical field of ultra-precision machining, and in particular to an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning. Background Art

[0002] As a nano-level precision manufacturing method, ultra-precision machining technology is usually used to manufacture parts that require extremely high precision and surface quality, and is widely used in optics, aerospace, medical equipment, semiconductors and other fields. Among them, ultra-precision end face fly cutting is a type of ultra-precision fly cutting, and the direction of the tool axis is parallel to the direction of the spindle axis. Ultra-precision end face fly cutting was initially used to process and manufacture large planes with uniform surface quality, and then the fast / slow tool servo system was used in combination with fly cutting technology to manufacture hybrid structure surfaces. In order to obtain high-quality surface structure, it is very necessary to understand its unique surface generation mechanism, analyze and control its intermittent relative motion between the tool and the workpiece, so as to eliminate the tool setting error between the workpiece and the tool for subsequent processing.

[0003] For ultra-precision end face flycutting, the following steps are usually required to determine the relative position of the tool tip center and the workpiece center: first, according to the processing requirements, adjust the position and angle of the tool to eliminate the parallel error between the tool tip axis and the C-axis axis, that is, the tool tip axis is perpendicular to the XOY plane, and the distance between the tool tip center and the workpiece center in the Z-axis direction is calculated; then, the workpiece surface placed on the B-axis is leveled and perpendicular to the tool axis direction through the cyclic trial cutting method; after eliminating the error in the Z-axis direction, the distance between the tool tip center and the workpiece center in the X-axis and Y-axis directions is determined through trial cutting, and the tool setting errors in the X-axis and Y-axis directions of the two are compensated and calibrated; finally, the coordinates of any point in the processing program are transformed into the machine tool coordinate system to determine the corresponding tool tip center position, so as to achieve ultra-precision end face flycutting.

[0004] The effectiveness of traditional ultra-precision machine tool end face fly cutting and tool setting methods has been widely verified, but it still has the following shortcomings:

[0005] 1) The cyclic trial cutting method has complicated tool setting steps, most of which are repetitive processes, which are time-consuming, costly and require a high proportion of human resources. Special tools or equipment are also required for data analysis, which has strong limitations and prolongs the processing cycle. 2) The cyclic trial cutting method is prone to introducing additional processing errors due to repetitive processes. It can also damage the workpiece surface due to repeated cutting, which ultimately affects the surface quality. 3) The operator's technical level directly affects the quality of the tool setting results of the cyclic trial cutting method. It is too subjective and the confidence level of the results is low.

[0006] In summary, the existing traditional ultra-precision machine tool end face fly cutting and tool setting method cannot meet actual production needs. Summary of the Invention

[0007] To address the problems existing in the prior art, the present invention aims to disclose an ultra-precision end face flycutting precision tool setting method based on straight groove positioning. This method effectively improves the objectivity, reliability, and efficiency of the tool setting process while ensuring the integrity of the workpiece machined surface as much as possible, while minimizing labor and cost resources, ultimately improving the quality of ultra-precision machined surfaces. To achieve this goal, the present invention adopts the following technical solutions:

[0008] A method for end face ultra-precision fly cutting and fine tool setting based on straight groove positioning, applied to ultra-precision machine tools, includes:

[0009] Determine the workpiece dimensions and geometric center using ultra-precision measuring instruments O w ;

[0010] The tool (2) is clamped on the milling spindle by means of a special tool holder. The milling spindle is mounted on the C-axis of the ultra-precision machine tool. The workpiece is fixed to the B-axis by a professional fixture. The position of the tool (2) is adjusted so that it is perpendicular to the XOY plane.

[0011] The B axis is fixed, and the moving tool (2) cuts the workpiece surface (1) at a fixed depth along the Z axis. h To ensure that the machined surface is cut, process it in sequence along the X-axis direction a 1, a 2 two points;

[0012] Remove the workpiece and clean the workpiece surface with alcohol and a dust-free cloth (1), and measure on an ultra-precision measuring device. a 1, a 2. The distance between two points in the X-axis and Z-axis directions 、 , control the corresponding rotation of the B axis Angle, so that the workpiece processing surface (1) and the tool (2) axis direction are perpendicular;

[0013] Control the B axis to move a certain distance along the negative direction of the Z axis to process the workpiece surface (1), thereby eliminating the Z axis tool setting error. ; Control tool (2) to move along the X-axis x 0, then move along the Y axis y 0, cutting depth along the Y axis h 1 Cut the first straight groove (3) to - y 0, after processing, return to the rough tool setting point;

[0014] Control tool (2) to move along the X-axis direction - x 0, move along the Y axis y 0, then cut along the Y axis to the depth of h1 Cut the second straight groove (4) to - y 0, after processing, return to the rough tool setting point;

[0015] Control tool (2) to move along the X-axis x 0, then move along the Y axis - y 0, cutting depth along the X axis h 1 Cut the third straight groove (5) to - x 0, after processing, return to the rough tool setting point;

[0016] Control tool (2) to move along the X-axis direction - x 0, then move along the Y axis y 0, cutting depth along the Y axis h 1 Cut the fourth straight groove (6) to y 0, after processing, return to the rough tool setting point;

[0017] Remove the workpiece and clean the machined surface with alcohol and a dust-free cloth (1); use ultra-precision measuring equipment to measure the distance between the lowest points of the first straight groove (3) and the second straight groove (4), the third straight groove (5) and the fourth straight groove (6) and process the results in the relative coordinate system;

[0018] Construct the tool setting error equation group and calculate the tool setting error along the X-axis and Y-axis and , compensating this tool setting error into the machine tool coordinate system can achieve ultra-precision end face fly cutting precision tool setting;

[0019] The C-axis of the ultra-precision machine tool is an air spindle, the fixture is a pneumatic fixture, the tool is a diamond milling cutter, the special tool holder is a super-hard alloy tool holder, and the ultra-precision measuring instrument is a laser interferometer.

[0020] Optionally, the B axis is fixed, and the moving tool (2) cuts the workpiece processing surface (1) at a fixed cutting depth along the Z axis direction. h To ensure that the machined surface is cut, process it in sequence along the X-axis direction a 1, a 2 Two-point steps, specifically: Assume that there are two points on the machining surface D ( x 1, y 1, z 1), E ( x 2, y 1, z 2) Connection D 、 E Two points, relative to the XOY plane, have an offset angle , rotate the B axis by β angle so that the coordinates of the two points are transformed into D' ( x 3.y 1, z 3), E' ( x 4. y 1, z 3) Extension DE Line segment intersection D'E' The extension line of is at point A, and D'O Line segments intersect at O' , the relationship to be solved is specifically:

[0021] ,

[0022] ,

[0023] .

[0024] Optionally, the relative position error between the tool (2) and the workpiece processing surface (1) caused by the workpiece clamping to be solved is The specific relationship is:

[0025] .

[0026] Optionally, the laser interferometer a 1, a 2. Measure two points and record a 1, a 2. The distance between two points in the X-axis and Z-axis directions 、 , and the relative position error is calculated accordingly , control the corresponding rotation of the B axis , so that the workpiece processing surface is perpendicular to the tool axis direction.

[0027] Optionally, the control tool (2) moves along the X-axis direction x 0, then move along the Y axis y 0, cutting depth along the Y axis h 1 Cut the first straight groove (3) to - y 0, after finishing, the steps of returning to the rough setting point are as follows: control the tool (2) to move 10mm along the positive direction of the X axis, then move 5mm along the positive direction of the Y axis, and move the tool back to the cutting depth along the negative direction of the Y axis. h 1, h 1 is specifically 6 μm, cutting the first straight groove (3) to -5 mm, and returning to the rough tool setting point after processing;

[0028] The control tool (2) moves along the X-axis direction- x 0, then move along the Y axis y 0, cutting depth along the Y axis h1 Cut the second straight groove (4) to - y 0, after finishing, the steps of returning to the rough setting point are as follows: control the tool (2) to move 10mm along the negative direction of the X axis, then move 5mm along the positive direction of the Y axis, and then move the tool (2) along the negative direction of the Y axis by the cutting depth. h 1, h 1 is specifically 6 μm, cutting the second straight groove (4) to -5 mm, and returning to the rough tool setting point after processing;

[0029] The control tool (2) moves along the X-axis direction x 0, then move along the Y axis - y 0, cutting depth along the Y axis h 1 Cut the third straight groove (5) to - x 0, after finishing, the steps of returning to the rough setting point are as follows: control the tool (2) to move 10mm along the positive direction of the X axis, then move 5mm along the negative direction of the Y axis, and then move the tool (2) along the negative direction of the X axis by the cutting depth. h 1, h 1 is specifically 6 μm, cutting the third straight groove (5) to -10 mm, and returning to the rough tool setting point after processing;

[0030] The control tool (2) moves along the X-axis direction- x 0, then move along the Y axis y 0, cutting depth along the X axis h 1 Cut the fourth straight groove (6) to x 0, after finishing, the steps of returning to the rough setting point are as follows: control the tool (2) to move 10mm along the negative direction of the X axis, then move 5mm along the positive direction of the Y axis, and then move the tool (2) along the positive direction of the X axis to the cutting depth. h 1, h 1 is specifically 6 μm, cutting the fourth straight groove (6) to 10 mm, and returning to the rough tool point after processing.

[0031] Optionally, the use of ultra-precision measuring equipment to measure the distances between the lowest points of the first straight groove (3), the second straight groove (4), the third straight groove (5) and the fourth straight groove (6) and the prescribed edge, and processing the results in a relative coordinate system, specifically includes: measuring the distances between the lowest points of the first straight groove (3), the second straight groove (4), the third straight groove (5) and the fourth straight groove (6) and the prescribed edge on the surface measuring equipment, respectively. d 1, d 2, d 3 and d 4.

[0032] Optionally, the tool setting error equation group is constructed to calculate the tool setting error along the X-axis and Y-axis directions. and The steps of ultra-precision end face fly cutting precision tool setting can be realized by compensating the tool setting error into the machine tool coordinate system. Specifically, the steps include: determining the geometric center of the workpiece in the relative coordinate system. O w ( , ), establish the lowest point of the first straight groove (3), the second straight groove (4), the third straight groove (5) and the fourth straight groove (6) and the specified edge distance, the geometric center of the workpiece O w And tool setting errors along the X and Y axes and The equation group between , the equation group to be solved is specifically:

[0033] ,

[0034] ,

[0035] ,

[0036] .

[0037] The beneficial effects of the present invention are:

[0038] First, the proposed straight slot positioning method is based on the relevant position relationship, constructs mathematical expressions, and performs objective operations. It is no longer limited by the operator's technical level and has a higher degree of confidence. Second, based on high-precision laser interferometer measurement, the measurement efficiency is improved while ensuring high-precision measurement results. In addition, the proposed method only requires a single clamping and trial cutting for the relative position error between the tool and the workpiece surface and the tool setting error between the tool tip center and the workpiece geometric center caused by workpiece clamping. Compared with the traditional cyclic trial cutting method that requires a large proportion of repetitive work, the tool setting efficiency is greatly improved. Most importantly, this method can solve the problems of complex operation, manpower and cost resources of the traditional method, and can achieve ultra-precision end face fly cutting and precision tool setting, greatly improving operability. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 Schematic diagram of step 2 of an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning according to the present invention;

[0040] Figure 2 This is a first schematic diagram of step 3 of an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning according to the present invention;

[0041] Figure 3 This is a second schematic diagram of step 3 of the ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning according to the present invention;

[0042] Figure 4Schematic diagram of step 4 of an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning according to the present invention;

[0043] Figure 5 Schematic diagram of step 7 of an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning according to the present invention;

[0044] Figure 6 Schematic diagram of step 7 of an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning according to the present invention;

[0045] Figure 7 Schematic diagram of step 7 of an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning according to the present invention;

[0046] Figure 8 Schematic diagram of step 7 of an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning according to the present invention;

[0047] Figure 9 Schematic diagram of step 9 of an ultra-precision end face fly-cutting precision tool setting method based on straight groove positioning according to the present invention;

[0048] In the figure: 1. Workpiece processing surface; 2. Diamond milling cutter; 3. First straight groove; 4. Second straight groove; 5. Third straight groove; 6. Fourth straight groove. DETAILED DESCRIPTION

[0049] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with examples and drawings. The exemplary embodiments of the present invention and their descriptions are only used to explain the present invention and are not intended to limit the present invention.

[0050] Example:

[0051] See also Figure 1-9 The present invention discloses an ultra-precision end face fly cutting precision tool setting method based on straight groove positioning, comprising the following steps:

[0052] S1: According to the workpiece characteristics, the workpiece size is determined with the help of ultra-precision measuring equipment, thereby determining the workpiece geometric center O w ; The laser interferometer is an ultra-precision measuring device in this embodiment. It is an instrument that uses laser for interference measurement. Its working principle is briefly described as follows: based on the wave nature of light and the interference phenomenon of light, the laser beam is used to interact in two or more optical paths to generate interference fringes, and the relevant physical quantities of the object being measured are obtained by measuring the change in the interference fringes. Therefore, it has the advantages of high stability, real-time performance, high sensitivity, high precision, and high applicability to complex shapes.

[0053] like Figure 1As shown, S2: The tool is clamped on the milling spindle by a special tool holder. The milling spindle is installed on the C-axis of the ultra-precision machine tool. The workpiece is fixed to the B-axis by a professional fixture. The tool position is adjusted so that the tool is perpendicular to the XOY plane. In this embodiment, the special tool holder uses a super-hard alloy tool holder. The super-hard alloy tool holder is usually made of super-hard alloy material with high hardness, wear resistance and high temperature resistance. It can be changed according to different processing requirements and shapes and is suitable for high-speed cutting and ultra-precision fly cutting. In this embodiment, the tool uses a diamond milling cutter. Diamond milling cutters are suitable for processing high-hardness materials. They have excellent high thermal conductivity and high thermal stability and are widely used in precision processing. In this embodiment, the professional fixture uses a pneumatic fixture to position and tighten the workpiece. Its working principle is briefly described as follows: by connecting to the air source, air pressure is used to clamp and release the workpiece. It can be changed according to different workpiece shapes and sizes. It has the characteristics of large clamping force, fast clamping speed, simple operation, high precision and good stability. It is particularly suitable for high-precision processing. The C-axis of the ultra-precision machine tool in this embodiment uses an air spindle, and its working principle is briefly described as follows: the air spindle is connected to an air source and uses compressed air as power to drive the spindle to drive the tool to perform cutting and other processing operations. It has the characteristics of rapid startup, sensitive response, high speed, and low vibration. Its outstanding characteristics are determined by its outstanding performance in the field of ultra-precision processing.

[0054] like Figure 2 、 Figure 3 As shown, S3: In order to make the workpiece processing surface perpendicular to the tool axis, according to the relative position of the workpiece processing surface and the tool, the workpiece and the B-axis rotation center O B The relative position relationship, assuming that there are two points on the machining surface D ( x 1, y 1, z 1), E ( x 2, y 1, z 2) Connection D 、 E Two points, relative to the XOY plane, have an offset angle , rotate the B axis by β angle so that the coordinates of the two points are transformed into D' ( x 3. y 1, z 3), E' ( x 4. y 1, z 3) Extension DE Line segment intersection D'E' The extension line of is at point A, and D'O Line segments intersect at O' , the relationship to be solved is specifically:

[0055] ,

[0056] ,

[0057] .

[0058] From the above formula, we can see that .

[0059] like Figure 4 As shown, S4: B axis is fixed, and the moving tool cuts the workpiece surface at a fixed depth along the Z axis. h (make sure the machined surface is cut), process in sequence along the X-axis direction a 1, a 2 Two points.

[0060] S5: Remove the workpiece and clean the processed surface with alcohol and dust-free cloth, and measure on ultra-precision measuring equipment a 1, a 2. The distance between two points in the X-axis and Z-axis directions 、 , calculate the offset angle , control the corresponding rotation of the B axis Angle, so that the workpiece processing surface is perpendicular to the tool axis direction.

[0061] S6: The B axis is controlled to rotate immobile, and the workpiece is moved a certain distance along the Z axis to perform surface cutting on the workpiece. After processing, the corresponding Z axis coordinate value of the machine tool is set to the Z axis zero point and recorded as F to eliminate the Z axis tool setting error. .

[0062] S7: Move the tool so that its tool tip center O T Move to the rough setting point, such as Figure 5 As shown, the tool is controlled to move along the X-axis direction x 0, then move along the Y axis y 0, the position of this point is G, and the cutting depth is h 1 Cut the first straight groove to - y 0, record the position of this point as H, and after processing, return to the rough tool setting point;

[0063] like Figure 6 As shown, the tool is controlled to move along the X-axis direction. x 0, then move along the Y axis y 0, the position of this point is marked as I, and the cutting depth is h 1 Cut the second straight groove to - y 0, record the position of this point as J, and after processing, return to the rough tool setting point;

[0064] like Figure 7 As shown, the tool is controlled to move along the X-axis direction x 0, then move along the Y axis - y 0, i.e. position H, cutting depth along the X axis h 1 Cut the third straight groove to - x 0, i.e. position J, after machining, return to the rough tool setting point;

[0065] like Figure 8 As shown, the tool is controlled to move along the X-axis direction. x 0, then move along the Y axis y 0, i.e. position I, cutting depth along the Y axis h 1 Cut the fourth straight groove to y 0, that is, position G. After processing, return to the rough tool setting point.

[0066] S8: Remove the workpiece and clean the processed surface with alcohol and a dust-free cloth. Measure the lowest distance between the first straight groove and the second straight groove, and the lowest distance between the third straight groove and the fourth straight groove using ultra-precision measuring equipment, and process the results in a relative coordinate system.

[0067] like Figure 9 As shown, S9: Through measurement, it is known that in the relative coordinate system, the lowest point of the first straight groove, the second straight groove, the third straight groove and the fourth straight groove are at a distance from the specified edge. d 1, d 2, d 3 and d 4. Determine the geometric center of the workpiece O w ( , ), establish the lowest point of the first straight groove (3), the second straight groove (4), the third straight groove (5) and the fourth straight groove (6) and the specified edge distance, the geometric center of the workpiece O w And tool setting errors along the X and Y axes and The equation group between , the equation group to be solved is specifically:

[0068] ,

[0069] ,

[0070] ,

[0071] ,

[0072] Combining the above formulas, we can get the tool setting errors along the X-axis and Y-axis: and size.

[0073] S10: The tool setting error compensation is first transformed into the machine tool coordinate system, and then compensated into the machine tool coordinate system to achieve ultra-precision end face fly cutting precision tool setting.

[0074] The above are embodiments of the present invention. The above embodiments and the specific parameters therein are only for the purpose of clearly describing the invention verification process and are not intended to limit the scope of patent protection of the present invention. The scope of patent protection of the present invention shall still be subject to the claims. Any equivalent structural changes made by using the contents of the description and drawings of the present invention shall also be included in the scope of protection of the present invention.

Claims

1. An ultra-precision end face fly cutting precision tool setting method based on straight groove positioning, applied to ultra-precision machine tools, characterized in that: include: Determine the workpiece dimensions and geometric center using ultra-precision measuring instruments O w ; The tool (2) is clamped on the milling spindle by means of a special tool holder. The milling spindle is mounted on the C-axis of the ultra-precision machine tool. The workpiece is fixed to the B-axis by a professional fixture. The position of the tool (2) is adjusted so that it is perpendicular to the XOY plane. The B axis is fixed, and the moving tool (2) cuts the workpiece surface (1) at a fixed depth along the Z axis. h To ensure that the machined surface is cut, process it in sequence along the X-axis direction a 1, a 2 two points; Remove the workpiece and clean the workpiece surface with alcohol and a dust-free cloth (1), and measure on an ultra-precision measuring device. a 1, a 2. The distance between two points in the X-axis and Z-axis directions 、 , control the corresponding rotation of the B axis Angle, so that the workpiece processing surface (1) is perpendicular to the axis direction of the tool (2); Control the B axis to move a certain distance along the negative direction of the Z axis to process the workpiece surface (1), thereby eliminating the Z axis tool setting error. ; Control tool (2) to move along the X-axis x 0, then move along the Y axis y 0, cutting depth along the Y axis h 1 Cut the first straight groove (3) to - y 0, after processing, return to the rough tool setting point; Control tool (2) to move along the X-axis direction - x 0, move along the Y axis y 0, then cut along the Y axis to the depth of h 1 Cut the second straight groove (4) to - y 0, after processing, return to the rough tool setting point; Control tool (2) to move along the X-axis x 0, then move along the Y axis - y 0, cutting depth along the X axis h 1 Cut the third straight groove (5) to - x 0, after processing, return to the rough tool setting point; Control tool (2) to move along the X-axis direction - x 0, then move along the Y axis y 0, cutting depth along the Y axis h 1 Cut the fourth straight groove (6) to y 0, after processing, return to the rough tool setting point; Remove the workpiece and clean the machined surface with alcohol and a dust-free cloth (1); use ultra-precision measuring equipment to measure the distance between the lowest points of the first straight groove (3) and the second straight groove (4), the third straight groove (5) and the fourth straight groove (6) and process the results in the relative coordinate system; Construct the tool setting error equation group and calculate the tool setting error along the X-axis and Y-axis and , compensating this tool setting error into the machine tool coordinate system can achieve ultra-precision end face fly cutting precision tool setting; The C-axis of the ultra-precision machine tool is an air spindle, the fixture is a pneumatic fixture, the tool is a diamond milling cutter, the special tool holder is a super-hard alloy tool holder, and the ultra-precision measuring instrument is a laser interferometer.

2. The method according to claim 1, wherein The B axis is fixed, and the moving tool (2) cuts the workpiece surface (1) at a fixed depth along the Z axis. h To ensure that the machined surface is cut, process it in sequence along the X-axis direction a 1, a 2 Two-point steps, specifically: Assume that there are two points on the machining surface D ( x 1, y 1, z 1), E ( x 2, y 1, z 2) Connection D 、 E Two points, relative to the XOY plane, have an offset angle , rotate the B axis by β angle so that the coordinates of the two points are transformed into D' ( x 3. y 1, z 3), E' ( x 4. y 1, z 3) Extension DE Line segment intersection D'E' The extension line of is at point A, and D'O Line segments intersect at O' , the relationship to be solved is specifically: , , 。 3. The method according to claim 2, wherein The relative position error between the tool (2) and the workpiece processing surface (1) caused by the workpiece clamping to be solved is The specific relationship is: 。 4. The method according to claim 2, wherein The laser interferometer a 1, a 2. Measure two points and record a 1, a 2. The distance between two points in the X-axis and Z-axis directions 、 , and the relative position error is calculated accordingly , control the corresponding rotation of the B axis , so that the workpiece processing surface is perpendicular to the tool axis direction.

5. The method according to claim 1, wherein The control tool (2) moves along the X-axis direction x 0, then move along the Y axis y 0, cutting depth along the Y axis h 1 Cut the first straight groove (3) to - y 0, after finishing, the steps of returning to the rough setting point are as follows: control the tool (2) to move 10mm along the positive direction of the X axis, then move 5mm along the positive direction of the Y axis, and move the tool back to the cutting depth along the negative direction of the Y axis. h 1, h 1 is specifically 6 μm, cutting the first straight groove (3) to -5 mm, and returning to the rough tool setting point after processing; The control tool (2) moves along the X-axis direction- x 0, then move along the Y axis y 0, cutting depth along the Y axis h 1 Cut the second straight groove (4) to - y 0, after finishing, the steps of returning to the rough setting point are as follows: control the tool (2) to move 10mm along the negative direction of the X axis, then move 5mm along the positive direction of the Y axis, and then move the tool (2) along the negative direction of the Y axis by the cutting depth. h 1, h 1 is specifically 6 μm, cutting the second straight groove (4) to -5 mm, and returning to the rough tool setting point after processing; The control tool (2) moves along the X-axis direction x 0, then move along the Y axis - y 0, cutting depth along the Y axis h 1 Cut the third straight groove (5) to - x 0, after finishing, the steps of returning to the rough setting point are as follows: control the tool (2) to move 10mm along the positive direction of the X axis, then move 5mm along the negative direction of the Y axis, and then move the tool (2) along the negative direction of the X axis by the cutting depth. h 1, h 1 is specifically 6 μm, cutting the third straight groove (5) to -10 mm, and returning to the rough tool setting point after processing; The control tool (2) moves along the X-axis direction- x 0, then move along the Y axis y 0, cutting depth along the X axis h 1 Cut the fourth straight groove (6) to x 0, after finishing, the steps of returning to the rough setting point are as follows: control the tool (2) to move 10mm along the negative direction of the X axis, then move 5mm along the positive direction of the Y axis, and then move the tool (2) along the positive direction of the X axis to the cutting depth. h 1, h 1 is specifically 6 μm, cutting the fourth straight groove (6) to 10 mm, and returning to the rough tool point after processing.

6. The method according to claim 1, wherein The method of using ultra-precision measuring equipment to measure the distances between the lowest point of the first straight groove (3), the second straight groove (4), the third straight groove (5) and the fourth straight groove (6) and the prescribed edge in a relative coordinate system specifically includes: measuring the distances between the lowest point of the first straight groove (3), the second straight groove (4), the third straight groove (5) and the fourth straight groove (6) and the prescribed edge on the surface measuring equipment respectively. d 1, d 2, d 3 and d 4.

7. The method according to claim 1, wherein The tool setting error equation group is constructed to calculate the tool setting error along the X-axis and Y-axis directions and The steps of ultra-precision end face fly cutting precision tool setting can be realized by compensating the tool setting error into the machine tool coordinate system. Specifically, the steps include: determining the geometric center of the workpiece in the relative coordinate system. ( , ), establish the lowest point of the first straight groove (3), the second straight groove (4), the third straight groove (5) and the fourth straight groove (6) and the specified edge distance, the geometric center of the workpiece O w And tool setting errors along the X and Y axes and The equation group between , the equation group to be solved is specifically: ， ， ， 。

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