Zoom lighting device, optical device

Abstract

The application provides a zooming illumination device and an optical equipment. The zooming illumination device comprises a light source for generating an incident light beam, an optical path system, a mirror, a first microscopic objective, a broadband polarization beam splitting cube and a second microscopic objective which are sequentially arranged on a main optical axis of the optical path system, the main optical axis is perpendicular to the direction of the incident light beam, the broadband polarization beam splitting cube is used for splitting the incident light beam to obtain a first light beam which propagates towards the first microscopic objective, the mirror is used for reflecting the first light beam, the first microscopic objective is used for focusing the first light beam, and the second microscopic objective is symmetrically arranged with the first microscopic objective; and a vibration source which is connected with the mirror and is used for driving the mirror to vibrate. The device provided by the application drives the mirror to move axially at a high speed through the vibration source, so that the final focusing position of the reflected first light beam moves axially at a high speed, the zooming illumination is realized axially at a high speed under the premise of ensuring the stability of the device during long-term work, and the available visual field area is effectively increased.

Description

Technical Field

[0001] This invention relates to the field of optical engineering technology, and more specifically to a zoom illumination device and optical equipment. Background Technology

[0002] Light-sheet 3D imaging technology involves transparentizing the sample, illuminating it with a light sheet, and then targeting and exciting fluorescence signals at the sample layer corresponding to the focal plane of the imaging objective lens. Imaging is performed in an orthogonal direction, and by axially moving the sample, a digital camera simultaneously captures two-dimensional fluorescence images of different sample layers. A three-dimensional data point set is established during sample movement, and with the aid of graphics processing software, a three-dimensional visualization reconstruction of the sample is achieved. This technology effectively avoids the impact of defocused background on image quality, featuring high image contrast and natural optical tomography. However, because the camera's rolling shutter exposure is linear, optical zoom also needs to perform synchronous linear movement. Under high imaging speed requirements, the zoom illumination device needs to perform high-speed linear reciprocating motion of the objective lens, which poses a significant challenge. Existing zoom illumination devices typically have zoom scanning speeds lower than the camera's exposure speed, making them difficult to coordinate well with the camera. Furthermore, the limited range of motion in existing zoom illumination devices results in a smaller area of ​​fluorescence signal excited during operation, leading to a smaller usable field of view in the fluorescence image captured by the camera. To increase the speed of linear reciprocating motion of moving parts and increase the area of ​​usable field of view, it is necessary to further increase the frequency of linear reciprocating motion of the objective lens and the amplitude of vibration in the linear direction. This would reduce the stability of the equipment under long-term operation and significantly increase the cost of zoom lighting equipment. Summary of the Invention

[0003] The main objective of this invention is to provide a zoom illumination device and optical equipment that enables the zoom illumination device to perform high-speed axial zoom illumination stably for a long period of time at a lower cost, so as to better meet the camera's exposure speed and increase the usable field of view.

[0004] A first aspect of the present invention provides a zoom illumination device, the zoom illumination device comprising:

[0005] A light source, used to generate an incident light beam;

[0006] An optical path system includes a reflecting mirror, a first microscope objective, a broadband polarizing beam splitter, and a second microscope objective, which are sequentially arranged on the main optical axis of the optical path system. The main optical axis is perpendicular to the direction of the incident beam. The broadband polarizing beam splitter is used to split the incident beam to obtain a first beam that propagates toward the first microscope objective. The reflecting mirror is used to reflect the first beam. The first microscope objective is used to focus the first beam. The second microscope objective is symmetrically arranged with respect to the first microscope objective.

[0007] A vibration source is connected to the reflector and is used to drive the reflector to vibrate.

[0008] In some embodiments, the vibration source is a vibrator.

[0009] In some embodiments, the optical path system further includes at least one tube lens group disposed on the main optical axis, the tube lens group being used to eliminate spherical aberration generated when the first beam is reflected by the mirror and passes through the first microscope objective, the tube lens group being disposed between the first microscope objective and the second microscope objective.

[0010] In some embodiments, each of the tube lens groups includes a first tube lens and a second tube lens arranged symmetrically about the axis of symmetry of the first and second microscope objectives, wherein the first tube lens and the second tube lens have the same focal length.

[0011] In some embodiments, the optical path system further includes at least one cemented doublet lens group disposed on the main optical axis. The cemented doublet lens group is used to eliminate chromatic aberration. Each cemented doublet lens group includes a first achromatic cemented doublet lens and a second achromatic cemented doublet lens symmetrically disposed about the axis of symmetry of the first microscope objective and the second microscope objective. The cemented doublet lens group is disposed between the first microscope objective and the second microscope objective. The first achromatic cemented doublet lens and the second achromatic cemented doublet lens have the same focal length.

[0012] In some embodiments, the zoom illumination device further includes a cylindrical mirror disposed between the light source and the broadband polarization beam splitter cube, the cylindrical mirror being used to directionally compress the incident beam.

[0013] In some embodiments, the apparatus further includes a half-glass slide and a quarter-glass slide, the half-glass slide being disposed between the light source and the cylindrical mirror, and the quarter-glass slide being disposed between the first microscope objective and the broadband polarizing beam splitter cube.

[0014] In some embodiments, the motion trajectory of the vibration source is cosine-shaped.

[0015] In some embodiments, the reflector is a plane mirror.

[0016] A second aspect of the present invention provides an optical device including a zoom illumination device as described in any one of the embodiments of the first aspect.

[0017] This invention provides a zoom illumination device and an optical apparatus. The zoom illumination device includes: a light source for generating an incident light beam; an optical path system comprising a reflecting mirror, a first microscope objective, a broadband polarizing beam splitter, and a second microscope objective sequentially arranged on the principal optical axis of the optical path system, wherein the principal optical axis is perpendicular to the direction of the incident light beam, the broadband polarizing beam splitter is used to split the incident light beam to obtain a first light beam propagating towards the first microscope objective, the reflecting mirror is used to reflect the first light beam, the first microscope objective is used to focus the first light beam, and the second microscope objective is symmetrically arranged with the first microscope objective; and a vibration source connected to the reflecting mirror for driving the reflecting mirror to vibrate. In this embodiment, the incident beam is split into a first beam propagating towards the first microscope objective by a broadband polarization beam splitter. This first beam, after passing through the first microscope objective, is focused at its focal point. A reflector is positioned at the focal point of the first microscope objective to reflect the first beam. A vibration source connected to the reflector causes the reflector to move axially back and forth along the focal plane of the first microscope objective. Thus, the first beam is reflected before and after the focal point of the first microscope objective. At this point, the first beam is equivalent to beams emitted from different positions before and after the focal point of the first microscope objective on the principal optical axis. After passing through the first microscope objective, it is focused into a convergent beam or a divergent beam, and then propagates... After passing through the second microscope objective, the beam will be focused at different positions before and after the focal point of the second microscope objective, depending on the degree of convergence or divergence. This allows the actual focusing position of the first beam to move linearly back and forth at high speed, thereby achieving high-speed axial zoom illumination. By adjusting the amplitude of the vibration source, the axial movement range of the mirror can be increased, thus increasing the range of the final focusing position of the beam after passing through the second microscope objective, thereby increasing the usable field of view. In this application, since the component that performs axial movement during zooming is the mirror, its weight is smaller than that of the objective, and the burden on the zoom illumination device caused by driving it to perform high-speed axial movement is lower, resulting in better system stability during long-term operation.

[0018] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the description, claims, and drawings. Attached Figure Description

[0019] Figure 1This is a schematic diagram of a zoom illumination device provided in one embodiment of this application;

[0020] Figure 2a This is a schematic diagram of another working state of the zoom lighting device provided in one embodiment of this application;

[0021] Figure 2b yes Figure 2a A magnified view of a portion of the image;

[0022] Figure 3a This is a schematic diagram of another working state of the zoom lighting device provided in one embodiment of this application;

[0023] Figure 3b yes Figure 3a A magnified view of a portion of the image;

[0024] Figure 4a This is a schematic diagram of a zoom illumination device provided in one embodiment of this application;

[0025] Figure 4b This is a schematic diagram of a zoom lighting device provided in yet another embodiment of this application;

[0026] Figure 4c This is a schematic diagram of a zoom lighting device provided in yet another embodiment of this application;

[0027] Figure 4d This is a schematic diagram of a zoom lighting device provided in yet another embodiment of this application;

[0028] Figure 4e This is a schematic diagram of a zoom lighting device provided in yet another embodiment of this application;

[0029] Figure 4f This is a schematic diagram of a zoom lighting device provided in yet another embodiment of this application;

[0030] The accompanying drawings are used to provide a further understanding of the technical solutions of this application and constitute a part of the specification. They are used together with the embodiments of this application to explain the technical solutions of this application and do not constitute a limitation on the technical solutions of this application. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0032] It should be noted that although functional modules are divided in the device schematic diagram and a logical order is shown in the flowchart, in some cases, the steps shown or described may be executed in a different order than the module division in the device or the order in the flowchart. The terms "first," "second," etc., in the specification, claims, and the aforementioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing embodiments of the invention only and is not intended to limit the invention.

[0034] Furthermore, the described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a thorough understanding of embodiments of this disclosure. However, those skilled in the art will recognize that the technical solutions of this disclosure can be practiced without one or more of the specific details, or other methods, components, apparatuses, steps, etc., can be employed. In other instances, well-known methods, apparatuses, implementations, or operations are not shown or described in detail to avoid obscuring various aspects of this disclosure.

[0035] In the description of the embodiments of this invention, unless otherwise explicitly limited, terms such as setting, installing, and connecting should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in the embodiments of this invention in conjunction with the specific content of the technical solution.

[0036] Reference Figure 1 This invention provides a zoom lighting device, comprising:

[0037] Light source 101 is used to generate the incident light beam;

[0038] An optical path system includes a mirror 104, a first microscope objective 103, a broadband polarization beam splitter 102, and a second microscope objective 106 arranged sequentially on the main optical axis of the optical path system. The main optical axis is perpendicular to the direction of the incident beam. The broadband polarization beam splitter 102 is used to split the incident beam to obtain a first beam that propagates toward the direction of the first microscope objective 103. The mirror 104 is used to reflect the first beam. The first microscope objective 103 is used to focus the first beam. The second microscope objective 106 is symmetrically arranged with the first microscope objective.

[0039] Vibration source 105 is connected to reflector 104 and is used to drive reflector 104 to vibrate.

[0040] It is understandable that the first and second microscope objectives are one-dimensional focusing objectives. Thus, after the light beam passes through the first and second microscope objectives, it is focused only in a single dimension, while still propagating as parallel light in another dimension. The light beam is not a point but a line after being focused by the first and second microscope objectives. Therefore, after the focusing position of the light beam undergoes a high-speed linear reciprocating motion, a scanning plate can be formed.

[0041] In some embodiments, an optical path system is constructed with the principal optical axis perpendicular to the incident beam. This optical path system includes a reflector 104, a first microscope objective 103, a broadband polarization beam splitter 102, and a second microscope objective 106 arranged sequentially on the principal optical axis. The broadband polarization beam splitter 102 splits the incident beam generated by the light source 101, thereby obtaining a first beam propagating in the direction perpendicular to the incident beam and a second beam propagating in the direction parallel to the incident beam. The first beam propagates to one side of the reflector 104. The first microscope objective 103, which is positioned between the reflector 104 and the broadband polarization beam splitter 102, focuses the first beam and propagates it to the reflector 104, causing the reflector 104 to reflect the second beam. The second beam enters the optical path system, passes sequentially through the first microscope objective 103 and the second microscope objective 106, and is focused before and after the focal point of the second microscope objective 106. During this process, when the vibration source 105... Vibration causes the reflector 104 to move axially. At this time, the focal point of the first microscope objective 103 will fall in front of and behind the reflector 104. The reflector 104 reflects the light beam into the optical path system. After the reflected light beam is refracted by the first microscope objective 103 and focused by the second microscope objective 106, it will be focused at the focal point of the second microscope objective 106 and in front of and behind it, depending on the position of the reflector 104. The vibration source 105 drives the reflector 104 to move axially at a high frequency, so that the focal position of the light beam continuously moves in front of and behind the focal point of the second microscope objective 106, thereby continuously exciting the fluorescence signal at different positions of the sample under test, realizing high-speed axial zoom illumination, and forming a scanning light plate. At this time, the size of the scanning light plate is the size of the axial movement range of the focal position of the light beam. By increasing the amplitude of the vibration source, the axial movement range of the focal position of the light beam can be increased, thereby increasing the area of ​​the scanning light plate to obtain a larger usable field of view. It is understood that the reflector 104 is a plane mirror, and the weight of a plane mirror is smaller than that of the objective lens. During operation, the load pressure on the vibration source 105 that drives its movement is smaller. Compared with the way the objective lens is moved in a traditional zoom illumination device, the zoom illumination device proposed in this embodiment has better stability under long-term operation.

[0042] In some embodiments, the light source 101 may be a laser emitter, and the cross-section of the beam emitted by the light source may be rectangular.

[0043] Specifically, refer to Figure 1 In some embodiments, when the reflecting mirror 104 is at the focal plane of the first microscope objective 103, the first beam is focused by the first microscope objective 103 and propagates to the focal point of the first microscope objective 103, where it is reflected by the reflecting mirror 104. At this time, the reflected beam is equivalent to a beam emitted from the focal point A of the first microscope objective 103. After being focused by the first microscope objective 103, the reflected beam is restored to a parallel beam with the same width as the incident beam. At this time, the reflected beam is focused at the focal point B of the second microscope objective 106 after passing through the second microscope objective 106.

[0044] Reference Figure 2a and Figure 2b When the reflector 104 moves to the vibration source 105 during vibration, Figure 2a and Figure 2b At the position shown, where the distance between the reflecting mirror 104 and the first microscope objective 103 is greater than the focal length of the first microscope objective 103, the first beam, after being focused by the first microscope objective 103, propagates to the focal point A of the first microscope objective 103 and is focused there. The beam then continues to propagate towards the reflecting mirror 104, where it is reflected. The beam reflected by the reflecting mirror 104 is equivalent to a beam emitted from point A1. At this point, the beam reflected by the reflecting mirror 104, after passing through the first microscope objective 103, is refracted into a focused beam with an initial width greater than the incident beam width, and focuses at a certain point between the first microscope objective 103 and the second microscope objective 106. The light beam then diverges and propagates towards the second microscope objective 106, and is focused after passing through the second microscope objective 106. At this point, the distance between the first microscope objective 103 and the second microscope objective 106 can be determined by the focal lengths of the first microscope objective 103 and the second microscope objective 106, so that the position where the light beam is focused between the first microscope objective 103 and the second microscope objective 106 falls within the position range of one focal length and two focal lengths of the second microscope objective 106. Then, the reflected light beam is equivalent to a light beam emitted from a position outside one focal length and within two focal lengths of the second microscope objective 106. After being focused by the second microscope objective 106, this light beam will be focused at a position far from the focal point of the second microscope objective 106, that is... Figure 2a As shown at point B1. Thus, by driving the reflector 104 to move axially at high speed through the vibration source 105, the actual focusing position B1 of the light beam can be made to move linearly back and forth at high speed, thereby continuously exciting the fluorescence signals at different positions of the transparent sample to form a scanning light sheet. This allows the digital camera to simultaneously capture fluorescence images of different layers of the sample, thereby constructing a three-dimensional data point set and realizing three-dimensional visualization reconstruction.

[0045] In some embodiments, refer to Figure 3a and Figure 3bWhen the reflecting mirror 104 moves with the vibration source 105 to a position close to the first microscope objective 103, that is, when the distance between the reflecting mirror 104 and the first microscope objective 103 is less than the focal length of the first microscope objective 103, the incident light beam is reflected by the reflecting mirror 104 before it is focused at the focal point A of the first microscope objective 103. At this time, the light beam reflected by the reflecting mirror 104 intersects the first microscope objective 103 and the reflecting mirror 104 at point A2. At this time, the light beam reflected by the reflecting mirror 104 is equivalent to a beam of light emitted from point A2. After passing through the first microscope objective 103, this beam will be focused into a diverging beam with an initial width narrower than the incident beam. At this time, the distance between the first microscope objective 103 and the second microscope objective 106 can be determined by the focal lengths of the first microscope objective 103 and the second microscope objective 106, allowing the light beam to propagate to the second microscope objective 106. After point 06, the beam emitted from a distance of twice the focal length of the second microscope objective 106 will be focused in front of the focal point B of the second microscope objective 106, i.e., the beam will be focused at point B2. It can be understood that the specific position of B2 will change with the distance between the first microscope objective 103 and the reflecting mirror 104. Specifically, when the reflecting mirror 104 moves with the vibration source 105 to different positions between the first microscope objective 103 and the focal point A, the position A2 where the beam is focused after being reflected by the reflecting mirror 104 is also different. Thus, the beam reflected by the reflecting mirror 104 is equivalent to a beam emitted from different points A2. The divergence angle of the beam formed after being refracted by the first microscope objective 103 is also different. At this time, the actual focusing position B2 of the reflected beam after passing through the second microscope objective 106 will also change accordingly. Therefore, by driving the reflector 104 to move axially at high speed through the vibration source 105, the actual focusing position of the light beam can be repeatedly moved before and after the focal point of the second microscope objective 106, thereby continuously exciting the fluorescence signal at different positions of the transparent sample under test, so that the digital camera can simultaneously capture fluorescence images of different layers of the sample under test, thereby constructing a three-dimensional data point set and realizing three-dimensional visualization reconstruction.

[0046] In some embodiments, the vibration source 105 is an exciter;

[0047]

[0048] Referring to the table above, piezoelectric ceramics cost tens of thousands of yuan, while the exciter costs only a few thousand. Compared to traditional piezoelectric ceramics used as zoom lighting devices, the zoom lighting device proposed in this embodiment is much cheaper. Furthermore, the vibration frequency of commonly used piezoelectric ceramics can reach up to 120 Hz, while the vibration frequency of the exciter can reach up to 150 Hz. Therefore, compared to traditional piezoelectric ceramic zoom lighting devices, the zoom lighting device proposed in this embodiment has a higher vibration frequency, allowing the actual focusing position of the beam to move linearly back and forth at a higher speed, better meeting the camera's requirements. The exposure speed is high; furthermore, the amplitude of the piezoelectric ceramic is only ±0.4 mm, while the amplitude of the exciter can reach ±1 mm. It can be understood that since the actual focusing position of the beam and the position of the reflector 104 are in one-to-one correspondence, and the magnitude of the vibration source amplitude determines the range of the reflector 104's position, thus determining the movable range of the actual focusing position of the beam and affecting the usable area of ​​the resulting light sheet. Based on this, compared with the traditional piezoelectric ceramic zoom illumination device, the zoom illumination device of this embodiment can obtain a light sheet with a larger usable area. In addition, it should be noted that in the traditional piezoelectric ceramic zoom illumination device, the moving part is the objective lens, that is, the piezoelectric ceramic zoom illumination device changes the focal point position by moving the objective lens with the piezoelectric ceramic to achieve zoom illumination. In this application, the moving part is the reflector 104, which can be a plane mirror. Compared with the objective lens with a complex internal structure, the plane mirror is lighter and puts less burden on the exciter. Under long-term operation, the zoom illumination device proposed in this embodiment has better stability.

[0049] Referring to the table above, compared to traditional voice coil motors used as zoom illumination devices, voice coil motors are still more expensive than exciters. The zoom illumination device proposed in this embodiment is less expensive than traditional voice coil motor-based zoom illumination devices. Furthermore, the commonly used piezoelectric ceramics have a vibration frequency of only 20 Hz, while the exciter's vibration frequency can reach up to 150 Hz. Therefore, compared to traditional voice coil motor-based zoom illumination devices, the zoom illumination device proposed in this embodiment has a faster zoom speed, allowing the actual focal point of the light beam to move linearly back and forth at a higher speed, better meeting the camera's exposure speed requirements. In addition, it should be noted that in traditional voice coil motor-based zoom illumination devices, the moving part is the objective lens; that is, it changes the focal point by driving the objective lens with a voice coil motor to achieve zoom. In this application, however, the moving part is the reflecting mirror 104, which can be a plane mirror. Compared to the objective lens with its complex internal structure, a plane mirror is lighter, placing less burden on the exciter. Under long-term operation, the zoom illumination device proposed in this embodiment has better stability.

[0050] Compared with traditional piezoelectric ceramic zoom lighting devices and voice coil motor zoom lighting devices, the zoom lighting device proposed in this application has lower cost, faster zoom speed, and a larger usable area of ​​the light sheet. Moreover, the zoom lighting device proposed in this application has better stability under long-term operation.

[0051] In some embodiments, refer to Figures 4a to 4f The zoom illumination device also includes at least one tube lens group. Each tube lens group includes a symmetrically arranged first tube lens 201 and second tube lens 202. The first tube lens 201 and second tube lens 202 are symmetrical about the axis of symmetry of the first microscope objective 103 and the second microscope objective 106. It is understood that the first tube lens 201 and the second tube lens 202 have the same focal length. It is understood that during the movement of the reflector 104, the light beam will be reflected at different positions of the reflector 104 and refracted at different positions of the first microscope objective 103. The degree of refraction of the far-axis light is higher than that of the light near the principal optical axis. That is, at different positions of the first microscope objective 103, the actual light path after refraction will deviate to different degrees from the theoretical refraction light path, thereby producing spherical aberration, which makes it impossible for the light to be focused on the same point. Based on this, in this embodiment, at least one tube lens group is provided between the first microscope objective 103 and the second microscope objective 106 to eliminate spherical aberration.

[0052] In some embodiments, refer to Figures 4a to 4f The zoom illumination device also includes at least one achromatic lens group. Each achromatic lens group includes a first cemented doublet achromatic lens 301 and a second cemented doublet achromatic lens 302 symmetrically arranged. The first cemented doublet achromatic lens 301 and the second cemented doublet achromatic lens 302 are symmetrical about the axis of symmetry of the first microscope objective 103 and the second microscope objective 106. The first cemented doublet achromatic lens 301 and the second cemented doublet achromatic lens 302 are disposed between the first microscope objective 103 and the second microscope objective 106. The first cemented doublet achromatic lens 301 and the second cemented doublet achromatic lens 302 have the same focal length. It is understandable that, due to the differences in dispersion and refractive index of light of different wavelengths when passing through a lens, there will be a certain difference between the actual focal point and the theoretical focal point when light of different wavelengths passes through the same lens, thus producing chromatic aberration. In this embodiment, at least one achromatic lens group is set between the first microscope objective 103 and the second microscope objective 106, and the chromatic aberration caused by the difference in wavelength of light is eliminated by two symmetrically set cemented doublet achromatic lenses with the same focal length.

[0053] Reference Figures 4a to 4fIn some embodiments, the zoom illumination device further includes at least one half-glass slide 401 and one quarter-glass slide 402. The half-glass slide 401 is disposed between the light source 101 and the broadband polarization beam splitter cube 102, and the one quarter-glass slide 402 is disposed between the broadband polarization beam splitter cube 102 and the first microscope objective 103. The half-glass slide 401 and the one quarter-glass slide 402 are used in conjunction with the broadband polarization beam splitter cube 102 to reduce the laser power loss generated during the beam splitting process of the broadband polarization beam splitter cube 102.

[0054] Reference Figures 4a to 4f In some embodiments, the zoom illumination device further includes a cylindrical mirror 501, which is disposed between the half-glass slide 401 and the broadband polarization beam splitter cube 102. It is understood that the light source 101 can be a laser generator or the like, and the beam emitted by it will be a circular beam. In this embodiment, the cylindrical mirror 501 disposed between the half-glass slide 401 and the broadband polarization beam splitter cube 102 compresses the beam into a specific shape so that the beam can form a scanning light sheet after being processed by the subsequent lenses.

[0055] In some embodiments, the vibration frequency and amplitude of the exciter are adjustable. By adjusting its amplitude and frequency to match the camera shutter movement direction and frequency, axial zoom illumination can be achieved, so that the zoom illumination device can be better matched with the camera, and the camera can simultaneously capture two-dimensional fluorescence images of different layers of the sample.

[0056] In some embodiments, the motion trajectory of the exciter is cosine-shaped. By selecting the cosine portion, the zoom of the light filter can be better coordinated with the camera.

[0057] This application also proposes an optical device including the zoom illumination device described above.

[0058] The flowcharts shown in the accompanying drawings are merely illustrative and do not necessarily include all content and operations / steps, nor do they necessarily have to be performed in the described order. For example, some operations / steps can be broken down, while others can be combined or partially combined; therefore, the actual order of execution may change depending on the specific circumstances.

[0059] Those skilled in the art will understand that all or some of the steps in the methods disclosed above, as well as the functional modules / units in the systems and devices, can be implemented as software, firmware, hardware, or suitable combinations thereof.

[0060] The terms “comprising” and “having”, and any variations thereof, in the specification and accompanying drawings of this invention are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or apparatus that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or apparatus.

[0061] It should be understood that in this invention, "at least one (item)" refers to one or more, and "more than one" refers to two or more. "And / or" describes the relationship between related objects, indicating that three relationships can exist. For example, "A and / or B" can represent three cases: only A exists, only B exists, and both A and B exist simultaneously, where A and B can be singular or plural. The character " / " generally indicates that the preceding and following related objects are in an "or" relationship. "At least one (item) of the following" or similar expressions refer to any combination of these items, including any combination of single or plural items. For example, at least one (item) of a, b, or c can represent: a, b, c, "a and b", "a and c", "b and c", or "a and b and c", where a, b, and c can be single or multiple.

[0062] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0063] The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but this does not limit the scope of the claims of the present invention. Any modifications, equivalent substitutions, and improvements made by those skilled in the art without departing from the scope and spirit of the present invention should be within the scope of the claims of the present invention.

Claims

1. A zoom lighting device, characterized in that, The zoom illumination device includes: A light source, used to generate an incident light beam; An optical path system includes a reflecting mirror, a first microscope objective, a broadband polarizing beam splitter cube, and a second microscope objective, which are sequentially arranged on the main optical axis of the optical path system. The main optical axis is perpendicular to the direction of the incident beam. The broadband polarizing beam splitter cube is used to split the incident beam to obtain a first beam that propagates toward the direction of the first microscope objective. The reflecting mirror is used to reflect the first beam. The first microscope objective is used to focus the first beam. The second microscope objective and the first microscope objective are symmetrically arranged with respect to the broadband polarizing beam splitter cube. A vibration source is connected to the reflector and is used to drive the reflector to vibrate; the vibration source is an exciter and the motion trajectory of the vibration source is cosine.

2. The zoom lighting device according to claim 1, characterized in that, The optical path system further includes at least one tube lens group disposed on the main optical axis. The tube lens group is used to eliminate spherical aberration generated when the first beam is reflected by the mirror and passes through the first microscope objective. The tube lens group is disposed between the first microscope objective and the second microscope objective.

3. The zoom lighting device according to claim 2, characterized in that, The tube lens group includes a first tube lens and a second tube lens symmetrically arranged about the axis of symmetry of the first microscope objective and the second microscope objective, and the first tube lens and the second tube lens have the same focal length.

4. The zoom lighting device according to claim 1, characterized in that, The optical path system further includes at least one cemented doublet lens group disposed on the main optical axis. The cemented doublet lens group is used to eliminate chromatic aberration. Each cemented doublet lens group includes a first achromatic cemented doublet lens and a second achromatic cemented doublet lens symmetrically disposed about the axis of symmetry of the first microscope objective and the second microscope objective. The cemented doublet lens group is disposed between the first microscope objective and the second microscope objective. The first achromatic cemented doublet lens and the second achromatic cemented doublet lens have the same focal length.

5. The zoom lighting device according to claim 1, characterized in that, The zoom illumination device also includes a cylindrical mirror, which is disposed between the light source and the broadband polarization beam splitter cube, and is used to directionally compress the incident beam.

6. The zoom lighting device according to claim 5, characterized in that, The device further includes a half-glass slide and a quarter-glass slide, the half-glass slide being disposed between the light source and the cylindrical mirror, and the quarter-glass slide being disposed between the first microscope objective and the broadband polarizing beam splitter.

7. The zoom lighting device according to claim 1, characterized in that, The reflecting mirror is a plane mirror.

8. An optical device, characterized in that, It includes the zoom illumination device as described in any one of claims 1 to 7.

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