Baking heating device for vacuum coating machine

Abstract

The present invention relates to the technical field of vacuum coating machines, and specifically discloses a baking and heating device for vacuum coating machines, including a main chamber and a movable chamber, wherein the top of the main chamber is movably provided with the movable chamber, and the interiors of the main chamber and the movable chamber are fixedly provided with fixed frames. By arranging heating components inside the two fixed frames, the upper and lower heating components can achieve synchronous heating treatment of the upper and lower surfaces of the coated products, thereby further improving the coating effect on the surface of the coated products, especially when vacuum coating processing of organic films, polarizing films and metal films is applied, by performing synchronous heating treatment of the upper and lower surfaces, the film thickness, composition and performance of the coated products can be better controlled and uniform, and the positions of the heating frames and heat conducting plates can be flexibly adjusted according to different coating materials to avoid hot spot concentration, thereby effectively improving the baking effect and coating quality of the coated products.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating machines, and in particular to a baking and heating device for vacuum coating machines. Background Art

[0002] In recent years, with the development of optical thin film technology and semiconductor technology, the application of vacuum coating technology in production has become more and more extensive and important. Vacuum evaporation is the most common and widely used vacuum coating process. The physical process of vacuum evaporation includes: the deposition material evaporates or sublimates into gaseous particles → the gaseous particles are quickly transported from the evaporation source to the substrate surface → the gaseous particles attach to the substrate surface to form nuclei and grow into solid thin films → the film atoms are reconstructed or chemically bonded.

[0003] Vacuum coating machines usually require a baking heating device for heating and regulating the temperature during the coating process. The baking heating device used in existing vacuum coating machines is usually installed in a fixed manner inside the vacuum coating chamber. By placing the coated product on a sample table and heating the coated product using the baking heating device, the formation of the film layer can be effectively promoted and the gas residue on the surface of the coating material can be reduced. However, the current baking heating device has a constant distance from the sample table, and the baking distance cannot be adjusted according to different coating materials. Although the power of the baking heating device can be adjusted, if the distance is too close, hot spots may be concentrated, which will reduce the baking effect and coating quality. For this reason, we propose a baking heating device for a vacuum coating machine. Summary of the invention

[0004] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a baking and heating device for a vacuum coating machine, in order to solve the problem that the distance between the current baking and heating device and the sample table is constant, and the baking distance cannot be adjusted according to different coating materials, which will reduce the baking effect and coating quality.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a baking and heating device for a vacuum coating machine, comprising a main chamber and a movable chamber, the top of the main chamber is movably provided with a movable chamber, the interiors of the main chamber and the movable chamber are both fixedly provided with fixed frames, and the interiors of the two fixed frames are both provided with heating components, and the upper and lower heating components are used to achieve synchronous heating treatment of the upper and lower surfaces of the coating product;

[0006] A placement rack is fixedly arranged inside the main chamber, and a limiting component is arranged inside the placement rack;

[0007] The heating assembly includes a heating frame, a resistance heating wire and a heat conducting plate, the heating frame is movably arranged inside the fixed frame, and a plurality of resistance heating wires are fixedly arranged inside the heating frame, wherein two micro electric cylinders are arranged inside the fixed frame, and the driving ends of the two micro electric cylinders are fixedly connected to the bottom of the heating frame, and a heat conducting plate is movably arranged inside the fixed frame and above the heating frame, and third servo electric cylinders are fixedly arranged around the inside of the fixed frame, and the driving ends of the four third servo electric cylinders are respectively fixedly connected to the four sides of the bottom of the heat conducting plate;

[0008] A cleaning assembly is also provided inside the fixed frame, and the cleaning assembly includes a movable frame, a movable groove is provided inside the fixed frame, and movable frames are slidably provided on both sides of the inner wall of the movable groove through an electric slide, a cleaning brush is rotatably provided on one side inside the movable frame, and driven gears are fixedly provided at both ends of the cleaning brush, racks are fixedly provided on both sides of the bottom of the inner wall of the movable groove, and the surfaces of the two racks are respectively meshed with the surfaces of the two driven gears for transmission.

[0009] Furthermore, two first servo electric cylinders are fixedly arranged on the back of the main chamber, and the driving ends of the two first servo electric cylinders are respectively fixedly connected to the two sides of the back of the active chamber, and telescopic frames are fixedly arranged around the bottom of the inner wall of the main chamber, and the tops of the four telescopic frames are respectively fixedly connected to the four sides of the top of the inner wall of the active chamber.

[0010] Furthermore, a sealing protrusion is fixedly provided at the bottom of the active chamber, and a sealing groove matching with the sealing protrusion is provided at the top of the main chamber, wherein a vacuum pipeline is also provided at one side of the main chamber.

[0011] Furthermore, a material storage cavity is provided on the other side of the movable frame, and a miniature dust pump is provided inside the material storage cavity. A dust suction port is also provided inside the movable frame, and the interior of the dust suction port is connected with the feeding end of the miniature dust pump. One side of the dust suction port extends to one side of the cleaning brush, and the bottom of the dust suction port extends to the bottom of the movable frame.

[0012] Furthermore, a scraper frame is movably provided on the other side of the bottom of the inner wall of the movable groove through a micro electric cylinder, and a connecting gear is rotatably provided at one end of the scraper frame, and one side of the connecting gear is driven by a micro motor.

[0013] Furthermore, two discharge pipes are arranged on one side of the bottom of the inner wall of the movable groove, and discharge ports matching with the discharge pipes are arranged on both sides of the bottom of the inner wall of the storage cavity.

[0014] Furthermore, the interiors of the two discharge pipes are both connected to the interior of the scraper frame, and a spring discharge pipe is fixedly provided on one side of the fixed frame, and the interior of the spring discharge pipe is connected to the interior of the scraper frame.

[0015] Furthermore, the limiting assembly includes a movable baffle and a limiting block, a placement slot is provided inside the placement rack, and movable baffles are slidably provided around the inner wall of the placement slot, wherein the placement slot runs through the top and bottom of the placement rack.

[0016] Furthermore, limit blocks are slidably arranged inside the placement rack and above the four movable baffles, wherein one side of the four limit blocks is provided with a rubber pad.

[0017] Furthermore, a transmission gear is provided for internal rotation of the placement rack, teeth are provided on the top of the movable baffle and the bottom of the limit block, and the upper and lower surfaces of the transmission gear are respectively engaged with the teeth on the movable baffle and the limit block for transmission, and a second servo electric cylinder is fixedly provided around the inside of the placement rack, and the driving end of the second servo electric cylinder is fixedly connected to one side of the limit block.

[0018] The beneficial effects achieved by the present invention using the above structure are as follows:

[0019] 1. The vacuum coating chamber is configured to be a main chamber and a movable chamber which can be separated from each other, and fixed frames are provided inside the main chamber and the movable chamber. Then, heating components are provided inside the two fixed frames, and the upper and lower heating components can be used to heat the upper and lower surfaces of the coated product synchronously, thereby further improving the coating effect on the surface of the coated product. In particular, when vacuum coating is performed on organic films, polarizing films and metal films, the film thickness, composition and performance of the coated product can be better controlled and uniformed by performing synchronous heating on the upper and lower surfaces. The positions of the heating frames and the heat conducting plates can be flexibly adjusted according to different coating materials to avoid concentration of hot spots, thereby effectively improving the baking effect and coating quality of the coated product.

[0020] 2. When baking and heating the surface of the coated product, a movable heat conduction plate is set between the resistance heating wire and the coated product, the heat conduction plate is driven close to the surface of the coated product by the driving end of the third servo electric cylinder, and the heat conduction plate is heated by the resistance heating wire inside the heating frame, and then the heat is evenly transferred to the surface of the coated product through the heat conduction plate, wherein the output power of the resistance heating wire is controlled by PID, so as to improve the temperature control accuracy of the baking and heating of the coated product, ensure that the heating temperature can be accurately controlled and adjusted, and then cooperate with the heat conduction plate to achieve a more uniform heating distribution on the surface of the coated product, thereby effectively improving the coating quality on the surface of the coated product.

[0021] 3. A cleaning component is arranged inside the fixed frame, and the surface of the heat conduction plate is cleaned by the cleaning component to remove the coating material on the surface of the heat conduction plate, thereby ensuring the heating distribution effect of the heat conduction plate on the surface of the coating material. The surface of the heat conduction plate is cleaned by a rotating cleaning brush, and the cleaned dust is sent into the storage chamber by a micro vacuum pump and a vacuum port inside the movable frame. The impurities attached to the cleaning brush are cleaned by a scraper frame, and the impurities inside the storage chamber are extracted by a discharge pipe. The cleaned impurities and extracted impurities are discharged by a spring discharge pipe to ensure the cleanliness of the surface of the heat conduction plate, thereby effectively improving the heating distribution effect of the heat conduction plate on the surface of the coated product. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0023] Figure 1 It is a schematic diagram of the structure of a baking and heating device for a vacuum coating machine according to an embodiment of the present invention;

[0024] Figure 2 A schematic diagram of the structure of the main chamber and the active chamber according to an embodiment of the present invention;

[0025] Figure 3 A schematic diagram of the internal structure of the main chamber according to an embodiment of the present invention;

[0026] Figure 4 A schematic diagram of a fixing frame and a heat conducting plate structure according to an embodiment of the present invention;

[0027] Figure 5 It is a schematic diagram of the internal structure of the placement rack and the limit block according to an embodiment of the present invention;

[0028] Figure 6 It is a schematic diagram of the internal structure of the fixing frame and the resistance heating wire according to an embodiment of the present invention;

[0029] Figure 7 It is a top view of the internal structure of the fixing frame according to an embodiment of the present invention.

[0030] In the figure, 1. main chamber; 2. movable chamber; 3. first servo electric cylinder; 4. telescopic frame; 5. fixed frame; 6. placement frame; 7. movable baffle; 8. limit block; 9. transmission gear; 10. second servo electric cylinder; 11. heating frame; 12. resistance heating wire; 13. heat conducting plate; 14. third servo electric cylinder; 15. movable frame; 16. movable groove; 17. cleaning brush; 18. driven gear; 19. rack; 20. material storage chamber; 21. dust suction port; 22. scraper frame; 23. connecting gear; 24. discharge pipe; 25. spring discharge pipe. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0033] Example 1

[0034] See also Figures 1 to 7 As shown, a baking and heating device for a vacuum coating machine comprises a main chamber 1 and an active chamber 2, wherein the active chamber 2 is movably arranged on the top of the main chamber 1, two first servo electric cylinders 3 are fixedly arranged on the back of the main chamber 1, and the driving ends of the two first servo electric cylinders 3 are respectively fixedly connected to the two sides of the back of the active chamber 2, telescopic frames 4 are fixedly arranged around the bottom of the inner wall of the main chamber 1, and the tops of the four telescopic frames 4 are respectively fixedly connected to the top of the inner wall of the active chamber 2, a sealing protrusion is fixedly arranged on the bottom of the active chamber 2, and a sealing groove matching the sealing protrusion is arranged on the top of the main chamber 1, wherein one side of the main chamber 1 is also provided with The vacuum pipeline drives the movable chamber 2 to move upward as a whole when placing the coated products and the coating materials through the driving ends of the two first servo electric cylinders 3, and ensures the stability of the separation between the movable chamber 2 and the main chamber 1 by using four telescopic frames 4. After the coated products and the coating materials are placed inside the main chamber 1, the driving ends of the two first servo electric cylinders 3 drive the movable chamber 2 to reset, and the sealing protrusion at the bottom of the active chamber 2 is connected with the sealing groove at the top of the main chamber 1 to ensure the airtightness of the main chamber 1 and the active chamber 2 after vacuuming, so that the coated products can be stably coated.

[0035] Furthermore, a fixing frame 5 is fixedly installed inside the main chamber 1 and the movable chamber 2, and a heating component is installed inside the two fixing frames 5. The upper and lower heating components can realize synchronous heating treatment of the upper and lower surfaces of the coated product, thereby further improving the coating effect on the surface of the coated product. Especially in the vacuum coating process of organic thin films, polarizing films and metal thin films, the film thickness, composition and performance of the coated product can be better controlled and uniform by performing synchronous heating treatment of the upper and lower surfaces.

[0036] Furthermore, a placement rack 6 is fixedly installed inside the main chamber 1, and a limiting component is arranged inside the placement rack 6. The coating product is fixedly placed inside the placement rack 6 through the limiting component, thereby ensuring the stability of the coating product during the vacuum coating process. At the same time, the coating product can also be heated synchronously between the upper and lower heating components.

[0037] Example 2

[0038] The present embodiment discloses a specific structural description of the limit assembly in the above-mentioned embodiment 1, wherein the limit assembly comprises a movable baffle plate 7 and a limit block 8, a placement groove is arranged inside the placement rack 6, and movable baffle plates 7 are slidably arranged around the inner wall of the placement groove, wherein the placement groove runs through the top and bottom of the placement rack 6, and limit blocks 8 are slidably arranged inside the placement rack 6 and above the four movable baffle plates 7, wherein rubber pads are arranged on one side of the four limit blocks 8, and the rubber pads are used to protect the side edges of the coated products from being worn when fixed, a transmission gear 9 is rotatably arranged inside the placement rack 6, and teeth are arranged on the top of the movable baffle plate 7 and the bottom of the limit block 8, and the upper and lower surfaces of the transmission gear 9 are respectively meshed with the teeth on the movable baffle plate 7 and the limit block 8 for transmission, and a second servo electric cylinder 10 is fixedly arranged around the inside of the placement rack 6, and the driving end of the second servo electric cylinder 10 is fixedly connected to one side of the limit block 8.

[0039] It should be noted that when the coated product is placed inside the placement rack 6, one side of the four movable baffles 7 inside the placement slot is extended, and the four movable baffles 7 are used to support the four sides of the bottom of the coated product, and then the second servo electric cylinder 10 driving end is used to control the four limiting blocks 8 to move synchronously toward the side of the coated product. When the four limiting blocks 8 approach the side of the coated product, the four movable baffles 7 are moved toward the inside of the placement rack 6 under the drive of the transmission gear 9 until the four limiting blocks 8 are respectively attached to the four side edges of the coated product, and the four movable baffles 7 at the bottom of the coated product are separated from the bottom of the coated product, completing the placement of the coated product. By arranging four movable baffles 7 and four limiting blocks 8 inside the placement rack 6, when the coated product is placed, the bottom of the coated product is supported by the four movable baffles 7, and then the four limiting blocks 8 are used to correct the position of the coated product inside the placement slot and fix the limit, and quickly correct the relative position between the coated product and the upper and lower heating components, thereby ensuring that the two heating components can have a heating effect on the upper and lower sides of the coated product.

[0040] Example 3

[0041] The present embodiment discloses a specific structural description of the heating component in the above-mentioned embodiment 1, wherein the heating component comprises a heating frame 11, a resistance heating wire 12 and a heat conducting plate 13, wherein the heating frame 11 is movably arranged inside the fixed frame 5, and a plurality of resistance heating wires 12 are fixedly arranged inside the heating frame 11, wherein two micro electric cylinders are arranged inside the fixed frame 5, and the driving ends of the two micro electric cylinders are fixedly connected to the bottom of the heating frame 11, and the position of the heating frame 11 inside the fixed frame 5 is adjusted by the driving ends of the two micro electric cylinders; a heat conducting plate 13 is movably arranged inside the fixed frame 5 and above the heating frame 11, and third servo electric cylinders 14 are fixedly arranged around the inside of the fixed frame 5, and the driving ends of the four third servo electric cylinders 14 are respectively fixedly connected to the four sides of the bottom of the heat conducting plate 13.

[0042] It should be noted that when the coated product is heated, the driving end of the third servo electric cylinder 14 drives the heat conducting plate 13 close to the surface of the coated product, and the heat conducting plate 13 is heated by the resistance heating wire 12 inside the heating frame 11, and then the heat is evenly transferred to the surface of the coated product through the heat conducting plate 13, wherein the output power of the resistance heating wire 12 is controlled by PID to improve the temperature control accuracy of the baking heating of the coated product, ensure that the heating temperature can be accurately controlled and adjusted, and then cooperate with the heat conducting plate 13 to achieve a more uniform heating distribution on the surface of the coated product, thereby effectively improving the coating quality of the surface of the coated product, and flexibly adjusting the positions of the heating frame 11 and the heat conducting plate 13 according to different coating materials to avoid hot spot concentration, thereby effectively improving the baking effect and coating quality of the coated product.

[0043] Furthermore, in order to ensure the heating distribution effect of the heat conducting plate 13, a cleaning component is also provided inside the fixing frame 5, through which the surface of the heat conducting plate 13 is cleaned to remove the coating material on the surface of the heat conducting plate 13, thereby ensuring the heating distribution effect of the heat conducting plate 13 on the surface of the coating material.

[0044] The cleaning assembly includes a movable frame 15, a movable groove 16 is provided inside the fixed frame 5, and the movable frame 15 is slidably provided on both sides of the inner wall of the movable groove 16 through an electric slide, a cleaning brush 17 is rotatably provided on one side of the movable frame 15, and driven gears 18 are fixedly provided at both ends of the cleaning brush 17, racks 19 are fixedly provided on both sides of the bottom of the inner wall of the movable groove 16, and the surfaces of the two racks 19 are respectively meshed with the surfaces of the two driven gears 18 for transmission, a material storage chamber 20 is also provided on the other side of the movable frame 15, and a micro dust pump is provided inside the material storage chamber 20, a dust suction port 21 is also provided inside the movable frame 15, and the interior of the dust suction port 21 is connected to the feeding end of the micro dust suction pump, and one side of the dust suction port 21 extends To one side of the cleaning brush 17, and the bottom of the dust suction port 21 extends to the bottom of the movable frame 15, the other side of the bottom of the inner wall of the movable groove 16 is movably provided with a scraper frame 22 through a micro-electric cylinder, and one end of the scraper frame 22 is rotatably provided with a connecting gear 23, one side of the connecting gear 23 is driven by a micro-motor, one side of the bottom of the inner wall of the movable groove 16 is also provided with two discharge pipes 24, and both sides of the bottom of the inner wall of the storage chamber 20 are provided with discharge ports matching the discharge pipes 24, wherein the interiors of the two discharge ports are provided with electromagnetic control valves, the interiors of the two discharge pipes 24 are connected to the interior of the scraper frame 22, and a spring discharge pipe 25 is fixedly provided on one side of the fixed frame 5, and the interior of the spring discharge pipe 25 is connected to the interior of the scraper frame 22.

[0045] It should be noted that when the heat conducting plate 13 and the resistance heating wire 12 are used to bake and heat the surface of the coated product, since the coating material will adhere to the surface of the heat conducting plate 13, thereby affecting the subsequent heating distribution effect of the heat conducting plate 13, after the heating treatment of the coated product is completed, the driving end of the third servo electric cylinder 14 is used to drive the heat conducting plate 13 to reset, and then the electric slide is used to drive the movable frame 15 to slide to one side on the surface of the heat conducting plate 13. During the sliding process of the movable frame 15, the cleaning brush 17 inside it is meshed with the driven gear 18 and the rack 19 at both ends, so that the cleaning brush 17 rotates with the movement of the movable frame 15, and the rotating cleaning brush 17 is used to clean the surface of the heat conducting plate 13, and the cleaned dust is removed by the micro dust suction pump and the dust suction port 21 inside the movable frame 15. The dust is sent into the interior of the storage chamber 20. After the movable frame 15 moves to the rightmost side of the movable groove 16, the scraper frame 22 is controlled to move upward, and the connecting gear 23 at one end of the scraper frame 22 is meshed with one of the driven gears 18 for transmission. At the same time, the two discharge pipes 24 are respectively connected to the interior of the two discharge ports. At this time, the connecting gear 23 is controlled to rotate. Under the coordinated connection between the connecting gear 23 and the driven gear 18, the cleaning brush 17 is allowed to rotate synchronously, and the scraper frame 22 is used to clean the impurities attached to the cleaning brush 17. At the same time, the discharge pipe 24 is used to extract the impurities inside the storage chamber, and the cleaned impurities and the extracted impurities are sent out through the spring discharge pipe 25 to ensure the cleanliness of the surface of the heat conducting plate 13, thereby effectively improving the heating distribution effect of the heat conducting plate 13 on the surface of the coated product.

[0046] Example 4

[0047] This embodiment mainly discloses a heating method of the baking heating device for a vacuum coating machine, which specifically includes the following steps:

[0048] Step a1: The active chamber 2 is driven to move upward as a whole by the driving ends of the two first servo electric cylinders 3, and the four telescopic frames 4 are used to ensure the stability of the separation between the active chamber 2 and the main chamber 1. After the coating product and the coating material are placed inside the main chamber 1, the driving ends of the two first servo electric cylinders 3 are used to drive the active chamber 2 to reset;

[0049] Step a2: When placing the coated product inside the placement rack 6, let one side of the four movable baffles 7 inside the placement slot extend out, and use the four movable baffles 7 to support the four sides of the bottom of the coated product, and then use the second servo electric cylinders 10 driving ends on the four sides to control the limiting blocks 8 on the four sides to move synchronously toward the sides of the coated product. When the four limiting blocks 8 approach the sides of the coated product, the four movable baffles 7 are driven by the transmission gear 9 to move toward the inside of the placement rack 6 until the four limiting blocks 8 are respectively attached to the four sides of the coated product, and the four movable baffles 7 at the bottom of the coated product are all separated from the bottom of the coated product, completing the placement of the coated product;

[0050] Step a3: When heating the coated product, the driving end of the third servo electric cylinder 14 inside the upper and lower fixing frames 5 drives the heat conducting plate 13 close to the surface of the coated product, and then the resistance heating wires 12 inside the two heating frames 11 are used to heat the heat conducting plate 13, and then the heat is evenly transferred to the surface of the coated product through the heat conducting plate 13;

[0051] Step a4: After the coating product is heated, the heat conducting plate 13 is reset by the driving end of the third servo electric cylinder 14, and then the movable frame 15 is driven by the electric slide to slide to one side on the surface of the heat conducting plate 13. During the sliding process of the movable frame 15, the cleaning brush 17 inside the movable frame 15 is meshed with the driven gear 18 and the rack 19 at both ends, so that the cleaning brush 17 rotates with the movement of the movable frame 15, and the rotating cleaning brush 17 is used to clean the surface of the heat conducting plate 13, and at the same time, the micro dust suction pump and the dust suction port 21 inside the movable frame 15 are used to send the cleaned dust into the storage chamber 20, and the movable frame 15 is moved to the storage chamber 20. After 15 moves to the rightmost side inside the movable groove 16, the scraper frame 22 is controlled to move upward, and the connecting gear 23 at one end of the scraper frame 22 is meshed with one of the driven gears 18 for transmission. At the same time, the two discharge pipes 24 are respectively connected with the inside of the two discharge ports. At this time, the connecting gear 23 is controlled to rotate. Under the cooperative connection between the connecting gear 23 and the driven gear 18, the cleaning brush 17 is allowed to rotate synchronously, and the scraper frame 22 is used to clean the impurities attached to the cleaning brush 17. At the same time, the discharge pipe 24 is used to extract the impurities inside the storage chamber, and the cleaned impurities and extracted impurities are sent out through the spring discharge pipe 25.

[0052] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0053] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0054] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the attached claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any figure mark in the claims should not be regarded as limiting the claims involved.

[0055] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A baking and heating device for a vacuum coating machine, comprising a main chamber (1) and a movable chamber (2), characterized in that: A movable chamber (2) is movably arranged on the top of the main chamber (1), a fixed frame (5) is fixedly arranged inside the main chamber (1) and the movable chamber (2), and a heating component is arranged inside the two fixed frames (5), and synchronous heating treatment of the upper and lower sides of the coated product is achieved through the upper and lower heating components, the heating component comprises a heating frame (11), a resistance heating wire (12) and a heat conducting plate (13), the heating frame (11) is movably arranged inside the fixed frame (5), and a plurality of resistance heating wires (12) are fixedly arranged inside the heating frame (11), wherein two micro electric cylinders are arranged inside the fixed frame (5), and the driving ends of the two micro electric cylinders are fixedly connected to the bottom of the heating frame (11), and a heat conducting plate (13) is movably arranged inside the fixed frame (5) and above the heating frame (11), and a third servo electric cylinder (14) is fixedly arranged around the inside of the fixed frame (5), and the driving ends of the four third servo electric cylinders (14) are respectively fixedly connected to the four sides of the bottom of the heat conducting plate (13); A placement rack (6) is fixedly arranged inside the main chamber (1), and a limit position assembly is arranged inside the placement rack (6); the limit position assembly comprises a movable baffle (7) and a limit block (8); a placement slot is arranged inside the placement rack (6), and movable baffles (7) are slidably arranged around the inner wall of the placement slot, wherein the placement slot passes through the top and bottom of the placement rack (6); and limit positions (8) are slidably arranged inside the placement rack (6) and above the four movable baffles (7), wherein the four limit positions (8) are arranged A rubber pad is provided on one side of the positioning block (8); a transmission gear (9) is rotatably provided inside the placement rack (6); a tooth groove is provided on the top of the movable baffle (7) and the bottom of the limiting block (8); and the upper and lower surfaces of the transmission gear (9) are respectively meshed with the tooth grooves on the movable baffle (7) and the limiting block (8) for transmission; a second servo electric cylinder (10) is fixedly provided around the inside of the placement rack (6), and a driving end of the second servo electric cylinder (10) is fixedly connected to one side of the limiting block (8); A cleaning assembly is also provided inside the fixed frame (5), the cleaning assembly comprising a movable frame (15), a movable groove (16) is provided inside the fixed frame (5), and the movable frame (15) is slidably provided on both sides of the inner wall of the movable groove (16) via an electric slide, a cleaning brush (17) is rotatably provided on one side inside the movable frame (15), and driven gears (18) are fixedly provided at both ends of the cleaning brush (17), racks (19) are fixedly provided on both sides of the bottom of the inner wall of the movable groove (16), and the surfaces of the two racks (19) are respectively meshed with the surfaces of the two driven gears (18) for transmission.

2. The baking and heating device for a vacuum coating machine according to claim 1, characterized in that: Two first servo electric cylinders (3) are fixedly arranged on the back of the main chamber (1), and the driving ends of the two first servo electric cylinders (3) are respectively fixedly connected to the two sides of the back of the active chamber (2); telescopic frames (4) are fixedly arranged around the bottom of the inner wall of the main chamber (1), and the tops of the four telescopic frames (4) are respectively fixedly connected to the four sides of the top of the inner wall of the active chamber (2).

3. The baking and heating device for a vacuum coating machine according to claim 1, characterized in that: A sealing protrusion is fixedly arranged at the bottom of the movable chamber (2), and a sealing groove matching the sealing protrusion is arranged at the top of the main chamber (1), wherein a vacuum pipeline is also arranged on one side of the main chamber (1).

4. The baking and heating device for a vacuum coating machine according to claim 1, characterized in that: A material storage chamber (20) is further provided on the other side of the movable frame (15), and a micro dust pump is provided inside the material storage chamber (20). A dust suction port (21) is further provided inside the movable frame (15), and the interior of the dust suction port (21) is communicated with a feeding end of the micro dust suction pump. One side of the dust suction port (21) extends to one side of the cleaning brush (17), and the bottom of the dust suction port (21) extends to the bottom of the movable frame (15).

5. The baking and heating device for a vacuum coating machine according to claim 1, characterized in that: A scraper frame (22) is movably provided on the other side of the bottom of the inner wall of the movable groove (16) via a micro-electric cylinder, and a connecting gear (23) is rotatably provided at one end of the scraper frame (22), one side of the connecting gear (23) is driven by a micro-motor, two discharge pipes (24) are also provided on one side of the bottom of the inner wall of the movable groove (16), and discharge ports matching the discharge pipes (24) are provided on both sides of the bottom of the inner wall of the storage cavity (20).

6. The baking and heating device for a vacuum coating machine according to claim 5, characterized in that: The interiors of the two discharge pipes (24) are both connected to the interior of the scraper frame (22); a spring discharge pipe (25) is also fixedly provided on one side of the fixed frame (5), and the interior of the spring discharge pipe (25) is connected to the interior of the scraper frame (22).

7. The baking and heating device for a vacuum coating machine according to any one of claims 1 to 6, characterized in that: The heating method of the baking heating device for the vacuum coating machine specifically comprises the following steps: Step a1: The movable chamber (2) is driven to move upward as a whole by the driving ends of the two first servo electric cylinders (3), and the stability of the separation between the movable chamber (2) and the main chamber (1) is ensured by the four telescopic frames (4). After the coating product and the coating material are placed inside the main chamber (1), the movable chamber (2) is driven to reset by the driving ends of the two first servo electric cylinders (3); Step a2: When placing the coated product inside the placement rack (6), one side of the four movable baffles (7) inside the placement slot is extended, and the four movable baffles (7) are used to support the four sides of the bottom of the coated product. Then, the driving ends of the second servo electric cylinders (10) on the four sides are used to control the limiting blocks (8) on the four sides to move synchronously toward the sides of the coated product. When the four limiting blocks (8) approach the sides of the coated product, the four movable baffles (7) are driven by the transmission gear (9) to move toward the inside of the placement rack (6) until the four limiting blocks (8) are respectively attached to the four sides of the coated product, and the four movable baffles (7) at the bottom of the coated product are all separated from the bottom of the coated product, thereby completing the placement of the coated product. Step a3: When heating the coated product, the heat conducting plate (13) is driven by the driving end of the third servo electric cylinder (14) inside the upper and lower fixing frames (5) to approach the surface of the coated product, and then the heat conducting plate (13) is heated by the resistance heating wires (12) inside the two heating frames (11), and then the heat is evenly transferred to the surface of the coated product through the heat conducting plate (13); Step a4: After the coating product is heated, the heat conducting plate (13) is reset by the driving end of the third servo electric cylinder (14), and then the movable frame (15) is driven by the electric slide to slide to one side on the surface of the heat conducting plate (13). During the sliding process of the movable frame (15), the cleaning brush (17) inside the movable frame (15) is meshed with the driven gear (18) and the rack (19) at both ends, so that the cleaning brush (17) rotates with the movement of the movable frame (15). The rotating cleaning brush (17) is used to clean the surface of the heat conducting plate (13). At the same time, the micro dust suction pump and the dust suction port (21) inside the movable frame (15) are used to send the cleaned dust into the material storage chamber (20). After (15) moves to the rightmost side of the movable groove (16), the scraper frame (22) is controlled to move upward, and the connecting gear (23) at one end of the scraper frame (22) meshes with one of the driven gears (18) for transmission. At the same time, the two discharge pipes (24) are respectively connected to the inside of the two discharge ports. At this time, the connecting gear (23) is controlled to rotate. Under the cooperative connection between the connecting gear (23) and the driven gear (18), the cleaning brush (17) is allowed to rotate synchronously. The scraper frame (22) is used to clean the impurities attached to the cleaning brush (17). At the same time, the discharge pipe (24) is used to extract the impurities in the storage chamber, and the cleaned impurities and the extracted impurities are sent out through the spring discharge pipe (25).

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