A gas distribution device for a silicon-carbon negative electrode material synthesis furnace

Abstract

The application discloses a gas distribution device for a silicon-carbon negative electrode material synthesis furnace, which comprises a furnace body, an air flow pump arranged outside the furnace body, a gas storage tank connected with the air flow pump through a gas pipeline, a plurality of shunt pipes connected with the air flow pump, each shunt pipe being vertically arranged on one side of the furnace body and being connected to the side wall of the furnace body at different heights, a gas supply assembly arranged in the furnace body in an up-down arrangement, the gas supply assembly being connected with each shunt pipe, a breathing gas guide mechanism vertically arranged in the center of the furnace body, a gas data detection module connected with the air flow pump, an environment sensing module arranged in the furnace body, the environment sensing module being used for acquiring environment characteristic data in the furnace body through a temperature and humidity sensor and an air pressure sensor, and the breathing gas guide mechanism being used for air guide layout in an up-circulation, down-circulation or multi-layer circulation mode according to the movement characteristics of gas in the furnace body.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor material processing technology, specifically a gas distribution device for a silicon-carbon anode material synthesis furnace. Background Technology

[0002] Silicon-carbon anode materials combine the properties of silicon and carbon, bringing significant advantages to battery and semiconductor technologies. Currently, in the processing of silicon-carbon anode materials, to improve material quality, protective gases, reactive gases, and carrier gases are usually introduced into the synthesis furnace to optimize the performance of silicon-carbon anode materials during preparation, such as specific capacity, cycle stability, conductivity, and reduce the impact of expansion. Existing invention patents, such as the one with patent number CN202111401340.1, use an annular uniform flow cavity that can flow through multiple uniform flow holes to different areas of the furnace tube to improve the gas distribution effect. However, since different gases are usually introduced into the synthesis furnace at different stages for gas-solid mass transfer, gases with different properties are easily affected by the furnace environment, resulting in floating or settling accumulation, leading to concentration gradients and dead zones in the furnace, which affects the product reaction conversion rate and production quality.

[0003] Therefore, it is necessary to provide a gas distribution device for a silicon-carbon anode material synthesis furnace to solve the problems mentioned in the background art. Summary of the Invention

[0004] To achieve the above objectives, the present invention provides the following technical solution: a gas distribution device for a silicon-carbon anode material synthesis furnace, comprising: a furnace body, an external gas flow pump, the gas flow pump being connected to an external gas storage tank via a gas supply pipe, a plurality of branch pipes externally connected to the gas flow pump, each branch pipe being vertically arranged on one side of the furnace body and connected to different heights on the side wall of the furnace body, gas supply components being arranged vertically inside the furnace body, the gas supply components being connected to each branch pipe accordingly; and a breathing gas guiding mechanism being vertically arranged in the center of the furnace body.

[0005] The gas pump is connected to a gas data detection module, which is connected to the main control module. The gas data detection module is used to detect the gas characteristics and concentration in the gas pipeline and acquire gas characteristic data. An environmental sensing module is installed inside the furnace. The environmental sensing module acquires environmental characteristic data inside the furnace through temperature and humidity sensors and air pressure sensors. Based on the acquired gas characteristic data and combined with the environmental characteristic data inside the furnace, the main control module outputs the gas movement characteristics in the furnace through a preset model.

[0006] The breathing gas guiding mechanism adopts an upper circulation, lower circulation or multi-layer circulation method to guide the gas flow according to the gas movement characteristics in the furnace body.

[0007] The gas supply assembly includes:

[0008] An airflow plate with an arc-shaped cross-section is provided. Multiple airflow plates are arranged circumferentially in the furnace body. Multiple air guide seats are provided on the side wall of the furnace body. A connecting component is rotatably connected to the air guide seat. The connecting component is fixed to the airflow plate. An air passage is provided in the middle of the connecting component. An inner cavity is provided in the airflow plate. The inner cavity is connected to the air guide seat through the air passage.

[0009] A circular gas ring is formed in the side wall of the furnace body. One end of the diversion pipe is connected to the circular gas ring, and each of the gas guide seats is sealed to the circular gas ring.

[0010] Exhaust holes are arranged on the inner arc-shaped wall surface of the airflow plate, and the exhaust holes are connected to the inner cavity.

[0011] Furthermore, as a preferred embodiment, a support spring is connected to the airflow plate, one end of the support spring is connected to the furnace body, and guide rollers are symmetrically rotatably connected to both sides of the airflow plate.

[0012] An adjusting ring is provided in the furnace body that can be relatively deflected. A pressure plate is fixed on the adjusting ring between adjacent airflow plates. The pressure plate has a triangular cross-section and its sidewalls are set as curved structures. The guide roller can contact the pressure plate during the rotation of the adjusting ring.

[0013] The deflection angle of the airflow plate with the adapter as the axis ranges from -25° to 25°, so that multiple airflow plates are arranged in a clockwise or counterclockwise inward rotation inside the furnace body.

[0014] Multiple diversion columns are fixed on the inner arc-shaped wall surface of the airflow plate. The multiple diversion columns are distributed in a grid pattern outside each of the exhaust holes. One end of each diversion column has a conical structure.

[0015] Furthermore, as a preferred embodiment, the airflow plates in each of the upper and lower air supply components can be arranged in the same or different directions with inward rotation.

[0016] Furthermore, preferably, the breathing ventilation mechanism includes:

[0017] A central tube is vertically installed inside the furnace body, and multiple circumferentially distributed through holes are arranged on the central tube.

[0018] An inner tube is coaxially disposed within the central tube, and the inner tube has multiple micropores distributed on it.

[0019] A breathing pump is installed outside the furnace body. The breathing pump is equipped with a one-way air inlet chamber, which is connected to multiple breathing chambers in the breathing pump. The air inlet end of the one-way air inlet chamber is connected to the inner tube through a section tube.

[0020] The air delivery components are multiple vertically arranged, and each air delivery component is sealed and slidably disposed in the central tube; the multiple breathing chambers in the breathing pump are connected to circulation tubes outside the one-way exhaust channels, and one end of each circulation tube is connected to each of the air delivery components.

[0021] Furthermore, as a preferred embodiment, each of the circulation pipes is connected to a tee, and one port of the tee is connected to an external output pipe.

[0022] Furthermore, preferably, the air guiding assembly includes:

[0023] There are two blocking discs, one above the other, which are fixed together by a support rod. The two blocking discs are slidably connected inside the central tube and are in close contact with the inner wall of the central tube.

[0024] A positioning screw sleeve is vertically fixed between the blocking discs. The positioning screw sleeve is slidably sleeved on the outside of the inner tube. The inner tube is provided with a threaded guide groove. The positioning screw sleeve is slidably connected to the inner tube through threaded engagement.

[0025] A drive unit is mounted on the central tube, and the inner tube is rotatably disposed inside the central tube via a bearing. The output end of the drive unit is fixed to the inner tube.

[0026] An air supply seat is fixed on the lower baffle plate. The air supply seat is provided with a one-way drainage hole. The lower baffle plate is provided with multiple inner holes. The one-way drainage hole is connected to the inner holes. The circulation pipe is connected to the one-way drainage hole through a telescopic flexible tube set in the central pipe.

[0027] Furthermore, as a preferred embodiment, the threaded guide groove on the inner tube can be configured as a single-segment unidirectional or multi-segment bidirectional structure, and the inner tube can be disassembled and replaced with different specifications.

[0028] Furthermore, as a preferred embodiment, the diameters of the micropores at different heights on the inner tube are different, and the diameters of the micropores near the joint are smaller than those far from the joint.

[0029] Compared with the prior art, the beneficial effects of the present invention are:

[0030] The present invention mainly optimizes the flow and distribution of gas in the furnace. The gas supply component can carry out multi-stage gas delivery in the furnace body and improve gas diffusion. In particular, the breathing gas guiding mechanism can adopt an appropriate gas delivery and guiding method to carry out gas guiding layout based on the gas movement characteristics in the furnace body, thereby realizing uniform distribution and orderly flow of gas in the furnace and eliminating gas concentration gradients and dead zones. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of the present invention. Figure 1 ;

[0032] Figure 2 This is a schematic diagram of the structure of the present invention. Figure 2 ;

[0033] Figure 3 This is a cross-sectional view of the gas supply assembly in this invention;

[0034] Figure 4 This is a schematic diagram of the gas supply component in this invention;

[0035] Figure 5 This is a partial schematic diagram of the adjusting ring in this invention;

[0036] Figure 6 This is a schematic diagram of the breathing air delivery mechanism in this invention;

[0037] Figure 7 This is a schematic diagram of the air guiding assembly in this invention;

[0038] In the diagram: 1. Furnace body; 11. Air pump; 12. Diverter pipe; 2. Gas supply assembly; 21. Airflow plate; 22. Air guide seat; 23. Adapter; 24. Circular air ring; 3. Breathing air guiding mechanism; 31. Central pipe; 32. Inner pipe; 33. Through hole; 4. Adjusting ring; 41. Guide roller; 42. Pressure plate; 43. Diverter column; 5. Breathing pump; 51. One-way air inlet chamber; 52. Section pipe; 53. Circulation pipe; 54. External output pipe; 6. Air guiding assembly; 61. Baffle plate; 62. Inner pipe; 63. Positioning screw sleeve; 64. Drive unit; 65. Air supply seat; 66. Telescopic hose. Detailed Implementation

[0039] Please see Figure 1-7 In this embodiment of the invention, a gas distribution device for a silicon-carbon anode material synthesis furnace includes: a furnace body 1, on the outside of which a gas flow pump 11 is installed. The gas flow pump 11 is connected to an external gas storage tank (not shown in the figure) through a gas supply pipe. The gas storage tank can store protective gases (such as argon (Ar) or nitrogen (N)) or carbon source gases (such as propane (CH4) or methane (CH4), reaction gases, carrier gases, etc.). Multiple distribution pipes 12 are externally connected to the gas flow pump 11. Each distribution pipe 12 is vertically arranged on one side of the furnace body 1 and connected to the side wall of the furnace body 1 at different heights. Gas supply components 2 are arranged vertically inside the furnace body 1. The gas supply components 2 are connected to each distribution pipe 12. That is, multiple gas supply components 2 can simultaneously supply gas to the furnace body, improving gas diffusion. A breathing gas guiding mechanism 3 is vertically arranged in the center of the furnace body 1.

[0040] A gas data detection module is connected to the gas pump 11. This module is connected to the main control module and is used to detect the gas characteristics and concentration in the gas pipeline and acquire gas characteristic data. An environmental sensing module is installed inside the furnace body 1. This module acquires environmental characteristic data inside the furnace body 1, such as temperature, humidity, and air pressure, through temperature and humidity sensors and air pressure sensors. This information is also fed back to the main control module to reflect the current environmental conditions of the furnace body. Based on the acquired gas characteristic data and combined with the environmental characteristic data inside the furnace body 1, the main control module outputs the gas movement characteristics in the furnace body 1 through a preset model. That is, the main control module receives and integrates gas characteristic data and furnace body environmental characteristic data, and analyzes and processes the comprehensive information through a preset mathematical model or algorithm. The preset model mainly simulates the movement, distribution, and diffusion of gas inside the furnace body by combining physical laws such as gas dynamics, thermodynamics, and diffusion theory.

[0041] The breathing gas guiding mechanism 3 adopts an upper circulation, lower circulation, or multi-layer circulation layout to guide the gas flow according to the gas movement characteristics in the furnace body 1. Specifically, the natural characteristics of the gas in the furnace body, such as the rising of hot gas and the sinking of cold gas (natural convection), are used by the breathing gas guiding mechanism to guide the gas to form a stable circulation path within the furnace.

[0042] For the upward circulation layout, the gas density decreases after heating, resulting in upward flow. The breathing gas guide mechanism is arranged with gas intake ports at the top or upper part of the furnace to draw in the gas, process it, and then reinject it into the bottom of the furnace to promote reuse and upward gas circulation.

[0043] The lower circulation flow layout is the opposite of the above;

[0044] For the multi-layer circulating flow layout, the gas is circulated and guided in the direction of water at different heights in the furnace body to form multiple vertically distributed three-dimensional circulation networks, thereby promoting gas circulation.

[0045] The gas supply assembly 2 includes:

[0046] The airflow plate 21 has an arc-shaped cross-section. Multiple airflow plates 21 are arranged circumferentially inside the furnace body 1. Multiple air guide seats 22 are provided on the side wall of the furnace body 1. A connecting member 23 is rotatably connected inside the air guide seat 22. The connecting member 23 is fixed to the airflow plate 21, and an air passage is provided in the middle of the connecting member 23. The airflow plate 21 has an inner cavity, and the inner cavity is connected to the air guide seat 22 through the air passage.

[0047] A circular gas ring 24 is formed in the side wall of the furnace body 1. One end of the diversion pipe 12 is connected to the circular gas ring 24, and each of the gas guide seats 22 is sealed to the circular gas ring 24. That is, the inner cavity of the airflow plate can be connected to the circular gas ring through the gas guide seat, thereby transporting the gas in the diversion pipe to the inner cavity of each airflow plate.

[0048] The exhaust vents are arranged on the inner arc-shaped wall surface of the airflow plate 21. The exhaust vents are connected to the inner cavity, and the gas in the inner cavity can enter the furnace body through the exhaust vents.

[0049] In this embodiment, a support spring is connected to the airflow plate 21, one end of the support spring is connected to the furnace body 1, and guide rollers 41 are symmetrically rotatably connected to both sides of the airflow plate 21.

[0050] An adjusting ring 4 is provided in the furnace body 1 that can be relatively deflected. A pressure plate 42 is fixed on the adjusting ring 4 between adjacent airflow plates 21. The pressure plate 42 has a triangular cross-section and its sidewalls are set as curved surfaces. The guide roller 41 can contact the pressure plate 42 during the rotation of the adjusting ring 4. The adjusting ring is mainly driven by a motor set on the furnace body through gear meshing (this is prior art and will not be described in detail).

[0051] The deflection angle of the airflow plate 21 with the adapter 23 as the axis ranges from -25° to 25°, so that multiple airflow plates 21 are arranged in a clockwise or counterclockwise inward rotation inside the furnace body 1. When the airflow plates are arranged in a clockwise or counterclockwise inward rotation, the gas can form a vortex flow inside the furnace body, which further improves the gas diffusion and improves the gas flow in the furnace body during gas circulation.

[0052] Multiple diversion columns 43 are fixed on the inner arc-shaped wall surface of the airflow plate 21. The multiple diversion columns 43 are distributed in a grid pattern outside each of the exhaust holes. One end of each diversion column 43 has a conical structure, which reduces or avoids the formation of fluidization dead zones in the unperforated part of the airflow plate.

[0053] In this embodiment, the airflow plates 21 of each gas supply component 2 located above and below can be arranged in the same or different directions of inward spiral. Optimally, when the gas in the furnace is circulating in multiple layers, the airflow plates 21 of each gas supply component 2 are arranged in different directions of inward spiral, while when the gas in the furnace is circulating in the upper and lower parts, the airflow plates 21 of each gas supply component 2 are arranged in the same direction of inward spiral.

[0054] In this embodiment, the breathing ventilation mechanism 3 includes:

[0055] A central tube 31 is vertically installed inside the furnace body 1, and a plurality of circumferentially distributed through holes 33 are arranged on the central tube 31.

[0056] An inner tube 32 is coaxially disposed in the central tube 31, and a plurality of micropores are distributed on the inner tube 32;

[0057] A breathing pump 5 is installed outside the furnace body 1. The breathing pump 5 is equipped with a one-way air inlet chamber 51, which is connected to multiple breathing chambers in the breathing pump 5. The air inlet end of the one-way air inlet chamber 51 is connected to the inner tube 32 through a section pipe 52. The breathing pump adopts a pump structure such as a plunger pump or a swashplate pump, and has multiple independent pump chambers inside, each of which can work in sequence (this is prior art and will not be described in detail).

[0058] The gas guiding components 6 are multiple vertically arranged, and each gas guiding component 6 is sealed and slidably disposed in the central tube 31. The multiple breathing chambers of the breathing pump 5 are connected to the external one-way exhaust channels of the circulation pipes 53. One end of the circulation pipes 53 is connected to each of the gas guiding components 6. It should be noted that when the breathing pump 5 is working, it can extract gas from the furnace body through the micropores on the inner tube 32, and the exhaust end of the breathing pump 5 will send the gas back to the gas guiding components 6 through the circulation pipes 53. At this time, the gas is discharged by the gas guiding components 6 through the corresponding through holes 33 on the central tube 31.

[0059] In this embodiment, each circulation pipe 53 is connected to a tee, and one port of the tee is connected to an external output pipe 54 for transporting the gas inside the furnace to the outside, so that it no longer enters the furnace for circulation. Therefore, each gas guiding component 6 can control its specific working state through the tee.

[0060] In this embodiment, the air guiding component 6 includes:

[0061] There are two blocking disks 61 arranged vertically, and the two blocking disks 61 are fixed together by a support rod 62. The blocking disks 61 are slidably connected inside the central tube 31 and are in close contact with the inner wall of the central tube 31.

[0062] The positioning screw sleeve 63 is vertically fixed between the blocking discs 61. The positioning screw sleeve 63 is slidably sleeved on the outside of the inner tube 32. The inner tube 32 is provided with a threaded guide groove. The positioning screw sleeve 63 is slidably connected to the inner tube 32 through threaded engagement. The positioning screw sleeve 63 can seal the inner tube, thereby preventing gas in the inner tube from entering the gas guiding assembly 6.

[0063] The drive unit 64 is mounted on the central tube 31. The inner tube 32 is rotatably disposed inside the central tube 31 via a bearing. The output end of the drive unit 64 is fixed to the inner tube 32. Thus, the vertical displacement and positioning of the gas guiding assembly 6 can be controlled by rotating the inner tube, and the specific position of the gas circulation delivery point can be adjusted so as to cooperate with the gas supply assembly to carry out gas guiding layout in the form of upper circulation, lower circulation or multi-layer circulation.

[0064] The gas supply seat 65 is fixed on the lower baffle plate 61. The gas supply seat 65 is provided with a one-way drainage hole, and the lower baffle plate 61 is provided with multiple inner holes. The one-way drainage hole is connected to the inner holes. The circulation pipe 53 is connected to the one-way drainage hole through the telescopic flexible hose 66 set in the central pipe 31. That is, when the gas guiding component slides to any position, the gas supply seat 65 can circulate and deliver gas through the through hole 33 on the central pipe.

[0065] In a preferred embodiment, the threaded guide groove on the inner tube 32 can be configured as a single-segment unidirectional or multi-segment bidirectional structure, and the inner tube 32 can be disassembled and replaced with different specifications, thereby enabling flexible control of multiple air guiding components 6 in the central tube, allowing them to slide in the same direction or opposite directions.

[0066] In this embodiment, the diameters of the micropores at different heights on the inner tube 32 are different, and the diameters of the micropores near the section tube 52 are smaller than those far from the section tube 52, thereby improving the uniformity of gas flow at different heights in the inner tube.

[0067] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A gas distribution device for a silicon-carbon anode material synthesis furnace, characterized in that: It includes: The furnace body (1) is equipped with an airflow pump (11) on its exterior. The airflow pump (11) is connected to an external gas storage tank through an air supply pipe. Multiple diversion pipes (12) are connected to the airflow pump (11). Each diversion pipe (12) is vertically arranged on one side of the furnace body (1) and connected to the side wall of the furnace body (1) at different heights. An air supply assembly (2) is arranged vertically inside the furnace body (1). The air supply assembly (2) is connected to each diversion pipe (12). A breathing air guiding mechanism (3) is vertically arranged in the center of the furnace body (1). The gas pump (11) is connected to a gas data detection module, which is connected to the main control module and is used to detect the gas characteristics and concentration in the gas pipeline and obtain gas characteristic data. The furnace body (1) is equipped with an environmental sensing module, which obtains environmental characteristic data inside the furnace body (1) through temperature and humidity sensors and air pressure sensors. The main control module outputs the gas movement characteristics in the furnace body (1) based on the obtained gas characteristic data and combined with the environmental characteristic data inside the furnace body (1) through a preset model. The breathing gas guiding mechanism (3) adopts an upper circulation, lower circulation or multi-layer circulation method to guide the gas flow according to the gas movement characteristics in the furnace body (1); The gas supply assembly (2) includes: An airflow plate (21) has an arc-shaped cross-section. Multiple airflow plates (21) are arranged circumferentially inside the furnace body (1). Multiple air guide seats (22) are provided on the side wall of the furnace body (1). A transition piece (23) is rotatably connected inside the air guide seat (22). The transition piece (23) is fixed to the airflow plate (21), and an air passage is provided in the middle of the transition piece (23). An inner cavity is provided in the airflow plate (21), and the inner cavity is connected to the air guide seat (22) through the air passage. A circular gas ring (24) is formed in the side wall of the furnace body (1). One end of the diversion pipe (12) is connected to the circular gas ring (24), and each of the gas guide seats (22) is sealed to the circular gas ring (24). Exhaust holes are arranged on the inner arc-shaped wall surface of the airflow plate (21), and the exhaust holes are connected to the inner cavity; The breathing ventilation mechanism (3) includes: A central tube (31) is vertically installed inside the furnace body (1), and a plurality of circumferentially distributed through holes (33) are arranged on the central tube (31); An inner tube (32) is coaxially disposed in the central tube (31), and a plurality of micropores are distributed on the inner tube (32); A breathing pump (5) is installed outside the furnace body (1). The breathing pump (5) is provided with a one-way air inlet chamber (51). The one-way air inlet chamber (51) is connected to multiple breathing chambers in the breathing pump (5). The air inlet end of the one-way air inlet chamber (51) is connected to the inner tube (32) through a section tube (52). The air delivery components (6) are arranged vertically in multiple ways, and each air delivery component (6) is sealed and slidably arranged in the central tube (31); the multiple breathing chambers in the breathing pump (5) are connected to the external unidirectional exhaust channels of the circulation tubes (53), and one end of the circulation tubes (53) is connected to each of the air delivery components (6).

2. The gas distribution device for a silicon-carbon anode material synthesis furnace according to claim 1, characterized in that: A support spring is connected to the airflow plate (21), one end of which is connected to the furnace body (1), and guide rollers (41) are symmetrically rotated on both sides of the airflow plate (21). An adjusting ring (4) is provided in the furnace body (1) and can be relatively deflected. A pressure plate (42) is fixed on the adjusting ring (4) between adjacent airflow plates (21). The pressure plate (42) has a triangular cross-section and its sidewall is set as a curved structure. The guide roller (41) can contact the pressure plate (42) during the rotation of the adjusting ring (4). The deflection angle of the airflow plate (21) with the adapter (23) as the axis is in the range of -25° to 25°, so that multiple airflow plates (21) are arranged in a clockwise or counterclockwise inward rotation inside the furnace body (1); The inner arc-shaped wall surface of the airflow plate (21) is fixed with a plurality of diversion columns (43), which are distributed in a grid pattern outside each of the exhaust holes. One end of each diversion column (43) has a conical structure.

3. The gas distribution device for a silicon-carbon anode material synthesis furnace according to claim 2, characterized in that: The airflow plates (21) in each of the air supply components (2) located above and below can be arranged in the same or different directions in an inward spiral.

4. The gas distribution device for a silicon-carbon anode material synthesis furnace according to claim 1, characterized in that: Each circulation pipe (53) is connected to a tee, and one port of the tee is connected to an output pipe (54).

5. The gas distribution device for a silicon-carbon anode material synthesis furnace according to claim 1, characterized in that: The air guiding assembly (6) includes: The two blocking discs (61) are arranged vertically and vertically. The two blocking discs (61) are fixed together by a support rod (62). The blocking discs (61) are slidably connected inside the central tube (31) and are in close contact with the inner wall of the central tube (31). A positioning screw sleeve (63) is vertically fixed between the blocking discs (61). The positioning screw sleeve (63) is slidably sleeved on the outside of the inner tube (32). The inner tube (32) is provided with a threaded guide groove. The positioning screw sleeve (63) is slidably connected to the inner tube (32) through threaded engagement. A drive unit (64) is mounted on a central tube (31), and an inner tube (32) is rotatably disposed inside the central tube (31) via a bearing. The output end of the drive unit (64) is fixed to the inner tube (32). An air supply seat (65) is fixed on the lower baffle plate (61). The air supply seat (65) is provided with a one-way drainage hole. The lower baffle plate (61) is provided with multiple inner holes. The one-way drainage hole is connected to the inner hole. The circulation pipe (53) is connected to the one-way drainage hole through a telescopic flexible hose (66) set in the central pipe (31).

6. The gas distribution device for a silicon-carbon anode material synthesis furnace according to claim 1, characterized in that: The threaded guide groove on the inner tube (32) can be configured as a single-segment unidirectional or multi-segment bidirectional structure, and the inner tube (32) can be disassembled and replaced with different specifications.

7. The gas distribution device for a silicon-carbon anode material synthesis furnace according to claim 1, characterized in that: The diameters of the micropores at different heights on the inner tube (32) are different, and the diameters of the micropores near the section tube (52) are smaller than those far from the section tube (52).

Images