A quasi-zero stiffness automatic vibration isolation maglev planar motor mover

Abstract

A kind of quasi-zero stiffness automatic vibration isolation magnetic suspension planar motor rotor, the present application relates to a motor rotor, to solve the vertical vibration problem of magnetic suspension planar motor rotor, the present application includes rotor frame, embedded PCB coil module and moving winding coil module;The embedded PCB coil module and moving winding coil module are installed in rotor frame from top to bottom, and gap is equipped between embedded PCB coil module and moving winding coil module.The moving winding coil module is four groups, and the upper portion of each winding coil module is provided with an embedded PCB coil module.The present application aims at magnetic suspension motion system, and quasi-stiffness automatic vibration isolation effect is realized from structure, and has certain application potential.The present application belongs to the field of vibration isolation technology.

Description

Technical Field

[0001] This invention relates to a motor mover, specifically to a cold-zero stiffness automatic vibration-isolated magnetic levitation planar motor mover, which belongs to the field of vibration isolation technology. Background Technology

[0002] Magnetic levitation planar motors offer advantages such as low stiffness, frictionless operation, and high precision, making them suitable for high-cleanliness and high-vacuum working environments. They have important applications in ultra-precision machining and semiconductor manufacturing, such as EUV lithography. Magnetic levitation technology uses magnetic force to suspend and stabilize objects without physical contact, thus reducing friction and wear. Using magnetic levitation technology in motors can improve operating efficiency and reduce maintenance requirements. A planar motor is a special type of motor whose mover (moving part) moves within a single plane, unlike traditional axial-moving motors. This design allows for precise position control of the motor in a two-dimensional plane. Quasi-zero stiffness automatic vibration-isolated magnetic levitation planar motors can be applied to applications requiring high precision and stability, such as: precision manufacturing: for machine tools, semiconductor manufacturing equipment, etc., to accurately control tool position; vibration-sensitive equipment: such as high-precision measuring instruments, where quasi-zero stiffness vibration isolation technology can effectively isolate environmental vibrations; high-speed transportation: maglev trains, etc., utilizing magnetic levitation technology to achieve low-friction operation.

[0003] Vibration problems are common in mechanical equipment, especially for complex power units, whose vibrations are characterized by multiple excitation sources, strong coupling, and wide frequency bands. As power units develop towards higher power and lighter weight, and as vibration isolation requirements increase, traditional rubber vibration isolators are no longer sufficient for some stringent vibration control applications. Quasi-zero stiffness vibration isolators, with their high static stiffness and low dynamic stiffness, can maintain relatively low dynamic stiffness even under heavy loads, resulting in higher vibration isolation efficiency compared to traditional isolators. In vibration isolation systems, quasi-zero stiffness helps achieve very low resonant frequencies, improving the vibration isolation effect. Automatic vibration isolation technology refers to using an automatic control system to adjust the parameters of the vibration isolation device to adapt to different working conditions and vibration environments, thereby achieving the optimal vibration isolation effect. Based on the method of generating negative stiffness, quasi-zero stiffness vibration isolators can be divided into two categories: mechanical quasi-zero stiffness vibration isolators and electromagnetic quasi-zero stiffness vibration isolators. Mechanical quasi-zero stiffness vibration isolators generate negative stiffness in the structure through mechanical combinations, pre-tensioning, and pre-compression methods. A typical structure consists of a vertical spring connected in parallel with two inclined springs. While mechanical quasi-zero stiffness isolators improve the vibration isolation efficiency of the system to some extent, they have certain drawbacks, namely weak mechanical stability and susceptibility to instability, which limits their practical application. Electromagnetic quasi-zero stiffness isolators, which utilize electromagnetic force to generate negative stiffness, have the characteristics of fast response, strong adaptability, and high stability. They can generate quasi-zero characteristics without mechanical contact and have become a research hotspot for scholars both domestically and internationally.

[0004] Quasi-zero stiffness magnetic levitation vibration isolation platforms have advantages such as low natural frequency, high load-bearing capacity, and wide vibration isolation bandwidth. However, the vibration isolation effect is greatly affected by the current and permanent magnets, and there are also problems such as instability. In order to dynamically adjust the stiffness and damping of the quasi-zero stiffness magnetic levitation vibration isolation platform, existing solutions mostly add control algorithms such as PID for compensation, but this will increase the complexity and instability of the system.

[0005] As mentioned above, magnetic levitation planar motors can be applied to the field of ultra-precision machining and manufacturing. It is necessary to ensure the stability of vertical motion. However, due to factors such as the non-uniformity of the magnetic field of the magnet array, the machining error of the winding coil and the error of the control algorithm, the mover of the magnetic levitation planar motor often vibrates in the vertical direction. Summary of the Invention

[0006] To address the vertical vibration problem of the rotor of a magnetic levitation planar motor, this invention proposes a quasi-zero stiffness automatic vibration isolation rotor for the magnetic levitation planar motor.

[0007] The technical solution adopted by the present invention to solve the above problems is as follows:

[0008] The present invention includes a moving frame, an embedded PCB coil module, and a movable winding coil module; the embedded PCB coil module and the movable winding coil module are installed in the moving frame from top to bottom, and a gap is provided between the embedded PCB coil module and the movable winding coil module.

[0009] Furthermore, the movable winding coil module consists of four groups, with an embedded PCB coil module located on the upper part of each group of movable winding coil modules.

[0010] Furthermore, each set of movable winding coil modules includes a housing, a water-cooled hollow plate, a leaf spring, and a winding coil. The lower surface of the housing is provided with a rectangular groove, and the winding coil is installed in the rectangular groove through the water-cooled hollow plate. The front of the housing is provided with two symmetrically arranged rectangular through holes, and a leaf spring is installed in each rectangular through hole. The lower part of the rectangular through holes is provided with three circular holes.

[0011] Furthermore, the water-cooled hollow plate is provided with three cylindrical interfaces on each side.

[0012] Furthermore, each embedded PCB coil module consists of a stack of 5 layers of PCB coils.

[0013] Furthermore, the lower surface of the moving frame is provided with a first rectangular slot for mounting the embedded PCB coil module and a second rectangular slot for mounting the movable winding coil module.

[0014] Furthermore, the gap between the embedded PCB coil module and the movable winding coil module is 1.5mm.

[0015] The beneficial effects of this invention are:

[0016] 1. The mover structure proposed in this invention can reduce vertical vibration. When the mover moves vertically, the winding coil provides a vertical driving force, which is transmitted to the mover through the leaf spring, thus realizing the vertical movement of the mover.

[0017] 2. This invention achieves quasi-stiffness automatic vibration isolation from a structural perspective, making up for the shortcomings of existing algorithmic vibration isolation, increasing the stability of the system, and has certain application potential.

[0018] 3. This invention provides positive stiffness through leaf springs, while the electromagnetic force between the PCB coil and the winding coil provides negative stiffness. The positive and negative stiffness are connected in parallel, so that the system is in a quasi-zero stiffness state. That is, the vibration of the winding coil will not be transmitted to the mover, which achieves the vibration isolation effect, improves the positioning accuracy of the mover, and improves the performance indicators. Attached Figure Description

[0019] Figure 1 This is a perspective view of the overall structure of the present invention;

[0020] Figure 2 This is a front view of the overall structure of the present invention;

[0021] Figure 3 This is a structural diagram of an embedded PCB coil module;

[0022] Figure 4 This is a 3D view of the movable winding coil module;

[0023] Figure 5 This is the front view of the moving winding coil module;

[0024] Figure 6 It is a three-dimensional view of the shell;

[0025] Figure 7 This is the front view of the water-cooled hollow plate;

[0026] Figure 8 yes Figure 7 Top view;

[0027] Figure 9 It is a three-dimensional diagram of a leaf spring;

[0028] Figure 10 It is a 3D diagram of the winding coil;

[0029] Figure 11 This is a side view of Embodiment 1;

[0030] Figure 12 This is the front view of Embodiment 1;

[0031] Figure 13 This is a structural diagram of Example 2. Detailed Implementation

[0032] Specific implementation method one: Combining Figure 1 This embodiment describes a quasi-zero stiffness automatic vibration isolation magnetic levitation planar motor mover, which includes a mover frame 1, an embedded PCB coil module 2, and a movable winding coil module 3. The embedded PCB coil module 2 and the movable winding coil module 3 are installed from top to bottom within the mover frame 1, and a gap is provided between the embedded PCB coil module 2 and the movable winding coil module 3.

[0033] Specific Implementation Method Two: Combining Figures 3 to 9 In this embodiment, the movable winding coil module 3 consists of four groups, and each group of movable winding coil modules 3 has an embedded PCB coil module 2 on its upper part.

[0034] Four sets of movable winding coil modules 3 are respectively installed at the four corner positions inside the moving frame 1, wherein the first winding coil module a and the fourth winding coil module d are arranged in the same direction; the second winding coil module b and the third winding coil module c are arranged in the same direction.

[0035] Each set of movable winding coil modules 3 includes a housing 301, a water-cooled hollow plate 302, a leaf spring 303, and a winding coil 304. The lower surface of the housing 301 is provided with a rectangular groove, and the winding coil 304 is installed in the rectangular groove through the water-cooled hollow plate 302. The front part of the housing 301 is provided with two symmetrically arranged rectangular through holes 3011, and a leaf spring 303 is installed in each rectangular through hole 3011. The lower part of the rectangular through holes 3011 is provided with three circular holes 3012.

[0036] The water-cooled hollow plate 302 is provided with three cylindrical interfaces 3021 on both sides.

[0037] See Figures 4 to 6 To reduce weight, the main body of housing 301 is made of bakelite, and the dimensions of housing 301 are 115mm. 88mm The housing 301 has two symmetrical rectangular through holes 3011, each 17mm thick, for easy installation of the leaf spring 303. The rectangular through holes 3011 are 20mm in size. 5mm thick, 115mm deep, each rectangular through-hole 3011 is 22mm from the center of the housing, and the upper surface of the through-hole is 1.4mm from the upper surface of the housing. Three circular holes 3012 with a radius of 1mm are evenly distributed on the outer side of the housing 301 as reserved locations for water-cooling pipe routing. The second circular hole is located at the center of the housing, the center-to-center distance between the two circular holes is 21.25mm, and the center of the circular hole 3012 is 8.8mm from the upper surface of the housing. A 113mm diameter hole is reserved on the lower surface of the housing 301. A rectangular slot, 86mm in diameter and 9.2mm deep, is used to accommodate the water-cooled hollow plate 302 and the winding coil 304. The water-cooled hollow plate 302, the winding coil 304, and the housing 301 are connected by adhesive bonding. The winding coil 304 is bonded to the lower surface of the water-cooled hollow plate 302, which is used to cool the winding coil 304. The frame thickness of the housing 301 is 1mm.

[0038] See Figure 7 and Figure 8 To avoid the impact of eddy currents on motion accuracy, the water-cooled hollow plate 302 is made of non-metallic material and has a size of 113. 86 2mm. To improve heat dissipation efficiency, the water-cooled hollow plate 302 is used to increase the heat dissipation area. Three symmetrically distributed cylindrical interfaces 3021 with a radius of 0.8mm and a height of 5mm are provided on both sides of the water-cooled hollow plate 302 to facilitate subsequent connection of water-cooling pipes. The middle cylindrical interface 3021 is located at the center of the water-cooled hollow plate 302, with a center-to-center distance of 21.25mm between any two adjacent cylindrical interfaces 3021. The center of each cylindrical interface 3021 is 1mm from the upper surface of the water-cooled hollow plate 302. The three cylindrical interfaces 3021 correspond to three winding coils 304 respectively, making them more targeted and further improving the heat dissipation effect.

[0039] See Figure 9 Leaf spring 303 is a rectangular leaf spring used to provide positive stiffness. The rectangular leaf spring used in this invention has a size of 152. 20 5mm.

[0040] See Figure 10 This invention employs a three-phase coil to provide the main electromagnetic driving force. Each individual winding coil 304 is racetrack-shaped, with its length and width set according to the magnet pole pitch. The overall size of a single winding coil 304 is 112. 28.2 The coil is 7.2mm thick with a 5.3mm gap in the middle. The overall size of a set of three-phase coils is 112. 84.6 7.2mm.

[0041] Specific implementation method three: Combining Figure 1 and Figure 2 This embodiment describes each embedded PCB coil module 2 as consisting of 5 layers of stacked PCB coils.

[0042] See Figure 2 The embedded PCB coil module 2 has a size of 115. 88 The coil is 5mm thick and consists of 5 layers of stacked PCB coils. The main function of the embedded PCB coil module 2 is to counteract the vibration generated by the drive coil. Each single-layer PCB coil is 1mm thick and is formed using a copper-plated method, offering advantages such as a large inference coefficient, light weight, and good heat dissipation. The PCB coil also uses three-phase electric drive. The copper wire width is the same as the racetrack-shaped coil, but the length differs, remaining consistent with the effective length of the racetrack-shaped coil. The corners are rounded to better transmit current and prevent current backlash interference.

[0043] The other components and connections in this embodiment are the same as in specific embodiment one or two.

[0044] Specific implementation method four: The lower surface of the moving frame 1 described in this implementation method is provided with a first rectangular slot for installing the embedded PCB coil module 2 and a second rectangular slot for installing the movable winding coil module 3.

[0045] To reduce weight, bakelite was chosen as the material for the actuator frame 1, with an overall dimension of 260. 260 30mm, with a 155mm gap left on the lower surface of the moving frame 1. 90 A 17mm rectangular slot is used to house the movable winding coil module 3, with a 115mm gap left in addition to the rectangular slot. 88 A 6.5mm rectangular slot is used to place the embedded PCB coil module 2. A 1.5mm gap is left between the embedded PCB coil module 2 and the movable winding coil module 3 to prevent the winding coil from moving up and down and damaging the PCB coil.

[0046] The other components and connections in this embodiment are the same as those in specific embodiments one, two, or three.

[0047] Example 1:

[0048] See Figures 10 to 11 This invention proposes a mover structure for a magnetically levitated planar motor. The mover achieves six degrees of freedom motion within a magnet array using electromagnetic driving force provided by the winding coils. However, the non-uniformity of the magnetic field in the magnet array, environmental vibration interference, and errors in the control algorithm can cause vibration in the mover. The mover structure proposed in this invention can reduce vertical vibration. When the mover moves vertically, the winding coil 304 provides the vertical driving force, which is transmitted to the mover through the leaf spring 303, thus realizing the mover's vertical movement. The stiffness of the leaf spring 303 can be controlled during the design process to limit the movement range of the winding coil 304. In this embodiment, the mover levitation height is designed to be 2mm, the vertical movement range of the winding coil 304 is ±1mm, and the gap between the PCB coil module 2 and the moving winding coil module 3 is 1.5mm, providing a 0.5mm height redundancy to prevent collisions.

[0049] When the winding coil 304 moves upward in its stable position, the PCB coil provides a downward repulsive force, causing the winding coil 304 to move downward. When the winding coil 304 moves downward in its stable position, the PCB coil provides an upward attractive force, causing the winding coil 304 to move upward. The force between the PCB coil and the winding coil 304 is an internal force of the mover system and will not cause additional interference to the mover as a whole. Throughout the entire embodiment, the leaf spring 303 provides positive stiffness, while the electromagnetic force between the PCB coil and the winding coil 304 provides negative stiffness. The positive and negative stiffnesses are connected in parallel, thereby putting the system in a quasi-zero stiffness state. That is, the vibration of the winding coil will not be transmitted to the mover, achieving a vibration isolation effect, which can improve the positioning accuracy of the mover and improve performance indicators.

[0050] This invention targets magnetic levitation motion systems and achieves quasi-stiffness automatic vibration isolation from a structural perspective, demonstrating certain application potential.

[0051] Example 2:

[0052] See Figure 13 When the mover rotates around the XY axis, the basic principle of vibration isolation is similar to that in Example 1. During rotation, the vibration of the winding coil 304 close to the magnet array intensifies, and the corresponding PCB coil should increase the current to counteract the upward transmission of the vibration of the winding coil 304. The output of the winding coil 304 far from the magnet array weakens, and the corresponding PCB coil should decrease the current to counteract the upward transmission of the vibration of the winding coil 304.

[0053] Example 3:

[0054] When the mover moves along the XY direction and rotates around the Z axis, the winding coil 304 transmits the horizontal driving force to the mover through the leaf spring 303. The leaf spring 303 has a small horizontal cross-sectional area and has great stiffness and is not easily deformed, so it can transmit the force to the mover well. The mover structure mentioned in this invention has no effect on the horizontal movement.

[0055] The embodiments mentioned above include six degrees of freedom of motion, and vertical vibration isolation is the foundation for all types of motion. Therefore, this invention has strong practical significance. The dimensions and the number of leaf springs 303 mentioned above are not limited to those described in the invention description and should also be within the scope of protection.

[0056] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent substitutions, and improvements made to the above embodiments without departing from the scope of the present invention, based on the technical essence of the present invention and within the spirit and principles of the present invention, shall still fall within the protection scope of the present invention.

Claims

1. A quasi-zero stiffness active vibration isolation maglev planar motor mover, characterized in that: The quasi-zero stiffness automatic vibration isolation magnetic levitation planar motor mover includes a mover frame (1), an embedded PCB coil module (2), and a movable winding coil module (3); the embedded PCB coil module (2) and the movable winding coil module (3) are installed in the mover frame (1) from top to bottom, and a gap is provided between the embedded PCB coil module (2) and the movable winding coil module (3); There are four movable winding coil modules (3), and each movable winding coil module (3) has an embedded PCB coil module (2) on its upper part. Each embedded PCB coil module (2) is composed of 5 layers of PCB coil stacked together. Each of the movable winding coil modules (3) includes a housing (301), a water-cooled hollow plate (302), a leaf spring (303), and a winding coil (304). The lower surface of the housing (301) is provided with a rectangular slot, and the winding coil (304) is installed in the rectangular slot through the water-cooled hollow plate (302). The front part of the housing (301) is provided with two symmetrically arranged rectangular through holes (3011), and a leaf spring (303) is installed in each rectangular through hole (3011). The lower part of the rectangular through hole (3011) is provided with three round holes (3012). The leaf spring (303) provides positive stiffness, and the electromagnetic force between the PCB coil and the winding coil (304) provides negative stiffness.

2. The quasi-zero stiffness automatically isolated magnetic levitation planar motor mover according to claim 1, wherein: The water-cooled hollow plate (302) has three cylindrical interfaces (3021) on each side.

3. The quasi-zero stiffness automatically isolated magnetic levitation planar motor mover according to claim 1, wherein: The lower surface of the moving frame (1) is provided with a first rectangular slot for installing the embedded PCB coil module (2) and a second rectangular slot for installing the moving winding coil module (3).

4. The quasi-zero stiffness automatically isolated magnetic levitation planar motor mover of claim 1, wherein: The gap between the embedded PCB coil module (2) and the movable winding coil module (3) is 1.5 mm.

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