Fully automatic loading and unloading system and method applicable to LPCVD equipment

Abstract

The present application provides a fully automatic loading and unloading system and method applicable to an LPCVD device. The fully automatic loading and unloading system includes a robot activity area and an operation area independent of the robot activity area, wherein there are an LPCVD device, an LPCVD loading and unloading area adjacent to the LPCVD device, a composite robot, and a loading table. The composite robot is configured to move in the robot activity area and includes a follow-up tooling loaded with a flower basket, a robotic arm suitable for extension, and a clamping device located at the end of the robotic arm. The loading table includes one or more sample piece bins, each sample piece bin being suitable for storing a flower basket to be processed or a processed flower basket, and the composite robot is suitable for transferring the flower basket to be processed from the sample piece bin to the follow-up tooling of the composite robot or transferring the processed flower basket from the follow-up tooling to the sample piece bin in response to a loading and unloading instruction. The present application can automatically perform the operation of picking and placing the flower basket, improving the loading and unloading efficiency and safety of the LPCVD device.

Description

Technical Field

[0001] This application mainly relates to the field of LPCVD equipment, and particularly to a fully automatic loading and unloading system and method applicable to LPCVD equipment. Background Art

[0002] Low-pressure chemical vapor deposition (LPCVD) coating equipment is a common equipment in semiconductor processes. When using this type of equipment, usually personnel need to place the wafer sample carrier basket on the equipment loading paddle, and the equipment loading paddle automatically transports it inside the equipment. The equipment is as high as 3.2 meters, and personnel need to climb a ladder or step ladder to complete the loading process. After completing the high-temperature (up to 1000 °C) process, the loading paddle is transported back to its original position. Personnel must judge by themselves that the temperature of the carrier basket is low enough, or wear protective gloves to take out the replacement carrier basket to complete the unloading process. According to the LPCVD process requirements, when placing the sample boat, two dummy carrier baskets filled with wafers need to be placed at both ends of the sample boat to ensure the process stability of the wafers coated on the sample boat. Therefore, when taking and placing the sample carrier basket, manual operations are required for both the sample carrier basket and the dummy carrier basket. In order to implement such a traditional operation method, strict operation training is required for equipment operators to reduce personnel misoperations and ensure personnel safety. Therefore, the existing methods for taking and placing the sample carrier basket of LPCVD have many defects, and aspects such as convenience and safety need to be improved. Summary of the Invention

[0003] The technical problem to be solved by this application is to provide a fully automatic loading and unloading system and method applicable to LPCVD equipment, which can automatically perform the operations of taking and placing the carrier basket, and improve the loading and unloading efficiency and safety of LPCVD equipment.

[0004] To solve the above technical problems, the present application provides a fully automatic loading and unloading system applicable to an LPCVD device, including: a robot activity area and an operation area independent of the robot activity area. Among them, the fully automatic loading and unloading system includes: an LPCVD device and an LPCVD loading and unloading area adjacent to the LPCVD device, where the LPCVD device is at least adjacent to the robot activity area, and the LPCVD loading and unloading area is at least adjacent to the operation area; a composite robot configured to move in the robot activity area, the composite robot including a follow-up tooling loaded with a flower basket, a robotic arm suitable for extension, and a clamping device located at the end of the robotic arm; where the flower basket includes a to-be-processed flower basket and a processed flower basket, the to-be-processed flower basket is suitable for placing to-be-processed samples to be processed by the LPCVD device, and the processed flower basket is suitable for placing processed samples processed by the LPCVD device; the composite robot is suitable for clamping the to-be-processed flower basket or the processed flower basket through the clamping device, and transferring the to-be-processed flower basket from the follow-up tooling to the LPCVD device or transferring the processed flower basket from the LPCVD device to the follow-up tooling through the robotic arm; and at least one loading platform arranged in the operation area, the loading platform including one or more sample bins, each sample bin being suitable for storing the to-be-processed flower basket or the processed flower basket, and the composite robot being suitable for, in response to a loading and unloading instruction, transferring the to-be-processed flower basket from the sample bin to the follow-up tooling of the composite robot or transferring the processed flower basket from the follow-up tooling to the sample bin through the clamping device.

[0005] Optionally, the arm length of the robotic arm is not less than 1.7 m so that the flower basket can move from the follow-up tooling to a preset space height, the range of the preset space height is 50 cm to 220 cm, and the repeat positioning accuracy of the robotic arm is not greater than 0.1 mm.

[0006] Optionally, the follow-up tooling is configured to have a plurality of flower basket positions with unified standard dimensions, and the bottom of each flower basket has the same shape and size to fit the flower basket positions with unified standard dimensions.

[0007] Optionally, the clamping device includes a temperature sensor configured to sense the temperature of the flower basket to be clamped, and the clamping device is configured to perform the operations of clamping and transferring after the temperature of the flower basket is lower than a high temperature threshold.

[0008] Optionally, the clamping device further includes a camera configured to acquire an image of the flower basket to be clamped, and the full-automatic loading and unloading system is configured to analyze the image to be clamped to obtain an analysis result, where the analysis result includes the position information of the flower basket and / or the pose information of the sample to be processed or the processed sample in the flower basket, and the composite robot is configured to perform the clamping and transfer operations when the position information and / or the pose information meet the clamping conditions.

[0009] Optionally, the camera is further configured to include a visual recognition system for analyzing the image to be clamped and obtaining the analysis result.

[0010] Optionally, the clamping device further includes a motor, a first gripper and a second gripper which are opposite to each other, and the flower basket includes a first clamping portion and a second clamping portion which are opposite to each other. The first gripper and the second gripper are adapted to approach and contact the first clamping portion and the second clamping portion respectively from the outside under the control of the motor until reaching the clamping state.

[0011] Optionally, the loading table includes at least one main loading table configured to have a control system adapted to communicate with the LPCVD equipment and the composite robot, and the control system is configured to acquire and store the flower basket access information of each sample bin and provide the loading and unloading instructions to the composite robot.

[0012] Optionally, the control system is further configured to communicate with the host computer to mutually transmit the loading and unloading information. Among them, the control system is configured to allocate idle sample bins before each loading operation according to the loading and unloading information and the flower basket access information.

[0013] Optionally, the loading table includes at least one main loading table and at least one secondary loading table, where the control system is only arranged in the main loading table in the full-automatic loading and unloading system.

[0014] Optionally, the main loading table is further configured to include a scanning device, and each flower basket is configured to have an identification code, where the scanning device is adapted to scan the identification code to obtain the flower basket information of each flower basket.

[0015] Optionally, a visual recognition alarm system is further included, which is configured to monitor in real time whether there is an object other than the composite robot in the robot activity area and issue an alarm when the object appears.

[0016] On the other hand, the present application also proposes a fully automatic loading and unloading method applicable to an LPCVD device and a fully automatic loading and unloading system applicable to any embodiment of the present application. The fully automatic loading and unloading method includes the following steps: sending a signal allowing loading and a signal indicating that the paddle has reached the in-place position to the control system of the fully automatic loading and unloading system through the LPCVD device; sending a loading instruction to the composite robot through the control system, and the composite robot executes the loading operation. The loading operation includes clamping the processing basket to be processed from the sample wafer bin on the loading table through the clamping device, transferring the processing basket to the on-the-go tooling on the composite robot through the robotic arm, and continuing to transfer the processing basket to the LPCVD device; after the LPCVD device processes the sample wafer to be processed in the processing basket, sending a processing end signal and a signal indicating that the paddle has reached the in-place position to the control system through the LPCVD device; and sending an unloading instruction to the composite robot through the control system, and the composite robot executes the unloading operation. The unloading operation includes clamping the processed basket from the LPCVD through the clamping device, transferring the processed basket from the LPCVD device to the on-the-go tooling through the robotic arm, and continuing to transfer the processed basket to the sample wafer bin.

[0017] Optionally, the method further includes: when the fully automatic loading and unloading system executes the loading operation through the composite robot, sending a signal indicating loading in progress to the LPCVD device by the control system; when the LPCVD device is processing the sample wafer to be processed in the processing basket, sending a signal indicating processing in progress to the control system by the LPCVD device; and when the fully automatic loading and unloading system executes the unloading operation through the composite robot, sending a signal indicating unloading in progress to the LPCVD device by the control system.

[0018] Optionally, the method further includes waiting for receiving an artificial confirmation instruction signal through the LPCVD device before the LPCVD device starts to process the sample wafer to be processed in the processing basket. After the LPCVD device receives the artificial confirmation instruction signal, it starts to process the sample wafer to be processed.

[0019] Optionally, the method further includes delaying a predetermined time after the LPCVD device finishes processing the sample wafer to be processed in the processing basket and then sending the processing end signal and the signal indicating that the paddle has reached the in-place position to the control system.

[0020] Optionally, the method further includes obtaining device usage information in advance through a reservation system, and the device usage information is used to enable the fully automatic loading and unloading system to prepare the loading instruction.

[0021] Compared with the prior art, the present application has the following advantages: The fully automatic loading and unloading system and method for LPCVD equipment of the present application, by designing an independent robot activity area and an operation area convenient for personnel operation, realizes related operations such as high-temperature and climbing operations during the loading and unloading process through a composite robot. On the premise of ensuring that the loading and unloading process meets the requirements of experiments or manufacturing, the loading and unloading efficiency and safety of the LPCVD equipment are significantly improved. Description of the Drawings

[0022] The accompanying drawings are provided to further understand the present application. They are incorporated and constitute a part of the present application. The accompanying drawings illustrate embodiments of the present application and, together with this specification, serve to explain the principles of the present application. In the accompanying drawings:

[0023] Figure 1 is a schematic diagram of the system framework of a fully automatic loading and unloading system for LPCVD equipment according to an embodiment of the present application;

[0024] Figure 2 、 Figure 3 and Figure 4 are respectively the front view, side view and top view of the composite robot in a fully automatic loading and unloading system for LPCVD equipment according to an embodiment of the present application;

[0025] Figure 5a and Figure 5b are schematic diagrams of the structure of the main loading platform in a fully automatic loading and unloading system for LPCVD equipment according to an embodiment of the present application;

[0026] Figure 6a and Figure 6b are schematic diagrams of the structure of the upper loading platform from a fully automatic loading and unloading system for LPCVD equipment according to an embodiment of the present application;

[0027] Figure 7 and Figure 8 are respectively schematic diagrams of two states of the clamping device of the composite robot in a fully automatic loading and unloading system for LPCVD equipment, with the flower basket clamped and unclamped;

[0028] Figure 9 is a side view of the flower basket in a fully automatic loading and unloading system for LPCVD equipment according to an embodiment of the present application;

[0029] Figure 10 is a schematic flow chart of a fully automatic loading and unloading method for LPCVD equipment according to an embodiment of the present application;

[0030] Figure 11 Schematic flow chart of a fully automatic loading and unloading method for LPCVD equipment according to another embodiment of the present application;

[0031] Figure 12 It is a schematic diagram of the reservation process of the intelligent reservation system in a fully automatic loading and unloading method applicable to LPCVD equipment in another embodiment of the present application;

[0032] Figure 13 、 Figure 14 and Figure 15 are respectively schematic diagrams of the loading operation, unloading operation and LPCVD equipment related operations in a fully automatic loading and unloading method applicable to LPCVD equipment in another embodiment of the present application; and

[0033] Figures 16 - 17 are respectively schematic diagrams of the sampling process of the dummy wafer carrier in a fully automatic loading and unloading method applicable to LPCVD equipment in another embodiment of the present application. Detailed implementation manners

[0034] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the accompanying drawings required for the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some examples or embodiments of the present application. For those of ordinary skill in the art, without creative efforts, the present application can also be applied to other similar scenarios based on these drawings. Unless obvious from the language context or otherwise stated, the same reference numerals in the figures represent the same structure or operation.

[0035] As shown in the present application and the claims, unless the context clearly indicates an exception, words such as "a", "an", "one" and / or "the" are not specifically singular, but may also include plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of the clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0036] Unless otherwise specifically stated, the relative arrangements, numerical expressions and values of the components and steps described in these embodiments do not limit the scope of the present application. At the same time, it should be understood that for the convenience of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. Technologies, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the said technologies, methods and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further discussed in the subsequent drawings.

[0037] In the description of the present application, it should be understood that the orientation or positional relationship indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom", etc. is usually based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description. Without contrary explanation, these orientation words do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the protection scope of the present application; the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0038] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "upper" etc. can be used here to describe the spatial positional relationship between a device or feature shown in the figure and other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation other than the orientation described in the figure for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the corresponding explanations are made for the spatial relative descriptions used here.

[0039] In addition, it should be noted that the use of words such as "first", "second" etc. to limit components is only for the convenience of distinguishing the corresponding components. Without additional statement, the above words have no special meaning. Therefore, it should not be construed as a limitation on the protection scope of the present application. In addition, although the terms used in the present application are selected from well-known and commonly used terms, some of the terms mentioned in the specification of the present application may be selected by the applicant according to his or her judgment, and their detailed meanings are described in the relevant parts of the description herein. In addition, it is required to understand the present application not only through the actual terms used, but also through the meaning implied by each term.

[0040] It should be understood that when a component is referred to as "on another component", "connected to another component", "coupled to another component", or "in contact with another component", it can be directly on, connected to, or coupled to, or in contact with the other component, or there may be an intervening component. In contrast, when a component is referred to as "directly on another component", "directly connected to", "directly coupled to", or "directly in contact with" another component, there is no intervening component. Similarly, when a first component is referred to as "electrically contacting" or "electrically coupled to" a second component, there is an electrical path allowing current flow between the first component and the second component. The electrical path can include capacitors, coupled inductors, and / or other components allowing current flow, even without direct contact between the conductive components.

[0041] This application refers to Figure 1 A fully automatic loading and unloading system 10 applicable to an LPCVD device (hereinafter referred to as "fully automatic loading and unloading system 10") is proposed. The fully automatic loading and unloading system 10 can perform the loading and unloading operations of the susceptor automatically, improving the loading and unloading efficiency and safety of the LPCVD device.

[0042] According to Figure 1 , the fully automatic loading and unloading system 10 includes a robot activity area 101 and an operation area 102 independent of the robot activity area 101. More specifically, the robot activity area 101 is the area outlined by the dashed line shown in Figure 1 ; and outside the area outlined by the dashed line, other areas suitable for interacting with the LPCVD device or the LPCVD loading and unloading area can be understood as the operation area. Exemplarily, the operation area allows operators to enter and is used to complete the manual operations during the loading and unloading process of the LPCVD device.

[0043] Preferably in this embodiment, the fully automatic loading and unloading system 10 includes two LPCVD devices and two LPCVD loading and unloading areas respectively adjacent to the LPCVD devices. It can be seen from Figure 1 that the LPCVD device is at least adjacent to the robot activity area 101, and the LPCVD loading and unloading area is at least adjacent to the operation area 102. It should be noted that this application is not limited to the example shown in Figure 1 . The embodiment of the two LPCVD devices shown in Figure 1 preferably allows two LPCVD devices to work simultaneously, improving the overall compatibility and working ability of the system. However, in some other embodiments of this application, there may also be only one LPCVD device and the adjacent LPCVD loading and unloading area.

[0044] Continue to refer to Figure 1 , the composite robot 11 is configured to move in the robot activity area 101. More specifically, refer toFigures 2 - 4 As can be seen from the front view, side view and top view of the composite robot 11 shown respectively, the composite robot 11 includes a follow-up tooling 111 loaded with a flower basket 112, a robotic arm 113 suitable for extension, and a clamping device 114 located at the end of the robotic arm 113. Exemplarily, the composite robot 11 of the present application can be specifically implemented as a structure based on an AGV vehicle body. In some preferred embodiments, the composite robot 11 can be designed to have an explosion-proof function. For example, a protective gas is filled in the shell to separate the battery inside the composite robot 11 from the outside world, so that it can work more safely in a high-temperature scenario while ensuring heat dissipation.

[0045] Specifically, during the entire process of the operation of the full-automatic loading and unloading system 10, the flower basket 112 includes two different classifications, specifically divided into a flower basket to be processed and a processed flower basket. Among them, the flower basket to be processed is suitable for placing the sample to be processed by the LPCVD equipment, and the processed flower basket is suitable for placing the processed sample after being processed by the LPCVD equipment. When the composite robot 11 is working, it is suitable for clamping the flower basket to be processed or the processed flower basket through the clamping device 114, and transferring the flower basket to be processed from the follow-up tooling 111 to the LPCVD equipment or transferring the processed flower basket from the LPCVD equipment to the follow-up tooling 111 through the robotic arm 113. Exemplarily, for the flower basket 112 of each embodiment of the present application, in order to cooperate with the high-temperature working condition of the LPCVD equipment, quartz materials with high temperature resistance (such as greater than 1000 degrees Celsius) are usually selected. Additionally exemplarily, materials such as high-temperature-resistant tungsten, molybdenum, silicon carbide, corundum, mullite, spinel, and periclase can also be used, and the present application does not limit this.

[0046] Refer to Figure 1 , the full-automatic loading and unloading system 10 of this embodiment further includes two loading platforms, specifically the main loading platform 121 and the secondary loading platform 122. Both of the two loading platforms are arranged in the operation area 102. Further, Figure 5a , Figure 5b and Figure 6a , Figure 6b respectively show the specific structural schematic diagrams of the main loading platform 121 and the secondary loading platform 122. Refer to Figures 5a - 6b , each loading platform includes a plurality of sample bins 120, and each sample bin 120 has a plurality of flower basket limiting devices 1211, which are suitable for storing a plurality of flower baskets 112, specifically including flower baskets to be processed or processed flower baskets. The composite robot 11 is suitable for responding to the loading and unloading instruction, and transferring the flower basket to be processed from the sample bin 120 to the follow-up tooling 111 of the composite robot 11 or transferring the processed flower basket from the follow-up tooling 111 to the sample bin 120 through the clamping device 114. Taking Figure 5a and Figure 5b as an example, Figure 5a shows a schematic diagram of the front view of the main loading platform 121, Figure 5bA schematic diagram of the back view is shown. It can be seen that in the front view of the main loading table 121, each sample bin 120 is in a state where the bin door is closed; while in the back view, it can be seen that the back of each sample bin 120 is set to be open, which facilitates the gripper device 114 of the composite robot 11 to pick up and place the flower baskets at the storage positions of different sample bins. Figure 6a and Figure 6b The same understanding should be made as above.

[0047] According to Figure 5a and Figure 5b , the main loading table 121 is configured to have a control system, which can be configured in the box body 1210 of the main loading table 121, and this control system is suitable for communicating with the LPCVD equipment and the composite robot 11, for obtaining and storing the flower basket access information of each sample bin 120 and providing loading and unloading instructions to the composite robot 11. Exemplarily, this control system can be specifically implemented as devices such as PLC. In this embodiment, this control system undertakes the function of information interaction inside the fully automatic loading and unloading system 10, specifically for example, the communication between the main loading table 121 and the composite robot 11, and the communication between the main loading table 121 and the LPCVD equipment, so as to realize the complete loading and unloading operation of the LPCVD equipment. However, the present application is not limited thereto. In some other embodiments, this control system can also be used to realize external information interaction, such as some external terminals outside the LPCVD working area, and can further realize the process of intelligent reservation, so as to improve the intelligence level of the fully automatic loading and unloading system 10. This part of the content will be further introduced in detail later with reference to Figures 12 - 14 for further details.

[0048] Further preferably, the control system can also be configured to communicate with the upper computer (which can also be installed in the main loading table box body 1210) to mutually transmit the loading and unloading information. In this embodiment, Figure 5a A display 1212, a keyboard, a mouse and other input devices that match the upper computer are shown, which are convenient for personnel to directly operate on this loading table. Specifically, in such an embodiment, the control system is configured to allocate idle sample bins before each loading operation according to the loading and unloading information and the flower basket access information.

[0049] Comparative reference Figure 6a and Figure 6bIn this embodiment, the slave loading platform 122 also has multiple sample bins 120, and each sample bin 120 includes multiple basket limit devices 1211. Unlike the main loading platform 121, the slave loading platform box 1220 of the slave loading platform 122 is not equipped with the same control system and / or host computer equipment as the main loading platform box 1210, that is, the control system in this embodiment is only arranged in the main loading platform box 1210 of the main loading platform 121 in the fully automatic loading and unloading system 10. In this way, the site space where the LPCVD equipment is located can be flexibly used to arrange different types of loading platforms in different regional positions, and the number of sample bins 120 can be further expanded to improve the scalability of the fully automatic loading and unloading system 10. At the same time, the control system is only arranged in one of the selected main loading platforms 121, which can fully and reasonably utilize computing resources.

[0050] Further, the main loading platform 121 can also be configured to include a scanning device, and each flower basket 112 is configured to have an identification code (such as a flower basket QR code), and the scanning device is suitable for scanning the identification code to obtain the flower basket information of each flower basket 112. It should be noted that although the above reference Figures 5a - 6b As described in the present embodiment, there is a main loading platform 121 and a slave loading platform 122, but the present application is not limited to this. In other embodiments of the present application, all loading platforms can be adjusted to be configured as the above-mentioned slave loading platforms or main loading platforms according to actual test or production requirements, or the number of main loading platforms and slave loading platforms can be arbitrarily matched, and the present application does not impose any restrictions on this.

[0051] Further preferably, the arm length of the manipulator 113 of the composite robot 11 in this embodiment is not less than 1.7m so that the flower basket 112 can be moved from the accompanying tooling 111 to a preset space height, the preset space height ranges from 50cm to 220cm, and the repeatability of the manipulator 113 is not greater than 0.1mm. Specifically, the preset space height that the flower basket 112 needs to reach in the implementation scenario of the technical solution of the present application is usually related to the height of the working bin where the LPCVD equipment processes the samples to be processed in the flower basket 112 when working. In addition, the repeatability of the manipulator 113 refers to the difference between the two actual arrival positions of the manipulator 113 under the premise of setting the same target position twice. Exemplarily, in this embodiment, the manipulator 113 preferably adopts a six-axis manipulator. In some other embodiments, it can also be replaced by a five-axis or seven-axis manipulator, which is not limited by the present application.

[0052] Continue to refer to Figure 4 , the accompanying tool 111 is configured to have multiple basket stations, such as Figure 4 There are 4 shown, among which, Figure 4The flower basket workstations in the lower right corner inside the accompanying tooling 111 cannot be clearly shown due to the obstruction of the clamping device 114. These flower basket workstations have a unified standard size. On this basis, the bottom of each flower basket 112 has the same shape and size to fit the flower basket workstations with a unified standard size. In this way, when the composite robot 11 performs the loading or unloading operation each time, if it is necessary to move wafers of different sizes simultaneously, although the sizes of the wafers loaded in each flower basket 112 are different, due to the same shape and size of the bottom of the flower basket 112, the composite robot 11 does not need to find a specific-sized flower basket workstation correspondingly, the operation is more convenient, and at the same time, the error probability of the composite robot 11 is reduced.

[0053] Preferably, in this embodiment, Figure 7 and Figure 8 FIG. shows the schematic diagrams of the states of the clamping device 114 in a preferred embodiment of this embodiment when clamping the flower basket 112 and when not clamping the flower basket 112, respectively. Preferably, in this embodiment, the clamping device 114 includes a temperature sensor 1141, and the temperature sensor 1141 is configured to sense the temperature of the flower basket 112 to be clamped, and the clamping device 114 is configured to perform the operations of clamping and transferring after the temperature of the flower basket 112 is lower than the high temperature threshold (for example, 60 degrees Celsius). This is because if the flower basket 112 to be clamped is a processed flower basket, the temperature of the flower basket 112 is usually too high after being processed by the LPCVD equipment. At this time, based on the temperature sensing result of the temperature sensor 1141, the operations of clamping and transferring the flower basket 112 can be performed on the premise of relative safety.

[0054] Further preferably, the clamping device 114 further includes a camera 1142. According to Figure 7 It can be seen that the camera 1142 is specifically a binocular camera, which is configured to obtain the image to be clamped of the flower basket 112 to be clamped, and the full-automatic loading and unloading system 10 is further configured to analyze the image to be clamped to obtain an analysis result. Specifically, the analysis result includes the position information of the flower basket 112 and / or the pose information of the wafer to be processed or the processed wafer in the flower basket 112, and the composite robot 11 is configured to perform the operations of clamping and transferring when the position information and / or the pose information meet the clamping conditions.

[0055] Still more preferably, the camera 1142 is further configured to include a visual recognition system for parsing the image to be gripped and obtaining a parsing result. Specifically, the present application does not limit whether the camera 1142 has the ability of analysis and operation. Exemplarily, in some embodiments, the acquisition of the image to be gripped and further image processing can be performed by the control system of the fully automatic loading and unloading system 10 itself (such as the control system located in the main loading table 121). In some preferred embodiments, the camera 1142 itself is configured with a visual recognition system having computing power. In such embodiments, the parsing of the image to be gripped can be directly completed by the camera 1142 itself, thereby reducing the computing pressure on the control system. Exemplarily, such a visual recognition system can be interconnected with an external server, and the gripping image can be parsed and judged by the external server in combination with means such as an AI large model.

[0056] More specifically, referring to Figure 7 and Figure 8 , the gripping device 114 further includes a motor disposed inside the housing 1140, and a first gripper 1144 and a second gripper 1145 that are opposite in spatial position, and the flower basket includes opposite first clamping portions 1121 and second clamping portions 1122. When gripping the flower basket 112, the first gripper 1144 and the second gripper 1145 are adapted to be controlled by the motor to approach and contact the first clamping portion 1121 and the second clamping portion 1122 respectively from the outside until both between the first gripper 1144 and the first clamping portion 1121 and between the second gripper 1145 and the second clamping portion 1122 reach a clamping state. On the other hand, Figure 7 and Figure 8 also shows a flange port 1143 on the gripping device 114, and the flange port 1143 is used to fixedly connect the gripping device 114 to the end of the robotic arm 113.

[0057] Still more specifically, Figure 9 shows a side view of the flower basket 112. According to this side view, a plurality of specimens, including specimens to be processed or specimens that have been processed, are adapted to be placed in the accommodation cavity 1120 of the flower basket 112. Through the perspective of this side view, the size of the outer diameter a of the specimens it accommodates can be seen. Exemplarily, the size range of the outer diameter a is between 110 and 220 mm, and preferably, for example, a four-inch size of 114 mm, a six-inch size of 164 mm, and an eight-inch size of 214 mm. On the other hand, it is assembled with a first clamping portion 1121 and a second clamping portion 1122 on the outside for clamping with the first gripper 1144 and the second gripper 1145 respectively. Still more specifically, Figure 9 Combined with Figure 8 , Figure 8The third gripper 1146 and the fourth gripper 1147 are also shown, located on the same side of the first gripper 1144 and the second gripper 1145 respectively. During the gripping operation, the first gripper 1144, the second gripper 1145, the third gripper 1146 and the fourth gripper 1147 will open or contract simultaneously. Among them, the third gripper 1146 and the fourth gripper 1147 can support the bottoms of the first clamping portion 1121 and the second clamping portion 1122, while the first gripper 1144 and the second gripper 1145 are adapted to grip the sides of the first clamping portion 1121 and the second clamping portion 1122. In this way, the reliability and stability of the gripping operation can be further ensured, and it is ensured that the flower basket 112 will not fall off.

[0058] In some other variant embodiments of the present application based on the full-automatic loading and unloading system 10, the full-automatic loading and unloading system 10 can further be configured to include a vision recognition alarm system. The vision recognition alarm system is configured to monitor in real time whether there are objects other than the composite robot 11 in the robot activity area 101, and issue an alarm when an object appears. In this way, the safety of the full-automatic loading and unloading system 10 can be further improved.

[0059] Another aspect of the present application refers to Figure 10 A full-automatic loading and unloading method 20 applicable to an LPCVD device (hereinafter referred to as "the full-automatic loading and unloading method 20") is proposed, which is applicable to the full-automatic loading and unloading system proposed in any embodiment of the present application. In the present application, Figures 10 - 17 Flowcharts are used to illustrate the operations performed by the systems according to the embodiments of the present application. It should be understood that the operations before or below do not necessarily have to be performed precisely in order. On the contrary, various steps can be performed in reverse order or simultaneously. At the same time, or other operations can be added to these processes, or one or several operations can be removed from these processes.

[0060] According to Figure 10, the full-automatic loading and unloading method 20 includes the following steps. Step 21 is to send a signal allowing loading and a signal indicating that the paddle has extended in place to the control system of the full-automatic loading and unloading system through the LPCVD equipment. Step 22 is to send a loading instruction to the composite robot through the control system, and the composite robot performs the loading operation. The loading operation includes clamping the processing basket to be processed from the sample wafer bin of the loading table through the clamping device, transferring the processing basket to the in-process tooling on the composite robot through the robotic arm, and continuing to transfer the processing basket to the LPCVD equipment. Step 23 is to send a signal indicating the end of processing and a signal indicating that the paddle has extended in place to the control system through the LPCVD equipment after the LPCVD equipment processes the sample wafers in the processing basket to be processed. Step 24 is to send a unloading instruction to the composite robot through the control system, and the composite robot performs the unloading operation. The unloading operation includes clamping the processed basket from the LPCVD through the clamping device, transferring the processed basket from the LPCVD equipment to the in-process tooling through the robotic arm, and continuing to transfer the processed basket to the sample wafer bin.

[0061] Further specifically, Figure 11 shows a preferred specific embodiment of the full-automatic loading and unloading method 20 based on Figure 10 shown. In this embodiment, the interaction between the control system (such as PLC) of the main loading table and the LPCVD equipment reflects a preferred implementation scheme of the full-automatic loading and unloading method 20 based on Figure 10 shown. According to Figure 11 , when the full-automatic loading and unloading method 20 is specifically implemented, it may further include the following steps: when the full-automatic loading and unloading system performs the loading operation through the composite robot, the control system of the full-automatic loading and unloading system sends a signal indicating loading in progress to the LPCVD equipment; when the LPCVD equipment is processing the sample wafers in the processing basket to be processed, the LPCVD equipment sends a signal indicating processing in progress to the control system; and when the full-automatic loading and unloading system performs the unloading operation through the composite robot, the control system sends a signal indicating unloading in progress to the LPCVD equipment.

[0062] Further preferably, according to Figure 11, before the LPCVD device starts to process the samples to be processed in the basket to be processed, the LPCVD device waits to receive the manual confirmation command signal. When the LPCVD device receives the manual confirmation command signal, it starts to process the samples to be processed. That is, when the fully automatic loading and unloading system sends a loading end signal, the "Confirm" button pops up on the LPCVD device. At this time, the loading is manually observed to see if it is normal. When the "Confirm" button is clicked, it means that the LPCVD device has received the manual confirmation command signal. At this time, the processing operation is started again, thereby achieving the dual guarantee of machine automation and manual confirmation. Further preferably, the signal flow of LPCVD also includes the communication process of "when loading fails, the state can be switched, manual loading, confirmation". This step is applicable to situations where loading fails, such as when the loading end signal has not been received for a long time. At this time, the process can also be changed to manual loading, thereby improving the fluency of the loading and unloading process.

[0063] according to Figure 11 In this embodiment, preferably, after the LPCVD device completes processing of the samples in the basket, it sends a processing end signal and a paddle extension signal to the control system after a predetermined delay. Figure 11 In the subsequent signal flow of the processing signal, after the LPCVD completes the processing of the sample to be processed, it waits for a period of cooling time and then sends a delayed processing end signal. This is because the high temperature operation of the LPCVD equipment causes the temperature of the processed flower basket to be too high. As mentioned above, Figure 1 In the fully automatic loading and unloading system 10 shown, Figure 7 and Figure 8 As shown, the clamping device 114 can preferably be equipped with a temperature sensor 1141, and the clamping and transfer operations are performed after the temperature of the flower basket 112 to be clamped meets the operable requirements. In conjunction with this structural feature, the LPCVD equipment in this embodiment is configured to delay the issuance of a processing end signal, which can further shorten the waiting time of the clamping device 114 and improve the overall loading and unloading process rate.

[0064] on the other hand, Figure 1 It is also shown that the LPCVD device continuously sends device status signals to the control system. For example, the device status signals may specifically include heartbeat signals, paddle retracted signals, and paddle extended signals. After these signals are received by the control system, it continuously confirms that the LPCVD is in a working power-on state, so that the fully automatic loading and unloading system can carry out specific loading and unloading process operations.

[0065] Further preferably, as mentioned above, the control system located in the main loading platform can not only realize intra-system communication, but also external communication, thereby realizing expanded intelligent functions. Figures 11 - 17An embodiment is shown. In this embodiment, before the full-automatic loading and unloading system of the present application starts working, it can receive signals from an intelligent reservation system outside the system, so that operators can remotely prepare the loading and unloading work of the LPCVD equipment.

[0066] First, refer to Figure 12 , Figure 12 which shows the reservation process of the operator through the intelligent reservation system. Specifically, the operator can remotely input relevant application information through the intelligent reservation system and determine the equipment usage information according to the application conditions. The equipment usage information can include, for example, the sample preparation process and the selected equipment (especially in the case where the system shown in Figure 1 contains two or more LPCVD equipment). Since the equipment usage information is related to the working target and process of the upcoming LPCVD equipment, this equipment usage information is used to enable the full-automatic loading and unloading system to further prepare the loading instruction.

[0067] After completing the reservation in the manner of Figure 12 , referring to Figure 13 , the operator and the intelligent reservation system cooperate with the specific communication between the upper computer and the control system located in the main loading platform as described above, and relevant operations during the loading process can be realized. Figure 13 Details of the communication flow between the upper computer and the control system of the main loading platform are shown. As described above, the control system in the main loading platform is used for the interaction inside and outside the system, and further configuring an upper computer in the main loading platform can help the operator operate more conveniently on the main loading platform in the operation area. Preferably, the upper computer is simultaneously configured with input devices such as a display, a keyboard and a mouse, and a barcode scanning device, etc. The operator can cooperate with the corresponding display of the upper computer to obtain the "equipment usage information" displayed thereon. The equipment usage information can be, for example, the "equipment usage information" determined by the intelligent reservation system according to the application conditions in the reservation process shown in Figure 12 . Further specifically, information related to the "storage location" is also suitable for interaction between the upper computer and the control system. In this embodiment, the "storage location" can be understood as a sample storage bin for allocation. Among multiple sample storage bins, some are occupied by flower baskets, while others are in an idle state. When performing the loading operation, the control system is suitable for first obtaining the information of the idle storage location to the upper computer, and the upper computer prompts the corresponding loading storage location to the operator through the display screen, so that the operator can know the sample storage bin where the flower basket is suitable to be placed, thereby completing the loading operation on the operator's side. Further intelligently, in some preferred embodiments of the present application, the sample storage bin is configured to automatically open the door, that is, after the control system confirms the storage location information and the upper computer displays the loading storage location through the display screen, the door of the corresponding sample storage bin directly opens, thus simplifying the loading process.

[0068] Similarly,Figure 14 shows the related operations of the blanking process. Corresponding to Figure 13 the process, the operator can still operate through the main loading table, so as to take out the processed flower basket and the processed wafers therein from the corresponding wafer bins according to the blanking bin location information fed back by the display screen of the host computer. Further specifically, Figure 15 shows the whole process of the LPCVD equipment processing the flower basket to be processed that has completed loading, in which the clamping and moving operations of the flower basket by the composite robot need to be coordinated. Specific information can be understood in combination with Figure 15 the flowchart information and the previous description, which will not be elaborated here.

[0069] On the other hand, in the technical solution working condition of the present application, the wafers processed by the LPCVD equipment can be further divided into two categories. One category is the main processing object in the test or processing working condition, that is, the processing wafers, and the other category is to improve the processing effect of the processing wafers. In some cases, it is also necessary to place the companion wafers near the reprocessed wafers. Figures 16 - 17 Further shows the loading and unloading process of the companion wafers. Such an embodiment can be understood as a preferred embodiment based on the fully automatic loading and unloading method 20 as shown in Figure 10 . In such a case, Figure 10 the flower basket to be processed in step 22 shown can include a wafer flower basket and a companion wafer flower basket. Among them, the wafer flower basket has the wafers to be processed, and the companion wafer flower basket has the companion wafers. The companion wafers are placed in the companion wafer bin and do not need to be placed by the experimenter. When the loading and unloading system is loading, two companion wafer flower baskets in the companion wafer bin are automatically allocated, and the robot places the companion wafer flower baskets at both ends of the LPCVD paddle according to the loading operation actions. The details of the specific process can be referred to Figure 16 shown. Further, referring to Figure 17 , when the LPCVD equipment completes the relevant process, the control system automatically allocates the companion wafer bin location, and the robot places the companion wafer flower basket at the companion wafer bin location. And record information such as the usage time of the companion wafer flower basket obtained through communication. When the process reaches certain conditions (for example, after 100 processes or 1000 processes, that is, Figure 17 the judgment step of the companion wafer usage time >= the material change time prompted by the system) will remind the equipment maintenance personnel to replace the companion wafers of the companion wafer boat.

[0070] Generally speaking, the loading and unloading process of the companion wafer basket is similar to that of the sample wafer basket. The operation of loading and unloading the companion wafers is performed in the companion wafer library on the loading table, and is uniformly controlled and managed by the control system of the main loading table. According to the above process, the companion wafers do not need to be placed by the experimenters, but are conventionally placed on the loading table for the robot to schedule. Only when the companion wafers become dirty after multiple coating processes, they need to be replaced. The process time or process times of the companion wafers can be recorded, and the judgment logic is given manually to determine whether a new wafer needs to be replaced in the companion wafer boat. If replacement is required, the system will prompt the equipment management personnel to replace the companion wafers.

[0071] To better understand the technical solution of the present application, the complete sample placing process and sample taking process using the above full-automatic loading and unloading system or method will be briefly described systematically below.

[0072] Lofting process (loading process): 1. The operator completes the reservation of the LPCVD equipment in the intelligent reservation system (external system), and inputs the wafer size of the sample wafer, the number of wafer samples, and the thin film to be deposited (usually material information) into the system. This information is transmitted to the fully automatic loading and unloading system for sample loading through the network interface. 2. The operator operates on the machine and logs in personal information in the control systems of the LPCVD equipment and the fully automatic loading and unloading system (such as through the host computer). At this time, the fully automatic loading and unloading system will read the reservation information of the logged-in personnel and automatically identify information such as the sample size and quantity. 3. Personnel lofting: The operator on the machine adjusts the LPCVD equipment to the state ready for lofting and sends a signal to the control system of the fully automatic loading and unloading system (such as the internal PLC of the main loading platform). The control system automatically allocates the carrier positions (warehouse location information) according to the read number of sample wafers and the type information of the thin film to be deposited, and displays the positions where the sample carriers are to be placed on the screen. The operator places the carrier with wafers on the carrier limiting device (such as a card slot) at the position according to the screen prompt. The carrier limiting device has an automatic in-position judgment function, which will automatically determine whether the carrier is placed in the appropriate position and display on the display screen whether the sample lofting is completed. After the lofting is completed, the lofting position of the second carrier will be prompted, and the personnel repeat the lofting process until all sample carriers are placed properly. 4. The sample wafers are automatically placed on the accompanying tooling of the composite robot (such as an AGV vehicle). After all the carrier placement work is completed, the composite robot drives the sample carrier fixture to clamp the sample carrier, and uses the robotic arm to place all the to-be-processed carriers to be lofted on the accompanying tooling of the AGV vehicle. The AGV vehicle body drives the entire composite robot to move to the corresponding LPCVD equipment. The six-axis robotic arm drives the sample carrier clamping tool to pick up the carrier on the accompanying tooling and automatically transfer it to the sample paddle of the corresponding LPCVD equipment. The system will allocate the corresponding positions on the sample paddle according to the number of sample carriers to ensure that the central symmetry points of multiple sample carriers are in the center of the sample paddle. 5. Place the dummy wafer carrier. After the sample carrier is placed, the system drives the composite robot to move to the loading platform, clamps two dummy wafer carriers and places them on the accompanying tooling, and records in the control system that the number of times the dummy wafer carrier has passed through the process is increased by 1, or records the process time (the dummy wafer carrier corresponds to the dummy wafer warehouse location one by one). Subsequently, the dummy wafer carriers are placed at both ends of the sample carrier to complete the lofting process. After this process is completed, the system sends a signal indicating the completion of lofting to the LPCVD equipment, and the composite robot returns to the standby state, waiting for the next lofting task or sampling task.

[0073] Sampling process (blanking process): 1. After the LPCVD equipment process is completed, a signal indicating that sampling is possible is sent to the control system of the fully automatic loading and unloading system. The composite robot moves to the sampling position of the corresponding LPCVD equipment; 2. Detect the temperature of the wafer cassette. According to the wafer cassette position information saved during sample placement (the position information on the sample paddle), the six-axis robotic arm drives the sample clamping device to move near the sample boat. The infrared temperature sensor is used to sense the temperature of each sample and the sample boat one by one, and the binocular camera takes pictures of the wafer cassettes on the sample paddle one by one. The position information of the wafer cassette is confirmed through the visual recognition system to ensure the correct position information of the wafer cassette during clamping. 3. Clamp the sample boat. When the infrared temperature sensor senses that the temperature of the sample boat is less than 60°C, the sample clamping device clamps the wafer cassettes one by one and places them on the fixture of the composite robot. 4. Return the sample boat to the main loading station. The system assigns the original loading station to the sample boat according to the wafer cassette station during loading. The system determines whether there is a sample boat at the original wafer cassette placement station. If there is no sample boat at the placement station, the composite robot places the wafer cassette at the corresponding station, displays the sampling personnel information of this station on the system screen, and displays this station as the "sampling available" state. If there is a sample boat (i.e., the wafer cassette) at the placement station, the system sends a signal to the reservation system according to the reservation information, and the reservation system sends a text message to notify the experimenter of this sample boat to retrieve the sample boat. Repeat this step of returning the sample boat until all the sample boats on the fixture have been placed on the main loading station. 5. Personnel sampling. The operator confirms that the wafer cassette at the station is the sample of the operator himself according to the prompt information on the system screen, and after the station status changes to sampling available, the operator opens the door of the station, takes out the wafer cassette, and the system sets this station as an empty station with the personnel information cleared. 6. Return the dummy wafer boat. After completing the step of returning the sample boat, the composite robot moves to the LPCVD sample paddle, identifies the position information of the dummy wafer boat, and corrects the clamping position. Then the dummy wafer boat is clamped out and placed on the fixture. Subsequently, the AGV vehicle drives the composite robot to move to the secondary loading station and places the dummy wafer boat at the corresponding dummy wafer storage location on the secondary loading station. 7. After completing the sampling process, the composite robot returns to its original position and waits for the next sample placement task or sampling task.

[0074] The basic concepts have been described above. Obviously, for those skilled in the art, the above application disclosure is only an example and does not constitute a limitation to this application. Although not explicitly stated here, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are proposed in this application, so such modifications, improvements, and corrections still fall within the spirit and scope of the exemplary embodiments of this application.

[0075] Meanwhile, this application uses specific terms to describe the embodiments of this application. For example, "an embodiment", "one embodiment", and / or "some embodiments" mean a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that "an embodiment" or "one embodiment" or "an alternative embodiment" mentioned twice or more at different positions in this specification does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be appropriately combined.

[0076] Some aspects of this application can be executed entirely by hardware, entirely by software (including firmware, resident software, microcode, etc.), or by a combination of hardware and software. The above-mentioned hardware or software can all be referred to as "data blocks", "modules", "engines", "units", "components", or "systems". The processor can be one or more application-specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DAPDs), programmable logic devices (PLDs), field-programmable gate arrays (FPGAs), processors, controllers, microcontrollers, microprocessors, or combinations thereof. In addition, aspects of this application may be embodied as a computer product located in one or more computer-readable media, which includes computer-readable program code. For example, computer-readable media may include, but are not limited to, magnetic storage devices (such as hard disks, floppy disks, magnetic tapes...), optical disks (such as compact disks CD, digital versatile disks DVD...), smart cards, and flash memory devices (such as cards, sticks, key drives...).

[0077] The computer-readable medium may contain a propagated data signal containing computer program code, such as on a baseband or as part of a carrier wave. This propagated signal may have various forms of manifestation, including electromagnetic form, optical form, etc., or a suitable combination of forms. The computer-readable medium can be any computer-readable medium other than a computer-readable storage medium, which can be connected to an instruction execution system, apparatus, or device to implement communication, propagation, or transmission for use of the program. The program code located on the computer-readable medium can be propagated through any suitable medium, including radio, cable, fiber optic cable, radio frequency signal, or similar media, or any combination of the above media.

[0078] Similarly, it should be noted that, in order to simplify the description of this application disclosure and thus help the understanding of one or more application embodiments, in the previous description of the embodiments of this application, sometimes multiple features are merged into one embodiment, drawing, or description thereof. However, this disclosure method does not mean that the features required by the subject matter of this application are more than those mentioned in the claims. In fact, the features of the embodiment are less than all the features of the single embodiment disclosed above.

[0079] In some embodiments, numbers are used to describe components and the quantity of attributes. It should be understood that such numbers used in the description of embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise specified, "about", "approximately" or "substantially" indicate that the said numbers allow a variation of ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may vary according to the characteristics required by individual embodiments. In some embodiments, the numerical parameters should consider the specified significant digits and adopt the method of retaining the general number of digits. Although the numerical ranges and parameters used to confirm the breadth of the scope in some embodiments of the present application are approximate values, in specific embodiments, such numerical settings are as precise as possible within the feasible range.

[0080] Although the present application has been described with reference to the current specific embodiments, those of ordinary skill in the art should recognize that the above embodiments are only used to illustrate the present application, and various equivalent changes or substitutions can be made without departing from the spirit of the present application. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the spirit of the present application, they will fall within the scope of the claims of the present application.

Claims

1. A fully automatic loading and unloading system suitable for LPCVD equipment, characterized in that: include: The robot activity area and the operation area independent of the robot activity area, wherein the fully automatic loading and unloading system comprises: An LPCVD device and an LPCVD loading and unloading area adjacent to the LPCVD device, wherein the LPCVD device is at least adjacent to the robot activity area, and the LPCVD loading and unloading area is at least adjacent to the operation area; A composite robot, configured to move in the robot activity area, the composite robot comprising a portable tooling loaded with a flower basket, a mechanical arm suitable for extension, and a clamping device located at the end of the mechanical arm; wherein the flower basket comprises a to-be-processed flower basket and a processed flower basket, the to-be-processed flower basket is suitable for placing the to-be-processed sample to be processed by the LPCVD device, and the processed flower basket is suitable for placing the processed sample processed by the LPCVD device; the composite robot is suitable for clamping the to-be-processed flower basket or the processed flower basket through the clamping device, and transferring the to-be-processed flower basket from the portable tooling to the LPCVD device, or transferring the processed flower basket from the LPCVD device to the portable tooling through the mechanical arm; the clamping device comprises a temperature sensor, the temperature sensor is configured to sense the flower basket temperature of the to-be-processed flower basket, and the clamping device is configured to perform the clamping and transfer operations when the flower basket temperature is lower than a high temperature threshold; and At least one loading platform is arranged in the operating area, and the loading platform includes one or more sample bins, each of which is suitable for storing the flower basket to be processed or the processed flower basket, and the compound robot is suitable for responding to loading and unloading instructions, transferring the flower basket to be processed from the sample bin to the accompanying tooling of the compound robot through the clamping device, or transferring the processed flower basket from the accompanying tooling to the sample bin.

2. The fully automatic loading and unloading system according to claim 1, characterized in that: The arm length of the robotic arm is not less than 1.7m so that the flower basket can be moved from the accompanying tooling to a preset space height, the preset space height ranges from 50cm to 220cm, and the repeatability of the robotic arm is not greater than 0.1mm.

3. The fully automatic loading and unloading system according to claim 1, characterized in that: The portable tooling is configured to have a plurality of flower basket stations, and the plurality of flower basket stations have a uniform standard size, wherein the bottom of each flower basket has the same shape and size to fit the flower basket stations with the uniform standard size.

4. The fully automatic loading and unloading system according to claim 1, characterized in that: The clamping device also includes a camera, which is configured to obtain an image of the flower basket to be clamped. The fully automatic loading and unloading system is configured to parse the image to be clamped to obtain a parsing result, and the parsing result includes position information of the flower basket and / or posture information of the samples to be processed or the processed samples in the flower basket. The composite robot is configured to perform the clamping and transfer operations when the position information and / or the posture information meet the conditions for clamping.

5. The fully automatic loading and unloading system according to claim 4, characterized in that: The camera is further configured to include a visual recognition system, and the visual recognition system is used to analyze the image to be clamped and obtain the analysis result.

6. The fully automatic loading and unloading system according to any one of claims 1, 4 and 5, characterized in that: The clamping device also includes a motor, a first gripper and a second gripper relative to each other, and the flower basket includes a first clamping portion and a second clamping portion relative to each other, and the first gripper and the second gripper are suitable for approaching and contacting the first clamping portion and the second clamping portion from the outside respectively under the control of the motor until reaching a clamping state.

7. The fully automatic loading and unloading system according to claim 1, characterized in that: The loading platform includes at least one main loading platform, and the main loading platform is configured to have a control system. The control system is suitable for communicating with the LPCVD equipment and the composite robot, and the control system is configured to obtain and store the basket access information of each sample bin and provide the loading and unloading instructions to the composite robot.

8. The fully automatic loading and unloading system according to claim 7, characterized in that: The control system is also configured to communicate with the host computer to transmit loading and unloading information to each other, wherein the control system is configured to allocate an idle sample bin before each loading operation according to the loading and unloading information and the basket access information.

9. The fully automatic loading and unloading system according to claim 7, characterized in that: The loading platform includes at least one main loading platform and at least one secondary loading platform, wherein the control system is only arranged in the main loading platform in the fully automatic loading and unloading system.

10. The fully automatic loading and unloading system according to claim 7, characterized in that: The main loading platform is further configured to include a scanning device, and each of the flower baskets is configured to have an identification code, wherein the scanning device is suitable for scanning the identification code to obtain the flower basket information of each of the flower baskets.

11. The fully automatic loading and unloading system according to claim 1, characterized in that: It also includes a visual recognition alarm system, which is configured to monitor in real time whether a target object other than the composite robot appears in the robot activity area, and to issue an alarm when the target object appears.

12. A fully automatic loading and unloading method suitable for LPCVD equipment, characterized in that: The fully automatic loading and unloading method is applicable to the fully automatic loading and unloading system according to any one of claims 1 to 11, and the fully automatic loading and unloading method comprises the following steps: Send a signal allowing loading and a signal for the paddle to be extended to the control system of the fully automatic loading and unloading system through the LPCVD equipment; The control system sends a loading instruction to the composite robot, and the composite robot performs a loading operation, wherein the loading operation includes clamping a flower basket to be processed from a sample bin on a loading platform by a clamping device, transferring the flower basket to be processed from the sample bin to an accompanying tooling on the composite robot by a mechanical arm, and continuing to transfer the flower basket to be processed to the LPCVD device; After the LPCVD device processes the samples to be processed in the flower basket to be processed, the LPCVD device sends a processing end signal and a paddle extension position signal to the control system; as well as The control system sends a material unloading instruction to the composite robot, and the composite robot performs a material unloading operation, wherein the material unloading operation includes clamping the processed flower basket from the LPCVD device through the clamping device, transferring the processed flower basket from the LPCVD equipment to the accompanying tooling through the robotic arm, and continuing to transfer the processed flower basket to the sample bin.

13. The fully automatic loading and unloading method according to claim 12, characterized in that: Also includes: When the fully automatic loading and unloading system performs the loading operation through the composite robot, the control system sends a loading signal to the LPCVD device; When the LPCVD device is processing the samples to be processed in the basket to be processed, the LPCVD device sends a processing signal to the control system; as well as When the fully automatic loading and unloading system performs the unloading operation through the composite robot, the control system sends a unloading signal to the LPCVD equipment.

14. The fully automatic loading and unloading method according to claim 12, characterized in that: It also includes waiting for receiving a manual confirmation command signal through the LPCVD device before the LPCVD device starts processing the samples to be processed in the flower basket to be processed, and starting to process the samples to be processed after the LPCVD device receives the manual confirmation command signal.

15. The fully automatic loading and unloading method according to claim 12, characterized in that: It also includes sending the processing end signal and the paddle extension position signal to the control system after the LPCVD equipment completes processing the samples to be processed in the flower basket to be processed and delays for a predetermined time.

16. The fully automatic loading and unloading method according to any one of claims 12 to 15, characterized in that: It also includes obtaining equipment usage information through a reservation system in advance, and the equipment usage information is used to enable the fully automatic loading and unloading system to prepare the loading instructions.

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