An environmental force driven composite material MEMS safety device

Abstract

The application discloses an environmental force driven composite material MEMS safety and arming device, which comprises a silicon-based functional layer, a metal-based slider layer and upper and lower cover plates; the silicon-based functional layer comprises a silicon-based part of a blast-proof slider, a silicon-based frame, an instruction lock safety mechanism and a recoil safety mechanism, and the slider layer comprises a metal-based frame, a metal-based part of the blast-proof slider and a locking mechanism; the silicon-based functional layer and the metal-based slider layer are connected together through the blast-proof slider and the frame by means of adhesion or bonding; the instruction lock safety mechanism mainly comprises a U-shaped electric heating driver and a bayonet lock; the recoil safety mechanism mainly comprises a spring mass system with Z-shaped teeth; the blast-proof slider is composed of two layers and is provided with a blast hole and an air slot for adjusting the mass center position, and two clamping grooves for interacting with the safety mechanism are formed in the blast-proof slider; and the locking mechanism mainly comprises a locking beam and a lock head on the blast-proof slider. The overall reliability and safety of the silicon-based MEMS fuze safety and arming device are improved.

Description

Technical Field

[0001] The invention belongs to the field of micro-mechanical electronics, and in particular to a composite material MEMS decomposition device driven by environmental forces. Background Art

[0002] With the continuous development of modern warfare, micro-electromechanical systems (MEMS) technology, a rapidly developing high-tech in recent years, has played a significant role in the development of miniaturized, integrated, and intelligent fuzes in the defense sector. While current mechanical fuzes offer the advantage of high reliability, the increasing demand for fuze miniaturization has made it difficult for traditional release mechanisms, a key component of fuzes, to meet the demand for smaller fuzes. MEMS release mechanisms are a key development direction for the miniaturization and intelligentization of future fuzes.

[0003] Current MEMS safety devices are primarily categorized as silicon-based and non-silicon MEMS. Silicon-based MEMS safety devices, primarily manufactured using DRIE and SOI processes and integrated with microelectronics through processes like doping, are a key development direction for future MEMS safety devices due to their high level of integration and suitability for large-scale production. However, current silicon-based MEMS safety devices suffer from poor flameproof reliability and insufficient high overload resistance. In 2010, Pezous et al. proposed a MEMS safety device in "Integration of a MEMS-based safe arm and fire device." This device consists of a multi-layer structure, each containing a different functional unit. The top layer is the circuit logic layer, the middle layer is the silicon-based safety initiator, and the bottom layer is the mechanical safety layer. However, its large size after packaging prevents it from meeting the current requirements for fuze miniaturization. In 2018, Lou Wenzhong et al. designed a silicon-based MEMS release mechanism in their paper "Explosion Suppression Mechanism Characteristics of MEMS S&A Device With In-Situ Synthetic Primer." This device uses a "dogbone beam" acceleration threshold determination mechanism as the environmental force sensing mechanism. It primarily includes an explosion-proof slider, a slider limiter, and a slider buffer. This structure offers advantages such as small size, low power consumption, and good sample consistency. It also possesses strong ballistic environmental sensing capabilities and highly reliable safety and release control systems. However, this type of MEMS release mechanism has a high centrifugal threshold, making it unsuitable for use with large-caliber ammunition. In 2017, Hu Tengjiang and others designed, manufactured and tested a new MEMS fuze in Integration design of MEMS electro-thermal safety-and-arming devices. The middle layer of the MEMS fuze uses a silicon-based MEMS safety and arming device. The silicon-based MEMS safety and arming device consists of four V-shaped electrothermal actuators and a microbeam with a slider. The principle is to use the electrothermal actuator to move the slider structure in the explosion transmission path, thereby realizing the conversion between the safe state and the ready state of the fuze. However, the explosion-proof slider with a silicon-based structure cannot guarantee the explosion-proof reliability of the MEMS safety and arming device.In 2019, Hu Tengjiang et al. improved the silicon-based MEMS release device driven by the electrothermal actuator in The Research on MEMS S&A Device with Metal-Silicon Composite Structure. The new silicon-based MEMS release device uses a slider made of silicon-metal composite material, which greatly enhances the explosion-proof reliability of the MEMS release device. However, the release environment of the MEMS release device is single, which does not meet the requirements of the "Fuze Safety Design Guidelines", and its metal layer has a single function and only plays a protective role. Summary of the Invention

[0004] The object of the present invention is to provide a MEMS safety device of composite materials driven by environmental forces, so as to improve the reliability and safety of the fuze safety system.

[0005] The technical solutions for achieving the purpose of the present invention are:

[0006] A composite material fuze MEMS device driven by environmental force, comprising an upper cover plate, a silicon-based functional layer, a metal-based slider layer, and a lower cover plate arranged in sequence;

[0007] The upper cover plate is provided with an upper blasting hole, and the lower cover plate is provided with a lower blasting hole, and the upper blasting hole and the lower blasting hole are arranged in alignment;

[0008] The silicon-based functional layer is provided with a silicon-based explosion-proof slider, a recoil safety mechanism and a command lock safety mechanism;

[0009] The metal-based slider layer is provided with a metal-based flameproof slider and a locking beam; the metal-based flameproof slider and the locking beam together constitute a centrifugal locking mechanism;

[0010] The silicon-based explosion-proof slider and the metal-based explosion-proof slider are connected to form an explosion-proof slider; the explosion-proof slider is provided with an explosion-transmitting hole;

[0011] The recoil safety mechanism, as the first line of defense of the safety device, can move in a direction parallel to the elastic axis and separate from the explosion-proof slider to release the first line of defense. A blocking structure is provided between the silicon-based explosion-proof slider and the silicon-based functional layer to prevent the recoil safety mechanism from operating in the service state.

[0012] The command lock safety mechanism, as the second safety of the safety and release device, limits the explosion-proof slider when the first safety is released and the explosion-proof slider is moved by centrifugal force; the second safety of the explosion-proof slider is released under the action of the release signal;

[0013] The explosion-proof slider continues to move under the action of centrifugal force and contacts the locking beam. The locking beam aligns the explosion-proof slider and limits the speed, finally completing the locking of the explosion-proof slider, aligning the explosion-transmission hole with the upper and lower explosion-transmission holes, and completing the release.

[0014] Compared with the prior art, the present invention has the following significant advantages:

[0015] (1) The present invention increases the safety and reliability of the MEMS security device by adopting a silicon-metal composite structure and driving it by environmental forces. The functions of the silicon-based layer and the metal layer are organically combined. The silicon-based functional layer can reliably and accurately ensure the safety of the MEMS security device. The metal slider layer not only senses the external environmental force but also increases the high overload resistance and explosion-proof performance of the MEMS security device. The miniaturization level and intelligent level of the existing MEMS security device are greatly improved.

[0016] (2) The present invention improves the safety and reliability of the MEMS deactivation device by collecting multiple signals during ammunition launch and flight, and utilizing the strict timing relationship between multiple fuses. During the deactivation process, multiple signals are sensed and identified by the organically combined silicon-based functional layer and metal slider layer.

[0017] (3) The silicon-based recoil safety mechanism of the present invention adopts a new type of curved Z-shaped tooth threshold recognition mechanism, which improves the structure's ability to resist high overloads while increasing the structure's threshold recognition ability.

[0018] (4) The present invention adopts a silicon-based U-shaped electrothermal driver as a command lock safety mechanism. Compared with the traditional command lock safety mechanism, it not only improves the level of structural integration, but also improves the integration capability of the structure and circuit, and greatly reduces the size of the structure after packaging.

[0019] (5) The centrifugal locking mechanism of the present invention uses friction to limit the speed and align the movement of the explosion-proof slider, which greatly improves the locking reliability and structural safety of the structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a three-dimensional model structure diagram of the composite material MEMS fuze installation device.

[0021] Figure 2 This is a front view of the initial (safe) state of the composite material MEMS fuze release device.

[0022] Figure 3 This is a view of the composite material MEMS fuze safety device in the initial (safe) state.

[0023] Figure 4 It is a schematic diagram of the upper cover plate 100 of the composite material MEMS fuze installation and solution device.

[0024] Figure 5 It is a schematic diagram of the silicon-based functional layer 200 of the composite material MEMS fuse installation device.

[0025] Figure 6 It is a schematic diagram of the metal-based slider layer 300 of the composite material MEMS fuze installation device.

[0026] Figure 7 It is a front view of the lower cover plate 400 of the composite material MEMS fuze installation device.

[0027] Figure 8 It is a bottom view of the lower cover plate 400 of the composite material MEMS fuze installation device.

[0028] Figure 9 This is a front view of the recoil safety mechanism of the composite material MEMS fuze release device.

[0029] Figure 10 This is a bottom view of the recoil safety mechanism of the composite material MEMS fuze release device.

[0030] Figure 11 This is a front view of the explosion-proof slider of the composite material MEMS fuze safety device and the safety mechanism of the command lock.

[0031] Figure 12 This is a bottom view of the explosion-proof slider of the composite material MEMS fuze safety device being locked by the command safety mechanism.

[0032] Figure 13 This is a front view of the release mechanism of the command lock of the composite material MEMS fuze release device.

[0033] Figure 14 This is a bottom view of the release mechanism of the command lock of the composite material MEMS fuze release device.

[0034] Figure 15 This is a front view of the composite material MEMS fuze safety and release device in the released state.

[0035] Figure 16 This is a top view of the composite material MEMS fuze safety and release device in the released state. DETAILED DESCRIPTION

[0036] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0037] Reference Figures 1-16 The composite material MEMS fuse installation device driven by environmental forces in this embodiment is composed, in order, of an upper cover plate 100, a silicon-based functional layer 200, a metal-based slider layer 300, and a lower cover plate 400. The upper cover plate 100, silicon-based functional layer 200, metal-based slider layer 300, and lower cover plate 400 are bonded together to form the composite material MEMS fuse installation device.

[0038] The upper cover plate 100 is provided with an upper blast hole 101; the lower cover plate 400 is provided with a metal layer accommodating groove 401, a command lock electrode groove 402 and a lower blast hole 403; the upper blast hole 101 and the lower blast hole 403 are arranged in alignment.

[0039] The silicon-based functional layer 200 includes a silicon-based frame 201, an electrode 202, a U-shaped electrothermal driver 203, a command lock safety mechanism installation slot 204, a flexible deformation beam 205, a command lock pin 206, a third slot 207, an electrothermal driver pin 208, a second slot 209, a silicon-based slide groove 210, a silicon-based explosion-transmitting hole 211, a silicon-based explosion-proof slider 212, a recoil safety mechanism movable slot 213, a recoil lock hook 214, a recoil spring 215, a recoil lock head 216, a curved Z-shaped tooth 217, a recoil pin 218, and a first slot 219.

[0040] The electrode 202, the U-shaped electrothermal driver 203, the flexible deformable beam 205, the command lock latch 206, the third latching slot 207, and the electrothermal driver latch 208 collectively constitute a command lock safety mechanism, which is mounted in the command lock safety mechanism mounting slot 204 on the silicon-based functional layer 200 and fixed to the upper cover 100 via the electrode 202. In the command lock safety mechanism, one end of the command lock latch 206 is connected to the U-shaped electrothermal driver 203 via the flexible deformable beam 205, and the other end is engaged in the second latching slot 209. The command lock latch 206 is provided with a third latching slot 207. The electrothermal driver latch 208 is located on the U-shaped electrothermal driver 203 and is engaged in the third latching slot 207. Driven by the U-shaped electrothermal driver 203, the command lock latch 206 can move in a direction parallel to the elastic axis 5 and separate from the second latching slot 209.

[0041] The recoil lock hook 214, recoil spring 215, recoil lock head 216, curved Z-shaped teeth 217, and recoil latch 218 collectively constitute a recoil safety mechanism, which is located in the recoil safety mechanism movable slot 213 on the silicon-based functional layer 200. In the recoil safety mechanism, one end of the recoil latch 218 is connected to the silicon-based frame 201 via the recoil spring 215, and the other end is engaged in the first latching slot 219. Curved Z-shaped teeth 217 are provided on both sides of the recoil latch 215 and the recoil safety mechanism movable slot 213. During movement, the recoil latch 215 collides with the curved Z-shaped teeth 217 on both sides of the recoil safety mechanism movable slot 213. The two recoil lock hooks 214 are fixed to the silicon-based frame 201. The recoil latch 218 has recoil lock heads 216 on both sides of one end. The recoil latch 218 can engage with the recoil lock hooks 214 through the recoil lock heads 216. Under the action of recoil, the recoil latch 218 can move parallel to the elastic axis 5 and disengage from the first latching slot 219. The command lock safety mechanism and the recoil safety mechanism are located between the silicon-based frame 201 and the silicon-based explosion-proof slider 212. The second latching slot 209 implements a strict sequential logic for disarming the safety mechanism. That is, when the recoil safety mechanism is not disarmed, the command lock latching slot 206 is restrained by the second latching slot, preventing the command lock safety mechanism from being disarmed.

[0042] The silicon-based explosion-proof slider 212 is provided with a first slot 219, a second slot 209, and a silicon-based explosion-transmitting hole 211. The silicon-based explosion-proof slider 212 is mounted in the silicon-based chute 210. The first slot 219 is located between the silicon-based explosion-proof slider 212 and the recoil latch 219, and the second slot is located between the silicon-based explosion-proof slider 212 and the command lock latch 206. Under the action of centrifugal force, the silicon-based explosion-proof slider 212 can move within the silicon-based chute 210 in a direction perpendicular to and away from the elastic axis 5.

[0043] The metal-based slider layer 300 includes a metal-based frame 301, an electrode groove 302, a metal-based explosion-proof slider 303, a metal-based explosion-transmitting hole 304, a locking beam 305, a metal-based slide groove 306, a locking beam functional area 307, a locking beam movable groove 308, a locking lock head 309, a locking beam flexible area 310, a hollow hole 311, and a recoil safety mechanism observation window 312.

[0044] The metal-based frame 301 and the silicon-based frame 201 are glued or bonded together to form a frame; the metal-based explosion-proof slider 303 and the silicon-based explosion-proof slider 212 are glued or bonded together to form an explosion-proof slider, and the metal-based slide groove 306 and the silicon-based slide groove 210 are together to form the slide groove of the explosion-proof slider; the explosion-proof slider is provided with a plurality of hollow holes 311 to reduce the mass of the explosion-proof slider and adjust the center of mass of the explosion-proof slider; the silicon-based explosion-transmitting hole 211 and the metal-based explosion-transmitting hole 304 are aligned and together constitute the explosion-transmitting hole; the explosion-transmitting hole is arranged on the explosion-proof slider; the explosion-proof slider is arranged in the slide groove and can move along the slide groove away from the bomb axis 5 under the action of centrifugal force, and finally realize the alignment of the explosion-transmitting hole with the upper explosion-transmitting hole 101 and the lower explosion-transmitting hole 403, thereby realizing the alignment of the fuze explosion-transmitting sequence.

[0045] The explosion-proof slider, the lock head 309, and the locking beam 305 together constitute a centrifugal locking mechanism. The lock head 309 is located on both sides of the end of the explosion-proof slider away from the elastic axis 5; the two locking beams 305 are connected to the metal base frame 301 and can move in the locking beam movable groove 308. The two locking beams 305 are symmetrically arranged about the metal base explosion-proof slider 303; the locking beam 305 is composed of a locking beam flexible area 310 that can produce flexible deformation and a locking beam functional area 307 that interacts with the explosion-proof slider. The flameproof slider in the centrifugal locking mechanism can move in a direction perpendicular to the elastic axis 5 within the chute driven by centrifugal force, contacting and squeezing the locking beam functional area 307. After the locking beam flexible area 307 undergoes a certain deformation, the flameproof slider can pass through the locking beam functional area 307 and collide with the frame. After the flameproof slider passes through the locking beam functional area 307, the locking beam flexible area 307 recovers, and the locking beam functional area 307 and the frame jointly achieve locking of the flameproof slider (lock head 309). The two locking beam functional areas 307 are set at gradually decreasing inclination angles to align the flameproof slider and limit its speed.

[0046] The MEMS safety device of the composite material is placed parallel to the elastic axis 5. The silicon-based functional layer 200 and the metal-based slider layer 300, which play the main functional role, are sealed and fixed by the upper cover plate 100 and the lower cover plate 400. The upper cover plate 100 and the lower cover plate 400 are provided with observation windows 312, electrode grooves 402, and explosion holes as required.

[0047] During service, the explosion-proof slider in the MEMS release mechanism is locked in its initial position by the recoil safety mechanism, command lock safety mechanism, and centrifugal locking mechanism. The explosion-transmitting hole is offset from the upper explosion-transmitting hole 101 and the lower explosion-transmitting hole 403. In the event of an accidental drop, the recoil latch 218 moves downward along the missile axis 5 under the inertial force generated by the drop. The recoil latch 218 experiences multiple collisions within the curved Z-shaped teeth 217. The acceleration pulse width generated by the accidental drop is too small to allow the recoil latch 218 to pass through the curved Z-shaped teeth 217. As a result, the recoil latch 218 cannot disengage from the first latching slot 219, which means that the recoil safety mechanism cannot be disarmed. Under the strict timing logic of disarming, other safety mechanisms cannot be disarmed either, preventing the explosion-proof slider from moving, thus ensuring the safety of the fuze. During transportation, rolling, etc., the inertial force generated is less than the threshold of the recoil safety mechanism to release the insurance. Under the strict timing logic of releasing the insurance, other safety mechanisms cannot release the insurance, so the explosion-proof slider cannot move, ensuring the safety of the fuze.

[0048] In the normal firing state, the entire device is subjected to a recoil force parallel to the direction of the bullet axis 5. Under the action of the recoil force, the recoil latch 218 overcomes the spring resistance of the recoil spring 215 and moves downward. After multiple collisions with the curved Z-shaped teeth 217 on the recoil latch 218, the recoil lock head 216 is stuck by the recoil lock hook 214, and the recoil latch 218 is separated from the first slot 219. The recoil safety mechanism releases the first safety of the explosion-proof slider. The three-dimensional schematic diagram after the safety is released is shown as follows Figure 9 、 10 After the first safety of the recoil safety mechanism is released, the explosion-proof slider moves in a direction perpendicular to and away from the elastic axis 5 driven by centrifugal force. Subsequently, the second slot 209 on the explosion-proof slider contacts the command lock pin 206 of the command lock safety mechanism. The flexible deformation beam 205 of the command lock safety mechanism undergoes a certain deformation, and the command lock pin 206 restrains the explosion-proof slider. The three-dimensional schematic diagram of the explosion-proof slider restrained by the command lock safety mechanism is shown in FIG. Figure 11 , as shown in 12. When the projectile flies out of the safe distance, the safety and detonation control circuit module of the overall safety system controls the command lock safety mechanism in real time according to the ballistic information. When it reaches the predetermined position, the safety and detonation control circuit sends a release signal, the U-shaped electrothermal driver 203 is energized and deformed, thereby outputting a certain displacement. The U-shaped electrothermal driver 203 pushes the command lock latch 206 upward in a direction parallel to the projectile axis 5 through the flexible deformation beam 205 and the electrothermal driver latch 208. The command lock latch 206 is separated from the second latch slot 209, and the command lock safety mechanism releases the second safety of the explosion-proof slider. The three-dimensional schematic diagram after the safety is released is shown as follows Figure 13 、 14As shown. The explosion-proof slider continues to move under the action of centrifugal force and contacts the locking beam functional area 307 on the locking beam 305. The locking beam functional area 307 aligns the explosion-proof slider and limits its speed. Under the condition of sufficient centrifugal force, the locking head 309 of the explosion-proof slider causes the locking beam flexible area 310 on the locking beam 305 to produce a certain deformation and move into place. The locking beam flexible area 310 of the locking beam 305 returns to its original shape under the action of elastic force, and the locking head 306 is jointly clamped by the locking beam functional area 307 and the frame. The explosion-proof slider forms a reliable lock. The three schematic diagrams after reliable lock are shown as follows. Figure 15 、 16 At this time, the MEMS safety device is in the release state, the blasting hole is aligned with the upper blasting hole 101 and the lower blasting hole 403, the fuze's blasting sequence is aligned, and the fuze is in the ready state.

Claims

1. A composite material fuze MEMS device driven by environmental forces, characterized in that: It includes an upper cover plate, a silicon-based functional layer, a metal-based slider layer, and a lower cover plate which are arranged in sequence; The upper cover plate is provided with an upper blasting hole, and the lower cover plate is provided with a lower blasting hole, and the upper blasting hole and the lower blasting hole are arranged in alignment; The silicon-based functional layer is provided with a silicon-based explosion-proof slider, a recoil safety mechanism and a command lock safety mechanism; The metal-based slider layer is provided with a metal-based flameproof slider and a locking beam; the metal-based flameproof slider and the locking beam together constitute a centrifugal locking mechanism; The silicon-based explosion-proof slider and the metal-based explosion-proof slider are connected to form an explosion-proof slider; the explosion-proof slider is provided with an explosion-transmitting hole; The recoil safety mechanism, as the first line of defense of the safety device, can move in a direction parallel to the elastic axis and separate from the explosion-proof slider to release the first line of defense. A blocking structure is provided between the silicon-based explosion-proof slider and the silicon-based functional layer to prevent the recoil safety mechanism from operating in the service state. The command lock safety mechanism, as the second safety of the safety and release device, limits the explosion-proof slider when the first safety is released and the explosion-proof slider is moved by centrifugal force; the second safety of the explosion-proof slider is released under the action of the release signal; The explosion-proof slider continues to move under the action of centrifugal force and contacts the locking beam. The locking beam aligns the explosion-proof slider and limits the speed, finally completing the locking of the explosion-proof slider, aligning the explosion-transmission hole with the upper and lower explosion-transmission holes, and completing the release.

2. The MEMS fuse device for composite materials driven by environmental forces according to claim 1, characterized in that: The recoil safety mechanism includes a recoil lock hook, a recoil spring, a recoil lock head, and a recoil latch; One end of the recoil pin is connected to the silicon-based frame through a recoil spring, and the other end is locked in the first slot of the silicon-based explosion-proof slider; recoil lock heads are provided on both sides of one end of the recoil pin, and a recoil lock hook that can be engaged with the recoil lock head is provided on the silicon-based functional layer; under the action of recoil force, the recoil pin can move in a direction parallel to the elastic axis and separate from the first slot.

3. The MEMS fuse-fixing device for composite materials driven by environmental forces according to claim 2, characterized in that: Curved Z-shaped teeth are provided on both sides of the recoil latch and both sides of the movable groove of the recoil safety mechanism, serving as a blocking structure between the silicon-based flameproof slider and the silicon-based functional layer.

4. The MEMS fuse-fixing device for composite materials driven by environmental forces according to claim 1, characterized in that: The command lock safety mechanism includes a U-shaped electrothermal driver, a flexible deformation beam, a command lock latch, and an electrothermal driver latch; One end of the command lock pin is connected to the U-shaped electrothermal driver through a flexible deformation beam, and the other end is clamped into the second slot of the silicon-based explosion-proof slider; a third slot is provided on the command lock pin; the electrothermal driver pin is located on the U-shaped electrothermal driver and is clamped into the third slot; the command lock pin can move along a direction parallel to the elastic axis and separate from the second slot under the drive of the U-shaped electrothermal driver.

5. The MEMS fuse-fixing device for composite materials driven by environmental forces according to claim 1, characterized in that: Locking heads are provided on both sides of one end of the explosion-proof slider away from the elastic axis. Two locking beams are connected to the metal base frame. The two locking beams are symmetrically arranged about the metal base explosion-proof slider and are used to lock the locking heads.

6. The MEMS fuse-fixing device for composite materials driven by environmental forces according to claim 5, characterized in that: The locking beam is composed of a flexible area of ​​the locking beam that can produce flexible deformation and a functional area of ​​the locking beam that interacts with the explosion-proof slider; the explosion-proof slider can move in a direction perpendicular to the elastic axis under the drive of centrifugal force, and contact and squeeze the functional area of ​​the locking beam; after the explosion-proof slider passes through the functional area of ​​the locking beam, the locking beam functional area and the metal base frame jointly realize the locking of the explosion-proof slider.

7. The composite material fuse MEMS device driven by environmental force according to claim 1 or 5, characterized in that: The flameproof sliding block is provided with a plurality of hollow holes.

8. The MEMS fuse-fixing device for composite materials driven by environmental forces according to claim 5, characterized in that: A recoil safety mechanism observation window is provided on the metal base frame.

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