Non-welding polymer material ultra-high vacuum chamber structure and manufacturing method thereof

Abstract

The present invention relates to a non-welded polymer ultra-high vacuum chamber structure and a manufacturing method thereof, wherein the vacuum chamber structure comprises a vacuum chamber body and an outer ring flange, and two outer ring flanges are respectively clamped with two ends of the vacuum chamber body; the vacuum chamber body and the outer ring flange are made of the same polymer material, and the polymer material is PEEK and its composite material and / or VESPEL material and / or polymer engineering plastic. The present invention can not only solve the eddy current effect of the vacuum chamber, but also better meet the requirements of the vacuum chamber structure strength, vacuum performance, etc.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum chambers, and in particular to a non-welding polymer material ultra-high vacuum chamber structure and a manufacturing method thereof. Background Art

[0002] When the magnetic field rise rate of the ultrafast circulating magnet in the particle accelerator synchronization ring reaches 200T / s, the traditional metal thin-walled vacuum pipe will have serious eddy current effect. The all-ceramic vacuum pipe has problems such as low yield, high processing difficulty, and low structural reliability, which makes it unable to better meet the use requirements. Polymer engineering plastics are ideal materials for solving the eddy current effect in vacuum chambers due to their excellent electrical insulation properties, high temperature resistance, chemical stability and mechanical properties.

[0003] Generally speaking, flanges and pipes of polymer vacuum chambers are processed by hot melt welding, which may cause disadvantages such as low structural strength and poor sealing performance at the welding position. In order to meet the requirements of high structural strength, good vacuum performance, and low eddy current effect of vacuum chamber structures in the field of particle accelerators, it is urgent to develop a polymer low eddy current ultra-high vacuum chamber structure in the form of non-hot melt welding. Summary of the invention

[0004] In view of the above problems, the purpose of the present invention is to provide a non-welded polymer material ultra-high vacuum chamber structure and a manufacturing method thereof, which can not only solve the eddy current effect of the vacuum chamber, but also better meet the requirements of vacuum chamber structural strength, vacuum performance, etc.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] The non-welded polymer material ultra-high vacuum chamber structure described in the present invention is characterized in that it includes a vacuum chamber body and an outer ring flange, and the two outer ring flanges are respectively clamped with the two ends of the vacuum chamber body; the vacuum chamber body and the outer ring flange are made of the same polymer material, and the polymer material is PEEK and its composite materials and / or VESPEL materials and / or polymer engineering plastics.

[0007] The non-welded polymer material ultra-high vacuum chamber structure preferably comprises a vacuum chamber body comprising a vacuum pipe and an inner ring flange; two inner ring flanges are respectively arranged at both ends of the vacuum pipe, and the inner ring flange is integrally formed with the vacuum pipe.

[0008] The non-welded polymer material ultra-high vacuum chamber structure is preferably configured such that the inner hole of the outer ring flange is a stepped hole having a concave platform, so that when the outer ring flange is clamped with the corresponding end of the vacuum chamber body, the inner wall of the small-diameter hole of the stepped hole is tightly fitted with the outer wall of the vacuum pipe, and the large-diameter hole is tightly fitted with the outer wall of the inner ring flange, and the inner end face of the inner ring flange abuts against the concave platform.

[0009] In the non-welded polymer material ultra-high vacuum chamber structure, preferably, the cross-sectional shape of the concave platform of the outer ring flange is the same as the cross-sectional shape of the inner ring flange.

[0010] In the non-welded polymer material ultra-high vacuum chamber structure, preferably, the outer ring flange is a two-half structure.

[0011] The non-welded polymer material ultra-high vacuum chamber structure preferably comprises: an outer ring flange comprising a first half flange and a second half flange; the first half flange and the second half flange are buckled together to form an outer ring flange; a T-shaped protrusion is provided on the first half flange, and a T-shaped groove is provided on the second half flange, and when the first half flange and the second half flange are buckled together, the T-shaped protrusion cooperates with the T-shaped groove.

[0012] In the non-welded polymer material ultra-high vacuum chamber structure, preferably, the cross-sectional shape of the vacuum pipe is elliptical, racetrack-shaped, circular or polygonal.

[0013] The present invention also provides a method for manufacturing a polymer material ultra-high vacuum chamber structure in a non-welding form, comprising the following steps:

[0014] The raw material of the pipe body is placed in an extruder, and a pipe die is set in the extruder to perform an extrusion operation to form a pipe body blank;

[0015] The raw material of the outer ring flange is placed in an extruder, and a flange mold is set in the extruder to perform an extrusion operation to form an outer ring half flange blank;

[0016] The pipe body blank and the outer ring half flange blank are heat treated at 250℃~300℃ respectively;

[0017] The heat-treated pipe body blank and the outer ring half flange blank are machined separately to form a pipe body, a first half flange and a second half flange;

[0018] An outer ring flange formed by the first half flange and the second half flange is assembled with the pipeline body.

[0019] The manufacturing method preferably comprises machining the pipe body blank to form the pipe body, and the specific method is: removing the middle part of the true pipe body blank, retaining the vacuum pipe and the inner ring flanges at both ends, so that the vacuum pipe and the inner ring flange are an integrated structure.

[0020] In the manufacturing method, preferably, the machining roughness of the outer end surface of the inner ring flange is less than 1.6 to ensure the sealing degree of the inner ring flange.

[0021] The present invention adopts the above technical solution, which has the following advantages:

[0022] (1) When the magnetic field rise rate of the ultrafast cycle pulse magnet reaches 200T / s, the vacuum chamber structure of the metal thin-wall structure will have serious eddy current effect, and the all-ceramic pipeline has the disadvantages of low yield, high processing difficulty and high cost. The non-welded polymer vacuum chamber described in the present invention has the characteristics of simple structure, easy processing, low cost, high reliability and low eddy current effect;

[0023] (2) The polymer material vacuum chamber in the non-hot melt welding form described in the present invention avoids the disadvantages of low structural strength and poor sealing performance at the welding position that may be caused by the hot melt welding process, and has good structural strength and vacuum sealing performance;

[0024] (3) The polymer material vacuum chamber in the non-hot melt welding form described in the present invention can withstand vacuum baking at a temperature lower than 250°C. After high-temperature baking, an ultra-high vacuum with a vacuum degree better than 10E-8Pa can be achieved, which is suitable for use in synchronous storage rings in particle accelerators. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Throughout the accompanying drawings, the same reference numerals are used to represent the same components. In the accompanying drawings:

[0026] Figure 1 It is a schematic diagram of the overall structure of the non-welding polymer material ultra-high vacuum chamber structure of the present invention;

[0027] Figure 2 yes Figure 1 Schematic diagram of the cutaway structure;

[0028] Figure 3 yes Figure 1 A schematic structural diagram of a vacuum chamber body;

[0029] Figure 4 It is a schematic diagram of the structure of the pipeline body blank for processing the vacuum chamber body;

[0030] Figure 5 It is a schematic diagram of the structure of the outer ring flange;

[0031] Figure 6 It is a schematic diagram of the structure of the first half flange;

[0032] Figure 7 It is a schematic diagram of the structure of the second half flange;

[0033] Figure 8 It is a flow chart of the method for manufacturing the non-welding polymer material ultra-high vacuum chamber structure of the present invention.

[0034] The symbols in the accompanying drawings are as follows:

[0035] 1-vacuum chamber body; 2-first half flange; 3-second half flange; 4-vacuum pipe; 5-inner ring flange; 5A-outer end face of inner ring flange; 6-pipe body blank; 7-T-shaped protrusion; 8-recessed platform; 9-T-shaped groove. DETAILED DESCRIPTION

[0036] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0037] The present invention provides a non-welding form of an ultra-high vacuum chamber structure made of polymer materials. By clamping an outer ring flange to a vacuum chamber body instead of welding, the disadvantages of low structural strength and poor sealing performance at the welding position that may be caused by a hot melt welding process are avoided, and the structure has good structural strength and vacuum sealing performance.

[0038] like Figure 1 and Figure 2 As shown, the non-welded polymer ultra-high vacuum chamber structure provided by the present invention includes a vacuum chamber body 1 and an outer ring flange, and the two outer ring flanges are respectively clamped with the two ends of the vacuum chamber body 1; the vacuum chamber body and the outer ring flange are made of the same polymer material, and the polymer material is PEEK and its composite materials and / or VESPEL materials and / or polymer engineering plastics.

[0039] In the above embodiment, preferably, Figure 3As shown, the vacuum chamber body 1 includes a vacuum pipe 4 and an inner ring flange 5; the two inner ring flanges 5 are respectively arranged at both ends of the vacuum pipe 4, and the inner ring flange 5 and the vacuum pipe 4 are integrally formed. Specifically, the vacuum chamber body 1 is machined from a pipe body blank 6, wherein the pipe body blank is as shown in FIG. Figure 4 shown.

[0040] In the above embodiment, preferably, the inner hole of the outer ring flange is a stepped hole with a concave platform 8, so that when the outer ring flange is clamped with the corresponding end of the vacuum chamber body 1, the inner wall of the small diameter hole of the stepped hole is tightly fitted with the outer wall of the vacuum pipe 4, and the large diameter hole is tightly fitted with the outer wall of the inner ring flange 5, and the inner end face of the inner ring flange 5 is in contact with the concave platform 8.

[0041] In the above embodiment, preferably, the cross-sectional shape of the concave platform 8 of the outer ring flange is the same as the cross-sectional shape of the inner ring flange 5. The concave platform 8 of the outer ring flange applies a certain force to the back of the inner ring flange 5, thereby ensuring the sealing performance of the inner ring flange sealing surface.

[0042] The inner cross-sections of the vacuum pipe 4 and the inner ring flange 5 are completely consistent, the thickness of the inner ring flange 5 along the pipe axis is about 20 mm, and the inner ring flange 5 is about 20 mm to 30 mm higher than the vacuum pipe 4 in the height direction.

[0043] In the above embodiment, preferably, Figure 5 As shown, the outer ring flange is a two-half structure.

[0044] In the above embodiment, preferably, the outer ring flange includes a first half flange 2 and a second half flange 3; the first half flange 2 and the second half flange 3 are buckled together to form the outer ring flange; Figure 6 As shown, the first half flange 2 is provided with a T-shaped protrusion 7, as shown in FIG. Figure 7 As shown, a T-shaped groove 9 is provided on the second half flange 3 , and when the first half flange 2 and the second half flange 3 are buckled together, the T-shaped protrusion 7 matches with the T-shaped groove 9 .

[0045] In the above embodiment, preferably, the cross-sectional shape of the vacuum pipe 4 is elliptical, racetrack-shaped, circular or polygonal.

[0046] like Figure 8 As shown, the present invention also provides a method for manufacturing a polymer material ultra-high vacuum chamber structure in a non-welding form, comprising the following steps:

[0047] (1) placing the raw material of the pipe body in an extruder, setting a pipe die in the extruder, and performing an extrusion operation to form a pipe body blank;

[0048] (2) placing the raw material of the outer ring flange in an extruder, setting a flange die in the extruder, and performing an extrusion operation to form an outer ring half flange blank;

[0049] (3) Heat treatment of the pipe body blank and the outer ring half flange blank at 250℃~300℃ respectively;

[0050] The heat-treated pipe body blank and the outer ring half flange blank are machined separately to form a pipe body, a first half flange and a second half flange;

[0051] (4) Assemble the outer ring flange formed by the first half flange and the second half flange with the pipeline body.

[0052] In the above embodiment, preferably, the pipe body blank is machined to form the pipe body. The specific method is: remove the middle part of the true pipe body blank, retain the vacuum pipe and the inner ring flanges at both ends, so that the vacuum pipe and the inner ring flange are an integrated structure.

[0053] In the above embodiment, preferably, the machining roughness of the outer end surface 5A of the inner ring flange is less than 1.6 to ensure the sealing degree of the inner ring flange.

[0054] The vacuum chamber in the polymer material ultra-high vacuum chamber of the present invention not only overcomes the eddy current effect of metal pipes, but also overcomes the shortcomings of ceramic pipes such as high scrap rate, high processing difficulty, and high cost. The polymer material ultra-high vacuum chamber can meet the requirements of low eddy current, ultra-high vacuum, bakeability, and good structural strength required by ultra-fast cycle magnets in synchrotron accelerators.

[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A non-welded polymer material ultra-high vacuum chamber structure, characterized in that: It comprises a vacuum chamber body and an outer ring flange, wherein two outer ring flanges are respectively clamped with two ends of the vacuum chamber body; The vacuum chamber body and the outer ring flange are made of the same polymer material, and the polymer material is PEEK and its composite material and / or VESPEL material and / or polymer engineering plastic; The vacuum chamber body comprises a vacuum pipe and an inner ring flange; The two inner ring flanges are respectively arranged at two ends of the vacuum pipe, and the inner ring flange and the vacuum pipe are integrally formed; The inner hole of the outer ring flange is a stepped hole with a concave platform, so that when the outer ring flange is clamped with the corresponding end of the vacuum chamber body, the inner wall of the small-diameter hole of the stepped hole is tightly matched with the outer wall of the vacuum pipe, and the large-diameter hole is tightly matched with the outer wall of the inner ring flange, and the inner end surface of the inner ring flange is in contact with the concave platform.

2. The non-welding polymer material ultra-high vacuum chamber structure according to claim 1, characterized in that: The cross-sectional shape of the concave platform of the outer ring flange is the same as the cross-sectional shape of the inner ring flange.

3. The non-welding polymer material ultra-high vacuum chamber structure according to claim 1, characterized in that: The outer ring flange is a two-half structure.

4. The non-welding polymer material ultra-high vacuum chamber structure according to claim 3, characterized in that: The outer ring flange comprises a first half flange and a second half flange; the first half flange and the second half flange are buckled together to form the outer ring flange; The first half flange is provided with a T-shaped protrusion, and the second half flange is provided with a T-shaped groove. When the first half flange and the second half flange are buckled together, the T-shaped protrusion matches with the T-shaped groove.

5. The non-welding polymer material ultra-high vacuum chamber structure according to claim 1, characterized in that: The cross-sectional shape of the vacuum pipe is elliptical, racetrack-shaped, circular or polygonal.

6. A method for manufacturing a non-welded polymer material ultra-high vacuum chamber structure based on the non-welded polymer material ultra-high vacuum chamber structure according to any one of claims 1 to 5, characterized in that: The steps include: The raw material of the pipe body is placed in an extruder, and a pipe die is set in the extruder to perform an extrusion operation to form a pipe body blank; The raw material of the outer ring flange is placed in an extruder, and a flange mold is set in the extruder to perform an extrusion operation to form an outer ring half flange blank; The pipe body blank and the outer ring half flange blank are heat treated at 250℃~300℃ respectively; The heat-treated pipe body blank and the outer ring half flange blank are machined separately to form a pipe body, a first half flange and a second half flange; An outer ring flange formed by the first half flange and the second half flange is assembled with the pipeline body.

7. The manufacturing method according to claim 6, characterized in that: The pipeline body blank is machined to form the pipeline body. The specific method is: remove the middle part of the real pipeline body blank, retain the vacuum pipeline and the inner ring flanges at both ends, so that the vacuum pipeline and the inner ring flange are an integrated structure.

8. The manufacturing method according to claim 6, characterized in that: The machining roughness of the outer end surface of the inner ring flange is less than 1.6 to ensure the sealing degree of the inner ring flange.

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