Optical expansion module and optical system having the same

Abstract

The application discloses an optical expansion module and an optical system with the same. The optical expansion module comprises: a spatial light modulator, which is configured with a main imaging lens; an expansion lens group, which is arranged on one side of the main imaging lens, and forms a plurality of expanded light paths through the main imaging lens and the expansion lens group, wherein the expanded light paths comprise a first expanded light path and a second expanded light path; a first magnification lens, which is arranged in one-to-one correspondence with the first expanded light path on a side of the expansion lens group away from the spatial light modulator; and a second magnification lens, which has an imaging magnification greater than that of the first magnification lens, is arranged in one-to-one correspondence with the second expanded light path on the side of the expansion lens group away from the spatial light modulator. The optical expansion module has different magnification imaging systems in the same module, and has the advantages of improving the compatibility of products.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of direct writing exposure systems, in particular to an optical expansion module and an optical system with the same. BACKGROUND

[0002] The optical expansion module in the related art usually only supports the use of a single magnification lens, and according to the required lens magnification and device index, it can usually only be used in the production of a certain process, and it can meet the resolution of high-order devices, but it cannot meet the productivity of medium and low-order devices; or it can meet the productivity of medium and low-order devices, but it cannot take into account the resolution of high-order products.

[0003] However, the simultaneous purchase of high, medium and low order exposure devices will increase the total cost of ownership of customers and greatly reduce profits; if only high-resolution devices are purchased, although the resolution capability of medium and low-order products can be met, the productivity of medium and low-order exposure devices cannot be obtained, SUMMARY

[0004] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, one object of the present application is to provide an optical expansion module, which has different magnification imaging systems in the same module, thereby improving the compatibility of products and the like.

[0005] The present application also provides an optical system with the optical expansion module.

[0006] To achieve the above-mentioned object, according to an embodiment of the present application, an optical expansion module is provided, comprising: a spatial light modulator, the spatial light modulator being configured with a main imaging lens; an expansion lens group, the expansion lens group being arranged on one side of the main imaging lens, the expansion lens group forming a plurality of expanded light paths through the main imaging lens and the expansion lens group, the expanded light paths comprising a plurality of first expanded light paths and a plurality of second expanded light paths; a plurality of first magnification lenses, the first magnification lenses being arranged one-to-one corresponding to the first expanded light paths, the first magnification lenses being arranged on a side of the expansion lens group away from the spatial light modulator, the first expanded light paths being adapted to image on a first exposure substrate; a plurality of second magnification lenses, the imaging magnification of the second magnification lenses being greater than that of the first magnification lenses, the second magnification lenses being arranged one-to-one corresponding to the second expanded light paths, the second magnification lenses being arranged on a side of the expansion lens group away from the spatial light modulator, the second expanded light paths being adapted to image on a second exposure substrate.

[0007] According to the optical expansion module, the light beams emitted by the spatial light modulator are effectively utilized by the expansion lens group to form multiple expanded light paths, which means that multiple light beams are generated simultaneously for utilization, thereby improving the optical processing effect. Compared with single-beam processing, parallel processing of multiple light beams significantly improves the amount of light information that can be processed per unit time, thereby improving the exposure efficiency of the line. The expansion lens group forms multiple expanded light beams through the main imaging lens, and the optical expansion module integrates multiple first magnification lenses and second magnification lenses. The multiple expanded light beams correspond to the first magnification lenses and the second magnification lenses, respectively. In the same optical expansion module, the user can select the use of the second magnification lenses and the first magnification lenses according to different application requirements. When the production lot number needs to be analyzed using low magnification, the photolithography data is automatically displayed on the spatial light modulator for display, and the corresponding expansion lens group is used for projection exposure. When the production lot number needs to be analyzed using high magnification, the photolithography data is automatically displayed on the spatial light modulator for display, and the corresponding expansion lens group is used for projection exposure. In this way, the production capacity of medium and low-order products is met, and the resolving power of high-order products is met, thereby improving the compatibility of the optical expansion module.

[0008] In the optical expansion module, the surface of the spatial light modulator can be divided into M parts, each part can be controlled independently, and M is a natural number greater than 1. According to the M parts, each part is imaged by an expansion lens group. The magnification of the multiple first magnification lenses and the multiple second magnification lenses is different, which can be suitable for high-resolution products and low-resolution products at the same time. According to the set M, the imaging systems with the same magnification are projected onto the same exposure surface, and the imaging systems with different magnifications can be on different exposure surfaces or on the same exposure surface.

[0009] Therefore, the optical expansion module has different magnification imaging systems in the same module, which improves the compatibility of the product and has other advantages.

[0010] According to some specific embodiments of the present application, the expansion lens group has a mirror group and / or a prism group, and includes: a first expansion lens group, the first expansion lens group forms multiple first light paths; a second expansion lens group, the second expansion lens group forms multiple second light paths; wherein the light input area of the first expansion lens group and the second expansion unit group corresponds to the position of the spatial light modulator, the light output area of each first expansion lens group is spaced apart from each other and corresponds to one first magnification lens, and the light output area of each second expansion unit group is spaced apart from each other and corresponds to one second magnification lens.

[0011] According to some embodiments of the present application, the first expansion lens group comprises a first expansion unit and a second expansion unit; the second expansion lens group comprises a third expansion unit and a fourth expansion unit; wherein the light-in areas of the first expansion unit, the second expansion unit, the third expansion unit and the fourth expansion unit are arranged in multiple rows side by side and correspond to the main imaging lens; the light-out areas of the first expansion unit, the second expansion unit, the third expansion unit and the fourth expansion unit are spread in multiple columns, and the multiple first magnification lenses and the multiple second magnification lenses are arranged in different rows and different columns.

[0012] According to some embodiments of the present application, the light-in areas of the first expansion unit, the second expansion unit and the third expansion unit are in the same plane; the light-out areas of the first expansion unit, the second expansion unit and the third expansion unit are in the same plane.

[0013] According to some embodiments of the present application, the first expansion unit comprises a first mirror group and a first prism, the first prism is connected to the first mirror group and forms a first light path inside; the second expansion unit comprises a second mirror group and a second prism, the second prism is connected to the second mirror group and forms a second light path inside; the third expansion unit comprises a third mirror group and a third prism, the third prism is connected to the third mirror group and forms a third light path inside; the fourth expansion unit comprises a fourth mirror group and a fourth prism, the fourth prism is connected to the fourth mirror group and forms a fourth light path inside.

[0014] According to some embodiments of the present application, the light-in areas of the first prism and the second prism are arranged apart from each other, the light-in area of the third prism is located between the first prism and the second prism, and the light-in area of the fourth prism is located on the side of the third prism away from the second prism.

[0015] According to some embodiments of the present application, the first mirror group comprises two first mirrors arranged in parallel, and the two first mirrors are located on one side of the thickness direction of the expansion mirror group; the second mirror group comprises two second mirrors arranged in parallel, and the two second mirrors are located on the other side of the thickness direction of the expansion mirror group; the third mirror group comprises two third mirrors arranged in parallel, one of the third mirrors is located between the first mirror group and the second mirror group in the thickness direction of the expansion mirror group, and the other third mirror is located outside the second mirror group in the thickness direction of the expansion mirror group; the fourth mirror group comprises two fourth mirrors arranged in parallel, and the two fourth mirrors are arranged outside the second mirror group in the thickness direction of the expansion mirror group; wherein the light exit areas of the first mirror group, the second mirror group and the third mirror group are staggered in the thickness direction of the expansion mirror group.

[0016] According to some embodiments of the present application, the light entrance areas of the first expansion unit and the second expansion unit, the third expansion unit and the fourth expansion unit are all configured as rectangles and arranged side by side; and the light exit areas of the first expansion unit and the second expansion unit, the third expansion unit and the fourth expansion unit are all configured as rectangles and arranged in parallelogram.

[0017] According to the embodiments of the second aspect of the present application, an optical system is provided, comprising the optical expansion module according to the above embodiments of the present application, and a plurality of the optical expansion modules are arranged in an array.

[0018] According to the optical system of the embodiments of the present application, by using the optical expansion module according to the embodiments of the present application, the same module has different magnification imaging systems, which improves the compatibility of the product and has other advantages.

[0019] According to some embodiments of the present application, the light exit areas of a plurality of the expansion mirror groups are staggered in the thickness direction thereof to form multiple rows; and the light exit areas of the expansion mirror groups of different optical expansion modules are arranged in an array along the rows thereof.

[0020] Additional aspects and advantages of the present application will be in part apparent and in part pointed out hereinafter. BRIEF DESCRIPTION OF DRAWINGS

[0021] The above and / or additional aspects and advantages of the present application will become apparent and be readily understood from the following description, taken in conjunction with the accompanying drawings, in which:

[0022] Figure 1 is a structural schematic diagram of an optical expansion module according to an embodiment of the present application;

[0023] Figure 2 is an exploded view of an optical expansion module according to an embodiment of the present application;

[0024] Figure 3 is a schematic view of an imaging matrix of an optical expansion module according to an embodiment of the present application;

[0025] Figure 4 is a schematic view of a structure of an optical system according to an embodiment of the present application.

[0026] Reference Signs:

[0027] optical expansion module 1, spatial light modulator 100, expansion lens group 200, first magnification lens 300,

[0028] second magnification lens 400, first expansion lens group 210, second expansion lens group 220, first expansion unit 211,

[0029] second expansion unit 212, third expansion unit 221, fourth expansion unit 222, first mirror group 201,

[0030] first prism 202, second mirror group 203, second prism 204, third mirror group 205, third prism 206, fourth mirror group 207, fourth prism 208, optical system 10. DETAILED DESCRIPTION

[0031] Embodiments of the present application are described below in detail with reference to the accompanying drawings, in which like or similar elements are denoted by like or similar reference signs throughout the drawings. The embodiments described below are examples for explaining the present application, and are not intended to limit the present application.

[0032] In the description of the present application, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like indicate the orientation or positional relationship shown in the drawings, and are merely for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be construed as limiting the present application.

[0033] In the description of the present application, "first feature" and "second feature" can include one or more of the features.

[0034] In the description of the present application, "a plurality of" means two or more, and "several" means one or more.

[0035] An optical expansion module 1 according to an embodiment of the present application is described below with reference to the accompanying drawings.

[0036] As shown in the drawings, the optical expansion module 1 according to an embodiment of the present application comprises a spatial light modulator 100, an expansion lens group 200, a first magnification lens 300 and a second magnification lens 400. Figures 1-4 The spatial light modulator 100 is configured with a main imaging lens. The expansion lens group 200 is arranged on one side of the main imaging lens, and the expansion lens group 200 forms a plurality of expanded light paths through the main imaging lens, including a plurality of first expanded light paths and a plurality of second expanded light paths. The first magnification lens 300 is arranged one-to-one corresponding to the first expanded light paths, and the first magnification lens 300 is arranged on the side of the expansion lens group 200 away from the spatial light modulator 100, and the first expanded light paths are suitable for imaging on a first exposure substrate. The second magnification lens 400 has a larger imaging magnification than the first magnification lens 300, and the second magnification lens 400 is arranged one-to-one corresponding to the second expanded light paths, and the second magnification lens 400 is arranged on the side of the expansion lens group 200 away from the spatial light modulator 100, and the second expanded light paths are suitable for imaging on a second exposure substrate.

[0037] For example, the spatial light modulator 100 spatially modulates the light beams according to the input signals, and the modulated light beams then enter the main imaging lens. After the light beams exit the main imaging lens, they pass through the expansion lens group 200, which spatially expands the light beams through reflection. A plurality of microlens array modules are arranged on the side of the expansion lens group 200 away from the spatial light modulator 100, each corresponding to an expanded light path after the expansion lens group 200. The first magnification lens 300 and the second magnification lens 400 are arranged on the side of the microlens array modules away from the expansion lens group 200, which can finely control the light paths to meet specific optical requirements.

[0038]

[0039] ​According to the optical expansion module 1 of the embodiment of the present application, the light beams emitted by the spatial light modulator 100 are effectively utilized by the expansion lens group 200 to form a plurality of expanded light paths, which means that a plurality of light beams are generated simultaneously for utilization, thereby improving the optical processing effect. Compared with the processing of a single light beam, the parallel processing of a plurality of light beams significantly improves the amount of optical information that can be processed within a unit of time, thereby improving the exposure efficiency of the line. The expansion lens group 200 forms a plurality of expanded light beams through the main imaging lens, and the optical expansion module 1 integrates a plurality of first magnification lenses 300 and second magnification lenses 400. The plurality of expanded light beams correspond to the first magnification lenses 300 and the second magnification lenses 400, respectively. In the same optical expansion module 1, the user can select the use of the second magnification lenses 400 and the first magnification lenses 300 according to different application requirements. When the production lot number needs to be analyzed using low magnification, the photolithography data is automatically displayed on the spatial light modulator 100 for display, and the corresponding expansion lens group 200 is used for projection exposure. When the production lot number needs to be analyzed using high magnification, the photolithography data is automatically displayed on the spatial light modulator 100 for display, and the corresponding expansion lens group 200 is used for projection exposure. In this way, the production capacity of medium and low-order products is met, and the resolving power of high-order products is also met, thereby improving the compatibility of the optical expansion module 1.

[0040] In the embodiment of the present application, the surface of the spatial light modulator 100 can be divided into M parts, each part can be controlled independently, and M is a natural number greater than 1. According to the M parts, each part is imaged by the expansion lens group 200, and the imaging system zoom magnification is designed according to the requirements. The M imaging systems are designed as X1, X2,.. Xm magnifications, where 1≤m≤M. When m is equal to 1, the system can be a simple expansion exposure surface photolithography system. When m is greater than 1, the system can support multiple resolution capability exposure photolithography systems. That is, the magnification of the first magnification lens 300 and the second magnification lens can be the same or different. If the magnification of the plurality of first magnification lenses 300 and the plurality of second magnification lenses 400 is different, it can be suitable for high-resolution products and low-resolution products at the same time. According to the set M, the imaging systems with the same magnification are projected onto the same exposure substrate, and the imaging systems with different magnifications can be projected onto different exposure substrates or the same exposure substrate.

[0041] Therefore, the optical expansion module 1 of the embodiment of the present application has different magnification imaging systems in the same module, which improves the compatibility of the product and has other advantages.

[0042] In some specific embodiments of the present application, as Figure 1 and Figure 2As shown, the expansion lens group 200 has a mirror group and / or a prism group, and includes a first expansion lens group 210 and a second expansion lens group 220. A plurality of first light paths are formed in the first expansion lens group 210. A plurality of second light paths are formed in the second expansion lens group 220. The light-in areas of the first expansion lens group 210 and the second expansion lens group 220 correspond to the positions of the spatial light modulator 100, and the light-out areas of each first expansion lens group are spaced apart from each other and correspond to a first magnification lens 300 respectively, and the light-out areas of each second expansion lens group 220 are spaced apart from each other and correspond to a second magnification lens 400 respectively.

[0043] The expansion lens group 200 can have a mirror group and a prism group, or have a mirror group or a prism group alone. The first expansion lens group 210 and the second expansion lens group 220 form a plurality of first light paths and second light paths respectively, which can make the light beams passing through the main imaging lens transmit from different paths, realize multi-channel optical expansion, and thus support more imaging modes and functions and improve the information carrying capacity. In addition, by corresponding the light-out areas of the first expansion lens group 210 to the first magnification lens 300 and corresponding the light-out areas of the second expansion lens group 220 to the second magnification lens 400, the system can provide different magnification options. The user or the system can select low magnification or high magnification imaging as needed to meet the needs of different application scenarios and improve the flexibility and adaptability of the optical expansion module 1.

[0044] Moreover, the light-out areas of each expansion lens group 200 are spaced apart from each other, meaning that the light rays of each light path do not interfere with each other, which helps to reduce image distortion and improve imaging quality. At the same time, this structure also helps to reduce the influence of stray light and further improve the clarity and contrast of the image.

[0045] In some embodiments of the present application, as shown in Figure 1 and Figure 2 The first expansion lens group 210 includes a first expansion unit 211 and a second expansion unit 212. The second expansion lens group 220 includes a third expansion unit 221 and a fourth expansion unit 222. The light-in areas of the first expansion unit 211, the second expansion unit 212, the third expansion unit 221 and the fourth expansion unit 222 are arranged side by side in multiple rows and correspond to the main imaging lens. The light-out areas of the first expansion unit 211, the second expansion unit 212, the third expansion unit 221 and the fourth expansion unit 222 are expanded into multiple columns, and the plurality of first magnification lenses 300 and the plurality of second magnification lenses 400 are arranged in different rows and different columns.

[0046] Through the setting of the first expansion unit 211, the second expansion unit 212, the third expansion unit 221 and the fourth expansion unit 222, the optical expansion module 1 can simultaneously process multiple light paths, and each light path can be refracted and reflected through different expansion units, thereby generating multiple imaging paths. Such a structure can realize multi-angle and multi-view imaging, and is suitable for application occasions that require simultaneous observation of multiple targets or scenes. Since the light-out areas of the first expansion unit 211 and the second expansion unit 212 correspond to the first magnification lens 300, and the light-out areas of the third expansion unit 221 and the fourth expansion unit 222 correspond to the second magnification lens 400, the user can select different magnification imaging according to needs to adapt to different observation needs.

[0047] In some embodiments of the present application, as shown in Figure 1 and Figure 2 The light-in areas of the first expansion unit 211, the second expansion unit 212 and the third expansion unit 221 and the fourth expansion unit 222 are in the same plane. The light-out areas of the first expansion unit 211, the second expansion unit 212 and the third expansion unit 221 and the fourth expansion unit 222 are in the same plane.

[0048] The light-in areas are in the same plane, which means that the starting points of the light beams accepted by the multiple expansion units are consistent, simplifying the alignment process between the spatial light modulator 100 and the expansion lens group 200, ensuring that the light beams enter each expansion unit uniformly and accurately, reducing alignment errors and improving the overall working efficiency of the optical expansion module 1. The light-out areas are also in the same plane, ensuring that each expansion unit is aligned with the first magnification lens 300 and the second magnification lens 400, avoiding mutual interference between the light paths, and improving the accuracy of optical processing. In summary, by aligning the multiple light-in areas and light-out areas, the performance and stability of the optical expansion module 1 can be improved, and the accuracy of operation is improved.

[0049] In some embodiments of the present application, as shown in Figure 1 and Figure 2 The first expansion unit 211 includes a first mirror group 201 and a first prism 202. The first prism 202 is connected to the first mirror group 201 and forms a first light path inside. The second expansion unit 212 includes a second mirror group 203 and a second prism 204. The second prism 204 is connected to the second mirror group 203 and forms a second light path inside. The third expansion unit 221 includes a third mirror group 205 and a third prism 206. The third prism 206 is connected to the third mirror group 205 and forms a third light path inside. The fourth expansion unit 222 includes a fourth mirror group 207 and a fourth prism 208. The fourth prism 208 is connected to the fourth mirror group 207 and forms a fourth light path inside.

[0050] The incident light beams can be adjusted by the first mirror group 201, the second mirror group 203, and the third mirror group 205, the fourth mirror group 207, and the first prism 202, the second prism 204, and the third prism 206, the fourth prism 208 can further control the path of the light beams. The combination of the mirror group and the prism can precisely control the propagation direction of the light beams in space, which is beneficial to optimize the imaging effect. At the same time, the mirror group and the prism of each expansion unit can be independently adjusted, which means that the optical parameters of each unit can be adjusted according to different application requirements, improving the adaptability and flexibility of the optical system.

[0051] In some embodiments of the present application, as shown in Figure 1 and Figure 2 The light entrance areas of the first prism 202 and the second prism 204 are arranged in a spaced manner, the light entrance area of the third prism 206 is located between the first prism 202 and the second prism 204, and the light entrance area of the fourth prism 208 is located on the side of the third prism 206 away from the second prism 204. The spacing between the prisms can reduce the interference between the light beams processed by different prisms, avoid the intersection or overlap of the light paths, thereby reducing the image ghosting or stray light phenomenon, and improving the imaging quality. The spaced prism layout helps to optimize the optical path design, so that the light can propagate according to the preset path when passing through different prisms, without being affected by other prisms, ensuring that the light is correctly guided to the corresponding optical components.

[0052] In some embodiments of the present application, as shown in Figure 2 The first mirror group 201 includes two first mirrors arranged in parallel, and the two first mirrors are located on one side of the thickness direction of the expansion mirror group 200. The second mirror group 203 includes two second mirrors arranged in parallel, and the two second mirrors are located on the other side of the thickness direction of the expansion mirror group 200. The third mirror group 205 includes two third mirrors arranged in parallel, one of which is located between the first mirror group 201 and the second mirror group 203 in the thickness direction of the expansion mirror group, and the other is located outside the second mirror group 203 in the thickness direction of the expansion mirror group. The fourth mirror group 207 includes two fourth mirrors arranged in parallel, and the two fourth mirrors are arranged in the thickness direction of the expansion mirror group 200 and located outside the second mirror group 203. Among them, the light exit areas of the first mirror group 201, the second mirror group 203, and the third mirror group 205, the fourth mirror group 207 are arranged in a staggered manner in the thickness direction of the expansion mirror group.

[0053] When the light beams pass through different mirror groups, the staggered arrangement of the outgoing light beams can reduce the interference in the optical path, avoiding unnecessary interference caused by optical path difference. At the same time, the staggered arrangement can ensure that the light output areas of each mirror group do not overlap, ensuring that each light beam can propagate independently according to the predetermined path, improving the stability and image quality of the optical expansion module 1.

[0054] In some embodiments of the present application, as shown in Figure 3 The light input areas of the first and second expansion units 211 and 212, and the third and fourth expansion units 221 and 222 are all configured as rectangles and arranged side by side. The light output areas of the first and second expansion units 211 and 212, and the third and fourth expansion units 221 and 222 are all configured as rectangles and arranged in parallelogram. And the imaging rectangles of the same magnification can be arranged in one dimension, and the distribution can be approximately equidistant. The imaging rectangle arrays of different magnifications can be arranged in one or more dimensions, and the distribution can be approximately equidistant.

[0055] The side-by-side arrangement of the light input areas can ensure that the light beams emitted from the spatial light modulator 100 can be uniformly distributed to each expansion unit, optimizing the layout of the light beams and improving the utilization efficiency of the light beams. The staggered arrangement of the first, second, third, and fourth expansion units 211, 212, 221, and 222 in the row and column directions of the exposure substrate can effectively avoid the intersection or overlap of the light paths between the light output areas of different expansion units, reduce the interference between the light paths, and ensure the independence and integrity of each light path, improving the quality and clarity of the image.

[0056] The optical system 10 according to an embodiment of the present application is described below.

[0057] The optical system 10 according to an embodiment of the present application, as shown in Figure 4 includes a plurality of optical expansion modules 1 arranged in an array according to the above-mentioned embodiments of the present application. The plurality of optical expansion modules 1 can be arranged in one or more dimensions, and the spatial light modulators 100 can be arranged in the same direction or rotated by 180 degrees. Each optical expansion module 1 processes part of the light beams independently, and the array arrangement of the plurality of optical expansion modules 1 can process more light beams in parallel, greatly improving the light beam processing capacity and data transmission rate of the optical system 10. On the basis of reducing the number of spatial light modulators 100 corresponding to the optical expansion modules 1, the possibility of achieving the same exposure efficiency is achieved, thereby reducing the cost of the equipment.

[0058] The plurality of optical expansion modules 1 are arranged in an array, so that the optical system 1 has higher flexibility and scalability. When a user produces a plurality of different resolution data, the same magnification imaging system of part or all of the spatial light modulator 100 can be automatically selected for exposure according to the resolution data, so as to improve the flexibility of the optical system 1.

[0059] According to the optical system 10 of the above-mentioned embodiments of the present application, by using the optical expansion module 1 according to the embodiments of the present application, the same module has different magnification imaging systems, which improves the compatibility of the product and has other advantages.

[0060] In some specific embodiments of the present application, as shown in Figure 4 The light output areas of the plurality of expansion lens groups 200 are arranged in multiple rows by being staggered in the thickness direction. The light output areas of the expansion lens groups 200 of different optical expansion modules 1 are arranged in an array along the rows. By staggering the light output areas in the thickness direction, the space can be fully utilized, and the layout of the optical system 1 can be effectively optimized, so that the light beams of the light output areas of the expansion lens groups 200 can be staggered, and the space can be effectively utilized. In addition, by effectively avoiding the direct overlap of the optical paths between different expansion lens groups 200, the mutual interference between the light beams is reduced, the independence of the optical path of each expansion lens group 200 and the purity of the light beams are ensured, and the stability and imaging quality of the optical system 1 are improved. In addition, by arranging the light output areas in an array, the layout of the light beams in space can be optimized, the distribution of the light beams is more uniform, which is beneficial to subsequent optical components, and the performance of the overall optical system 10 is improved.

[0061] Other configurations and operations according to the embodiments of the present application are known to those skilled in the art, and will not be described in detail here.

[0062] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily mean the same embodiment or example.

[0063] Although the embodiments of the present application have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. An optical expansion module, comprising: The optical expansion module comprises: a spatial light modulator configured with a main imaging lens; an expansion lens group arranged on one side of the main imaging lens, the expansion lens group forming a plurality of expanded light paths through the main imaging lens, the expanded light paths comprising a plurality of first expanded light paths and a plurality of second expanded light paths; a plurality of first magnification lenses corresponding to the first expanded light paths, the first magnification lenses being arranged on a side of the expansion lens group away from the spatial light modulator, the first expanded light paths being adapted to image on a first exposure substrate; a plurality of second magnification lenses corresponding to the second expanded light paths, the second magnification lenses being arranged on a side of the expansion lens group away from the spatial light modulator, the second expanded light paths being adapted to image on a second exposure substrate.

2. The optical expansion module of claim 1, wherein, The expansion lens group has a mirror group and / or a prism group, and comprises: a first expansion lens group in which a plurality of first light paths are formed; a second expansion lens group in which a plurality of second light paths are formed; wherein the light entry regions of the first expansion lens group and the second expansion lens group correspond to the position of the spatial light modulator, the light exit regions of each first expansion lens group are spaced apart from each other and correspond to one first magnification lens respectively, and the light exit regions of each second expansion lens group are spaced apart from each other and correspond to one second magnification lens respectively.

3. The optical expansion module according to claim 2, wherein: the first expansion lens group comprises a first expansion unit and a second expansion unit; the second expansion lens group comprises a third expansion unit and a fourth expansion unit; wherein the light entry regions of the first expansion unit, the second expansion unit, the third expansion unit and the fourth expansion unit are arranged in multiple rows side by side and correspond to the main imaging lens; the light exit regions of the first expansion unit, the second expansion unit, the third expansion unit and the fourth expansion unit are expanded into multiple columns, and the plurality of first magnification lenses and the plurality of second magnification lenses are arranged in different rows and different columns.

4. The optical expansion module of claim 3, wherein, the light entry regions of the first expansion unit, the second expansion unit, the third expansion unit and the fourth expansion unit are in the same plane; the light exit regions of the first expansion unit, the second expansion unit, the third expansion unit and the fourth expansion unit are in the same plane.

5. The optical expansion module according to claim 3, wherein: the first expansion unit comprises a first mirror group and a first prism, the first prism being connected to the first mirror group and forming a first light path inside; the second expansion unit comprises a second mirror group and a second prism, the second prism being connected to the second mirror group and forming a second light path inside; the third expansion unit comprises a third mirror group and a third prism, the third prism being connected to the third mirror group and forming a third light path inside; the fourth expansion unit comprises a fourth mirror group and a fourth prism, the fourth prism being connected to the fourth mirror group and forming a fourth light path inside.

6. The optical expansion module of claim 5, wherein, The light-incident regions of the first and second prisms are arranged apart from each other, the light-incident region of the third prism is located between the first and second prisms, and the light-incident region of the fourth prism is located on a side of the third prism away from the second prism.

7. The optical expansion module according to claim 6, wherein, the first mirror group comprises two first mirrors arranged in parallel, and the two first mirrors are located on one side of the expansion lens group in the thickness direction; the second mirror group comprises two second mirrors arranged in parallel, and the two second mirrors are located on the other side of the expansion lens group in the thickness direction; the third mirror group comprises two third mirrors arranged in parallel, and one of the two third mirrors is located between the first and second mirror groups in the thickness direction of the expansion lens group, and the other third mirror is located outside the second mirror group in the thickness direction of the expansion lens group; the fourth mirror group comprises two fourth mirrors arranged in parallel, and the two fourth mirrors are arranged in the thickness direction of the expansion lens group and located outside the second mirror group; wherein the light-incident regions of the first, second, third and fourth mirror groups are arranged staggered in the thickness direction of the expansion lens group.

8. The optical expansion module of claim 3, wherein, The light-incident regions of the first, second, third and fourth expansion units are all configured as rectangles and arranged side by side. The light-incident regions of the first, second, third and fourth expansion units are all configured as rectangles and arranged in parallelogram.

9. An optical system characterized by comprising: Comprising: a plurality of optical expansion modules according to any one of claims 1-8, and the plurality of optical expansion modules are arranged in an array.

10. The optical system of claim 9, wherein, The light-incident regions of the plurality of expansion lens groups are all arranged staggered in the thickness direction of the expansion lens group into multiple rows; The light-incident regions of the expansion lens groups of different optical expansion modules are arranged in an array along the rows in which they are located.

Images