Design method and system for coil thickness of fine-coarse double-layer winding magnetic levitation planar motor

Abstract

The present invention belongs to the technical field of motors and discloses a method and system for designing the coil thickness of a fine-coarse double-layer winding magnetic levitation planar motor. The method comprises the following steps: S1 determining the operating mode and design indicators of the motor to be processed based on the operating scenario of the motor to be processed; S2 constructing a harmonic force model for a single coil of the motor to be processed and using the harmonic force model to solve the horizontal thrust fluctuation error of the single coil; S3 decoupling the entire coil array to obtain the relationship between coil thickness and electromagnetic force, combining the relationship between electromagnetic force, maximum load, and motor acceleration to solve the current of the motor to be processed in the electromagnetic force model, and using the current to construct a relationship between the total heating power of the motor to be processed; S4 using the design indicators as constraints and the minimum thickness of the coil of the motor to be processed as the goal, solving the horizontal thrust fluctuation error and total heating power, thereby obtaining the coil thickness of the motor to be processed and realizing the design of the coil thickness.

Description

Technical Field

[0001] The present invention belongs to the technical field related to motors, and more specifically, relates to a method and system for designing the thickness of a coil of a fine-coarse double-layer winding magnetic levitation planar motor. Background Art

[0002] Since the magnetic levitation planar motor can work in a vacuum environment, it has the advantages of zero friction, low heat generation and vacuum compatibility. However, the current magnetic levitation planar motors at home and abroad are incompatible with achieving high precision and large stroke for a single workbench. In order to further improve the working efficiency and positioning accuracy of the magnetic levitation workbench, a double-layer winding magnetic levitation planar motor is proposed.

[0003] A magnetic levitation planar motor generates motion by applying the Lorentz force to a energized coil in a magnetic field. Controlling the coil's input current controls the output force, thereby controlling the planned movement of the rotor coils to complete their work. A double-layer magnetic levitation planar motor superimposes a coil array on a single-layer structure. The lower layer, closer to the magnet, generates acceleration thrust, while the upper layer, with its lower harmonic force, ensures uniform motion accuracy. This decouples uniform speed and acceleration control, accommodating the increasing acceleration and precision requirements of photolithography.

[0004] Since the selection of coil thickness parameters has a great influence on the motor performance, the horizontal thrust fluctuation error and total heat power model of the double-layer coil magnetic levitation planar motor is established by studying and calculating the influence of the coil thickness. A design method for the coil thickness of the fine-coarse double-layer winding magnetic levitation planar motor is proposed. Summary of the Invention

[0005] In response to the above defects or improvement needs of the prior art, the present invention provides a method and system for designing the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor, which solves the problem of how to design the coil thickness in the magnetic levitation planar motor.

[0006] To achieve the above object, according to one aspect of the present invention, a method for designing the thickness of a coil of a fine-coarse double-layer winding magnetic levitation planar motor is provided, the method comprising the following steps:

[0007] S1 determines the working parameters of the motor to be processed and the maximum heating power, maximum thrust fluctuation error and maximum load that the mover platform can withstand according to the working scenario of the motor to be processed;

[0008] S2 constructs a harmonic force model of a single coil of the motor to be processed, and uses the harmonic force model to solve the relationship between the horizontal thrust fluctuation error and the thickness of the upper coil and the thickness of the lower coil;

[0009] S3 decouples the entire coil of the motor to be processed to obtain an electromagnetic force model regarding the relationship between the thickness of the upper coil and the lower coil and the electromagnetic force, and solves the current of the motor to be processed in the electromagnetic force model based on the relationship between the electromagnetic force, the maximum load, and the motor acceleration, and uses the current to construct a relationship equation for the total heating power of the motor to be processed;

[0010] S4 takes the maximum heating power, maximum thrust fluctuation error and maximum load as constraints, and minimizes the sum of the thicknesses of the upper and lower coils as the goal. Combined with the working parameters, the thicknesses of the upper and lower coils in the horizontal thrust fluctuation error and the total heating power are solved to achieve the design of the thickness of the motor coil to be processed.

[0011] Further preferably, in step S2, the harmonic force model of the single coil is as follows:

[0012]

[0013] in, is the harmonic force of a single coil, B r is the remanent magnet strength of the permanent magnet, I is the current amplitude of a single coil, τ is the magnetic pitch of the permanent magnet array, τ m is the permanent magnet length, h m is the thickness of the permanent magnet, k is the harmonic force order and k is an odd number, l c is the effective length of the coil, w c is the effective width of the coil, b c is the coil conductor width, D is the outer diameter of the wire, h c is the coil thickness, and the coordinates of the center of mass of a single coil are (x p ,y p , z p ).

[0014] Further preferably, in step S2, the relationship between the horizontal thrust fluctuation error is as follows:

[0015]

[0016] Where n is a positive integer, and

[0017]

[0018] Where γ is the horizontal thrust fluctuation error, Δε k is the ratio of the kth order harmonic force to the first order harmonic force, τ is the magnetic pitch of the permanent magnet array, τ m is the permanent magnet length, h m is the thickness of the permanent magnet, k is the harmonic force order and k is an odd number, w c is the effective width of the coil, bc is the coil conductor strip width, H jx is the gap between the magnetic field and the coil array, h down，j is the thickness of the lower coil of the jth group, h up，i is the thickness of the upper coil of group i, and the x-axis coordinate of the center of mass of a single coil is x p .

[0019] Further preferably, in step S3, the electromagnetic force model is performed according to the following relationship:

[0020]

[0021] in, is the electromagnetic force, N is the number of coils in each coil group, B z is the horizontal magnetic flux density amplitude of the fundamental wave at z = 0 mm, l c is the effective length of the coil, w c is the effective width of the coil, b c is the coil conductor width, D is the outer diameter of the wire, τ n is the magnetic pole pitch, H jx is the gap between the magnetic field and the coil array, h down，j is the thickness of the lower coil of the jth group, h up，i is the thickness of the upper coil of group i, I X , I Y , I Z It is the current amplitude of a single coil in the coil group responsible for outputting electromagnetic force in the corresponding direction.

[0022] Further preferably, in step S3, the relationship between the electromagnetic force, the maximum load and the motor acceleration is as follows:

[0023]

[0024] in, is the electromagnetic force, M max is the maximum load of the mover in the motor to be processed, is the acceleration of the rotor in the motor to be processed.

[0025] Further preferably, in step S3, the current relationship is as follows:

[0026]

[0027] Among them, I X , I Y , I Z It is the current amplitude of a single coil in the coil group responsible for outputting electromagnetic force in the corresponding direction, M max is the maximum load of the mover in the motor to be processed, is the acceleration of the rotor in the motor to be processed, N is the number of coils in each coil group, B z is the horizontal magnetic flux density amplitude of the fundamental wave at z = 0 mm, l c is the effective length of the coil, w c is the effective width of the coil, b c is the coil conductor width, D is the outer diameter of the wire, τ n is the magnetic pole pitch, H jx is the gap between the magnetic field and the coil array, h down，j is the thickness of the lower coil of the hth group, h up，i is the thickness of the upper coil of the i-th group.

[0028] Further preferably, in step S3, the relationship of the total heating power is as follows:

[0029]

[0030] Among them, P all is the total heating power, N is the number of coils in each coil group, I X , I Y , I Z is the current amplitude of a single coil in the coil group responsible for outputting electromagnetic force in the corresponding direction, t1 is the scanning motion time within one cycle, t2 is the step scanning time within one cycle, R down is the resistance of a single lower coil, R up is the resistance of a single upper coil.

[0031] Further preferably, in step S4, the constraint condition is expressed as follows:

[0032]

[0033] Among them, γ(h up，i , h down，j ) is the relationship between the horizontal thrust fluctuation error and the upper coil and the lower coil, P all (h up，i , h down，j ) is the relationship between the total heating power and the thickness of the upper and lower coils, γ max is the maximum thrust fluctuation error, P max is the maximum heating power.

[0034] Further preferably, in step S1 , the working parameters include mover acceleration, scanning motion time and stepping motion time.

[0035] According to another aspect of the present invention, a system for designing the thickness of a coil of a fine-coarse double-layer winding magnetic levitation planar motor is provided. The system includes an actuator for executing the above-mentioned method for designing the thickness of a coil of a fine-coarse double-layer winding magnetic levitation planar motor.

[0036] In general, the above technical solutions conceived by the present invention have the following beneficial effects compared with the prior art:

[0037] 1. The method of the present invention fully utilizes the characteristics of the magnetic field to construct a relationship between the thickness of the upper and lower coils in a magnetic levitation planar motor and the heat generation power and thrust fluctuation error. Using the maximum heat generation power, maximum thrust fluctuation error, and maximum load as constraints, the method calculates the heat generation power and thrust fluctuation error to obtain the optimal thickness parameters that meet the design requirements. This method designs a magnetic levitation planar motor device with excellent heat dissipation performance and positioning accuracy. This design method is precise and comprehensive, and can significantly improve the accuracy of the motor design.

[0038] 2. The present invention provides a method for designing the coil thickness of a fine-coarse double-layer winding magnetic levitation planar motor, which selects the minimum sum of the upper coil thickness and the lower coil thickness as the optimal combination, thereby achieving the purpose of saving materials and reducing the total weight of the mover.

[0039] 3. The present invention uses the maximum heating power and the maximum thrust fluctuation error as constraints, with the aim of effectively balancing the high heating power caused by high acceleration and the low thrust fluctuation error required for high precision, thereby obtaining the optimal thickness parameters. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 This is a flow chart of a method for designing the thickness of a coil of a fine-coarse double-layer winding magnetic levitation planar motor provided by an embodiment of the present invention;

[0041] Figure 2 is a three-dimensional schematic diagram of a magnetic levitation motion workbench provided in an embodiment of the present invention;

[0042] Figure 3 is a partial cross-sectional view of a double-layer winding magnetic levitation planar motor provided by an embodiment of the present invention;

[0043] Figure 4 This is a diagram of a coil array arrangement provided by an embodiment of the present invention;

[0044] Figure 5 This is a functional relationship diagram of the total heating power versus coil thickness provided by an embodiment of the present invention.

[0045] Throughout the drawings, like reference numerals are used to denote like elements or structures, wherein:

[0046] 1- radiator, 2- upper coil winding, 3- lower coil winding, 4- coil array fixing plate, 5- permanent magnet array. DETAILED DESCRIPTION

[0047] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for the purpose of explaining the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

[0048] like Figure 1 As shown, a method and system for designing the thickness of a fine-coarse double-layer winding magnetic levitation planar motor coil includes the following steps:

[0049] S1. Determine the working mode and design indicators of the planar motor based on the application scenario of the designed magnetic levitation plane prototype;

[0050] S2. Construct a harmonic force model for a single coil of the motor to be processed The harmonic force model is used to solve the horizontal thrust fluctuation error γ of a single coil;

[0051] S3, the magnetic levitation planar motor adopts a double-layer 4×N phase coil array arrangement. The number of coils in each coil group is N. Combined with the electromagnetic force model of a single coil Perform DQ decoupling on the coil array, establish the electromagnetic force model of the coil array, and obtain the output force of the magnetic levitation motion platform The mathematical model of the upper and lower coil thickness h is obtained up，i , h down，j and heating power P all The mathematical model of h up，i =iD and h up，i <5mm, D is the outer diameter of the wire; i is the number of layers of the upper coil wire and 1<i<i max ;h down，j =jD and h down，j <10mm; j is the number of layers of the lower coil wire, and 1<j<j max ;i max and j max It is the maximum value of the number of layers of upper and lower coil wires;

[0052] S4. Determine a fixed set of values ​​for all parameters except coil thickness and i max ×j max Coil parameter group (h up，i , h down，j ), substitute each set of parameters into the following constraints:

[0053]

[0054] If the calculated result meets the design index, the coil thickness parameters of this group will be saved. If not, they will be discarded until i max ×j max After all coil parameters are calculated, the thickness of each group of data that meets the requirements is summed up, and the sum of thickness is H i，j =(i+j)D, min(H i，j ) is the optimal solution for the coil thickness parameter group.

[0055] Preferably, in step S1:

[0056] S11. Design of the working mode of the magnetic levitation planar motor includes the three-dimensional motion acceleration of the overall rotor platform Scanning motion time t1, stepping motion time t2;

[0057] S12. Design indicators include the maximum heating power P that the mover platform can withstand. max , maximum thrust fluctuation error γ max , maximum load M max ;

[0058] S13. The four coil groups on the upper layer provide gravity acceleration, and every two parallel coil groups in the lower layer coil array provide thrust acceleration in the x and y directions respectively.

[0059] Preferably, the specific steps in step S2 are:

[0060] S21. Establish a harmonic force model for a single coil. The specific formula is shown in (1):

[0061]

[0062] Among them, B r is the remanent magnet strength of the permanent magnet, I is the current amplitude of a single coil, τ is the magnetic pitch of the permanent magnet array, τ m is the permanent magnet length, h m is the thickness of the permanent magnet, k is the harmonic force order and k is an odd number, l c is the effective length of the coil, w c is the effective width of the coil, b c is the coil conductor width, D is the outer diameter of the wire, h c is the coil thickness, and the centroid coordinate of a single coil is (x p ,y p , p p );

[0063] S22, thrust fluctuation error is the ratio of harmonic force to fundamental force, the thickness of upper and lower coils h up，i , hdown，j The relationship between the horizontal thrust fluctuation error γ of the upper coil is (2):

[0064]

[0065] Among them, the ratio of any first-order harmonic force to the fundamental wave Δε k for:

[0066]

[0067] Among them, H jx is the gap between the magnetic field and the coil array, h down，j is the thickness of the lower coil of the jth group, h up，i is the thickness of the upper coil of the i-th group, and n is a positive integer.

[0068] Preferably, the specific steps in step S3 are:

[0069] S31. Perform DQ decoupling on the coil array to obtain the specific formula of coil thickness parameter and output force as shown in (4):

[0070]

[0071] in, is the electromagnetic force, N is the number of coils in each coil group, B z is the horizontal magnetic flux density amplitude of the fundamental wave at z = 0 mm, I X , I Y , I Z It is the current amplitude of a single coil in the coil group responsible for outputting electromagnetic force in the corresponding direction;

[0072] S32. Using the relationship between electromagnetic force, maximum load, and motor acceleration, the current flowing through the motor to be processed in the electromagnetic force model is solved. The specific formulas for the current flowing through the coils that drive the three directions of motion are (5), (6), and (7), respectively:

[0073]

[0074] Preferably, in step S3, the thickness of the upper and lower coils h up，i , h down，j and total heating power P all The specific relationship (8):

[0075]

[0076] Among them, R down is the resistance of the lower coil, R up is the resistance of the upper coil;

[0077] Preferably, in step S3, the coil array adopts DQ decoupling, and the center distance a between two adjacent coils in a group of coils should be

[0078] The present invention will be further described below with reference to specific embodiments.

[0079] like Figures 1 to 5 As shown in the figure, a design method for the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor is used as an example. Figure 2 Shown and Figure 3 As shown, the upper coil winding 2 is close to the radiator 1, and the lower coil winding 3 is close to the permanent magnet array 5. The upper coil winding 2 and the lower coil winding 3 are placed in the coil array fixing plate 4, and the upper surface of the coil fixing plate 4 is in contact with the radiator 1.

[0080] The specific implementation steps are as follows:

[0081] (1) Determine the working mode and design indicators of the designed magnetic levitation planar motor:

[0082] ① The working mode design of the magnetic levitation planar motor includes the three-dimensional motion acceleration of the overall mover platform (3g, 3g, g) m / s 2 , g is weight acceleration, scanning motion time t1 is 0.04s, and stepping motion time t2 is 0.08s;

[0083] ② Design indicators include the maximum heat power P that the mover platform can withstand max 400W, maximum thrust fluctuation error γ max 0.03%, maximum load M max is 5kg.

[0084] (2) Establish the harmonic force model of the coil array and obtain the output force of the magnetic levitation motion platform Mathematical model:

[0085] ①Establish a harmonic force model for a single coil;

[0086] ② By Figure 4 The coil array arrangement shown in the figure, in this embodiment, N is 3, and the center distance between two adjacent coils in a group of coils is Then the force equation after DQ decoupling is (9):

[0087]

[0088] From the previous step, we can know the output force in all directions The size of is known, Then there is

[0089]

[0090] (3) Establish the relationship between the thickness of the upper and lower coils and the heating power and thrust fluctuation error:

[0091] ① The high-precision control of the magnetic levitation planar motor is mainly performed by the upper coil. Therefore, the thrust fluctuation error caused by the first 21 harmonics when the upper coil outputs force is mainly calculated, as shown in formula (13):

[0092]

[0093] ② From expressions (10), (11), and (12), we can know the relationship between the thickness of the upper and lower coils and the input current amplitude. Therefore, the total heating power formula (14) is obtained as follows:

[0094]

[0095] Where ρ is the resistivity of copper and d is the inside diameter of the wire.

[0096] (4) Obtain the optimal solution of coil thickness parameters after thrust fluctuation error and heating power constraints:

[0097] ① All the required parameter values ​​are shown in Table 1. Substitute the parameters except the coil thickness into formula (13), and then max ×j max The thickness parameters of each set of coils are substituted into the relationship, and the thrust fluctuation error corresponding to each set of thickness data is calculated as shown in Table 2. When the thickness of the upper and lower coils increases, the thrust fluctuation error decreases;

[0098] Table 1

[0099]

[0100]

[0101] Table 2 (%)

[0102]

[0103]

[0104] ② Change i max ×j max Substituting the group parameters into formula (14), the result is as follows Figure 5 As shown in the figure, for different upper coil thickness values, as the thickness of the lower coil changes, the total heating power first decreases and then increases. For the same lower coil thickness, the total heating power decreases as the thickness of the upper coil increases. The calculation results can be used to determine whether the parameter group meets the requirements.

[0105] ③The coil thickness parameter groups that meet the design indicators include (8, 15), (9, 15), (10, 14), (10, 15), (10, 16), (11, 14), (11, 15), (11, 16), (11, 16), (12, 15), (12, 16), and (12, 16). The optimal parameter data group selected is (8, 15), which can meet the design indicators while reducing consumables, has the thinnest thickness, and is conducive to heat dissipation.

[0106] It will be easily understood by those skilled in the art that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for designing the thickness of a fine-coarse double-layer winding magnetic levitation planar motor coil, characterized in that: The method comprises the following steps: S1 determines the working parameters of the motor to be processed and the maximum heating power, maximum thrust fluctuation error and maximum load that the mover platform can withstand according to the working scenario of the motor to be processed; S2 constructs a harmonic force model of a single coil of the motor to be processed, and uses the harmonic force model to solve the relationship between the horizontal thrust fluctuation error and the thickness of the upper coil and the thickness of the lower coil; S3 decouples the entire coil of the motor to be processed to obtain an electromagnetic force model regarding the relationship between the thickness of the upper coil and the lower coil and the electromagnetic force, and solves the current of the motor to be processed in the electromagnetic force model based on the relationship between the electromagnetic force, the maximum load, and the motor acceleration, and uses the current to construct a relationship equation for the total heating power of the motor to be processed; S4 takes the maximum heating power, maximum thrust fluctuation error and maximum load as constraints, and minimizes the sum of the thicknesses of the upper and lower coils as the goal. Combined with the working parameters, the thicknesses of the upper and lower coils in the horizontal thrust fluctuation error and the total heating power are solved to achieve the design of the thickness of the motor coil to be processed.

2. The method for designing the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor according to claim 1, characterized in that: In step S2, the harmonic force model of the single coil is as follows: in, is the harmonic force of a single coil, B r is the remanent magnet strength of the permanent magnet, I is the current amplitude of a single coil, τ is the magnetic pitch of the permanent magnet array, τ m is the permanent magnet length, h m is the thickness of the permanent magnet, k is the harmonic force order and k is an odd number, l c is the effective length of the coil, w c is the effective width of the coil, b c is the coil conductor width, D is the outer diameter of the wire, h c is the coil thickness, and the coordinates of the center of mass of a single coil are (x p ,y p , z p ).

3. The method for designing the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor according to claim 1 or 2, characterized in that: In step S2, the horizontal thrust fluctuation error is expressed as follows: Where n is a positive integer, and Where γ is the horizontal thrust fluctuation error, Δε k is the ratio of the kth order harmonic force to the first order harmonic force, τ is the magnetic pitch of the permanent magnet array, τ m is the permanent magnet length, h m is the thickness of the permanent magnet, k is the harmonic force order and k is an odd number, w c is the effective width of the coil, b c is the coil conductor strip width, H jx is the gap between the magnetic field and the coil array, h down，j is the thickness of the lower coil of the jth group, h up，i is the thickness of the upper coil of group i, and the x-axis coordinate of the center of mass of a single coil is x p .

4. The method for designing the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor according to claim 1 or 2, characterized in that: In step S3, the electromagnetic force model is performed according to the following relationship: in, is the electromagnetic force, N is the number of coils in each coil group, B z is the horizontal magnetic flux density amplitude of the fundamental wave at z = 0 mm, l c is the effective length of the coil, w c is the effective width of the coil, b c is the coil conductor strip width, D is the wire outer diameter, τ n is the magnetic pole pitch, H jx is the gap between the magnetic field and the coil array, h down，j is the thickness of the lower coil of the jth group, h up，i is the thickness of the upper coil of group i, I X , I Y , I Z It is the current amplitude of a single coil in the coil group responsible for outputting electromagnetic force in the corresponding direction.

5. The method for designing the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor according to claim 1 or 2, characterized in that: In step S3, the relationship between the electromagnetic force, the maximum load and the motor acceleration is as follows: in, is the electromagnetic force, M max is the maximum load of the mover in the motor to be processed, is the acceleration of the rotor in the motor to be processed.

6. The method for designing the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor according to claim 4, characterized in that: In step S3, the current relationship is as follows: Among them, I X , I Y , I Z It is the current amplitude of a single coil in the coil group responsible for outputting electromagnetic force in the corresponding direction, M max is the maximum load of the mover in the motor to be processed, is the acceleration of the rotor in the motor to be processed, N is the number of coils in each coil group, B z is the horizontal magnetic flux density amplitude of the fundamental wave at z = 0 mm, l c is the effective length of the coil, w c is the effective width of the coil, b c is the coil conductor width, D is the outer diameter of the wire, τ n is the magnetic pole pitch, H jx is the gap between the magnetic field and the coil array, h down，j is the thickness of the lower coil of the jth group, h up，i is the thickness of the upper coil of the i-th group.

7. The method for designing the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor according to claim 1 or 2, characterized in that: In step S3, the total heating power is expressed as follows: Among them, P all is the total heating power, N is the number of coils in each coil group, I X , I Y , I Z is the current amplitude of a single coil in the coil group responsible for outputting electromagnetic force in the corresponding direction, t1 is the scanning motion time within one cycle, t2 is the step scanning time within one cycle, R down is the resistance of a single lower coil, R up is the resistance of a single upper coil.

8. The method for designing the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor according to claim 1 or 2, characterized in that: In step S4, the constraint condition is expressed as follows: Among them, γ(h up，i , h down，j ) is the relationship between the horizontal thrust fluctuation error and the upper coil and the lower coil, P all (h up，i , h down，j ) is the relationship between the total heating power and the thickness of the upper and lower coils, γ max is the maximum thrust fluctuation error, P max is the maximum heating power.

9. The method for designing the thickness of the coil of a fine-coarse double-layer winding magnetic levitation planar motor according to claim 1, characterized in that: In step S1 , the working parameters include mover acceleration, scanning motion time, and stepping motion time.

10. A design system for the thickness of a fine-coarse double-layer winding magnetic levitation planar motor coil, characterized in that: The system comprises an actuator, which is used to execute the method for designing the thickness of the coil of the fine-coarse double-layer winding magnetic levitation planar motor according to any one of claims 1 to 9.

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