Automatic locking mechanism for a crystal boat box transport trolley

Abstract

The present invention discloses an automatic locking mechanism for a wafer boat box transport trolley. A pin guide plate is positioned and mounted on an intermediate plate via a guide plate mounting post. Its function is to contact a positioning pin and guide the wafer boat box transport trolley, thereby achieving left-right positioning of the wafer boat box transport trolley. A locking block is mounted on a locking seat via a hinge pin and connected to a pull rod. The pull rod can rotate around a hinge under the drag of a pedal link, forming a double rocker linkage mechanism. A pedal rod connected to the pedal link can be manually applied with a downward force to achieve movement of the mechanism, which is ultimately reset under the action of the locking block spring and tension spring. The present invention manually pushes the trolley, and the automatic locking mechanism achieves accurate positioning and automatic locking in accordance with the SEMI E83 standard interface through multi-directional limiting of the guide slot, spring, and locking block. The mechanism can also be easily unlocked, thereby determining the relative position of the trolley and the wafer loading structure.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer boat box transportation, and in particular to an automatic locking mechanism of a wafer boat box transportation trolley. Background Art

[0002] In semiconductor wafer manufacturing, wafers are typically transported in cassettes. For example, a 300mm cassette can hold 25 wafers and weigh over 7 kilograms when fully loaded.

[0003] Frequent handling of wafer cassettes of this size and weight is currently done manually. Operators typically use a four-wheeled cart to move the wafer cassettes from the production platform to the cart, which is then transported. This cart is a conventional pushcart and lacks a locking mechanism to the production platform. This process can easily lead to bumps and vibrations, resulting in the scrapping of wafer products. Therefore, an automatic locking mechanism for a wafer cassette transport cart has not yet been reported. Summary of the Invention

[0004] In order to solve the above technical problems, the present invention aims to provide an automatic locking mechanism for a wafer boat box transport trolley; the specific technical solution is as follows:

[0005] The cam is provided with a plurality of support shafts, a plurality of support shafts and a plurality of support shafts, and a plurality of support shafts are provided between the cam and the support shaft. A circular hole is provided at the front end of the pedal connecting rod, which is connected to the pull rod through a hinge rod; a stop block is provided at the rear end of the pedal connecting rod, and its tail is connected to the foot rod through a screw; locking seats are provided on both sides of the pull rod, and the locking blocks are installed on the locking seats through hinge pins; the locking blocks are connected to the pull rod through equal height bolts; the spring pillar passes through the center of the connecting rod and is connected to the tension spring; the adjusting bolt passes through the locking seat and is arranged on the locking block, wherein a locking block spring is provided on the adjusting bolt between the locking block and the locking seat; the linear bearing is connected to the lower end surface of the middle plate on both sides of the vertical plate by screws, and is symmetrically arranged; a top shaft is installed on one end of the linear bearing, and a nylon bump block is installed on the other end, the top shaft spring is arranged between the nylon bump block and the linear bearing, and the nylon pad is arranged between the top shaft spring and the linear bearing.

[0006] The automatic locking mechanism of the wafer boat box transport trolley has a preferred solution in which the size of the nylon bumper is set according to the SEMI E83 standard interface.

[0007] The automatic locking mechanism of the wafer boat box transport trolley is preferably configured such that the locking block is L-shaped, and a guide slope is provided at the lower front end thereof, for being locked into the SEMI E83 interface positioning plate under the action of the locking block spring after transitioning through the guide slope.

[0008] The automatic locking mechanism of the wafer boat box transport trolley has a preferred solution in which the pull rod can rotate around the hinge rod under the drag of the pedal connecting rod to form a double rocker connecting rod mechanism.

[0009] The working principle of an automatic locking mechanism for a wafer cassette transport trolley is as follows: a pin guide plate is positioned and mounted on the middle plate via a guide plate mounting post. Its function is to contact the positioning pin and guide the wafer cassette transport trolley, achieving left-right positioning of the trolley. A locking block is mounted on the locking seat via a hinge pin and connected to a pull rod. The pull rod rotates about a hinge under the pull of a foot-operated link, forming a double-rocker linkage mechanism. A foot pedal connected to the foot-operated link can manually apply downward force to the mechanism, ultimately resetting under the action of the locking block spring and the mechanism's gravity. When the locking block contacts the SEMI E83 interface positioning plate, it rotates about the hinge pin, transitions through the guide ramp, and then engages the SEMI E83 interface positioning plate slot under the action of a spring. Simultaneously, a nylon impact block, guided by the linear bearing and the reaction force of the top shaft spring, locks the locking block to the SEMI E83 interface positioning plate, achieving forward and backward positioning of the wafer cassette transport trolley. In this way, the wafer box transport trolley is locked in all four horizontal directions. It can be unlocked manually by applying downward force on the pedal.

[0010] The advantages of the present invention are: the present invention does not require manual repeated adjustment of the position of the crystal boat box transport trolley, and it can be locked by easily pushing it in, thereby reducing manual labor intensity and improving work efficiency; the front and rear position positioning is achieved through the joint action of a spring and a locking block, and when unlocked, the unlocking block is lifted, and the trolley automatically disengages from the E83 interface under the action of the spring, and the operation is simple; the locking mechanism can realize rapid locking and rapid unlocking of the position of the crystal boat box transport trolley to avoid collision of the crystal boat box. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 A is a schematic structural diagram of an automatic locking mechanism for a wafer box transport trolley;

[0012] Figure 2 FIG. b is a structural schematic diagram of an automatic locking mechanism of a wafer box transport trolley;

[0013] Figure 3FIG3 is a schematic structural diagram of an automatic locking mechanism of a wafer box transport trolley; FIG4 is a schematic structural diagram of an automatic locking mechanism of a wafer box transport trolley;

[0014] Figure 4 This is a schematic diagram of the automatic locking mechanism and the trolley body frame installation structure of a wafer box transport trolley;

[0015] Figure 5 It is a schematic diagram of the connection structure between the locking block and the locking seat.

[0016] In the figure: In the figure, 1 is a mounting plate, 2 is a vertical plate, 3 is an intermediate plate, 4 is a pedal rod, 5 is a pull rod, 6 is a locking seat, 7 is a locking block, 8 is a pin guide plate, 9 is a top shaft, 10 is a nylon pad, 11 is a nylon bumper, 12 is a connecting rod, 13 is a support shaft, 14 is a stop block, 15 is a pedal connecting rod, 16 is a locking block spring, 17 is a linear bearing, 18 is a top shaft spring, 19 is a spring support, 20 is a tension spring, 21 is a guide plate mounting column, 22 is an equal height bolt, 123 is an adjusting bolt, 24 is a hinge rod, 25 is a hinge pin, and 26 is a guide inclined plane. DETAILED DESCRIPTION

[0017] The invention will be further described below with reference to the accompanying drawings, but it should not be understood that the scope of the present invention is limited to the following embodiments. Without departing from the above-mentioned ideas of the present invention, various substitutions and modifications can be made according to common technical knowledge and customary means in the art, and all of these should be included within the scope of protection of the present invention.

[0018] like Figure 1-5 As shown, an automatic locking mechanism of a crystal boat box transport trolley includes a mounting plate 1, a vertical plate 2, a middle plate 3, a pedal rod 4, a pull rod 5, a locking seat 6, a locking block 7, a pin guide plate 8, a top shaft 9, a nylon pad 10, a nylon collision block 11, a connecting rod 12, a support shaft 13, a stop block 14, a pedal connecting rod 15, a locking block spring 16, a linear bearing 17, a top shaft spring 18, a spring support 19, a tension spring 20, a guide plate mounting column 21, a height bolt 22, an adjustment bolt 23, a hinge rod 24 and a hinge pin 25; the middle plate 3 is provided with a plurality of pin holes and mounting holes; the pin guide plate 8 is positioned and mounted on the lower end surface of the middle plate 3 through the guide plate mounting column 21; the front end of the pin guide plate 8 is provided with a V-shaped opening, whose function is to contact the positioning pin and guide the crystal boat box transport trolley to realize the left and right positioning of the crystal boat box transport trolley.

[0019] The upper end of the middle plate 3 is fixedly connected to the mounting plate 1 through two vertical plates 2, and the mounting plate 1 is mounted on the bottom of the transport trolley frame by bolts.

[0020] A plurality of support shafts 13 are distributed between the two pedal links 15, the front end of the pedal link 15 is tilted downward, and the rear end is Z-shaped; a connecting rod 12 is installed between the tilted front parts of the two pedal links 15 by bolts; a spring pillar 19 is provided at the center of the connecting rod 12, and the spring pillar 19 is connected to one end of the tension spring 20; the other end of the tension spring 20 is connected to the middle plate 3; a stop block 14 is provided at the rear end of the pedal link 15, and the stop block 14 stops after colliding with the buffer pad on the trolley frame, and the Z-shaped rear end of the pedal link 15 is connected to the pedal rod 4 by screws; a circular hole is provided at the front end of the pedal link 15, which is axially connected to the two pull rods 5 through a hinge rod 24; an axial hole 27 is provided at the rear end of the pedal link 15, which is axially connected to the transport trolley frame through a pin.

[0021] The front end of the pull rod 5 is axially connected to the front end of the locking block 7 through an equal height bolt 22; the locking seat 6 is installed on the middle plate 3 through bolts, and the rear end of the locking block 7 is installed on the locking seat 6 through a hinge pin 25; the locking seat 6 is arranged on both sides of the pull rod 5.

[0022] An adjustment bolt 23 extends through the locking block 7 and passes through the locking seat 6. A locking block spring 16 is installed on the adjustment bolt 23 between the locking block 7 and the locking seat. The height of the locking block 7 can be adjusted using the adjustment bolt 23. The locking block 7 is L-shaped, with a guide slope 26 at its front lower end. After passing through the guide slope 26, the locking block spring 16 engages the slot in the E83 interface positioning plate.

[0023] The two linear bearings 17 are connected to the bottom of the middle plate 3 by screws and are symmetrically arranged on the outside of the locking block 7; the top shaft 9 is installed at the rear end of the linear bearing 17, and a nylon collision block 11 is installed on the output shaft of the linear bearing 17. A nylon pad 10 and a top shaft spring 18 are sequentially sleeved on the output shaft of the linear bearing 17, and the top shaft spring 18 is in contact with the nylon collision block 11.

[0024] The size of the nylon collision block 11 is set according to the SEMI E83 standard interface.

[0025] The pull rod 5 can rotate around the hinge rod 24 under the drag of the pedal link 15 to form a double rocker link mechanism. Example

[0026] The working process of an automatic locking mechanism for a wafer cassette transport trolley is described. A pin guide plate 8 is positioned and mounted on the intermediate plate 3 via a guide plate mounting post 21. Its function is to contact the positioning pin and guide the wafer cassette transport trolley, achieving left-right positioning of the trolley. The rear end of the locking block 7 is axially connected to the locking seat 6 via a hinge pin 25. The front end of the locking block 7 is axially connected to the pull rod 5. The pull rod 5 can rotate about the hinge rod 24 under the pull of the pedal link 15. A downward force can be applied manually via the pedal link 4, causing the axial hole 27 at the rear end of the pedal link 15 to move about the pin. The front end of the pedal link 15 pulls the locking block 7 upward, unlocking the trolley. After the downward force of the pedal link 4 is released, the locking block 7 is reset downward by the elastic force of the locking block spring 16 and the tension of the tension spring 20. When the locking block 7 contacts the SEMI E83 interface positioning plate under the action of thrust, it rotates around the hinge pin 25. After transitioning through the guide ramp, it is engaged by the spring into the slot of the SEMI E83 interface positioning plate. Simultaneously, the nylon bumper 11 is inserted into the circular groove of the SEMI E83 interface positioning plate. Under the guidance of the linear bearing 17 and the reaction force of the top shaft spring 18, the locking block 7 and the E83 interface positioning plate are locked, and the nylon bumper 11 and the E83 interface positioning plate are locked, achieving dual locking, thereby achieving both horizontal and vertical positioning locks. This locks and positions the wafer cassette transport trolley. The wafer cassette transport trolley is locked in both horizontal directions. It can be unlocked manually by applying downward force on the foot pedal 4.

Claims

1. An automatic locking mechanism for a wafer boat box transport trolley, characterized by: It includes a mounting plate (1), a vertical plate (2), an intermediate plate (3), a pedal rod (4), a pull rod (5), a locking seat (6), a locking block (7), a pin guide plate (8), a top shaft (9), a nylon pad (10), a nylon collision block (11), a connecting rod (12), a support shaft (13), a stop block (14), a pedal connecting rod (15), a locking block spring (16), a linear bearing (17), a top shaft spring (18), a spring support (19), a tension spring (20), a guide plate mounting column (21), a height bolt (22), an adjustment bolt (23), a hinge rod (24) and a hinge pin (25); The middle plate (3) is provided with a plurality of pin holes and mounting holes; The pin guide plate (8) is positioned and installed by passing through the pin hole on the lower end surface of the intermediate plate (3) via the guide plate installation column (21); The upper end of the intermediate plate (3) is connected to the mounting plate (1) by arranging two vertical plates (2), and the mounting plate (1) is mounted on the bottom of the transport trolley frame by bolts; A plurality of support shafts (13) are distributed between the pedal connecting rods (15), the front end of the pedal connecting rods (15) is tilted downward, and the rear end is in a Z shape; A connecting rod (12) is provided at the front end of the pedal connecting rod (15); The front end of the pedal connecting rod (15) is provided with a circular hole and is connected to the pull rod (5) via a hinge rod (24); The rear end of the pedal connecting rod is provided with a stop block (14), the tail end of which is connected to the pedal rod (4) via a screw; Locking seats (6) are provided on both sides of the pull rod (5), and the locking blocks (7) are mounted on the locking seats (6) via hinge pins (25); The locking block (7) is connected to the pull rod (5) via equal height bolts (22); The spring support (19) passes through the center of the connecting rod (12) and is connected to one end of the tension spring (20); the other end of the tension spring (20) is connected to the middle plate (3); The adjusting bolt (23) passes through the locking seat (6) and is arranged on the locking block (7), wherein a locking block spring (16) is provided on the adjusting bolt between the locking block (7) and the locking seat; The linear bearing (17) is connected to the lower end surface of the middle plate on both sides of the vertical plate by screws and is symmetrically arranged; a top shaft (9) is installed at one end of the linear bearing (17), and a nylon collision block (11) is installed at the other end, a top shaft spring (18) is arranged between the nylon collision block (11) and the linear bearing (17), and a nylon pad (10) is arranged between the top shaft spring (18) and the linear bearing (17); The locking block (7) is L-shaped, and a guide slope (26) is provided at the lower end of the front side. When the locking block (7) contacts the SEMI E83 interface positioning plate under the action of thrust, it rotates around the hinge pin (25), and after transitioning through the guide slope, it is clamped into the clamping groove of the SEMI E83 interface positioning plate under the action of the locking block spring. At the same time, the nylon collision block (11) is also inserted into the circular groove of the SEMI E83 interface positioning plate, thereby realizing horizontal and vertical positioning locking.

2. The automatic locking mechanism of the wafer boat box transport trolley according to claim 1, characterized in that: The pull rod (5) can rotate around the hinge rod (24) under the drag of the pedal connecting rod (15), forming a double rocker connecting rod mechanism.

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